JP2006234384A - Strain gauge device - Google Patents

Strain gauge device Download PDF

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JP2006234384A
JP2006234384A JP2005044936A JP2005044936A JP2006234384A JP 2006234384 A JP2006234384 A JP 2006234384A JP 2005044936 A JP2005044936 A JP 2005044936A JP 2005044936 A JP2005044936 A JP 2005044936A JP 2006234384 A JP2006234384 A JP 2006234384A
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resistor
pattern
strain gauge
gauge device
adjustment
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Atsunori Ando
敦規 安藤
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Toshiba Hokuto Electronics Corp
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Toshiba Hokuto Electronics Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a strain gauge device improved in the measurement accuracy of strain quantity. <P>SOLUTION: In the strain gauge device provided with an insulation member 100 and a resistor 200 contacting with the insulation member 100, the resistor 200 has electric connection with a return pattern 111 going back and forth by turning at the both ends and the resistor control pattern 112 provided with holes C1 to C11 having no resistance and surrounded by resistors electrically connected with the return pattern 11. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は起歪部材などに発生する歪み量を測定する歪ゲージ装置に関する。   The present invention relates to a strain gauge device for measuring a strain amount generated in a strain generating member or the like.

一般に、外力によって発生した起歪部材などの歪み量を測定する場合、歪ゲージ装置が使用される。   In general, a strain gauge device is used when measuring a strain amount of a strain generating member or the like generated by an external force.

ここで、歪ゲージ装置を用いて歪み量を測定する方法について図2を参照して説明する。図2(a)に示すように、起歪部材21の図示上面21aおよび図示下面21bにそれぞれ、たとえば2つの歪ゲージ装置22a、22bおよび22c、22dを配置する。そして、起歪部材21上に配置した歪ゲージ装置22a〜22dを用いて、図2(b)に示すようなブリッジ回路23を構成する。ここでは、歪ゲージ装置22a〜22dに設ける抵抗体の抵抗値をR1〜R4としている。また、点a、c間に入力回路たとえば電源回路24を接続し、点b、d間に出力回路25を接続する。   Here, a method of measuring a strain amount using a strain gauge device will be described with reference to FIG. As shown in FIG. 2A, for example, two strain gauge devices 22a, 22b and 22c, 22d are arranged on the illustrated upper surface 21a and the illustrated lower surface 21b of the strain generating member 21, respectively. And the bridge circuit 23 as shown in FIG.2 (b) is comprised using the strain gauge apparatuses 22a-22d arrange | positioned on the strain generating member 21. FIG. Here, the resistance values of the resistors provided in the strain gauge devices 22a to 22d are R1 to R4. An input circuit such as a power supply circuit 24 is connected between the points a and c, and an output circuit 25 is connected between the points b and d.

図2(b)のブリッジ回路23において、R1=R2、R3=R4とし、起歪部材21に外力を加えない状態ではブリッジ回路23が平衡し、出力回路25の両端e、f間の出力が0になるように設定している。   In the bridge circuit 23 of FIG. 2B, when R1 = R2 and R3 = R4, and the external force is not applied to the strain generating member 21, the bridge circuit 23 is balanced, and the output between the ends e and f of the output circuit 25 is It is set to be zero.

上記の構成で、図2(a)の起歪部材21に外力が加わり、起歪部材21に歪みが発生すると、歪ゲージ装置22a〜22dが変形し、抵抗値R1〜R4の大きさが変化する。このとき、図2(b)のブリッジ回路23の平衡がくずれ、出力回路25の両端e、fに電圧が発生する。この電圧は起歪部材21に発生する歪み量に対応し、この大きさをもとに起歪部材21の歪み量を測定する。   With the above configuration, when an external force is applied to the strain generating member 21 in FIG. 2A and the strain generating member 21 is distorted, the strain gauge devices 22a to 22d are deformed, and the magnitudes of the resistance values R1 to R4 change. To do. At this time, the balance of the bridge circuit 23 in FIG. 2B is lost, and a voltage is generated at both ends e and f of the output circuit 25. This voltage corresponds to the amount of strain generated in the strain generating member 21, and the strain amount of the strain generating member 21 is measured based on this magnitude.

