JP2006205024A - Coater - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coater which improves the uniformity of a film thickness by preventing the particles in a coating solution to be applied from gathering and growing bigger due to cohesion etc. <P>SOLUTION: The coater is equipped with a supply source, a pump, a nozzle, a first stirring section, and a second stirring section. The first stirring section stirs the coating solution stored in the supply source. The second stirring section again stirs the coating solution after the coating solution is taken out until the coating solution is discharged from the nozzle. As a result, the coating solution before the discharge is stirred at least twice within the coater and therefore, the coating solution concentration is stabilized to make the particle diameters in the coating solution the same and to improve the coating uniformity of film thickness and the like. Since the nozzle is less clogged, the continuous operating time of the coater can be made longer. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a coating apparatus, and more particularly to a coating apparatus that applies a coating liquid such as an organic EL material from a nozzle onto a substrate placed on a stage.

  2. Description of the Related Art Conventionally, various coating apparatuses that apply a coating liquid to a target object such as a substrate have been developed. For example, in an apparatus for manufacturing an organic EL (Electro Luminescence) display device, coating is performed by applying a hole transport material or an organic EL material in a predetermined pattern shape to the main surface of a substrate such as a glass substrate placed on a stage. A device is used. In this coating apparatus, a coating liquid (organic EL material or hole transport material) is discharged from a nozzle at a predetermined pressure. Specifically, after the coating liquid is stored in a supply source such as a tank provided in the coating apparatus, the coating liquid supplied from the supply source is increased in pressure by a pump, and foreign matter is removed by a filter provided in the pipe , Discharged from the nozzle.

  Here, when particles in the coating liquid applied by the coating apparatus gather and increase due to a cohesive force or the like, the coating liquid concentration generally changes to cause coating unevenness or the like. For example, in an apparatus that applies an organic EL material or a hole transport material by nozzle application, the film thickness decreases as the concentration of the coating solution decreases. As a result, the film thickness uniformity in a single product and the film thickness between production lots The uniformity of is reduced. Further, even if the filter passes after the pressure increase, 100% of the large particles cannot be collected. As a result, the large particles that have passed through the filter are clogged by a nozzle or the like, and the continuous operation performance of the coating apparatus is reduced.

In order to disperse particles in such a coating liquid, there is a coating apparatus that stirs and discharges the coating liquid (see, for example, Patent Document 1). In this coating apparatus, the coating liquid stored in the supply source is agitated and the coating liquid is discharged.
JP 2000-157905 A

  However, simply stirring the coating solution stored in the supply source may cause the particles in the coating solution to collect and become large in the pipe from the supply source to the nozzle. For example, in a coating apparatus used in an apparatus for manufacturing an organic EL display device, since the flow rate of the organic EL material and the hole transport material flowing in the pipe from the supply source to the nozzle is slow, particles are generated in the pipe. The environment is easy to gather and grow.

  Therefore, an object of the present invention is to provide a coating apparatus that prevents the particles in the coating solution to be coated from collecting and increasing due to cohesive force and the like, thereby improving the uniformity of the film thickness.

In order to achieve the above object, the present invention has the following features.
1st invention is a coating device provided with a supply source, a pump, a nozzle, a 1st stirring part, and a 2nd stirring part. The supply source stores and supplies the coating liquid. The pump takes out the coating liquid stored in the supply source and increases the pressure. The nozzle discharges the coating liquid whose pressure has been increased by the pump from its tip. The first stirring unit stirs the coating liquid stored in the supply source. The second agitation unit agitates the coating liquid from the time the pump is taken out and discharged from the nozzle.

  According to a second invention, in the first invention, a filter is further provided. The filter removes foreign matters in the coating liquid from when the pump is taken out until it is discharged from the nozzle. The second stirring unit is provided in a pipe connected to the filter.

  In a third aspect based on the second aspect, the second stirring unit includes an ultrasonic wave generating unit. The ultrasonic generator applies ultrasonic waves to the coating liquid that flows inside the pipe.

  In a fourth aspect based on the second aspect, the second stirring section includes an element. The element is mounted inside the pipe and shears the pipe internal space in a spiral shape that is alternately twisted leftward and rightward with the extending direction of the pipe as an axis.

  In a fifth aspect based on the first aspect, the coating liquid is at least one of an organic EL material and a hole transport material for manufacturing an organic EL display device.

