JP2006243932A - Control valve and piping unit therewith - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a control valve capable of monitoring, by a temperature sensor, a change in the state of a pressure fluid caused by a change in flow velocity or the like due to valve opening, and capable of adjusting the valve opening if the temperature sensor detects that its temperature has reached a critical temperature at which the pressure fluid is liquefied or vaporized. <P>SOLUTION: The control valve has a supply passage 25 and a discharge passage 26 for the pressure fluid and a valve chamber 27, all of which are formed in a valve body 21. A pressure sensor 28 for detecting the pressure of the pressure fluid is positioned within the supply passage 25. The temperature sensor 29 for detecting the critical temperature of the liquefaction or vaporization of the pressure fluid is positioned either within the portion of the valve chamber 27 downstream of a valve plug 32 or within the discharge passage 28. A discharge side pressure sensor 30 for detecting the pressure of the pressure fluid is positioned either within the portion of the valve chamber 27 downstream of the temperature sensor 29 or within the discharge passage 26. Based on detection results from the sensors 28, 29, 30, a control circuit controls the drive part of the valve plug 32. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a control valve for pressure fluid control.

JP 2003-194648 A

As a conventional control valve, for example, the one shown in FIG. 11 is known (see Patent Document 1).
The control valve 1 shown in FIG. 11 includes a pipe 3 connected to the upstream pipe 2, a pipe 5 connected to the downstream pipe 4, a valve plug 6 that controls the communication state between the pipe 3 and the pipe 5, and the pipe 5. An orifice 7 disposed in the middle of the pipe 5 and having an orifice hole 7a in the furnace, a pressure sensor 8 for measuring the fluid pressure in the pipe 5 between the valve plug 6 and the orifice 7, and the temperature of the orifice 7 are detected. A temperature sensor 9, a control circuit 10, and a valve drive unit 11.

  Since the control valve 1 is based on the premise that the supplied fluid is in a critical condition, that is, the fluid velocity of the fluid flowing out from the orifice 7 is a sonic velocity, the pressure measurement is performed by only one pressure sensor 3. It is.

  The control circuit 10 is mainly composed of an electronic circuit, a microcomputer, and a built-in program. This control circuit 10 obtains a calculated flow rate by an electronic circuit system such as an amplifier circuit and an A / D converter (not shown) and an experimental flow rate equation, and compares the calculated flow rate with a set flow rate that is an external input signal, thereby calculating a flow rate difference. Is calculated.

  The upstream pressure is measured by the pressure sensor 10. In order to perform accurate pressure measurement, the sensor portion of the pressure sensor 10 is arranged in contact with the gas flow, and the sensor portion is designed to be extremely small so as not to disturb the gas flow. Accordingly, the sensor portion is equal to the gas temperature.

  The gas temperature is also measured by the temperature sensor 9. The temperature sensor 9 measures the temperature in the vicinity of the orifice 7 so as not to disturb the gas flow. If the gas and the orifice 7 are in thermal equilibrium, the temperatures of the two become equal. Therefore, the temperature of the orifice 7 is measured as the gas temperature. .

  The upstream pressure and the gas temperature are obtained as voltages and converted into digital signals by an amplifier circuit and an A / D converter (not shown). These digital signals are input to the control circuit 10, and a proportional coefficient is calculated from the gas temperature and gas physical properties, and an arithmetic flow rate is calculated using the upstream pressure.

  The control circuit 10 controls the valve drive unit 11 so as to adjust the opening of the valve plug 6 so that the flow rate difference between the set flow rate input externally and the calculated calculated flow rate becomes zero.

  Further, the sensor portion of the pressure sensor 10 is equal to the gas temperature, and when the gas temperature changes, the temperature of the sensor portion also changes accordingly, so that the output voltage of the pressure sensor is drift-corrected according to the temperature change.

  By the way, in the control valve 1 disclosed in Patent Document 1 shown in FIG. 11, the temperature sensor 9 is used to improve the detection accuracy of the pressure sensor 10, so that the state of the fluid changes, for example, liquefaction or vaporization. The phase change is not monitored, and there is a problem that the type of fluid is limited to control the valve opening.

