JP2006228454A - Electrode for vacuum valve and its manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To aim at improvement of breaking performance of an electrode for a vacuum valve loaded on a vacuum circuit breaker an simplification of its manufacturing process. <P>SOLUTION: A fixed electrode and a movable electrode are arranged on the same axis in opposition to each other in a vacuum valve. Each electrode 1 is formed of copper or a copper alloy with a conductivity of 40% IACS or more, and is composed of a conductive member 5 zoned into a plurality of grooves 2 extended from the center in a radius direction and formed in a windmill shape, and a contactor 3 fitted in protrusion toward an opposite side of each electrode at an outer periphery of each zone of the conductive member 5 and formed of a Cu-Cr alloy. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a vacuum valve electrode used for a vacuum circuit breaker and the like, and a method of manufacturing the same.

  A vacuum valve mounted on a vacuum circuit breaker or the like has a fixed electrode and a movable electrode concentrically opposed to each other in an insulating container maintained at a high vacuum, and the movable electrode is connected to an external operation mechanism section via a bellows. Connected and movable in the axial direction. When an overload current or a short circuit current is generated, both electrodes are instantaneously opened to interrupt the circuit.

  Various types of vacuum valve electrodes have been proposed, and as one of them, a windmill-type electrode made of a contact whose outer peripheral portion protrudes is known. The contact of this electrode is produced by pressing a mixed powder and then sintering it. And the outer peripheral part was processed into the shape which protruded by machining, and the contactor was formed. In addition, there is a type in which a reinforcing plate is joined by brazing to a contact finished in an arbitrary shape by machining (see, for example, Patent Document 1).

Further, even with a longitudinal magnetic field type electrode in which a coil electrode is provided on the back surface of the contact and a magnetic field is applied in the axial direction of the electrode, the contact and the electrode are joined by brazing (see, for example, Patent Document 2).
On the other hand, a vacuum valve having a structure in which an electrode and an arc electrode support member are integrated by a discharge sintering method has been developed in order to reduce the machining process and assembly process of each member accompanying brazing and joining. (For example, refer to Patent Document 3).

JP 2002-334639 A (paragraph 0012) JP-A-6-139886 (paragraph 0013) JP 10-340654 A (paragraph 0028)

  Since the conventional vacuum valve electrode with a protruding outer periphery is configured as described above, when the electrode is opened and the load current is cut off in the vacuum valve mounted on the vacuum circuit breaker An arc is generated between the electrodes. The movement of the arc immediately after the occurrence is stagnant, but then the surface of the contact is rotated at high speed. When the arc is stagnated, it is considered that the energy injected into the contact surface increases, so that the contact surface melts and metal vapor is generated, resulting in a failure to shut off.

A part of the energy injected into the contact surface is considered to be consumed for the heat conduction to the inside of the electrode, and it was necessary to quickly transfer the heat to the inside of the electrode during the period when the arc is stagnant.
Therefore, in Patent Document 1, it is necessary to use a contact material having high heat conduction characteristics in order to obtain an excellent blocking performance. In addition, as shown in Patent Document 2, when the contact and the electrode member are joined by brazing, the brazing material hinders heat conduction between the contact and the electrode member, thereby improving the breaking performance. There was a problem of hindering.

  Conventionally, after a raw material powder is made into a compact by pressure molding, the contactor is made into a raw material by a sintering method, an infiltration method, or the like, and finished in a shape in which an outer peripheral portion protrudes by machining. For this reason, there is a problem that the material is wasted and uneconomical, and time is required for processing. Furthermore, as shown in Patent Document 1 and Patent Document 2, the contact and the peripheral members are brazed, and it is necessary to perform a brazing process in addition to the processing process for manufacturing the contact. There were also problems with many processes.

  Patent Document 3 discloses a vacuum bulb having a structure in which an electrode and an arc electrode support member are integrated by a discharge sintering method. However, only a flat contact and an arc electrode support member are integrated. could not. In addition, although a method of sintering with undulations on the die is shown, this method causes a difference in applied pressure at different thicknesses, resulting in a non-uniform density ratio and obtaining a homogeneous contact It was difficult.