ここで、従来の歪ゲージ装置について図3を参照して説明する。図3はパターン化した抵抗体部分のみを示している。   Here, a conventional strain gauge device will be described with reference to FIG. FIG. 3 shows only the patterned resistor portion.

図示上下方向の中央に、共通電極パターン30がたとえば図示横方向に形成されている。共通電極パターン30は、その左右両端に幅の広い第1および第2の幅広パターン30a、30bが設けられ、第1幅広パターン30aと第2幅広パターン30bとの間に、幅の狭い幅狭パターン30cが設けられている。そして、共通電極パターン30の図示上方に第1抵抗体31が形成され、共通電極パターン30の図示下方に第2抵抗体32が形成されている。   A common electrode pattern 30 is formed, for example, in the illustrated horizontal direction at the center in the illustrated vertical direction. The common electrode pattern 30 is provided with wide first and second wide patterns 30a and 30b at both left and right ends, and a narrow narrow pattern between the first wide pattern 30a and the second wide pattern 30b. 30c is provided. A first resistor 31 is formed above the common electrode pattern 30 and a second resistor 32 is formed below the common electrode pattern 30.

第1抵抗体31は、第1幅広パターン30aと電気的に接続し、図示上下の両側で折り返し図示右上がりの斜め方向に複数回往復する往復パターン領域31a、および、この往復パターン領域31aと電気的に接続し、外部回路たとえば電源などの入力回路に接続する外部接続パターン領域31bなどから構成されている。   The first resistor 31 is electrically connected to the first wide pattern 30a, folded back and forth on both upper and lower sides in the figure, and reciprocated a plurality of times in the obliquely upward direction in the figure, and the reciprocating pattern area 31a and the The external connection pattern region 31b is connected to an external circuit, for example, an input circuit such as a power supply.

第2抵抗体32は、第1幅広パターン30aと電気的に接続し、図示上下の両側で折り返し、図示右下がりの斜め方向に複数回往復する往復パターン領域32a、および、この往復パターン領域32aと電気的に接続し、外部回路たとえば電源などの入力回路に接続する外部接続パターン領域32bなどから構成されている。   The second resistor 32 is electrically connected to the first wide pattern 30a, folded back on both upper and lower sides in the figure, and reciprocated a plurality of times in the diagonally downward direction in the figure, and the reciprocating pattern area 32a The external connection pattern region 32b is electrically connected and connected to an external circuit such as an input circuit such as a power source.

また、第3抵抗体および第4抵抗体も、第1抵抗体31および第2抵抗体32と同様の方法で形成する。   The third resistor and the fourth resistor are also formed by the same method as the first resistor 31 and the second resistor 32.

そして、第1抵抗体〜第4抵抗体を、図2(a)に示すように、起歪部材の上下両面に接合する。また、第1抵抗体〜第4抵抗体を、図2(b)に示すようなブリッジ回路に形成し、さらに入力回路および出力回路などを接続する。   And the 1st resistor-the 4th resistor are joined to the up-and-down both sides of a strain generating member, as shown in Drawing 2 (a). Further, the first resistor to the fourth resistor are formed in a bridge circuit as shown in FIG. 2B, and an input circuit and an output circuit are further connected.

従来の歪ゲージ装置は、絶縁部材上に抵抗体を張り付け、エッチングなどで抵抗体をパターン化して形成する。このとき、図2(b)に示すように、4つの抵抗R1〜R4でブリッジ回路23を構成した場合に、ブリッジ回路23が平衡するようにR1=R2、R3=R4に設定する。しかし、製造工程における精度上の問題などから、R1=R2、R3=R4にならない場合がある。   A conventional strain gauge device is formed by attaching a resistor on an insulating member and patterning the resistor by etching or the like. At this time, as shown in FIG. 2B, when the bridge circuit 23 is constituted by four resistors R1 to R4, R1 = R2 and R3 = R4 are set so that the bridge circuit 23 is balanced. However, R1 = R2 and R3 = R4 may not be satisfied due to accuracy problems in the manufacturing process.

