JP2006183098A - Method for forming vapor deposition film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for efficiently forming a vapor deposition film even on the surface of a large-size article to be treated, while preventing the article from causing chipping and the deposited film from exfoliating. <P>SOLUTION: An apparatus for forming the vapor deposition film has a section for evaporating a vapor deposition material, and a cylindrical barrel having a porous peripheral surface for accommodating the article on the surface of which the vapor deposition material is vapor-deposited, in a vacuum treatment chamber. The cylindrical barrel is laterally installed and rotates around a horizontal axis of rotation. The method for forming the vapor deposition film includes vapor-depositing the vapor deposition material on the surface of the article with the use of the apparatus, through (1) accommodating many articles and many metal spring members in the cylindrical barrel, or through (2) accommodating many articles in a cylindrical barrel having a metal spring installed so as to keep tension. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for forming a deposited film such as aluminum on the surface of an object to be processed such as a rare earth permanent magnet.

  Rare earth permanent magnets such as R-Fe-B permanent magnets represented by Nd-Fe-B permanent magnets have high magnetic properties and are used in various fields today. However, rare earth-based permanent magnets contain metal species (particularly R) that are susceptible to oxidative corrosion in the atmosphere. Therefore, when used without surface treatment, corrosion progresses from the surface due to the influence of slight acid, alkali, moisture, etc., and rust is generated, resulting in deterioration and dispersion of magnetic properties. It will be. Furthermore, when rust is generated in a magnet incorporated in a device such as a magnetic circuit, the rust may be scattered and contaminate peripheral components. In view of the above points, for the purpose of imparting excellent corrosion resistance to rare earth-based permanent magnets, forming a metal vapor-deposited film such as aluminum or zinc on the surface thereof has been performed. In particular, the aluminum coating has excellent corrosion resistance and mass productivity, as well as excellent adhesion reliability with the adhesive required when assembling parts (by reaching the fracture strength inherent to the adhesive). Therefore, it is also widely applied to rare earth permanent magnets that require high adhesive strength.

Porous to house the evaporation part of the evaporation material and the object to be evaporated on the surface in the vacuum processing chamber, which is used to form a metal evaporation film on the surface of the rare earth permanent magnet For example, as a vapor deposition film forming apparatus that includes a cylindrical barrel having a peripheral surface, deposits a vapor deposition material on the surface of an object to be processed while rotating the horizontal barrel about the horizontal barrel axis, for example, a patent There is a device described in Document 1. FIG. 1 is a schematic front view (partially perspective view) of the inside of a vacuum processing chamber 1 connected to an unillustrated evacuation system, as an example. Two support members 7 that are rotatable about a rotation shaft 6 on a horizontal rotation axis are provided in the upper part of the room, and the support member 7 has 6 on the outer side in the circumferential direction of the rotation shaft 6. A cylindrical barrel 5 formed of a stainless steel mesh wire mesh is supported in an annular manner by a support shaft 8 so as to revolve freely (FIG. 2 is a schematic perspective view showing an example of the cylindrical barrel 5, FIG. Is a schematic perspective view showing an example of a cylindrical barrel 5 supported by a support member 7). A plurality of boats 2, which are evaporation sections for evaporating aluminum as a deposition material, are arranged on a boat support base 4 erected on a support table 3 below the room. Inside the support table 3, an aluminum wire 9 as a vapor deposition material is wound and held on a supply reel 10. The tip of the aluminum wire 9 is guided above the boat 2 by a heat-resistant protective tube 11 facing the inner surface of the boat 2. A cutout window 12 is provided in a part of the protective tube 11, and a feeding gear 13 provided corresponding to the cutout window 12 is in direct contact with the aluminum wire 9, and the aluminum wire 9 is fed out so that the boat is The aluminum is constantly supplied into the interior 2. According to this apparatus, when a large number of rare earth permanent magnets 30 as objects to be processed are accommodated in the cylindrical barrel 5 and the support member 7 is rotated around the rotary shaft 6 as indicated by the arrows, the support member 7 Corresponding to this, the cylindrical barrel 5 supported by the support shaft 8 on the outer side in the circumferential direction of the rotary shaft 6 revolves around the rotary shaft 6 and is heated to a predetermined temperature by heating means (not shown). Aluminum evaporated from the heated boat 2 is deposited on the surface of the rare earth permanent magnet 30 in the cylindrical barrel 5 to form an aluminum film.
JP 2001-335921 A

