JP2006207925A - Carbon dioxide gas filling device - Google Patents

Carbon dioxide gas filling device Download PDF

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JP2006207925A
JP2006207925A JP2005020489A JP2005020489A JP2006207925A JP 2006207925 A JP2006207925 A JP 2006207925A JP 2005020489 A JP2005020489 A JP 2005020489A JP 2005020489 A JP2005020489 A JP 2005020489A JP 2006207925 A JP2006207925 A JP 2006207925A
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carbon dioxide
dioxide gas
filling
liquefied carbon
supply path
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JP4803788B2 (en
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Toshiyuki Nagashima
利幸 長島
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Showa Denko Gas Products Co Ltd
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Showa Tansan Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a carbon dioxide gas filling device capable of accurately filling the predetermined amount of carbon dioxide gas even though the carbon dioxide gas has properties instable in its phase and largely changes its density by the change of temperature. <P>SOLUTION: This carbon dioxide gas filling device is composed of a carbon dioxide gas cylinder 3, a carbon dioxide gas supply passage 6 charged with a filling valve 7 at a filling nozzle side, to supply the carbon dioxide gas from the carbon dioxide gas cylinder 3 by the charging nozzle 5, and a mass flowmeter 8 intervened on the carbon dioxide gas supply passage 6 for measuring the filling quantity of carbon dioxide gas to an object filled by the charging nozzle 5 of the carbon dioxide gas supply passage 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は炭酸ガスを冷媒として使用するものに充填する炭酸ガスの充填装置に関する。   The present invention relates to a carbon dioxide gas filling device that fills carbon dioxide gas used as a refrigerant.

従来、フロン系冷媒を冷凍機等へ充填する場合、液化冷媒をシリンダ内に溜め、シリンダ内に溜まった冷媒をピストンで加圧注入している。   Conventionally, when a chlorofluorocarbon refrigerant is charged into a refrigerator or the like, a liquefied refrigerant is accumulated in a cylinder, and the refrigerant accumulated in the cylinder is pressurized and injected by a piston.

このような充填方法では、温度に対して密度が比較的安定的なフロン系冷媒では使用することができるが、炭酸ガスのような温度の変化により、相状態が不安定で、密度変化が大きい物性では充填量のコントロールが困難である。
また、連続的に炭酸ガスを充填する場合には、シリンダの温度管理が困難で、1サイクル終了後にシリンダの冷却工程が必ず発生し、充填量の制御が難しく、1サイクルの時間も長くなり、炭酸ガス容器のガスも十分に利用できないという欠点があった。
特になし
Such a filling method can be used with a fluorocarbon refrigerant whose density is relatively stable with respect to temperature. However, due to temperature changes such as carbon dioxide, the phase state is unstable and the density change is large. With physical properties, it is difficult to control the filling amount.
In addition, when carbon dioxide gas is continuously charged, it is difficult to manage the temperature of the cylinder, and a cooling process of the cylinder is inevitably generated after the end of one cycle, and it is difficult to control the filling amount. There was a drawback that the gas in the carbon dioxide container could not be used sufficiently.
nothing special

本発明は以上のような従来の欠点に鑑み、温度の変化により、相状態が不安定で密度変化が大きい物性の炭酸ガスでも、あらかじめ設定された量を正確に充填することができる炭酸ガスの充填装置を提供することを目的としている。   In view of the above-mentioned conventional drawbacks, the present invention is a carbon dioxide gas capable of accurately filling a predetermined amount even with carbon dioxide gas having physical properties that are unstable in phase state and large in density change due to a change in temperature. The object is to provide a filling device.

本発明の前記ならびにそのほかの目的と新規な特徴は次の説明を添付図面と照らし合わせて読むと、より完全に明らかになるであろう。
ただし、図面はもっぱら解説のためのものであって、本発明の技術的範囲を限定するものではない。
The above and other objects and novel features of the present invention will become more fully apparent when the following description is read in conjunction with the accompanying drawings.
However, the drawings are for explanation only and do not limit the technical scope of the present invention.

