JP2006234411A - Oscillation gyroscope sensor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce manufacturing costs and heighten performance, function, etc. of an oscillation gyroscope sensor. <P>SOLUTION: The oscillation gyroscope sensor for detecting angular velocities provided for an oscillator 10 on the basis of phase differences between drive signals and detection signals shares one and the same element 12 as a drive element and a detection element or use elements operated by different principles of operation as a drive element and a detection element. The drive element and the detection element may be installed along planes oriented in the same direction, along planes oriented in the opposite directions, or at substantially same positions. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a vibration type gyro sensor that detects an angular velocity applied to a vibrator by utilizing a Coriolis force. More specifically, the vibration type gyro sensor detects the angular velocity based on a phase difference between a drive signal and a detection signal. It relates to sensors.

  Conventionally, as a vibration type gyro sensor that detects an angular velocity applied to a vibrator by using a Coriolis force and detects the angular velocity based on a phase difference between a drive signal and a detection signal, Patent Literature There are those described in 1-3.

  The gyro sensor of Patent Document 1 includes a columnar vibrating body, a driving piezoelectric transducer attached to a first side surface of the vibrating body, and a reading side attached to a second side surface orthogonal to the first side surface. A vibration gyro comprising: a piezoelectric transducer; wherein the vibration of the vibrating body driven by the driving piezoelectric transducer is converted into an electrical signal by the readout piezoelectric transducer, and an angular velocity is detected by the electrical signal; Phase detecting means for detecting a change in the phase of the electric signal with respect to the phase of the driving signal for driving the driving piezoelectric transducer is provided, and the angular velocity is detected based on the change in the phase detected by the phase detecting means (patent) Claim 1).

  The gyro sensor disclosed in Patent Document 2 is a vibrator configured using a piezoelectric single crystal that uses a horizontal in-plane vibration as a driving vibration, and includes a driving unit that drives the driving vibration, and a driving vibration by the driving unit. A vibrator having a detection means for detecting a vibration state in a vibration mode different from the drive vibration generated in response to the drive vibration generated along with the drive vibration, using the electrical signal used to generate the drive vibration as a reference signal; A phase difference detecting means for detecting a phase difference between the reference signal and the output signal when a signal having a different vibration mode taken out as an electrical signal by the detecting means is used as an output signal, and detected by the phase detecting means; An angular velocity is detected based on a change in phase difference.

  The gyro sensor of Patent Document 3 is a vibration type provided with a vibrator, a driving unit that drives the vibrator to vibrate in a predetermined direction, and a detection unit that outputs a vibration component of the vibrator as an electrical signal by a piezoelectric effect. In the gyroscope, the detection unit is configured to generate an output of the same phase when the vibrator is driven by the driving unit and no angular velocity is given to the vibrator, and vibration due to Coriolis force when the angular velocity is given. A phase difference detection unit configured to detect a phase difference between the pair of detection output units, the phase difference detection unit including a detection output unit that forms a pair in which component outputs are superposed with phases opposite to each other; The angular velocity is detected based on the output (claim 1).

Japanese Patent Publication No. 4-14734 Japanese Patent Laid-Open No. 10-153432 JP-A-10-206166

  The gyro sensor of Patent Document 1 described above uses a piezoelectric element as both the driving element and the detection element, and a driving piezoelectric element is attached to the first side surface of the vibrating body, and the second side surface orthogonal to the first side surface. A piezoelectric element for reading is attached to the. In the gyro sensors of Patent Documents 2 and 3, the vibrating body is formed of a piezoelectric material, and electrodes are used as the drive element and the detection element.

  Therefore, since the gyro sensor of Patent Document 1 has a piezoelectric element attached to one side surface of the vibrating body and a side surface orthogonal thereto, the driving element and the detection element are attached to the vibrator with high accuracy, and the manufacturing cost is low. As the driving element and the detecting element operate on the same operating principle (piezoelectric element), the driving element and the detecting element that operate on the optimal operating principle are used. It was something that could not be raised. Moreover, since the gyro sensor of patent documents 2 and 3 uses what operates according to the same operation principle (electrode) as a drive element and a detection element, it uses what operates according to the optimal operation principle as a drive element and a detection element, respectively. The performance and function of the gyro sensor could not be improved.

