JP2006220701A - Photosensitive resin composition, cured material thereof and spacer for display panel comprising the cured material - Google Patents
Photosensitive resin composition, cured material thereof and spacer for display panel comprising the cured material Download PDFInfo
- Publication number
- JP2006220701A JP2006220701A JP2005031473A JP2005031473A JP2006220701A JP 2006220701 A JP2006220701 A JP 2006220701A JP 2005031473 A JP2005031473 A JP 2005031473A JP 2005031473 A JP2005031473 A JP 2005031473A JP 2006220701 A JP2006220701 A JP 2006220701A
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive resin
- resin composition
- carboxyl group
- compound
- spacer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000011342 resin composition Substances 0.000 title claims abstract description 48
- 125000006850 spacer group Chemical group 0.000 title claims abstract description 26
- 239000000463 material Substances 0.000 title claims abstract description 7
- -1 oxetane compound Chemical class 0.000 claims abstract description 68
- 229920005989 resin Polymers 0.000 claims abstract description 51
- 239000011347 resin Substances 0.000 claims abstract description 51
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 claims abstract description 50
- 150000001875 compounds Chemical class 0.000 claims abstract description 39
- 239000000203 mixture Substances 0.000 claims abstract description 12
- 239000003999 initiator Substances 0.000 claims abstract description 10
- 238000000576 coating method Methods 0.000 claims description 23
- 239000011248 coating agent Substances 0.000 claims description 22
- 125000004432 carbon atom Chemical group C* 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 11
- 238000011161 development Methods 0.000 claims description 10
- 239000003513 alkali Substances 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 125000003566 oxetanyl group Chemical group 0.000 claims description 7
- 238000007334 copolymerization reaction Methods 0.000 claims description 4
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 4
- 238000000016 photochemical curing Methods 0.000 claims description 4
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical class C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 claims description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 3
- 238000001035 drying Methods 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000000126 substance Substances 0.000 abstract description 17
- 238000003860 storage Methods 0.000 abstract description 15
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 43
- 239000000758 substrate Substances 0.000 description 30
- 239000000047 product Substances 0.000 description 25
- 239000010408 film Substances 0.000 description 22
- 238000006243 chemical reaction Methods 0.000 description 14
- 150000008065 acid anhydrides Chemical class 0.000 description 11
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 10
- RIOQSEWOXXDEQQ-UHFFFAOYSA-N triphenylphosphine Chemical compound C1=CC=CC=C1P(C=1C=CC=CC=1)C1=CC=CC=C1 RIOQSEWOXXDEQQ-UHFFFAOYSA-N 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 9
- 230000001588 bifunctional effect Effects 0.000 description 8
- 238000003786 synthesis reaction Methods 0.000 description 8
- 125000003700 epoxy group Chemical group 0.000 description 7
- 239000011521 glass Substances 0.000 description 7
- 239000000178 monomer Substances 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 229920000642 polymer Polymers 0.000 description 7
- 239000000243 solution Substances 0.000 description 7
- 239000004094 surface-active agent Substances 0.000 description 7
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 6
- PPBRXRYQALVLMV-UHFFFAOYSA-N Styrene Chemical compound C=CC1=CC=CC=C1 PPBRXRYQALVLMV-UHFFFAOYSA-N 0.000 description 6
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 6
- 125000000217 alkyl group Chemical group 0.000 description 6
- 239000003822 epoxy resin Substances 0.000 description 6
- 239000004973 liquid crystal related substance Substances 0.000 description 6
- 239000003960 organic solvent Substances 0.000 description 6
- XYFCBTPGUUZFHI-UHFFFAOYSA-N phosphine group Chemical group P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 6
- 150000003839 salts Chemical class 0.000 description 6
- 239000007787 solid Substances 0.000 description 6
- 239000007864 aqueous solution Substances 0.000 description 5
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 5
- 150000007519 polyprotic acids Polymers 0.000 description 5
- 229920001296 polysiloxane Polymers 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical class O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- GQHTUMJGOHRCHB-UHFFFAOYSA-N 2,3,4,6,7,8,9,10-octahydropyrimido[1,2-a]azepine Chemical compound C1CCCCN2CCCN=C21 GQHTUMJGOHRCHB-UHFFFAOYSA-N 0.000 description 4
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 4
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 4
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 4
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 description 4
- 239000002253 acid Substances 0.000 description 4
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 4
- 125000003118 aryl group Chemical group 0.000 description 4
- 150000001732 carboxylic acid derivatives Chemical class 0.000 description 4
- 238000004132 cross linking Methods 0.000 description 4
- 238000001723 curing Methods 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 125000003709 fluoroalkyl group Chemical group 0.000 description 4
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 4
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 4
- 229910052753 mercury Inorganic materials 0.000 description 4
- 150000004714 phosphonium salts Chemical class 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- 125000001424 substituent group Chemical group 0.000 description 4
- 150000003512 tertiary amines Chemical class 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 239000002966 varnish Substances 0.000 description 4
- KMOUUZVZFBCRAM-OLQVQODUSA-N (3as,7ar)-3a,4,7,7a-tetrahydro-2-benzofuran-1,3-dione Chemical compound C1C=CC[C@@H]2C(=O)OC(=O)[C@@H]21 KMOUUZVZFBCRAM-OLQVQODUSA-N 0.000 description 3
- BTJPUDCSZVCXFQ-UHFFFAOYSA-N 2,4-diethylthioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(CC)=CC(CC)=C3SC2=C1 BTJPUDCSZVCXFQ-UHFFFAOYSA-N 0.000 description 3
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- TXBCBTDQIULDIA-UHFFFAOYSA-N 2-[[3-hydroxy-2,2-bis(hydroxymethyl)propoxy]methyl]-2-(hydroxymethyl)propane-1,3-diol Chemical compound OCC(CO)(CO)COCC(CO)(CO)CO TXBCBTDQIULDIA-UHFFFAOYSA-N 0.000 description 3
- 125000000954 2-hydroxyethyl group Chemical group [H]C([*])([H])C([H])([H])O[H] 0.000 description 3
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 150000003863 ammonium salts Chemical class 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 150000002148 esters Chemical class 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- RAXXELZNTBOGNW-UHFFFAOYSA-N imidazole Natural products C1=CNC=N1 RAXXELZNTBOGNW-UHFFFAOYSA-N 0.000 description 3
- FPYJFEHAWHCUMM-UHFFFAOYSA-N maleic anhydride Chemical compound O=C1OC(=O)C=C1 FPYJFEHAWHCUMM-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- WXZMFSXDPGVJKK-UHFFFAOYSA-N pentaerythritol Chemical compound OCC(CO)(CO)CO WXZMFSXDPGVJKK-UHFFFAOYSA-N 0.000 description 3
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 3
- 229940051841 polyoxyethylene ether Drugs 0.000 description 3
- 229920000056 polyoxyethylene ether Polymers 0.000 description 3
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 2
- YXIWHUQXZSMYRE-UHFFFAOYSA-N 1,3-benzothiazole-2-thiol Chemical compound C1=CC=C2SC(S)=NC2=C1 YXIWHUQXZSMYRE-UHFFFAOYSA-N 0.000 description 2
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 2
- FALRKNHUBBKYCC-UHFFFAOYSA-N 2-(chloromethyl)pyridine-3-carbonitrile Chemical compound ClCC1=NC=CC=C1C#N FALRKNHUBBKYCC-UHFFFAOYSA-N 0.000 description 2
- RVGLEPQPVDUSOJ-UHFFFAOYSA-N 2-Methyl-3-hydroxypropanoate Chemical compound COC(=O)CCO RVGLEPQPVDUSOJ-UHFFFAOYSA-N 0.000 description 2
- ZCDADJXRUCOCJE-UHFFFAOYSA-N 2-chlorothioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC(Cl)=CC=C3SC2=C1 ZCDADJXRUCOCJE-UHFFFAOYSA-N 0.000 description 2
- XLLIQLLCWZCATF-UHFFFAOYSA-N 2-methoxyethyl acetate Chemical compound COCCOC(C)=O XLLIQLLCWZCATF-UHFFFAOYSA-N 0.000 description 2
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 2
- NJWGQARXZDRHCD-UHFFFAOYSA-N 2-methylanthraquinone Chemical compound C1=CC=C2C(=O)C3=CC(C)=CC=C3C(=O)C2=C1 NJWGQARXZDRHCD-UHFFFAOYSA-N 0.000 description 2
- OFNISBHGPNMTMS-UHFFFAOYSA-N 3-methylideneoxolane-2,5-dione Chemical compound C=C1CC(=O)OC1=O OFNISBHGPNMTMS-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 2
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- LGRFSURHDFAFJT-UHFFFAOYSA-N Phthalic anhydride Natural products C1=CC=C2C(=O)OC(=O)C2=C1 LGRFSURHDFAFJT-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- ZJCCRDAZUWHFQH-UHFFFAOYSA-N Trimethylolpropane Chemical compound CCC(CO)(CO)CO ZJCCRDAZUWHFQH-UHFFFAOYSA-N 0.000 description 2
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 2
- 125000001931 aliphatic group Chemical group 0.000 description 2
- UMLWXYJZDNNBTD-UHFFFAOYSA-N alpha-dimethylaminoacetophenone Natural products CN(C)CC(=O)C1=CC=CC=C1 UMLWXYJZDNNBTD-UHFFFAOYSA-N 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000011324 bead Substances 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- JHIWVOJDXOSYLW-UHFFFAOYSA-N butyl 2,2-difluorocyclopropane-1-carboxylate Chemical compound CCCCOC(=O)C1CC1(F)F JHIWVOJDXOSYLW-UHFFFAOYSA-N 0.000 description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N coumarin Chemical compound C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 2
- 239000003431 cross linking reagent Substances 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- HZZUMXSLPJFMCB-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;acetate Chemical compound CC([O-])=O.C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 HZZUMXSLPJFMCB-UHFFFAOYSA-M 0.000 description 2
- JHYNXXDQQHTCHJ-UHFFFAOYSA-M ethyl(triphenyl)phosphanium;bromide Chemical compound [Br-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CC)C1=CC=CC=C1 JHYNXXDQQHTCHJ-UHFFFAOYSA-M 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 238000001879 gelation Methods 0.000 description 2
- 125000003055 glycidyl group Chemical group C(C1CO1)* 0.000 description 2
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 150000002460 imidazoles Chemical class 0.000 description 2
- 238000002329 infrared spectrum Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 125000005010 perfluoroalkyl group Chemical group 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-O phosphonium Chemical group [PH4+] XYFCBTPGUUZFHI-UHFFFAOYSA-O 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920001223 polyethylene glycol Chemical group 0.000 description 2
- 238000006116 polymerization reaction Methods 0.000 description 2
- 229920001451 polypropylene glycol Polymers 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- 229910052708 sodium Inorganic materials 0.000 description 2
- 229940014800 succinic anhydride Drugs 0.000 description 2
- JRMUNVKIHCOMHV-UHFFFAOYSA-M tetrabutylammonium bromide Chemical compound [Br-].CCCC[N+](CCCC)(CCCC)CCCC JRMUNVKIHCOMHV-UHFFFAOYSA-M 0.000 description 2
- NHGXDBSUJJNIRV-UHFFFAOYSA-M tetrabutylammonium chloride Chemical compound [Cl-].CCCC[N+](CCCC)(CCCC)CCCC NHGXDBSUJJNIRV-UHFFFAOYSA-M 0.000 description 2
- DPKBAXPHAYBPRL-UHFFFAOYSA-M tetrabutylazanium;iodide Chemical compound [I-].CCCC[N+](CCCC)(CCCC)CCCC DPKBAXPHAYBPRL-UHFFFAOYSA-M 0.000 description 2
- RKHXQBLJXBGEKF-UHFFFAOYSA-M tetrabutylphosphanium;bromide Chemical compound [Br-].CCCC[P+](CCCC)(CCCC)CCCC RKHXQBLJXBGEKF-UHFFFAOYSA-M 0.000 description 2
- BRKFQVAOMSWFDU-UHFFFAOYSA-M tetraphenylphosphanium;bromide Chemical compound [Br-].C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 BRKFQVAOMSWFDU-UHFFFAOYSA-M 0.000 description 2
- AEFPPQGZJFTXDR-UHFFFAOYSA-M tetraphenylphosphanium;iodide Chemical compound [I-].C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 AEFPPQGZJFTXDR-UHFFFAOYSA-M 0.000 description 2
- IMFACGCPASFAPR-UHFFFAOYSA-N tributylamine Chemical compound CCCCN(CCCC)CCCC IMFACGCPASFAPR-UHFFFAOYSA-N 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- VMHYWKBKHMYRNF-UHFFFAOYSA-N (2-chlorophenyl)-phenylmethanone Chemical compound ClC1=CC=CC=C1C(=O)C1=CC=CC=C1 VMHYWKBKHMYRNF-UHFFFAOYSA-N 0.000 description 1
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- HISNRBVYBOVKMB-UHFFFAOYSA-N stibonium Chemical class [SbH4+] HISNRBVYBOVKMB-UHFFFAOYSA-N 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- CCIYPTIBRAUPLQ-UHFFFAOYSA-M tetrabutylphosphanium;iodide Chemical compound [I-].CCCC[P+](CCCC)(CCCC)CCCC CCIYPTIBRAUPLQ-UHFFFAOYSA-M 0.000 description 1
- UWHCKJMYHZGTIT-UHFFFAOYSA-N tetraethylene glycol Chemical compound OCCOCCOCCOCCO UWHCKJMYHZGTIT-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- USFPINLPPFWTJW-UHFFFAOYSA-N tetraphenylphosphonium Chemical compound C1=CC=CC=C1[P+](C=1C=CC=CC=1)(C=1C=CC=CC=1)C1=CC=CC=C1 USFPINLPPFWTJW-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- YODZTKMDCQEPHD-UHFFFAOYSA-N thiodiglycol Chemical compound OCCSCCO YODZTKMDCQEPHD-UHFFFAOYSA-N 0.000 description 1
- 150000003568 thioethers Chemical class 0.000 description 1
- YRHRIQCWCFGUEQ-UHFFFAOYSA-N thioxanthen-9-one Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3SC2=C1 YRHRIQCWCFGUEQ-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- YFDSDPIBEUFTMI-UHFFFAOYSA-N tribromoethanol Chemical compound OCC(Br)(Br)Br YFDSDPIBEUFTMI-UHFFFAOYSA-N 0.000 description 1
- DWWMSEANWMWMCB-UHFFFAOYSA-N tribromomethylsulfonylbenzene Chemical compound BrC(Br)(Br)S(=O)(=O)C1=CC=CC=C1 DWWMSEANWMWMCB-UHFFFAOYSA-N 0.000 description 1
- ZAMCTDDIJFNXOH-UHFFFAOYSA-N tributylazanium;acetate Chemical compound CC(O)=O.CCCCN(CCCC)CCCC ZAMCTDDIJFNXOH-UHFFFAOYSA-N 0.000 description 1
- TUQOTMZNTHZOKS-UHFFFAOYSA-N tributylphosphine Chemical compound CCCCP(CCCC)CCCC TUQOTMZNTHZOKS-UHFFFAOYSA-N 0.000 description 1
- FRGPKMWIYVTFIQ-UHFFFAOYSA-N triethoxy(3-isocyanatopropyl)silane Chemical compound CCO[Si](OCC)(OCC)CCCN=C=O FRGPKMWIYVTFIQ-UHFFFAOYSA-N 0.000 description 1
- RXJKFRMDXUJTEX-UHFFFAOYSA-N triethylphosphine Chemical compound CCP(CC)CC RXJKFRMDXUJTEX-UHFFFAOYSA-N 0.000 description 1
- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- KOZCZZVUFDCZGG-UHFFFAOYSA-N vinyl benzoate Chemical compound C=COC(=O)C1=CC=CC=C1 KOZCZZVUFDCZGG-UHFFFAOYSA-N 0.000 description 1
- 229940042596 viscoat Drugs 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- PAPBSGBWRJIAAV-UHFFFAOYSA-N ε-Caprolactone Chemical compound O=C1CCCCCO1 PAPBSGBWRJIAAV-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F2/00—Processes of polymerisation
- C08F2/46—Polymerisation initiated by wave energy or particle radiation
- C08F2/48—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light
- C08F2/50—Polymerisation initiated by wave energy or particle radiation by ultraviolet or visible light with sensitising agents
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/28—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety
- C08F220/285—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety and containing a polyether chain in the alcohol moiety
- C08F220/286—Esters containing oxygen in addition to the carboxy oxygen containing no aromatic rings in the alcohol moiety and containing a polyether chain in the alcohol moiety and containing polyethylene oxide in the alcohol moiety, e.g. methoxy polyethylene glycol (meth)acrylate
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/26—Esters containing oxygen in addition to the carboxy oxygen
- C08F220/32—Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals
- C08F220/325—Esters containing oxygen in addition to the carboxy oxygen containing epoxy radicals containing glycidyl radical, e.g. glycidyl (meth)acrylate
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F290/00—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups
- C08F290/02—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated end groups
- C08F290/06—Polymers provided for in subclass C08G
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/029—Inorganic compounds; Onium compounds; Organic compounds having hetero atoms other than oxygen, nitrogen or sulfur
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Medicinal Chemistry (AREA)
- Organic Chemistry (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Inorganic Chemistry (AREA)
- Materials For Photolithography (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
本発明は、感光性樹脂組成物、及びその硬化物並びに該硬化物からなる表示パネル用スペーサーに関する。さらに詳しくは、液晶パネルやタッチパネルなどの表示パネル用スペーサーを形成するための材料として好適な保存安定性、圧縮強度に優れる感光性樹脂組成物、及びその硬化物並びに該硬化物からなる表示パネル用スペーサーに関する。 The present invention relates to a photosensitive resin composition, a cured product thereof, and a spacer for a display panel made of the cured product. More specifically, a photosensitive resin composition excellent in storage stability and compression strength suitable as a material for forming a display panel spacer such as a liquid crystal panel or a touch panel, and a cured product thereof, and a display panel comprising the cured product Regarding spacers.