上記目的を達成するために、本発明は炭酸ガス容器と、この炭酸ガス容器からの炭酸ガスを充填する充填ノズルへ供給する、該充填ノズル側に充填弁を介装した炭酸ガス供給路と、この炭酸ガス供給路の充填ノズルで充填されるものへの炭酸ガスの充填量を計測する該炭酸ガス供給路に介装された質量流量計とで炭酸ガスの充填装置を構成している。   In order to achieve the above object, the present invention provides a carbon dioxide gas container, a carbon dioxide gas supply path for supplying a carbon dioxide gas from the carbon dioxide gas container to a filling nozzle, which is provided with a filling valve on the filling nozzle side, A carbon dioxide filling device is constituted by a mass flow meter interposed in the carbon dioxide supply passage for measuring the amount of carbon dioxide filled in the carbon dioxide supply passage filled with the filling nozzle.

また、本発明は液化炭酸ガス容器と、この液化炭酸ガス容器からの液化炭酸ガスを充填する充填ノズルへ供給する、該充填ノズル側に充填弁を介装した液化炭酸ガス供給路と、この液化炭酸ガス供給路に介装された加圧ポンプと、この加圧ポンプの下流の前記液化炭酸ガス供給路に介装された、前記充填ノズルで充填されるものへの炭酸ガスの充填量を計測する質量流量計とで液化炭酸ガスの充填装置を構成している。   The present invention also provides a liquefied carbon dioxide gas container, a liquefied carbon dioxide gas supply path for supplying a liquefied carbon dioxide gas from the liquefied carbon dioxide gas container to a filling nozzle filled with a filling valve on the filling nozzle side, Measure the filling amount of carbon dioxide gas into the one filled with the filling nozzle, interposed in the liquefied carbon dioxide gas supply passage downstream of the pressure pump, and the pressure pump interposed in the carbon dioxide gas supply passage The liquefied carbon dioxide filling device is composed of the mass flow meter to be used.

以下の説明から明らかなように、本発明にあっては次に列挙する効果が得られる。   As will be apparent from the following description, the present invention has the following effects.

(1)炭酸ガス容器と、この炭酸ガス容器からの炭酸ガスを充填する充填ノズルへ供給する、該充填ノズル側に充填弁を介装した炭酸ガス供給路と、この炭酸ガス供給路の充填ノズルで充填されるものへの炭酸ガスの充填量を計測する該炭酸ガス供給路に介装された質量流量計とで構成されているので、炭酸ガス供給路を充填時に流れる炭酸ガスを質量流量計で計測するので、正確に充填する炭酸ガスの充填量を計測することができる。
したがって、充填されるものへの炭酸ガスの充填量が均一にでき、品質の向上を図ることができる。
(1) A carbon dioxide gas container, a carbon dioxide gas supply passage for supplying a carbon dioxide gas from the carbon dioxide gas container to a filling nozzle, and a filling valve provided on the filling nozzle side, and a filling nozzle for the carbon dioxide gas supply passage And the mass flow meter interposed in the carbon dioxide supply path for measuring the amount of carbon dioxide filled in the one filled with the carbon dioxide gas flowing when filling the carbon dioxide supply path. Therefore, it is possible to accurately measure the filling amount of carbon dioxide gas to be filled.
Therefore, the filling amount of carbon dioxide gas into the filling can be made uniform, and the quality can be improved.

(2)前記(1)によって、連続的に充填しても、従来のように冷却工程が不要で、1サイクルが短く、効率よく充填を行なうことができる。 (2) According to the above (1), even if it is continuously filled, a cooling step is not required as in the prior art, and one cycle is short and filling can be performed efficiently.

(3)前記(1)によって、構造が簡単で、容易に製造することができる。 (3) According to the above (1), the structure is simple and can be easily manufactured.

(4)請求項2も前記(1)〜(3)と同様な効果が得られるとともに、炭酸ガスの充填時に、炭酸ガス以外のものが入り込むのを効率よく阻止することができる。 (4) Claim 2 can obtain the same effects as the above (1) to (3), and can efficiently prevent the entry of substances other than carbon dioxide when filling with carbon dioxide.

