CN106040530A - Coating apparatus and coating method - Google Patents
Coating apparatus and coating method Download PDFInfo
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- CN106040530A CN106040530A CN201610144177.8A CN201610144177A CN106040530A CN 106040530 A CN106040530 A CN 106040530A CN 201610144177 A CN201610144177 A CN 201610144177A CN 106040530 A CN106040530 A CN 106040530A
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- Prior art keywords
- coating
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- different
- screw rod
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/1044—Apparatus or installations for supplying liquid or other fluent material to several applying apparatus or several dispensing outlets, e.g. to several extrusion nozzles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0208—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
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- Coating Apparatus (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Wood Science & Technology (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
Abstract
The present invention two types of liquid which tend to agglomerate when mixed, are mixed without causing agglomeration to form a thin film applied to the substrate. A coating apparatus 1 includes a pipe 11a for supplying the coating solution a, a pipe 11b for supplying the coating liquid b, a mixing device 30 for mixing the coating solution a and the coating liquid b from the pipe 11a and 11b provided with a filtering device 40 for filtering the mixed coating solution c generated in the mixing device 30, and a mouthpiece 20 which slits 21 are formed for discharging the mixed filtered mixed coating solution c, mixed coating from the slit 21 the mixture coating solution c was applied to the substrate 2 by discharging liquid c, to form a thin film on the substrate 2.
Description
Technical field
The present invention relates to a kind of apparatus for coating, it is coated with by discharging from the slit being formed at mouthpiece
Coating solution on substrate, especially, is related to being coated with two kinds of coating fluid mixing by cloth liquid
The apparatus for coating of cloth.
Background technology
Including liquid crystal panel, organic EL panel and the contact panel used with these panel combinations
Etc. display device, in the fabrication process, the substrate with display function forms multiple thin film.
Having photoetching process as one of main method forming these thin film, the method will be formed into containing thin film
Point coating solution on the substrate such as glass substrate or thin film, be then dried, expose,
Development.As for being coated with the apparatus for coating of the coating fluid forming described thin film, it is known that have and claimed
The apparatus for coating for gap nozzle coating machine (with reference to such as patent documentation 1), this apparatus for coating includes
Mouthpiece, is formed with the slit for discharging coating fluid on described mouthpiece.This apparatus for coating bag
Include the storage tank for storing coating fluid and for supplying the coating fluid in described storage tank to mouthpiece
The pump of slit.
The slit of mouthpiece longer ground slit on the width of substrate, such as, can be by making to connect
Mouth pipe discharges coating fluid from slit while moving relative to the substrate level placed on the table,
Form the thin film (film) of coating fluid the most on the surface of the substrate.
Utilize described apparatus for coating can form various thin film, but as certain conducting film, right
For getting started coagulation dry liquid at room temperature with air contact time, need feed pipe
Take measures, for example, it is desired to air leakage is taken measures.
But, about the coating fluid that coating fluid is two liquid mixed forms for forming conducting film, deposit
As long as begin to the coating fluid of coagulation in a mixing.In this case, take to improve pipeline airtight
Property measure lose meaning completely, it is therefore desirable to take new measure, i.e. start coating before
Mixed for two nights.
But, what is called mixed two liquid before starting coating, then need have the interface of slit
Mixing part is set near pipe.This means that mixing and the mixing time of two liquid are insufficient, it is possible to nothing
Method stirs fully and mixes.On the other hand, when utilizing the agitator tank with sufficient incorporation time
Time, even if such as described agitator tank is set near mouthpiece, but owing to mixing time is elongated
And the probability starting coagulation increases.
Accordingly, it is desirable to provide a kind of apparatus for coating including agitating device, this agitating device can be answered
Coating fluid to two liquid mixed types, even and if also being able to make two when arranging mixing part near mouthpiece
Stirring and the mixing of liquid are fully carried out.
Prior art literature
Patent documentation
Patent documentation 1: JP 2000-157906 publication
Summary of the invention
The present invention needs the problem solved
It is an object of the invention to provide a kind of apparatus for coating, even if using the coating of two liquid mixed types
Liquid, also will not occur coagulation to stablize especially with the quick coating fluid of mixed coagulation
Be coated.