従来、液晶パネルには2枚の基板の間隔を一定に保つために所定の粒径を有するガラスビーズ、プラスチックビーズ等のスペーサー粒子が使用されていた。しかし、これらスペーサー粒子は、ガラス基板上にランダムに散布されるため、有効画素部内に上記スペーサーが存在すると、スペーサーの写り込みがあったり、入射光が散乱を受け液晶パネルのコントラストが低下するという問題があった。これらの問題を解決するために、感光性樹脂組成物を用いてスペーサーをフォトリソグラフィーにより形成する方法がとられている。 Conventionally, liquid crystal panels have used spacer particles such as glass beads and plastic beads having a predetermined particle size in order to keep the distance between two substrates constant. However, since these spacer particles are randomly distributed on the glass substrate, if the spacer is present in the effective pixel portion, the spacer is reflected or the incident light is scattered and the contrast of the liquid crystal panel is lowered. There was a problem. In order to solve these problems, a method is used in which a spacer is formed by photolithography using a photosensitive resin composition.
このようなスペーサーは、液晶パネル貼り付け時の圧縮荷重に耐える性質が要求される。しかし、感光性樹脂、多官能モノマーおよび光重合開始剤より構成される従来の感光性樹脂組成物を用いて形成されたスペーサーは、硬度が不足しており、カラーフィルタとTFTアレイ基板との組み立て(セル圧着)時の高温高圧下における塑性変形量が大きく、スペーサーとしての機能に支障を来すという問題があり、依然として改良の余地が残されていた。 Such a spacer is required to withstand the compressive load when the liquid crystal panel is attached. However, spacers formed using a conventional photosensitive resin composition composed of a photosensitive resin, a polyfunctional monomer, and a photopolymerization initiator are insufficient in hardness, and the color filter and the TFT array substrate are assembled. There was a problem that the amount of plastic deformation under high temperature and high pressure during (cell pressure bonding) was large, which hindered the function as a spacer, and there was still room for improvement.
また、スペーサーは、液晶パネル中で永久膜として使用されるため、耐熱性や耐薬品性も要求される。従って、この用途に使用される感光性樹脂組成物には永久膜としての特性を得るために同一分子内にカルボキシル基とエポキシ基を併せ持つ熱硬化性の樹脂(特許文献1参照)を使用したり、バインダー樹脂と反応し得るエポキシ樹脂のような架橋剤を添加(特許文献2参照)したりする場合もある。しかしながら、エポキシ系の架橋剤を使用する感光性樹脂組成物の場合、架橋反応を起こすエポキシ基の反応性の高さゆえに、保存安定性が問題となり作業性を低下させる等の不具合が存在するため、硬化物の特性と作業性を両立させることが困難であった。 Further, since the spacer is used as a permanent film in the liquid crystal panel, heat resistance and chemical resistance are also required. Therefore, a thermosetting resin (see Patent Document 1) having both a carboxyl group and an epoxy group in the same molecule is used for the photosensitive resin composition used for this purpose in order to obtain characteristics as a permanent film. In some cases, a crosslinking agent such as an epoxy resin capable of reacting with the binder resin is added (see Patent Document 2). However, in the case of a photosensitive resin composition using an epoxy-based cross-linking agent, because of the high reactivity of the epoxy group that causes a cross-linking reaction, there are problems such as storage stability becoming a problem and reducing workability. It was difficult to achieve both the properties of the cured product and workability.
本発明は、以上のような事情に基づいてなされたものであって、その目的は、室温保管条件下でも感光性樹脂組成物の粘度増加やゲル化が起こらず、十分な保存安定性を有し、かつ、永久膜として必要な耐熱性、耐薬品性を併せ持ち、さらに圧縮強度に優れる表示パネル用スペーサーを形成しうる感光性樹脂組成物を提供することにある。本発明の他の目的は、上記感光性樹脂組成物を活性エネルギー線照射し、加熱硬化して得られる硬化物、及びその硬化物によって形成された表示パネル用スペーサーを提供することにある。 The present invention has been made on the basis of the circumstances as described above, and the purpose thereof is to prevent the photosensitive resin composition from increasing in viscosity or gelation even under storage conditions at room temperature, and has sufficient storage stability. The present invention also provides a photosensitive resin composition capable of forming a display panel spacer having both heat resistance and chemical resistance necessary for a permanent film and having excellent compressive strength. Another object of the present invention is to provide a cured product obtained by irradiating the photosensitive resin composition with active energy rays and heating and curing, and a display panel spacer formed from the cured product.
発明者らは、上記目的を達成するために鋭意研究を行った結果、その基本的な態様は、(A)1分子中にカルボキシル基と少なくとも2個のエチレン性不飽和結合を併せ持つカルボキシル基含有感光性樹脂、(B)1分子中に1個以上のエチレン性不飽和結合を有する重合性化合物、(C)光重合開始剤、及び(D)1分子中に少なくとも2個のオキセタニル基を有するオキセタン化合物を含有する組成物であって、前記カルボキシル基含有感光性樹脂(A)が、下記一般式(1)で表わされる
式中、xは0〜2の整数を表わし、R1は水素又はメチル基を表わし、R2は炭素数10〜20のジシクロペンタジエン誘導体、又は炭素数10〜20のトリシクロデカン誘導体を表わす。
不飽和二重結合を有する化合物を共重合成分として含有するカルボキシル基含有感光性樹脂であることを特徴とする感光性樹脂組成物が、保存安定性に優れ、該感光性樹脂組成物を硬化してなる硬化物が、硬度、耐熱性、耐薬品性、圧縮強度に優れることを見出し、本発明を完成するに至った。
The inventors have conducted extensive research to achieve the above object, and as a result, the basic mode is (A) containing a carboxyl group having both a carboxyl group and at least two ethylenically unsaturated bonds in one molecule. Photosensitive resin, (B) a polymerizable compound having one or more ethylenically unsaturated bonds in one molecule, (C) a photopolymerization initiator, and (D) having at least two oxetanyl groups in one molecule. A composition containing an oxetane compound, wherein the carboxyl group-containing photosensitive resin (A) is represented by the following general formula (1):
In the formula, x represents an integer of 0 to 2, R 1 represents hydrogen or a methyl group, R 2 represents a dicyclopentadiene derivative having 10 to 20 carbon atoms, or a tricyclodecane derivative having 10 to 20 carbon atoms. .
A photosensitive resin composition characterized by being a carboxyl group-containing photosensitive resin containing a compound having an unsaturated double bond as a copolymerization component has excellent storage stability, and the photosensitive resin composition is cured. The cured product thus obtained was found to be excellent in hardness, heat resistance, chemical resistance and compressive strength, and the present invention was completed.
また本発明によれば、上記感光性樹脂組成物を塗布・乾燥する塗膜形成工程、該塗膜形成工程を経て得られた塗膜に選択的に活性エネルギー線を照射する光硬化処理工程、光硬化処理工程の後にアルカリ現像液を用い未照射部分を除去しパターンを得るアルカリ現像工程、およびアルカリ現像工程で得られたパターンを加熱・硬化する工程を経て得られる硬化物が提供される。
なお、本発明において「活性エネルギー線」とは、可視光線、紫外線、遠紫外線、電子線、X線等を含むものを意味する。
さらに本発明によれば、
Further, according to the present invention, a coating film forming step for applying and drying the photosensitive resin composition, a photocuring treatment step for selectively irradiating the coating film obtained through the coating film forming step with active energy rays, There is provided a cured product obtained through an alkali development step of removing a non-irradiated portion using an alkali developer after the photocuring treatment step, and a step of heating and curing the pattern obtained in the alkali development step.
In the present invention, “active energy rays” mean those including visible light, ultraviolet rays, far ultraviolet rays, electron beams, X-rays and the like.
Furthermore, according to the present invention,
さらに本発明によれば、上記感光性樹脂組成物を用いて得られる耐熱性、耐薬品性に優れ、さらに圧縮強度に優れる硬化物からなる表示パネル用スペーサーが提供される。 Furthermore, according to this invention, the spacer for display panels which consists of hardened | cured material which is excellent in the heat resistance and chemical resistance obtained using the said photosensitive resin composition, and also excellent in compressive strength is provided.
本発明の感光性樹脂組成物は、架橋成分としてオキセタン化合物を含む硬化系のため、保存安定性に優れ、得られる硬化物は十分な耐熱性、耐薬品性を有している。すなわち、本発明の感光性樹脂組成物は、従来の架橋成分としてのエポキシ樹脂を使用する場合の保存安定性が劣るといった問題が無く、耐熱性、耐薬品性等の諸特性に優れた硬化物を形成できる。更に、本発明の感光性樹脂組成物は、透明性に優れた硬化物を与えることからスペーサーや平坦化膜などの用途に有効である。また、保存安定性に優れることから作業性に優れ、かつライフ切れによる感光性樹脂組成物の廃棄が減少できる等、経済性の点でも非常に有用である。 Since the photosensitive resin composition of the present invention is a curing system containing an oxetane compound as a crosslinking component, it has excellent storage stability, and the resulting cured product has sufficient heat resistance and chemical resistance. That is, the photosensitive resin composition of the present invention has no problem of poor storage stability when using an epoxy resin as a conventional crosslinking component, and is a cured product excellent in various properties such as heat resistance and chemical resistance. Can be formed. Furthermore, since the photosensitive resin composition of the present invention gives a cured product having excellent transparency, it is effective for applications such as spacers and planarization films. In addition, since it is excellent in storage stability, it is excellent in workability, and it is very useful in terms of economy, such as reduction of the disposal of the photosensitive resin composition due to the end of life.
本発明の感光性組成物に架橋成分として添加されるオキセタン化合物は、四員環のオキセタニル基を有し、これが熱硬化時にアルカリ可溶性感光性樹脂のカルボキシル基と反応して、主に一級の水酸基が発生するので、主に二級の水酸基が発生するエポキシ樹脂を用いた場合に比べて密着性に優れる硬化物が得られる。また、オキセタン化合物はエポキシ樹脂に比べて低温での反応が遅いため、これを含有する感光性組成物はシェルフ・ライフ(保存寿命)が長いため、作業性や経済性の点で有利である。 The oxetane compound added as a crosslinking component to the photosensitive composition of the present invention has a four-membered oxetanyl group, which reacts with the carboxyl group of the alkali-soluble photosensitive resin during heat curing, and is mainly a primary hydroxyl group. Therefore, a cured product having excellent adhesion can be obtained as compared with the case of using an epoxy resin that mainly generates a secondary hydroxyl group. In addition, since the oxetane compound has a slower reaction at a low temperature than the epoxy resin, the photosensitive composition containing the oxetane compound has a long shelf life, which is advantageous in terms of workability and economy.