(5)請求項3も前記(1)〜(3)と同様な効果が得られるとともに、加圧ポンプによって、常に一定圧力流量で充填することができ、正確な量の液化炭酸ガスを充填することができる。 (5) In claim 3, the same effects as in the above (1) to (3) can be obtained, and the pressure pump can always be filled at a constant pressure flow rate, and an accurate amount of liquefied carbon dioxide gas is filled. be able to.

(6)請求項4も前記(1)〜(3)、(5)と同様な効果が得られるとともに、液化炭酸ガス供給路を気液分離器で効率よく液化炭酸ガスを流すことができ、より正確な液化炭酸ガスを充填することができる。 (6) In claim 4, the same effects as in the above (1) to (3) and (5) can be obtained, and the liquefied carbon dioxide gas can be efficiently passed through the liquefied carbon dioxide gas supply path by a gas-liquid separator. More accurate liquefied carbon dioxide gas can be filled.

(7)請求項5も前記(1)〜(3)、(5)、(6)と同様な効果が得られるとともに、さらに正確に液化炭酸ガスの充填を行なうことができる。 (7) In claim 5, the same effects as in the above (1) to (3), (5), and (6) can be obtained, and the liquefied carbon dioxide gas can be filled more accurately.

以下、図面に示す本発明を実施するための最良の形態により、本発明を詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the best mode for carrying out the invention shown in the drawings.

図1ないし図3に示す本発明を実施するための最良の第1の形態において、1は炭酸ガスを冷媒として冷凍機2へ、あらかじめ設定された一定量を均一に充填することができる本発明の炭酸ガスの充填装置で、この炭酸ガスの充填装置1はボンベにガスあるいは液の炭酸ガスを充填した炭酸ガス容器3と、この炭酸ガス容器3の開閉弁4に一端部が接続され、他端部に前記冷凍機2に炭酸ガスを充填する充填ノズル5が取付けられた炭酸ガス供給路6と、この炭酸ガス供給路6の充填ノズル5寄りの部位に介装された充填弁7と、この充填弁7寄りの上流の前記炭酸ガス供給路6に介装された、該炭酸ガス供給路6を流れる炭酸ガスの温度、圧力、密度の変化に影響されにくく、低い圧力損失で高精度の流量を測定することができるコリオリ式質量流量計8と、この質量流量計8寄りの上流の前記炭酸ガス供給路6に介装された開閉弁9と、この開閉弁9と前記質量流量計8との間の、前記炭酸ガス供給路6に介装された、該開閉弁9の下流を真空にする吸引パイプ10に開閉弁11を介装した真空ポンプ12を備える真空装置13とで構成されている。   In the first preferred embodiment for carrying out the present invention shown in FIGS. 1 to 3, the present invention is capable of uniformly filling a predetermined amount into a refrigerator 2 using carbon dioxide as a refrigerant. The carbon dioxide gas filling device 1 has one end connected to a carbon dioxide gas container 3 in which a cylinder is filled with a gas or liquid carbon dioxide gas, and an on-off valve 4 of the carbon dioxide gas container 3. A carbon dioxide gas supply passage 6 in which a filling nozzle 5 for filling the refrigerator 2 with carbon dioxide gas is attached at the end, and a filling valve 7 interposed in a portion of the carbon dioxide gas supply passage 6 near the filling nozzle 5; It is less affected by changes in the temperature, pressure, and density of the carbon dioxide gas flowing through the carbon dioxide gas supply passage 6 upstream of the carbon dioxide gas supply passage 6 near the filling valve 7, and is highly accurate with low pressure loss. Coriolis that can measure the flow rate A mass flow meter 8, an on-off valve 9 interposed in the carbon dioxide gas supply path 6 upstream of the mass flow meter 8, and the carbon dioxide supply between the on-off valve 9 and the mass flow meter 8 The vacuum device 13 includes a vacuum pump 12 interposed in the passage 6 and a vacuum pipe 12 interposed in the suction pipe 10 for vacuuming the downstream of the on-off valve 9.

