JP2006214801A - System for analyzing surface roughness data - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a system for analyzing surface roughness data which can perform the evaluation of whether to adapt the specification by a simple method when the evaluation of whether to adapt the specification about the different surface roughness from the specification about the surface roughness performed in the past about a certain work is performed. <P>SOLUTION: The system includes a reading means which reads a graph of variation of a stylus printed by surface roughness measuring data paper, a first memory means which memorizes the graph of the variation of the stylus read by the reading means as measuring data, a numeric value data conversion means for converting the measured data memorized in the first memory means into predetermined numeric value data, a calculating means which calculates the analysis data of the surface roughness from the numeric value data converted by the numeric value data conversion means, a second memory means which memorizes the analysis data calculated by the calculating means, and an output means which outputs the analysis data memorized by this second memory means. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a surface roughness data analysis system for outputting surface roughness analysis data of gears (objects to be measured) and the like. Specifically, the surface that outputs the analysis data of the surface roughness of the object to be measured using the surface roughness measurement data paper printed by graphing the displacement amount of the stylus displaced according to the surface shape of the object to be measured The present invention relates to a roughness data analysis system.

  Conventionally, the surface roughness of an object to be measured (workpiece) was measured using a surface roughness measuring apparatus 100 as shown in FIG. 7, and the surface roughness was evaluated based on the measurement data.

  That is, this surface roughness measuring apparatus 100 is provided with a feeding device 103 on a column 102 erected on a base 101, and the feeding device 103 includes a stylus 105 and a Z direction (vertical direction) of the stylus 105. A detector 104 that detects displacement is provided to be movable in the X direction (horizontal direction).

  Further, the feeding device 103 has a built-in scale for detecting the amount of movement of the detector 104 in the X direction so that the detector 104 is brought into contact with the workpiece measurement position (reading position). When the stylus 105 is moved in the X direction, the displacement of the stylus 105 in the Z direction is detected by the detector 104, and the amount of movement of the detector 104 in the X direction is detected by the scale of the feeding device 103 to obtain workpiece measurement data. It was a thing.

  And the surface roughness was evaluated from the measurement result measured by the surface roughness measuring apparatus 100.

After the evaluation of the surface roughness, the survey data of the surface roughness and the analysis result (analysis data) as to whether it conforms to the standard regarding the surface roughness to be evaluated are output from the printer (not shown).
Japanese Patent Laid-Open No. 10-132554

  However, the conventional surface roughness measuring device can analyze whether it conforms to the standard regarding the surface roughness to be evaluated, but does it conform to the standard regarding other surface roughness besides the standard regarding the surface roughness? When it was going to evaluate, it was necessary to perform the evaluation test from the beginning whether it conforms to the standard regarding the surface roughness. Further, in order to perform the evaluation test, a surface roughness measuring device dedicated to the standard relating to the surface roughness was required. In other words, standards for surface roughness that can be evaluated are set in advance in the surface roughness measuring device, and if an evaluation test is performed on a standard for surface roughness other than that standard, the standard for the surface roughness is dedicated. A surface roughness measuring device was required.

  Furthermore, since the surface roughness measuring device is a very expensive device, it is practically difficult to purchase the surface roughness measuring device every time the surface roughness standard is changed. I went to the place where I own the measuring device and did an evaluation test.

  In the present invention, when evaluating whether a workpiece conforms to a standard relating to surface roughness different from the standard relating to surface roughness performed in the past, the evaluation whether conforming to the standard is performed by a simple method. An object of the present invention is to provide a surface roughness data analysis system capable of

  In order to solve the above problems, the present invention uses a surface roughness measurement data sheet printed by graphing the displacement amount of the stylus that is displaced according to the surface shape of the object to be measured. In the surface roughness data analysis system that outputs analysis data, a reading unit that reads a graph of the change amount of the stylus printed on the surface roughness measurement data paper, and a graph of the change amount of the stylus read by the reading unit First storage means for storing measurement data, numerical data conversion means for converting measurement data stored in the first storage means to predetermined numerical data, and surface roughness from the numerical data converted by the numerical data conversion means Calculation means for calculating analysis data; second storage means for storing analysis data calculated by the calculation means; output means for outputting analysis data stored in the second storage means; A.

  Further, the reading means is an image scanner or a CCD camera.

