JP2006170543A - Air conditioning system for constant temperature and constant humidity - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an air conditioning system for constant temperature and constant humidity realizing reduction of a refrigerating machine capacity, and energy saving of cooling, heating, and humidification. <P>SOLUTION: A pre-filter 1, a medium performance filter 2, a first cooling coil 3a, a second cooling coil 3b, a heating coil 4, and a blower 6 discharging treated air to a housing exterior are sequentially arranged from an air intake side in a housing interior of an air conditioner composing the air conditioning system for constant temperature and constant humidity. A branch line 31 is provided in a return air supply line 30 supplying return air RA from a clean room into the air conditioner, and a second blower 32, and a vaporizing type humidifier 33 are arranged in the branch line 31. In control of the vaporizing type humidifier 33, it is composed such that an air capacity introduced into the branch line is controlled by controlling the second blower 32, and subsequently, a humidification amount is controlled by the vaporizing type humidifier 33. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an air conditioning system that adjusts the temperature and humidity of air to be processed, and more particularly, to an air conditioning system for constant temperature and humidity that has been improved to reduce the capacity of a refrigerator and save energy.

  In electronic and precision machinery factories, food storage warehouses, laboratory animal breeding rooms, biological clean rooms, etc., it is necessary to maintain a constant indoor environment such as temperature and humidity. For this reason, a constant temperature / humidity air conditioning system for the purpose of indoor constant temperature / humidity is employed in such facilities (Patent Document 1 and the like).

(1) Conventional Example-1
For example, as shown in FIG. 10, an air conditioning system for constant temperature / humidity used in the past cools by mixing outdoor air (OA) and indoor air (RA) circulated and supplied from a clean room during the dehumidifying period. It is known to maintain the temperature and humidity conditions by performing dehumidification and then reheating to the required temperature, and in the humidification period, heating by a heating coil and humidification by a steam humidifier.

  That is, in the figure, a pre-filter 1 that removes dust from outside air from the intake side, a medium-performance filter 2 and circulating cold water inside a housing (not shown) having an air intake on the left side and an air supply port on the right side. A cooling coil 3 for cooling and dehumidifying the air, a heating coil 4 for heating the air with circulating hot water, a steam humidifier 5 for humidifying the steam generated in the boiler by supplying it to the air passage process, and processing air Is disposed outside the housing.

  The cooling coil 3, the heating coil 4, and the steam humidifier 5 are provided with valves 7, 8, and 9 for controlling the flow rates of cold water, hot water, steam, and the like supplied thereto. Further, a temperature and humidity sensor 12 is attached to the supply port of the humidified air (or the inside of the constant temperature / humidity chamber to be supplied), and the detected value by these sensors 12 is sent to the temperature / humidity controller 13. The temperature / humidity controller 13 adjusts the opening degree of the valves 7 to 9 so that the temperature and humidity of the supply air become predetermined constant values. The amount of hot water in the coil 4 and the amount of steam in the steam humidifier 5 are controlled.

  The temperature and humidity control in the constant temperature / humidity air conditioning system shown in FIG. 10 will be described below with reference to the humid air diagram of FIGS. In addition, af shown in FIG. 11 respond | corresponds to the state of the air in the position of af shown in FIG.

(1-1) Dehumidification period -1. Refer to FIG. 11 (A). When air cooling and dehumidification are necessary, such as in summer, the blower 6 is activated and the valve 7 of the cooling coil 3 is opened. Then, outside air (33 ° C., 62%) flows from the air intake port of the housing (4000 m ³ / h, point a). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point c is 24 ° C. The mixed air is cooled by the cooling coil 3 (d point, 11 ° C.), then reheated by the heating coil 4 (point e, 15 ° C.) and supplied from the supply port by the blower 6.

(1-2) Dehumidification period-2 ... Refer to FIG. 11 (B) When air dehumidification is mainly required in the intermediate period or the like, the blower 6 is operated and the valve 7 of the cooling coil 3 is opened. Then, outside air (14 ° C., 90%) flows from the air intake port of the housing (4000 m ³ / h, point a). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point c becomes 22.1 ° C. The mixed air is cooled by the cooling coil 3 (d point, 11 ° C.), then reheated by the heating coil 4 (point e, 15 ° C.) and supplied from the supply port by the blower 6.