上記構成の炭酸ガスの充填装置1は充填ノズル5と冷凍機2の冷媒供給路(図示せず)とを密封状態に接続する。
しかる後、炭酸ガス供給路6の開閉弁9、吸引パイプ10の開閉弁11および充填弁7を開放し、真空ポンプ12を作動させて炭酸ガス供給路6および冷凍機2の冷媒供給路(図示せず)を真空にする。
The carbon dioxide filling device 1 having the above configuration connects the filling nozzle 5 and a refrigerant supply path (not shown) of the refrigerator 2 in a sealed state.
Thereafter, the on-off valve 9 of the carbon dioxide gas supply path 6, the on-off valve 11 of the suction pipe 10 and the filling valve 7 are opened, and the vacuum pump 12 is actuated to operate the carbon dioxide gas supply path 6 and the refrigerant supply path of the refrigerator 2 (see FIG. Vacuum).

次に、吸引パイプ10の開閉弁11を閉じ、炭酸ガス容器3の開閉弁4を開放し、あらかじめ設定された充填量が質量流量計8で計測されたところで充填弁7を閉じ、炭酸ガスの充填を完了する。   Next, the opening / closing valve 11 of the suction pipe 10 is closed, the opening / closing valve 4 of the carbon dioxide container 3 is opened, and the filling valve 7 is closed when the preset filling amount is measured by the mass flow meter 8. Complete filling.

なお、充填弁7の開閉は、質量流量計8であらかじめ設定された充填量になると、自動的に閉じるように制御される制御回路や、該制御回路からの指令によって開閉する弁が使用される。
また、炭酸ガス供給路6の開閉弁9を閉じて、該開閉弁9の下流を真空にする作業を2回目以降の充填作業では行なう。
[発明を実施するための異なる形態]
The opening and closing of the filling valve 7 is a control circuit that is controlled to automatically close when the filling amount preset by the mass flow meter 8 is reached, or a valve that opens and closes according to a command from the control circuit. .
In addition, the work of closing the on-off valve 9 of the carbon dioxide gas supply path 6 and evacuating the downstream of the on-off valve 9 is performed in the second and subsequent filling operations.
[Different forms for carrying out the invention]

次に、図4ないし図7に示す本発明を実施するための異なる形態につき説明する。なお、これらの本発明を実施するための異なる形態の説明に当って、前記本発明を実施するための最良の第1の形態と同一構成部分には同一符号を付して重複する説明を省略する。   Next, different modes for carrying out the present invention shown in FIGS. 4 to 7 will be described. In the description of these different modes for carrying out the present invention, the same components as those in the best mode for carrying out the present invention are designated by the same reference numerals and redundant description is omitted. To do.

図4に示す本発明を実施するための第2の形態において、前記本発明を実施するための最良の第1の形態と主に異なる点は、液化炭酸ガスを供給できるボンベあるいは貯槽を用いた液化炭酸ガス容器3Aと、質量流量計8の上流の液化炭酸ガス供給路6Aに加圧ポンプ14、この加圧ポンプ14の上流に冷却装置15および前記加圧ポンプ14の下流に安全弁16を設けるとともに、充填弁7と充填ノズル5との間の液化炭酸ガス供給路6Aに吸引パイプ10を介装した点で、このように構成した炭酸ガスの充填装置1Aにしても、前記本発明を実施するための最良の第1の形態と同様な作用効果が得られるとともに、より正確な炭酸ガスの充填を行なうことができる。   In the second embodiment for carrying out the present invention shown in FIG. 4, the main difference from the first embodiment for carrying out the present invention is that a cylinder or storage tank capable of supplying liquefied carbon dioxide gas is used. A pressure pump 14 is provided in the liquefied carbon dioxide container 3A and the liquefied carbon dioxide supply path 6A upstream of the mass flow meter 8, a cooling device 15 is provided upstream of the pressure pump 14, and a safety valve 16 is provided downstream of the pressure pump 14. At the same time, the present invention is implemented even in the carbon dioxide gas filling device 1A constructed as described above in that the suction pipe 10 is interposed in the liquefied carbon dioxide gas supply path 6A between the filling valve 7 and the filling nozzle 5. In addition to the effects similar to those of the first preferred embodiment, the carbon dioxide gas can be more accurately filled.