For solving the technical scheme of problem
The apparatus for coating of the present invention, it is characterised in that in described apparatus for coating, by having
The mouthpiece of shape of slit outlet, is coated with the coating fluid being supplied to by coating liquid supplying device
Cloth is on flake substrate surface, thus forms thin film on the substrate, by described coating
The described coating fluid that liquid supplying device is supplied to is made up of two kinds of different liquid, described apparatus for coating
Including: mixing arrangement, mix the coating fluid being made up of with stirring the liquid that the two is different；Cross
Filter device, filters the mixing coating fluid being supplied to from described mixing arrangement；Coating fluid supplies
To pump, described defecator the described mixing coating fluid filtered is supplied to described mouthpiece.
According to the apparatus for coating of the present invention, even if forming by two kinds of different liquid before the coating
Coating fluid carry out mixing and stirring after when being coated, it is also possible to carried out before starting coating
After mixing and stirring, then through defecator and coating fluid supply pump, and by having slit
Mouthpiece, is coated substrate.It addition, the coating liquid supplying device of the present invention, its feature
It is, each self-storing mechanism of the liquid that to have liquid feeding device different with being respectively used to two kinds and pipeline,
The pipeline of two kinds of different liquid is connected to mixing arrangement, and the different liquid of the two is simultaneously
It is transported in described mixing arrangement.
By this structure, two kinds of different liquid can be delivered concurrently in mixing arrangement, it is not necessary to thing
First mix.
It addition, the mixing arrangement of the present invention, it is characterised in that described mixing arrangement includes two
Screw rod, said two screw spiral direction is different and external diameter is identical with pitch, said two screw rod
Installation interval less than the aggregate value of each screw rod radius, said two screw rod has common exterior
Portion, to described defecator while thus mixing the liquid that the two is different and stir
Conveying.
By being arranged such mixing arrangement, it is possible to effectively mix same with stir two kinds of different liquid
Time it is carried.
It addition, the mixing arrangement of another embodiment of the present invention, it is characterised in that described mixed
Locking device includes two screw rods, and said two screw spiral direction is different and external diameter is identical with pitch,
The installation interval of said two screw rod is more than the aggregate value of each screw rod radius, and said two screw rod has
Common externally mounted part, said two screw rod is respectively provided with the driving being connected to respective driving means
Axle, to described defecator while thus mixing the liquid that the two is different and stir
Conveying.
By making the screw rod of mixing arrangement so rotate, though two kinds that are carried out mixing not
With liquid viscosity height time, it is also possible to effectively by defeated for this liquid while liquid is mixed and stirs
Deliver in next device.
It addition, the coating process of the present invention, it is characterised in that to from different storage device warps
The different two kind liquid being supplied to by different feed paths, by having rabbling mechanism in inside
Mixing arrangement carry out mixing and stirring, to mixed by described mixing arrangement and stir and
The mixing coating fluid formed, after being filtered by defecator, by fluid supply pump to coating
Unit feeding, and by the mouthpiece with slit of apparatus for coating to laminar base plate coating
Described mixing coating fluid.
According to the coating process of the present invention, even if will be come by two kinds of different liquid of mixing and stirring
When the mixing coating fluid formed is coated, it is also possible to effectively mix and stir the two not
Same liquid, and, supplied filtered the described mixing coating fluid formed by defecator after
It is given to apparatus for coating, and is coated on laminar substrate via the mouthpiece of apparatus for coating, by
This, it is possible to the bubble being likely to be formed when removing mixing or foreign body such that it is able at described thin slice
The film of high-quality is formed on shape substrate.
The effect of invention
Apparatus for coating according to the present invention and coating process, though be coated with on substrate by mixing and
The coating fluid that two kinds of different liquid of stirring is formed, it is also possible to effectively mix and stir two kinds not
Same liquid, and, it is possible to issuable bubble or foreign body etc. when removing mixing and stirring,
It is thus possible to form the coated film of high-quality on substrate.
Accompanying drawing explanation
Fig. 1 is the skeleton diagram of the embodiment of the apparatus for coating representing the present invention.
Fig. 2 is the general profile chart of the structure of the mixing arrangement for the present invention is described.
Fig. 3 is that the outline of the structure of the mixing arrangement for another embodiment of the present invention is described cuts open
View.
Fig. 4 is the general profile chart of the coating fluid supply pump of the apparatus for coating being used in the present invention.