  An object of the present invention is to provide a control valve and a piping unit that can accurately control a pressure fluid even if it is a substance that is easily liquefied or vaporized.

  The control valve of the present invention includes a valve body in which a valve chamber communicating with each passage is formed between a supply passage and a discharge passage for the pressure fluid, and an opening located at a boundary between the supply passage and the valve chamber. In a control valve comprising a valve plug that opens and closes and a drive unit that displaces the valve plug, a supply-side pressure sensor that is disposed in the supply passage and detects the pressure of the pressure fluid, and a downstream side of the valve plug A temperature sensor that is disposed in the valve chamber or in the discharge passage and detects a critical temperature of liquefaction or vaporization of the pressure fluid, and a pressure that is disposed in the valve chamber or in the discharge passage downstream of the temperature sensor. A discharge-side pressure sensor that detects the pressure of the fluid, and a control circuit that controls the drive unit based on detection results from the sensors.

  The control valve of the present invention is located at a boundary between the valve body in which a valve chamber communicating with each passage is formed between the supply passage and the discharge passage for the pressure fluid, and the supply passage and the valve chamber. In a control valve comprising a valve plug that opens and closes an opening and a drive unit that displaces the valve plug, a supply-side speed sensor that is arranged in the supply path and detects the speed of pressure fluid, and more than the valve plug A temperature sensor that is disposed in the valve chamber or the discharge passage on the downstream side and detects a critical temperature of liquefaction or vaporization of the pressure fluid, and is disposed in the valve chamber or the discharge passage on the downstream side of the temperature sensor. And a discharge side speed sensor for detecting the speed of the pressure fluid, and a control circuit for controlling the drive unit based on the detection results from the sensors.

  The control valve according to the present invention includes a valve body in which a valve chamber communicating with each passage is formed between a supply passage and a discharge passage for the pressure fluid, a valve body rotatably supported by the valve body, and one end of the valve chamber A valve shaft that faces the valve shaft, a valve plug that is supported by the valve shaft and that opens and closes an opening located at a boundary between the supply path and the valve chamber, and a control unit that displaces the valve plug In the valve, a supply-side pressure sensor that is disposed in the supply passage and detects the pressure of the pressure fluid, and a liquefied or vaporized pressure fluid that is disposed in the valve chamber or in the discharge passage on the downstream side of the valve plug. A temperature sensor that detects the critical temperature of the gas, a discharge-side pressure sensor that is disposed in the valve chamber or in the discharge passage downstream of the temperature sensor and detects the pressure of the pressure fluid, and detection results from the sensors Based on the drive unit Characterized in that it comprises a Gosuru control circuit.

  The control valve according to the present invention includes a valve body in which a valve chamber communicating with each passage is formed between a supply passage and a discharge passage for the pressure fluid, a valve body rotatably supported by the valve body, and one end of the valve chamber A valve shaft that faces the valve shaft, a valve plug that is supported by the valve shaft and that opens and closes an opening located at a boundary between the supply path and the valve chamber, and a control unit that displaces the valve plug In the valve, a supply-side speed sensor that is arranged in the supply passage and detects the velocity of the pressure fluid, and a liquefaction or vaporization of the pressure fluid that is arranged in the valve chamber or in the discharge passage downstream of the valve plug. A temperature sensor that detects the critical temperature of the gas, a discharge-side speed sensor that is disposed in the valve chamber or in the discharge passage downstream of the temperature sensor and detects the speed of the pressure fluid, and detection results from the sensors Based on the drive unit Characterized in that it comprises a Gosuru control circuit.

  The control valve according to the present invention is characterized in that a filter is disposed in the discharge path downstream of the discharge side pressure sensor or the discharge side speed sensor.

  A piping unit according to the present invention includes the control valve according to any one of claims 1 to 5.

  According to the control valve of the present invention, it is possible to monitor the change in the state of the pressure fluid caused by the change in the flow rate due to the valve opening degree by the temperature sensor, and the temperature reaches a critical temperature at which the pressure fluid is liquefied or vaporized. When the temperature sensor detects this, the valve opening degree can be adjusted, and a highly accurate control valve can be obtained.

  Embodiments of the present invention will be described below with reference to the drawings. 1 to 10 show an embodiment of the present invention.