  According to the first invention, since the coating liquid before discharge is stirred at least twice in the coating apparatus, the coating liquid concentration is stable, the particle diameter in the coating liquid is the same, and the coating uniformity such as film thickness Will improve. In addition, since nozzle clogging is reduced, the continuous operation time of the coating apparatus can be extended.

  According to the second aspect, the second agitation is performed in the pipe from the supply source to the nozzle, thereby preventing the particles in the coating liquid from collecting and increasing in the pipe from the supply source to the nozzle. can do. In addition, even in a coating apparatus equipped with a filter for removing foreign substances in the coating liquid, since the coating liquid is agitated in a pipe connected to the filter, the concentration of the coating liquid flowing to the filter is stably applied. The particle diameter in the liquid becomes the same, the ratio collected by the filter is constant, and the coating uniformity such as the film thickness is improved. Moreover, since clogging of the filter is reduced, the continuous operation time of the coating apparatus can be extended. Furthermore, since the frequency of replacement of the filter itself is reduced, cost reduction and maintenance time can be expected.

  According to the third aspect of the invention, the particles in the coating liquid can be dispersed in the pipe by adding ultrasonic waves to the coating liquid flowing in the pipe from the supply source to the nozzle and stirring the supply liquid. It is possible to prevent the particles in the coating solution from collecting and becoming large in the pipe from the source to the nozzle.

  According to the fourth aspect of the invention, the element that shears the pipe internal space in a spiral shape that is alternately twisted in the left direction and the right direction about the extending direction is mounted in the pipe from the supply source to the nozzle. Thus, since the coating liquid flowing in the pipe is turbulently stirred by the element, it is possible to prevent the particles in the coating liquid from collecting and increasing in the pipe from the supply source to the nozzle.

  According to the fifth aspect of the present invention, even in a coating apparatus that uses an organic EL material or a hole transport material with a slow flow rate that generally flows in a pipe from the supply source to the nozzle, Since the coating solution is stirred at least twice in the coating apparatus, the concentration of the coating solution is stabilized, the particle diameter in the coating solution is the same, and the coating uniformity such as the film thickness is improved. In addition, since nozzle clogging is reduced, the continuous operation time of the coating apparatus can be extended.

  Hereinafter, a coating apparatus according to an embodiment of the present invention will be described with reference to the drawings. In order to make the description more specific, the following description will be given using an example in which the coating apparatus is applied to an apparatus for manufacturing an organic EL display device using an organic EL material, a hole transport material, or the like as a coating solution. An apparatus for manufacturing an organic EL display device manufactures an organic EL display device by applying an organic EL material, a hole transport material, or the like in a predetermined pattern shape on a glass substrate placed on a stage. FIG. 1 is a plan view and a front view illustrating a schematic configuration of a main part of a manufacturing apparatus for an organic EL display device. In addition, although the coating device used for the apparatus which manufactures an organic EL display apparatus uses several coating liquids, such as an organic EL material and a hole transport material, as mentioned above, organic EL material is used as a coating liquid as those representatives. Give an explanation.

  In FIG. 1, an organic EL display device manufacturing apparatus 1 generally includes a substrate mounting device 2 and an organic EL coating mechanism 5. The organic EL coating mechanism 5 includes a nozzle moving mechanism unit 51, a nozzle unit 52, and a liquid receiving unit 53. The nozzle moving mechanism 51 has a guide member 511 extending in the X-axis direction in the figure, and moves the nozzle unit 52 in the X-axis direction in the figure along the guide member 511. The nozzle unit 52 holds the nozzles 521 to 523 that discharge red, green, and blue organic EL materials in parallel. Red, green, and blue organic EL materials are supplied to the nozzles 521 to 523 from a supply unit (see FIG. 2), respectively.

  The substrate mounting apparatus 2 includes a stage 21, a turning unit 22, a parallel movement table 23, a guide receiving unit 24, and a guide member 25. The stage 21 places a substrate P such as a glass substrate to be coated on the upper surface of the stage. The lower part of the stage 21 is supported by the turning unit 22, and the stage 21 is configured to be rotatable in the θ direction shown in the figure by the turning operation of the turning unit 22. In addition, a heating mechanism is provided inside the stage 21 for preheating the substrate P coated with the organic EL material on the stage surface.

