JP2006235531A - Manufacturing method of color filter, mask for manufacturing color filter and manufacturing equipment for color filter - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of color filter capable of improving availability factor of material, simplifying processes and forming high-definition coloring pattern. <P>SOLUTION: The manufacturing method of color filter comprises a process of positioning and stacking a mask 14 on which opening parts 16 corresponding to available parts of a color filter are formed, on the bank formation side of a glass substrate 10 on which light-shielding banks 12 having a prescribed pattern are formed and a process of continuously delivering coloring material from a nozzle 18 and applying the coloring material between the banks 12 on the glass substrate 10, while scanning the nozzle 18 for the glass substrate 10 and intermittently feeding the glass substrate 10 with a prescribed pitch in the direction orthogonal to the scanning direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a color filter used in a color liquid crystal display, an organic EL (electroluminescence) display device, or an FED (field emission display) device, and a mask for manufacturing a color filter used in the manufacturing method. And a manufacturing apparatus used for manufacturing a color filter.

For example, a color filter of a color liquid crystal display conventionally has a dyeing base formed in a predetermined pattern by applying a photosensitive dyeing base on a transparent substrate, exposing and developing the dyeing base through a photomask. A dyeing method for dyeing a material to form a colored layer, a photosensitive resist in which a colored pigment is dispersed in advance is applied on a transparent substrate, the photosensitive resist is exposed and developed through a photomask, and a colored layer having a predetermined pattern It is manufactured by a method such as a printing method in which a colored layer is obtained by applying a printing ink directly on a transparent substrate in a predetermined pattern using an ink jet method or the like using a pigment dispersion method or a printing technique (for example, forming a colored layer) , See Patent Document 1).
JP 63-235901 A (page 2-3, FIG. 1 and FIG. 2)

  In the method of producing a color filter by a dyeing method or a pigment dispersion method, material loss cannot be avoided in the process of applying a photosensitive dyeing base material or photosensitive resist on a transparent substrate by spin coating or the like. It is necessary to repeat the development process and the cleaning process every time a colored pattern of each color such as red, green and blue is formed. Thus, the use efficiency of the material is poor and the process is complicated, and this is one of the causes of the high cost of the liquid crystal display. On the other hand, the printing method has a problem that it is difficult to form a high-definition colored pattern.

  The present invention has been made in view of the circumstances as described above, and can improve the use efficiency of materials, simplify the process, and manufacture a color filter capable of forming a high-definition colored pattern. Providing a method, and providing a mask for producing a color filter capable of suitably carrying out the production method, and an apparatus for producing a color filter used for carrying out the production method The purpose is to provide.

  The invention according to claim 1 is a method of manufacturing a color filter by applying a colorant on a transparent substrate on which a light-shielding bank having a predetermined pattern functioning as a black matrix is formed, on the bank forming surface side of the transparent substrate. A step of aligning and superimposing a mask formed with an opening corresponding to an effective portion of the color filter, and scanning the nozzle with respect to the transparent substrate, and the transparent substrate and the nozzle in a direction orthogonal to the scanning direction. And a step of applying the colorant between the light-shielding banks on the transparent substrate by continuously discharging the colorant from the nozzles while intermittently moving them at a predetermined pitch.

  According to a second aspect of the present invention, in the manufacturing method according to the first aspect of the present invention, a mask having a tapered surface inclined in a low position direction from the periphery of the opening corresponding to the effective portion of the color filter is used on the surface. It is characterized by doing.

  The invention according to claim 3 is characterized in that, in the manufacturing method according to claim 2, a mask in which the tapered surface is coated with a liquid repellent material that repels a colorant is used.

  The invention according to claim 4 is characterized in that, in the manufacturing method according to claim 1, a mask having a protrusion formed on the surface surrounding the periphery of the opening corresponding to the effective portion of the color filter is used. To do.

  The invention according to claim 5 is characterized in that, in the manufacturing method according to claim 1, a mask having a colorant adsorbing layer formed of an adsorbent adsorbing the colorant is used on the surface.