このような場合、従来の歪ゲージ装置では、たとえばエッチング液を用いて抵抗体の一部を除去するなどして形状を変更している。しかし、その作業が繁雑で、抵抗値の調整作業が困難になっている。   In such a case, in the conventional strain gauge device, the shape is changed by, for example, removing a part of the resistor using an etching solution. However, the work is complicated, and it is difficult to adjust the resistance value.

本発明は、上記した欠点を解決し、抵抗値の調整が容易な歪ゲージ装置を提供することを目的とする。   An object of the present invention is to provide a strain gauge device that solves the above-described drawbacks and that allows easy adjustment of the resistance value.

本発明は、絶縁部材と、この絶縁部材に接合しパターン化した抵抗体とを具備した歪ゲージ装置において、前記抵抗体の一部に、周囲が抵抗体で囲まれた抵抗体のない領域をもつ抵抗調整パターンを設けたことを特徴とする。   The present invention relates to a strain gauge device comprising an insulating member and a resistor bonded and patterned to the insulating member, and a region of the resistor that is surrounded by the resistor and having no resistor. A resistance adjustment pattern is provided.

本発明によれば、パターン化した抵抗体の一部に、周囲が抵抗体で囲まれた抵抗体のない領域をもつ調整パターンを設けている。したがって、たとえば調整パターンの縁と抵抗体のない領域との間に位置する抵抗体を切断することにより、抵抗値を容易に調整でき、測定精度を向上させた歪ゲージ装置が実現する。   According to the present invention, an adjustment pattern having a region without a resistor surrounded by a resistor is provided on a part of the patterned resistor. Therefore, for example, by cutting a resistor positioned between the edge of the adjustment pattern and the region without the resistor, the resistance value can be easily adjusted, and a strain gauge device with improved measurement accuracy is realized.

本発明の実施形態について図1を参照して説明する。図1は図面の関係で、パターン化した抵抗体を線分B−Bで2分し、図の(a)と(b)に分けて示している。   An embodiment of the present invention will be described with reference to FIG. FIG. 1 shows the patterned resistor divided into two by a line segment B-B and divided into (a) and (b) in FIG.

絶縁部材100上に抵抗体200が接合されている。抵抗体200は、図示上下方向の中央に横方向に形成された共通電極パターン10および共通電極パターン10の図示上方に位置する第1抵抗体11、共通電極パターン10の図示下方に位置する第2抵抗体12などから構成されている。   A resistor 200 is joined on the insulating member 100. The resistor 200 includes a common electrode pattern 10 formed in the horizontal direction at the center in the vertical direction in the figure, a first resistor 11 positioned above the common electrode pattern 10 in the figure, and a second resistor located below the common electrode pattern 10 in the figure. It consists of a resistor 12 and the like.

共通電極パターン10は、その左端および中央、右端に幅が広い第1〜第3の幅広パターン101〜103が設けられている。第1幅広パターン101と第2幅広パターン102との間、および、第2幅広パターン102と第3幅広パターン103との間には、第1〜第3の幅広パターン101〜103よりも幅の狭い第1および第2の幅狭パターン104、105が設けられている。そして、共通電極パターン10の図示上方に第1抵抗体11が形成され、共通電極パターン10の図示下方に第2抵抗体12が形成されている。   The common electrode pattern 10 is provided with wide first to third wide patterns 101 to 103 at the left end, the center, and the right end. The width between the first wide pattern 101 and the second wide pattern 102 and the width between the second wide pattern 102 and the third wide pattern 103 are narrower than those of the first to third wide patterns 101 to 103. First and second narrow patterns 104 and 105 are provided. A first resistor 11 is formed above the common electrode pattern 10 and a second resistor 12 is formed below the common electrode pattern 10.