  The first storage means is a computer-readable recording medium that stores a graph of the change amount of the stylus read by the reading means.

  Further, the first storage means and the second storage means are constituted by the same storage means.

  According to the surface roughness data analysis system of the present invention, the reading means for reading the graph of the change amount of the stylus printed on the surface roughness measurement data paper, and the graph of the change amount of the stylus read by the reading means Is stored as measurement data, numerical data conversion means for converting the measurement data stored in the first storage means into predetermined numerical data, and surface roughness from the numerical data converted by the numerical data conversion means Since there is a calculation means for calculating the analysis data, a second storage means for storing the analysis data calculated by the calculation means, and an output means for outputting the analysis data stored in the second storage means. Even if an evaluation test for a standard regarding the surface roughness different from the evaluation test performed in the previous step is not required, it is not necessary to newly perform an evaluation test for conformity to the standard regarding the surface roughness. By using the result output surface roughness measurement data paper made evaluation test, it can determine whether to comply with the standards relating to the surface roughness.

  Thereby, the cost and time burden at the time of evaluating surface roughness can be reduced.

  Furthermore, since an image scanner or a CCD camera is used as the reading means, a special device is not required, and the graph of the change amount of the stylus printed on the surface roughness measurement data paper can be easily read. .

  Further, since the graph of the change amount of the stylus read by the reading means is stored in the computer-readable recording medium as the first storage means, the place different from the place where the measurement value data of the surface roughness measurement data sheet is read Thus, the measured value data can be converted into numerical data, and the analysis data of the surface roughness can be calculated, so that the work efficiency can be improved.

  Further, by configuring the first storage unit and the second storage unit by the same storage unit, the configuration of the surface roughness data analysis system can be simplified.

  An embodiment of the present invention will be described with reference to the drawings.

  First, a method for measuring the surface roughness of an object to be measured such as a gear (hereinafter referred to as “workpiece”) will be described with reference to FIG. FIG. 1 is a perspective view of a surface roughness measuring apparatus according to an embodiment of the present invention.

  As shown in FIG. 1, the surface roughness measuring device 1 includes a measuring instrument 2, a microcomputer body 3, a keyboard 4, a mouse 5, a display 6, and a printer 7.

  The measuring device 2 measures the surface roughness of the workpiece. The surface roughness of the workpiece is measured by the pickup 9 after placing the workpiece on the measuring table 8. The pickup 9 is supported by a holder of the driving unit 10 described later.

  The drive unit 10 is attached to a column 14 erected on the measurement table 8, and a motor (not shown) is driven according to an instruction from a CPU (not shown), so that the entire drive unit 10 is attached to the column 14. And the holder 11 is moved in the left-right direction (X direction).

  A stylus 12 is provided at the tip of the pickup 9, and the stylus 12 is displaced in the Z direction by moving the stylus 12 along the workpiece in the X direction. Then, by obtaining the displacement amount of the stylus 12, the surface roughness of the workpiece can be measured.

  Specifically, the displacement amount of the stylus 12 is converted into a voltage by a differential transformer built in the drive unit 10, and this voltage value is A / D converted by an A / D converter. The A / D converted displacement of the stylus 12 is output to the CPU of the microcomputer body 3 and stored in a storage device (not shown) provided in the microcomputer body 3. Then, measurement data such as a surface roughness curve (a curve obtained by graphing the displacement amount of the stylus) can be obtained from the measurement data indicating the surface roughness of the workpiece stored in the storage device.

  Then, the survey data such as the surface roughness curve is used to analyze whether the workpiece conforms to the surface roughness standard to be evaluated.

  After the surface roughness evaluation test, survey data such as a surface roughness curve, analysis results (analysis data), and the like are output from the printer 7.

  FIG. 2 is a diagram illustrating a surface roughness curve output from the printer.

  This surface roughness curve is a graph of the displacement of the stylus that is displaced according to the surface shape of the workpiece, and is printed on a surface roughness measurement data sheet described later.

  In the surface roughness curve shown in FIG. 2, the horizontal axis indicates the workpiece reading position, and the vertical axis indicates the displacement of the stylus 12.