以下、本発明の感光性組成物の各構成成分について、詳細に説明する。
本発明の分子中にカルボキシル基と少なくとも2個のエチレン性不飽和結合を併せ持つカルボキシル基含有感光性樹脂(A)は、下記一般式(1)で表わされる
式中、xは0〜2の整数を表わし、R1は水素又はメチル基を表わし、R2は炭素数10〜20のジシクロペンタジエン誘導体、又は炭素数10〜20のトリシクロデカン誘導体を表わす。
不飽和二重結合を有する化合物を共重合成分として含有するカルボキシル基含有感光性樹脂である。
このようなカルボキシル基含有感光性樹脂(A)は、前記一般式(1)で表わされる不飽和二重結合を有する化合物を構成成分として含有することで、ガラス転移温度が向上でき、かつ透明性の高いものとなるため、これを用いた感光性樹脂組成物より得られる硬化物の硬度、圧縮強度、耐熱性、耐薬品性が著しく向上することが可能となる。
Hereinafter, each component of the photosensitive composition of this invention is demonstrated in detail.
The carboxyl group-containing photosensitive resin (A) having both a carboxyl group and at least two ethylenically unsaturated bonds in the molecule of the present invention is represented by the following general formula (1).
In the formula, x represents an integer of 0 to 2, R 1 represents hydrogen or a methyl group, R 2 represents a dicyclopentadiene derivative having 10 to 20 carbon atoms, or a tricyclodecane derivative having 10 to 20 carbon atoms. .
A carboxyl group-containing photosensitive resin containing a compound having an unsaturated double bond as a copolymerization component.
Such a carboxyl group-containing photosensitive resin (A) contains a compound having an unsaturated double bond represented by the general formula (1) as a constituent component, whereby the glass transition temperature can be improved, and transparency. Therefore, the hardness, compression strength, heat resistance, and chemical resistance of a cured product obtained from the photosensitive resin composition using the same can be remarkably improved.
このようなカルボキシル基含有感光性樹脂(A)は、特定のものに限定されるものではないが、特に以下に列挙するような不飽和モノマーの共重合により合成される感光性樹脂が好適に使用できる。 Such a carboxyl group-containing photosensitive resin (A) is not limited to a specific one, but is particularly preferably a photosensitive resin synthesized by copolymerization of unsaturated monomers as listed below. it can.
(1)(a)不飽和カルボン酸と(b)前記一般式(1)で表わされる不飽和二重結合を有する化合物又はさらに(c)他の不飽和二重結合を有する化合物を含む共重合体に、エチレン性不飽和基をペンダントとして付加させることによって得られるカルボキシル基含有感光性樹脂、
(2)(d)エポキシ基と不飽和二重結合を有する化合物と(b)前記一般式(1)で表わされる不飽和二重結合を有する化合物又はさらに(c)他の不飽和二重結合を有する化合物を含む共重合体に、(a)不飽和カルボン酸を反応させ、生成した二級の水酸基に(e)飽和又は不飽和多塩基酸無水物を反応させて得られるカルボキシル基含有感光性樹脂、
(3)(f)不飽和二重結合を有する酸無水物と(b)前記一般式(1)で表わされる不飽和二重結合を有する化合物又はさらに(c)他の不飽和二重結合を有する化合物を含む共重合体に、(g)水酸基と不飽和二重結合を有する化合物を反応させて得られるカルボキシル基含有感光性樹脂などが挙げられる。
(1) Co-weight containing (a) an unsaturated carboxylic acid and (b) a compound having an unsaturated double bond represented by the general formula (1) or (c) another compound having an unsaturated double bond A carboxyl group-containing photosensitive resin obtained by adding an ethylenically unsaturated group as a pendant to the coalescence,
(2) (d) a compound having an epoxy group and an unsaturated double bond, and (b) a compound having an unsaturated double bond represented by the general formula (1), or (c) another unsaturated double bond A carboxyl group-containing photosensitivity obtained by reacting a copolymer containing a compound having (a) an unsaturated carboxylic acid and reacting the resulting secondary hydroxyl group with (e) a saturated or unsaturated polybasic acid anhydride. Resin,
(3) (f) an acid anhydride having an unsaturated double bond and (b) a compound having an unsaturated double bond represented by the general formula (1) or (c) another unsaturated double bond. Examples thereof include (g) a carboxyl group-containing photosensitive resin obtained by reacting a compound having a compound with a compound having a hydroxyl group and an unsaturated double bond.
前記カルボキシル基含有感光性樹脂(1)及び(2)の合成に用いられる不飽和カルボン酸(a)としては、例えばアクリル酸、メタクリル酸、イタコン酸、β−カルボキシルエチルアクリレート、β−カルボキシルエチルメタクリレートや、ヒドロキシル基含有の(メタ)アクリレートに多塩基酸無水物を付加した化合物などが挙げられる。これらの中で、感光性、反応性、保存安定性の面から、アクリル酸又はメタクリル酸が特に好ましい。これら不飽和モノカルボン酸(a)は、単独又は2種類以上を混合して用いてもよい。
なお、本明細書中で(メタ)アクリレートとは、アクリレートとメタアクリレートを総称する用語であり、他の類似の表現についても同様である。
Examples of the unsaturated carboxylic acid (a) used in the synthesis of the carboxyl group-containing photosensitive resins (1) and (2) include acrylic acid, methacrylic acid, itaconic acid, β-carboxylethyl acrylate, and β-carboxylethyl methacrylate. And a compound obtained by adding a polybasic acid anhydride to a hydroxyl group-containing (meth) acrylate. Among these, acrylic acid or methacrylic acid is particularly preferable from the viewpoints of photosensitivity, reactivity, and storage stability. These unsaturated monocarboxylic acids (a) may be used alone or in admixture of two or more.
In this specification, (meth) acrylate is a general term for acrylate and methacrylate, and the same applies to other similar expressions.
本発明のカルボキシル基含有感光性樹脂の特徴である前記一般式(1)で表わされる不飽和二重結合を有する化合物(b)の具体的な例としては、ジシクロペンテニル(メタ)アクリレート、ジシクロペンテニルオキシエチル(メタ)アクリレート、ジシクロペンタニル(メタ)アクリレートなどが挙げられる。その市販品としては、例えば日立化成工業社製のファンクリル FA−511A、FA−512A、FA−513A、FA−512M、FA−513Mなどが挙げられる。 Specific examples of the compound (b) having an unsaturated double bond represented by the general formula (1), which is a feature of the carboxyl group-containing photosensitive resin of the present invention, include dicyclopentenyl (meth) acrylate and di Examples thereof include cyclopentenyloxyethyl (meth) acrylate and dicyclopentanyl (meth) acrylate. Examples of commercially available products include FANCLIL FA-511A, FA-512A, FA-513A, FA-512M, and FA-513M manufactured by Hitachi Chemical Co., Ltd.
前記カルボキシル基含有感光性樹脂(1)、(2)及び(3)の合成に用いられる他の不飽和二重結合を有する化合物(c)としては、公知慣用の単官能モノマーが使用できる。例えば、スチレン、クロロスチレン、α−メチルスチレン;置換基としてメチル、エチル、プロピル、イソプロピル、n−ブチル、イソブチル、t−ブチル、アミル、2−エチルヘキシル、オクチル、カプリル、ノニル、ドデシル、ヘキサデシル、オクタデシル、シクロヘキシル、イソボロニル、メトキシエチル、ブトキシエチル、2−ヒドロキシエチル、2−ヒドロキシプロピル、3−クロロ−2−ヒドロキシプロピル等の置換基を有するアクリレート、メタクリレート又はフマレート;ポリエチレングリコールのモノアクリレートもしくはモノメタクリレート、又はポリプロピレングリコールのモノアクリレート、モノメタクリレート;酢酸ビニル、酪酸ビニル又は安息香酸ビニル;エチレン、プロピレン等のオレフィン類;アクリロニトリル等が挙げられる As the compound (c) having another unsaturated double bond used for the synthesis of the carboxyl group-containing photosensitive resins (1), (2) and (3), known and commonly used monofunctional monomers can be used. For example, styrene, chlorostyrene, α-methylstyrene; methyl, ethyl, propyl, isopropyl, n-butyl, isobutyl, t-butyl, amyl, 2-ethylhexyl, octyl, capryl, nonyl, dodecyl, hexadecyl, octadecyl as substituents Acrylate, methacrylate or fumarate having a substituent such as cyclohexyl, isobornyl, methoxyethyl, butoxyethyl, 2-hydroxyethyl, 2-hydroxypropyl, 3-chloro-2-hydroxypropyl; polyethylene glycol monoacrylate or monomethacrylate, Or polypropylene glycol monoacrylate, monomethacrylate; vinyl acetate, vinyl butyrate or vinyl benzoate; olefins such as ethylene and propylene; acryloni Like Lil, etc.
前記カルボキシル基含有感光性樹脂(2)の合成に用いられるエポキシ基と不飽和二重結合を有する化合物(d)としては、グリシジル(メタ)アクリレート、β−メチルグリシジル(メタ)アクリレート、β−エチルグリシジル(メタ)アクリレート、N−[4−(2,3−エポキシプロポキシ)−3,5−ジメチルベンジル]アクリルアミド、N−[4−(2,3−エポキシプロポキシ)−3,5−ジメチルベンジル]メタアクリルアミド、クロトン酸グリシジルや、3,4−エポキシシクロヘキシルメチル(メタ)アクリレートなどが挙げられる。これらの中でもグリシジル(メタ)アクリレートが、反応性の面から好ましい。 As the compound (d) having an epoxy group and an unsaturated double bond used for the synthesis of the carboxyl group-containing photosensitive resin (2), glycidyl (meth) acrylate, β-methylglycidyl (meth) acrylate, β-ethyl Glycidyl (meth) acrylate, N- [4- (2,3-epoxypropoxy) -3,5-dimethylbenzyl] acrylamide, N- [4- (2,3-epoxypropoxy) -3,5-dimethylbenzyl] Examples include methacrylamide, glycidyl crotonate, and 3,4-epoxycyclohexylmethyl (meth) acrylate. Among these, glycidyl (meth) acrylate is preferable from the viewpoint of reactivity.
前記カルボキシル基含有感光性樹脂(2)の合成に用いられる前記飽和又は不飽和多塩基酸無水物(e)としては、メチルテトラヒドロ無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸、メチルヘキサヒドロ無水フタル酸、無水ナジック酸、3,6−エンドメチレンテトラヒドロ無水フタル酸、メチルエンドメチレンテトラヒドロ無水フタル酸、テトラブロモ無水フタル酸等の脂環式二塩基酸無水物;無水コハク酸、無水マレイン酸、無水イタコン酸、オクテニル無水コハク酸、ペンタドデセニル無水コハク酸、無水フタル酸、無水トリメリット酸等の脂肪族又は芳香族多塩基酸無水物などが挙げられ、これらのうち1種又は2種以上を使用することができる。これらの中でも、脂環式二塩基酸無水物が、現像性の面から特に好ましい。 Examples of the saturated or unsaturated polybasic acid anhydride (e) used for the synthesis of the carboxyl group-containing photosensitive resin (2) include methyltetrahydrophthalic anhydride, tetrahydrophthalic anhydride, hexahydrophthalic anhydride, methylhexahydro Aliphatic dibasic acid anhydrides such as phthalic anhydride, nadic anhydride, 3,6-endomethylenetetrahydrophthalic anhydride, methylendomethylenetetrahydrophthalic anhydride, tetrabromophthalic anhydride; succinic anhydride, maleic anhydride, Aliphatic or aromatic polybasic acid anhydrides such as itaconic anhydride, octenyl succinic anhydride, pentadodecenyl succinic anhydride, phthalic anhydride, trimellitic anhydride, etc. are used, and one or more of these are used can do. Among these, alicyclic dibasic acid anhydrides are particularly preferable from the viewpoint of developability.
前記カルボキシル基含有感光性樹脂(3)の合成に用いられる不飽和二重結合を有する酸無水物(f)としては、無水マレイン酸、無水イタコン酸、さらには無水ピロメリット酸と2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート等のヒドロキシアルキル(メタ)アクリレート類などの水酸基を有する不飽和化合物との部分反応生成物等が挙げられ、これらを単独で又は2種以上を組み合わせて用いることができる。これらの中でも、ポリマーを安定して合成できる無水マレイン酸が好ましい。 Examples of the acid anhydride (f) having an unsaturated double bond used for the synthesis of the carboxyl group-containing photosensitive resin (3) include maleic anhydride, itaconic anhydride, and pyromellitic anhydride and 2-hydroxyethyl anhydride. Examples include partial reaction products with unsaturated compounds having a hydroxyl group such as hydroxyalkyl (meth) acrylates such as (meth) acrylate and 2-hydroxypropyl (meth) acrylate, and these may be used alone or in combination of two or more. They can be used in combination. Among these, maleic anhydride capable of stably synthesizing a polymer is preferable.
前記カルボキシル基含有感光性樹脂(3)の合成に用いら水酸基と不飽和二重結合を有する化合物(g)としては、2−ヒドロキシエチル(メタ)アクリレート、2−ヒドロキシプロピル(メタ)アクリレート、4−ヒドロキシブチル(メタ)アクリレート等のヒドロキシアルキル(メタ)アクリレート類;ジエチレングリコールモノ(メタ)アクリレート、ジプロピレングリコールモノ(メタ)アクリレート、トリメチロールプロパンジ(メタ)アクリレート、グリセリンジ(メタ)アクリレートル、ペンタエリスリトールトリ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレートなどが挙げられる。さらに、上記化合物の水酸基に、ε−カプロラクトンなどの環状エステルを付加した化合物も使用できる。これらを単独で又は2種以上を組み合わせて使用することができる。 Examples of the compound (g) having a hydroxyl group and an unsaturated double bond used for the synthesis of the carboxyl group-containing photosensitive resin (3) include 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4 -Hydroxyalkyl (meth) acrylates such as hydroxybutyl (meth) acrylate; diethylene glycol mono (meth) acrylate, dipropylene glycol mono (meth) acrylate, trimethylolpropane di (meth) acrylate, glycerin di (meth) acrylate, Examples include pentaerythritol tri (meth) acrylate and dipentaerythritol penta (meth) acrylate. Furthermore, a compound obtained by adding a cyclic ester such as ε-caprolactone to the hydroxyl group of the above compound can also be used. These can be used alone or in combination of two or more.
