JP2006245315A - Manufacturing method of lid with window glass - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of inexpensively and easily manufacturing a lid with a window glass including a spherical window. <P>SOLUTION: The manufacturing method includes a window glass welding step of welding a window glass material to a lid body by providing the window glass material 4 in the window glass mounting hole 2 of the lid body 1 for heat treatment; and a window glass shaping step of keeping a pressure in a space 12 on one of surfaces of the window glass material equal to or higher than that in a space on the other side, and performing heat treatment at a lower temperature than that for the window glass welding step, thereby finishing the material as the window glass 3 with its surface conditions and thickness regulated. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a lid with a window glass used for sealing an optical semiconductor to form an airtight package.

  As an optical semiconductor device in which an optical semiconductor element such as a laser diode is configured in an airtight package, a structure in which an optical semiconductor element is mounted on a base and a lens cap is sealed on the base and the optical semiconductor element is sealed is known. ing. An example of a lens cap used in such an optical semiconductor device is shown in FIG.

  In FIG. 4, the cap body 101 has a cylindrical shape, and a lens mounting hole 102 is provided at the center of the top. A glass lens 103 is provided by heating and melting a lens material into the lens mounting hole 102 and bonding the lens material into a predetermined curved surface shape. As described above, the glass lens 103 is attached to the lens attachment hole 102 in an airtight manner.

  FIGS. 5A and 5B show a case where the lens cap shown in FIG. 4 is manufactured by the manufacturing method disclosed in Patent Document 1, for example. According to this manufacturing method, the lid body and the lens material are placed in a jig and then heated, and the lens material is heated and melted to be molded into a predetermined lens shape and welded in an airtight state.

  That is, as shown in FIG. 5A, a cylindrical cap body 101 having a lens mounting hole 102 at the top and a lens material 104 are placed in a carbon graphite jig 105. Then, the lens material 104 is heated and melted to form the lens material 104 into a predetermined curved shape as shown in FIG. At the same time, the lens material 104 is air-tightly welded to the lens mounting hole 102 to obtain a state in which the lens 103 is mounted on the cap body 101.

Although not shown, the oxide film previously provided for welding the lens material 104 on the surface of the cap body 101 is removed by chemical polishing. Next, after plating the cap body 101, heat treatment for removing scratches and fogging on the surface of the lens is appropriately performed in a non-oxidizing atmosphere to make the lens 103 transparent.
JP 2003-258352 A

  In the conventional configuration described above, the lens material softening point (the lens material is hung in a specific furnace with a uniform diameter and fixed when heat treatment is performed to remove the scratches and fogging of the lens surface and make it transparent. When the temperature is increased at a speed, the heat treatment is performed at a temperature at which the speed at which the material is extended by its own weight reaches a specific value. Therefore, the surface tension due to the softening of the lens material is generated not a little with the welded portion as a fulcrum, and deforms from a desired lens shape. In order to obtain a desired lens shape with high accuracy, it has been supported by molding in a shape predicted to be deformed in advance or by strict temperature control.

  However, in the case where the lens 3 has a spherical cavity shape as shown in FIG. 1, the surface tension is largely different from the shape formed according to the surface tension with reference to the welded portion as shown in FIG. 5B. Therefore, it is difficult to form a lens having a spherical cavity with a uniform lens material thickness.

  An object of this invention is to provide the manufacturing method which can produce the cover body with a window glass provided with the window glass which has a spherical shape cheaply and easily.

  The manufacturing method of the present invention is a method for manufacturing a lid with a window glass in which a window glass having a spherical shape is hermetically mounted in a window glass mounting hole provided in the lid body, and the window glass mounting hole of the lid body has a manufacturing method. A window glass welding process for welding the window glass material to the lid body by arranging the window glass material and performing heat treatment, and pressure in the space on one side of the window glass material, the other surface Is maintained at a pressure equal to or higher than the pressure in the space on the side of the glass, and is heat-treated at a temperature lower than the window glass welding step, thereby adjusting the surface state and thickness of the window glass material to complete the window glass. And a window glass shaping step.