  According to a sixth aspect of the present invention, an opening corresponding to an effective portion of a color filter is formed, and is aligned and superimposed on a transparent substrate on which a light-shielding bank having a predetermined pattern functioning as a black matrix is formed. In the mask for manufacturing a color filter that prevents the colorant from being applied to the portion corresponding to the ineffective portion of the color filter, the surface of the mask is directed from the periphery of the opening corresponding to the effective portion of the color filter toward the lower position. An inclined taper surface is formed.

  The invention according to claim 7 is the mask according to claim 6, wherein the tapered surface is coated with a liquid repellent material that repels a colorant.

  According to the eighth aspect of the present invention, an opening corresponding to the effective portion of the color filter is formed, and is aligned and superimposed on a transparent substrate on which a light-shielding bank having a predetermined pattern functioning as a black matrix is formed. In the mask for manufacturing a color filter that prevents the colorant from being applied to the portion corresponding to the ineffective portion of the color filter, a protrusion that surrounds the periphery of the opening corresponding to the effective portion of the color filter is provided on the surface. It is formed.

  According to the ninth aspect of the present invention, an opening corresponding to an effective portion of the color filter is formed, and is aligned and superimposed on a transparent substrate on which a light-shielding bank having a predetermined pattern functioning as a black matrix is formed. In the color filter manufacturing mask that prevents the colorant from being applied to the portion corresponding to the ineffective portion of the color filter, the surface has a colorant adsorption layer formed of an adsorbent that adsorbs the colorant. It is characterized by.

  According to a tenth aspect of the present invention, in a device for manufacturing a color filter by applying a colorant on a transparent substrate, a black matrix in which a mask in which an opening corresponding to an effective portion of the color filter is formed is aligned and superimposed. A stage for holding a transparent substrate on which a light-shielding bank having a predetermined pattern that functions as a nozzle is formed, a nozzle that continuously discharges the colorant, a colorant supply unit that supplies the colorant to the nozzle, and the nozzle A nozzle holding unit that performs scanning, and the nozzle held by the nozzle holding unit is scanned with respect to the transparent substrate held on the stage to apply a colorant between the light-shielding banks on the transparent substrate from the nozzle. The nozzle scanning mechanism, the nozzle scanning mechanism, and the stage are each relatively scanned in a direction orthogonal to the nozzle scanning direction and the nozzle is scanned once. Characterized in that a intermittent feeding mechanism for intermittently moved at predetermined pitches.

In the method for manufacturing a color filter according to the first aspect of the present invention, a non-photosensitive colorant is used, and the colorant is merely discharged continuously from a nozzle onto a transparent substrate on which a bank is formed. , Material loss is minimized. In addition, steps such as exposure, development, and washing are not required to form the colorant pattern. Furthermore, since the colorant is applied between the light-shielding banks, the colorant can be applied with high definition. And, when applying the colorant on the transparent substrate by continuously discharging the colorant from the nozzle, because the mask formed with an opening corresponding to the effective portion of the color filter is superimposed on the transparent substrate, The colorant is not applied to the ineffective portion on the transparent substrate.
Therefore, when the method for producing a color filter of the invention according to claim 1 is used, the material use efficiency can be improved and the process can be simplified, and a high-definition colored pattern can be formed.

  In the manufacturing method of the invention according to claim 2, when the colorant is applied on the transparent substrate, the unnecessary color material is discharged onto the surface of the mask covering the portion corresponding to the ineffective portion of the color filter on the transparent substrate. The colorant flows along the tapered surface on the surface of the mask, and unnecessary colorant may flow from the periphery of the opening of the mask into the opening, that is, on the transparent substrate, corresponding to the effective portion of the color filter. Is prevented. Therefore, the extra colorant is not applied to the portion corresponding to the effective portion of the color filter.

  In the manufacturing method according to the third aspect of the invention, the unnecessary colorant discharged onto the surface of the mask flows more smoothly along the tapered surface on the surface of the mask. Therefore, the above-described operation and effect of the invention according to claim 2 are more reliably achieved.