(Embodiment 1)
1 to 3 show Embodiment 1 of the control valve of the present invention, FIG. 1 is a partial sectional view of the control valve in the opened state, FIG. 2 is a partial sectional view of the control valve in the closed state, and FIG. It is a block diagram of a piping unit using the control valve of the present invention.

  1 and 2, the control valve 20 includes a valve main body 21 and a drive unit 22 that holds the valve main body 21.

  The valve main body 21 is integrally provided with a supply pipe portion 23 and a discharge pipe portion 24 protruding left and right in the figure, and a pressure fluid supply passage 25 and a discharge passage 26 are formed in each of the pipe portions 23 and 24. The inner end portion thereof is communicated with the valve chamber 27. A supply-side pressure sensor 28 that detects the pressure of the pressurized fluid is disposed in the middle of the supply path 25. Further, in the middle of the discharge path 26, a temperature sensor 29 for detecting the temperature of the pressure fluid is arranged on the upstream side, and a discharge side pressure sensor 30 for detecting the pressure of the pressure fluid is arranged on the downstream side.

  The drive unit 22 has a cylindrical shape, and is provided with a valve nozzle 32 that opens and closes an opening 31 at a boundary portion between the supply path 25 and the valve chamber 27. Further, as shown in FIG. 3, a control circuit 33 to which detection results from the sensors 28, 29, and 30 are input is provided inside the drive unit 22. This control circuit 33 controls the drive part 34 which displaces the valve nozzle 32 based on an input result, and, thereby, the opening degree of the opening 31 by the valve nozzle 32 is controlled.

  At this time, the temperature sensor 29 monitors the critical temperature to be liquefied or vaporized according to the type of the pressure fluid, and if the detected temperature has reached the critical temperature (or has reached the set temperature immediately before), the control circuit When 33 determines, the control circuit 33 controls the drive part 34 so that the valve nozzle 32 may be displaced to an open state.

  By the way, the control circuit 33 can be connected to a main control unit 36 that controls the entire piping unit 35. As a result, the application of controlling the pressure fluid supply control valve 37 by combining the detection results from the pressure sensor 36 disposed on the supply path upstream of the supply pipe portion 23 is also possible.

  Further, as shown in FIGS. 4 and 5, a material that allows passage of the pressure fluid is used on the downstream side of the pressure sensor 30 in the discharge path 26 according to the type of the pressure fluid used and the pressure. It is also possible to arrange a filter 38 such as a film or sheet that removes components (for example, dust and excess components) contained in the fluid.

(Embodiment 2)
6 and 7 show Embodiment 2 of the control valve of the present invention.

  FIG. 6 is a longitudinal sectional view showing the basic structure of the control valve of the present invention, FIG. 7A is a transverse sectional view of the main part in the opened state showing the flow of the pressure fluid of the control valve of the present invention, and FIG. ) Is a cross-sectional view of the main part in the open state showing the flow of the pressure fluid of the control valve of the present invention.

  In FIG. 6, a control valve 40 includes a valve main body 42 having a valve chamber 41 formed in the middle of a flow path of a pressure fluid penetrating in a straight tube shape on the left and right in the drawing, a valve main body 42 rotatably supported, and one end of the valve chamber 42 41, a valve plug 45 that is supported by the valve shaft 43 through an arm 44, and a retainer 46 and a valve seat 47 that are provided in the flow path on the intake side of the valve plug 45. And.

  The valve main body 42 is divided and formed by a valve box 48 and a lid 49 that forms the valve chamber 41 in cooperation with the valve box 48.

  Piping mounting flanges 48 a are formed at both ends of the valve box 48. A retainer 46 and a valve seat 47 which are provided on the intake side of the valve box 48 and substantially form the intake passage 50 have a substantially cylindrical shape and are abutted by an O-ring (not shown) or the like. Airtightness is maintained. The intake passage 50 communicates with the discharge passage 51 of the valve box 48 in a straight tube shape with the valve chamber 41 interposed therebetween.