  The present invention has been made to solve the above-described problems. The contactor and the electrode member are joined to each other by means other than brazing, and the arc injection energy is easily diffused into the conductive member. A vacuum valve electrode and a method for manufacturing the same that can suppress local melting and evaporation of the contact, thereby improving the shut-off performance and reducing the amount of contact material used. The purpose is to provide.

  An electrode for a vacuum valve according to the present invention has a fixed electrode and a movable electrode that are opposed to each other in a vacuum valve and are coaxially arranged. Each of the electrodes is made of Cu or Cu having a conductivity of 40% IACS or more. A conductive member formed of an alloy and partitioned into a plurality of sections by grooves extending in the radial direction from the center portion, and a conductive member formed in a windmill shape, and an outer peripheral portion of each section of the conductive member. It is comprised from the contactor which protruded in the opposing side and was formed with the Cu-Cr alloy.

  The vacuum valve electrode according to the present invention is configured as described above, and since the minimum necessary contacts are joined to the conductive member, heat conduction is good, and part of the energy injected by the arc is excellent in thermal conductivity. It can diffuse into the member to obtain excellent blocking performance. Moreover, since the minimum necessary contact member is provided in the outer peripheral portion, the amount of contact material used can be reduced.

  In addition, since the arc-proof layer with the minimum necessary thickness is provided on the surface of the center of the electrode, it is possible to suppress the melting and evaporation of the conductive member, and it is stable because it does not hinder the heat diffusion inside the electrode. Blocking performance can be obtained.

  Furthermore, according to the manufacturing method of the present invention, the contactor, the conductive member, the reinforcing plate, and the arc-resistant layer are joined while forming and sintering the contactor having a protruding outer peripheral portion. The brazing process that has been performed can be omitted. Furthermore, by using a convex or columnar inner mold and a cylindrical punch, a sintered body having a shape in which the outer peripheral portion is protruded can be obtained, and as a result, a contact having a uniform density ratio can be provided. This process can be simplified.

Embodiment 1 FIG.
Embodiment 1 of the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a configuration of a vacuum valve electrode according to Embodiment 1, and FIG. 2 is a cross-sectional view thereof. In FIG. 2, the groove 2 and the electrode rod 6 shown in FIG. 1 are not shown for easy understanding of the cross-sectional structure.

  In FIG. 1, an electrode 1 is provided with a contact 3 that protrudes from the outer peripheral portion of the upper surface of a generally disc-shaped conductive member 5, and an electrode rod 6 is inserted into a joint hole 7 in the electrode center portion 4. It is worn. The interface 8 between the contact 3 and the conductive member 5 is joined. The electrode 1 is partitioned into a plurality of sections by a groove 2 extending in the radial direction from the center, and is formed in a windmill shape.

  With such a configuration, the contact 3 can be provided only in the necessary outer peripheral portion, so that the amount of use of the contact 3 can be greatly reduced. In addition, since the conductive member 5 is disposed directly under the contact 3, heat conduction is good, and as a result, heat generated by the arc injection energy can be diffused into the electrode to obtain excellent blocking performance.

  The material of the contactor 3 is mainly desired to have excellent barrier properties, pressure resistance, and welding resistance, and a Cu—Cr alloy in which Cr particles are dispersed in a Cu matrix is used. The content of Cr as an arc resistant component is preferably in the range of 20 to 60 wt%. The reason is that if it is less than 20 wt%, it is easy to be damaged by the arc and the welding resistance is lowered, and if it exceeds 60 wt%, the workability and thermal shock resistance are lowered. Further, the density ratio of the Cu—Cr alloy is preferably 95% or more in order to obtain high electrical conductivity and thermal conductivity.

  In addition, in order to improve the pressure resistance and barrier performance of the Cu—Cr alloy, one or more elements of Mo, Nb, W, Ta, Fe, Al, Si, and Ti may be added. Moreover, in order to ensure welding resistance, you may add the low melting-point component of Bi, Te, Se, and Sb in contact material. The content of the low melting point component is preferably 0.01 to 5 wt%. The reason is that if 0.01 wt% or less, the effect of improving the welding resistance cannot be obtained, and if 5 wt% or more, the pressure resistance performance is lowered.