このようなカルボキシル基含有感光性樹脂(A)は、単独で又は混合して用いてもよいが、いずれの場合でもこれらは合計で組成物全量の5〜80質量%、好ましくは10〜60質量%の割合で配合することが好ましい。さらに、必要に応じて、上記以外のカルボキシル基含有感光性樹脂、例えばエポキシアクリレートに多塩基酸無水物を付加したような樹脂を少量加えることもできる。 Such a carboxyl group-containing photosensitive resin (A) may be used alone or as a mixture, but in any case, these are in total 5 to 80% by mass, preferably 10 to 60% by mass of the total amount of the composition. It is preferable to mix | blend in the ratio of%. Furthermore, if necessary, a small amount of a carboxyl group-containing photosensitive resin other than the above, for example, a resin obtained by adding a polybasic acid anhydride to epoxy acrylate can be added.
上記カルボキシル基含有感光性樹脂(A)の酸価は、30〜250mgKOH/g、好ましくは50〜150mgKOH/gである。上記カルボキシル基含有感光性樹脂の酸価が30mgKOH/g未満の場合、前記オキセタン化合物(D)との充分な硬化反応が進行し難くなり、また、アルカリ水溶液に対する溶解性が不充分で現像不良を生じ易くなる。一方、250mgKOH/gを超えた場合、現像時に皮膜の密着性の劣化や光硬化部(露光部)の溶解が生じるので好ましくない。
また、カルボキシル基含有感光性樹脂(A)の二重結合当量は、350〜2,000、好ましくは400〜1,500のものが好適に用いることができる。カルボキシル基含有感光性樹脂(A)の二重結合当量が350未満の場合、保存安定性が低下したり、硬化物の強度が脆くなるので好ましくない。一方、二重結合当量が2,000を超えた場合、現像時の作業余裕度が狭く、また光硬化時に高露光量を必要とするので好ましくない。
The acid value of the said carboxyl group-containing photosensitive resin (A) is 30-250 mgKOH / g, Preferably it is 50-150 mgKOH / g. When the acid value of the carboxyl group-containing photosensitive resin is less than 30 mg KOH / g, sufficient curing reaction with the oxetane compound (D) is difficult to proceed, and insufficient solubility in an alkaline aqueous solution results in poor development. It tends to occur. On the other hand, if it exceeds 250 mgKOH / g, it is not preferred because deterioration of the adhesion of the film and dissolution of the photocured part (exposed part) occur during development.
Further, the double bond equivalent of the carboxyl group-containing photosensitive resin (A) is suitably 350 to 2,000, preferably 400 to 1,500. When the double bond equivalent of the carboxyl group-containing photosensitive resin (A) is less than 350, it is not preferable because the storage stability is lowered and the strength of the cured product becomes brittle. On the other hand, when the double bond equivalent exceeds 2,000, the work margin during development is narrow, and a high exposure amount is required during photocuring, which is not preferable.
本発明で用いられる1分子中に1個以上のエチレン性不飽和結合を有する重合性化合物(B)としては、単官能、2官能または3官能以上の(メタ)アクリレートが、重合性が良好であり、得られるスペーサーの強度、耐熱性が向上する点から好ましく用いられる。 As the polymerizable compound (B) having one or more ethylenically unsaturated bonds in one molecule used in the present invention, a monofunctional, bifunctional, or trifunctional or higher (meth) acrylate has good polymerizability. In addition, it is preferably used because the strength and heat resistance of the obtained spacer are improved.
上記単官能(メタ)アクリレートとしては、例えば2−ヒドロキシエチル(メタ)アクリレート、カルビトール(メタ)アクリレート、イソボロニル(メタ)アクリレート、3−メトキシブチル(メタ)アクリレート、2−(メタ)アクリロイルオキシエチル−2−ヒドロキシプロピルフタレートなどが挙げられる。その市販品としては、例えばアロニックスM−101、同M−111、同M−114(以上、東亞合成(株)製)、KAYARAD TC−110S、同TC−120S(以上、日本化薬(株)製)、ビスコート158、同2311(以上、大阪有機化学工業(株)製)が挙げられる。 Examples of the monofunctional (meth) acrylate include 2-hydroxyethyl (meth) acrylate, carbitol (meth) acrylate, isobornyl (meth) acrylate, 3-methoxybutyl (meth) acrylate, and 2- (meth) acryloyloxyethyl. And 2-hydroxypropyl phthalate. Examples of the commercially available products include Aronix M-101, M-111, M-114 (above, manufactured by Toagosei Co., Ltd.), KAYARAD TC-110S, TC-120S (above, Nippon Kayaku Co., Ltd.). Product), Biscoat 158, 2311 (manufactured by Osaka Organic Chemical Industry Co., Ltd.).
上記2官能(メタ)アクリレートとしては、例えばエチレングリコールジ(メタ)アクリレート、1,6−ヘキサンジオールジ(メタ)アクリレート、1,9−ノナンジオールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、テトラエチレングリコールジ(メタ)アクリレート、ビスフェノキシエタノールフルオレンジアクリレートなどが挙げられる。その市販品としては、例えばアロニックスM−210、同M−240、同M−6200(以上、東亞合成(株)製)、KAYARAD HDDA、同HX−220、同R−604(以上、日本化薬(株)製)、ビスコート260、同312、同335HP(以上、大阪有機化学工業(株)製)などが挙げられる。 Examples of the bifunctional (meth) acrylate include ethylene glycol di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, and polypropylene glycol di (meth) acrylate. , Tetraethylene glycol di (meth) acrylate, bisphenoxyethanol full orange acrylate, and the like. Examples of commercially available products include Aronix M-210, M-240, M-6200 (above, manufactured by Toagosei Co., Ltd.), KAYARAD HDDA, HX-220, R-604 (above, Nippon Kayaku). Manufactured by Co., Ltd.), Viscoat 260, 312 and 335HP (above, manufactured by Osaka Organic Chemical Industry Co., Ltd.).
上記3官能以上の(メタ)アクリレートとしては、例えばトリメチロールプロパントリ(メタ)アクリレート、ペンタエリスリトールトリ(メタ)アクリレート、トリ((メタ)アクリロイロキシエチル)フォスフェート、ペンタエリスリトールテトラ(メタ)アクリレート、ジペンタエリスリトールペンタ(メタ)アクリレート、ジペンタエリスリトールヘキサ(メタ)アクリレートなどが挙げられる。その市販品としては、例えばアロニックスM−309、同M−400、同M−402、同M−405、同M−450、同M−7100、同M−8030、同M−8060、同M−1310、同M−1600、同M−1960、同M−8100、同M−8530、同M−8560、同M−9050、同TO−1450(以上、東亞合成(株)製)、KAYARAD TMPTA、同DPHA、同DPCA−20、同DPCA−30、同DPCA−60、同DPCA−120(以上、日本化薬(株)製)、ビスコート295、同300、同360、同GPT、同3PA、同400(以上、大阪有機化学工業(株)製)などが挙げられる。これらの単官能、2官能または3官能以上の(メタ)アクリレートは、単独であるいは組み合わせて用いられる。 Examples of the trifunctional or higher functional (meth) acrylate include trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, tri ((meth) acryloyloxyethyl) phosphate, and pentaerythritol tetra (meth) acrylate. , Dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, and the like. Examples of the commercially available products include Aronix M-309, M-400, M-402, M-405, M-450, M-7100, M-8030, M-8060, and M- 1310, same M-1600, same M-1960, same M-8100, same M-8530, same M-8560, same M-9050, same TO-1450 (above, manufactured by Toagosei Co., Ltd.), KAYARAD TMPTA, DPHA, DPCA-20, DPCA-30, DPCA-60, DPCA-120 (above, manufactured by Nippon Kayaku Co., Ltd.), Biscote 295, 300, 360, GPT, 3PA, 400 (manufactured by Osaka Organic Chemical Industry Co., Ltd.). These monofunctional, bifunctional, or trifunctional or higher (meth) acrylates are used alone or in combination.
これらの重合性化合物(B)の配合量としては、前記カルボキシル基含有感光性樹脂(A)100質量部に対して、5〜100質量部が好ましく、特に好ましくは5〜50質量部である。(B)成分が5質量部未満の場合、十分な硬化性が得られなくなる。一方、100部以上となった場合、指触乾燥性が悪くなったり、硬化物が脆くなったりするので好ましくない。 As a compounding quantity of these polymeric compounds (B), 5-100 mass parts is preferable with respect to 100 mass parts of said carboxyl group-containing photosensitive resin (A), Most preferably, it is 5-50 mass parts. When the component (B) is less than 5 parts by mass, sufficient curability cannot be obtained. On the other hand, when the amount is 100 parts or more, the dryness to touch becomes poor and the cured product becomes brittle, which is not preferable.
前記光重合開始剤(C)としては、活性エネルギー線の照射によりラジカルを発生する公知の化合物が使用可能であり、例えば、アセトフェノン、2,2−ジメトキシ−2−フェニルアセトフェノン、2,2−ジエトキシ−2−フェニルアセトフェノン、p−ジメチルアミノプロピオフェノン、ジクロロアセトフェノン、トリクロロアセトフェノン、p−tert−ブチルトリクロロアセトフェノン、1−ヒドロキシシクロヘキシルフェニルケトン、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルフォリノ−プロパン−1−オン、2−ベンジル−2−ジメチルアミノ−1−(4−モルフォリノフェニル)−ブタノン−1、N,N−ジメチルアミノアセトフェノン等のアセトフェノン類;ベンゾフェノン、メチルベンゾフェノン、2−クロロベンゾフェノン、4,4’−ジクロロベンゾフェノン、4,4’−ビスジメチルアミノベンゾフェノン、4,4’−ビスジエチルアミノベンゾフェノン、ミヒラーズケトン、4−ベンゾイル−4’−メチルジフェニルサルファイド等のベンゾフェノン類;ベンジル、ベンゾイン、ベンゾインメチルエーテル、ベンゾインエチルエーテル、ベンゾインイソプロピルエーテル、ベンゾインイソブチルエーテル等のベンゾインエーテル類;アセトフェノンジメチルケタール、ベンジルジメチルケタール等のケタール類;チオキサントン、2−クロロチオキサントン、2,4−ジメチルチオキサントン、2,4−ジエチルチオキサントン、2,4−ジイソプロピルチオキサントン等のチオキサントン類;2−メチルアントラキノン、2−エチルアントラキノン、2−tert−ブチルアントラキノン、1−クロロアントラキノン、2−アミノアントラキノン、2,3−ジフェニルアントラキノン等のアントラキノン類;ベンゾイルパーオキシド、クメンパーオキシド等の有機過酸化物;2,4,5−トリアリールイミダゾール二量体、リボフラビンテトラブチレート、2−メルカプトベンゾイミダゾール、2−メルカプトベンゾオキサゾール、2−メルカプトベンゾチアゾール等のチオール化合物;2,4,6−トリス−s−トリアジン、2,2,2−トリブロモエタノール、トリブロモメチルフェニルスルホン等の有機ハロゲン化合物;2,4,6−トリメチルベンゾイルジフェニルホスフィンオキサイド等が挙げられる。またその他の例として、アクリジン化合物類、オキシムエステル類などが挙げられる。これらの化合物は、単独で用いることもでき、また2種以上を組み合わせて使用することもできる。 As the photopolymerization initiator (C), known compounds that generate radicals upon irradiation with active energy rays can be used, for example, acetophenone, 2,2-dimethoxy-2-phenylacetophenone, 2,2-diethoxy. 2-phenylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone, p-tert-butyltrichloroacetophenone, 1-hydroxycyclohexyl phenyl ketone, 2-methyl-1- [4- (methylthio) phenyl]- Acetophenones such as 2-morpholino-propan-1-one, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butanone-1, N, N-dimethylaminoacetophenone; benzophenone, methylbenzophenone Benzophenones such as 2-chlorobenzophenone, 4,4′-dichlorobenzophenone, 4,4′-bisdimethylaminobenzophenone, 4,4′-bisdiethylaminobenzophenone, Michler's ketone, 4-benzoyl-4′-methyldiphenyl sulfide; benzyl Benzoin ethers such as benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, and benzoin isobutyl ether; ketals such as acetophenone dimethyl ketal and benzyl dimethyl ketal; thioxanthone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, Thioxanthones such as 2,4-diethylthioxanthone and 2,4-diisopropylthioxanthone; 2-methylanthraquinone, 2- Anthraquinones such as tilanthraquinone, 2-tert-butylanthraquinone, 1-chloroanthraquinone, 2-aminoanthraquinone and 2,3-diphenylanthraquinone; organic peroxides such as benzoyl peroxide and cumene peroxide; 2,4,5 -Thiol compounds such as triarylimidazole dimer, riboflavin tetrabutyrate, 2-mercaptobenzoimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole; 2,4,6-tris-s-triazine, 2,2 , 2-tribromoethanol, tribromomethylphenylsulfone, and the like; 2,4,6-trimethylbenzoyldiphenylphosphine oxide and the like. Other examples include acridine compounds and oxime esters. These compounds can be used alone or in combination of two or more.
さらに、上記のような光重合開始剤(C)は、N,N−ジメチルアミノ安息香酸エチルエステル、N,N−ジメチルアミノ安息香酸イソアミルエステル、ペンチル−4−ジメチルアミノベンゾエート、トリエチルアミン、トリエタノールアミン等の三級アミン類;β−チオジグリコールなどのチオエーテル類;(ケト)クマリン、チオキサンテンなどの増感色素類;シアニン、ローダミン、サフラニン、マラカイトグリーン、メチレンブルー等のアルキルホウ酸塩などのような光増感剤もしくは促進剤の1種あるいは2種以上と組み合わせて用いることができる。 Further, the photopolymerization initiator (C) as described above includes N, N-dimethylaminobenzoic acid ethyl ester, N, N-dimethylaminobenzoic acid isoamyl ester, pentyl-4-dimethylaminobenzoate, triethylamine, triethanolamine. Tertiary amines such as; thioethers such as β-thiodiglycol; sensitizing dyes such as (keto) coumarin and thioxanthene; alkylborates such as cyanine, rhodamine, safranine, malachite green, and methylene blue It can be used in combination with one or more of photosensitizers or accelerators.