  In the manufacturing method of the invention according to claim 4, when the colorant is applied onto the transparent substrate, the unnecessary color material is discharged onto the surface of the mask covering the portion corresponding to the ineffective portion of the color filter on the transparent substrate. The colorant is prevented from flowing into the portion corresponding to the effective portion of the color filter on the transparent substrate from the periphery of the opening of the mask by the protrusions surrounding the periphery of the opening. Is done. Therefore, the extra colorant is not applied to the portion corresponding to the effective portion of the color filter.

  In the manufacturing method of the invention which concerns on Claim 5, when apply | coating a coloring agent on a transparent substrate, it was unnecessary discharged | emitted by the surface of the mask which coat | covers the part corresponding to the ineffective part of a color filter on a transparent substrate. The colorant is adsorbed by the colorant adsorption layer formed on the surface of the mask, and unnecessary colorant is applied from the periphery of the opening of the mask into the opening, that is, on the transparent substrate corresponding to the effective portion of the color filter. Inflow is prevented. Therefore, the extra colorant is not applied to the portion corresponding to the effective portion of the color filter.

In the color filter manufacturing mask according to the sixth aspect of the present invention, the unnecessary colorant discharged onto the surface flows along the tapered surface on the surface, and therefore corresponds to the effective portion of the color filter from the periphery of the opening. It is possible to prevent the excess colorant from being applied to the portion corresponding to the effective portion of the color filter without flowing into the opening, that is, the portion corresponding to the effective portion of the color filter on the transparent substrate. it can.
Therefore, when the mask of the invention according to claim 6 is used, the manufacturing method of the invention according to claim 1 can be suitably carried out.

  In the mask according to the seventh aspect of the present invention, unnecessary colorant discharged onto the surface of the mask flows more smoothly along the tapered surface on the surface. Therefore, the above-mentioned effect by the invention according to claim 6 is more reliably achieved.

In the color filter manufacturing mask according to the eighth aspect of the present invention, the unnecessary colorant discharged onto the surface of the mask corresponds to the effective portion of the color filter from the periphery of the opening by the ridge that surrounds the periphery of the opening. It is possible to prevent the excess colorant from being applied to the portion corresponding to the effective portion of the color filter without flowing into the opening, that is, the portion corresponding to the effective portion of the color filter on the transparent substrate. it can.
Therefore, when the mask of the invention according to claim 8 is used, the manufacturing method of the invention according to claim 1 can be suitably carried out.

In the color filter manufacturing mask according to the ninth aspect of the present invention, unnecessary colorant discharged onto the surface of the mask is adsorbed by the colorant adsorption layer formed on the surface, so that the color filter from the periphery of the opening portion. Excess colorant is applied to the portion corresponding to the effective portion of the color filter without flowing into the opening corresponding to the effective portion, that is, the portion corresponding to the effective portion of the color filter on the transparent substrate. Can be prevented.
Therefore, when the mask of the invention according to claim 9 is used, the manufacturing method of the invention according to claim 1 can be suitably carried out.

In the color filter manufacturing apparatus according to the tenth aspect of the present invention, the transparent substrate on which the mask is aligned and overlapped to form the light-shielding bank is held on the stage, and the nozzle scans the transparent substrate by the nozzle scanning mechanism. While the nozzle scanning mechanism and the stage are intermittently moved at a predetermined pitch in a direction orthogonal to the nozzle scanning direction by the intermittent feeding mechanism, the colorant is continuously discharged from the nozzle, thereby transparent. A colorant is applied between the light-shielding banks on the substrate.
Therefore, when the manufacturing apparatus of the invention according to claim 10 is used, the manufacturing method of the invention according to claim 1 can be reliably carried out.

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the best embodiment of the present invention will be described with reference to the drawings.
FIGS. 1 to 6 show an example of an embodiment of the present invention, and are diagrams for explaining each step in a color filter manufacturing method.