図5に示す本発明を実施するための第3の形態において、前記本発明を実施するための第2の形態と主に異なる点は、冷却装置15の上流の液化炭酸ガス供給路6Aに気液分離器17を介装した点で、このように構成した炭酸ガスの充填装置1Bにしても、前記本発明を実施するための第2の形態と同様な作用効果が得られるとともに、液化炭酸ガス供給路6Aを液化炭酸ガスだけを流すことができ、より正確な炭酸ガスの充填を行なうことができる。   The third embodiment for carrying out the present invention shown in FIG. 5 is mainly different from the second embodiment for carrying out the present invention in that the liquefied carbon dioxide gas supply path 6A upstream of the cooling device 15 is in the air. Even with the carbon dioxide gas filling device 1B configured as described above, the same effect as that of the second embodiment for carrying out the present invention can be obtained and the liquefied carbon dioxide can be obtained by interposing the liquid separator 17. Only the liquefied carbon dioxide gas can flow through the gas supply path 6A, and the carbon dioxide gas can be filled more accurately.

図6に示す本発明を実施するための第4の形態において、前記本発明を実施するための第3の形態と主に異なる点は、一端部が質量流量計8と充填弁7との間の液化炭酸ガス供給路6Aに接続され、他端部が気液分離器17の気体側に接続された開閉弁18および背圧弁19が介装された循環路20を設けた点で、このように構成した炭酸ガスの充填装置1Cにしても、前記本発明を実施するための第3の形態と同様な作用効果が得られるとともに、より正確な炭酸ガスの充填を行なうことができる。   The fourth embodiment for carrying out the present invention shown in FIG. 6 is mainly different from the third embodiment for carrying out the present invention in that one end is between the mass flow meter 8 and the filling valve 7. In this way, an open / close valve 18 and a back pressure valve 19 connected to the gas side of the gas-liquid separator 17 are connected to the liquefied carbon dioxide gas supply path 6A. Even with the carbon dioxide gas filling device 1C configured as described above, the same effects as those of the third embodiment for carrying out the present invention can be obtained, and more accurate carbon dioxide gas filling can be performed.

図7に示す本発明を実施するための第5の形態において、前記本発明を実施するための最良の第1の形態と主に異なる点は、冷凍機2から開閉弁9までの内容積が冷凍機2の内容積に対して小さく冷凍機2の能力に問題がない場合に真空装置を用いない炭酸ガスの充填装置1Dにした点で、このようにしてもよい。   The fifth embodiment for carrying out the present invention shown in FIG. 7 is mainly different from the best first embodiment for carrying out the present invention in that the internal volume from the refrigerator 2 to the on-off valve 9 is different. If the capacity of the refrigerator 2 is small with respect to the internal volume of the refrigerator 2 and there is no problem, the carbon dioxide gas filling device 1D that does not use a vacuum device may be used.

本発明はあらかじめ設定された量の炭酸ガスを充填する炭酸ガスの充填装置を製造する産業で利用される。   The present invention is used in the industry of manufacturing a carbon dioxide gas filling device for filling a predetermined amount of carbon dioxide gas.

本発明を実施するための最良の第1の形態の概略説明図。BRIEF DESCRIPTION OF THE DRAWINGS The schematic explanatory drawing of the best 1st form for implementing this invention. 本発明を実施するための最良の第1の形態の要部平面図。The principal part top view of the best 1st form for implementing this invention. 本発明を実施するための最良の第1の形態の要部正面図。The principal part front view of the best 1st form for implementing this invention. 本発明を実施するための第2の形態の概略説明図。Schematic explanatory drawing of the 2nd form for implementing this invention. 本発明を実施するための第3の形態の概略説明図。Schematic explanatory drawing of the 3rd form for implementing this invention. 本発明を実施するための第4の形態の概略説明図。Schematic explanatory drawing of the 4th form for implementing this invention. 本発明を実施するための第5の形態の概略説明図。Schematic explanatory drawing of the 5th form for implementing this invention.

