JP2006226807A - Image measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an image measuring apparatus capable of improving operability. <P>SOLUTION: A video window 67 is displayed on a screen 65 of a CRT provided for the manually operated image measuring apparatus 1 for executing part programs. An image of a work W is displayed on the video window 67. When a stage mounted with the work W is manually operated to move to a prescribed position 83 at which an image of a hole part to be measured 77 (a part to be measured) of the work W is indicated by a mark 85 and halted for a prescribed time, measurement is automatically started. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a manually operated image measuring apparatus that executes a part program.

  An image measuring apparatus represented by a non-contact three-dimensional measuring machine or a microscope measuring machine is based on an image obtained by imaging a workpiece measurement target (hereinafter referred to as a measurement spot) with a CCD camera or the like. It is a precision measuring instrument that measures the shape and dimensions of measurement points. Briefly explaining the operation of this apparatus, the image of the workpiece placed on the stage and the mark indicating the predetermined position are displayed on the display so that the image of the measurement location is moved to the predetermined position by moving the stage. Then, the measurement at the measurement point is executed. The predetermined position of the display is also called the execution position of the tool, and is usually the center of the screen.

  Image measuring apparatuses include a CNC (Computer Numerical Control) type and a manual operation type. In the CNC type, measurement is automatically performed including stage movement. On the other hand, in the manual operation type, the stage is moved by an operator's manual operation. The following description is based on a manual operation type image measuring apparatus.

  Since the measurement location of the workpiece is displayed on the display at a large magnification, the entire image of the workpiece is not displayed on the display, and a part of the image of the workpiece is displayed. Therefore, when the measurement location does not appear on the display, the operator cannot know the direction of moving the stage simply by looking at the display. For this reason, the operator moved the stage while looking at both the display and the workpiece drawing.

  However, the display and the drawing cannot be viewed at the same time, and it is necessary to move the line of sight largely in order to switch from viewing the display to viewing the drawing (and vice versa). In addition, moving the image of the measurement location to a predetermined position on the display requires repeated viewing of the drawing and viewing of the display several times, which is very troublesome for the operator.

  Therefore, an image measuring apparatus having a navigation function has been developed (for example, Patent Document 1). According to this type of apparatus, the operator can move the stage for positioning the image of the measurement location at a predetermined position on the display without looking at the drawing of the workpiece.

  When there are a plurality of workpiece measurement points, it is convenient to perform measurement using a part program. The part program is a program in which commands for measurement are collected, in other words, a program in which a procedure for measuring a plurality of measurement points of a workpiece based on an image of the workpiece is described. For example, in the case of a flat plate-shaped workpiece having two holes, (1) an image of one hole is moved to a predetermined position of the display, (2) a circle of one hole is measured, (3) display Part program is a program that describes the procedure of (4) measuring the circle of the other hole, (5) measuring the distance between these holes, moving the image of the other hole to the predetermined position .

  Image measurement using a part program relating to the flat workpiece will be briefly described. When the content of (1) is instructed on the display, the operator manually moves the stage to move the image of one hole to a predetermined position. Then, when the operator presses a measurement start button displayed on the display with a mouse, a keyboard, or the like, the image measurement device executes the measurement of (2). This measurement is performed based on the detection of the edge of the image of one hole. Therefore, the measurement instruction at the measurement location is an instruction for edge detection at the measurement location.

When this measurement is completed, the contents of (3) are instructed on the screen. Thereafter, measurement is performed in the same manner. In this way, if the part program is used, anyone can perform the same measurement even if the workpiece has a large number of measurement points.
JP-A-10-197224 (paragraphs 0016 to 0018, FIG. 3)

  When the image measuring device is a manual operation type, the operator operates the X-axis knob with one hand and the Y-axis knob with the other hand to move the stage in the X-axis or Y-axis direction. When reaching a predetermined position, one of the hands was released from the knob and the measurement start button was pushed by clicking the mouse with the hand. For this reason, even if the image measuring apparatus has a navigation function, when the part program is executed, the above operation must be repeated, and the operability of the image measuring apparatus is poor and troublesome for the operator.

  If the measurement start button can be pressed using the foot switch, the operability of the image measuring apparatus can be improved, but the user of the image measuring apparatus is forced to purchase the foot switch.

  An object of the present invention is to provide an image measuring apparatus capable of improving operability.