  Prior to the manufacture of the color filter, first, a light-shielding bank having a predetermined pattern is formed on a transparent substrate, for example, a transparent glass substrate. FIG. 1 is a schematic perspective view showing a state where a bank is formed on a glass substrate, and FIG. 2 is an enlarged partial perspective view of a part thereof. FIG. 1 shows an example of six chamfering, in which one glass substrate 10 is provided with six effective areas A corresponding to the effective portions of the color filter.

  The bank 12 is a member that functions as a black matrix in the color filter, and is formed of a light shielding material. For example, the bank 12 is formed by applying a photosensitive resin material on the glass substrate 10, exposing and developing the photosensitive resin film through a photomask, and processing into a predetermined pattern, in this example, a stripe pattern. Is formed. It is preferable that at least the surface of the bank 12 has a liquid repellency with respect to a pigment-dispersed material (colorant) described later. As a method for this, the bank 12 itself is formed using a photosensitive resin material having liquid repellency, or after the bank 12 is formed using a photosensitive resin material (not having liquid repellency). Then, an ink repellent agent is applied to the surface to form a liquid repellent film. As a material for forming the liquid repellent film, a resin material containing at least one of silicon and fluorine is preferably used. For example, a silicon resin or a fluorine resin may be used. By making the bank 12 liquid-repellent in this manner, it is desirable because it is possible to reliably prevent color mixing caused by the overflow of the colorant in the bank 12 in the colorant application step described later.

  Next, masking is performed so that the colorant is not applied to the ineffective area B (area other than the effective area A) of the glass substrate 10 corresponding to the ineffective part of the color filter. FIG. 3 is a schematic perspective view showing a state in which the mask is being overlaid on the glass substrate, and FIG. 4 shows a state in which the mask is overlaid on the glass substrate.

  The mask 14 has an opening 16 corresponding to the effective portion of the color filter (the effective region A of the glass substrate 10). The mask 14 is formed by processing a thin metal plate such as a stainless alloy, an Invar material, or a 426 alloy by an etching method, a plating method, or the like. Although not shown, the mask 14 is used by being attached to a frame so as not to be bent by its own weight during alignment with the glass substrate 10. The mask 14 is aligned and superimposed on the bank forming surface side of the glass substrate 10 using an alignment mark (not shown) or the like. The mask 14 may be not only a thin metal plate but also a resin material formed by a method such as molding.

  Next, using a manufacturing apparatus described later, a color filter is formed on the glass substrate 10 on which a light-shielding bank has been previously formed. First, pigment dispersion materials (coloring materials) of respective colors in which colored pigments of red, green and blue are dispersed in a resin base material (no photosensitivity) are applied onto the glass substrate 10 respectively. That is, as shown in a schematic perspective view in FIG. 4, while the nozzle 18 is scanned in the direction of arrow a with respect to the glass substrate 10, the glass substrate 10 and the nozzle 18 are relatively moved in the direction of arrow b orthogonal to the scanning direction. As shown in the partially enlarged perspective view in FIG. 5, the colorant 20 is continuously discharged from the nozzles 18 while being intermittently moved at a predetermined pitch, and formed between adjacent banks 12 on the glass substrate 10. The colorant 20 is applied into the long groove 22 formed. In the illustrated example, the position of the nozzle 18 in the arrow b direction orthogonal to the scanning direction is fixed, and the glass substrate 10 is intermittently fed in the arrow b direction. The pitch of intermittent feeding of the glass substrate 10 in the direction of the arrow b is such that one colorant is ejected from one nozzle 18 by one scanning operation, or three colorants are adjoined in the long grooves 22 adjacent to each other. When simultaneously scanning the three nozzles 18 to be discharged, it is assumed that [the width dimension of the bank 12 + the width dimension of the long groove 22] × 3. Here, one scanning means that the nozzle 18 moves from one end to the other end of the glass substrate 10, and the nozzle 18 reciprocates once by two scanning operations. Each time the nozzle 18 is scanned once, the glass substrate 10 is intermittently fed by one pitch. The scanning speed of the nozzle 18 is as high as about 3 m / sec, for example, and the discharge flow rate of the colorant 20 from the nozzle 18 is as small as 80 μl / min to 250 μl / min, for example.