  A guide member 25 is extended and fixed in the illustrated Y-axis direction perpendicular to the X-axis direction so as to pass under the organic EL coating mechanism 5. On the lower surface of the parallel movement table 23, a guide receiving portion 24 that is in contact with the guide member 25 and slides on the guide member 25 is fixed. In addition, the swivel unit 22 is fixed on the upper surface of the translation table 23. Accordingly, the parallel movement table 23 can be moved in the Y-axis direction along the guide member 25 by receiving a driving force from, for example, a linear motor (not shown), and the stage 21 supported by the turning unit 22 can be moved. Movement is also possible.

  When the substrate P is placed on the stage 21 and the parallel movement table 23 moves to the lower side of the organic EL coating mechanism 5, the substrates P apply nozzles 521 to 523 to apply red, green, and blue organic EL materials. It will be the position to receive from. Then, the control unit (see FIG. 2) controls the nozzle moving mechanism unit 51 so as to reciprocate the nozzle unit 52 in the X-axis direction, and moves the stage 21 by a predetermined pitch in the Y-axis direction every linear movement. The parallel movement table 23 is controlled to discharge the organic EL material at a predetermined flow rate from the nozzles 521 to 523. In addition, at the discharge positions in the X-axis direction of the nozzles 521 to 523, in both side spaces deviating from the substrate P placed on the stage 21, a liquid receiving portion 53L that receives the organic EL material discharged out of the substrate P and 53R is respectively fixed. The nozzle moving mechanism 51 is arranged so as to cross the substrate P from the upper space of the liquid receiver 53 disposed outside one side of the substrate P and be disposed outside the other side of the substrate P. The nozzle unit 52 is reciprocated to the upper space. The parallel movement table 23 moves the stage 21 by a predetermined pitch in a predetermined direction (Y-axis direction in the drawing) perpendicular to the nozzle reciprocating direction when the nozzle unit 52 is arranged in the upper space of the liquid receiving portion 53. Let Simultaneously with the operation of the nozzle moving mechanism 51 and the parallel moving table 23, organic EL materials of red, green, and blue are formed on the substrate P by discharging the organic EL materials from the nozzles 521 to 523 in a liquid column state. A so-called stripe arrangement is formed on the substrate P in the order of red, green, and blue in each stripe-shaped groove formed.

  Next, with reference to FIG. 2, the schematic structure of the control function and supply part in the manufacturing apparatus 1 of an organic EL display device will be described. FIG. 2 is a block diagram showing a control function and a supply unit of the organic EL display device manufacturing apparatus 1.

  In FIG. 2, the organic EL display device manufacturing apparatus 1 includes a control unit 3, a first supply unit 54a, a second supply unit 54b, and a third supply unit 54c in addition to the components described above. The first supply unit 54 a supplies the red organic EL material to the red nozzle 521. The second supply unit 54 b supplies the green organic EL material to the green nozzle 522. The third supply unit 54 c supplies the blue organic EL material to the blue nozzle 523. The first supply unit 54a includes a red organic EL material supply source 541a, a pump 542a for taking out the red organic EL material from the supply source 541a, a flow meter 543a for detecting the flow rate of the red organic EL material, A filter 545a for removing foreign substances in the red organic EL material and a stirring unit 544a for stirring the red organic EL material flowing from the flow meter 543a to the filter 545a are provided. The second supply unit 54b includes a green organic EL material supply source 541b, a pump 542b for taking out the green organic EL material from the supply source 541a, and a flow meter 543b that detects the flow rate of the green organic EL material. And a filter 545b for removing foreign substances in the green organic EL material, and a stirring unit 544b for stirring the green organic EL material flowing from the flow meter 543b to the filter 545b. Further, the third supply unit 54c includes a blue organic EL material supply source 541c, a pump 542c for taking out the blue organic EL material from the supply source 541a, and a flow meter 543c for detecting the flow rate of the blue organic EL material. And a filter 545c for removing foreign substances in the blue organic EL material, and a stirring unit 544c for stirring the blue organic EL material flowing from the flow meter 543c to the filter 545c. And the control part 3 controls each operation | movement of the 1st-3rd supply parts 54a-54c, the turning part 22, the parallel movement table 23, and the nozzle moving mechanism part 51. FIG.