  An image measuring apparatus according to the present invention includes a stage on which a workpiece is placed, an imaging unit that images the workpiece placed on the stage, a mark indicating a predetermined position, and the workpiece imaged by the imaging unit. Display means for displaying an image superimposed thereon, moving means for moving the imaging means relative to the stage by manual operation, and a procedure for measuring a plurality of measurement points of the workpiece based on the image of the workpiece. A measurement processing means for executing the described part program; and the measurement processing means when the image of the measurement location to be measured reaches the predetermined position by moving the imaging means relative to the stage by the moving means. And a measurement start determining means for starting the measurement at the measurement location.

  According to the image measuring apparatus according to the present invention, when the image of the measurement location to be measured reaches the predetermined position indicated by the mark, the measurement processing means automatically starts measuring the measurement location, so that the operator The operation of pressing the measurement start button becomes unnecessary.

  In the image measuring apparatus according to the present invention, the measurement start determining means may cause the measurement processing means to start measurement after a predetermined time has elapsed in a stationary state after the measurement location has reached the predetermined position. it can. According to this, the operator can further narrow down the movement position of the measurement location.

  In the image measuring device according to the present invention, the predetermined position may have a larger area than the mark. According to this, since the measurement can be started even if the image of the measurement location does not coincide with the position of the mark, this is effective when the mark is relatively small (such as the intersection of the X axis line and the Y axis line).

  When the present invention is combined with the navigation function, the operability can be further improved. For example, there are the following three navigation functions.

  First, in the image measurement apparatus according to the present invention, a position calculation unit that calculates a current position of the measurement location, and a video window in which an image of the workpiece imaged by the imaging unit is displayed, A horizontal line and a vertical line that are orthogonal at the center of the video window and whose intersection is the mark are superimposed on the image of the workpiece and displayed on the video window, and the current position of the measurement location and the mark obtained by the position calculation means And an image control means for displaying on the video window an image of the workpiece, the horizontal line for alignment and the vertical line for alignment being superimposed on the horizontal line and the vertical line. .

  Second, a numerical value indicating the amount of deviation between the current position of the measurement location and the mark is displayed on the display means.

  Third, the display means displays a compass indicating the direction of the mark with reference to the current position of the measurement location.

  According to the image measuring apparatus according to the present invention, since the operation of the operator pressing the measurement start button is not necessary, the operability can be improved.

  Hereinafter, an embodiment of an image measuring apparatus according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing the overall configuration of a manually operated image measuring apparatus 1 according to this embodiment. The apparatus 1 includes a non-contact image measurement type measuring machine main body 3, a computer system 5 that executes a process for assisting a stage moving operation of the measuring machine main body 3 and a necessary measurement process, and a measuring machine main body 3. A command input unit 7 for supplying necessary measurement commands and a power supply unit 9 for supplying stable power to these units are provided.

  The measuring machine main body 3 is configured as follows. A stage 13 on which a workpiece W to be measured is placed is mounted on the gantry 11, and this stage 13 is moved in the X-axis direction by manual operation with respect to the X-axis knob 15, the Y-axis knob 17 and the fine movement knob 19. And movable in the Y-axis direction. A frame 21 extending upward is fixed to the rear end portion of the gantry 11.

  A CCD camera unit 23 is supported on the frame 21. The CCD camera unit 23 is movable in the Z-axis direction along a guide rail formed on the frame 21 by a Z-axis knob 25. A CCD camera 27 is attached to the upper part of the CCD camera unit 23 so that the stage 13 faces the upper part. An objective lens 27a that is optically coupled to the lens of the camera 27 is exposed to the outside. The workpiece W placed on the stage 13 is imaged by the CCD camera 27 via the objective lens 27a. Around the objective lens 27a, a ring-shaped illumination device 29 for irradiating the work W with illumination light is provided.

  The computer system 5 includes a computer main body 31, a keyboard 33, a mouse 35, and a CRT 37.

  Next, an example of a hardware configuration capable of realizing this embodiment will be described. FIG. 2 is a diagram showing the configuration of this hardware. The CPU 39, the program memory 41, the work memory 43, the multi-value image memory 45, the display control IC 47 and the illumination control IC 49 are connected to the bus 51. A CRT 37 is connected to the display control IC 47. The illumination device 29 is connected to the illumination control IC 49.