  As shown in the partial enlarged plan view in FIG. 6, the application portions of the colorants 20R, 20G, and 20B for each of the red, green, and blue colors and the light shielding property are applied to the effective area A of the glass substrate 10 by the above-described colorant application process. The banks 12 are formed in stripes. In addition, the colorant of each color is applied and adhered to the surface of the mask 14 in the ineffective area B of the glass substrate 10. After this coating step, the mask 14 to which the colorant is adhered is removed from the glass substrate 10, and then the colorants 20R, 20G, and 20B applied on the glass substrate 10 are baked, thereby making the glass substrate 10 effective. A colored layer is formed in the region A, and a six-sided color filter is obtained in which the glass surface is exposed in the ineffective region B and remains transparent. Then, by cutting out the effective area A of the glass substrate 10, six striped color filters are completed.

  In the above-described embodiment, the banks 12 are formed in a stripe shape. However, as shown in FIG. 7 which is a partially enlarged plan view similar to FIG. 6, the banks 24 are formed in a lattice shape. Red, green, and blue colorants 20R, 20G, and 20B may be applied to the minute recesses 26 surrounded by the lattice-like banks 24, respectively. In this case, at least the surface of the bank 24 is made liquid repellent with respect to the colorants 20R, 20G, and 20B by the above-described method so that the colorants 20R, 20G, and 20B do not overflow the bank 24. is necessary.

  As described above, since the colorant 20 is continuously discharged from the nozzle 18 in the colorant application step, the colorant is also applied to the surface of the mask 14 that shields the ineffective area B of the glass substrate 10. The For this reason, it is necessary to prevent unnecessary colorant applied on the surface of the mask 14 from flowing into the opening 16 of the mask 14, that is, into the effective area A of the glass substrate 10. A method for this countermeasure will be described with reference to FIGS.

  8 is a plan view of the mask, FIG. 9 is a cross-sectional view taken along arrow IX-IX in FIG. 8, and FIG. 10 is a cross-sectional view taken along arrow XX in FIG. 9 and 10, the dimension in the thickness direction of the mask 28 is drawn larger than the actual size. The surface of the mask 28 is a tapered surface inclined from the peripheral edge of each opening 30 toward the low position. That is, shallow grooves 32 and 34 having a V-shaped cross section are formed on the surface of the mask 28, and the surface of the mask 28 is a tapered surface that is inclined downward from the central portion toward the peripheral portion as a whole. 36 and 38. The surface of the mask 28 is preferably coated with a liquid repellent material that repels the colorant 20, such as silicon resin or fluorine resin, so that the surface of the mask 28 is liquid repellent with respect to the colorant.

  By processing and forming the surface of the mask 28 as described above, unnecessary colorant discharged from the nozzle 18 onto the surface of the mask 28 in the colorant application step is formed on the surface of the mask 28 along the tapered surface. Since it flows, unnecessary colorant is prevented from flowing from the peripheral edge of the opening 30 of the mask 28 into the opening 30, that is, to the effective area A on the glass substrate 10. Therefore, it is possible to prevent an excessive colorant from being applied to the effective area A on the glass substrate 10.

  FIG. 11 is a plan view and a longitudinal sectional view of a mask having a configuration different from that of the mask 28 shown in FIGS. In FIG. 11, ridge portions (continuous convex portions) 39b are formed in a substantially rectangular shape so as to surround each opening 39a of the mask 39. In other words, the six openings 39a and the flat portion 39c other than the openings 39a are partitioned by the six weirs (projected portions 39b). Accordingly, in the colorant application process, unnecessary colorant discharged from the nozzle 18 to the portion other than the opening 39a of the mask 39, that is, the flat portion 39c is blocked by the protruding portion 39b. Is prevented from flowing into the opening 39a from the periphery of the opening 39a of the mask 39, that is, into the effective area A on the glass substrate 10. Therefore, it is possible to prevent an excessive colorant from being applied to the effective area A on the glass substrate 10.

