JP2006242425A - Baseplate and method of manufacturing ceramic electronic part - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a baseplate capable of effectively reducing generation of baking nonuniformity, when baking a baking object such as a ceramic molding. <P>SOLUTION: For solving this problem, this baseplate 1 is a baseplate for mounting a ceramic baking sheath C arranged with the ceramic molding inside. A recessed part 101 is formed on a main surface 10 for mounting the ceramic baking sheath C. The recessed part 101 is formed so that a ridgeline of its outer edge and the main surface 10 forms a closed curve. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a base plate for mounting an object to be fired including a ceramic molded body and a method for manufacturing a ceramic electronic component.

When the ceramic molded body is fired to obtain a ceramic electronic component, the sheath on which the ceramic molded body is disposed is placed on a base plate and carried into a firing furnace. The ceramic carried into the firing furnace is fired by exposing it to atmospheric gas. As the conventional base plate, as shown in the following Patent Document 1, a flat plate is used.
JP-A-6-323740

  When firing a ceramic molded body to be a ceramic electronic component, the ceramic molded body is housed in a ceramic firing sheath and fired. When such firing is performed, there may be a case where the atmosphere gas is not sufficiently distributed to the ceramic molded body arranged inside the sheath for ceramic firing.

  Therefore, the present invention aims to provide a base plate that can effectively reduce the occurrence of uneven baking when firing an object to be fired, such as a ceramic molded body, and a method for manufacturing a ceramic electronic component using the base plate. And

  The base plate of the present invention is a base plate for mounting an object to be fired, and a recess is formed on the main surface on which the object to be fired is mounted, and the recess has a ridge line between its outer edge and the main surface. It is formed so as to form a closed curve.

  According to the present invention, since the concave portion is formed on the main surface so that the ridge line between the outer edge of the concave portion and the main surface forms a closed curve, the surface along the inner surface of the concave portion and the surface along the main surface A virtual closed space is formed. Therefore, it becomes easy to lead out the atmospheric gas introduced into the virtual closed space from the main surface side to the main surface side again. For example, if the ceramic firing sheath is arranged so as to cross the opening of the recess, the atmosphere gas is introduced into the recess from the opening not covered with the ceramic firing sheath, and the introduced atmosphere gas is ceramic fired. Can be guided into the sheath.

  In the present invention, it is also preferable that a plurality of recesses are formed on the main surface, and that the ridge line between the outer edge of each recess and the main surface forms a closed curve. Since a plurality of virtual closed spaces can be provided independently, the atmospheric gas can be accurately guided to the intended position.

  Moreover, in this invention, it is also preferable that the groove part which connects a recessed part and the side surface of the said baseplate is formed. Since the groove portion connects the side surface and the concave portion, the virtual closed space formed by the surface along the inner surface of the concave portion and the surface along the main surface can be connected to the external space where the side surface contacts. Therefore, the atmospheric gas passing through the groove can be guided to the recess.

  Moreover, in this invention, it is also preferable that the groove part is formed in one direction toward a side surface from a recessed part. Since the groove portions are collectively formed in one direction, if the flow of the atmospheric gas is formed along that direction, it becomes more efficient to introduce the atmospheric gas into the concave portion along the groove portion.

  The method for manufacturing a ceramic electronic component of the present invention includes a step of preparing the above-described base plate and a fired material to be mounted on the base plate, and an atmosphere gas for firing the fired material is a fired material. The step of introducing the opening through the opening of the recess that is not covered through the opening of the recess that is covered with the object to be fired, and the object to be fired by the introduced atmospheric gas. A process.

  According to the present invention, it is possible to introduce the atmospheric gas for firing the material to be fired from the opening of the recess not covered with the material to be fired, and to introduce the introduced atmospheric gas to the material to be fired.

  The method for manufacturing a ceramic electronic component according to the present invention includes a step of preparing the above-described base plate and a fired material to be mounted on the base plate, and an atmosphere gas for firing the fired material is a groove portion or a fired material. A step of introducing the groove through the opening of the recess not covered with the object, the groove covered with the object to be fired or the opening of the recess toward the object to be fired, and the material to be fired by the introduced atmospheric gas Is fired.

  According to the present invention, it is possible to introduce an atmosphere gas for firing the object to be fired from the opening of the groove or the recess not covered with the object to be fired, and to introduce the introduced atmosphere gas to the object to be fired. it can.

  According to the present invention, it becomes easy to lead out the atmospheric gas introduced into the recess from the main surface side of the base plate to the main surface side again. Accordingly, if the object to be fired is mounted on the main surface of the base plate, the object to be fired can be effectively exposed to the atmospheric gas.