  The CCD camera 27 is connected to the bus 51 via the interface 53. The multi-value image data of the work W imaged by the CCD camera 27 is processed by the CPU 39 and stored in the multi-value image memory 45. The multi-value image data stored in the multi-value image memory 45 is displayed on the CRT 37 after the display control IC 47 performs processing for converting it into an image of the work W.

  The CPU 39 executes various processes such as an assist process for moving the stage according to an operator command or a part program stored in the program memory 41. The work memory 43 provides a work area for various processes of the CPU 39.

  An X-axis encoder 55, a Y-axis encoder 57, and a Z-axis encoder 59 for detecting the X, Y, and Z-axis direction positions of the CCD camera 27 with respect to the stage 13 are provided. These encoders are connected to the bus 51 via an interface 61. As a result, the output from the encoders 55, 57, 59 is taken into the CPU 39. The CPU 39 executes various processes for assisting stage movement based on the captured information on the respective axis positions.

  The illumination control IC 49 generates an analog command voltage based on the command value generated by the CPU 39 and applies it to the illumination device 29. The input device (the command input unit 7 and the keyboard 33) is connected to the bus 51 via the interface 63.

  Next, an example of the screen configuration of the CRT 37 at the time of measurement will be described with reference to FIG. The screen 65 of the CRT 37 includes a color video window 67, a counter window 69, and a comment window 71. Although other windows and icons necessary for measurement are displayed on the screen 65, they are omitted because they are not particularly necessary for understanding the present embodiment.

  A color image captured by the CCD camera 27 is displayed in the color video window 67. In FIG. 3, an image of a part of the workpiece W is displayed. FIG. 4 is a plan view showing the entire workpiece W. FIG. The workpiece W is a rectangular plate, and the corner portion 73 is chamfered. Three holes 77, 79, 81 are formed in the vicinity of the corner 75 that is diagonal to the corner 73. In this embodiment, the hole is the measurement location.

  The counter window 69 numerically indicates how much the current position of the measurement location of the workpiece W is deviated from the center of the video window 67, that is, the mark 85. The comment window 71 displays instructions for the operator.

  The color video window 67 will be described in more detail. In the video window 67, an X-axis (horizontal) line 87 and a Y-axis (vertical) line 89 having an intersection at the center of the video window 67 are displayed so as to overlap the image of the workpiece W. The intersection point is a mark 85 indicating a predetermined position (tool execution position) 83, and the image of the measurement location of the workpiece W is moved to the predetermined position 83, and measurement of the measurement location is executed. Therefore, the mark 85 indicating the predetermined position 83 and the image of the work W are displayed on the screen 65 of the CRT as the display means.

  The predetermined position 83 is a range indicated by an imaginary line and has an area larger than the mark 85. Therefore, measurement is possible even if the position of the image of the measurement location does not match the position of the mark 85. In the present embodiment, the intersection of the X-axis line 87 and the Y-axis line 89 is a mark 85, and the mark 85 is relatively small. If the measurement cannot be started unless the position of the image of the measurement location coincides with the position of the mark 85, a burden is placed on the operator. By making the area of the predetermined position 83 larger than the area of the mark 85, the burden is reduced. Note that inward arrows are formed at both ends of the X-axis line 87 and the Y-axis line 89.

  An alignment x-axis (horizontal) line 91 and alignment y-axis (vertical) line 93 parallel to the X-axis line 87 and the Y-axis line 89 are superimposed on the images of the axis lines 87 and 89 and the workpiece W in the video window 67. It is displayed. These axis lines 91 and 93 for alignment indicate the amount of vertical and horizontal deviation between the current position of the measurement location of the workpiece W and the mark 85. When these axis lines 91 and 93 coincide with the X axis line 87 and the Y axis line 89, the position of the measurement location coincides with the mark 85. Outward arrows that face the inward arrows of the axes 87 and 89 are formed at both ends of the alignment axes 91 and 93, respectively, so that the amount of deviation can be easily confirmed.

  Like the image displayed in the video window 67 in FIG. 3, an image in which the image of the workpiece W and the axes 87, 89, 91, 93 are superimposed is generated by superimposition. That is, FIG. 5 is a multi-value image 95 captured by the CCD camera 27 of FIG. 2, and this image data is stored in the multi-value image memory 45. The multi-value image memory 45 also stores an assist image 97 including the X-axis line 87, the Y-axis line 89, the alignment x-axis line 91, and the alignment y-axis line 93 shown in FIG. In the display control IC 47, the assist image 97 is superimposed on the multi-value image 95 and displayed on the CRT 37.