  According to the manufacturing method of the present invention, the window glass having a spherical surface in which the thickness of the window glass material is uniform, with the gas trapped in the cavity controlled by the surface tension that is contracted by the heating during the permeation. The attached lid can be obtained inexpensively with a simple manufacturing apparatus.

  In the method for manufacturing a lid with a window glass according to the present invention, in the window glass welding step, the window glass material is welded to the lid body, and the window glass material is either inward or outward with respect to the lid body. It has a curved shape that is convex on either side, and is preformed into a shape having a cavity on the back of the convex curved surface, and in the window glass shaping step, the interior of the window glass material on the cavity side The heat treatment can be carried out while maintaining the pressure equal to or higher than the pressure on the convex outer surface side.

  Further, in the window glass welding step, the window glass material having a flat shape is welded to the lid body, and in the window glass shaping step, the lid body is arranged so that both surfaces of the window glass material are directed vertically. And it can implement so that the pressure in the one surface side of the said window glass raw material may be hold | maintained more than the pressure of the other surface side, and the said heat processing may be performed.

  In the window glass shaping step in the above manufacturing method, the hollow portion of the window glass material is covered, a lid jig is contacted to form a sealed space, and the heat treatment is performed to reduce the internal pressure of the sealed space. It is preferable to keep the pressure equal to or higher than the pressure on the convex outer surface side of the window glass material.

  Thereby, the hollow part of the window glass material can be easily heat-treated and the internal pressure of the sealed space can be increased.

  Moreover, it is preferable to perform the said window glass welding process so that the volume in the said preliminary | backup shape of the said cavity part which the said window glass raw material forms becomes equivalent to the volume after the said window glass shaping process.

  Embodiments of the present invention will be specifically described below with reference to the drawings.

  FIG. 1 is a perspective cross-sectional view showing a lid with a window glass manufactured by the manufacturing method according to the embodiment of the present invention. In FIG. 1, a lid body 1 is made of metal such as Kovar and is cylindrical, and a window glass mounting hole 2 is provided at the center of the top. The window glass mounting hole 2 is closed, and the window glass 3 is mounted. The window glass 3 forms a spherical surface that is convex outward from the window glass mounting hole 2 together with the outer surface 3a and the inner surface 3b. That is, the window glass 3 is curved so that the apex is positioned outside the window glass mounting hole 2 on the cylindrical axis of the lid body 1, and the thickness thereof is substantially uniform.

  2A to 2C are cross-sectional views showing the steps of the method for manufacturing the lid with window glass shown in FIG. 1 along the flow.

  First, as shown in the window glass welding step of FIG. 2A, a cylindrical lid body 1 having a window glass mounting hole 2 at the top and a window glass material 4 are combined with an inner surface forming jig 5 made of carbon graphite, 1 It arrange | positions in the space formed with the trunk | drum jig | tool 6 and the outer surface formation jig | tool 7. FIG. And it heat-processes at 1000 degreeC by the method similar to the past in a non-oxidizing atmosphere, and while window glass raw material 4 is preformed, it welds to the front-end | tip peripheral part of the lid body 1. FIG. By this preliminary molding, the window glass material 4 is molded into a curved shape that curves outward from the lid body 1. The tip outer peripheral surface 5a of the inner surface forming jig 5 is a convex surface forming a substantially spherical surface, and the inner peripheral surface 7a of the outer surface forming jig 7 is a concave surface forming a substantially spherical surface.

  The shape preformed by the inner surface forming jig 5 and the outer surface forming jig 7 may not be a desired spherical shape, but the volume of the cavity portion formed at the tip of the window glass material 4 from the broken line 8 is It is desirable to set it to be equal to the volume when a desired spherical shape is formed. The arrangement of the inner surface forming jig 5, the first body jig 6, and the outer surface forming jig 7 may be arranged upside down with respect to the state shown in FIG.