In FIG. 11, the protruding portion 39b has a wall surface 391 that rises vertically at the periphery of the opening 39a, and an inclined surface 392 that extends from the top edge of the wall surface 391 to the flat surface portion 39c. However, the shape is not limited to this, and any shape may be used as long as the opening 39a and the flat portion 39c are partitioned by the protruding portion 39b. For example, the inclined surface 392 may be a substantially vertical surface, and the ridge line portion at the top of the wall surface 391 may be a flat surface or an upward convex curved surface.
In addition, the mask 39 shown in FIG. 11 may be formed by etching a region corresponding to the flat portion 39c of a metal plate having a thickness approximately equal to the height of the wall surface 391, or alternatively, a resin material may be used. It may be created by molding into such a shape.

  FIG. 12 is a longitudinal sectional view of a mask having a structure different from the masks 28 and 39 shown in FIGS. The mask 40 has a colorant adsorbing layer 44 formed of an adsorbent that adsorbs the colorant on the surface thereof. The adsorbent is prepared by mixing a resin material with a solvent, and the colorant adsorbing layer 44 is formed by coating the adsorbent on the surface of the mask 40. As the resin material, one kind or plural kinds of casein, gelatin, polyvinyl alcohol, carboxymethyl acetal, polyimide resin, acrylic resin, epoxy resin, melamine resin, and the like are used. However, the present invention is not limited to this, and a laminated sheet obtained by laminating and laminating a plurality of sheets with an adsorbent coated on the surface may be created, and the laminated sheet may be adhered to the surface of the mask 40. In this way, when the colorant is sufficiently adsorbed and soiled on one sheet of the outermost layer, by peeling off one sheet of the outermost layer and exposing the sheet of the next layer, The adsorption ability of the colorant can be easily recovered.

  In the mask 40, unnecessary colorant discharged on the surface of the mask 40 in the colorant application process is adsorbed by the colorant adsorption layer 44 on the surface of the mask 40 and is opened from the periphery of the opening 42 of the mask 40. It is prevented from flowing into the effective area A on the glass substrate 10. Therefore, application to the effective area A on the glass substrate 10 can be prevented.

  Next, an example of the configuration of the color filter manufacturing apparatus will be described with reference to FIGS. FIG. 13 is a schematic plan view of an apparatus for applying a colorant onto a glass substrate, and FIG. 14 is a schematic front view of the apparatus and also shows a piping system.

  This apparatus holds a stage 46 that holds the glass substrate 10 on which the mask 14 is aligned and superimposed, and three nozzles 18R, 18G, and 18B that continuously discharge red, green, and blue colorants. A nozzle unit 48, a nozzle scanning mechanism 50 for scanning the nozzle unit 48 with respect to the glass substrate 10 held on the stage 46, and a stage in a direction perpendicular to the scanning direction of the nozzle unit 48 with respect to the nozzle scanning mechanism 50 An intermittent feed mechanism 52 that intermittently moves 46 at a predetermined pitch, an alignment mechanism (not shown) that aligns the glass substrate 10 with respect to the stage 46, and the like are provided. Each nozzle 18R, 18G, 18B of the nozzle unit 48 is connected to the colorant supply system 54 (FIG. 14 shows only the red colorant supply system 54, and the green and blue colorant supply systems. Is not shown in the figure). The colorant supply system 54 includes colorant containers 56R, 56G, and 56B that store colorants, a colorant supply pipe 58 that connects the colorant containers 56R, 56G, and 56B and the nozzles 18R, 18G, and 18B, and A constant pressure pump 60, a mass flow meter 62, a pressure gauge 64, and a filter 66 are provided in the middle of the colorant supply pipe 58.