  Next, an example of a part program executed by the image measurement apparatus 1 according to the present embodiment will be described. FIG. 7 is an explanatory diagram of this part program. The measurement of the workpiece W in FIG. 4 is executed using this part program. In the part program, the image of the hole 77 is moved to the predetermined position 83 of the video window 67 of FIG. 3 → the circle of the hole 77 is measured → the image of the hole 79 is moved to the predetermined position 83 → the circle of the hole 79 is The procedure of measurement → moving the image of the hole 81 to a predetermined position 83 → measurement of the circle of the hole 81 is described.

  In the part program, the coordinates of the centers of the holes 77, 79, 81 of the workpiece W are described in the measured object coordinate system (work coordinate system). The workpiece coordinate system represents the center position of each processing part (hole or the like) with respect to the reference position of the workpiece. When using the image measuring apparatus from a state where the power of the image measuring apparatus is not turned on, first, the power is turned on to determine the origin of the measuring machine coordinate system. Thereafter, the workpiece is placed at the center position of the stage using a jig or the like. Then, by setting the workpiece coordinate system according to a predetermined location of the workpiece (for example, two central coordinates obtained by measuring two circles) or by measuring two lines and lines, a measuring machine coordinate system and From the relationship of the workpiece coordinate system, the coordinates serving as the command value are obtained.

  Next, measurement of the workpiece W using the image measuring apparatus 1 shown in FIG. 1 will be described with reference to FIGS. 1, 3, 4, and 7 to 10. FIG. 8 is a flowchart of this measurement. FIG. 9 is a CRT screen when the measurement location approaches a predetermined position. FIG. 10 shows a CRT screen when the measurement location reaches a predetermined position.

  First, the work W is placed on the stage 13 in FIG. 1 located at the home position. Then, the command input unit 7 is operated to input a part program execution start command. Thereby, an initial screen is displayed on the CRT 37 (step S1). In the present embodiment, the contents shown in FIG. 3 are displayed on the screen 65 of the CRT 37. In the counter window 69, the current position of the hole 77 (FIG. 4), which is the first measurement location, is displayed in the X axis line 87 direction and the Y axis line 89 direction from the mark 85 displayed at the center of the video window 67, respectively. A numerical value indicates whether the degree is shifted. The comment window 71 displays “Please move the stage to a position where the counter becomes (0, 0)”. The counter (0, 0) indicates that the center position of the hole 77 coincides with the mark 85.

  Since the enlarged image of the work W is displayed in the video window 67, the entire image of the work W cannot be displayed, and a part of the image is displayed. In FIG. 3, an image near the corner 73 of the workpiece W is displayed. The image of the hole 77 is not displayed in the video window 67 because it is at a position protruding from the video window 67. An intersection 99 of the x axis 91 and the y axis 93 indicates the relative position of the hole 77 with respect to the mark 85. Therefore, by looking at the mark 85 and the intersection 99, the positional relationship between the mark 85 and the hole 77 can be easily grasped.

  In this embodiment, when the stage 13 is moved, the x-axis line 91, the y-axis line 93, and their intersection 99 are always displayed on the video window 67. Therefore, since the image of the measurement location is relatively far from the mark 85, even if it is not displayed on the video window 67, the CRT can be used without looking at the workpiece W placed on the stage 13 or the drawing of the workpiece. The image at the measurement location can be moved in the direction of the mark 85 simply by looking at the screen 65.

  Next, while watching the screen 65, the stage 13 is moved by turning the X-axis knob 15 and the Y-axis knob 17 of FIG. 1 using both hands, and the image of the hole 77 is brought close to the mark 85. Thereby, the calculation of the current position of the hole 77 is executed (step S3). FIG. 9 shows the screen 65 in a state in which the hole 77 is close to the predetermined position 83 indicated by the mark 85. By turning the X-axis knob 15 or the Y-axis knob 17, the current position of the hole 77 (measurement location to be measured) changes. Therefore, the current position of the hole 77 is calculated, and based on this, the positions of the x-axis line 91 and the y-axis line 93 displayed in the video window 67 are changed to correspond to the current position of the hole 77 and the counter window is displayed. The numerical value 69 is also changed to correspond to the current position of the hole 77.