(1-3) Humidification period… See FIG. 11C When air heating, cooling, and humidification are necessary in winter and the like, the blower 6 is activated and the steam humidifier 5 is opened. Then, outside air (-3 ° C., 60%) flows from the air intake port of the housing (4000 m ³ / h, point a). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point c is 20.4 ° C. The mixed air is cooled by the cooling coil 3 (point d, 14.9 ° C.), then humidified by the steam humidifier 5 (point f, 15 ° C.), and supplied from the supply port by the blower 6. Since steam humidification involves heating, the dry bulb temperature and relative humidity change as shown by the solid line connecting d and f in FIG.

  Thus, in the constant temperature / humidity air conditioning system having the configuration as shown in FIG. 10, it is necessary to operate the cooling coil 3 and the heating coil 4 for reheating in the dehumidifying period, and the cost In addition, in the humidification period, it is necessary to operate the steam humidifier 5, and thus costs for cooling and generation of steam are incurred.

(2) Conventional example-2
In addition, as a conventional constant temperature / humidity air conditioning system, for example, as shown in FIG. 12, a single cooling coil is used for dehumidification of an outside air intake system, and a total of two cooling coils are provided. In addition, by supplying indoor air (RA) circulated and supplied from the clean room to the middle part, mixing with the outside air (OA) and cooling, it is possible to use extra cooling and use of reheat energy. Systems that can be avoided are also known.

  That is, in the figure, a pre-filter 1 that removes dust from outside air from the intake side, a medium-performance filter 2 and circulating cold water inside a housing (not shown) having an air intake on the left side and an air supply port on the right side. The first cooling coil 3a that cools and dehumidifies the air, the second cooling coil 3b that cools the air using circulating cold water, the heating coil 4 that heats the air using circulating hot water, and the steam generated by the boiler passing through the air A steam humidifier 5 that supplies and humidifies the process, and a blower 6 that discharges processing air to the outside of the housing are disposed.

  Further, the cooling coils 3a, 3b, the heating coil 4 and the steam humidifier 5 are provided with valves 7a, 7b, 8, 9 for controlling the flow rates of cold water, hot water, steam and the like supplied to each of them. . Further, a temperature and humidity sensor 12 is attached to the supply port of the humidified air (or the inside of the constant temperature / humidity chamber to be supplied), and the detected value by these sensors 12 is sent to the temperature / humidity controller 13. The temperature / humidity controller 13 adjusts the opening degree of the valves 7 to 9 so that the temperature and humidity of the supply air become predetermined constant values. The amount of hot water in the heating coil 4 and the amount of steam in the steam humidifier 5 are controlled.

  The temperature and humidity control in the constant temperature / humidity air conditioning system shown in FIG. 12 will be described below with reference to the humid air diagram of FIGS. 13 (A) to (C). In addition, af shown in FIG. 13 respond | corresponds to the state of the air in the position of af shown in FIG.

(2-1) Dehumidification period -1. Refer to FIG. 13 (A). That is, when air cooling and dehumidification are necessary, such as in summer, the blower 6 is activated, and the first cooling coil 3a and the second cooling coil 3 are operated. The valves 7a and 7b of the cooling coil 3b are opened. Then, outside air (33 ° C., 62%) flows from the air intake port of the housing (4000 m ³ / h, point a), and is cooled and dehumidified by the first cooling coil 3a (point a ′, 11 ° C.). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point c is 21.8 ° C. The mixed air is further cooled by the second cooling coil 3b (point d, 15 ° C.) and supplied from the supply port by the blower 6.

(2-2) Dehumidification period-2 ... Refer to FIG. 13 (B) When air dehumidification is mainly required in the intermediate period or the like, the blower 6 is operated, and the first cooling coil 3a and the second cooling are operated. The valves 7a and 7b of the coil 3b are opened. Then, outside air (14 ° C., 90%) flows from the air intake port of the housing (4000 m ³ / h, point a), and is cooled and dehumidified by the first cooling coil 3a (point a ′, 11 ° C.). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point c is 21.8 ° C. The mixed air is further cooled by the second cooling coil 3b (point d, 15 ° C.) and supplied from the supply port by the blower 6.

(2-3) Humidification period: see FIG. 13C When air heating, cooling and humidification are necessary in winter, the blower 6 is activated and the steam humidifier 5 is activated. Then, outside air (-3 ° C., 60%) flows from the air intake port of the housing (4000 m ³ / h, point a). Usually, at this time, the cold water in the cooling coil 3a is generally drained to prevent freezing.