As the conductive member 5, pure Cu or a Cu alloy having a conductivity of 40% IACS or higher is used. If the electrical conductivity is less than 40% IACS, the thermal conductivity is inferior, and the effect of improving the blocking performance cannot be obtained.
Examples of the Cu alloy include those in which one or more of Ag, Cr, Zr, W, Mo, Nb, Sn, Fe, Si, and Ni are added to Cu.

Embodiment 2. FIG.
Next, a second embodiment of the present invention will be described with reference to the drawings. FIG. 3 shows a cross-sectional view of the vacuum valve electrode according to the second embodiment, in which a reinforcing plate 9 is provided on the vacuum valve electrode according to the first embodiment. 3, the illustration of the groove 2 and the electrode rod 6 is omitted as in FIG.

In this electrode 1, a reinforcing plate 9 having higher strength than the conductive member 5 is provided on the back surface of the conductive member 5, and an interface 10 between the reinforcing plate 9 and the conductive member 5 is joined.
The reinforcing plate 9 is made of stainless steel that has a strength that can withstand the mechanical force applied when the electrode 1 is opened and closed, and that can withstand the temperature in the assembly process of the vacuum valve and can ensure electrical pressure resistance. The stainless steel is preferably non-magnetic austenitic stainless steel (for example, SUS304, SUS316, etc.) that is not affected by the magnetism of the windmill electrode.

  In the vacuum valve, the larger the load current that can be cut off, the larger the diameter of the electrode 1, and the greater the mechanical force for opening and closing the electrode 1. As the conductive member 5, Cu having high thermal conductivity or a Cu alloy having a conductivity of 40% IACS or more is used. However, the mechanical strength is lowered because the temperature is higher than the recrystallization temperature of Cu and Cu alloy in the assembly process of the vacuum valve. Therefore, by providing the reinforcing plate 9 as described above, the strength of the electrode 1 can be supplemented, and deformation of the electrode 1 caused by mechanical force during opening and closing can be prevented.

Embodiment 3 FIG.
Next, a third embodiment of the present invention will be described with reference to the drawings. FIG. 4 is a cross-sectional view of the vacuum valve electrode according to the third embodiment, in which the arc valve layer 11 is provided on the vacuum valve electrode according to the first embodiment. 4, the illustration of the groove 2 and the electrode rod 6 is omitted, as in FIGS.

In this electrode, an arc resistant layer 11 is provided on the surface of the electrode central portion 4, and an interface 12 between the conductive member 5 and the arc resistant layer 11 is joined.
In the electrode 1 in which the outer peripheral contact 3 contacts the counter electrode, the surface of the electrode central portion 4 is also exposed to the arc when the load current is interrupted. The surfaces of the contact 3 and the electrode center 4 of the electrode 1 are melted and evaporated by the arc.

  However, since the arc rotating at high speed mainly moves on the surface of the contact 3, the surface of the electrode central portion 4 is less damaged by the arc than the surface of the contact 3. Therefore, it is preferable to make the thickness of the arc-resistant layer 11 as thin as possible within a range in which the melting of the surface of the electrode central portion 4 can be prevented.

The arc-resistant layer 11 is formed of any one of Cu—Cr, Cu—W, Cu—Mo, Cr, W, Mo, and stainless steel in order to prevent melting of the surface of the electrode central portion 4 due to arc heat. The
With the above configuration, melting of the surface of the electrode central portion 4 can be prevented, and energy injected by the arc can be quickly diffused into the conductive member 5 and the interruption performance is improved.

Embodiment 4 FIG.
Next, a fourth embodiment of the present invention will be described. Table 1 shows the evaluation results of the electrodes of the present invention manufactured according to the first to third embodiments.
The evaluation shows the breaking performance when a wind turbine electrode of each cross-sectional structure is incorporated in a vacuum valve and a synthetic breaking test is performed at a rated voltage of 24 kV and a rated breaking current of 25 kA. The breaking performance is a relative comparison based on the breaking limit current value of Comparative Example 1.