  A pressure sensor 28 that detects the pressure of the pressure fluid in the intake passage 50 is provided in the middle of the intake passage 50. Further, the valve chamber 41 is provided with a temperature sensor 29 that detects the temperature of the pressure fluid in the valve chamber 41. A pressure sensor 30 that detects the pressure of the pressure fluid in the discharge path 51 is provided in the middle of the discharge path 51.

  The functions of these sensors 28, 29, and 30 are the same as those in the first embodiment.

  The lid 49 is provided so as to be openable and closable with respect to the valve box 48. A bearing 23 is fixed to the lid 49. In addition, the lid body 49 supports the valve shaft 43 so as to be rotatable near the end portion in cooperation with the bearing 52. At this time, the bearing 52 has a function of preventing displacement along the axial direction of the valve shaft 43.

  The valve shaft 43 is rotationally controlled outside the valve body 42 (not shown). Further, as shown in FIG. 7, the valve shaft 43 is arranged such that the rotation center P of the valve shaft 43 is eccentric with respect to the center Q of the intake passages 50 and 51. This makes it possible to increase the shut-off force when stopping the pressure fluid by the lever principle, and to prevent the one end of the valve shaft 43 facing the valve chamber 41 from blocking the intake passages 50 and 51 sandwiching the valve chamber 41. Designed to.

  The valve plug 45 is attached to one end of the valve shaft 43 by an arm 44 in a cantilever state. The valve shaft 43 has a square chamfered portion or a spline portion at an attachment position of the arm 44, and the arm 44 is fixed to the valve shaft 43 with a bolt or a pin. The valve plug 45 is provided in the valve chamber 41 so that the intake passage 50 can be opened and closed by the rotation of the valve shaft 43.

  When the intake passage 50 is opened, the valve plug 45 is rotated to a position where the straight tubular intake passage 50 (51) sandwiching the valve chamber 41 is not blocked. Further, the valve chamber 41 has one side (withdrawal of the valve plug 45) across the center Q so that the flow rates on both sides of the valve chamber 41 when the valve plug 45 opens the intake passage 50 are substantially the same. The other side is narrower than (side).

  In the control valve 40 shown in the second embodiment, the filter 38 can be arranged as in the first embodiment.

  In the second embodiment, the intake passages 50 and 51 on the intake side and the exhaust side have a one-to-one relationship. For example, the control valve 60 has a two-way three-way valve structure shown in FIGS. It can also be applied to structures. This double three-way valve can be applied to a dispersion type opposite to the mixed type as shown in FIGS. 8 to 10.

  8 to 10, 61 is a valve box, 62 and 63 are lids, 64 is a valve chamber, 65, 66 and 67 are flow paths, 68 and 69 are valve shafts, 70 and 71 are arms, and 72 and 73 are Valve plugs 74 and 75 are valve seats, 28-1, 28-2 and 30 are pressure sensors, 29 is a temperature sensor (shown in FIG. 9), 33 is a control circuit, and 34-1 and 34-2 are drive units. is there.

  Thus, by using the valve shafts 68 and 69 extending vertically in FIG. 8, the valve shafts 68 and 69 are arranged coaxially even if the valve plugs 62 and 63 are rotatably held by being held. In addition, the flow paths 66 and 67 can be arranged in a straight tube shape.

  By the way, in each said embodiment, what detected the pressure of the pressure fluid with the pressure sensors 28 and 30 was disclosed, However, The speed sensor which detects the speed of a pressure fluid may be used.

1 is a partial cross-sectional view of a control valve in an open state, showing Embodiment 1 of a control valve of the present invention. FIG. 1 is a partial cross-sectional view of a control valve in a closed state, showing Embodiment 1 of a control valve of the present invention. FIG. It is a block diagram of a piping unit using the control valve of the present invention. It is an example of application of Embodiment 1 of the control valve of the present invention, and is a partial cross-sectional view of the control valve in an open state. It is an example of application of Embodiment 1 of the control valve of the present invention, and is a partial sectional view of the control valve in a closed state. FIG. 8 is a partial cross-sectional view of the control valve in a closed state, showing Embodiment 2 of the control valve of the present invention. (A) is a cross-sectional view of the main part in the opened state showing the flow of pressure fluid of the control valve of the present invention, and (B) is the main part of the opened state showing the flow of pressure fluid in the control valve of the present invention. It is a cross-sectional view. FIG. 9 is a partial cross-sectional view of a control valve of a two-way three-way valve system in a closed state, showing a modification of Embodiment 2 of the control valve of the present invention. It is a cross-sectional view of the principal part of the valve opening state which shows the flow of the pressure fluid of the control valve of this invention. It is a block diagram of a two-way three-way valve according to a modification of the second embodiment of the control valve of the present invention. It is a block diagram which shows the conventional control valve.