第1抵抗体11は、たとえば第1幅広パターン101と電気的に接続する往復パターン111、および、往復パターン111と電気的に接続する抵抗調整パターン112、この抵抗調整パターン112と電気的に接続し、かつ外部回路たとえば電源などの入力回路と電気的に接続する外部接続パターン113などから構成されている。   The first resistor 11 is electrically connected to, for example, a reciprocating pattern 111 electrically connected to the first wide pattern 101, a resistance adjusting pattern 112 electrically connected to the reciprocating pattern 111, and the resistance adjusting pattern 112. And an external connection pattern 113 that is electrically connected to an external circuit such as an input circuit such as a power supply.

往復パターン111は、たとえば第1幅狭パターン104に沿うその近傍を下側とし、第1幅広パターン101の図示上端とほぼ同じ高さを上側として折り返し、たとえば図示右上がりの斜め方向に複数回往復する形に形成されている。   The reciprocating pattern 111 is folded back, for example, in the vicinity along the first narrow pattern 104 as a lower side and approximately the same height as the upper end in the figure of the first wide pattern 101 as an upper side. It is formed into a shape.

抵抗調整パターン112は、たとえば第1〜第9の調整領域a1〜a9が設けられている。第1調整領域a1には、たとえば抵抗体をパターン化するエッチングの際に抵抗体の一部を除去し、第1調整領域a1を形成する抵抗体パターン部分に、周囲が抵抗体で囲まれて抵抗体のない領域、たとえば絶縁部材100が露出する楕円形状の穴C1が形成されている。第2調整領域a2には、穴C1よりも大きい楕円形状の穴C2と、この穴C2よりも小さく、穴C1よりも大きい楕円形状の穴C3が形成されている。穴C2および穴C3は抵抗調整パターン112の長さ方向に対して垂直方向、つまり図示上下方向に並んでいる。第3調整領域a3は第2調整領域a2と同じパターンに形成され、2つの穴C4、C5が設けられている。   The resistance adjustment pattern 112 is provided with, for example, first to ninth adjustment regions a1 to a9. In the first adjustment region a1, for example, a part of the resistor is removed at the time of etching for patterning the resistor, and the resistor pattern portion forming the first adjustment region a1 is surrounded by the resistor. A region without a resistor, for example, an elliptical hole C1 through which the insulating member 100 is exposed is formed. In the second adjustment region a2, an elliptical hole C2 larger than the hole C1 and an elliptical hole C3 smaller than the hole C2 and larger than the hole C1 are formed. The holes C2 and C3 are arranged in a direction perpendicular to the length direction of the resistance adjustment pattern 112, that is, in the vertical direction in the drawing. The third adjustment region a3 is formed in the same pattern as the second adjustment region a2, and two holes C4 and C5 are provided.

第4調整領域a4は穴C1〜C5よりも大きい矩形状の1つの穴C6が形成されている。第5調整領域a5〜第7調整領域a7は、いずれも第4調整領域a4と同じパターンに形成され、矩形状の1つの穴C7〜C9が設けられている。   In the fourth adjustment region a4, one rectangular hole C6 larger than the holes C1 to C5 is formed. The fifth adjustment region a5 to the seventh adjustment region a7 are all formed in the same pattern as the fourth adjustment region a4, and one rectangular hole C7 to C9 is provided.

第8調整領域a8はほぼ正方形状の穴の部分に、複数たとえば3つの突出状の穴を設けた形状の1つの穴C10が形成されている。この場合、穴C10の外側、たとえば3つの突出状の穴に沿って折り曲がる細い抵抗体が形成される。第9調整領域a9は第8調整領域a8と同じパターンに形成されている。   In the eighth adjustment region a8, one hole C10 having a shape in which a plurality of, for example, three protruding holes are provided is formed in a substantially square hole portion. In this case, a thin resistor that is bent along the outside of the hole C10, for example, along three protruding holes, is formed. The ninth adjustment region a9 is formed in the same pattern as the eighth adjustment region a8.