  The organic EL materials stored in the supply sources 541a to 541c are stirred regardless of whether or not they are discharged. For example, the supply sources 541a to 541c stir by storing the organic EL material in a container such as a tank and using a stirrer that rotates a rotor inside the container or by applying vibration to the container. The supply sources 541a to 541c may be stirred by storing the organic EL material in a container made of glass or quartz, immersing the container in a liquid such as water, and applying ultrasonic waves. By stirring in the supply sources 541a to 541c, it is possible to prevent particles in the stored organic EL material from dispersing and collecting particles in the supply sources 541a to 541c due to a cohesive force or the like. A mechanism for stirring the organic EL material stored in the supply sources 541a to 541c corresponds to the first stirring unit of the present invention.

  In addition, each pipe from the supply sources 541a to 541c to the nozzles 521 to 523 (excluding pipes constituting the stirring units 544a to 544c described later) is a pipe member made of PE (polyethylene) or PP (polypropylene). Used. By using a pipe member made of PE or PP instead of Teflon (registered trademark) that makes the organic EL material flowing inside the pipe easy to be charged, the liquid particles are charged by friction between the pipe and the organic EL material. It is possible to prevent the expansion of particles in the organic EL material due to charging.

  The agitation units 544a to 544c agitate the organic EL material that flows immediately before the filters 545a to 545c, disperse the particles in the organic EL material that flows to the filters 545a to 545c, and the particles gather due to cohesive force or the like. Preventing it from growing. That is, the organic EL material is agitated at least twice, passes through the filters 545a to 545c, and is discharged from the nozzles 521 to 523. Hereinafter, the structure of the stirring units 544a to 544c will be described with reference to FIGS. Here, since the structures of the stirring units 544a to 544c are the same, the stirring units 544a to 544c will be collectively referred to as the stirring unit 544. FIG. 3 is a diagram showing a first example of the stirring unit 544 in a schematic structure. FIG. 4 is a diagram illustrating a second example of the stirring unit 544 in a schematic structure. The stirring unit 544 corresponds to the second stirring unit of the present invention.

  In FIG. 3, the stirring unit 544 of the first example includes an ultrasonic wave generation unit 41, an outer tube 42, and an inner tube 43. In FIG. 3, the ultrasonic generator 41 is shown as a block, and the outer tube 42 and the inner tube 43 are shown in a cross-sectional structure cut along the long axis direction. Both the outer tube 42 and the inner tube 43 are constituted by hollow tube members, and are, for example, pipes extending in a cylindrical shape or a rectangular tube shape. The inner tube 43 is penetrated by forming a predetermined gap inside the outer tube 42. The inner pipe 43 is a pipe made of glass or quartz that allows the organic EL material to flow inside, and the flowmeters 543a to 543c and the filters 545a to 545c (see FIG. 2) are connected to each other to supply the organic EL material. Let it flow. A gap formed between the outer tube 42 and the inner tube 43 is filled with a medium W such as water. The ultrasonic generator 41 agitates the organic EL material that flows inside the inner tube 43 via the medium W by applying ultrasonic waves from the outside of the outer tube 42. As described above, in the stirring unit 544 of the first example, by adding ultrasonic waves to the flowing organic EL material and stirring, the particles in the organic EL material are dispersed, and the particles immediately before the filters 545a to 545c are dispersed. It is prevented that it becomes large due to the cohesive force.

  In FIG. 4, the stirring unit 544 of the second example includes a pipe 44 and an element 45. In FIG. 4, in order to show the appearance of the element 45, only the pipe 44 is shown as a cross-sectional structure cut along the long axis direction. The pipe 44 is formed of a hollow pipe member, and extends by connecting the flow meters 543a to 543c and the filters 545a to 545c, respectively. The pipe 44 causes the organic EL material to flow inside. The element 45 is mounted inside the pipe 44. The element 45 has a shape that shears the internal space of the pipe 44 in a spiral manner. For example, a plurality of blade-like elements twisted alternately leftward and rightward with the extending direction of the pipe 44 as an axis. Consists of. The organic EL material that flows inside the pipe 44 to the filters 545a to 545c is divided into two each time it passes through one blade-like element, and is turbulently stirred along the twisted surface of the element. As described above, in the stirring unit 544 of the second example, the flowing organic EL material is turbulently stirred to disperse the particles in the organic EL material, and the particles immediately before the filters 545a to 545c have a cohesive force or the like. It is prevented from gathering and becoming large.