As for Examples 1-9 of this invention shown in Table 1, the interruption | blocking performance is improving compared with the comparative example 1, all. Example 1 uses oxygen-free copper with a conductivity of 100% IACS for the conductive member 5, Example 2 uses a Cu-2.5Ni-0.6Si alloy with a conductivity of 40% IACS for the conductive member 5, and the cross-sectional structure is In both cases, the arc-resistant layer and the reinforcing plate shown in FIG. 2 are not provided.
In Example 1, the electrode was deformed and the surface of the electrode central part 4 was slightly damaged, but the blocking performance was improved as compared with Comparative Example 1.

  Example 3 is a case where the cross-sectional structure is shown in FIG. 3 and the reinforcing plate 9 is provided. The blocking performance was improved as compared with Comparative Example 1, and the deformation of the electrode could be prevented. In Examples 4 to 9, the cross-sectional structure is as shown in FIG. 4, and the arc-proof layer 11 and the reinforcing plate 9 are provided. In any case, the interruption performance was improved as compared with Comparative Example 1, and each arc-resistant layer 11 was able to prevent damage to the center of the electrode.

Comparative Example 1 has a conventional configuration in which the conductive member 5 is not provided, and the reinforcing plate 9 and the contact 3 are directly brazed. The comparative example 2 is a case where a Cu-2Sn-0.2Ni alloy having a conductivity of the conductive member 5 of 30% IACS was used, and no improvement in the blocking performance was observed.
The contact 3, the conductive member 5, and the arc-resistant layer 11 are preferably joined by diffusion bonding in which each member is directly joined in view of the effect of diffusing arc injection energy into the electrode. Joining may be used.

Embodiment 5. FIG.
Next, a fifth embodiment of the present invention will be described with reference to the drawings. FIG. 7 is a diagram showing a manufacturing process of the vacuum valve electrode having the configuration shown in FIG.
First, as shown in FIG. 7A, the lower punch 14 provided with the through hole 15 is set on the lower side of the die 13 surrounding the outer periphery. Then, the reinforcing plate 9 provided with a hole having the same diameter as the through hole 15 is arranged on the upper surface of the lower punch 14, and the conductive member 5 provided with a hole having the same diameter as the through hole 15 is arranged on the upper surface.

  Subsequently, as shown in FIG. 7B, the convex portion of the convex inner mold 16 is inserted into the through hole 15 of the lower punch 14 and installed. Then, as shown in FIG. 7 (c), the contact powder mixture 17 is filled between the die 13 and the convex inner mold 16. Subsequently, a cylindrical upper punch 18 is installed on the filled mixed powder 17 for contactors, and disc molds 19a and 19b are respectively placed on the upper part of the cylindrical upper punch 18 and the lower part of the lower punch 14. It arrange | positions so that it may pinch | interpose, and it installs in the hot press apparatus which is not shown in figure, or an electricity supply pulse heating apparatus in this state.

  Next, as shown in FIG. 7 (d), the mold is heated by energizing pulse heating or resistance heating while pressing from above and below via the cylindrical upper punch 18, the convex inner mold 16 and the lower punch 14. Then, the contact 3 is molded and sintered, and the conductive member 5 and the reinforcing plate 9 are hot-joined to obtain a sintered body 20 in which the contact 3 positioned on the outer peripheral portion protrudes. Next, the sintered body 20 is subjected to finishing machining to obtain the windmill-shaped electrode 1.

  In addition, hot joining said here is what applies a heat | fever and a pressure and joins the contactor 3, the electrically-conductive member 5, and the reinforcement board 9 directly. Further, in the fifth embodiment, the case where the reinforcing plate 9 is provided has been described. However, when the reinforcing plate 9 shown in FIG. become.