  The present invention has been made in view of the circumstances described above, and is a vibration type gyro sensor that detects an angular velocity applied to a vibrator based on a phase difference between a drive signal and a detection signal, and includes a drive element for the vibrator. It is a first object of the present invention to provide a vibration type gyro sensor that does not require high accuracy for mounting a detection element and can reduce the manufacturing cost. In addition, the present invention is a vibration type gyro sensor that detects an angular velocity applied to a vibrator based on a phase difference between a drive signal and a detection signal, and has high accuracy in attaching a drive element and a detection element to the vibrator. There is no need to provide a vibration type gyro sensor that can reduce the manufacturing cost and can improve performance, function, etc. using elements that operate according to the optimum operation principle as a drive element and a detection element, respectively. Second purpose.

In order to achieve the above object, the present invention provides vibration gyro sensors of the following first to fourth inventions.
(First invention)
A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the same element is shared as the drive element and the detection element.
(Second invention)
A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the drive element and the detection element operate according to different operating principles, and the drive element and the detection element are All of them are installed along a plane facing the same direction.
(Third invention)
A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the drive element and the detection element operate according to different operating principles, and the drive element and the detection element are A vibration type gyro sensor characterized by being installed along planes facing in opposite directions.
(Fourth invention)
A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the drive element and the detection element operate according to different operating principles, and the drive element and the detection element are A vibration-type gyro sensor characterized by being installed at substantially the same place.

  In the first to fourth inventions, the material of the vibrator is not limited, and can be appropriately selected from, for example, a piezoelectric material, a constant elastic material, a magnetic material, and the like. Further, the shape of the vibrator is not limited, and can be appropriately selected from, for example, a beam type, a sound type, a plate type, a ring type, a ball type, a linear type, and a reed relay type.

  In the first invention, the element shared as the drive element and the detection element (hereinafter sometimes referred to as “drive / detection element”) includes, for example, the piezoelectric effect, electrostatic force, electromagnetic induction action (transformer, coil, etc.), current magnetism, and the like. Examples of using an effect (such as a magnetoresistive effect element, a Hall element, and a magnetic transistor) can be given, but the invention is not limited thereto.

  In the second to fourth inventions, examples of the element used as the driving element include those utilizing the piezoelectric effect, electrostatic force, electromagnetic induction action (same as above), galvanomagnetic effect (same as above) and the like. However, it is not limited to these. In the second to fourth inventions, examples of the element used as the detection element include those utilizing the piezoelectric effect, electrostatic force, electromagnetic induction action (same as above), galvanomagnetic effect (same as above), and the like. However, it is not limited to these. In the second to fourth inventions, the above-described elements utilizing the piezoelectric effect, electrostatic force, electromagnetic induction effect, galvanomagnetic effect, etc. are elements that operate according to different operating principles.

  In the fourth aspect of the invention, for example, the drive element and the detection element are installed at substantially the same place. For example, the drive element and the detection element are adjacent to each other, the drive element and the detection element are stacked, and the same element. An embodiment in which a drive element is formed in a certain region and a detection element is formed in another region can be exemplified, but the invention is not limited thereto.

  In the first to fourth inventions, the means for detecting the angular velocity applied to the vibrator based on the phase difference between the phase of the drive signal of the drive element and the phase of the detection signal of the detection element is not limited. For example, as described above Known means as described in Patent Documents 1 to 3 can be used.