  The reading position 0 is a reading start position of the displacement amount of the stylus 12. If this reading position starts from 0 and there is a concave portion, the displacement amount of the stylus 12 will be in the minus direction (downward on the paper surface). Conversely, if there is a convex portion, the displacement amount of the stylus 12 Will touch in the plus direction (upward on the page).

  In FIG. 2, the maximum negative value of the displacement amount of the stylus 12 is the displacement amount (0.0 μm) of the stylus 12.

  Next, the configuration of the surface roughness data analysis system of the present invention will be described.

  FIG. 3 is a configuration diagram of a surface roughness data analysis system according to an embodiment of the present invention.

  The surface roughness measurement data sheet 15 shown in FIG. 3 is printed with a surface roughness curve in which the displacement amount of the stylus that is displaced according to the surface shape of the workpiece is graphed.

  The image scanner 160 is a device that converts a surface roughness curve or the like printed on the surface roughness measurement data paper by a scanning operation into an electrical image (image), and is thereby printed on the surface roughness measurement data paper 15. The surface roughness curve can be read.

  Data relating to the surface roughness curve read by the image scanner 160 (data such as a surface roughness curve) is transmitted to the microcomputer 172 of the personal computer 165 connected to the image scanner 160 by wire.

  The microcomputer 172 includes a CPU 174 that performs a control operation according to a program, a ROM 173 that stores the program, a RAM 171 that is used as a work memory, and an I / O port 175.

  Data relating to the surface roughness curve transmitted from the image scanner 160 (hereinafter referred to as “surface roughness curve data”) is stored in the RAM 171 provided in the personal computer 165.

  In this embodiment, the image scanner 160 and the personal computer 165 including the microcomputer 172 are connected by wire. However, the surface roughness curve data is transmitted from the image scanner 160 to the microcomputer 172 wirelessly. May be.

  The printer 176 outputs analysis data of surface roughness such as a physical quantity Rk described later.

  Next, the processing flow of the surface roughness data analysis system of the present invention will be described with reference to FIGS.

  FIG. 4 is a diagram showing a flowchart of data processing by the surface roughness data analysis system in one embodiment of the present invention. FIG. 5A is a diagram showing a stylus displacement amount table showing displacement amounts of the stylus obtained by reading the surface roughness curve shown in FIG. 2 at each work reading position 0.1 (step). FIG.5 (b) is a figure which shows the maximum value of the displacement amount of the stylus of Fig.5 (a), the minimum value, and an average value.

  The flowchart shown in FIG. 4 shows a surface roughness measurement data sheet 15 (sheet on which a surface roughness curve is printed) output from the printer 7 shown in FIG. 1 as a result of a surface roughness evaluation test performed in the past. It will be used to explain the processing flow when evaluating whether it conforms to the standard regarding the surface roughness of the standard different from the standard regarding the surface roughness performed in the past.

  An operator newly performs a surface roughness evaluation test using the surface roughness measuring device 1 when performing a standard evaluation test related to a surface roughness of a standard different from a surface roughness evaluation test performed in the past. Instead, using the surface roughness measurement data sheet 15 output as a result of the evaluation test conducted in the past, evaluation of conformity with the standard regarding the surface roughness of the standard different from the evaluation test of the surface roughness conducted in the past I do.

  In the present embodiment, as an evaluation of whether or not it conforms to a standard relating to surface roughness that has been performed in the past, a physical quantity Rk described later is obtained and conforms to the standard relating to surface roughness. However, the present invention is not limited to this, and it may be an evaluation whether it conforms to a standard regarding the surface roughness different from the standard regarding the surface roughness performed when the surface roughness measurement data sheet 15 is output. For example, the type of standard regarding the surface roughness is not limited.

  First, in S1, the operator reads the surface roughness curve (graph) printed on the surface roughness measurement data sheet by the image scanner 160 serving as a reading unit.

  This surface roughness curve is read in the past for workpieces that have been subjected to surface roughness evaluation tests using surface roughness curves obtained as a result of surface roughness evaluation tests performed in the past. This is in order to evaluate whether it conforms to a standard relating to surface roughness that is different from the standard performed.

  The surface roughness curve data read by the image scanner 160 is transmitted to the personal computer 165 by wire or wireless.

  In S <b> 2, the surface roughness curve data transmitted from the image scanner 160 is stored in the RAM 171 which is the first storage unit provided in the personal computer 165.