符号の説明Explanation of symbols

1、1A、1B、1C、1D:炭酸ガスの充填装置、
2:冷凍機、 3、3A:炭酸ガス容器、
4:開閉弁、 5:充填ノズル、
6、6A:炭酸ガス供給路、 7:充填弁、
8:質量流量計、 9:開閉弁、
10:吸引パイプ、 11:開閉弁、
12:真空ポンプ、 13:真空装置、
14:加圧ポンプ、 15:冷却装置、
16:安全弁、 17:気液分離器、
18:開閉弁、 19:背圧弁、
20:循環路。
1, 1A, 1B, 1C, 1D: Carbon dioxide filling device,
2: refrigerator, 3, 3A: carbon dioxide container,
4: Open / close valve, 5: Filling nozzle,
6, 6A: Carbon dioxide gas supply path, 7: Filling valve,
8: Mass flow meter, 9: On-off valve,
10: suction pipe, 11: on-off valve,
12: vacuum pump, 13: vacuum device,
14: pressurizing pump, 15: cooling device,
16: Safety valve, 17: Gas-liquid separator,
18: On-off valve, 19: Back pressure valve,
20: Circulation path.

Claims (6)

炭酸ガス容器と、この炭酸ガス容器からの炭酸ガスを充填する充填ノズルへ供給する、該充填ノズル側に充填弁を介装した炭酸ガス供給路と、この炭酸ガス供給路の充填ノズルで充填されるものへの炭酸ガスの充填量を計測する該炭酸ガス供給路に介装された質量流量計とを備えることを特徴とする炭酸ガスの充填装置。 Filled with a carbon dioxide gas container, a carbon dioxide gas supply passage with a filling valve provided on the side of the filling nozzle, which is supplied to a filling nozzle filled with carbon dioxide gas from the carbon dioxide gas container, and a filling nozzle of the carbon dioxide gas supply passage. A carbon dioxide gas filling device comprising: a mass flow meter interposed in the carbon dioxide gas supply path for measuring a carbon dioxide gas filling amount into a thing. 炭酸ガス容器と、この炭酸ガス容器からの炭酸ガスを充填する充填ノズルへ供給する、該充填ノズル側に充填弁を介装した炭酸ガス供給路と、この炭酸ガス供給路の充填ノズルで充填されるものへの炭酸ガスの充填量を計測する該炭酸ガス供給路に介装された質量流量計と、この質量流量計の上流の前記炭酸ガス供給路に介装された開閉弁と、この開閉弁と前記質量流量計との間の前記炭酸ガス供給路に介装された、該開閉弁の下流を真空にする開閉弁を介装した真空ポンプを備える真空装置とを備えることを特徴とする炭酸ガスの充填装置。 Filled with a carbon dioxide gas container, a carbon dioxide gas supply passage with a filling valve provided on the side of the filling nozzle, which is supplied to a filling nozzle filled with carbon dioxide gas from the carbon dioxide gas container, and a filling nozzle of the carbon dioxide gas supply passage. A mass flow meter interposed in the carbon dioxide gas supply path for measuring the amount of carbon dioxide filled in the object, an on-off valve interposed in the carbon dioxide gas supply path upstream of the mass flow meter, And a vacuum device provided with a vacuum pump interposed in the carbon dioxide gas supply path between the valve and the mass flow meter and provided with an open / close valve for evacuating the downstream of the open / close valve. Carbon dioxide filling device. 液化炭酸ガス容器と、この液化炭酸ガス容器からの液化炭酸ガスを充填する充填ノズルへ供給する、該充填ノズル側に充填弁を介装した液化炭酸ガス供給路と、この液化炭酸ガス供給路に介装された加圧ポンプと、この加圧ポンプの下流の前記液化炭酸ガス供給路に介装された、前記充填ノズルで充填されるものへの液化炭酸ガスの充填量を計測する質量流量計とを備えることを特徴とする炭酸ガスの充填装置。 A liquefied carbon dioxide container, a liquefied carbon dioxide supply path for supplying a liquefied carbon dioxide gas from the liquefied carbon dioxide gas container to a filling nozzle, and a filling valve on the filling nozzle side, and a liquefied carbon dioxide gas supply path A mass flow meter for measuring the amount of liquefied carbon dioxide filled in the filling nozzle filled in the liquefied carbon dioxide gas supply passage downstream of the pressure pump. And a carbon dioxide gas filling device. 