  Since the vibration gyro sensor of the first invention shares the same element as a drive element and a detection element, high accuracy is not required for attaching the drive element and the detection element to the vibrator, and the manufacturing cost can be reduced. it can. In the vibration type gyro sensor of the second to fourth inventions, the drive element and the detection element are installed along a plane facing the same direction, or installed along planes facing opposite directions, or substantially the same. Because it is installed in a place, high accuracy is not required for mounting the drive element and detection element to the vibrator, and the manufacturing cost can be reduced. Also, the drive element and detection element operate according to different operating principles. Therefore, the performance, function, etc. can be enhanced by using the optimum elements for both elements.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, the present invention is not limited to the following examples. In any of the vibration gyro sensors according to the following embodiments, the angular velocity applied to the vibrator is detected using Coriolis force.
(First embodiment)
FIG. 1 is a schematic view showing an example of a vibration type gyro sensor according to the first invention. In the vibration type gyro sensor of this example, an electrode 12 is attached as a drive / detection element to one side surface of a square columnar beam type vibrator 10 made of a piezoelectric material.

The vibration type gyro sensor of this example applies vibration to the vibrator 10 by the electrode 12 and detects vibration of the vibrator 10 by the electrode 12, and detects a phase difference between the phase of the drive signal by the electrode 12 and the phase of the detection signal. Based on this, the angular velocity given to the vibrator 10 is obtained.
(Second Embodiment)
FIG. 2 is a schematic view showing an example of a vibration type gyro sensor according to the first invention. In the vibration type gyro sensor of this example, a ball-type vibrator 28 made of a magnet or a magnetic material is attached to the tip of an elastic thin wire 26, and a coil 30 is disposed as a drive / detection element in the vicinity of the vibrator 28.

The vibration type gyro sensor of this example applies vibration to the vibrator 28 by the coil 30 and detects vibration of the vibrator 28 by the coil 30, and determines a phase difference between the phase of the drive signal by the coil 30 and the phase of the detection signal. Based on this, the angular velocity given to the vibrator 28 is obtained.
(Third embodiment)
FIG. 3 is a schematic view showing an example of a vibration type gyro sensor according to the first invention. In the vibration type gyro sensor of this example, a linear vibrator 34 made of a magnetic material is attached between the distal ends of a pair of elastic thin wires 32 and 32, and an N pole 36 of a magnet as a driving / detecting element is provided in the vicinity of the vibrator 34. An S pole 38 is arranged.

The vibration type gyro sensor of this example gives vibration to the vibrator 34 in the direction of the arrow in the figure by an alternating current by the N pole 36 and the S pole 38, and detects vibration of the vibrator 34 by the N pole 36 and the S pole 38. The angular velocity applied to the vibrator 34 is determined based on the phase difference between the phase of the drive signal and the phase of the detection signal by the N pole 36 and the S pole 38.
(Angular velocity detection means)
In the vibration type gyro sensor of the first to third embodiments, as means for detecting the angular velocity applied to the vibrator, for example, means using a circuit shown in FIG. In FIG. 4, 14 is a reference signal source, 16 and 16 are buffers, 18 is a capacitor, 20 is a vibrator, 22 is ground, and 24 is an amplification and phase detector. In the circuit of this example, the reference signal from the reference signal source 14 is divided into two by the buffers 16 and 16, one is sent to the transducer 20, and the other is sent to the amplification and phase detector 24 through the line 21. It is done. The detection signal of the drive / detection element is sent to the amplification and phase detector 24 through the line 23. Then, in the amplification and phase detector 24, the phase of the reference signal (driving signal of the driving / detecting element) sent to the amplification and phase detector 24 through the line 21 and the amplification and phase detector through the line 23. Based on the phase difference from the phase of the detection signal of the drive / detection element sent to 24, the angular velocity applied to the vibrator is detected.
(Fourth embodiment)
FIG. 5 is a schematic view showing an example of a vibration type gyro sensor according to the second invention. In the vibration type gyro sensor of this example, an electrode 42 as a drive element and a piezoelectric element 44 as a detection element are attached to one side surface of a square columnar beam type vibrator 40 made of a piezoelectric material.