Next, a specific example will be described.
A stainless steel plate of SUS304 having a diameter of 50 mm, an inner diameter of 10 mm, and a thickness of 0.5 mm, and a pure Cu plate having a diameter of 50 mm, an inner diameter of 10 mm, and a thickness of 5 mm, serving as the conductive member 5, are placed in a predetermined carbon mold. After the arrangement, the convex inner mold 16 having a diameter of 25 mm and a convex portion diameter of 10 mm is set.

  Then, a carbon mold filled with a predetermined weight of the mixed powder for contactor 17 blended so that Cr is 25 wt% and the balance is Cu is set in an energization pulse heating device. The surface roughness (Ra) of the stainless steel plate and the pure Cu plate was 0.5 μm. Ra of each member is preferably 0.02 to 10 μm.

Next, after the inside of the furnace of the apparatus is evacuated to 4 × 10 ⁻² torr, a pressure of 2 MPa is applied. Subsequently, degassing is performed by applying a pulse current and heating at 500 ° C. for 30 minutes.
Subsequently, the temperature is raised from room temperature to 900 ° C. in 20 minutes. When the temperature reaches 900 ° C., pressurization is performed at a pressure of 50 MPa, and sintering and diffusion bonding are simultaneously performed in a holding time of 20 minutes.
When the pressurization and heating are completed, it is cooled and the sintered body 20 is taken out from the carbon mold 10. Then, the sintered body 20 can be finished to obtain the electrode 1 having the cross-sectional structure of FIG.

  As described above, the contact 3, the conductive member 5, the reinforcing plate 9, and the arc-resistant layer 11 are hot-bonded while forming and sintering the contact 3 having a shape with a protruding outer peripheral portion. The brazing process that has been performed can be omitted. Furthermore, since a sintered body close to the shape of the electrode protruding from the outer peripheral portion can be obtained, the processing step can be simplified.

Embodiment 6 FIG.
Next, a sixth embodiment of the present invention will be described with reference to the drawings. FIG. 8 is a cross-sectional view showing a method of manufacturing a vacuum valve electrode having the configuration shown in FIG. As shown in FIG. 8A, the reinforcing plate 9 is installed on the upper surface of the lower punch 14, and the conductive member 5 is installed on the upper surface thereof. Further, an arc resistant material disc 11 is installed on the upper surface of the conductive member 5. Note that the arc resistant material disc 11 has the same diameter as the convex inner mold 16.

  Thereafter, as shown in FIG. 8B, the convex inner mold 16 is installed. Thereafter, the contact powder mixture 17 is filled in the same process as in FIG. 7C, and then a cylindrical upper punch 18 is installed to pressurize and heat. Thereby, the sintered compact 20 provided with the arc resistant layer 11 is obtained. The sintered body 20 can be subjected to finishing machining to obtain a vacuum valve electrode having the configuration shown in FIG.

Next, a specific example will be described.
A stainless steel plate of SUS304 having a diameter of 50 mm, an inner diameter of 10 mm, and a thickness of 0.5 mm serving as the reinforcing plate 9 is placed on the upper surface of the lower punch. A pure Cu plate is arranged. Further, after a Cu-30Cr plate having a diameter of 50 mm, an inner diameter of 10 mm, and a thickness of 5 mm is disposed on the upper surface of the pure Cu plate, the convex inner mold 16 having a diameter of 25 mm and a convex portion diameter of 10 mm is set.

  Then, a carbon mold filled with a predetermined weight of the mixed powder for contactor 17 blended so that Cr is 25 wt% and the balance is Cu is set in an energizing pulse heating device. The surface roughness (Ra) of the stainless steel plate and the pure Cu plate was 0.5 μm. Ra of each member is preferably 0.02 to 10 μm.

Next, after the inside of the furnace of the apparatus is evacuated to 4 × 10 ⁻² torr, a pressure of 2 MPa is applied. Subsequently, degassing is performed by applying a pulse current and heating at 500 ° C. for 30 minutes.
Subsequently, the temperature is raised from room temperature to 900 ° C. in 20 minutes. When the temperature reaches 900 ° C., pressurization is performed at a pressure of 50 MPa, and sintering and diffusion bonding are simultaneously performed in a holding time of 20 minutes. When pressurization and heating are completed, the sintered body 20 is taken out of the carbon mold 10 by cooling. Then, the sintered body 20 can be finished to obtain the electrode 1 having the cross-sectional structure of FIG.

