JP2006189612A5 - - Google Patents
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- Publication number
- JP2006189612A5 JP2006189612A5 JP2005001366A JP2005001366A JP2006189612A5 JP 2006189612 A5 JP2006189612 A5 JP 2006189612A5 JP 2005001366 A JP2005001366 A JP 2005001366A JP 2005001366 A JP2005001366 A JP 2005001366A JP 2006189612 A5 JP2006189612 A5 JP 2006189612A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005001366A JP2006189612A (ja) | 2005-01-06 | 2005-01-06 | バリア膜形成用材料及びそれを用いたパターン形成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005001366A JP2006189612A (ja) | 2005-01-06 | 2005-01-06 | バリア膜形成用材料及びそれを用いたパターン形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006189612A JP2006189612A (ja) | 2006-07-20 |
JP2006189612A5 true JP2006189612A5 (no) | 2007-11-08 |
Family
ID=36796891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005001366A Withdrawn JP2006189612A (ja) | 2005-01-06 | 2005-01-06 | バリア膜形成用材料及びそれを用いたパターン形成方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2006189612A (no) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4716027B2 (ja) * | 2006-08-11 | 2011-07-06 | 信越化学工業株式会社 | レジスト保護膜材料及びパターン形成方法 |
JP2010016259A (ja) | 2008-07-04 | 2010-01-21 | Panasonic Corp | パターン形成方法 |
JP5563051B2 (ja) * | 2012-12-13 | 2014-07-30 | Azエレクトロニックマテリアルズマニュファクチャリング株式会社 | 上層膜形成用組成物およびそれを用いたレジストパターン形成方法 |
-
2005
- 2005-01-06 JP JP2005001366A patent/JP2006189612A/ja not_active Withdrawn
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