Fig. 5 is the summary construction diagram of the application examples of the apparatus for coating representing the present invention.
Detailed description of the invention
Hereinafter, referring to the drawings embodiments of the present invention are illustrated.
Fig. 1 is the skeleton diagram of an embodiment of the apparatus for coating representing the present invention.Apparatus for coating 1
Including: workbench 2, place the flake substrate W such as glass, and come base by vac sorb etc.
Plate is fixed；Mouthpiece 3, is formed with slit therein；Driving means, makes mouthpiece 3 phase
Substrate W on workbench 2 is freely carried out independently move horizontally (X-direction moves) and hang down
(Z-direction moves) is moved in translation.It addition, described apparatus for coating 1 also includes as feed flow portion: storage tank
9a and storage tank 9b, described storage tank 9a store coating fluid a, described storage tank 9b and store coating fluid b；Pipe
Road 7a and pipeline 7b (comprises the pipeline from storage tank 9a and storage tank 9b to mixing arrangement 4), respectively
Supply is by coating fluid a different with two kinds that storage tank 9b is supplied respectively to for storage tank 9a and coating fluid b；Mixed
Locking device 4, mixes and stirs coating fluid a and coating fluid b, thus form mixing coating fluid c；Pipe
Road 7c (includes from mixing arrangement 4 to the pipeline of mouthpiece 3), is coated with from mixing arrangement 4 conveying mixing
Cloth liquid c；Defecator 5, filters the mixing coating fluid c carried from mixing arrangement 4；With
And liquid feeding device, it is supplied to mouthpiece 3 by by the mixing filtered by defecator 5 coating fluid c
Pump 8 grade constitute.
In the present embodiment, for filling from the liquor charging of storage tank 9a and storage tank 9b to mixing arrangement 4
Put not special provision.Therefore, can by the force feed that presses to storage tank 9a and storage tank 9b, or
Person can arrange not shown pump, and carrys out liquor charging via described pump.It addition, as long as no particularly needing
Want, in the explanation of embodiment, by two kinds of different coating fluid a and coating fluid b with 1 to 1
The situation that ratio carries out mixing illustrates as premise.
In apparatus for coating 1, will be formed and at defecator 5 in mixing arrangement 4 by pump 8
The middle mixing coating fluid c filtered is supplied to mouthpiece 3, and makes mouthpiece 3 hang down by driving means
Straight decline, so that the parallel gap between the leading section of mouthpiece 3 and laminar substrate W reaches
To predetermined value, then by discharging mixing coating from slit while being moved horizontally by mouthpiece 3
Liquid c, is formed in the substrate W surface being fixed on workbench 2 by not shown adsorbing mechanism
The thin film (film) formed by mixing coating fluid c.Now, the moving direction of mouthpiece 3 is coating
Direction (X-direction).
It addition, described apparatus for coating 1 includes the action of all parts for controlling apparatus for coating 1
Control device 6, described control device 6 except control described mouthpiece 3 movement in addition to, also control
The subsidiary action of system coating, e.g., the driving of pump 8, the detailed of coating action control and arrange to painting
Put 1 move into substrate W and take out of substrate W etc. from apparatus for coating 1.
Fig. 2 is the general profile chart of the mixing arrangement of the apparatus for coating representing the present invention.Mixing arrangement 4
By threaded shank 41, liquid inlet module 42, the liquid entrance 43a that is connected with pipeline 7a and pipeline 7b respectively
And liquid entrance 43b and liquid export department 45 and liquid outlet 46 composition.Further, threaded shank 41 by
Screw rod 41a that the hand of spiral therein is different and screw rod 41b and outer cylindrical portion 44 are constituted.?
In the present embodiment, the external diameter of screw rod 41a and screw rod 41b is set as identical but it also may according to
The ratio of two kinds of compositions of mixing coating fluid c, is set as the external diameter of screw rod 41a and screw rod 41b
Different.It addition, the pitch of screw rod 41a and screw rod 41b can be according to mixed coating fluid a and painting
The characteristic of cloth liquid b arbitrarily sets.Such as, for Combination and the liquid of stirring property difference, the most permissible
Carry out replies such as pitch being narrowed.