  The teachings of the present invention can be readily understood by considering the following detailed description with reference to the accompanying drawings shown for illustration only. Subsequently, embodiments of the present invention will be described with reference to the accompanying drawings. Where possible, the same parts are denoted by the same reference numerals, and redundant description is omitted.

  A base plate according to an embodiment of the present invention will be described with reference to FIG. 1A is a perspective view showing a base plate 1 and a ceramic firing sheath C as an object to be fired mounted on the base plate 1. FIG. FIG. 1B is a perspective view showing a state in which a ceramic firing sheath C is mounted on the base plate 1.

  The base plate 1 has an outer shape of a rectangular flat plate, and includes a rectangular main surface 10, a back surface 20 that faces the main surface 10, and a side surface 30 that connects the main surface 10 and the back surface 20. A pair of recesses 101 is formed on the main surface 10 of the base plate 1. The recess 101 is formed by digging down the main surface 10. The pair of recesses 101 is provided along the sides of the main surface 10 facing each other. The ridgeline where the outer edge of the recess 101 contacts the main surface 10 is formed to be a closed curve, and the edge of the opening of the recess 101 is closed. Therefore, the outer edge of the recess 101 and the outer periphery of the main surface 10 do not intersect or contact each other.

  The ceramic firing sheath C is formed by stacking a plurality of frames F. Each frame F is provided with a rod (not explicitly shown in FIG. 1) in which a plurality of ceramic molded bodies (fired objects, not explicitly shown in FIG. 1) are arranged. Therefore, a plurality of ceramic molded bodies as a material to be fired are arranged in a plurality of stages in the ceramic firing sheath C. A ceramic molded body (not explicitly shown in FIG. 1) is a ring-shaped molded body that becomes a varistor ceramic used for a varistor when fired.

  As shown in FIG. 1B, when the ceramic firing sheath C is placed on the base plate 1, a part of the opening of the recess 101 is exposed without being covered with the ceramic firing sheath C. In order to explain the positional relationship between the base plate 1 and the ceramic firing sheath C, FIG. 2 shows a cross-sectional view along the direction from one recess 101 to the other recess 101.

  As shown in FIG. 2, a ceramic molded body 50 in a state of being skewered by a rod 40 is disposed on a frame F constituting the sheath C for ceramic firing. The rod 40 is supported by a V groove F2 provided in a support member F1 constituting the frame F. Therefore, the ceramic molded body 50 is three-dimensionally arranged in the internal space formed by stacking the frames F.

  The support member F1 constituting the frame F is arranged above the vicinity of the approximate center of the recess 101, and the atmosphere gas flowing toward the ceramic firing sheath C is covered with the opening of the recess 101 (the ceramic firing sheath C). Leads to its inside via no opening). The recess 101 is composed of a bottom surface 101a and side surfaces 101b and 101c. The side surface 101b is the side surface that is not covered by the frame F, and the side surface 101c is the side surface that is covered by the frame F. The atmosphere gas guided into the recess 101 is changed in direction by the bottom surface 101a and is guided toward the side surface 101c. Further, the direction of the atmospheric gas is changed by the side surface 101c, and is introduced into the frame F through the opening of the recess 101 (the opening covered with the ceramic firing sheath C). Accordingly, the atmosphere gas around the ceramic firing sheath C is introduced into the frame F by being guided into the recess 101 and passing through the frame F (see the arrow in FIG. 2).

  As shown in FIG. 2, a closed region is formed by a surface S1 along the bottom surface 101a and the side surfaces 101b and 101c constituting the inner surface of the recess 101, and a surface S2 along the main surface 10. As described above, the atmospheric gas for firing the ceramic molded body 50 is introduced from the outside to the inside of the ceramic firing sheath C through the closed region. Accordingly, the atmospheric gas can be effectively applied to the ceramic molded body 50 arranged at the lowermost stage.

  It is also preferable to provide a groove 102 between the recess 101 and the side surface 30 as shown in FIG. The groove 102 is formed so as to connect the concave portion 101 and the side surface 30. By forming the groove 102 in this way, a groove is formed in the closed space formed by the surface S1 along the bottom surface 101a and the side surfaces 101b and 101c constituting the inner surface of the recess 101 and the surface S2 along the main surface 10. Atmospheric gas via 102 can also be introduced. Therefore, introduction of the atmospheric gas into the ceramic firing sheath C can be performed more effectively.

  A modification of this embodiment will be described. A first modification of the present embodiment is shown in FIG. FIG. 4A is a perspective view showing a base plate 2 as a first modified example and a ceramic firing sheath C as an object to be fired mounted on the base plate 2. FIG. 4B is a perspective view showing a state in which the ceramic firing sheath C is mounted on the base plate 2.