The vibration type gyro sensor of this example applies vibration to the vibrator 40 by the electrode 42 and detects the vibration of the vibrator 40 by the piezoelectric element 44, and the phase of the drive signal by the electrode 42 and the phase of the detection signal by the piezoelectric element 44. The angular velocity applied to the vibrator 40 is obtained based on the phase difference between
(Fifth embodiment)
FIG. 6 is a schematic view showing an example of a vibration type gyro sensor according to the second invention. In the vibration type gyro sensor of this example, a ball-type vibrator 48 made of a magnet or a magnetic material is attached to the tip of an elastic thin wire 46, and a coil 50 as a drive element and an electrode 52 as a detection element are arranged in the vicinity of the vibrator 48. Is. In the vibration type gyro sensor of this example, the coil 50 and the electrode 52 are both arranged along a plane facing the same direction.

The vibration type gyro sensor of this example applies vibration to the vibrator 48 by the coil 50 and detects vibration of the vibrator 48 by the electrode 52, and determines the phase of the drive signal from the coil 50 and the phase of the detection signal from the electrode 52. Based on the phase difference, the angular velocity applied to the vibrator 48 is obtained.
(Sixth embodiment)
FIG. 7 is a schematic view showing an example of a vibration type gyro sensor according to the second invention. In the vibration type gyro sensor of this example, a ball-type vibrator 56 made of a magnet is attached between the tip portions of a pair of springs 54, 54, a coil 58 is used as a drive element in the vicinity of the vibrator 56, and an MR sensor ( Magnetoresistive element) 60 is disposed. In the vibration type gyro sensor of this example, the coil 58 and the MR sensor 60 are both arranged along a plane facing the same direction.

  Further, in the vibration type gyro sensor of this example, the coil 58 and the MR sensor 60 are enclosed in a mold body 62 made of elastomer, and the springs 54 and 54 and the vibrator 56 are formed inside the mold body 62. Arranged in the space 63.

The vibration-type gyro sensor of this example applies vibration in the direction of the arrow in the figure to the vibrator 56 by the coil 58, detects vibration of the vibrator 56 by the MR sensor 60, and determines the phase of the drive signal from the coil 58 and the MR sensor 60. The angular velocity applied to the vibrator 56 is obtained based on the phase difference from the phase of the detection signal by.
(Seventh embodiment)
FIG. 8A is a schematic view showing an example of a vibration type gyro sensor according to the second invention. In the vibration type gyro sensor of this example, a reed relay type vibrator 66 made of a magnet or a magnetic material is attached to the distal end portion of the linear support 64, and a coil 68 as a drive element and an MR as a detection element are provided in the vicinity of the vibrator 66. The sensor 70 is arranged. In the vibration type gyro sensor of this example, the coil 68 and the MR sensor 70 are both arranged along a plane facing the same direction. Further, in the vibration type gyro sensor of this example, a passage port 69 through which the counter electrode 67 passes is provided at the tip of the vibrator 66 so that the tip of the vibrator 66 does not contact the counter electrode 67 during vibration.

  Further, in the vibration type gyro sensor of this example, the proximal end side of the linear support body 64 and the coil 68 are enclosed in a mold body 74 made of elastomer, and the distal end side of the linear support body 64, the vibrator 66, The MR sensor 70 is disposed in a space 76 formed inside the mold body 74. Further, in the vibration type gyro sensor of the present example, the space 76 is evacuated, thereby improving the vibration stability of the vibrator.

The vibration type gyro sensor of this example gives vibration in the direction of the arrow in the drawing with the coil 68 as a fulcrum to the vibrator 66 at the connection point with the linear support 64, and detects vibration of the vibrator 66 by the MR sensor 70. Based on the phase difference between the phase of the drive signal from the coil 68 and the phase of the detection signal from the MR sensor 70, the angular velocity applied to the vibrator 66 is obtained.
(Eighth embodiment)
FIG. 9 is a schematic view showing an example of a vibration type gyro sensor according to the second invention. In the vibration type gyro sensor of this example, a sound type vibrator 112 made of a magnetic material (for example, Ni, Fe, Co, etc.) is attached to the distal end portion of the linear support body 110, and as a drive element in the vicinity of the vibrator 112. A coil 114 and an MR sensor 116 as a detection element are arranged. In the vibration type gyro sensor of this example, the coil 114 and the MR sensor 116 are both arranged along a plane facing the same direction.

