JP2006258697A5 - - Google Patents

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Publication number
JP2006258697A5
JP2006258697A5 JP2005078916A JP2005078916A JP2006258697A5 JP 2006258697 A5 JP2006258697 A5 JP 2006258697A5 JP 2005078916 A JP2005078916 A JP 2005078916A JP 2005078916 A JP2005078916 A JP 2005078916A JP 2006258697 A5 JP2006258697 A5 JP 2006258697A5
Authority
JP
Japan
Prior art keywords
substrate
inspection apparatus
scattering member
light
projector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005078916A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006258697A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005078916A priority Critical patent/JP2006258697A/ja
Priority claimed from JP2005078916A external-priority patent/JP2006258697A/ja
Publication of JP2006258697A publication Critical patent/JP2006258697A/ja
Publication of JP2006258697A5 publication Critical patent/JP2006258697A5/ja
Pending legal-status Critical Current

Links

JP2005078916A 2005-03-18 2005-03-18 基板検査装置 Pending JP2006258697A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005078916A JP2006258697A (ja) 2005-03-18 2005-03-18 基板検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005078916A JP2006258697A (ja) 2005-03-18 2005-03-18 基板検査装置

Publications (2)

Publication Number Publication Date
JP2006258697A JP2006258697A (ja) 2006-09-28
JP2006258697A5 true JP2006258697A5 (enExample) 2008-05-01

Family

ID=37098116

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005078916A Pending JP2006258697A (ja) 2005-03-18 2005-03-18 基板検査装置

Country Status (1)

Country Link
JP (1) JP2006258697A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5006025B2 (ja) * 2006-12-27 2012-08-22 オリンパス株式会社 外観検査用投光装置
TWI497061B (zh) * 2009-04-30 2015-08-21 Corning Inc 用以偵測玻璃板中的缺陷之方法及設備
KR101217173B1 (ko) * 2010-04-26 2012-12-31 엘아이지에이디피 주식회사 기판검사장치 및 기판검사방법

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03102562A (ja) * 1989-09-18 1991-04-26 Fujitsu Ltd 設計問題並列処理方式
JP4182745B2 (ja) * 2002-12-17 2008-11-19 住友化学株式会社 目視検査台
JP4365603B2 (ja) * 2003-03-24 2009-11-18 オリンパス株式会社 基板検査装置及び基板検査方法

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