Embodiment 7 FIG.
Next, a seventh embodiment of the present invention will be described with reference to the drawings. FIG. 5 is a cross-sectional view showing a modification of the configuration of the vacuum valve electrode. FIG. 5 shows a case where the arc-proof layer 11 and the contact 3 are provided on the flat conductive member 5, and the effect is the same as that of the third embodiment.

FIG. 9 is a cross-sectional view showing a method of manufacturing the vacuum valve electrode having the configuration shown in FIG. As shown in FIG. 9 (a), the reinforcing plate 9 is installed on the upper surface of the lower punch 14, and then a counterbore having a predetermined depth and diameter (the same diameter as that of the central pressing die 16) is provided at the center of one side surface. Conductive member 5 is installed.
And the arc-proof material disk 21 is arrange | positioned in the counterbore part, and the convex-shaped inner mold | type 16 is installed.

  Thereafter, similarly to the steps shown in FIGS. 7C and 7D, the contact powder mixture 17 is filled and pressurized and heated to obtain the sintered body 20 provided with the arc-proof layer 11. . Then, the sintered body 20 can be finished to obtain the electrode 1 having the cross-sectional structure of FIG.

  FIG. 10 is a cross-sectional view showing a manufacturing method for manufacturing the vacuum valve electrode having the configuration shown in FIG. 5 using the arc-resistant layer mixed powder. As shown in FIG. 10A, the reinforcing plate 9 is installed on the upper surface of the lower punch 14. Next, the conductive member 5 provided with a counterbore having a predetermined depth and diameter (the same diameter as that of the center pressurizing die 23) is installed at the center of the one side surface. And the counterbore part is filled with the mixed powder 22 for arc-resistant layers, and the cylindrical inner mold | type 23 is installed.

  Thereafter, similar to the steps shown in FIGS. 7C and 7D, the mixed powder 17 for contactor is filled between the die 13 and the cylindrical inner mold 23, and pressurization and heating are performed. 11 is obtained. The electrode 1 can be obtained by finishing.

Embodiment 8 FIG.
Next, an eighth embodiment of the present invention will be described with reference to the drawings. FIG. 6 is a cross-sectional view showing a modified example of the configuration of the vacuum valve electrode, and shows an example of the configuration in which the contact 3 reaches the reinforcing plate 9. FIG. 11 is a cross-sectional view showing a method of manufacturing a vacuum valve electrode having the configuration shown in FIG.

  As shown in FIG. 11A, the reinforcing plate 9 is installed on the upper surface of the lower punch 14, and the conductive member 5 having the same diameter as the convex inner mold 16 is installed on the upper surface. Furthermore, after the arc-resistant material disc 21 having the same diameter as the convex inner mold 16 is installed on the upper surface of the conductive member 5, the convex inner mold 16 is installed. Then, similar to the steps shown in FIGS. 7C and 7D, the contact powder mixture 17 is filled between the die 13 and the convex inner mold 16, and then the cylindrical upper punch 18 is installed. Pressurize and heat. As a result, a sintered body 20 provided with the contact 3 that reaches the arc-resistant layer 11 and the reinforcing plate 9 is obtained. Then, the sintered body 20 can be finished to obtain the electrode 1 having the cross-sectional structure of FIG.

It is a perspective view which shows the structure of the electrode for vacuum valves by Embodiment 1 of this invention. It is sectional drawing of the electrode for vacuum valves shown in FIG. It is sectional drawing which shows the structure of the electrode for vacuum valves which provided the reinforcement board by Embodiment 2 of this invention. It is sectional drawing which shows the structure of the electrode for vacuum valves which provided the arc-proof layer by Embodiment 3 of this invention. It is sectional drawing which shows the modification of a structure of the electrode for vacuum valves by Embodiment 7 of this invention. It is sectional drawing which shows the modification of the structure of the electrode for vacuum valves by Embodiment 8 of this invention. It is a figure which shows the manufacturing process of the electrode for vacuum valves of the structure shown in FIG. It is sectional drawing which shows the manufacturing method of the electrode for vacuum valves of the structure shown in FIG. It is sectional drawing which shows the manufacturing method of the electrode for vacuum valves of the structure shown in FIG. It is sectional drawing which shows the manufacturing method of the electrode for vacuum valves of the structure shown in FIG. It is sectional drawing which shows the manufacturing method of the electrode for vacuum valves of the structure shown in FIG.