  Next, the lid body 1 to which the window glass material 4 is welded is taken out from the jigs 5 to 7, and as shown in FIG. 2B, the lid jig 9, the second trunk jig 10, and the tip jig 11. The window glass shaping process is performed by placing the film in the space formed by the above. The front end 9a of the lid jig 9 is flat and is inserted into the inner cavity of the lid body 1 so as to contain the cavity 12 of the preformed window glass material 4. A moderately sized space is formed between the outer peripheral surface of the window glass material 4 and the inner surfaces of the second trunk jig 10 and the tip jig 11. The lid jig 9 holding the lid body 1, the second trunk jig 10, and the distal end portion in a state where the gas is sealed in the hollow portion 12 of the window glass material 4 by being sealed by the distal end 9 a of the lid jig 9. The jig 11 is placed in the hermetically sealed container 13 and heat-treated at a temperature lower than that of the preforming step, for example, 800 ° C. in a non-oxidizing atmosphere.

  As a result, as shown in FIG. 2C, a window glass 3 having a substantially uniform thickness curved outward is formed so that the apex is positioned on the cylindrical axis of the lid body 1 outside the window glass mounting hole 2. Is done. The operation is as follows.

  In other words, the surface area of the window glass material 4 tends to be reduced due to the softening surface tension of the window glass material 4 during heating, and a force acts to shrink the cavity 12 inward. On the other hand, the peripheral edge portion of the tip presses the contact portion with the window glass material 4 due to its own weight, and the window glass material 4 adapts to the shape of the peripheral edge portion of the lid jig 9 together with the softening. Therefore, the airtightness of the cavity 12 is improved, and the gas is sealed inside. If the temperature is raised in a state where the gas is sealed, the surface tension of the window glass material 4 is extremely small compared to the expansion pressure of the gas, so that the cavity 12 swells, but the outer periphery of the spherical convex surface of the window glass material 4 Since the gas in the space also expands and has the same pressure as the cavity 12, the expansion of the window glass material 4 is suppressed.

  That is, the shape is corrected to a spherical cavity by the action of keeping the pressure and volume of the cavity 12 and the space around the outer surface of the window glass material 4 equal by heating and the softened surface tension of the window glass material 4. At the same time, the surface state of the window glass material 4 is made transparent from the rubbed glass material, and the window glass 3 having a uniform thickness can be obtained.

  In order to effectively obtain the above-described action, the internal pressure on the cavity 12 side of the window glass material 4 is kept equal to or higher than the pressure in the space around the outer surface, that is, the pressure in the sealed container 13. Set as follows.

  In addition, in this Embodiment, although the window glass 3 was shown about the case where it forms in the spherical surface which became convex shape toward the outward from the window glass mounting hole 2, the window glass 3 is shown from the window glass mounting hole 2. Even when the window glass material 4 is formed into a spherical shape that is convex toward the inside, in other words, when the window glass material 4 is preformed into a spherical shape that is recessed toward the inside of the lid body 1, The manufacturing method of the invention can be applied. In that case, in the heat treatment for adjusting the curved surface shape and surface state of the window glass material 4, the lid jig 9 is brought into contact with the spherical surface peripheral portion of the window glass material 4 from the outside of the lid body 1. I do.

  In the present embodiment, the case where a cylindrical metal is used as the lid body for forming the airtight package has been described as an example. A lid body using a cylindrical metal is widely used because it can be sealed by inexpensive resistance welding to a base on which an optical semiconductor element is mounted. However, the present invention is not limited to this, and can be similarly applied even when other types of lid bodies are used. For example, even in the case of a lid type suitable for a surface mounting package, a spherical cavity is formed in a square lid 14 as shown in FIG. 3 by performing heat treatment with the same arrangement as described above. A lid with a window glass to which a window glass material is welded can be obtained. Further, if necessary, the present invention can also be applied to a cover with a window glass corresponding to integration, in which a plurality of spherical window glasses are mounted on one square lid.