  Next, in S3, as will be described later, the surface roughness curve data stored in the first storage means is converted into predetermined numerical data by the CPU 174 having the function of numerical data conversion means.

  Specifically, the surface roughness data stored in the first storage means is converted into predetermined numerical data by the following method.

  First, the surface roughness curve data stored in the first storage means, that is, the surface roughness curve (graph) printed on the surface roughness measurement data sheet shown in FIG. The displacement (vertical axis) of the stylus for the reading position (horizontal axis) is obtained.

  FIG. 5A shows the displacement of the stylus at the work reading position (horizontal axis) at regular intervals. FIG. 5A shows the displacement amount of the stylus obtained by reading the surface roughness curve shown in FIG. 2 for each workpiece reading position 0.1 (step).

  Next, in S4, the analysis data of the surface roughness is calculated from the numerical data converted by the numerical data conversion means by the CPU 174 having the function of the calculation means.

  The analysis data of the surface roughness is numerical data for determining whether the surface roughness of the workpiece conforms to the surface roughness standard to be evaluated. The operator uses this analysis data to determine whether the standard for the surface roughness is met.

  Next, a method of calculating the surface roughness analysis data calculated by the calculation means will be described.

  First, the maximum value of the stylus displacement amount in the stylus displacement amount table shown in FIG. The maximum value of the displacement amount of the stylus is shown in FIG. Then, for each reading position in the stylus displacement amount table shown in FIG. 5A, the displacement difference (touch) between the stylus displacement amount at the reading position and the maximum value (21.1 μm) of the stylus displacement amount. The maximum value of the displacement amount of the needle−the displacement amount of the stylus is obtained (see FIG. 5). This displacement difference (maximum displacement amount difference) is shown in FIG.

  Next, based on each maximum displacement amount difference, a ratio of the maximum displacement amount difference to the maximum value of the maximum displacement amount difference ((maximum displacement amount difference / maximum displacement amount difference) × 100 (%)) is obtained. .

  Then, the ratio of the maximum displacement amount difference to the maximum value of the respective maximum displacement amount differences (hereinafter referred to as “maximum displacement amount difference ratio”) is classified for each predetermined maximum displacement amount difference ratio (for example, 5%). Then, the number of maximum displacement amount difference ratios belonging to each category (number of distinct categories) is totaled.

  Then, the maximum value of the aggregated distinction number is obtained and the ratio of each distinction number to the maximum value of the distinctional number ((divisional number / maximum value of distinction number) × 100) is obtained (divisional number of distinction). Rate).

  If the division distinct number ratio for each divided maximum displacement amount difference ratio obtained above is graphed, the load curve shown in FIG. 6 is obtained. FIG. 6 is an explanatory diagram for obtaining the physical quantity Rk.

  Note that the load curve shown in FIG. 6 is subjected to filtering after graphing the distinct number ratio for each classified maximum displacement amount difference ratio.

  Next, the physical quantity Rk is obtained using this load curve.

The physical quantity Rk serves as an index for evaluating whether the physical quantity Rk conforms to the standard relating to the surface roughness, and the operator determines whether the physical quantity Rk conforms to the standard relating to the surface roughness based on the physical quantity Rk. . The physical quantity Rk in this case is
Physical quantity Rk = maximum displacement amount difference × load factor−corrected slope.

  First, the load factor is obtained in order to obtain the physical quantity Rk. This load factor indicates the degree of roughness of the surface roughness. The smaller the load factor, the smaller the degree of surface roughness overall.

  The load factor can be obtained from an equivalent curve described later. First, how to obtain the equivalent straight line will be described. This equivalent curve can be obtained by drawing a 40% long equivalent line for the load curve. FIG. 6 shows the equivalent straight line. In FIG. 6, the equivalent straight line is obtained by drawing a 40% long equivalent straight line with a maximum displacement amount difference ratio of 0% to 40%.

  And a load factor can be calculated | required by calculating | requiring the difference of the value in the maximum displacement amount difference ratio 0% of this equivalent straight line, and the value in 100%. That is, the load factor can be obtained by calculating the value of the maximum displacement difference ratio 0% −the value of the maximum displacement difference ratio 100% for the equivalent curve. In the present embodiment, the load factor is obtained as 8% (see FIG. 6).