The vapor deposition film forming apparatus shown in FIG. 1 is capable of mass processing and is excellent in productivity. However, when the size of the rare earth permanent magnet increases (for example, a plate-shaped magnet exceeding 40 mm in length, 15 mm in width, and 5 mm in thickness), sometimes, when a vapor-deposited film is formed, the magnet is missing or once the vapor-deposited film is formed. Peeling from the magnet (coating peeling) becomes prominent and may cause deterioration in productivity.
Accordingly, the present invention provides a vapor deposition film forming method capable of efficiently forming a vapor deposition film on a surface of a large size object to be processed while suppressing the occurrence of chipping or film peeling. The purpose is to provide.

  As a result of intensive studies in view of the above points, the present inventors have found that when a deposited film is formed on the surface of an object to be processed using the deposited film forming apparatus shown in FIG. A large number of spring members can be accommodated, or a metal spring can be installed in the cylindrical barrel with tension applied to control the free movement of the workpiece in the cylindrical barrel. The present inventors have found that a deposition film can be efficiently formed on the surface of the film while suppressing the rate of occurrence of film peeling.

The vapor deposition film forming method of the present invention made on the basis of the above knowledge, according to claim 1, accommodates an evaporation portion of the vapor deposition material and an object to be vapor deposited on the surface thereof in the vacuum processing chamber. A vapor deposition film forming apparatus comprising a cylindrical barrel having a porous peripheral surface for performing vapor deposition on a surface of an object to be processed while horizontally rotating the cylindrical barrel and rotating around a horizontal rotation axis The vapor deposition film forming method used is characterized in that a large number of workpieces and metal spring members are accommodated in a cylindrical barrel, and a vapor deposition material is vapor deposited on the surface of the workpiece.
In addition, the vapor deposition film forming method of the present invention, as described in claim 2, is a porous peripheral chamber for accommodating a vapor deposition portion of a vapor deposition material and an object to be vapor deposited on the surface thereof in a vacuum processing chamber. A vapor deposition film forming method using a vapor deposition film forming apparatus comprising a cylindrical barrel having a surface, and depositing a vapor deposition material on a surface of an object while rotating the cylindrical barrel around a horizontal rotation axis In this case, a large number of objects to be processed are accommodated in a cylindrical barrel in which a metal spring is applied with tension, and a deposition material is deposited on the surface of the object to be processed.
The vapor deposition film forming method according to claim 3 is the vapor deposition film forming method according to claim 1 or 2, wherein the vapor deposition material is aluminum.
The vapor deposition film forming method according to claim 4 is the vapor deposition film forming method according to any one of claims 1 to 3, wherein the object to be processed is a plate-like body.
The vapor deposition film forming method according to claim 5 is the vapor deposition film forming method according to any one of claims 1 to 4, wherein the object to be processed is a rare earth permanent magnet.

  According to the present invention, it is possible to efficiently form a vapor deposition film on the surface of a large size object to be processed while suppressing the occurrence of chipping of the object to be processed and film peeling. A method can be provided.

  First, the 1st vapor deposition film forming method of this invention is demonstrated. In this method, a vacuum barrel is provided with a cylindrical barrel having an evaporation portion for vapor deposition material and a porous peripheral surface for accommodating an object to be processed on which vapor deposition material is deposited. A vapor deposition film forming method using a vapor deposition film forming apparatus that deposits a vapor deposition material on the surface of the object to be processed while rotating around a horizontal rotation axis, the object to be processed and a metal spring member, A large number of each is accommodated in a cylindrical barrel, and a vapor deposition material is vapor-deposited on the surface of the workpiece. Hereinafter, an example of this method will be described with reference to the drawings.