  The nozzle scanning mechanism 50 reciprocates the nozzle unit 48 left and right at a high speed, for example, 3 m / sec. The intermittent feed mechanism 52 intermittently feeds the stage 46 holding the glass substrate 10 by a predetermined pitch every time the nozzle unit 48 is scanned once from one end side to the other end side. In the illustrated apparatus, first, a red colorant is applied in a stripe shape over the entire glass substrate 10, and then a green colorant is applied in a stripe shape over the entire glass substrate 10 adjacent to the red colorant application portion. Finally, the blue colorant is applied in stripes over the entire glass substrate 10 next to the green colorant application part, and the intermittent feed mechanism 52 has the nozzle unit 48 from the one end side to the other end. Each time scanning to the side is performed, the stage 46 holding the glass substrate 10 is moved intermittently by three rows of the banks 12 and the long grooves 22 formed on the glass substrate 10.

  The nozzle unit 48 holds the three nozzles 18R, 18G, and 18B while shifting their positions in the direction orthogonal to the scanning direction by [the width dimension of the bank 12 + the width dimension of the long groove 22]. While the red, green, and blue colorants are continuously discharged from the nozzles 18R, 18G, and 18B at the same time, the stage 46 is intermittently moved by three rows of the bank 12 and the long groove 22, thereby red, green, and You may make it apply | coat the colorant of each color of blue on the glass substrate 10 simultaneously. As described above, the arrangement and number of nozzles, the discharge mode, and the intermittent feed pitch of the stage 46 are not limited to those of the above-described embodiment. Further, instead of intermittently moving the stage 46 at a predetermined pitch, the stage 46 may be fixed and the nozzle unit 48 may be intermittently moved at a predetermined pitch in a direction orthogonal to the scanning direction.

  In the above-described embodiment, the colorant is applied on the glass substrate 10 provided with the six effective areas A. However, the present invention is not limited thereto, and the glass substrate is provided with a plurality of effective areas. The method of the present invention is applied. In addition, the method of the present invention is similarly applied to a glass substrate having not only a plurality of effective areas but only one effective area and a non-effective area around the effective area. An effect is obtained.

It is a figure for demonstrating one example of embodiment of this invention, and is a figure for demonstrating the process in the manufacturing method of a color filter, Comprising: It is a schematic perspective view which shows the state in which the bank is formed on the glass substrate. It is the fragmentary perspective view which expanded a part of glass substrate shown in FIG. It is a figure for demonstrating the process in the manufacturing method of a color filter, Comprising: It is a schematic perspective view which shows the state which is going to overlap | superpose a mask on a glass substrate. Similarly, it is a schematic perspective view which shows the state which apply | coats a coloring agent on a glass substrate. Similarly, it is a partial enlarged perspective view showing a state where a colorant is applied on a glass substrate. Similarly, it is the elements on larger scale which show the state where the coloring agent was apply | coated on the glass substrate. It is a partial enlarged plan view which shows another embodiment of this invention and shows the state by which the coloring agent was apply | coated on the glass substrate. It is a top view of the mask which shows one example of the surface processing method of the mask used in the manufacturing method of the color filter which concerns on this invention. It is IX-IX arrow sectional drawing of FIG. It is XX arrow sectional drawing of FIG. It is the top view and longitudinal cross-sectional view of a mask which show another example of the surface processing method of the mask used in the manufacturing method of the color filter which concerns on this invention. It is a longitudinal cross-sectional view of the mask which shows another example of the surface processing method of the mask used in the manufacturing method of the color filter which concerns on this invention. It is a schematic plan view which shows one example of a structure of the coating device of the coloring agent used in order to implement the manufacturing method of the color filter which concerns on this invention. It is a schematic front view of the apparatus shown in FIG. 13, and is a figure which also shows a piping system.