Explanation of symbols

20 control valve 21 valve body 25 supply path 26 discharge path 27 valve chamber 28 pressure sensor (supply side pressure sensor)
29 Temperature sensor 30 Pressure sensor (Exhaust pressure sensor)
32 Valve plug 33 Control circuit 34 Control unit

Claims (6)

A valve body in which a valve chamber communicating with each passage is formed between a supply passage and a discharge passage for the pressure fluid; a valve plug that opens and closes an opening located at a boundary between the supply passage and the valve chamber; and In a control valve having a drive part for displacing a valve plug,
A supply-side pressure sensor arranged in the supply passage for detecting the pressure of the pressure fluid; and a critical temperature for liquefaction or vaporization of the pressure fluid arranged in the valve chamber or the discharge passage downstream of the valve plug. A temperature sensor for detecting the pressure, a discharge side pressure sensor for detecting the pressure of the pressure fluid disposed in the valve chamber or in the discharge path downstream of the temperature sensor, and a detection result from each sensor And a control circuit for controlling the drive unit. A valve body in which a valve chamber communicating with each passage is formed between a supply passage and a discharge passage for the pressure fluid; a valve plug that opens and closes an opening located at a boundary between the supply passage and the valve chamber; and In a control valve having a drive part for displacing a valve plug,
A supply-side speed sensor disposed in the supply passage for detecting the velocity of the pressure fluid; and a critical temperature for liquefaction or vaporization of the pressure fluid disposed in the valve chamber or in the discharge passage downstream of the valve plug. A temperature sensor for detecting the pressure, a discharge side speed sensor for detecting the speed of the pressure fluid disposed in the valve chamber or in the discharge path downstream of the temperature sensor, and detection results from the sensors. And a control circuit for controlling the drive unit. A valve body in which a valve chamber communicating with each of the passages is formed between a supply path and a discharge path of the pressure fluid; a valve shaft rotatably supported by the valve body and having one end facing the valve chamber; In a control valve comprising a valve plug that is supported on a valve shaft and opens and closes an opening located at a boundary between the supply path and the valve chamber, and a drive unit that displaces the valve plug.
A supply-side pressure sensor arranged in the supply passage for detecting the pressure of the pressure fluid; and a critical temperature for liquefaction or vaporization of the pressure fluid arranged in the valve chamber or the discharge passage downstream of the valve plug. A temperature sensor for detecting the pressure, a discharge side pressure sensor for detecting the pressure of the pressure fluid disposed in the valve chamber or in the discharge path downstream of the temperature sensor, and a detection result from each sensor And a control circuit for controlling the drive unit. A valve body in which a valve chamber communicating with each of the passages is formed between a supply path and a discharge path of the pressure fluid; a valve shaft rotatably supported by the valve body and having one end facing the valve chamber; In a control valve comprising a valve plug that is supported on a valve shaft and opens and closes an opening located at a boundary between the supply path and the valve chamber, and a drive unit that displaces the valve plug.
A supply-side speed sensor disposed in the supply passage for detecting the velocity of the pressure fluid; and a critical temperature for liquefaction or vaporization of the pressure fluid disposed in the valve chamber or in the discharge passage downstream of the valve plug. A temperature sensor for detecting the pressure, a discharge side speed sensor for detecting the speed of the pressure fluid disposed in the valve chamber or in the discharge path downstream of the temperature sensor, and detection results from the sensors. And a control circuit for controlling the drive unit.   The control valve according to any one of claims 1 to 4, wherein a filter is disposed in the discharge path downstream of the discharge side pressure sensor or the discharge side speed sensor.   A piping unit comprising the control valve according to any one of claims 1 to 5.

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