On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point c is 20.4 ° C. This mixed air is cooled by the second cooling coil 3b (d point, 14.9 ° C.), then humidified by the steam humidifier 5 (f point, 15 ° C.), and supplied from the supply port by the blower 6 . Since steam humidification involves heating, the dry bulb temperature and relative humidity change as indicated by the solid line connecting d and f in FIG.

  Thus, in the constant temperature / humidity air conditioning system having the configuration as shown in FIG. 12, it is not necessary to operate the heating coil 4 in the dehumidifying period, so that the cost can be reduced as compared with the system shown in FIG. However, since it is necessary to operate the steam humidifier 5 in the humidification period, the cost for generating steam is incurred.

(3) Conventional example-3
In addition, as a constant temperature / humidity air conditioning system conventionally used, for example, as shown in FIG. 14, two cooling coils are used, and a heating coil and a vaporizing humidifier are disposed in the middle part thereof. A method is also known in which room air (RA) circulated and supplied from a clean room is supplied between the vaporizing humidifier and the second cooling coil to mix with the outside air (OA).

  That is, in the figure, a pre-filter 1 that removes dust from outside air from the intake side, a medium-performance filter 2 and circulating cold water inside a housing (not shown) having an air intake on the left side and an air supply port on the right side. The first cooling coil 3a for cooling and dehumidifying the air, the heating coil 4 for heating the air with circulating hot water, the vaporizing humidifier 20, the second cooling coil 3b for cooling the air with circulating cold water, and the reheating coil 21 And the air blower 6 which discharges process air out of a housing is arrange | positioned.

  Further, the cooling coils 3a, 3b, the heating coil 4 and the reheating coil 21 are provided with valves 7a, 7b, 8, 24 for controlling the flow rates of cold water, hot water, steam and the like supplied thereto. Further, a temperature and humidity sensor 12 is attached to the supply port of the humidified air (or the inside of the constant temperature / humidity chamber to be supplied), and the detected value by these sensors 12 is sent to the temperature / humidity controller 13. The temperature and humidity controller 13 adjusts the opening degree of the valves 7, 8, and 24 so that the temperature and humidity of the supply air become predetermined constant values in the cooling coils 3 a and 3 b. The cold water, the hot water in the heating coil 4 and the reheating coil 21, and the humidification amount by the vaporizing humidifier 20 are controlled. The heating coil 4 is used to control the amount of humidification (see Patent Document 2).

  The temperature and humidity control in the constant temperature / humidity air conditioning system shown in FIG. 14 will be described below with reference to the humid air diagram of FIGS. In addition, ag shown in FIG. 15 respond | corresponds to the state of the air in the position of ag shown in FIG.

(3-1) Dehumidification period -1. Refer to FIG. 15 (A). That is, when air cooling and dehumidification are necessary, such as in summer, the blower 6 is activated, and the first cooling coil 3a and the second The valves 7a and 7b of the cooling coil 3b are opened. Then, outside air (33 ° C., 62%) flows from the air intake port of the housing (4000 m ³ / h, point a), and is cooled and dehumidified by the first cooling coil 3a (point b, 11 ° C.). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point f is 21.8 ° C. The mixed air is further cooled by the second cooling coil 3b (point g, 15 ° C.) and supplied from the supply port by the blower 6. In this case, the heating coil 4 and the vaporizing humidifier 20 are not used.

(3-2) Dehumidification Period-2 ... See FIG. 15 (B) When air dehumidification is mainly required in the intermediate period or the like, the blower 6 is operated, and the first cooling coil 3a and the second cooling are operated. The valves 7a and 7b of the coil 3b are opened. Then, outside air (14 ° C., 90%) flows from the air intake port of the housing (4000 m ³ / h, point a) and is cooled and dehumidified by the first cooling coil 3a (point b, 11 ° C.). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point f is 21.8 ° C. The mixed air is further cooled by the second cooling coil 3b (point g, 15 ° C.) and supplied from the supply port by the blower 6. In this case, the heating coil 4 and the vaporizing humidifier 20 are not used.