The installation interval of screw rod 41a and screw rod 41b is set smaller than the aggregate value of each screw rod radius
Value.It addition, threaded shank 41 is configured to there is not the overlapping part of screw rod 41a and screw rod 41b, and
Wall is not had between two screw rods.Therefore, two kinds of different coating fluid a and coating fluid b are along screw rod
Carried while Stirring, simultaneously because there is no wall between screw rod, so while Xuan Zhuaning
The liquid carried easily is mixed.In the present embodiment, outer cylindrical portion 44 is connected in two cylinders
Shape, but in order to easily mix, its shape can also be set as other shapes, such as Long Circle.
In this case, the contact area of two mixed liquid increases, it is possible to be easier to make for mixing.
Further, the screw rod 41a and screw rod 41b of the present embodiment has what lap when arranging was cut
Shape, but can by take axially to be in staggered configuration each screw rod etc. measure comes can be by spiral shell
Bar is contoured to the circular shape not having cutting part.
Below, for using the advantage of two screw rods to be described in detail in mixing arrangement.Generally,
The agitating device utilizing screw rod has the mixing nozzle of such as resin injection moulding injection (mo(u)lding) machine.?
This, differring primarily in that of the mixing nozzle of injection (mo(u)lding) machine and the mixing arrangement of the present invention, mixing
Nozzle puts into the solid such as powder body or granule, but the mixing arrangement of the present invention supplies two kinds not
Same liquid.Therefore, its function is the most different, and the resin material internal through it is carried out by mixing nozzle
It is ejected on mould after heating for dissolving, but the mixing arrangement of the present invention is only different by two kinds
Liquid carries out mixing and stirring.The former material is a kind of material, as long as therefore in course of conveying all
Melt evenly, but the mixing arrangement of the present invention needs suitably to be mixed by two liquid and stir
Mix.
Here, the mixing nozzle of injection (mo(u)lding) machine substantially has a screw rod, this structure for
Realize above-mentioned purpose, i.e. uniform dissolution resin material and there is sufficient function.But, when with one
During individual screw rod transmission two liquid, it is impossible to two liquid are sufficiently mixed and stirs, thus at the beginning of keeping
The probability carried under the state of mixing that begins is the highest.In order to prevent this phenomenon, need two kinds of liquid
It is sufficiently carried out mixing and stirring.The screw arrangement of the mixing arrangement of the present invention, due to do not have by
The structure of the two liquid isolation carried while being rotated by screw rod, therefore, in the effect of centrifugal force
Under attempt diffusion, result can carry out mixing and stirring continuously.
Then, the function of mixing arrangement 4 is illustrated.Liquid inlet module at mixing arrangement 4
Liquid entrance 43a and liquid entrance 43b, described liquid entrance 43a and liquid entrance 43b it is provided with logical in 42
Piping respectively with store coating fluid a storage tank 9a and storage coating fluid b storage tank 9b be connected.
It is thus possible to prevent coating fluid a and coating fluid b to be mingled in one before being mixed in mixing arrangement 4
Rise.Then, coating fluid a and coating fluid b is transported to threaded shank 41, and along screw rod 41a and
Screw rod 41b is mutually mixed while being rotated conveying and stirs, thus forms mixing coating fluid c.?
After, mixing coating fluid c is transported to liquid export department 45, and from liquid outlet 46 via pipeline 7c quilt
It is transported to defecator 5.
Here, liquid entrance 43a and liquid entrance 43b tilts to join relative to screw axis in an embodiment
Put but it also may be configured in parallel.It addition, in an embodiment, liquid outlet 46 is in entrance and exit
The shape varied in size, but the shape that its shape can also be parallel in entrance and exit.Further,
The section shape of liquid outlet 46 can also have than circular and is not result in discharging irregular other
Shape, e.g., ellipse, Long Circle, rectangle etc., its shape can be come according to the characteristic of coating fluid etc.
Use suitable shape.