  Further, in the vibration type gyro sensor of the present example, the proximal end side of the linear support member 110 and the coil 114 are enclosed in a mold body 118 made of an elastomer, and the distal end side of the linear support member 110, the vibrator 112, and The MR sensor 116 is disposed inside the glass tube 120 sealed in the mold body 118.

The vibration type gyro sensor of this example applies vibrations in the direction of the arrow in the figure to the vibrator 112 by the coil 114 so that the tip of the vibrator 112 opens and closes, and detects the vibration of the vibrator 112 by the MR sensor 116. Based on the phase difference between the phase of the drive signal by 114 and the phase of the detection signal by the MR sensor 116, the angular velocity applied to the vibrator 112 is obtained.
(Ninth embodiment)
FIG. 10 is a schematic view showing an example of a vibration type gyro sensor according to the second invention. The vibration-type gyro sensor of this example has a sound 132 made of a non-magnetic material at the tip of the linear support 130 and a small magnet 134 fixed to the tip of one of the bars 132 of the sound 132. A saddle type vibrator 136 is attached, and an electrostatic application mechanism 138 as a drive element and an MR sensor 140 as a detection element are arranged in the vicinity of the vibrator 136. The electrostatic application mechanism 138 includes a DC power supply 142, counter electrodes 144 and 144, and a ground 146. In the vibration gyro sensor of this example, the electrostatic application mechanism 138 and the MR sensor 140 are both arranged along a plane that faces the same direction.

  Further, in the vibration type gyro sensor of this example, the base end side of the linear support 130 and the counter electrodes 144 and 144 are enclosed in a mold body 148 made of elastomer, The element 136 and the MR sensor 140 are disposed in a space 150 formed in the mold body 148.

In the vibration type gyro sensor of this example, the electrostatic force applying mechanism 138 applies vibration in the direction of the arrow to the vibrator 136 so that the tip of the vibrator 136 opens and closes, and the vibration of the vibrator 136 is detected by the MR sensor 140. Then, based on the phase difference between the phase of the drive signal from the electrostatic application mechanism 138 and the phase of the detection signal from the MR sensor 140, the angular velocity applied to the vibrator 136 is obtained.
(10th Embodiment)
FIG. 11 is a schematic view showing an example of a vibration type gyro sensor according to the third invention. In the vibration type gyro sensor of this example, an electrode 78 is attached as a drive element to one side surface of a square columnar beam type vibrator 76 made of a piezoelectric material, and a detection element is provided on the side surface opposite to the side surface to which the electrode 78 is attached. A piezoelectric element 80 is attached.

The vibration-type gyro sensor of this example detects an angular velocity applied to the vibrator 76 using Coriolis force. Specifically, the vibrator 78 applies vibration to the vibrator 76 by the electrode 78 and The vibration is detected by the piezoelectric element 80, and the angular velocity applied to the vibrator 76 is obtained based on the phase difference between the phase of the drive signal from the electrode 78 and the phase of the detection signal from the piezoelectric element 80.
(Eleventh embodiment)
FIG. 12 is a schematic view showing an example of a vibration type gyro sensor according to the fourth invention. In the vibration type gyro sensor of this example, an electrode 84 is attached as a driving element to one side surface of a square columnar beam type vibrator 82 made of a piezoelectric material, and the piezoelectric element is used as a detection element adjacent to the electrode 84 on the same side surface. 86 is attached.