(3-3) Humidification period ... See FIG. 15C When the air is required to be heated and humidified, such as in winter, the blower 6 is activated, and the heating coil 4 and the vaporizing humidifier 20 are activated. Then, outside air (−3 ° C., 60%) flows from the air intake port of the housing (4000 m ³ / h, point a) and is heated by the heating coil 4 (point c, 27.2 ° C.), and a vaporizing humidifier. 20 (d point, 14 ° C.). On the other hand, since 36000 m ³ / h return air (RA) is supplied from the clean room (23 ° C., 45%), the temperature at the point f becomes 22.1 ° C. The mixed air is cooled by the second cooling coil 3 b (point g, 15 ° C.) and supplied from the supply port by the blower 6.

  As described above, the constant temperature / humidity air conditioning system having the configuration shown in FIG. 14 does not require extra cooling and reheating energy during the dehumidification period, and therefore costs less than the system shown in FIG. Can be reduced. However, in the humidification period, since it is necessary to operate the heating coil 4, the cost is high.

In this example, the reheat coil 21 is not used because the set temperature of the outlet is set to 15 ° C., but when the indoor heat generation is small, both the dehumidifying period-1, the dehumidifying period-2, and the humidifying period are It is necessary to set the blower outlet at a high temperature, and in that case, it is necessary to heat the reheat coil 21.
JP 2003-294274 A JP 2001-317795 A

  However, in the conventional constant temperature / humidity air conditioning system as described above, the running costs in the dehumidifying period and the humidifying period are both large. Therefore, the development of a constant temperature / humidity air conditioning system capable of reducing running costs has been desired.

  The present invention has been proposed in order to solve the above-described problems of the prior art, and its purpose is constant temperature / constant that enables reduction of refrigerator capacity and energy saving of cooling, heating and humidification. It is to provide a humidity air conditioning system.

  In order to solve the above-mentioned problem, the invention described in claim 1 is a constant temperature / humidity air conditioning system that adjusts a desired temperature and humidity by introducing outside air and return air from the constant temperature / humidity air conditioning chamber into the air conditioner. A return air supply line for introducing the return air into the air conditioner is connected to an intermediate portion between the first cooling coil and the second cooling coil installed in the air conditioner, and a branch line is connected to the return air supply line. Provided, a blower and a vaporizing humidifier are provided in the branch line, the outside air is dehumidified by the first cooling coil, the outside air and return air are cooled by the second cooling coil, It is characterized in that the return air is humidified by a vaporizing humidifier.

  According to the invention described in claim 1 having the above-described configuration, two cooling coils are used, one of them is used exclusively for dehumidification (latent heat treatment) of the outside air, and the other one is used for cooling (sensible heat treatment). ) And a vaporizing humidifier installed on the RA side and used for humidification, the cooling capacity of the outside air can be used for both sensible heat and latent heat. As a result, the heating energy in winter can be reduced to 0, and the cooling load can be greatly reduced.

  Invention of Claim 2 was installed in the said air conditioner in the air conditioning system for constant temperature / humidity which introduces return air from outside air and a constant temperature / humidity air conditioning room in an air conditioner, and performs desired temperature / humidity adjustment A return air supply line for introducing the return air into the air conditioner is connected to an intermediate portion between the first cooling coil and the second cooling coil, and on the downstream side of the connection portion of the return air supply line, and A vaporizing humidifier is installed upstream of the second cooling coil, the outside air is dehumidified by the first cooling coil, the outside air and return air are humidified by the vaporizing humidifier, and the first The second cooling coil is configured to cool the outside air and the return air.

  According to the invention described in claim 2 having the above-described configuration, two cooling coils are used, one of them is used exclusively for dehumidification (latent heat treatment) of the outside air, and the other one is used for cooling (sensible heat treatment). ) And a vaporizing humidifier installed upstream of the second cooling coil and used for humidification, the cooling capacity of the outside air can be used for both sensible heat and latent heat. As a result, the heating energy in winter can be reduced to 0, and the cooling load can be greatly reduced.

  Invention of Claim 3 was installed in the said air conditioner in the air conditioning system for constant temperature / humidity which introduces return air from outside air and a constant temperature / humidity air conditioning room in an air conditioner, and performs desired temperature / humidity adjustment A return air supply line for introducing the return air into the air conditioner is connected to an intermediate portion between the first cooling coil and the second cooling coil, a branch line is provided in the return air supply line, and the return air supply line A first motor damper is provided, a second motor damper and a vaporizing humidifier are disposed on the branch line, the outside air is dehumidified by the first cooling coil, and the outside air and The return air from the constant temperature / humidity chamber is cooled, and the return air is humidified by the vaporizing humidifier. A.