  In the above description, the stirring unit 544 has been described as the first and second examples, but the organic EL material that flows between the flow meters 543a to 543c and the filters 545a to 545c is stirred by another method. It doesn't matter. Further, the configurations of the first and second examples may be connected in series to form the stirring unit 544, and the flow meters 543a to 543c and the filters 545a to 545c may be connected to flow the organic EL material. It doesn't matter. Further, the stirring unit 544 is disposed immediately before the filters 545a to 545c in order to maximize the effect of preventing clogging in the filters 545a to 545c. However, if such maximum effect is not expected, It does not matter if it is placed in the position. For example, agitation units 544a to 544c may be installed between the supply sources 541a to 541c and the pumps 542a to 542c, or between the pumps 542a to 542c and the flow meters 543a to 543c, respectively.

  For the filters 545a to 545c, members made of PE or PP are used in the same manner as the pipes from the supply sources 541a to 541c to the nozzles 521 to 523. By using a member made of PE or PP instead of Teflon (registered trademark) or the like that facilitates charging of the organic EL material passing through the filters 545a to 545c, charging to the organic EL material can be prevented. The expansion of the particles in the organic EL material due to can be prevented.

  Here, on the surface of the substrate P to which the red, green, and blue organic EL materials are applied, a plurality of stripe-shaped grooves corresponding to a predetermined pattern shape to which the organic EL material of each color is to be applied are arranged in parallel. It is formed so that. As the red, green, and blue organic EL materials, for example, organic EL materials having a viscosity that can flow so as to spread in the grooves on the substrate P are used. Specifically, a polymer for each color is used. A type of organic EL material is used. The nozzle unit 52 is supported so as to be rotatable around a predetermined support shaft, and can be adjusted around the support shaft under the control of the control unit 3 to adjust the coating pitch interval of each color. In addition, the hole diameter for discharging the organic EL material in the nozzles 521 to 523 is about several tens μm smaller than the width of the groove formed in the substrate P, for example, 10 to 70 μm.

  Based on the position and direction of the substrate P placed on the stage 21, the control unit 3 adjusts the angle of the swivel unit 22 so that the direction of the groove formed in the substrate P becomes the X-axis direction, and the coating is performed. , That is, a coating start position at which coating is started at one end side of the groove formed in the substrate P is calculated. The application start position is an upper space of one liquid receiving portion 53. Then, the control unit 3 drives the parallel movement table 23 and the nozzle movement mechanism unit 51 as described above.

  At the application start position, the control unit 3 instructs the pumps 542a to 542c to start discharging the organic EL material from the nozzles 521 to 523. At this time, according to the moving speed of the nozzles 521 to 523, the control unit 3 makes the application amount of the organic EL material uniform at each point of the stripe-shaped groove and discharges the organic EL material in a liquid column state. The application amount is controlled, and flow rate information from the flow meters 543a to 543c is fed back and controlled. The control unit 3 controls the supply sources 541a to 541c and the stirring units 544a to 544c to stir the organic EL material. The control unit 3 moves the nozzle unit 52 to the guide member 511 so that the organic EL material flows along the groove on the substrate P while flowing the organic EL material into the groove on the substrate P. It is controlled to move along. By this operation, red, green, and blue organic EL materials discharged in a liquid column state are simultaneously poured into the respective grooves.

  When the control unit 3 is positioned on the other liquid receiving portion 53 fixed on the outside of the other end portion of the groove across the substrate P, the control unit 3 moves the organic EL material from the nozzles 521 to 523. While the discharge is continued, the movement of the nozzle unit 52 by the nozzle moving mechanism 51 is stopped. By this one movement, the application of the organic EL material to the grooves for three rows is completed.

  Next, the control unit 3 pitches the translation table 23 by three rows of grooves in the Y-axis direction so that the organic EL material can be applied to the next three rows of grooves. When the control unit 3 positions the nozzle unit 52 across the substrate P in the opposite direction from the upper space of the other liquid receiving unit 53 and is positioned on the one liquid receiving unit 53, the control unit 3 organics from the nozzles 521 to 523. While the discharge of the EL material is continued, the movement of the nozzle unit 52 by the nozzle moving mechanism 51 is stopped. By this second movement, the application of the organic EL material to the next three rows of grooves is completed. By repeating such an operation, the organic EL material of each color is poured into each groove. In this way, a so-called stripe arrangement is formed in which red, green, and blue organic EL materials are arranged in the order of red, green, and blue in each stripe-like groove.