The vibration type gyro sensor of this example applies vibration to the vibrator 82 by the electrode 84 and detects the vibration of the vibrator 82 by the piezoelectric element 86, and the phase of the drive signal by the electrode 84 and the phase of the detection signal by the piezoelectric element 86. The angular velocity applied to the vibrator 82 is obtained based on the phase difference between
(Twelfth embodiment)
FIG. 13 is a schematic view showing an example of a vibration type gyro sensor according to the fourth invention. The vibration type gyro sensor of this example has an electrode 90 as a driving element attached to one side surface of a square columnar beam type vibrator 88 made of a piezoelectric material, and a piezoelectric element 92 as a detection element laminated on the electrode 90. It is.

The vibration type gyro sensor of this example applies vibration to the vibrator 88 by the electrode 90 and detects the vibration of the vibrator 88 by the piezoelectric element 92, and the phase of the drive signal by the electrode 90 and the phase of the detection signal by the piezoelectric element 92. The angular velocity given to the vibrator 88 is obtained based on the phase difference between
(13th Embodiment)
FIG. 14 is a schematic view showing an example of a vibration type gyro sensor according to the fourth invention. In the vibration type gyro sensor of this example, an element 96 is attached to one side surface of a square columnar beam type vibrator 94 made of a piezoelectric material, an electrode 98 is formed as a driving element in a region where the element 96 is provided, and other regions A piezoelectric element 100 is formed as a detection element.

  The vibration type gyro sensor of this example applies vibration to the vibrator 94 by the electrode 98 and detects the vibration of the vibrator 94 by the piezoelectric element 100, and the phase of the drive signal by the electrode 98 and the phase of the detection signal by the piezoelectric element 100. The angular velocity given to the vibrator 94 is obtained based on the phase difference between

It is the schematic which shows an example of the vibration type gyro sensor which concerns on 1st invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 1st invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 1st invention. It is a circuit diagram which shows an example of an angular velocity detection means. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 2nd invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 2nd invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 2nd invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 2nd invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 2nd invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 2nd invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 3rd invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 4th invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 4th invention. It is the schematic which shows an example of the vibration type gyro sensor which concerns on 4th invention.

Explanation of symbols

10 vibrator 12 electrode 28 vibrator 30 coil 34 vibrator 36 north pole 38 south pole 40 vibrator 42 electrode 44 piezoelectric element 48 vibrator 50 coil 52 electrode 56 vibrator 58 coil 60 MR sensor 66 vibrator 68 coil 70 MR sensor 76 vibrator 78 electrode 80 piezoelectric element 82 vibrator 84 electrode 86 piezoelectric element 88 vibrator 90 electrode 92 piezoelectric element 94 vibrator 96 element 98 electrode 100 piezoelectric element 112 vibrator 114 coil 116 MR sensor 136 vibrator 138 electrostatic application mechanism 140 MR sensor

Claims (7)

  A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the same element is shared as the drive element and the detection element.   A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the drive element and the detection element operate according to different operating principles, and the drive element and the detection element are All of them are installed along a plane facing the same direction.   A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the drive element and the detection element operate according to different operating principles, and the drive element and the detection element are A vibration type gyro sensor characterized by being installed along planes facing in opposite directions.   A vibrator, a drive element that applies vibration to the vibrator, and a detection element that detects the vibration of the vibrator; the phase of the drive signal of the drive element and the phase of the detection signal of the detection element A vibration type gyro sensor for obtaining an angular velocity applied to the vibrator based on a phase difference, wherein the drive element and the detection element operate according to different operating principles, and the drive element and the detection element are A vibration-type gyro sensor characterized by being installed at substantially the same place.   5. The vibration gyro sensor according to claim 4, wherein the drive element and the detection element are installed at substantially the same location by causing the drive element and the detection element to be adjacent to each other.   5. The vibration gyro sensor according to claim 4, wherein the drive element and the detection element are installed at substantially the same location by stacking the drive element and the detection element. 6.   The drive element and the detection element are installed at substantially the same place by forming the drive element in a region of the same element and forming the detection element in another region. 5. The vibration type gyro sensor according to 4.

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