  According to the invention described in claim 3 having the above-described configuration, two cooling coils are used, one of them is used exclusively for dehumidification (latent heat treatment) of the outside air, and the other one is used for cooling (sensible heat treatment). ) And a vaporizing humidifier installed on the RA side and used for humidification, the cooling capacity of the outside air can be used for both sensible heat and latent heat. As a result, the heating energy in winter can be reduced to 0, and the cooling load can be greatly reduced.

  According to the constant temperature / humidity air conditioning system of the present invention, it is possible to provide a constant temperature / humidity air conditioning system capable of reducing the refrigerator capacity and saving energy in cooling, heating and humidification.

  Hereinafter, an embodiment (hereinafter referred to as an embodiment) according to a constant temperature / humidity air conditioning system of the present invention will be specifically described with reference to the drawings.

(1) First Embodiment (1-1) Configuration FIG. 1 is a schematic diagram showing the configuration of a constant temperature / humidity air conditioning system according to the present invention.
That is, inside the housing (not shown) of the air conditioner constituting the constant temperature / humidity air conditioning system of the present embodiment, from the air intake side, the prefilter 1, the medium performance filter 2, the first cooling coil. 3a and the 2nd cooling coil 3b, the heating coil 4, and the air blower 6 which discharges process air out of a housing are arrange | positioned one by one.

  A return air supply line 30 to which return air (RA) is supplied from the clean room is provided with a branch line 31, and a second blower 32 and a vaporizing humidifier 33 are provided in the branch line 31. Yes. In addition, this vaporization type humidifier 33 is comprised from the water absorption or hydrophilic vaporization type humidification raw material. The vaporizing humidifier 33 is controlled by controlling the second blower 32 to control the amount of air introduced into the branch line 31, and accordingly, the humidifying amount by the vaporizing humidifier 33 is controlled. It is configured as follows.

(1-2) Action The action of the temperature and humidity control air conditioning system of the present embodiment having the above-described configuration is as follows. The indoor temperature and humidity are 23 ° C. and 45%, and the temperature and humidity of the air conditioner outlet are 15 ° C. 72%, and referring to the air diagrams shown in FIGS. 2 to 4, in the dehumidification period-1 (mainly summer), the dehumidification period-2 (mainly intermediate period), and the humidification period (mainly winter) Separately described. In addition, AH shown in FIGS. 2-4 respond | corresponds to the state of the air in the position of AH shown in FIG. Specific values such as temperature and humidity are examples, and the present invention is not limited to these numerical values. Further, the temperature rise by the fan and the relative humidity drop caused by this are not considered here for the sake of easy understanding.

(1-2-1) Dehumidification Period-1 See FIG. 2 That is, when air cooling and dehumidification are necessary in summer, etc., the blower 6 is operated, and the first cooling coil 3a and the second cooling are operated. The valves 7a and 7b of the coil 3b are opened. Then, outside air (33 ° C., 62%) flows from the air intake port of the housing (4000 m ³ / h, point A), and is cooled and dehumidified by the first cooling coil 3a (point B, 11 ° C.).

On the other hand, since all the return air (RA) of 36000 m ³ / h supplied from the clean room (23 ° C., 45%) is introduced into the air conditioner through the return air supply line 30, the temperature at the point F is 21. 8 ° C. The mixed air is further cooled by the second cooling coil 3 b (point G, 15 ° C.) and supplied from the supply port by the blower 6.

(1-2-2) Dehumidification period-2. See FIG. 3 When air dehumidification is mainly required in the intermediate period or the like, the blower 6 is operated, and the first cooling coil 3a and the second cooling coil are operated. The 3b valves 7a and 7b are opened. Then, outside air (14 ° C., 90%) flows from the air intake port of the housing (4000 m ³ / h, point A), and is cooled and dehumidified by the first cooling coil 3a (point B, 11 ° C.).

On the other hand, since all the return air (RA) of 36000 m ³ / h supplied from the clean room (23 ° C., 45%) is introduced into the air conditioner through the return air supply line 30, the temperature at the point F is 21. 8 ° C. The mixed air is further cooled by the second cooling coil 3 b (point G, 15 ° C.) and supplied from the supply port by the blower 6.