  The base plate 2 has a rectangular flat plate-like outer shape, and includes a rectangular main surface 11, a back surface 21 that faces the main surface 11, and a side surface 31 that connects the main surface 11 and the back surface 21. Five U-shaped grooves 111 are formed in the main surface 11 of the base plate 2. Each U-shaped groove 111 is formed by integrally forming a recess 111a and a groove 111b. The U-shaped groove 111 is formed by digging down the main surface 11. Each U-shaped groove 111 is formed to extend in a direction substantially orthogonal to the side surface 31 on the main surface 11. Among the U-shaped grooves 111, two U-shaped grooves are formed so that a certain length from the side surface 31 is substantially orthogonal to the side surface 31, and then bent toward the outside of the main surface 11. Thus, the U-shaped groove 111 can also be formed by bending from the middle.

  When the ceramic firing sheath C is placed on the main surface 11 of the base plate 2, the recess 111a of each U-shaped groove 111 is covered with the ceramic firing sheath C, and the groove 111b of each U-shaped groove 111 is exposed. Therefore, the cross section in the direction along the U-shaped groove 111 is the same as the cross section shown in FIG.

  Subsequently, a second modification of the present embodiment is shown in FIG. FIG. 5A is a perspective view showing a base plate 3 as a second modified example and a ceramic firing sheath C as a fired object mounted on the base plate 3. FIG. 5B is a perspective view showing a state in which a ceramic firing sheath C is mounted on the base plate 3.

  The base plate 3 has an outer shape of a rectangular flat plate shape, and includes a rectangular main surface 12, a back surface 22 that faces the main surface 12, and a side surface 32 that connects the main surface 12 and the back surface 22. A recess 121 and a groove 122 are formed on the main surface 12 of the base plate 3. The recess 121 is formed by digging a rectangle near the center of the main surface 12 into a rectangle. The groove 122 is formed from the side surface 32 toward the recess 121. The width of the groove 122 is set to be shorter than the length of the side along the side surface 32 of the recess 121.

  When the ceramic firing sheath C is placed on the main surface 12 of the base plate 3, the entire recess 121 and a part of the groove 122 are covered with the ceramic firing sheath C, and the remaining portion of the groove 122 is exposed.

  Subsequently, a third modification of the present embodiment is shown in FIG. FIG. 6A is a perspective view showing a base plate 4 as a third modified example and a ceramic firing sheath C as a fired article mounted on the base plate 4. FIG. 6B is a perspective view showing a state in which a ceramic firing sheath C is mounted on the base plate 4.

  The base plate 4 has an outer shape of a rectangular flat plate, and includes a rectangular main surface 13, a back surface 23 that faces the main surface 13, and a side surface 33 that connects the main surface 13 and the back surface 23. A recess 131 and a groove 132 are formed on the main surface 13 of the base plate 4. The recess 131 is formed by digging a rectangle around the approximate center of the main surface. The groove 132 is formed from the side surface 33 toward the recess 131. The width of the groove 132 is formed so as to extend from one end to the other end of the side surface 33 in the portion facing the side surface 33. Further, the width of the groove 132 is formed so as to extend from one end to the other end of the side along the side surface 33 of the recess 131 in the portion facing the recess 131. Therefore, the pair of side walls of the groove 132 are arranged so as to connect one end of the side surface 33 and one end of the side along the side surface 33 of the recess 131, and the multiple end of the side surface 33 and the multiple end of the side along the side surface 33 of the recess 131. Has been.

  In the recess 131 or the groove 132 of the base plate 4, a nested part 4 a may be arranged. Since the thickness of the nested part 4 a is set to be substantially equal to the depth of the recess 131 and the groove 132, the flow velocity and direction of the atmospheric gas flowing through the recess 131 and the groove 132 can be adjusted.

  As shown in FIG. 7, the base plate 4 is a preferred form when used in a series so as to be in contact with each other. Since the width of the groove 132 is formed so as to widen from the concave portion 131 toward the side surface 33, the atmosphere gas can be more effectively introduced into the ceramic firing sheath C even when a plurality of the grooves 132 are used in series.

  Subsequently, a method of manufacturing a ceramic electronic component using the base plates 1 to 4 of this embodiment will be described with reference to FIGS. FIG. 8 is a diagram illustrating a procedure of a method for manufacturing a ceramic electronic component. FIG. 9 is a diagram showing a configuration of a firing furnace 90 used in this manufacturing method.

  First, the base plate 1 (2-4) and the sheath C for ceramic firing are prepared (step S01). Inside the ceramic firing sheath C, a ceramic molded body 50 (see FIG. 2) skewered on a rod 40 (see FIG. 2) is arranged in a plurality of stages. The sheath C for ceramic firing is placed on the base plate 1 (2-4).