Fig. 3 is the general profile chart of another embodiment of the mixing arrangement representing the present invention.This enforcement
The mixing arrangement 4 of example by threaded shank 47, liquid inlet module 42, respectively with pipeline 7a and pipeline 7b
The liquid entrance 43a connected and liquid entrance 43b and liquid export department 45 and liquid outlet 46 are constituted.And
And, threaded shank 47 is by the different circular screw rod 47a of the hand of spiral therein and circular screw rod
47b, drive shaft 48, and lid 49 constitutes.The screw rod 47a and screw rod 47b of the present embodiment is certainly
By rotating, and it is combined in not shown driving means.It addition, in the present embodiment, screw rod 47a
It is set to identical with the external diameter of screw rod 47b but it also may be two kinds according to mixing coating fluid c
The ratio of composition, is set as difference by the external diameter of screw rod 41a and screw rod 41b.Further, screw rod 47a
Arbitrarily can set according to the characteristic of mixed liquid with the pitch of screw rod 47b.Such as, for mixing
Property and the liquid of stirring property difference, preferably can carry out narrowing pitch waiting and tackle.
The screw rod 47a and screw rod 47b of the present embodiment are combined in not shown driving means, therefore exist
In the present embodiment, mixing arrangement 4 can be made to have liquor charging by making screw rod 47a and screw rod 47b rotate
Driving force.Thus, compared with the situation of the liquor charging power depended on outside mixing arrangement 4, it is possible to suitable
Should larger range of liquid.In the case of i.e., for using high viscosity liquid, by screw rod 47a and screw rod
The carrying capacity of 47b, can not only more effectively mix and stir liquid, and can also stably liquor charging.
Further, even for using the situation of the high liquid of compendency, in order to quickly to mouthpiece liquor charging, can
Liquor charging speed is improved by setting screw rod rotation number.
The installation interval of screw rod 47a and screw rod 47b is set greater than the aggregate value of each screw rod radius
Value.Its objective is owing to screw rod 47a and screw rod 47b rotates in the present embodiment, it is therefore desirable to anti-
Only influence each other between screw rod.Certainly, for the structure being independent of each other mutually, such as, by screw rod 47a
When being formed as identical pitch with screw rod 47b and be in staggered configuration half pitch, can be by installation interval
It is set smaller than the value of the aggregate value of each screw rod radius.
Such as the example of Fig. 2, liquid entrance 43a and liquid entrance 43b is relative to screw rod in an embodiment
Axis can inclined or configured in parallel.It addition, liquid entrance 43a and liquid enter in an embodiment
Mouth 43b is arranged on the central side of mixing arrangement 4 but it also may be arranged on screw rod 47a and screw rod 47b
Outside.But, it is no matter which kind of configuration, needs to enter drive shaft 48 and liquid entrance 43a and liquid
Mouth 43b and liquid outlet 46 are configured to not interfere with each other.Further, such as the embodiment of Fig. 2, liquid
Outlet 46 shapes varied in size in entrance and exit, but liquid outlet can also be in entrance and exit
Parallel shape.Further, the section shape of liquid outlet 46 is than circular, it is also possible to be formed as
It is not resulted in discharging other uneven shapes, e.g., ellipse, Long Circle, rectangle etc., its shape
The shape being suitable for can be used according to the characteristic of coating fluid etc..
As it is shown in figure 1, the mixing coating fluid c formed in mixing arrangement is carried via pipeline 7c
To defecator 5.Defecator is made up of not shown filter component and housing therein.Cross
The purpose of filter component of filter device 5 is to remove at the mixing of mixing arrangement 4 and whipping process
In issuable bubble and the solid foreign materials that generated.When by mixing shown in Fig. 2 or Fig. 3
When locking device mixing and two kinds of different coating fluid a and coating fluid b of stirring, by screw mixes and
The pressure producing local during stirring is uneven, and the gas componant being included in liquid can be easily separated and possibility
Bubble can be produced.Or, by with the contacting of screw rod, the easily local attachment of the solid constituent in liquid
And accumulation, these materials can become solid foreign materials when peeling off.The filter of defecator 5 can go
Bubble coating quality being had a negative impact except these or the solid foreign materials generated.Here,
The structure and material of filter component can determine according to the kind etc. of mixed liquor.It addition, filtering
Device 5 is provided with not shown deaerating mechanism, can be by described deaerating mechanism by filter component institute
It is outside that the bubble of capture is discharged to defecator 5.