(1-2-3) Humidification period ... see FIG. 4 When heating, cooling and humidification of air is necessary in winter and the like, the heating coil 4 and the blower 6 are operated, and the second blower 32 of the branch line 31 is operated. And the vaporizing humidifier 33 is operated. Then, a clean room (23 ℃, 45%) 36000m 3 / h return some air (RA) that are supplied from (12000m ³ / h) is introduced into the branch line 31, it is humidified by an evaporative humidifier 33 (D point, 17.8 ° C., 78%). Note that the air volume introduced into the branch line is changed by the temperature / humidity controller 13 to which the detection value of the humidity sensor 12 is input, for example, by controlling the rotational speed of the second blower 32, thereby humidifying the air. The amount is also controlled.

Return air is humidified by an evaporative humidifier 33 (12000m ³ / h) and a return is supplied from the clean room air (24000m ³ / h) after the are mixed (E point, 21.5 ° C., 52%) Since it is introduced into the air conditioner, the temperature at point F is 19.1 ° C. The mixed air is further cooled by the second cooling coil 3 b (point G, 15 ° C.) and supplied from the supply port by the blower 6.

Here, the temperature change of each point on the air diagram shown in FIG. 4 will be described. That is, the return air (12000m ³ / h), which is humidified by an evaporative humidifier 33, the temperature of the return air (24000m ³ / h) and is mixed E point supplied from the clean room, C point and the D point The points are proportionally distributed in the respective volume ratios of 24000: 12000 = 2: 1.
Further, the temperature at the point F where OA and RA are mixed is a point that is proportionally distributed in a volume ratio of 4000: 36000 = 1: 9 on the straight line connecting the points E and B.

  In this example, the heating coil 4 is not used because the set temperature of the outlet (or the constant temperature / humidity chamber to be supplied) is set to 15 ° C., but when the room heat generation is small, the dehumidifying period -1, dehumidification period -2 and humidification period need to be set to a high temperature at the outlet, in which case heating is performed by the heating coil 4.

(1-3) Effect Thus, according to the present embodiment, two cooling coils are used, one of them is used exclusively for dehumidification (latent heat treatment) of the outside air, and the other one is used for cooling (sensible heat treatment). In addition, by installing a vaporizing humidifier on the RA side and using it for humidification, the cooling capacity of the outside air can be used for both sensible heat and latent heat. As a result, the heating energy in winter can be reduced to 0, and the cooling load can be greatly reduced.

(2) Second Embodiment (2-1) Configuration FIG. 5 is a schematic diagram showing a configuration of a second embodiment of a constant temperature / humidity air conditioning system according to the present invention.
That is, inside the housing (not shown) of the air conditioner constituting the constant temperature / humidity air conditioning system of the present embodiment, from the air intake side, the prefilter 1, the medium performance filter 2, the first cooling coil. 3a, the vaporizing humidifier 41, the second cooling coil 3b, the heating coil 4, and the blower 6 for discharging the processing air to the outside of the housing are sequentially arranged. Further, a return air supply line 30 to which return air (RA) is supplied from the clean room is configured to be introduced between the first cooling coil 3a and the vaporizing humidifier 41. The vaporizing humidifier 41 is made of a water-absorbing or hydrophilic vaporizing humidifying material, and the amount of humidification is controlled by controlling the amount of water supplied to the vaporizing humidifier 41 by the opening of the humidifying water supply valve 42. Configured to adjust.

(2-2) Operation The operation of the constant temperature / humidity air conditioning system of the present embodiment having the above-described configuration is obtained by changing the indoor temperature / humidity to 23 ° C., 45%, and the air conditioner outlet (or supply target). The temperature and humidity of the constant temperature / humidity chamber are set to 15 ° C. and 72%, and referring to the air diagrams shown in FIGS. 6 to 8, the dehumidification period −1 (mainly summer), the dehumidification period −2 ( The explanation will be divided into the main period and the humidification period (mainly winter). In addition, AF shown in FIGS. 6-8 respond | corresponds to the state of the air in the position of AF shown in FIG. Specific values such as temperature and humidity are examples, and the present invention is not limited to these numerical values. Further, the temperature rise by the fan and the relative humidity drop caused by this are not considered here for the sake of easy understanding.