液化炭酸ガス容器と、この液化炭酸ガス容器からの液化炭酸ガスを充填するノズルへ供給する、該充填ノズル側に充填弁を介装した液化炭酸ガス供給路と、この液化炭酸ガス供給路に介装された液化炭酸ガスだけを供給する気液分離器と、この気液分離器の下流の前記液化炭酸ガス供給路に介装された加圧ポンプと、この加圧ポンプの下流の前記液化炭酸ガス供給路に介装された、前記充填ノズルで充填されるものへの液化炭酸ガスの充填量を計測する質量流量計とを備えることを特徴とする炭酸ガスの充填装置。 A liquefied carbon dioxide container, a liquefied carbon dioxide supply path for supplying a liquefied carbon dioxide gas from the liquefied carbon dioxide gas container to a nozzle filled with a filling valve on the filling nozzle side, and a liquefied carbon dioxide gas supply path A gas-liquid separator for supplying only the liquefied carbon dioxide gas, a pressure pump provided in the liquefied carbon dioxide gas supply path downstream of the gas-liquid separator, and the liquefied carbon dioxide downstream of the pressure pump. A carbon dioxide filling device, comprising: a mass flow meter that measures a filling amount of liquefied carbon dioxide gas that is filled in the gas supply passage and is filled with the filling nozzle. 液化炭酸ガス容器と、この液化炭酸ガス容器からの液化炭酸ガスを充填するノズルへ供給する、該充填ノズル側に充填弁を介装した液化炭酸ガス供給路と、この液化炭酸ガス供給路に介装された液化炭酸ガスだけを供給する気液分離器と、この気液分離器の下流の前記液化炭酸ガス供給路に介装された加圧ポンプと、この加圧ポンプの下流の前記液化炭酸ガス供給路に介装された、前記充填ノズルで充填されるものへの液化炭酸ガスの充填量を計測する質量流量計と、前記質量流量計と前記充填弁との間の、前記液化炭酸ガス供給路に一端部が介装され、他端部が前記気液分離器の気体側に介装された背圧弁が介装された循環路とを備えることを特徴とする炭酸ガスの充填装置。 A liquefied carbon dioxide container, a liquefied carbon dioxide supply path for supplying a liquefied carbon dioxide gas from the liquefied carbon dioxide gas container to a nozzle filled with a filling valve on the filling nozzle side, and a liquefied carbon dioxide gas supply path A gas-liquid separator for supplying only the liquefied carbon dioxide gas, a pressure pump provided in the liquefied carbon dioxide gas supply path downstream of the gas-liquid separator, and the liquefied carbon dioxide downstream of the pressure pump. A mass flow meter for measuring the filling amount of liquefied carbon dioxide gas filled in the filling nozzle inserted in a gas supply path, and the liquefied carbon dioxide gas between the mass flow meter and the filling valve A carbon dioxide gas filling device comprising: a circulation path having a back pressure valve interposed at one end portion in the supply path and at the other end interposed in the gas side of the gas-liquid separator. 充填弁と、充填ノズルとの間の液化炭酸ガス供給路に介装された、該充填弁の下流を真空にする開閉弁を介装した真空ポンプを備える真空装置を設けたことを特徴とする請求項2、3、4、5いずれかに記載の炭酸ガスの充填装置。
A vacuum device is provided that includes a vacuum pump that is interposed in a liquefied carbon dioxide gas supply path between a filling valve and a filling nozzle and that has an open / close valve that evacuates the downstream of the filling valve. The carbon dioxide filling device according to any one of claims 2, 3, 4, and 5.
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