Explanation of symbols

10 Glass substrate 12, 24 Light-shielding bank 14, 28, 39, 40 Mask 16, 30, 39a, 42 Mask opening 18, 18R, 18G, 18B Nozzle 20, 20R, 20G, 20B Colorant 22 Long groove 26 Minute Concave portion 32, 34 Shallow groove 36, 38 Tapered surface 39b Projection portion 39c Plane portion 44 Colorant adsorption layer 46 Stage 48 Nozzle unit 50 Nozzle scanning mechanism 52 Intermittent feed mechanism 54 Colorant supply system A Effective area of glass substrate B Glass substrate Ineffective area

Claims (10)

In a method for producing a color filter by applying a colorant on a transparent substrate having a light-shielding bank having a predetermined pattern functioning as a black matrix formed on the surface,
A step of aligning and overlaying a mask in which an opening corresponding to an effective portion of the color filter is formed on the bank forming surface side of the transparent substrate;
While the nozzle is scanned with respect to the transparent substrate, the transparent substrate and the nozzle are intermittently moved at a predetermined pitch in a direction orthogonal to the scanning direction, and the colorant is continuously discharged from the nozzle, thereby transparent substrate On top, applying a colorant between the light-shielding banks;
A method for producing a color filter, comprising: The method for producing a color filter according to claim 1, wherein a mask having a tapered surface that is inclined on the surface from the periphery of the opening corresponding to the effective portion of the color filter in a low position direction is used. The method for producing a color filter according to claim 2, wherein the taper surface is coated with a liquid repellent material that repels a colorant. The method for producing a color filter according to claim 1, wherein a mask having a protrusion formed on the surface surrounding the periphery of the opening corresponding to the effective portion of the color filter is used. The manufacturing method of the color filter of Claim 1 using the mask which has a colorant adsorption layer formed with the adsorbent which adsorb | sucks a colorant on the surface. An opening corresponding to the effective portion of the color filter is formed, and is aligned and superimposed on a transparent substrate on which a light-shielding bank having a predetermined pattern functioning as a black matrix is formed. In the mask for manufacturing a color filter that prevents the colorant from being applied to the part corresponding to
A mask for manufacturing a color filter, characterized in that a tapered surface is formed on the surface so as to be inclined from the periphery of the opening corresponding to the effective portion of the color filter toward the lower position. The color filter manufacturing mask according to claim 6, wherein the tapered surface is coated with a liquid repellent material that repels a colorant. An opening corresponding to the effective portion of the color filter is formed, and is aligned and superimposed on a transparent substrate on which a light-shielding bank having a predetermined pattern functioning as a black matrix is formed. In the mask for manufacturing a color filter that prevents the colorant from being applied to the part corresponding to
A mask for producing a color filter, characterized in that a protrusion is formed on the surface so as to surround the periphery of the opening corresponding to the effective part of the color filter. An opening corresponding to the effective portion of the color filter is formed, and is aligned and superimposed on a transparent substrate on which a light-shielding bank having a predetermined pattern functioning as a black matrix is formed. In the mask for manufacturing a color filter that prevents the colorant from being applied to the part corresponding to
A mask for producing a color filter, comprising a colorant adsorbing layer formed of an adsorbent that adsorbs a colorant on a surface thereof. In an apparatus for manufacturing a color filter by applying a colorant on a transparent substrate,
A stage for holding a transparent substrate on which a mask having an opening corresponding to an effective portion of the color filter is aligned and superimposed and a light-shielding bank having a predetermined pattern functioning as a black matrix is formed;
A nozzle that continuously discharges the colorant;
A colorant supply means for supplying the colorant to the nozzle;
Nozzle holding means for holding the nozzle;
A nozzle scanning mechanism that scans the nozzle held by the nozzle holding unit with respect to the transparent substrate held by the stage and applies a colorant between the light-shielding banks from the nozzle to the transparent substrate;
An intermittent feeding mechanism that intermittently moves the nozzle scanning mechanism and the stage at a predetermined pitch each time the nozzle is scanned once relative to a direction orthogonal to the scanning direction of the nozzle;
An apparatus for producing a color filter, comprising:

Images