前記光重合開始剤(C)の好ましい組合せは、2−メチル−1−[4−(メチルチオ)フェニル]−2−モルフォリノ−プロパン−1−オン(例えばチバ・スペシャルティ・ケミカルズ社製、イルガキュアー907)と、2−クロロチオキサントン(例えば日本化薬(株)製カヤキュアーCTX)や2,4−ジエチルチオキサントン(例えば日本化薬(株)製カヤキュアーDETX)、2−イソプロピルチオキサントン、4−ベンゾイル−4’−メチルジフェニルサルファイド等との組合せである。また、上記のような光重合開始剤(C)の使用量の好適な範囲は、前記カルボキシル基含有感光性樹脂(A)100質量部に対して0.01〜30質量部、好ましくは0.1〜15質量部となる割合である。光重合開始剤の配合割合が0.01質量部未満の場合には光硬化性が悪くなり、一方、30質量部より多い場合には硬化塗膜の特性が悪くなり、また、保存安定性が悪くなるので好ましくない。 A preferable combination of the photopolymerization initiator (C) is 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-propan-1-one (for example, Irgacure 907 manufactured by Ciba Specialty Chemicals). ), 2-chlorothioxanthone (eg Nippon Kayaku Co., Ltd. Kayacure CTX) or 2,4-diethylthioxanthone (eg Nippon Kayaku Co., Ltd. Kayacure DETX), 2-isopropylthioxanthone, 4-benzoyl-4 ′ -Combination with methyldiphenyl sulfide and the like. Moreover, the suitable range of the usage-amount of the above photoinitiators (C) is 0.01-30 mass parts with respect to 100 mass parts of said carboxyl group-containing photosensitive resin (A), Preferably it is 0.00. It is the ratio which becomes 1-15 mass parts. When the blending ratio of the photopolymerization initiator is less than 0.01 parts by mass, the photocurability is deteriorated. On the other hand, when it is more than 30 parts by mass, the characteristics of the cured coating film are deteriorated, and the storage stability is improved. Since it gets worse, it is not preferable.
前記オキセタン化合物(D)としては、1分子中に2つ以上のオキセタニル基を有するオキセタン化合物であればいかなる物も使用可能であり、特定の化合物に限定されるものではないが、硬化物の透明性の点から後述する有機溶媒(E)に可溶なものが好適に用いられる。 As the oxetane compound (D), any compound can be used as long as it is an oxetane compound having two or more oxetanyl groups in one molecule, and is not limited to a specific compound. In view of the properties, those soluble in the organic solvent (E) described later are preferably used.
2官能オキセタン化合物としては、下記一般式(2)で示されるビスオキセタン類が挙げられる。 Examples of the bifunctional oxetane compound include bisoxetanes represented by the following general formula (2).
上記一般式(2)において、R3 は水素原子または炭素数1〜6のアルキル基を表わし、R4 は、酸素原子、硫黄原子、および炭素数1〜12の線状又は分岐状飽和炭化水素類、炭素数1〜12の線状又は分岐状不飽和炭化水素類、下記式(I)、(II)、(III)、(IV)及び(V)で示される芳香族炭化水素類、式(VI)及び(VII)で示されるカルボニル基を含む直鎖状又は環状のアルキレン類、式(VIII)及び(IX)で示されるカルボニル基を含む芳香族炭化水素類から選択される2つの原子価を持った基である。その他の2官能オキセタン化合物としては、カルド型、ナフタレン型などが挙げられる。
In the general formula (2), R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and R 4 represents an oxygen atom, a sulfur atom, or a linear or branched saturated hydrocarbon having 1 to 12 carbon atoms. , Linear or branched unsaturated hydrocarbons having 1 to 12 carbon atoms, aromatic hydrocarbons represented by the following formulas (I), (II), (III), (IV) and (V): Two atoms selected from linear or cyclic alkylenes containing carbonyl groups represented by (VI) and (VII), and aromatic hydrocarbons containing carbonyl groups represented by formulas (VIII) and (IX) It is a group with a valence. Examples of other bifunctional oxetane compounds include cardo type and naphthalene type.
式中、R5は、水素原子、炭素数1〜12のアルキル基、アリール基、又はアラルキル基を表わし、R6は、−O−、−S−、−CH2−、−NH−、−SO2−、−CH(CH3)−、−C(CH3)2−、又は−C(CF3)2−を表わし、R7 は、水素原子又は炭素数1〜6のアルキル基を表わす。
In the formula, R 5 represents a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an aryl group, or an aralkyl group, and R 6 represents —O—, —S—, —CH 2 —, —NH—, — SO 2 —, —CH (CH 3 ) —, —C (CH 3 ) 2 —, or —C (CF 3 ) 2 — is represented, and R 7 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. .
式中、nは1〜12の整数を表わす。
In the formula, n represents an integer of 1 to 12.
多官能オキセタン化合物としては、下記一般式(3)で示されるような化合物の他、オキセタンアルコールとノボラック樹脂、ポリ(ヒドロキシスチレン)、カリックスアレーン類、又はシルセスキオキサン等のシリコーン樹脂類などの水酸基を有する樹脂とのエーテル化物などが挙げられる。その他、オキセタン環を有する不飽和モノマーとアルキル(メタ)アクリレートとの共重合体等も挙げられる。
As the polyfunctional oxetane compound, in addition to the compound represented by the following general formula (3), silicone resins such as oxetane alcohol and novolac resin, poly (hydroxystyrene), calixarene, or silsesquioxane are used. And etherified products with a hydroxyl group-containing resin. In addition, a copolymer of an unsaturated monomer having an oxetane ring and an alkyl (meth) acrylate is also included.
上記一般式(3)において、R3は前記と同じ意味であり、R8は前記エーテル化物の水酸基含有残基、下記式(X)、(XI)および(XII)で示されるような炭素数1〜12の分岐状アルキレン基、式(XIII)、(XIV)および(XV)で示される芳香族炭化水素類である。また、mは残基R8の結合している官能基の数を表わし、3以上の整数、好ましくは3〜100の整数である。
In the general formula (3), R 3 has the same meaning as described above, and R 8 represents a hydroxyl group-containing residue of the etherified product, the number of carbon atoms as shown by the following formulas (X), (XI), and (XII) 1 to 12 branched alkylene groups, aromatic hydrocarbons represented by the formulas (XIII), (XIV) and (XV). M represents the number of functional groups to which the residue R 8 is bonded, and is an integer of 3 or more, preferably an integer of 3 to 100.
式中R9は、水素原子、炭素数1〜6のアルキル基、置換基を有するアリール基を表わす。
In the formula, R 9 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, or an aryl group having a substituent.
オキセタン化合物(D)の作用としては、カルボキシル基含有感光性樹脂中のカルボキシル基と反応し架橋構造を形成することで、耐薬品性、耐熱性の向上した強固な硬化物を形成することである。オキセタン化合物(D)の配合量は、前記カルボキシル基含有感光性樹脂(A)100質量部に対して5〜100質量部の割合が適当であり、好ましくは15〜60質量部である。 The action of the oxetane compound (D) is to form a hardened material having improved chemical resistance and heat resistance by reacting with a carboxyl group in the carboxyl group-containing photosensitive resin to form a crosslinked structure. . The amount of the oxetane compound (D) is appropriately 5 to 100 parts by mass, preferably 15 to 60 parts by mass with respect to 100 parts by mass of the carboxyl group-containing photosensitive resin (A).
オキセタン化合物(D)とカルボキシル基含有感光性樹脂(A)中のカルボキシル基との反応を促進するために、以下に示す反応促進剤を添加することもできる。 In order to promote the reaction between the oxetane compound (D) and the carboxyl group in the carboxyl group-containing photosensitive resin (A), a reaction accelerator shown below can be added.
反応促進剤としては、三級アミン類、イミダゾール類、四級オニウム塩類、三級ホスフィン類、ホスホニウムイリド類、アセチルアセトン金属錯体類、又はクラウンエーテル錯体の中から任意に選択することが可能であり、これらを単独で又は2種以上を組み合わせて用いてもよい。 The reaction accelerator can be arbitrarily selected from tertiary amines, imidazoles, quaternary onium salts, tertiary phosphines, phosphonium ylides, acetylacetone metal complexes, or crown ether complexes, You may use these individually or in combination of 2 or more types.
三級アミンとしては、トリエチルアミン、トリブチルアミン、DBU(1,8−ジアザビシクロ[5.4.0]ウンデカ−7−エン)、DBN(1,5−ジアザビシクロ[4.3.0]ノナ−5−エン)、DABCO(1,4−ジアザビシクロ[2.2.2]オクタン)、ピリジン、N,N−ジメチル−4−アミノピリジンなどが挙げられる。 The tertiary amine includes triethylamine, tributylamine, DBU (1,8-diazabicyclo [5.4.0] undec-7-ene), DBN (1,5-diazabicyclo [4.3.0] non-5- En), DABCO (1,4-diazabicyclo [2.2.2] octane), pyridine, N, N-dimethyl-4-aminopyridine and the like.
イミダゾール類としては、イミダゾール、2−メチルイミダゾール、2−ウンデシルイミダゾール、2−エチル−4−メチルイミダゾール、1−ベンジル−2−メチルイミダゾール、1−ベンジル−2−フェニルイミダゾール、2−フェニルイミダゾール・イソシアヌル酸付加物などが挙げられる。 Examples of imidazoles include imidazole, 2-methylimidazole, 2-undecylimidazole, 2-ethyl-4-methylimidazole, 1-benzyl-2-methylimidazole, 1-benzyl-2-phenylimidazole, 2-phenylimidazole, Examples include isocyanuric acid adducts.
四級オニウム塩としては、アンモニウム塩、ホスホニウム塩、アルソニウム塩、スチボニウム塩、オキソニウム塩、スルホニウム塩、セレノニウム塩、スタンノニウム塩、ヨードニウム塩等が挙げられる。特に好ましいものは、アンモニウム塩及びホスホニウム塩である。アンモニウム塩の具体例としては、テトラn−ブチルアンモニウムクロライド(TBAC)、テトラn−ブチルアンモニウムブロミド(TBAB)、テトラn−ブチルアンモニウムアイオダイド(TBAI)等のテトラn−ブチルアンモニウムハライドや、テトラn−ブチルアンモニウムアセテート(TBAAc)などが挙げられる。ホスホニウム塩の具体例としては、テトラn−ブチルホスホニウムクロライド(TBPC)、テトラn−ブチルホスホニウムブロミド(TBPB)、テトラn−ブチルホスホニウムアイオダイド(TBBI)等のテトラn−ブチルホスホニウムハライド、テトラフェニルホスホニウムクロライド(TPPC)、テトラフェニルホスホニウムブロミド(TPPB)、テトラフェニルホスホニウムアイオダイド(TPPI)等のテトラフェニルホスホニウムハライドや、エチルトリフェニルホスホニウムブロミド(ETPPB)、エチルトリフェニルホスホニウムアセテート(ETPPAc)などが挙げられる。 Examples of the quaternary onium salt include ammonium salts, phosphonium salts, arsonium salts, stibonium salts, oxonium salts, sulfonium salts, selenonium salts, stannonium salts, iodonium salts, and the like. Particularly preferred are ammonium salts and phosphonium salts. Specific examples of the ammonium salt include tetra n-butylammonium chloride (TBAC), tetra n-butylammonium bromide (TBAB), tetra n-butylammonium iodide (TBAI), and the like. -Butyl ammonium acetate (TBAAc) etc. are mentioned. Specific examples of the phosphonium salt include tetra n-butylphosphonium halide (TBPC), tetra n-butylphosphonium bromide (TBPB), tetra n-butylphosphonium iodide (TBBI), tetraphenylphosphonium Examples include tetraphenylphosphonium halides such as chloride (TPPC), tetraphenylphosphonium bromide (TPPB), and tetraphenylphosphonium iodide (TPPI), ethyltriphenylphosphonium bromide (ETPPB), and ethyltriphenylphosphonium acetate (ETPPAc). .
三級ホスフィンとしては、炭素数1〜12のアルキル基、又はアリール基を有する、三価の有機リン化合物であればよい。具体例としては、トリエチルホスフィン、トリブチルホスフィン、トリフェニルホスフィンなどが挙げられる。 The tertiary phosphine may be a trivalent organic phosphorus compound having an alkyl group having 1 to 12 carbon atoms or an aryl group. Specific examples include triethylphosphine, tributylphosphine, triphenylphosphine and the like.
さらに、三級アミン又は三級ホスフィンと、カルボン酸あるいは酸性の強いフェノールとの付加反応により形成される四級オニウム塩も反応促進剤として使用可能である。これらは、反応系に添加する前に四級塩を形成する、もしくはそれぞれを別に添加して反応系中で四級塩形成を行なわせるいずれの方法でもよい。具体的には、トリブチルアミンと酢酸より得られるトリブチルアミン酢酸塩、トリフェニルホスフィンと酢酸より形成されるトリフェニルホスフィン酢酸塩などが挙げられる。 Furthermore, a quaternary onium salt formed by an addition reaction between a tertiary amine or tertiary phosphine and a carboxylic acid or a strongly acidic phenol can also be used as a reaction accelerator. These may be any method in which a quaternary salt is formed before addition to the reaction system, or each is added separately to form a quaternary salt in the reaction system. Specific examples include tributylamine acetate obtained from tributylamine and acetic acid, and triphenylphosphine acetate formed from triphenylphosphine and acetic acid.
ホスホニウムイリドとしては、ホスホニウム塩と塩基との反応により得られる化合物であれば公知の物が使用可能であるが、取扱いの容易さから安定性の高い物の方が好ましい。具体的な例としては、(ホルミルメチレン)トリフェニルホスフィン、(アセチルメチレン)トリフェニルホスフィン、(ピバロイルメチレン)トリフェニルホスフィン、(ベンゾイルメチレン)トリフェニルホスフィン、(p−メトキシベンゾイルメチレン)トリフェニルホスフィン、(p−メチルベンゾイルメチレン)トリフェニルホスフィン、(p−ニトロベンゾイルメチレン)トリフェニルホスフィン、(ナフトイル)トリフェニルホスフィン、(メトキシカルボニル)トリフェニルホスフィン、(ジアセチルメチレン)トリフェニルホスフィン、(アセチルシアノ)トリフェニルホスフィン、(ジシアノメチレン)トリフェニルホスフィンなどが挙げられる。 As the phosphonium ylide, known compounds can be used as long as they are compounds obtained by the reaction of a phosphonium salt and a base, but a highly stable compound is preferred from the viewpoint of ease of handling. Specific examples include (formylmethylene) triphenylphosphine, (acetylmethylene) triphenylphosphine, (pivaloylmethylene) triphenylphosphine, (benzoylmethylene) triphenylphosphine, (p-methoxybenzoylmethylene) triphenyl. Phosphine, (p-methylbenzoylmethylene) triphenylphosphine, (p-nitrobenzoylmethylene) triphenylphosphine, (naphthoyl) triphenylphosphine, (methoxycarbonyl) triphenylphosphine, (diacetylmethylene) triphenylphosphine, (acetylcyano) ) Triphenylphosphine, (dicyanomethylene) triphenylphosphine, and the like.