(2-2-1) Dehumidification Period-1 See FIG. 6 That is, when air cooling and dehumidification are necessary in summer, etc., the blower 6 is operated, and the first cooling coil 3a and the second cooling are operated. The valves 7a and 7b of the coil 3b are opened. Then, outside air (33 ° C., 62%) flows from the air intake port of the housing (4000 m ³ / h, point A), and is cooled and dehumidified by the first cooling coil 3a (point A ′, 11 ° C.).

On the other hand, since the return air (RA) of 36000 m ³ / h supplied from the clean room (23 ° C., 45%) is mixed with the outside air dehumidified by the first cooling coil 3 a, the temperature at the point C is 21. 8 ° C. The mixed air is further cooled by the second cooling coil 3 b (point E, 15 ° C.) and supplied from the supply port by the blower 6.

(2-2-2) Dehumidification period-2 ... see FIG. 7 When air dehumidification is mainly required, such as in an intermediate period, the blower 6 is operated, and the first cooling coil 3a and the second cooling coil are operated. The 3b valves 7a and 7b are opened. Then, outside air (14 ° C., 90%) flows from the air intake port of the housing (4000 m ³ / h, point A), and is cooled and dehumidified by the first cooling coil 3a (point A ′, 11 ° C.).

On the other hand, since all the return air (RA) of 36000 m ³ / h supplied from the clean room (23 ° C., 45%) is introduced into the air conditioner, the temperature at the point C is 21.8 ° C. The mixed air is further cooled by the second cooling coil 3 b (point E, 15 ° C.) and supplied from the supply port by the blower 6.

(2-2-3) Humidification period ... see FIG. 8 When the heating, cooling and humidification of air is necessary in winter, the vaporizing humidifier 41, the heating coil 4 and the blower 6 are operated. Then, outside air (−3 ° C., 60%) flows from the air intake port of the housing (4000 m ³ / h, point A), and 36000 m ³ / h return air (23 ° C., 45%) supplied from the clean room (23 ° C., 45%) ( RA), the temperature at point C is 20.4 ° C. This mixed air is humidified by the vaporizing humidifier 41 (D point, 19 ° C.), then cooled by the second cooling coil 3 b (E point, 15 ° C.), and supplied from the supply port by the blower 6. The humidification amount of the vaporizing humidifier 41 is controlled by controlling the opening degree of the humidifying water supply valve 42 by the temperature / humidity controller 13 to which the detection value of the humidity sensor 12 is input.

(2-3) Effect As described above, also in the present embodiment, similarly to the first embodiment, the heating energy in winter can be reduced to 0, and the cooling load can be significantly reduced.

(3) Other Embodiments The present invention is not limited to the above-described embodiment. As shown in FIG. 9, the first motor damper 51 is provided in the return air supply line 30 and the branch line 31 is provided. The second motor damper 52 may be provided on the upstream side of the vaporizing humidifier 33. In this case, based on the control signal sent from the temperature / humidity controller 13, the opening degree of the dampers 51 and 52 is adjusted to control the air volume of the return air introduced into the branch line 31. The humidification amount by the type humidifier 33 is controlled.

In the embodiment shown in FIG. 9, since the resistance (pressure loss) of the damper in the return air supply line 30 is larger than in the first embodiment, the power of the blower is increased, but the controllability of the humidification amount is This is excellent as in the first embodiment.
Moreover, in each said embodiment, although the filters 1 and 2 and the cooling coil 3a for dehumidification were installed in the same housing, an air blower can be added to these and it can also comprise as another housing.

  Further, in each of the above embodiments, as the vaporizing humidifier, not only those using a hydrophilic or water-absorbing water film, but also a washer method, etc., with the vaporization humidification of moisture, depriving latent heat of evaporation from the target air, Any can be applied as long as the dry bulb temperature decreases.