  In FIG. 9, the y-axis line 93 changes from a dotted line to a solid line. This indicates that the movement in the direction of the X axis 87 may be terminated. That is, even if the position of the y-axis line 93 does not completely coincide with the Y-axis line 89, the movement in the direction of the X-axis line 87 may be terminated if it falls within a predetermined range (about the x-axis line 91). Is also the same).

  An area defined by a predetermined range in the direction of the X axis 87 and the direction of the Y axis 89 is a predetermined position 83. Therefore, measurement is possible even if the position of the image of the measurement location does not match the position of the mark 85. However, it is possible to request a match. Note that the y-axis line 93 can be further moved from the state of FIG. 9 to bring the y-axis line 93 closer to the Y-axis line 89, or can be completely matched.

  The stage 13 is moved by turning the Y-axis knob 17 in FIG. 1, and the hole 77 is further brought closer to the mark 85 as shown in FIG. The x-axis line 91 also changes from a dotted line to a solid line. Therefore, it shows that the image of the hole 77 that is the measurement location has reached the predetermined position 83 (step S5).

  It is determined whether or not a predetermined time has elapsed with the image of the hole 77 being stationary at the predetermined position 83 (step S7). The reason why the circle of the hole 77 is not immediately measured is that the operator may want to further narrow down the movement position of the measurement location. In other words, for the sake of more accurate measurement, there is a case where the operator wants to execute the measurement of the circle after the image of the hole 77 that is the measurement location is further brought closer to the mark 85. A predetermined time (for example, 10 seconds) is set in advance. Note that the measurement may be performed as soon as the measurement location reaches the predetermined position 83.

  After a predetermined time has passed, detection of the edge of the image of the hole 77 is started (when three single tools are set in advance or when a circular tool is set, edge detection starts automatically) Measurement of the circle of the hole 77 is executed (step S9). For the holes 79 and 81, the measurement of the circle is executed in the same manner as the hole 77 (steps S11, S13, S15, S17, S19, S21, S23, and S25). As described above, measurement can be performed even when the position of the x-axis line 91 does not completely match the X-axis line 87 and the position of the y-axis line 93 does not completely match the Y-axis line 89. This is because if the circle tool is set to a large size, the circle can be measured even if it is slightly out of alignment.

  In the measurement, it is not essential to detect the edge of the image. For example, a predetermined measurement may be performed by so-called pattern matching. More specifically, a pattern template corresponding to the workpiece W is created and registered in advance. The execution of pattern matching is performed using image information among the registered pattern template information (image information and template coordinate system information). That is, the work W is placed on the stage 13 and the image is displayed on the color video window 67. Using this embodiment, the operator aligns the image of the measurement location of the workpiece W with the predetermined position 83, selects a registered pattern template, specifies search conditions, and executes a search by operating the mouse 35 or the like. To do. As a result, the CPU 39 searches for (or measures) a point (group) that matches the pattern template image within the specified search range and search condition range.

  As described above, according to the present embodiment, when a measurement location reaches a predetermined position and is stopped for a predetermined time, the measurement location is automatically measured. Therefore, the operator does not have to perform an operation of releasing the hand from the X-axis knob 15 or the Y-axis knob 17 and pressing the measurement start button, so that the operability of the image measuring apparatus can be improved. In particular, this embodiment is effective when there are a large number of workpiece measurement locations (for example, 1000 locations or 2000 locations).

  In the present embodiment, the x-axis line 91 and the y-axis line 93 are changed from a dotted line to a solid line to visually indicate the completion of movement in that direction. However, the present invention is not limited to this, and movement completion may be indicated by a change in the color of the axes 91 and 93, a change in the thickness, a change in the color of the number in the counter window 69, or the like.

  For example, the X-axis line 87 and the Y-axis line 89 are set to green, the x-axis line 91 and the y-axis line 93 are set to red, and the counter window 69 is moved in the direction of the X-axis 87 as shown in FIG. Is completed, the color of the y-axis line 93 is changed to green, and the color of the X number of the counter window 69 is changed to green. When the movement in the direction of the Y-axis line 89 is completed as shown in FIG. Is changed to green and the color of the Y number in the counter window 69 is changed to green.