  Next, inclination correction is obtained. This inclination correction is for deleting the displacement amount of the stylus 12 related to the gradient of the workpiece. That is, if the workpiece has a gradient, the stylus 12 changes by the amount of the gradient of the workpiece. Therefore, the displacement amount of the stylus 12 is obtained by adding the displacement amount related to the workpiece gradient to the displacement amount related to the surface roughness. Thus, the displacement of the stylus 12 with respect to the actual surface roughness cannot be obtained accurately.

  From this, the displacement amount of the stylus 12 related to the surface roughness can be accurately obtained by subtracting the displacement amount of the stylus 12 related to the gradient of the workpiece from the displacement amount of the actual stylus 12. The inclination correction can be obtained as follows.

  That is, in order to obtain inclination correction, first, the surface roughness curve shown in FIG. 2 is subjected to filter processing with a phase compensation filter, and the average line A is calculated using the curve after the filter processing as the average line A. Next, a surface roughness curve obtained by removing a portion below the calculated average line A is obtained, and the obtained surface roughness curve is defined as a surface roughness curve B. Then, the obtained surface roughness curve B is filtered with a phase compensation filter, and the averaged line C is obtained by averaging the curve after the filtering process. Finally, the upper surface leveling roughness curve D is calculated by subtracting the average line C from the surface roughness curve. Using this calculated upper surface leveling roughness curve D, the first value (0.0 (step) value in the present embodiment) and the last value (95. In this embodiment) of the surface roughness evaluation range. 1 (step value)) by calculating the difference (20.4 (when 0.0 (step)) -20.1 (when 95.1 (step))) of the upper surface leveling roughness curve , Tilt correction (0.3) can be obtained (not shown).

  Since the maximum value of the maximum displacement difference is 21.1 (μm) as shown in FIG. 5B, the physical quantity Rk is 21.1 × 0.08−0.03 (maximum displacement amount). The physical quantity Rk = 1.39 can be obtained from the equation: (maximum difference × load factor−correction slope).

  This physical quantity Rk is the analysis data of the surface roughness of the workpiece, and the worker makes an evaluation regarding the surface roughness based on the physical quantity Rk. That is, if the physical quantity Rk is equal to or less than a predetermined value that is a reference for surface roughness, the surface roughness test for the workpiece is acceptable.

  Next, in S5, the physical quantity Rk, which is analysis data obtained by the calculation means described above, is stored in the RAM 171 having the function of the second storage means provided in the personal computer 165.

  In the present embodiment, both the first storage means and the second storage means have been described as the RAM 171. However, the present invention is not limited to this, and the second storage means is provided in the personal computer 165 provided with the RAM 171 as the first storage means. You may provide separately from a 1st memory | storage means.

  Next, in S6, survey data such as the physical quantity Rk and the surface roughness curve stored in the RAM 171 is output from the printer 176 which is output means.

  In this way, if you have a surface roughness measurement data sheet that was output as a result of an evaluation test of the surface roughness conducted in the past, it is related to the surface roughness that is different from the evaluation test of the surface roughness conducted in the past Even when performing an evaluation test of a standard, it is not necessary to newly perform an evaluation test in accordance with the standard regarding the surface roughness, and using the surface roughness measurement data paper 15 output as a result of an evaluation test performed in the past, Evaluation of the standard regarding the surface roughness can be performed.

  As a result, the cost and time burden required for the evaluation of the surface roughness can be reduced, and if there is a data sheet for surface roughness measurement performed in the past, the standard for the surface roughness can be evaluated regardless of the location. Work efficiency is also improved.

  Hereinafter, modifications of the present invention will be described.

  (1) In the present embodiment, both the first storage means and the second storage means have been described as the RAM 171. However, the present invention is not limited to this, and the second storage means is separate from the personal computer 165 provided with the RAM 171 as the first storage means. It may be provided in a personal computer (not shown).

  In this case, the conversion of the numerical data by the numerical data conversion means and the calculation of the analysis data by the calculation means are also performed by a personal computer different from the personal computer storing the survey data in the first storage means.

  (2) In the present embodiment, the surface roughness curve printed on the surface roughness measurement data sheet 15 is read using the image scanner 160 as the reading means. The surface roughness curve printed on the roughness measurement data sheet 15 may be read.