It is a schematic diagram which shows the structure of 1st Embodiment of the constant temperature and humidity air conditioning system which concerns on this invention. It is an air line figure of the dehumidification period -1 explaining the effect | action of the constant temperature and humidity air conditioning system of 1st Embodiment. It is an air line figure of the dehumidification period-2 explaining an effect | action of the constant temperature and humidity air conditioning system of 1st Embodiment. It is an air line figure of the humidification period explaining the effect | action of the constant temperature and humidity air conditioning system of 1st Embodiment. It is a schematic diagram which shows the structure of 2nd Embodiment of the constant temperature and humidity air conditioning system which concerns on this invention. It is an air line figure of the dehumidification period -1 explaining the effect | action of the constant temperature and humidity air conditioning system of 2nd Embodiment. It is an air diagram of the dehumidification period-2 explaining the effect | action of the constant temperature and humidity air conditioning system of 2nd Embodiment. It is an air line figure of the humidification period explaining the effect | action of the constant temperature and humidity air conditioning system of 2nd Embodiment. It is a schematic diagram which shows the structure of other embodiment of this invention. It is a schematic diagram which shows the structure of the conventional constant temperature and humidity air conditioning system. It is an air line figure explaining the effect | action of the air-conditioning system for constant temperature and humidity shown in FIG. 10, (A) is an air line figure of the dehumidification period-1, (B) is an air line figure of the dehumidification period-2, C) Air diagram during the humidification period. It is a schematic diagram which shows the structure of the conventional constant temperature and humidity air conditioning system. It is an air line figure explaining the effect | action of the air-conditioning system for constant temperature and humidity shown in FIG. 12, (A) is an air line figure of the dehumidification period-1, (B) is an air line figure of the dehumidification period-2, C) Air diagram during the humidification period. It is a schematic diagram which shows the structure of the conventional constant temperature and humidity air conditioning system. It is an air line figure explaining the effect | action of the air-conditioning system for constant temperature and humidity shown in FIG. 14, (A) is an air line figure of the dehumidification period-1, (B) is an air line figure of the dehumidification period-2, C) Air diagram during the humidification period.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Pre filter 2 ... Medium performance filter 3 ... Cooling coil 3a ... 1st cooling coil 3b ... 2nd cooling coil 4 ... Heating coil 5 ... Steam type humidifier 6 ... Blower 7-9 ... Valve 12 ... Temperature and humidity Sensor 13 ... Temperature / humidity controller 30 ... Return air supply line 31 ... Branch line 32 ... Second blower 33 ... Evaporative humidifier 41 ... Evaporative humidifier 42 ... Humidification water supply valve 51 ... First motor damper 52 ... First 2 motor damper

Claims (3)

In the constant temperature / humidity air conditioning system that adjusts the desired temperature and humidity by introducing the return air from the outside air and the constant temperature / humidity air conditioning room into the air conditioner,
A return air supply line for introducing the return air into the air conditioner is connected to an intermediate portion between the first cooling coil and the second cooling coil installed in the air conditioner,
A branch line is provided in the return air supply line, and a blower and a vaporizing humidifier are disposed in the branch line.
Performing dehumidification of the outside air by the first cooling coil;
The second cooling coil performs a cooling process of outside air and return air,
An air conditioning system for constant temperature and humidity, wherein the vaporizing humidifier is configured to perform humidification of return air. In a constant temperature / humidity air conditioning system that adjusts the desired temperature and humidity by introducing the return air from the outside air and the constant temperature / humidity air conditioning room into the air conditioner,
A return air supply line for introducing the return air into the air conditioner is connected to an intermediate portion between the first cooling coil and the second cooling coil installed in the air conditioner,
A vaporizing humidifier is installed on the downstream side of the connection part of the return air supply line and on the upstream part of the second cooling coil,
Performing dehumidification of the outside air by the first cooling coil,
By the vaporizing humidifier, humidification treatment of outside air and return air is performed,
An air conditioning system for constant temperature and humidity, wherein the second cooling coil is configured to cool the outside air and return air. In a constant temperature / humidity air conditioning system that adjusts the desired temperature and humidity by introducing the return air from the outside air and the constant temperature / humidity air conditioning room into the air conditioner,
A return air supply line for introducing the return air into the air conditioner is connected to an intermediate portion between the first cooling coil and the second cooling coil installed in the air conditioner,
A branch line is provided in the return air supply line,
A first motor damper is provided in the return air supply line;
A second motor damper and a vaporizing humidifier are disposed in the branch line;
Performing dehumidification of the outside air by the first cooling coil,
The second cooling coil cools the return air from the outside air and the constant temperature / humidity chamber,
An air conditioning system for constant temperature and humidity, wherein the vaporizing humidifier is configured to perform humidification of return air.

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