  As described above, the coating apparatus according to the present embodiment stirs the coating liquid before discharge in the coating apparatus at least twice. As a result, the concentration of the coating solution is stable, the particle diameter in the coating solution is the same, the ratio collected by the filter is constant, and coating uniformity such as film thickness is improved. Further, since the clogging of the nozzle and the filter is reduced, the continuous operation time of the coating apparatus can be extended. Furthermore, since the frequency of replacement of the filter itself is reduced, cost reduction and maintenance time can be expected. In addition, by using PE or PP instead of Teflon (registered trademark) as a material for piping, liquid particles can be prevented from being charged due to friction between the piping and the organic EL material, and particles in the organic EL material due to charging can be prevented. Can be prevented. Further, by using PE or PP as the filter material instead of Teflon (registered trademark), charging of the liquid particles can be prevented, and the amount of unnecessary particles collected by the filter can be reduced.

  In the above-described embodiment, the manufacturing apparatus for an organic EL display device using an organic EL material or a hole transport material as a coating liquid has been described as an example. However, the present invention can also be applied to other coating apparatuses. . For example, the present invention can be applied to an apparatus for applying a resist solution or a SOG (Spin On Glass) solution.

  In the embodiment described above, the flow rate of the organic EL material to be discharged is detected by detecting the flow rate of the organic EL material to the nozzles 521 to 523, but the pressure of the organic EL material is detected by a pressure sensor or the like. The flow rate of the organic EL material detected by the means and discharged from the nozzles 521 to 523 may be feedback controlled.

  In the above-described embodiment, the organic EL material is poured into each groove of the substrate P by a set of three nozzles 521 to 523 for red, green, and blue. A plurality of sets of ˜523 may be provided and the organic EL material may be poured into each groove of the substrate P. In this case, if a stirring portion is provided for each nozzle, the effect of the present invention can be obtained while reducing the time required for the coating process.

  The coating apparatus according to the present invention can improve coating uniformity, and is useful as an apparatus for discharging various coating liquids from nozzles.

The top view and front view which show the principal part schematic structure of the manufacturing apparatus 1 of the organic electroluminescence display which concerns on one Embodiment of this invention. The block diagram which shows the control function and supply part of the manufacturing apparatus 1 of the organic electroluminescence display of FIG. The figure which shows the 1st example of the stirring part 544 of FIG. 2 by schematic structure The figure which shows the 2nd example of the stirring part 544 of FIG. 2 by schematic structure

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Manufacturing apparatus 2 of organic EL display apparatus ... Substrate mounting apparatus 21 ... Stage 22 ... Turning part 23 ... Parallel movement table 24 ... Guide receiving part 25, 511 ... Guide member 3 ... Control part 5 ... Organic EL application | coating mechanism 51 ... Nozzle moving mechanism 52 ... Nozzle units 521, 522, 523 ... Nozzle 53 ... Liquid receiving part 54 ... Supply part 541 ... Supply source 542 ... Pump 543 ... Flow meter 544 ... Stirring part 41 ... Ultrasonic wave generating part 42 ... Outer tube 43 ... Inner pipe 44 ... Piping 45 ... Element 545 ... Filter

Claims (5)

A supply source for storing and supplying the coating liquid;
A pump for taking out the coating liquid stored in the supply source and increasing the pressure;
A nozzle for discharging the coating liquid whose pressure has been increased by the pump from its tip,
A first stirring unit for stirring the coating solution stored in the supply source;
A coating apparatus comprising: a second stirring unit that stirs again the coating liquid from the time when the pump is taken out and discharged from the nozzle. The coating apparatus further includes a filter for removing foreign matter in the coating liquid from when the pump is taken out until it is discharged from the nozzle,
The coating apparatus according to claim 1, wherein the second stirring unit is provided in a pipe connected to the filter.   The said 2nd stirring part is a coating device of Claim 2 containing the ultrasonic wave generation part which applies an ultrasonic wave with respect to the coating liquid which flows through the said piping inside.   The second agitation unit includes an element that is attached to the inside of the pipe and shears the pipe internal space in a spiral shape that is alternately twisted in the left direction and the right direction about the extending direction of the pipe. 2. The coating apparatus according to 2. The coating apparatus according to claim 1, wherein the coating liquid is at least one of an organic EL material and a hole transport material for manufacturing an organic EL display device.

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