アセチルアセトン金属錯体類としては、アセチルアセトンバナジウム錯体、アセチルアセトンクロム錯体、アセチルアセトンマンガン錯体、アセチルアセトン鉄錯体、アセチルアセトンコバルト錯体、アセチルアセトンニッケル錯体、アセチルアセトンアルミ錯体、などが挙げられる。 Examples of acetylacetone metal complexes include acetylacetone vanadium complex, acetylacetone chromium complex, acetylacetone manganese complex, acetylacetone iron complex, acetylacetone cobalt complex, acetylacetone nickel complex, and acetylacetone aluminum complex.
これら反応促進剤の使用量は、オキセタニル基1モルに対して0.1〜25モル%の割合であることが望ましく、さらに好ましくは0.5〜20モル%の割合であり、より好ましくは1〜15モル%の割合である。反応促進剤の使用量がオキセタニル基に対して0.1モル%よりも少ない割合の場合、実用的な速度で反応が進行し難く、一方、25モル%を超えて多量に存在しても顕著な反応促進効果は見られないため、経済性の点で好ましくない。 The amount of these reaction accelerators used is desirably 0.1 to 25 mol%, more preferably 0.5 to 20 mol%, more preferably 1 to 1 mol of oxetanyl group. It is a ratio of ˜15 mol%. When the amount of the reaction accelerator used is less than 0.1 mol% with respect to the oxetanyl group, the reaction does not proceed easily at a practical rate. This is not preferable from the viewpoint of economy because no significant reaction promoting effect is observed.
本発明の感光性樹脂組成物は、必要に応じて、前記感光性樹脂組成物を均一に溶解したり、粘度を調整するために、(E)有機溶媒を用いることができる。特に、前記カルボキシル基含有感光性樹脂(A)、1分子中に1個以上のエチレン性不飽和結合を有する重合性化合物(B)、光重合開始剤(C)、およびオキセタン化合物(D)の各成分を均一に溶解し、各成分と反応しないものが好ましい。上記有機溶媒(E)への各成分の溶解性が低ければ、均一に溶解することが困難となりスペーサーに求められる透明性を確保することが困難となるので好ましくない。 The photosensitive resin composition of this invention can use the (E) organic solvent in order to melt | dissolve the said photosensitive resin composition uniformly and to adjust a viscosity as needed. Particularly, the carboxyl group-containing photosensitive resin (A), a polymerizable compound (B) having one or more ethylenically unsaturated bonds in one molecule, a photopolymerization initiator (C), and an oxetane compound (D). Those that dissolve each component uniformly and do not react with each component are preferred. If the solubility of each component in the organic solvent (E) is low, it is difficult to uniformly dissolve, and it is difficult to ensure the transparency required for the spacer, which is not preferable.
これら有機溶媒(E)の具体例として、例えばメタノール、エタノールなどのアルコール類;テトラヒドロフランなどのエーテル類;エチレングリコールモノメチルエーテル、エチレングリコールモノエチルエーテルなどのグリコールエーテル類;メチルセロソルブアセテート、エチルセロソルブアセテートなどのエチレングリコールアルキルエーテルアセテート類;ジエチレングリコールモノメチルエーテル、ジエチレングリコールモノエチルエーテル、ジエチレングリコールジメチルエーテルなどのジエチレングリコール類;プロピレングリコールメチルエーテル、プロピレングリコールエチルエーテル、プロピレングリコールプロピルエーテル、プロピレングリコールブチルエーテルなどのプロピレングリコールモノアルキルエーテル類;プロピレングリコールメチルエーテルアセテート、プロピレングリコールエチルエーテルアセテート、プロピレングリコールプロピルエーテルアセテート、プロピレングリコールブチルエーテルアセテートなどのプロピレングリコールアルキルエーテルアセテート類;プロピレングリコールメチルエーテルプロピオネート、プロピレングリコールエチルエーテルプロピオネート、プロピレングリコールプロピルエーテルプロピオネート、プロピレングリコールブチルエーテルプロピオネートなどのプロピレングリコールアルキルエーテルアセテート類;トルエン、キシレンなどの芳香族炭化水素類;メチルエチルケトン、4−ヒドロキシ−4−メチル−2−ペンタノンなどのケトン類;および酢酸メチル、酢酸エチル、酢酸プロピル、酢酸ブチル、2−ヒドロキシプロピオン酸エチル、2−ヒドロキシ−2−メチルプロピオン酸メチル、2−ヒドロキシ−2−メチルプロピオン酸エチル、ヒドロキシ酢酸メチル、ヒドロキシ酢酸エチル、ヒドロキシ酢酸ブチル、乳酸メチル、乳酸エチル、乳酸プロピル、乳酸ブチル、3−ヒドロキシプロピオン酸メチル、3−ヒドロキシプロピオン酸エチル、3−ヒドロキシプロピオン酸プロピル、3−ヒドロキシプロピオン酸メチル、3−ブトキシプロピオン酸エチル、3−ブトキシプロピオン酸プロピル、3−ブトキシプロピオン酸ブチルなどのエステル類が挙げられる。 Specific examples of these organic solvents (E) include alcohols such as methanol and ethanol; ethers such as tetrahydrofuran; glycol ethers such as ethylene glycol monomethyl ether and ethylene glycol monoethyl ether; methyl cellosolve acetate, ethyl cellosolve acetate and the like. Ethylene glycol alkyl ether acetates; diethylene glycols such as diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, diethylene glycol dimethyl ether; propylene glycol monoalkyl ethers such as propylene glycol methyl ether, propylene glycol ethyl ether, propylene glycol propyl ether, propylene glycol butyl ether Propylene glycol alkyl ether acetates such as propylene glycol methyl ether acetate, propylene glycol ethyl ether acetate, propylene glycol propyl ether acetate, propylene glycol butyl ether acetate; propylene glycol methyl ether propionate, propylene glycol ethyl ether propionate, propylene glycol Propylene glycol alkyl ether acetates such as propyl ether propionate and propylene glycol butyl ether propionate; aromatic hydrocarbons such as toluene and xylene; ketones such as methyl ethyl ketone and 4-hydroxy-4-methyl-2-pentanone; And methyl acetate, ethyl acetate, propyl acetate, vinegar Butyl, ethyl 2-hydroxypropionate, methyl 2-hydroxy-2-methylpropionate, ethyl 2-hydroxy-2-methylpropionate, methyl hydroxyacetate, ethyl hydroxyacetate, butyl hydroxyacetate, methyl lactate, ethyl lactate, lactic acid Propyl, butyl lactate, methyl 3-hydroxypropionate, ethyl 3-hydroxypropionate, propyl 3-hydroxypropionate, methyl 3-hydroxypropionate, ethyl 3-butoxypropionate, propyl 3-butoxypropionate, 3-butoxy Examples include esters such as butyl propionate.
これらの有機溶媒(E)の中で、溶解性、各成分との反応性および塗膜の形成のしやすさから、グリコールエーテル類、エチレングリコールアルキルエーテルアセテート類、エステル類およびジエチレングリコール類が好ましく用いられる。これらの有機溶媒(E)は単独でまたは2種類以上混合して用いることができ、その使用量は、特に限定されないが、通常、本発明の感光性樹脂組成物中に、30〜90質量%、好ましくは40〜85質量%となる範囲である。 Of these organic solvents (E), glycol ethers, ethylene glycol alkyl ether acetates, esters and diethylene glycols are preferably used because of their solubility, reactivity with each component, and ease of formation of a coating film. It is done. These organic solvents (E) can be used alone or in admixture of two or more, and the amount used is not particularly limited, but usually 30 to 90% by mass in the photosensitive resin composition of the present invention. , Preferably it is the range used as 40-85 mass%.
本発明の感光性樹脂組成物は、本発明の目的を損なわない範囲で、必要に応じて上記以外に他の成分を含有していてもよい。
例えば、塗布性を向上するための界面活性剤を挙げることができる。界面活性剤としては、フッ素系界面活性剤およびシリコーン系界面活性剤を好適に用いることができる。フッ素系界面活性剤としては、末端、主鎖および側鎖の少なくともいずれかの部位にフルオロアルキルまたはフルオロアルキレン基を有する化合物を好適に用いることができ、その具体例としては、1,1,2,2−テトラフロロオクチル(1,1,2,2−テトラフロロプロピル)エーテル、1,1,2,2−テトラフロロオクチルヘキシルエーテル、オクタエチレングリコールジ(1,1,2,2−テトラフロロブチル)エーテル、ヘキサエチレングリコール(1,1,2,2,3,3−ヘキサフロロペンチル)エーテル、オクタプロピレングリコールジ(1,1,2,2−テトラフロロブチル)エーテル、ヘキサプロピレングリコールジ(1,1,2,2,3,3−ヘキサフロロペンチル)エーテル、パーフロロドデシルスルホン酸ナトリウム、1,1,2,2,8,8,9,9,10,10−デカフロロドデカン、1,1,2,2,3,3−ヘキサフロロデカン、フルオロアルキルベンゼンスルホン酸ナトリウム、フルオロアルキルホスホン酸ナトリウム、フルオロアルキルカルボン酸ナトリウム、フルオロアルキルポリオキシエチレンエーテル、ジグリセリンテトラキス(フルオロアルキルポリオキシエチレンエーテル)、フルオロアルキルアンモニウムヨージド、フルオロアルキルベタイン、フルオロアルキルポリオキシエチレンエーテル、パーフルオロアルキルポリオキシエタノール、パーフルオロアルキルアルコキシレート、フッ素系アルキルエステル等を挙げることができる。
The photosensitive resin composition of the present invention may contain other components in addition to the above as necessary, as long as the object of the present invention is not impaired.
For example, a surfactant for improving applicability can be mentioned. As the surfactant, a fluorine-based surfactant and a silicone-based surfactant can be suitably used. As the fluorosurfactant, a compound having a fluoroalkyl or fluoroalkylene group in at least one of the terminal, the main chain and the side chain can be suitably used. , 2-tetrafluorooctyl (1,1,2,2-tetrafluoropropyl) ether, 1,1,2,2-tetrafluorooctyl hexyl ether, octaethylene glycol di (1,1,2,2-tetrafluoro) Butyl) ether, hexaethylene glycol (1,1,2,2,3,3-hexafluoropentyl) ether, octapropylene glycol di (1,1,2,2-tetrafluorobutyl) ether, hexapropylene glycol di ( 1,1,2,2,3,3-hexafluoropentyl) ether, perfluorododecylsulfonic acid sodium L, 1,1,2,2,8,8,9,9,10,10-decafluorododecane, 1,1,2,2,3,3-hexafluorodecane, sodium fluoroalkylbenzenesulfonate, fluoroalkyl Sodium phosphonate, sodium fluoroalkylcarboxylate, fluoroalkyl polyoxyethylene ether, diglycerin tetrakis (fluoroalkyl polyoxyethylene ether), fluoroalkyl ammonium iodide, fluoroalkyl betaine, fluoroalkyl polyoxyethylene ether, perfluoroalkyl poly Examples include oxyethanol, perfluoroalkyl alkoxylates, and fluorine-based alkyl esters.
また、これらの市販品としては、例えばBM−1000、BM−1100(以上、BM CHEMIE社製)、メガファックF142D、同F172、同F173、同F183、同F178、同F191、同F471(以上、大日本インキ化学工業(株)製)、フロラードFC 170C、FC−171、FC−430、FC−431(以上、住友スリーエム(株)製)、サーフロンS−112、同S−113、同S−131、同S−141、同S−145、同S−382、同SC−101、同SC−102、同SC−103、同SC−104、同SC−105、同SC−106(以上、旭硝子(株)製)、エフトップEF301、同303、同352(以上、新秋田化成(株)製)、フタージェントFT−100、同FT−110、同FT−140A、同FT−150、同FT−250、同FT−251、同FTX−251、同FTX−218、同FT−300、同FT−310、同FT−400S(以上、(株)ネオス製)等を挙げることができる。また、シリコーン系界面活性剤としては、例えばトーレシリコーンDC3PA、同DC7PA、同SH11PA、同SH21PA、同SH28PA、同SH29PA、同SH30PA、同SH−190、同SH−193、同SZ−6032、同SF−8428、同DC−57、同DC−190(以上、東レシリコーン(株)製)、TSF−4440、TSF−4300、TSF−4445、TSF−4446、TSF−4460、TSF−4452(以上、東芝シリコーン(株)製)、BYK−300、BYK−302、BYK−306、BYK−307、BYK−310、BYK−315、BYK−320、BYK−322、BYK−323、BYK−325、BYK−330、BYK−331、BYK−332、BYK−333、BYK−337、BYK−344、BYK−370、BYK−375(以上、ビックケミー製)等の商品名で市販されているものを挙げることができる。 In addition, as these commercially available products, for example, BM-1000, BM-1100 (above, manufactured by BM CHEMIE), MegaFuck F142D, F172, F173, F183, F178, F191, F191, and F471 (above, Dainippon Ink & Chemicals, Inc.), Florard FC 170C, FC-171, FC-430, FC-431 (above, manufactured by Sumitomo 3M), Surflon S-112, S-113, S- 131, S-141, S-145, S-382, SC-101, SC-102, SC-103, SC-104, SC-105, SC-106 (above, Asahi Glass Ftop EF301, 303, 352 (above, manufactured by Shin-Akita Kasei Co., Ltd.), Footent FT-100, FT-110, FT- 40A, FT-150, FT-250, FT-251, FTX-251, FTX-218, FT-300, FT-310, FT-400S (above, manufactured by Neos Co., Ltd.) Etc. Examples of the silicone-based surfactant include Torre Silicone DC3PA, DC7PA, SH11PA, SH21PA, SH28PA, SH29PA, SH30PA, SH-190, SH-193, SZ-6032, SF -8428, DC-57, DC-190 (above, manufactured by Toray Silicone Co., Ltd.), TSF-4440, TSF-4300, TSF-4445, TSF-4446, TSF-4460, TSF-4442 (above, Toshiba) Silicone Co., Ltd.), BYK-300, BYK-302, BYK-306, BYK-307, BYK-310, BYK-315, BYK-320, BYK-322, BYK-323, BYK-325, BYK-330 BYK-331, BYK-332, BYK-333, BYK 337, BYK-344, BYK-370, BYK-375 (or more, BYK Chemie Co., Ltd.) can be mentioned those that are commercially available under the trade names such as.
