JP2006189612A5 - - Google Patents

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Publication number
JP2006189612A5
JP2006189612A5 JP2005001366A JP2005001366A JP2006189612A5 JP 2006189612 A5 JP2006189612 A5 JP 2006189612A5 JP 2005001366 A JP2005001366 A JP 2005001366A JP 2005001366 A JP2005001366 A JP 2005001366A JP 2006189612 A5 JP2006189612 A5 JP 2006189612A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005001366A
Other languages
Japanese (ja)
Other versions
JP2006189612A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005001366A priority Critical patent/JP2006189612A/ja
Priority claimed from JP2005001366A external-priority patent/JP2006189612A/ja
Publication of JP2006189612A publication Critical patent/JP2006189612A/ja
Publication of JP2006189612A5 publication Critical patent/JP2006189612A5/ja
Withdrawn legal-status Critical Current

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JP2005001366A 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法 Withdrawn JP2006189612A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005001366A JP2006189612A (ja) 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005001366A JP2006189612A (ja) 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法

Publications (2)

Publication Number Publication Date
JP2006189612A JP2006189612A (ja) 2006-07-20
JP2006189612A5 true JP2006189612A5 (enExample) 2007-11-08

Family

ID=36796891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005001366A Withdrawn JP2006189612A (ja) 2005-01-06 2005-01-06 バリア膜形成用材料及びそれを用いたパターン形成方法

Country Status (1)

Country Link
JP (1) JP2006189612A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9810988B2 (en) 2012-12-13 2017-11-07 AZ Electronic Material (Luxembourg) S.ár.l. Composition for forming overlay film, and resist pattern formation method employing the same

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4716027B2 (ja) * 2006-08-11 2011-07-06 信越化学工業株式会社 レジスト保護膜材料及びパターン形成方法
JP2010016259A (ja) 2008-07-04 2010-01-21 Panasonic Corp パターン形成方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9810988B2 (en) 2012-12-13 2017-11-07 AZ Electronic Material (Luxembourg) S.ár.l. Composition for forming overlay film, and resist pattern formation method employing the same

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