  Subsequently, the ceramic molded body 50 (see FIG. 2) is carried into the firing furnace 90 together with the sheath for ceramic firing C (step S02). More specifically, the ceramic firing sheath C is carried into the firing furnace 90 by pushing the base plate 1 (2 to 4) with the pusher 97.

As shown in FIG. 9, the firing furnace 90 has an inlet portion 91 at one end and an outlet portion 93 at the other end, and has a tunnel shape. In the firing furnace 90, the firing atmosphere is a reducing atmosphere, and the gas constituting the reducing atmosphere (for example, a mixed gas of N ₂ and H ₂ ) is made of the base plate 1 (2-4) and the ceramic firing sheath C. It flows in the direction (arrow B direction in FIG. 9) opposite to the transport direction (arrow A direction in FIG. 9). Therefore, the concave portion 101 formed on the base plate 1, the U-shaped groove 111 formed on the base plate 2, the concave portion 121 and the groove 122 formed on the base plate 3, and the base plate 4 are formed. The atmospheric gas is introduced into the ceramic firing sheath C through the recessed portion 131 and the groove 132 (step S03).

  Thereby, the ceramic molded body 50 (see FIG. 2) is reduced and fired in a state of being disposed on the rod 40 (see FIG. 2), and a varistor ceramic as a ceramic sintered body is obtained (step S04). When this firing step is completed, the base plate 1 (2-4) is pushed by the pusher 97 and carried out of the firing furnace 90 (step S04).

  According to the embodiment of the present invention described above, the main surface 10 (11, 11, 13) is formed such that the ridge line between the outer edge of the recess 101 (111a, 121, 131) and the main surface 10 (11, 12, 13) forms a closed curve. 12 and 13) are formed with recesses 101 (111a, 121, and 131), so that the surfaces along the inner surfaces of the recesses 101 (111a, 121, and 131) and the main surfaces 10 (11, 12, and 13) are provided. A virtual closed space is formed by the surface. Therefore, it becomes easy to lead the atmospheric gas introduced into the virtual closed space from the main surface 10 (11, 12, 13) side to the main surface 10 (11, 12, 13) side again. If the ceramic firing sheath C is disposed so as to cross the opening of the recess 101 (111a, 121, 131) or the groove 111b (122, 132), the recess 101 is opened from the opening that is not covered with the ceramic firing sheath C. An atmosphere gas can be introduced into (111a, 121, 131), and the introduced atmosphere gas can be introduced into the ceramic firing sheath C.

It is a figure which shows the structure of the baseplate which is embodiment of this invention. It is sectional drawing in (B) of FIG. It is a figure which shows the modification of FIG. It is a figure which shows the structure of the baseplate which is a modification of embodiment of this invention. It is a figure which shows the structure of the baseplate which is a modification of embodiment of this invention. It is a figure which shows the structure of the baseplate which is a modification of embodiment of this invention. It is a figure which shows the structure of the baseplate which is a modification of embodiment of this invention. It is a figure which shows the manufacturing method of the ceramic electronic component using the base plate which is embodiment of this invention. It is a figure which shows the structure of the baking furnace used in the manufacturing method of FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Base plate, 10 ... Main surface, 20 ... Back surface, 30 ... Side surface, 101 ... Recessed part, C ... Sheath for ceramic baking, F ... Frame.

Claims (6)

A base plate for mounting an object to be fired,
A concave portion is formed on the main surface on which the object to be fired is mounted,
The concave portion is formed so that a ridge line between the outer edge and the main surface forms a closed curve. The base plate according to claim 1, wherein a plurality of the concave portions are formed on the main surface, and ridge lines between the outer edges of the respective concave portions and the main surface each form a closed curve. The base plate of Claim 1 or 2 in which the groove part which connects the said recessed part and the side surface of the said base plate is formed. The said groove part is a base plate of Claim 3 currently formed in one direction toward the said side surface from the said recessed part. A step of preparing the base plate according to claim 1 or 2 and a material to be fired to be mounted on the base plate,
An atmosphere gas for firing the object to be fired passes through the opening of the recess not covered with the object to be fired, and passes from the opening of the recess covered with the object to be fired to the object to be fired. The process introduced towards the
A step of firing the object to be fired by the introduced atmospheric gas;
A method of manufacturing a ceramic electronic component comprising: A step of preparing the base plate according to claim 3 or 4 and an object to be fired to be mounted on the base plate,
An atmosphere gas for firing the object to be fired passes through the opening of the recess not covered with the groove or the object to be fired, and the groove or opening of the recess covered with the object to be fired. A step that is introduced toward the object to be fired from,
A step of firing the object to be fired by the introduced atmospheric gas;
A method of manufacturing a ceramic electronic component comprising:

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