JP2006194695A5 - - Google Patents

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Publication number
JP2006194695A5
JP2006194695A5 JP2005005501A JP2005005501A JP2006194695A5 JP 2006194695 A5 JP2006194695 A5 JP 2006194695A5 JP 2005005501 A JP2005005501 A JP 2005005501A JP 2005005501 A JP2005005501 A JP 2005005501A JP 2006194695 A5 JP2006194695 A5 JP 2006194695A5
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JP
Japan
Prior art keywords
position control
scale
encoder
optical
output signal
Prior art date
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Application number
JP2005005501A
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English (en)
Japanese (ja)
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JP2006194695A (ja
JP4632423B2 (ja
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Priority to JP2005005501A priority Critical patent/JP4632423B2/ja
Priority claimed from JP2005005501A external-priority patent/JP4632423B2/ja
Publication of JP2006194695A publication Critical patent/JP2006194695A/ja
Publication of JP2006194695A5 publication Critical patent/JP2006194695A5/ja
Application granted granted Critical
Publication of JP4632423B2 publication Critical patent/JP4632423B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2005005501A 2005-01-12 2005-01-12 位置制御装置、位置制御方法及び光学装置 Expired - Fee Related JP4632423B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005005501A JP4632423B2 (ja) 2005-01-12 2005-01-12 位置制御装置、位置制御方法及び光学装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005005501A JP4632423B2 (ja) 2005-01-12 2005-01-12 位置制御装置、位置制御方法及び光学装置

Publications (3)

Publication Number Publication Date
JP2006194695A JP2006194695A (ja) 2006-07-27
JP2006194695A5 true JP2006194695A5 (zh) 2008-02-28
JP4632423B2 JP4632423B2 (ja) 2011-02-16

Family

ID=36800897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005005501A Expired - Fee Related JP4632423B2 (ja) 2005-01-12 2005-01-12 位置制御装置、位置制御方法及び光学装置

Country Status (1)

Country Link
JP (1) JP4632423B2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5125320B2 (ja) * 2007-08-28 2013-01-23 パナソニック株式会社 エンコーダの補正値制御方法
JP5439163B2 (ja) * 2009-12-25 2014-03-12 オリンパス株式会社 光学式信号出力装置の信号処理装置及び光学式変位検出装置
JP2014098666A (ja) * 2012-11-15 2014-05-29 Canon Inc インクリメンタルエンコーダ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5978917U (ja) * 1982-11-17 1984-05-28 東京磁気印刷株式会社 磁気スケ−ル
US5929789A (en) * 1997-04-09 1999-07-27 Hewlett-Packrd Company Single channel incremental position encorder with incorporated reference mark

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