また、抵抗調整パターン112の図示上縁に、各調整領域a1〜a9ごとにたとえば半円状の切り欠きL1〜L9が形成されている。切り欠きL1〜L9は、たとえば抵抗調整パターン112の長さ方向に対して垂直方向、つまり図示上下方向において、各調整領域に設けた穴C1〜C11と同じ線上に設けている。   Further, for example, semicircular cutouts L1 to L9 are formed on the upper edge of the resistance adjustment pattern 112 for each of the adjustment regions a1 to a9. The notches L1 to L9 are provided on the same line as the holes C1 to C11 provided in each adjustment region, for example, in a direction perpendicular to the length direction of the resistance adjustment pattern 112, that is, in the vertical direction in the drawing.

また、抵抗調整パターン112の図示下縁には、各調整領域a1〜a9の始端および境界部分、終端に、それぞれ細長い切り込みM1〜M10を設けている。切り込みM1〜M10は、たとえば各調整領域a1〜a9の穴の上端とほぼ同じ位置まで延びている。この場合、切り込みM1〜M10の部分で抵抗調整パターン112の幅が狭くなり、抵抗体の抵抗値が大きくなるようにしている。   Further, at the lower edge of the resistance adjustment pattern 112 in the figure, elongated cuts M1 to M10 are provided at the start and boundary portions and the end of the adjustment regions a1 to a9, respectively. The cuts M1 to M10 extend, for example, to substantially the same positions as the upper ends of the holes of the adjustment regions a1 to a9. In this case, the width of the resistance adjustment pattern 112 is narrowed at the notches M1 to M10, and the resistance value of the resistor is increased.

上記の構成で、抵抗値を調整する場合、たとえば符号N1〜N11を付した部分、たとえば各穴C1〜C11の周囲に位置する抵抗体を切断する。このとき、切断された調整領域における抵抗体の形状が変化する。つまり、抵抗体を切断した調整領域の抵抗値が変化し、抵抗値が調整される。また、半円状の切り欠きL1〜L9で幅が狭くなっているため、切断作業が容易になる。   When the resistance value is adjusted with the above-described configuration, for example, the portions provided with reference numerals N1 to N11, for example, the resistors located around the holes C1 to C11 are cut. At this time, the shape of the resistor in the cut adjustment region changes. That is, the resistance value of the adjustment region where the resistor is cut changes, and the resistance value is adjusted. Moreover, since the width | variety is narrow by the semicircle-shaped notch L1-L9, a cutting operation becomes easy.

なお、各調整領域a1〜a9には穴の大きさや形状が相違する複数種類の穴を形成している。したがって、切断する箇所によって抵抗値の変化分が相違し、調整する抵抗値の大きさによって切断箇所が適宜選択される。また、切断箇所は、抵抗値を調整する大きさに合わせて、たとえば1箇所、あるいは複数箇所が選択され切断される。   In each of the adjustment regions a1 to a9, a plurality of types of holes having different hole sizes and shapes are formed. Accordingly, the amount of change in the resistance value differs depending on the location to be cut, and the location to be cut is appropriately selected depending on the magnitude of the resistance value to be adjusted. Further, for example, one place or a plurality of places are selected and cut in accordance with the size of adjusting the resistance value.

なお、第2抵抗体R2の抵抗調整パターンは、共通電極パターン10に対して第1抵抗体R1の抵抗調整パターン111とほぼ線対称であるため、重複する説明を省略する。   Since the resistance adjustment pattern of the second resistor R2 is substantially line symmetric with the resistance adjustment pattern 111 of the first resistor R1 with respect to the common electrode pattern 10, overlapping description is omitted.

また、上記したように2つの第1抵抗体11と第2抵抗体12を設け、第1抵抗体11の抵抗R1と第2抵抗体12の抵抗R2を等しくする場合、2つの抵抗体11、12の抵抗R1、R2のいずれか一方だけを調整してもよく、あるいは、両方の抵抗R1、R2を調整してもよい。   In addition, when the first resistor 11 and the second resistor 12 are provided as described above and the resistance R1 of the first resistor 11 and the resistance R2 of the second resistor 12 are equal, the two resistors 11, Only one of the twelve resistors R1 and R2 may be adjusted, or both resistors R1 and R2 may be adjusted.

上記の実施形態では、抵抗体に往復パターンを設けているが、これ以外の形状のパターンを用いることもできる。   In the above embodiment, the resistor is provided with the reciprocating pattern, but a pattern having a shape other than this can also be used.