Then, mixing coating fluid c is transported to the pump 8 shown in Fig. 1.To the flake shown in Fig. 1
Substrate on when being coated, shown in the embodiment of the general profile chart that pump 8 preferably has Fig. 4
The syringe pump of piston structure or other forms can circulate the pump discharging ormal weight, such as tubulose
Membrane pump (Tubephragm pump) (not shown) etc..In the fig. 4 embodiment, pump 8 by
Cylinder body 81, piston 82, it is close to piston 82 and seals the rolling between piston 82 and cylinder body 81
Barrier film (rolling diaphragm) 83 and upper case 84 are constituted, and at upper case 84
It is provided with suction inlet 84a and outlet 84b.Further, in cylinder body 81, be used for preventing rolling every
Film 83 produces the decompression steam vent 85 of the deformation such as wrinkling and is arranged on the driving side of piston, by very
Suction is drawn and is given tension force to rolling diaphragm 83 constantly.
Then, the function of pump 8 is illustrated.With the work that substrate W is arranged on apparatus for coating 1
While sequence, the piston 82 of pump 8 by not shown driving means to away from upper case 84
Not shown primary importance moves, and thus attracts mixing coating fluid c.Now, rolling diaphragm 83 is with living
Plug moves together.Then, when proceeding by coating, piston 82 is near upper case 84
The not shown second position moves, and thus discharges the ormal weight needed for coated substrates W.Coating terminates
After, substrate W is transported to the outside of apparatus for coating 1 by not shown conveyer device.When next
When individual substrate is moved to, repeat above-mentioned operation.
The mixing coating fluid c discharged by pump 8 is transported to the mouthpiece 3 of apparatus for coating 1, and warp
It is discharged on substrate, form coated film on substrate W by the slit of mouthpiece 3.Above-mentioned one
In series operation, the conveying for coating fluid can be by not shown valve appropriately configured on pipeline
It is controlled.Such as, by arranging valve before and after pump 8, the unnecessary of coating fluid is prevented
Flow out or flow into.Form for valve, it is preferable that suitably select according to the kind etc. of coating fluid
Select.It addition, above-mentioned a series of operation is to be controlled by control device 6.
Although the apparatus for coating of the present invention is illustrated according to above-described embodiment, but the present invention
It is equally applicable to other apparatus for coating than the above described.Such as, in apparatus for coating 1,
Although using what mouthpiece 3 was scanned on the substrate W being positioned on stationary work-table 2
Mode, but in contrast, it would however also be possible to employ the mode of the fixing also movable workbench in mouthpiece 3 position.
Further, the present invention is also applicable to following floating upper coating system, and this floating upper coating system is: substrate does not has
Have fixing on the table, but substrate Fu Shang mechanism is set on workbench 2, at workbench
Front and back it is also provided with same Fu Shang mechanism.
Further, in addition to flake substrate, the present invention could be applicable to the summary construction diagram of Fig. 5
The shown coating system using continuous substrate.In the coating system of Fig. 5, pump 8 is if such as
Type is discharged in circulation shown in Fig. 4, then be not suitable for owing to cannot discharge coating fluid continuously.Therefore,
Pump 8 needs to use the pump that can discharge continuously, or, need as shown in Figure 3 by mixing arrangement 4
Double as the type of pump.But, in the case of substrate intermittent delivery, it is possible to use shown in Fig. 4
Circulation excavationg pump.As to whether use mixing arrangement 4 to double as pump still use special pump, can
Kind according to coating fluid suitably selects.Such as, during the viscosity height of mixed coating fluid, preferably
Special pump is set.It addition, when using the form of continuous excavationg pump, also should come according to coating fluid
Suitably select.
During as it has been described above, use the apparatus for coating of the present invention, even if mixed to various substrate W coating
In the case of closing the coating fluid of two kinds of different liquid, it is also possible to the coagulation not producing mixed liquor is coated with
Cloth.
Description of reference numerals
1: apparatus for coating 2: workbench
3: mouthpiece 4: mixing arrangement
5: defecator 7: pipeline
8: pump 41: threaded shank
41a: screw rod 41b: screw rod
42: liquid inlet module 43a: liquid entrance
43b: liquid entrance 44: outer cylindrical portion
45: liquid export department 46: liquid exports
W: substrate
Claims (5)
1. an apparatus for coating, it is characterised in that
In described apparatus for coating, by having the mouthpiece of shape of slit outlet, will pass through
The coating solution that coating liquid supplying device is supplied to is on flake substrate surface, thus in institute
State on substrate formation thin film, the described coating fluid being supplied to by described coating liquid supplying device by
Two kinds of different liquid compositions, described apparatus for coating includes:
Mixing arrangement, mixes the coating fluid being made up of with stirring the liquid that the two is different；
Defecator, filters the mixing coating fluid being supplied to from described mixing arrangement；
Coating fluid supply pump, by the described mixing coating fluid that filtered by described defecator to described
Mouthpiece supplies.