その他にも、ポリオキシエチレンラウリルエーテル、ポリオキシエチレンステアリルエーテル、ポリオキシエチレンオレイルエーテルなどのポリオキシエチレンアルキルエーテル類;ポリオキシエチレンオクチルフェニルエーテル、ポリオキシエチレンノニルフェニルエーテルなどのポリオキシエチレンアリールエーテル類;ポリオキシエチレンジラウレート、ポリオキシエチレンジステアレートなどのポリオキシエチレンジアルキルエステル類などのノニオン系界面活性剤;オルガノシロキサンポリマーKP341(信越化学工業(株)製)、(メタ)アクリル酸系共重合体ポリフローNo.57、95(共栄社油脂化学工業(株)製)、BYK−352、BYK−354、BYK−355、BYK−356、BYK−357、BYK−358、BYK−359、BYK−361、BYK−390、BYK−392(以上、ビックケミー製)などが挙げられる。これらの界面活性剤は、カルボキシル基含有感光性樹脂(A)100質量部に対して、5質量部以下、好ましくは2質量部以下で用いられる。界面活性剤の量が5質量部を超えた場合は、塗布時の膜あれが生じやすくなる。 In addition, polyoxyethylene alkyl ethers such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, and polyoxyethylene oleyl ether; polyoxyethylene aryl ethers such as polyoxyethylene octylphenyl ether and polyoxyethylene nonylphenyl ether Nonionic surfactants such as polyoxyethylene dialkyl esters such as polyoxyethylene dilaurate and polyoxyethylene distearate; Organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid copolymer Polymer polyflow No. 57, 95 (manufactured by Kyoeisha Yushi Chemical Co., Ltd.), BYK-352, BYK-354, BYK-355, BYK-356, BYK-357, BYK-35 8, BYK-359, BYK-361, BYK-390, BYK-392 (manufactured by Big Chemie) and the like. These surfactants are used in an amount of 5 parts by mass or less, preferably 2 parts by mass or less, based on 100 parts by mass of the carboxyl group-containing photosensitive resin (A). When the amount of the surfactant exceeds 5 parts by mass, the film is liable to occur during coating.
また基板との接着性を向上させるために接着助剤を使用することもできる。このような接着助剤としては、官能性シランカップリング剤が好ましく使用され、例えばカルボキシル基、メタクリロイル基、イソシアネート基、エポキシ基などの反応性置換基を有するシランカップリング剤が挙げられ、具体的にはトリメトキシシリル安息香酸、γ−メタクリロキシプロピルトリメトキシシラン、ビニルトリアセトキシシラン、ビニルトリメトキシシラン、γ−イソシアナートプロピルトリエトキシシラン、γ−グリシドキシプロピルトリメトキシシラン、β−(3,4−エポキシシクロヘキシル)エチルトリメトキシシランなどが挙げられる。このような接着助剤は、前記カルボキシル基含有感光性樹脂(A)100質量部に対して、20質量部以下、好ましくは10質量部以下の量で用いられる。接着助剤の量が、20質量部を超えた場合は、現像残りが生じやすくなる。
このように調製された感光性樹脂組成物溶液は、孔径0.5μm程度のミリポアフィルターなどを用いて濾過した後、使用に供することもできる。
An adhesion assistant can also be used to improve the adhesion to the substrate. As such an adhesion assistant, a functional silane coupling agent is preferably used, and examples thereof include a silane coupling agent having a reactive substituent such as a carboxyl group, a methacryloyl group, an isocyanate group, and an epoxy group. Are trimethoxysilylbenzoic acid, γ-methacryloxypropyltrimethoxysilane, vinyltriacetoxysilane, vinyltrimethoxysilane, γ-isocyanatopropyltriethoxysilane, γ-glycidoxypropyltrimethoxysilane, β- (3 , 4-epoxycyclohexyl) ethyltrimethoxysilane and the like. Such an adhesion assistant is used in an amount of 20 parts by mass or less, preferably 10 parts by mass or less with respect to 100 parts by mass of the carboxyl group-containing photosensitive resin (A). When the amount of the adhesion assistant exceeds 20 parts by mass, the development residue tends to occur.
The photosensitive resin composition solution thus prepared can be used after being filtered using a Millipore filter having a pore size of about 0.5 μm.
本発明の感光性樹脂組成物を用いてパターンを形成する方法としては、具体的には、本発明の感光性樹脂組成物を、基板または基板の上に先に形成した固体の着色感光性樹脂組成物層(以下、これを基板等ということがある。)の上に塗布し、塗布された感光性樹脂組成物層から溶剤など揮発成分を除去し、フォトマスクを介して揮発成分が除去された層を露光したのち、現像する方法が挙げられる。 As a method for forming a pattern using the photosensitive resin composition of the present invention, specifically, a solid colored photosensitive resin obtained by previously forming the photosensitive resin composition of the present invention on a substrate or a substrate. It is applied onto a composition layer (hereinafter sometimes referred to as a substrate), and volatile components such as a solvent are removed from the applied photosensitive resin composition layer, and the volatile components are removed through a photomask. And a method of developing after exposing the exposed layer.
基板としては、例えば、ガラス基板、シリコン基板、ポリカーボネート基板、ポリエステル基板、芳香族ポリアミド基板、ポリアミドイミド基板、ポリイミド基板、Al基板、GaAs基板などの表面が平坦な基板が挙げられる。これらの基板は、シランカップリング剤などの薬品による薬品処理、プラズマ処理、イオンプレーティング処理、スパッタリング処理、気相反応処理、真空蒸着処理などの前処理が施されていてもよい。基板としてシリコン基板などを用いる場合、前記シリコン基板などの表面には電荷結合素子(CCD)、薄膜トランジスタ(TFT)などが形成されていてもよい。 Examples of the substrate include flat substrates such as a glass substrate, a silicon substrate, a polycarbonate substrate, a polyester substrate, an aromatic polyamide substrate, a polyamideimide substrate, a polyimide substrate, an Al substrate, and a GaAs substrate. These substrates may be subjected to pretreatment such as chemical treatment with chemicals such as a silane coupling agent, plasma treatment, ion plating treatment, sputtering treatment, gas phase reaction treatment, and vacuum deposition treatment. When a silicon substrate or the like is used as the substrate, a charge coupled device (CCD), a thin film transistor (TFT), or the like may be formed on the surface of the silicon substrate.
前記基板の上に感光性樹脂組成物を塗布するには、例えば、本発明の感光性樹脂組成物を回転塗布法(スピンコート法)、流延塗布法、ロール塗布法、スリット&スピンコート法、スピンレスコーターなどの省液コーターを用いて塗布するなどの公知の塗布方法で基板等の上に塗布し、次いで溶剤などの揮発成分を加熱により揮発させればよい。このようにして、基板等の上に感光性樹脂組成物の固形分からなる層が形成される。次いで、感光性樹脂組成物の固形分からなる層(以下、これを感光性樹脂組成物層ということがある。)を露光する。露光するには、例えば、フォトマスクを介して選択的に活性エネルギー線を照射すればよい。露光光源としては通常、低圧水銀灯、中圧水銀灯、高圧水銀灯、超高圧水銀灯、キセノンランプ、メタルハライドランプなどが適当である。また、レーザー光線なども露光用活性エネルギー線として利用できる。その他、電子線、α線、β線、γ線、X線、中性子線なども利用可能である。活性エネルギー線はフォトマスクを介して照射されるが、ここでフォトマスクは、例えば、ガラス板の表面に活性エネルギー線を遮蔽する遮光層が設けられたものである。ガラス板のうちの遮光層が設けられていない部分は活性エネルギー線が透過する透光部であって、この透光部のパターンに従ったパターンで感光性樹脂組成物層が露光されて、活性エネルギー線が照射されなかった未照射領域と、活性エネルギー線が照射された照射領域とが生ずる。照射領域における活性エネルギー線の照射量は、バインダーポリマーの重量平均分子量、単量体比、含有量、光重合性化合物の種類や含有量、光重合開始剤の種類や含有量、光重合開始助剤の種類や含有量などによって適宜選択される。 In order to apply the photosensitive resin composition on the substrate, for example, the photosensitive resin composition of the present invention can be applied by spin coating (spin coating), casting coating, roll coating, slit & spin coating. The coating may be performed on a substrate or the like by a known coating method such as coating using a liquid-saving coater such as a spinless coater, and then a volatile component such as a solvent may be volatilized by heating. In this way, a layer made of the solid content of the photosensitive resin composition is formed on the substrate or the like. Subsequently, the layer (henceforth a photosensitive resin composition layer) which consists of solid content of the photosensitive resin composition is exposed. For exposure, for example, active energy rays may be selectively irradiated through a photomask. As the exposure light source, a low-pressure mercury lamp, a medium-pressure mercury lamp, a high-pressure mercury lamp, an ultrahigh-pressure mercury lamp, a xenon lamp, a metal halide lamp, or the like is usually suitable. A laser beam or the like can also be used as an active energy ray for exposure. In addition, electron beams, α rays, β rays, γ rays, X rays, neutron rays, and the like can also be used. The active energy rays are irradiated through a photomask. Here, for example, the photomask has a light shielding layer that shields the active energy rays on the surface of a glass plate. The portion of the glass plate where the light-shielding layer is not provided is a light-transmitting portion through which the active energy ray is transmitted. The photosensitive resin composition layer is exposed in a pattern according to the pattern of the light-transmitting portion, and active. An unirradiated region that has not been irradiated with energy rays and an irradiated region that has been irradiated with active energy rays are generated. The irradiation amount of the active energy ray in the irradiation region is the weight average molecular weight of the binder polymer, the monomer ratio, the content, the type and content of the photopolymerizable compound, the type and content of the photopolymerization initiator, and the photopolymerization initiation aid. It is appropriately selected depending on the type and content of the agent.
上記のように露光を行った基板は、希アルカリ水溶液により、現像する。現像するには、例えば、露光後の感光性樹脂組成物層を希アルカリ水溶液と接触させればよく、具体的にはその表面上に感光性樹脂組成物層が形成された状態の基板を希アルカリ水溶液に浸漬するか、希アルカリ水溶液をシャワー状で吹きかければよい。希アルカリ水溶液としては、例えば、炭酸ナトリウム、炭酸カリウム、水酸化ナトリウム、水酸化カリウム、テトラメチルアンモニウムハイドロオキサイド、有機アミンなどのアルカリ性化合物の水溶液などが挙げられる。現像によって、感光性樹脂組成物層のうちの活性エネルギー線が照射されなかった未照射領域は除去される。その一方で、活性エネルギー線照射領域はそのまま残ってパターンを構成する。 The substrate exposed as described above is developed with a dilute alkaline aqueous solution. For development, for example, the exposed photosensitive resin composition layer may be brought into contact with a dilute aqueous alkali solution. Specifically, the substrate with the photosensitive resin composition layer formed on the surface thereof is diluted. What is necessary is just to immerse in aqueous alkali solution or to spray dilute aqueous alkali solution in shower shape. Examples of the diluted alkaline aqueous solution include aqueous solutions of alkaline compounds such as sodium carbonate, potassium carbonate, sodium hydroxide, potassium hydroxide, tetramethylammonium hydroxide, and organic amine. By the development, an unirradiated region that has not been irradiated with the active energy ray in the photosensitive resin composition layer is removed. On the other hand, the active energy ray irradiation region remains as it is to form a pattern.
このように現像を行った基板は、通常は水洗し、乾燥することにより、目的とするパターンを得ることができる。乾燥後、加熱してもよい。パターンを加熱することによって硬化して、その機械的強度をより向上することができる。加熱温度は通常180℃以上、好ましくは200℃以上であり、通常250℃以下である。加熱温度が180〜250℃であると、塗膜の機械強度が向上、耐溶剤性、耐液晶性が向上し、好ましい。加熱時間は、通常5分〜120分、好ましくは10分〜90分、さらに好ましくは、15分〜60分である。加熱時間が5分〜120分であると、塗膜の機械強度が向上し、好ましい。このようにして、感光性樹脂組成物からなるスペーサーが形成される。 The substrate thus developed is usually washed with water and dried to obtain a target pattern. You may heat after drying. The pattern can be cured by heating to further improve its mechanical strength. The heating temperature is usually 180 ° C. or higher, preferably 200 ° C. or higher, and usually 250 ° C. or lower. When the heating temperature is 180 to 250 ° C., the mechanical strength of the coating film is improved and the solvent resistance and liquid crystal resistance are improved, which is preferable. The heating time is usually 5 minutes to 120 minutes, preferably 10 minutes to 90 minutes, and more preferably 15 minutes to 60 minutes. When the heating time is 5 minutes to 120 minutes, the mechanical strength of the coating film is improved, which is preferable. In this way, a spacer made of the photosensitive resin composition is formed.
以下、本発明を実施例により具体的に説明するが本発明はこれら実施例に限定されるものではない。なお、以下において特に断りのない限り、「部」は質量部を意味するものである。 EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited to these examples. In the following description, “part” means part by mass unless otherwise specified.