  In the above-described embodiment, the window glass is preformed in the window glass welding step shown in FIG. 2A. However, it is not always necessary to include the window glass preform. For example, in the window glass welding process, a flat window glass material may be simply welded to the lid body. In that case, in the window glass shaping step, as in the steps shown in FIGS. 2B and 2C, the lid body is arranged so that both surfaces of the window glass material face in the vertical direction, and the pressure on one side of the window glass material is Is maintained at a pressure equal to or higher than the pressure on the other side, and the same heat treatment as described above is performed.

  Alternatively, in the window glass welding step shown in FIG. 2A, it is also possible to simply provide a preformed window glass material and weld it to the lid body.

  In short, the method for manufacturing a lid with a window glass of the present invention, after welding the window glass material to the window glass mounting hole of the lid body, in the window glass shaping step, the pressure on one side of the window glass material, By maintaining the pressure on the other surface side equal to or higher than the same pressure and performing heat treatment at a temperature lower than the window glass welding step, the surface state and thickness of the window glass material are adjusted to complete the window glass. It may be carried out to.

  The method for manufacturing a lid with a window glass according to the present invention can form a large amount of window glass material into a spherical shape at a low cost at once with simple equipment, and is useful for manufacturing a lid for an optical semiconductor airtight package, Furthermore, it is useful for the manufacture of light bulbs and water tanks.

The perspective sectional view of the lid with a window glass in an embodiment of the invention Sectional drawing which shows the process of the manufacturing method of the cover body with a window glass of FIG. Sectional drawing which shows the process following FIG. 2A Sectional drawing which shows the process following FIG. 2B The perspective sectional view of the lid with a window glass in other embodiments of the present invention Sectional view of a conventional lid with a lens Sectional drawing which shows the process of the manufacturing method of the cover body with a lens of FIG. 4 along a flow

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Cover body 2 Window glass mounting hole 3 Window glass 3a Inner surface 3b Outer surface 4 Window glass raw material 5 Inner surface forming jig 5a Front outer peripheral surface 6 First trunk jig 7 Outer surface forming jig 7a Inner peripheral surface 8 Broken line 9 Lid 10 Second body jig 11 Tip part jig 12 Cavity part 13 Sealed container 101 Cap body 102 Lens mounting hole 103 Glass lens 104 Lens material 105 Jig

Claims (5)

In the method of manufacturing a lid with a window glass in which a window glass having a spherical shape is hermetically mounted on a window glass mounting hole provided in the lid body,
A window glass welding step for welding the window glass material to the lid body by placing a window glass material in the window glass mounting hole of the lid body and performing a heat treatment,
By holding the pressure in the space on one side of the window glass material at a pressure equal to or higher than the pressure in the space on the other side, and performing heat treatment at a temperature lower than the window glass welding step And a window glass shaping step of adjusting the surface condition and thickness of the window glass material to complete the window glass. In the window glass welding step, the window glass material is welded to the lid body, and the window glass material has a curved shape that is convex inward or outward relative to the lid body. , Preformed into a shape having a cavity on the back of the convex curved surface,
2. The window according to claim 1, wherein in the window glass shaping step, the heat treatment is performed while maintaining an internal pressure on the hollow portion side of the window glass material to be equal to or higher than a pressure on the convex outer surface side. A manufacturing method of a lid with glass. In the window glass welding step, the flat window glass material is welded to the lid body,
In the window glass shaping step, the lid body is arranged so that both surfaces of the window glass material are directed in the vertical direction, and the pressure on one side of the window glass material is equal to the pressure on the other surface side, etc. The manufacturing method of the cover body with a window glass of Claim 1 which hold | maintains more than a pressure and performs the said heat processing.   In the window glass shaping step, the hollow portion of the window glass material is covered with a lid jig to form a sealed space, and by performing the heat treatment, the internal pressure of the sealed space is changed to the window glass material. The manufacturing method of the cover body with a window glass of any one of Claims 1-3 hold | maintained more than the pressure of the said convex-shaped outer surface side.   In any one of Claims 1-4 which perform the said window glass welding process so that the volume in the said preliminary | backup shape of the said cavity part which the said window glass raw material forms becomes equivalent to the volume after the said window glass shaping process. The manufacturing method of the cover body with a window glass of description.

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