  Another example of the screen configuration of the CRT 37 will be described with reference to FIGS. These drawings are plan views showing a first state to a fifth state of another example of the screen configuration at the time of measurement. When the position of the measurement location is relatively far from the mark as in the first state shown in FIG. 11, the image of the workpiece W is not displayed in the video window 67, and an arrow 101 serving as a compass is displayed. Arrow 101 is relatively large. The direction of the arrow (compass) 101 indicates the direction of the mark based on the current position of the measurement location. The comment window 71 displays “Please move the stage in the direction of the arrow”.

  The operator manually operates the X-axis knob 15 and the Y-axis knob 17 in FIG. 1 to move the stage 13 in the direction of the arrow 101, so that the size of the arrow 101 gradually decreases as the measurement location approaches the mark. This is the second state shown in FIG. 12, and the third state shown in FIG.

  When the stage 13 moves and the measurement location approaches the mark and the image of the measurement location can be displayed on the video window 67, the video window 67 displays the image of the work W as shown in the fourth state shown in FIG. An arrow 101 is displayed in an overlapping manner. Then, as in the fifth state shown in FIG. 15, when the image of the hole 77 that is the measurement location reaches a predetermined position indicated by the mark 85, the arrow 101 disappears. When a predetermined time elapses with the image of the hole 77 being stationary, measurement is performed.

  As described above, the compass arrow 101 is displayed in the video window 67, the alignment x-axis line 91 and the y-axis line 93 are displayed in the video window 67, the counter window 69 is displayed, and the comment window 71 is displayed. The image measuring apparatus 1 according to the present embodiment has a navigation function for displaying or displaying. Therefore, the operability can be further improved. However, the navigation function may not be provided. In this case, as shown in FIG. 16, the counter window and the comment window are not displayed on the screen 65, and the image of the work W, the X axis line 87, the Y axis line 89, and the mark 85 are displayed on the video window 67.

  Finally, an example of functional blocks of the image measuring apparatus 1 according to the present embodiment will be described with reference to FIGS. FIG. 17 is a functional block diagram of the image measuring apparatus 1. The input unit 103 includes an imaging unit 105 and a stage position detection unit 107. Specifically, the imaging unit 105 is a CCD camera 27, and the stage position detection unit 107 is X and Y axis encoders 55 and 57. In addition, as the imaging unit 105, there is a camera using a CMOS (Complementary Metal Oxide Semiconductor) imaging element.

  The storage unit 109 has functions such as storing multi-value image data of the workpiece W imaged by the imaging unit 105, storing a part program, and providing a work area when executing the part program. . The storage unit 109 corresponds to the program memory 41, the work memory 43, and the multi-value image memory 45 of FIG. 2, and is realized by a RAM or a ROM.

  The processing unit 111 includes an image control unit 113, a measurement processing unit 115, and a measurement start determination unit 117. The function of the processing unit 111 is realized by the CPU 39 of FIG. The image control unit 113 performs various controls for generating an image to be displayed on the color video window 67 of FIG. In the measurement processing unit 115, the part program is executed.

  The measurement start determination unit 117 has a function of causing the measurement processing unit 115 to start measurement at the measurement location when the image of the measurement location to be measured reaches the predetermined position 83 by moving the stage 13 by manual operation. The measurement start determination unit 117 includes a position calculation unit 119 and a stationary time counting unit 121.

  The position calculation unit 119 calculates the current position of the measurement location based on the coordinates of the measurement location of the workpiece W (coordinates obtained from the relationship between the measuring machine coordinate system and the workpiece coordinate system) and the amount of movement of the stage 13. The stationary time counting unit 121 is a software counter that counts the time during which the image of the measurement location to be measured is stationary at the predetermined position 83. When the stationary time has passed a predetermined time, the measurement start is determined.

  The display unit 123 displays an image of the workpiece W, measurement results, a navigation screen, and the like. The CRT 37 in FIG. Another example of the display unit 123 is a liquid crystal display.

  The stage 13 is moved by a stage moving mechanism including the X-axis knob 15 and the Y-axis knob 17 shown in FIG. This stage moving mechanism serves as a moving means for moving the imaging unit 105 relative to the stage 13 by a manual operation to change the location where the workpiece W is imaged. The stage 13 may be fixed and the imaging unit 105 may move.