カルボキシル基含有感光性樹脂溶液の調製
(合成例1)
攪拌器、還流冷却器、温度計を備え付けたセパラブルフラスコにアゾビスイソブチロニトリル4.1部、プロピレングリコールモノメチルエーテルアセテート286gを仕込み、湯浴にて加熱し内温を70℃とする。これに一般式(1)で表わされるジシクロペンタニルメタクリレート124.5部、スチレン10.4部、グリジジルメタクリレート58.9部の混合物を3時間かけて滴下し重合反応を行った。さらに70℃にて3時間攪拌しGPCにて未反応モノマーが存在しないことを確認した。この重合物に、アクリル酸31.2部およびトリフェニルホスフィン1部を加え、80〜90℃にて24時間反応した。IRスペクトルでエポキシ基の消失を確認したに後、テトラヒドロ無水フタル酸60.9部を加え、更に80℃にて12時間反応することで、カルボキシル基含有感光性樹脂(A−1)ワニスを得た。なお、この本発明のカルボキシル基含有感光性樹脂(A−1)の固形分酸価は、79mgKOH/g、GPCでの分子量(Mw)は18000であった。このカルボキシル基含有感光性樹脂(A−1)ワニスの固形分濃度は、50質量%であった。
Preparation of carboxyl group-containing photosensitive resin solution (Synthesis Example 1)
In a separable flask equipped with a stirrer, a reflux condenser, and a thermometer, 4.1 parts of azobisisobutyronitrile and 286 g of propylene glycol monomethyl ether acetate are charged and heated in a hot water bath to an internal temperature of 70 ° C. A mixture of 124.5 parts of dicyclopentanyl methacrylate represented by the general formula (1), 10.4 parts of styrene and 58.9 parts of glycidyl methacrylate was added dropwise thereto over 3 hours to carry out a polymerization reaction. Furthermore, it stirred at 70 degreeC for 3 hours, and it confirmed that the unreacted monomer did not exist by GPC. 31.2 parts of acrylic acid and 1 part of triphenylphosphine were added to this polymer and reacted at 80-90 ° C. for 24 hours. After confirming the disappearance of the epoxy group by IR spectrum, 60.9 parts of tetrahydrophthalic anhydride was added and further reacted at 80 ° C. for 12 hours to obtain a carboxyl group-containing photosensitive resin (A-1) varnish. It was. In addition, the solid content acid value of this carboxyl group-containing photosensitive resin (A-1) of this invention was 79 mgKOH / g, and the molecular weight (Mw) in GPC was 18000. The solid content concentration of the carboxyl group-containing photosensitive resin (A-1) varnish was 50% by mass.
(比較合成例1)
攪拌器、還流冷却器、温度計を備え付けたセパラブルフラスコにアゾビスイソブチロニトリル4.1部、プロピレングリコールモノメチルエーテルアセテート125gを仕込み、湯浴にて加熱し内温を70℃とする。これにメチルメタクリレート55部、スチレン20.8部、グリジジルメタクリレート42.7部の混合物を3時間かけて滴下し重合反応を行った。さらに70℃にて3時間攪拌しGPCにて未反応モノマーが存在しないことを確認した。この重合物に、アクリル酸23.4部およびトリフェニルホスフィン0.8部を加え、80〜90℃にて16時間反応した。IRスペクトルでエポキシ基の消失を確認したに後、テトラヒドロ無水フタル酸45.7部を加え、更に80℃にて8時間反応することで、一般式(1)で表わされる化合物を含まないカルボキシル基含有感光性樹脂(R−1)ワニスを得た。なお、カルボキシル基含有感光性樹脂(R−1)の酸価は90mgKOH/g、GPCでの分子量(Mw)は15000であった。このカルボキシル基含有感光性樹脂(R−1)ワニスの固形分濃度は60質量%であった。
(Comparative Synthesis Example 1)
In a separable flask equipped with a stirrer, a reflux condenser, and a thermometer, 4.1 parts of azobisisobutyronitrile and 125 g of propylene glycol monomethyl ether acetate are charged and heated in a hot water bath to an internal temperature of 70 ° C. A mixture of 55 parts of methyl methacrylate, 20.8 parts of styrene and 42.7 parts of glycidyl methacrylate was added dropwise over 3 hours to carry out a polymerization reaction. Furthermore, it stirred at 70 degreeC for 3 hours, and it confirmed that the unreacted monomer did not exist by GPC. To this polymer, 23.4 parts of acrylic acid and 0.8 part of triphenylphosphine were added and reacted at 80 to 90 ° C. for 16 hours. After confirming the disappearance of the epoxy group by IR spectrum, 45.7 parts of tetrahydrophthalic anhydride was added, and further reacted at 80 ° C. for 8 hours, so that the carboxyl group not containing the compound represented by the general formula (1) Containing photosensitive resin (R-1) varnish was obtained. The acid value of the carboxyl group-containing photosensitive resin (R-1) was 90 mgKOH / g, and the molecular weight (Mw) by GPC was 15000. The solid content concentration of the carboxyl group-containing photosensitive resin (R-1) varnish was 60% by mass.
下記に、実施例および比較例で用いた原材料を表1に示す。
備考:
1)東亞合成社製の2官能オキセタン化合物(商品名:OXT−121)
2)宇部興産社製の2官能オキセタン化合物(商品名:Eternacoll OXBP)
3)東亞合成社製の多官能オキセタン化合物(商品名:PNOX−1009)
4)ジャパンエポキシレジン社製の2官能エポキシ樹脂
5)日本化薬社製の多官能エポキシ樹脂
The raw materials used in the examples and comparative examples are shown in Table 1 below.
Remarks:
1) Bifunctional oxetane compound manufactured by Toagosei Co., Ltd. (trade name: OXT-121)
2) Bifunctional oxetane compound (trade name: Eternacoll OXBP) manufactured by Ube Industries, Ltd.
3) Polyfunctional oxetane compound manufactured by Toagosei Co., Ltd. (trade name: PNOX-1009)
4) Bifunctional epoxy resin manufactured by Japan Epoxy Resin Co., Ltd. 5) Multifunctional epoxy resin manufactured by Nippon Kayaku Co., Ltd.
実施例1〜3、および比較例1〜4
感光性樹脂組成物の調製
表2に示す配合割合で各成分を配合し室温で1時間攪拌し各成分を溶解した後、孔径0.45μmのミリポアフィルターで濾過して感光性樹脂組成物を得た。
Preparation of photosensitive resin composition Each component was blended at the blending ratio shown in Table 2 and stirred for 1 hour at room temperature to dissolve each component, followed by filtration with a Millipore filter having a pore size of 0.45 μm to obtain a photosensitive resin composition. It was.
(1)解像性の評価
ガラス基板上にスピンコーターを用いて、回転数1000rpmで20秒、上記感光性樹脂組成物溶液を塗布した後、90℃で3分間ホットプレート上にてプレベークして乾燥塗膜を形成した。上記で得られた塗膜にφ10μmのドットパターンのマスクを介して、365nmでの強度が12mW/cm2である紫外線を積算光量で100mJ/cm2照射した。この際の紫外線照射は酸素雰囲気下(空気中)で行い、露光ギャップは100μmであった。次いでテトラメチルアンモニウムヒドロキシド0.4質量%水溶液を用いて25℃で120秒間現像した後、純水で30秒間流水洗浄した。上記で形成されたスペーサーパターンをオーブン中、230℃で60分間加熱し硬化させた。
上記で得られたスペーサーパターンにてドット径10μmのパターンが解像できている場合を○、解像できていない場合を×とする。結果を表3に示す。
(1) Evaluation of resolution Using a spin coater on a glass substrate, the photosensitive resin composition solution was applied for 20 seconds at a rotation speed of 1000 rpm, and then pre-baked on a hot plate at 90 ° C. for 3 minutes. A dry coating was formed. The coating film obtained above was irradiated with 100 mJ / cm 2 of ultraviolet light having an intensity of 12 mW / cm 2 at 365 nm through a mask having a dot pattern of φ10 μm. The ultraviolet irradiation at this time was performed in an oxygen atmosphere (in air), and the exposure gap was 100 μm. Next, after developing for 120 seconds at 25 ° C. using a 0.4 mass% aqueous solution of tetramethylammonium hydroxide, it was washed with running pure water for 30 seconds. The spacer pattern formed above was cured by heating at 230 ° C. for 60 minutes in an oven.
The case where the pattern having a dot diameter of 10 μm can be resolved with the spacer pattern obtained above is marked with ◯, and the case where the pattern is not resolved is marked with ×. The results are shown in Table 3.
(2)耐NMP性の評価
ガラス基板上にスピンコーターを用いて、回転数1000rpmで20秒、上記感光性樹脂組成物溶液を塗布した後、90℃で3分間ホットプレート上にてプレベークして乾燥塗膜を形成した。上記で得られた塗膜の全面に365nmでの強度が12mW/cm2である紫外線を積算光量で100mJ/cm2照射した。この際の紫外線照射は酸素雰囲気下(空気中)で行い、露光ギャップは100μmであった。その後オーブン中、230℃で60分間加熱し硬化させた。
上記の硬化塗膜を、N−メチル−2−ピロリドン(NMP)を染み込ませたウエスで擦り表面状態を観察した。全く変化がない場合を○、表面が溶解または軟化して傷が付いた場合を×とした。
(2) Evaluation of NMP resistance Using a spin coater on a glass substrate, the photosensitive resin composition solution was applied for 20 seconds at a rotation speed of 1000 rpm, and then pre-baked on a hot plate at 90 ° C. for 3 minutes. A dry coating was formed. The entire surface of the coating film obtained above was irradiated with 100 mJ / cm 2 of ultraviolet light having an intensity at 365 nm of 12 mW / cm 2 with an integrated light amount. The ultraviolet irradiation at this time was performed in an oxygen atmosphere (in air), and the exposure gap was 100 μm. Thereafter, it was cured by heating in an oven at 230 ° C. for 60 minutes.
The cured coating film was rubbed with a waste impregnated with N-methyl-2-pyrrolidone (NMP) to observe the surface state. The case where there was no change at all was marked as ◯, and the case where the surface was dissolved or softened and scratched, was marked as x.
(3)耐γ−ブチロラクトン性
上記(2)と同様に作製した硬化塗膜を、γ−ブチロラクトンを染み込ませたウエスで擦り表面状態を観察した。全く変化がない場合を○、表面が溶解または軟化して傷が付いた場合を×とした。
(3) γ-Butyrolactone Resistance A cured coating film prepared in the same manner as in (2) above was rubbed with a waste impregnated with γ-butyrolactone to observe the surface condition. The case where there was no change at all was marked as ◯, and the case where the surface was dissolved or softened and scratched, was marked as x.
(4)透明性の評価
上記(2)と同様に作製した硬化塗膜を目視にて観察し透明性の評価を行った。完全に透明な場合を○、わずかでも塗膜に濁りがあり不透明な場合を×とした。
(4) Evaluation of transparency The cured coating film produced similarly to said (2) was observed visually, and transparency was evaluated. The case where the film was completely transparent was marked with ◯, and the film with a slight turbidity and opaque was marked with x.
(5)圧縮強度
膜厚5μm、ドット径30μmのパターンを形成し、230℃にて60分熱硬化したスペーサーパターンを微小硬度計を用いて、評価を行った。直径50μmの平面圧子により、50mNの荷重を加えたときの変形量を測定した。この数値が0.6以下の場合を○、0.6より多い場合を×とした。
(5) Compressive strength A pattern having a film thickness of 5 μm and a dot diameter of 30 μm was formed, and a spacer pattern thermally cured at 230 ° C. for 60 minutes was evaluated using a microhardness meter. The amount of deformation when a load of 50 mN was applied was measured with a flat indenter having a diameter of 50 μm. The case where this numerical value was 0.6 or less was marked with ◯, and the case where it was larger than 0.6 was marked with ×.
(6)保存安定性
上記の感光性樹脂組成物を40℃のオーブン中で14日間保存し、ゲル化ないしは著しく粘度上昇が見られた場合を×、粘度上昇が僅かでゲル化していないものを○とした。
(6) Storage stability The above photosensitive resin composition was stored in an oven at 40 ° C. for 14 days, and when the gelation or marked increase in viscosity was observed x, the viscosity increase was slight and not gelled. ○.
上記の試験結果を表3にまとめて示す。
表3に示される結果から明らかなように、本発明の感光性樹脂組成物である実施例1〜3は、優れた保存安定性を示すとともに、その硬化物は優れた耐薬品性および圧縮強度を示し、かつ透明性を有することが明らかとなった。
As is apparent from the results shown in Table 3, Examples 1 to 3 which are the photosensitive resin compositions of the present invention show excellent storage stability, and the cured product has excellent chemical resistance and compressive strength. It was revealed that the film had transparency and transparency.
Claims (3)
式中、xは0〜2の整数を表わし、R1は水素又はメチル基を表わし、R2は炭素数10〜20のジシクロペンタジエン誘導体、又は炭素数10〜20のトリシクロデカン誘導体を表わす。
不飽和二重結合を有する化合物を共重合成分として含有するカルボキシル基含有感光性樹脂であることを特徴とする感光性樹脂組成物。 (A) a carboxyl group-containing photosensitive resin having both a carboxyl group and at least two ethylenically unsaturated bonds in one molecule; (B) a polymerizable compound having one or more ethylenically unsaturated bonds in one molecule; (C) a photopolymerization initiator, and (D) a composition containing an oxetane compound having at least two oxetanyl groups in one molecule, wherein the carboxyl group-containing photosensitive resin (A) has the following general formula: Represented by (1)
In the formula, x represents an integer of 0 to 2, R 1 represents hydrogen or a methyl group, R 2 represents a dicyclopentadiene derivative having 10 to 20 carbon atoms, or a tricyclodecane derivative having 10 to 20 carbon atoms. .
A photosensitive resin composition, which is a carboxyl group-containing photosensitive resin containing a compound having an unsaturated double bond as a copolymerization component.
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TW095101068A TW200636386A (en) | 2005-02-08 | 2006-01-11 | Photosensitive resin composition, cured material thereof and spacer for display panel comprising the cured material |
KR1020060011465A KR100736294B1 (en) | 2005-02-08 | 2006-02-07 | Photosensitive resin composition, cured products thereof and spacer made from these cured products for display panel |
CN2006100030623A CN1818779B (en) | 2005-02-08 | 2006-02-08 | Photosensitive resin composition, its condensate and display panel used interval element formed therewith |
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JP2008146018A (en) * | 2006-07-26 | 2008-06-26 | Fujifilm Corp | Photosensitive composition, photosensitive resin transfer film, manufacturing method of photo spacer, substrate for liquid crystal display device, and liquid crystal display device |
JP2008225459A (en) * | 2007-02-16 | 2008-09-25 | Taiyo Ink Mfg Ltd | Composition for cured film pattern formation and method for producing cured film pattern using same |
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