  FIG. 4 is a schematic side view of an example of a metal spring member housed in a cylindrical barrel together with an object to be processed. It is desirable that the metal spring member accommodated in the cylindrical barrel is approximately the same size as the object to be processed. It is convenient for exhibiting the function as a buffering member that appropriately controls the free movement of the object to be processed in the cylindrical barrel, and suppresses the occurrence of chipping of the object to be processed and film peeling, and deposits on the surface. It is because a film can be formed efficiently. For example, if the volume of the object to be processed is 1, and the volume of the metal spring member (which can be regarded as the volume of the circumscribed cylinder) is 0.5 to 2.5, the metal spring member is the object to be processed. And approximately the same size. FIG. 5 is a schematic side view of another example of a metal spring member housed in a cylindrical barrel together with an object to be processed. This metal spring member is obtained by winding a spring around a part of a linear material constituting the member.

  FIG. 6 is a schematic partial enlarged perspective view of the cylindrical barrel 5 in which a large number of plate-like rare earth permanent magnets 30 and metal spring members 31 as objects to be processed are accommodated, for example. The number of magnets 30 and metal spring members 31 accommodated in the cylindrical barrel 5 is preferably 90 to 110 metal spring members 31 when the number of magnets 30 is 100. By accommodating both in the cylindrical barrel 5 at such a ratio, the free movement of the magnet 30 in the cylindrical barrel 5 is appropriately controlled, and the occurrence rate of chipping of the magnet 30 and film peeling is suppressed, A vapor deposition film can be efficiently formed on the surface.

  Next, the second deposited film forming method of the present invention will be described. In this method, a vacuum barrel is provided with a cylindrical barrel having an evaporation portion for vapor deposition material and a porous peripheral surface for accommodating an object to be processed on which vapor deposition material is deposited. A vapor deposition film forming method using a vapor deposition film forming apparatus that deposits a vapor deposition material on the surface of an object to be processed while rotating about a horizontal rotation axis. A large number of objects to be processed are accommodated in the cylindrical barrel, and a deposition material is deposited on the surface of the object to be processed. Hereinafter, an example of this method will be described with reference to the drawings.

  FIG. 7 is a schematic perspective view of a cylindrical barrel 5 in which, for example, four metal springs 32 are installed with tension applied between both end faces, and FIG. 8 is a plate-shaped rare earth that is an object to be processed. FIG. 3 is a schematic partial enlarged perspective view in the cylindrical barrel 5 in which a large number of system permanent magnets 30 are accommodated. By adopting such a configuration, the presence of the metal spring 32 appropriately controls the free movement of the magnet 30 in the cylindrical barrel 5, and suppresses the occurrence rate of chipping of the magnet 30 and film peeling, A vapor deposition film can be efficiently formed on the surface.

  The to-be-processed object which can apply the vapor deposition film formation method of this invention is not specifically limited, What kind of thing may be used if a vapor deposition film can be formed by vapor deposition treatment. However, the vapor deposition film forming method of the present invention has a size such as a plate-like rare earth-based permanent magnet exceeding 40 mm in length, 15 mm in width, and 5 mm in thickness, or an arc-shaped rare earth-based permanent magnet having a unit weight exceeding 20 g. Particularly suitable for forming a deposited film having a film thickness of 1 μm to 15 μm on the surface of a rare earth permanent magnet having a large thickness.

  The vapor deposition film forming method of the present invention can also be applied to a case where a vapor deposition material is formed by simply evaporating a vapor deposition material by heating, such as a vacuum vapor deposition method. For example, an ion plating method can be used. The present invention can also be applied to the case where the evaporated film is ionized to form a vapor deposition film.

  The vapor deposition film forming method of the present invention can be applied to vapor deposition film formation using a vapor deposition material such as a metal or an alloy thereof. Among them, a soft metal or an alloy containing a soft metal component, for example, aluminum or zinc , Tin, magnesium, and an alloy containing at least one of these metal components can be suitably applied to the formation of a deposited film.