Apparatus for coating the most according to claim 1, it is characterised in that
The liquid that described coating liquid supplying device has liquid feeding device with to be respectively used to the two different
Each self-storing mechanism and pipeline, the pipeline of the liquid that the two is different is connected to described mixed
Locking device, and the different liquid of the two is fed simultaneously in described mixing arrangement.
Apparatus for coating the most according to claim 1 and 2, it is characterised in that
Described mixing arrangement includes two screw rods, and said two screw spiral direction is different and external diameter
Identical with pitch, the installation interval of said two screw rod is less than the aggregate value of each screw rod radius, described
Two screw rods have common externally mounted part, thus mix the liquid that the two is different and stir
Carry to described defecator while mixing.
Apparatus for coating the most according to claim 1 and 2, it is characterised in that
Described mixing arrangement includes two screw rods, and said two screw spiral direction is different and external diameter
Identical with pitch, the installation interval of said two screw rod is more than the aggregate value of each screw rod radius, described
Two screw rods have common externally mounted part, and said two screw rod is respectively provided with and is connected to respective driving
The drive shaft of dynamic device, while thus the liquid that the two is different being mixed and stirs to
Described defecator carries.
5. a coating process, it is characterised in that
To different two kind being supplied to via different feed paths from different storage devices
Liquid, carries out mixing and stirring, to passing through by having the mixing arrangement of rabbling mechanism in inside
State the mixing coating fluid that mixing arrangement carries out mixing and stirring and formed, carried out by defecator
After filtration, by fluid supply pump to apparatus for coating supply, and by apparatus for coating there is slit
Mouthpiece to described in laminar base plate coating mix coating fluid.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-074924 | 2015-04-01 | ||
| JP2015074924A JP2016193411A (en) | 2015-04-01 | 2015-04-01 | Coating applicator and application method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106040530A true CN106040530A (en) | 2016-10-26 |
Family
ID=57162165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610144177.8A Pending CN106040530A (en) | 2015-04-01 | 2016-03-14 | Coating apparatus and coating method |
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| Country | Link |
|---|---|
| JP (1) | JP2016193411A (en) |
| KR (1) | KR20160118130A (en) |
| CN (1) | CN106040530A (en) |
| TW (1) | TW201636115A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106513245A (en) * | 2016-12-27 | 2017-03-22 | 昆山乐凯锦富光电科技有限公司 | Coating system for production of optical films |
| CN109157985A (en) * | 2018-10-31 | 2019-01-08 | 黄山学院 | A kind of separation membrane mixing film forming apparatus |
| CN110339971A (en) * | 2019-06-27 | 2019-10-18 | 西安奕斯伟硅片技术有限公司 | Glue stations |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110893389A (en) * | 2018-09-12 | 2020-03-20 | 上海锺炜科技工程有限公司 | Active stirring and mixing device |
-
2015
- 2015-04-01 JP JP2015074924A patent/JP2016193411A/en active Pending
-
2016
- 2016-03-02 KR KR1020160025105A patent/KR20160118130A/en unknown
- 2016-03-07 TW TW105106883A patent/TW201636115A/en unknown
- 2016-03-14 CN CN201610144177.8A patent/CN106040530A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106513245A (en) * | 2016-12-27 | 2017-03-22 | 昆山乐凯锦富光电科技有限公司 | Coating system for production of optical films |
| CN109157985A (en) * | 2018-10-31 | 2019-01-08 | 黄山学院 | A kind of separation membrane mixing film forming apparatus |
| CN110339971A (en) * | 2019-06-27 | 2019-10-18 | 西安奕斯伟硅片技术有限公司 | Glue stations |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2016193411A (en) | 2016-11-17 |
| KR20160118130A (en) | 2016-10-11 |
| TW201636115A (en) | 2016-10-16 |
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Application publication date: 20161026 |