Explanation of symbols

1 Electrode, 2 Groove, 3 Contact, 4 Electrode Center, 5 Conductive Member, 6 Electrode Rod, 7 Joint Hole, 8 Interface between Contact and Conductive Member, 9 Reinforcement Plate, 10 Interface between Conductive Member and Reinforcement Plate 11 arc-resistant layer, 12 interface between conductive member and arc-resistant layer,
13 die, 14 lower punch, 15 through hole, 16 convex inner mold, 17 mixed powder for contactor, 18 cylindrical upper punch, 19a, 19b disc type, 20 sintered body,
21 arc-resistant material disk, 22 mixed powder for arc-resistant layer, 23 cylindrical inner mold.

Claims (9)

  Each of the electrodes has a fixed electrode and a movable electrode, which are opposed to each other in the vacuum valve and are coaxially arranged. Each of the electrodes is made of Cu or a Cu alloy having a conductivity of 40% IACS or more, and from the center. A conductive member that is partitioned into a plurality of sections by grooves extending in the radial direction and formed in a windmill shape, and a Cu-Cr projecting to the opposite side of the two electrodes at the outer periphery of each section of the conductive member An electrode for a vacuum valve comprising a contact formed of an alloy.   2. The electrode for a vacuum valve according to claim 1, wherein an arc resistant layer is provided on the surface of the conductive member facing the two electrodes.   The vacuum arc layer according to claim 2, wherein the arc-resistant layer is made of any one of a Cu-Cr alloy, a Cu-W alloy, a Cu-Mo alloy, Mo, W, and stainless steel. electrode.   The reinforcing plate which is a nonmagnetic material and has a higher strength than the conductive member is provided on the back surface of the opposing surface of the two electrodes of the conductive member. Electrode for vacuum valve.   5. The vacuum valve electrode according to claim 4, wherein the reinforcing plate is stainless steel.   A step of disposing a conductive member on the upper surface of the lower punch, and forming an inner surface of a contact on the upper surface of the conductive member. A step of disposing the mold, a step of filling the contact material powder on the conductive member between the inner mold and the die, and an annular shape so as to be inserted between the inner mold and the die. A step of disposing the upper punch on the raw material powder of the contact, and a step of heating and pressurizing the raw material powder by the upper punch to form and sinter, and joining the contact to the conductive member. The manufacturing method of the electrode for vacuum valves of Claim 1 characterized by the above-mentioned.   A die having a die surrounding the outer periphery and a lower punch disposed on the lower side of the central portion, a step of disposing a reinforcing plate on the upper surface of the lower punch, and disposing a conductive member on the upper surface of the reinforcing plate; A step of disposing an inner mold for forming the inner surface of the contact on the upper surface of the conductive member; a step of filling the conductive member with a raw material powder of the contact between the inner mold and the die; and the inner mold; A step of disposing an upper punch formed in an annular shape so as to be inserted between dies on the raw material powder of the contact, and heating and pressurizing the raw material powder with the upper punch to perform molding and sintering, The method for manufacturing an electrode for a vacuum valve according to claim 1, further comprising the step of joining the contact to the conductive member.   An arc resistant material disk is disposed on the upper surface of the conductive member, or the upper surface of the conductive member is filled with a raw material powder to be an arc resistant material, and then the inner mold is disposed on the disk or the raw material powder. 8. The method for producing an electrode for a vacuum valve according to claim 6 or 7, wherein   The method for manufacturing an electrode for a vacuum valve according to any one of claims 6 to 8, wherein the contact or conductive member is joined or sintered by a pulse current heating method or a hot press method. .

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