  In addition, a porous surrounding for accommodating an evaporation portion of the vapor deposition material and an object to be vapor deposited on the surface thereof in a vacuum processing chamber used for carrying out the vapor deposition film forming method of the present invention. A vapor deposition film forming apparatus that includes a cylindrical barrel having a surface, and that deposits a vapor deposition material on the surface of an object to be processed while rotating the horizontal barrel about the horizontal barrel axis is shown in FIG. In addition to the above-mentioned apparatuses, for example, there are apparatuses described in US Pat. FIG. 9 is a schematic front view (partially perspective view) of the inside of the vacuum processing chamber 101 connected to an unillustrated evacuation system, as an example. Two cylindrical barrels 105 formed of, for example, a stainless steel mesh wire mesh are provided at the upper part of the room so as to be rotatable around a rotation shaft 106 on a horizontal rotation axis. A plurality of boats 102, which are evaporating portions for evaporating aluminum as a deposition material, are arranged on a boat support base 104 erected on a support table 103 below the room. According to this apparatus, a large number of rare earth permanent magnets 130, which are objects to be processed, are accommodated in the cylindrical barrel 105, and the cylindrical barrel is rotated around the rotary shaft 106 as indicated by an arrow, while not shown. By evaporating aluminum from the boat 102 heated to a predetermined temperature by the heating means, an aluminum film is formed on the surface of the rare earth permanent magnet 130 in the cylindrical barrel 105.

  EXAMPLES Hereinafter, although an Example and a comparative example demonstrate this invention further in detail, this invention is limited to this and is not interpreted. In the following examples and comparative examples, for example, as described in US Pat. No. 4,770,723 and US Pat. No. 4,792,368, a known cast ingot is pulverized, and after pulverization, molding, sintering, and heat treatment are performed. A plate-like sintered magnet having a composition of 14Nd-79Fe-6B-1Co (at%) obtained by performing surface processing, 42 mm long x 18 mm wide x 6 mm thick and having a unit weight of 36 g (hereinafter referred to as a magnet test piece). ).

Example 1:
As shown in FIG. 2, in a cylindrical barrel formed of a stainless steel mesh wire net having a diameter of 110 mm × a length of 575 mm, 80 magnet specimens and a stainless spring member having a diameter of 15 mm × a length of 20 mm ( The volume of the magnetic test piece is 0.8, and the volume is 0.8), and 80 pieces are accommodated, and an aluminum film is formed on the surface of the magnetic test piece by the vapor deposition film forming apparatus shown in FIG. Since the method shown in FIG. 3 was adopted for mounting the barrel to the apparatus, 24 cylindrical barrels were mounted in the entire apparatus, so the total number of magnetic test pieces processed at one time was 1920) . The vapor deposition conditions were a vapor deposition time of 35 minutes and a cylindrical barrel rotation speed of 4.7 rpm.

Example 2:
Cylindrical barrel made of stainless steel mesh wire with a diameter of 110 mm and a length of 575 mm, with four stainless steel springs with a diameter of 15 mm as shown in FIG. Inside, 80 magnet body test pieces were accommodated, and an aluminum film was formed on the surface of the magnet body test piece by the vapor deposition film forming apparatus shown in FIG. 1 (the mounting method of the cylindrical barrel in the apparatus is shown in FIG. 3). Since the entire apparatus was equipped with 24 cylindrical barrels because the method shown was adopted, the total number of magnet specimens processed at one time was 1920). The vapor deposition conditions were the same as those in Example 1.

Comparative example:
In a cylindrical barrel formed of a stainless steel mesh wire net having a diameter of 110 mm and a length of 575 mm as shown in FIG. 2, 80 magnet body test pieces are accommodated, and the vapor deposition film forming apparatus shown in FIG. An aluminum coating was formed on the surface of the magnet test piece (since the method shown in FIG. 3 was used for mounting the cylindrical barrel on the apparatus, 24 cylindrical barrels were mounted on the entire apparatus. The total number of magnet specimens processed at one time is 1920). The vapor deposition conditions were the same as those in Example 1.