上記した構成によれば、歪ゲージ装置に設けた抵抗値の調整が容易になり、測定精度を向上させた歪ゲージ装置が実現する。   According to the above configuration, the resistance value provided in the strain gauge device can be easily adjusted, and a strain gauge device with improved measurement accuracy can be realized.

本発明の実施形態を説明する上面図である。It is a top view explaining embodiment of this invention. 歪みの測定方法を説明する図で、(a)は歪ゲージの概略の斜視図、 (b)は回路図である。It is a figure explaining the measuring method of distortion, (a) is a schematic perspective view of a strain gauge, (b) is a circuit diagram. 従来例を説明する上面図である。It is a top view explaining a prior art example.

符号の説明Explanation of symbols

100…絶縁部材
200…抵抗体
10…共通電極パターン
11…第1抵抗体
111…第1抵抗体の往復パターン
112…第1抵抗体の抵抗調整パターン
113…第1抵抗体の外部接続パターン113
12…第2抵抗体
a1〜a9…第1〜第9調整領域
C1〜C11…穴
DESCRIPTION OF SYMBOLS 100 ... Insulating member 200 ... Resistor 10 ... Common electrode pattern 11 ... 1st resistor 111 ... Reciprocating pattern 112 of 1st resistor ... Resistance adjustment pattern 113 of 1st resistor ... External connection pattern 113 of 1st resistor
12 ... 2nd resistor a1-a9 ... 1st-9th adjustment area C1-C11 ... hole

Claims (2)

絶縁部材と、この絶縁部材に接合しパターン化した抵抗体とを具備した歪ゲージ装置において、前記抵抗体の一部に、周囲が抵抗体で囲まれた抵抗体のない領域をもつ抵抗調整パターンを設けたことを特徴とする歪ゲージ装置。   In a strain gauge device comprising an insulating member and a resistor bonded and patterned to the insulating member, a resistance adjustment pattern having a region having no resistor surrounded by a resistor at a part of the resistor A strain gauge device characterized by comprising: 抵抗体のない領域は、大きさおよび形状の少なくとも一方が相違する複数種類を有する請求項1記載の歪ゲージ装置。   The strain gauge device according to claim 1, wherein the region having no resistor has a plurality of types different in at least one of size and shape.
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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010243192A (en) * 2009-04-01 2010-10-28 A & D Co Ltd Strain gauge and load cell
WO2011163442A1 (en) * 2010-06-23 2011-12-29 Vishay Precision Group, Inc. Strain gage resistance calibration using shunts
WO2013150433A3 (en) * 2012-04-03 2014-01-16 Metallux Sa A method for producing a force transducer, and corresponding force transducer
US9460834B2 (en) 2012-04-03 2016-10-04 Metallux Sa Method for adjusting a calibration element, and corresponding device
JP2018066703A (en) * 2016-10-21 2018-04-26 ミネベアミツミ株式会社 Strain gauge
WO2019093373A1 (en) * 2017-11-08 2019-05-16 ミネベアミツミ株式会社 Strain gauge and production method for strain gauge

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010243192A (en) * 2009-04-01 2010-10-28 A & D Co Ltd Strain gauge and load cell
WO2011163442A1 (en) * 2010-06-23 2011-12-29 Vishay Precision Group, Inc. Strain gage resistance calibration using shunts
WO2013150433A3 (en) * 2012-04-03 2014-01-16 Metallux Sa A method for producing a force transducer, and corresponding force transducer
US9460834B2 (en) 2012-04-03 2016-10-04 Metallux Sa Method for adjusting a calibration element, and corresponding device
JP2018066703A (en) * 2016-10-21 2018-04-26 ミネベアミツミ株式会社 Strain gauge
WO2019093373A1 (en) * 2017-11-08 2019-05-16 ミネベアミツミ株式会社 Strain gauge and production method for strain gauge
JP2019086420A (en) * 2017-11-08 2019-06-06 ミネベアミツミ株式会社 Strain guage and method for manufacturing strain guage

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