1 is a perspective view showing an overall configuration of an embodiment of an image measuring device according to the present invention. It is a figure which shows the hardware constitutions which can implement | achieve the embodiment. It is a top view which shows an example of the screen structure of CRT with which the embodiment is equipped. It is a top view which shows the whole example of a workpiece | work. It is a figure which shows the multi-value image imaged with the CCD camera. It is a figure which shows the assist image containing an X-axis line, a Y-axis line, the x-axis line for alignment, and a y-axis line. It is explanatory drawing of the part program performed in the same embodiment. It is a flowchart of the image measurement measured in the same embodiment. It is an example of a screen configuration of a CRT provided in the embodiment, and is a plan view when a measurement point approaches a predetermined position. It is a top view when the measurement location reaches a predetermined position. It is a top view which shows the 1st state of the other example of the screen structure of CRT with which the same embodiment is equipped. It is a top view which shows the 2nd state. It is a top view which shows the 3rd state. It is a top view which shows the same 4th state. It is a top view which shows the same 5th state. It is a top view of the further another example of the screen structure of CRT with which the embodiment is equipped. It is a functional block diagram of the image measuring device concerning the embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Image measuring device, 3 ... Measuring machine main body, 5 ... Computer system, 7 ... Command input part, 9 ... Power supply unit, 11 ... Mount, 13 ... Stage, 15 ... X-axis knob, 17 ... Y-axis knob, 19 ... Fine movement knob, 21 ... Frame, 23 ... CCD camera unit, 25 ... Z-axis knob, 27 ... CCD Camera, 27a ... objective lens, 29 ... illumination device, 31 ... computer main body, 33 ... keyboard, 35 ... mouse, 37 ... CRT, 39 ... CPU, 41 ... Program memory 43 ... Work memory 45 ... Multi-value image memory 47 ... Display control IC 49 ... Light control IC 51 ... Bus 53 ... Interface 55 ..X-axis encoder, 57 Y-axis encoder, 59 ... Z-axis encoder, 61, 63 ... interface, 65 ... CRT screen, 67 ... color video window, 69 ... counter window, 71 ... comment window, 73, 75 ... corners of workpiece, 77, 79, 81 ... hole (measurement location), 83 ... predetermined position, 85 ... mark, 87 ... X-axis, 89 ... Y axis, 91 ... x axis for alignment, 93 ... y axis for alignment, 95 ... multi-valued image, 97 ... assist image, 99 ... intersection of x axis and y axis , 101 ... arrows (compass), 103 ... input unit, 105 ... imaging unit, 107 ... stage position detection unit, 109 ... storage unit, 111 ... processing unit, 113 ... Image control unit, 115 ... measurement processing unit, 17 ... measurement start determination unit, 119 ... position calculating section, 121 ... rest time counting unit, 123 ... display unit, W ... workpiece

Claims (6)

A stage on which the workpiece is placed;
Imaging means for imaging the workpiece placed on the stage;
A display means for displaying a mark indicating a predetermined position and an image of the workpiece imaged by the imaging means;
Moving means for moving the imaging means relative to the stage by manual operation;
Measurement processing means for executing a part program in which a procedure for measuring a plurality of measurement points of the workpiece based on the image of the workpiece is described;
Measurement start determination for causing the measurement processing means to start measurement of the measurement location when the image of the measurement location to be measured reaches the predetermined position by moving the imaging means relative to the stage by the moving means. And an image measuring apparatus. The image measurement apparatus according to claim 1, wherein the measurement start determination unit causes the measurement processing unit to start measurement when a predetermined time elapses in a stationary state after the measurement location reaches the predetermined position. The image measuring apparatus according to claim 1, wherein the predetermined position has an area larger than that of the mark. Position calculating means for calculating the current position of the measurement location;
A video window in which an image of the workpiece imaged by the imaging means is displayed is set, and a horizontal line and a vertical line that are orthogonal to each other at the center of the video window and whose intersection is the mark are superimposed on the image of the workpiece. An image of the workpiece, a horizontal line for alignment and a vertical line for alignment, which are displayed on a window and respectively indicate vertical and horizontal deviation amounts between the current position of the measurement location and the mark obtained by the position calculation means; The image measurement device according to claim 1, further comprising: an image control unit that displays the video line in a manner superimposed on the horizontal line and the vertical line. The image measurement apparatus according to claim 1, wherein a numerical value indicating a deviation amount between a current position of the measurement location and the mark is displayed on the display unit. The image measuring apparatus according to claim 1, wherein a compass indicating a direction of the mark with respect to a current position of the measurement location is displayed on the display unit.

Images