Evaluation items and results:
Table 1 shows the film thickness (n = 10: by cross-sectional observation) of the aluminum coating formed on the surface of the magnet specimen for each of Example 1, Example 2, and Comparative Example. Further, 10,000 magnet test pieces having an aluminum film formed on the surface thereof were examined, and the occurrence rate of chipping and film peeling of the magnetic body test pieces, and the determination of non-defective products without chipping and film peeling of the magnet test piece. Pressure cooker test (PCT test: conditions are left for 60 hours in an environment of temperature 125 ° C. × relative humidity 85% × 2 atm) (n = 5) with respect to a magnet specimen having an aluminum coating formed thereon. Table 1 shows.

  As is apparent from Table 1, the magnet body test piece on which the aluminum coating obtained in Example 1 and Example 2 was formed was the magnet body test in which the aluminum coating obtained in the comparative example was formed on the surface. The occurrence rate of chipping of the magnetic body test piece and film peeling was significantly reduced as compared with the piece, and it was found that the deposited film forming methods of Example 1 and Example 2 were excellent methods.

  The present invention provides a vapor deposition film forming method capable of efficiently forming a vapor deposition film on the surface of a large size object to be processed while suppressing the occurrence of chipping or film peeling. It has industrial applicability in that it can be provided.

It is a typical front view (partial perspective view) inside the vacuum processing chamber of an example of the vapor deposition film formation apparatus for enforcing the vapor deposition film formation method of this invention. It is a typical perspective view which shows an example of a cylindrical barrel. It is a typical perspective view which shows an example of the cylindrical barrel supported by the supporting member. It is a typical side view of an example of the metal spring member accommodated in a cylindrical barrel with a to-be-processed object. It is a typical side view of the other example. It is a typical partial enlarged perspective view in the cylindrical barrel which accommodated many plate-shaped rare earth system permanent magnets and metal spring members which are processed objects, respectively. FIG. 4 is a schematic perspective view of a cylindrical barrel in which four metal springs are installed with tension applied between both end faces. FIG. 8 is a schematic partial enlarged perspective view in the cylindrical barrel of FIG. 7 in which a large number of plate-like rare earth permanent magnets to be processed are accommodated. It is a typical front view (partial perspective view) inside the vacuum processing chamber of the other example of the vapor deposition film forming apparatus for enforcing the vapor deposition film formation method of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,101 Vacuum processing chamber 2,102 Boat 3,103 Support table 4,104 Boat support stand 5,105 Cylindrical barrel 6,106 Rotating shaft 7 Support member 8 Support shaft 9 Aluminum wire 10 Feeding reel 11 Protective tube 12 Notch Window 13 Gear 30, 130 Rare earth permanent magnet 31 Metal spring member 32 Metal spring

Claims (5)

  A vacuum processing chamber is provided with a cylindrical barrel having a vapor deposition material evaporation section and a porous peripheral surface for accommodating an object to be processed on which vapor deposition material is deposited. A deposition film forming method using a deposition film forming apparatus for depositing a deposition material on a surface of an object to be processed while rotating about a rotation axis of a direction, wherein the object to be processed and a metal spring member are placed in a cylindrical barrel A method for forming a vapor-deposited coating, comprising: depositing a plurality of vapor-deposited materials on the surface of an object to be treated.   A vacuum processing chamber is provided with a cylindrical barrel having a vapor deposition material evaporation section and a porous peripheral surface for accommodating an object to be processed on which vapor deposition material is deposited. A vapor-deposited film forming method using a vapor-deposited film forming apparatus for depositing a vapor-deposited material on the surface of a workpiece while rotating around a rotation axis of a direction, and a cylindrical barrel constructed by attaching a metal spring with a tension A vapor deposition film forming method characterized in that a large number of objects to be processed are accommodated therein, and a vapor deposition material is deposited on the surface of the object to be processed.   The vapor deposition material is aluminum, The vapor deposition film formation method of Claim 1 or 2 characterized by the above-mentioned.   4. The method for forming a deposited film according to claim 1, wherein the object to be processed is a plate-like body.   The vapor-deposited film forming method according to claim 1, wherein the object to be processed is a rare earth permanent magnet.

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