  In this case, data relating to the surface roughness curve read by the CCD camera (data such as the surface roughness curve) is transmitted to the microcomputer 172 of the personal computer 165 connected to the CCD camera by wire or wirelessly. Thereafter, the same processing as the data relating to the surface roughness curve read by the image scanner 160 is performed.

  (3) In the present embodiment, the first storage means is described using the RAM 171 of the microcomputer 172 provided in the personal computer 165. However, the present invention is not limited to this, and the first storage means is transmitted from the image scanner 160 or the CCD camera to the personal computer 165. A computer-readable recording medium that stores surface roughness curve data may be used as the first storage unit.

  Thus, by using a computer-readable recording medium that stores surface roughness curve data, an operator can obtain surface roughness analysis data regardless of location. That is, the operator can use the recording medium to perform numerical data conversion by the numerical data conversion means, calculation of analysis data by the calculation means, etc., by other personal computers. Work efficiency is improved.

  As the computer-readable recording medium, specifically, a CDROM that can be inserted into a CDROM reading entity of the personal computer 165, a digital video disk (DVD) that can be inserted into a DVD reading entity of the personal computer 165, or a floppy of the personal computer 165. A floppy (registered trademark) disk that can be inserted into a (registered trademark) disk reader is used.

  (4) In the present embodiment, the physical quantity Rk is used as the analysis data. However, the present invention is not limited to this, and any data obtained as a result of analyzing whether it conforms to the standard regarding the surface roughness is limited to the physical quantity Rk. It is not something.

  (5) In the present embodiment, analysis data of the surface roughness of the object to be measured is obtained using a surface roughness measurement data sheet printed by graphing the displacement of the stylus that is displaced according to the surface shape of the object to be measured. However, the publication is not limited to this, and a publication containing surface roughness measurement data in which the displacement of the stylus that is displaced according to the surface shape of the object to be measured is graphed is used in the publication. Analysis data of the surface roughness of the object to be measured may be output from the published surface roughness measurement data.

  In this case, the reading means reads the graph of the amount of change of the stylus published in the publication, and the others are the same as in this embodiment.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

It is a perspective view of the surface roughness measuring device in one embodiment of the present invention. It is a figure which shows the surface roughness curve output from the printer. It is a block diagram of the surface roughness data analysis system in one Embodiment of this invention. It is a figure which shows the flowchart of the data processing by the surface roughness data analysis system in one Embodiment of this invention. (A) is a figure which shows the displacement table | surface of a stylus which shows the displacement amount of the stylus which read the surface roughness curve shown in FIG. 2 for every reading position 0.1 (step) of a workpiece | work. (B) is a figure which shows the maximum value of the displacement amount of a stylus, the minimum value, and an average value. It is explanatory drawing for obtaining physical quantity Rk. It is a side view of the conventional surface roughness measuring apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Surface roughness measuring apparatus, 2 measuring device, 3 microcomputer main body, 4 keyboard, 6 display, 7 printer, 12 stylus, 15 surface roughness measurement data paper, 160 image scanner, 165 personal computer, 171 RAM, 172 microcomputer 174 CPU, 176 printer.

Claims (4)

Surface roughness data analysis system that outputs the surface roughness analysis data of the object to be measured using the surface roughness measurement data paper printed by graphing the displacement amount of the stylus displaced according to the surface shape of the object to be measured In
Reading means for reading a graph of the amount of change of the stylus printed on the surface roughness measurement data paper;
First storage means for storing, as measurement data, a graph of the amount of change in the stylus read by the reading means;
Numerical data conversion means for converting the measurement data stored in the first storage means into predetermined numerical data;
Calculation means for calculating analysis data of surface roughness from the numerical data converted by the numerical data conversion means;
Second storage means for storing analysis data calculated by the calculation means;
An output means for outputting the analysis data stored in the second storage means.   2. The surface roughness data analysis system according to claim 1, wherein the reading means is an image scanner or a CCD camera.   3. The surface roughness according to claim 1, wherein the first storage unit is a computer-readable recording medium that stores a graph of a change amount of a stylus read by the reading unit. Data analysis system.   4. The surface roughness data analysis system according to claim 1, wherein the first storage unit and the second storage unit are configured by the same storage unit.

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