JP2006162465A - Optical sensor - Google Patents

Optical sensor Download PDF

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JP2006162465A
JP2006162465A JP2004355292A JP2004355292A JP2006162465A JP 2006162465 A JP2006162465 A JP 2006162465A JP 2004355292 A JP2004355292 A JP 2004355292A JP 2004355292 A JP2004355292 A JP 2004355292A JP 2006162465 A JP2006162465 A JP 2006162465A
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light
light receiving
lens
receiving surface
diffusion sheet
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Shunsuke Nishimura
俊介 西村
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SICK OPTEX KK
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SICK OPTEX KK
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical sensor having a simple constitution, capable of fully suppressing unevenness of light collection on its light-receiving surface, regardless of the surface conditions of the object to be measured, when using a light-receiving means having a plurality of pixels on the light-receiving surface. <P>SOLUTION: In the optical sensor, a diffusion sheet 7 is disposed between a light-receiving lens 2 and the light-receiving means 1, and light from the light-receiving lens 2 is made to diffuse and receive by the light-receiving surface 1a of the light-receiving means 1, thereby making the optical distribution of the light-receiving surface 1a uniform and making the unevenness in light collection small. Accordingly, the unevenness of light-collection on the light-receiving surface 1a can be fully suppressed, by using a simple structure, regardless of the surface conditions of the object to be measured M. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、測定対象物の変位または有無を測定する光学センサに関する。   The present invention relates to an optical sensor for measuring the displacement or presence of a measurement object.

従来から、受光レンズと、複数の画素からなる受光面をもつCCDイメージセンサのような受光手段とを有し、投光ビームで照射された測定対象物の反射光を受光レンズにより受光手段の受光面上に受光させて、三角測距方式で測定対象物の変位を測定する光学式変位センサが知られている。   Conventionally, it has a light receiving lens and a light receiving means such as a CCD image sensor having a light receiving surface composed of a plurality of pixels, and the light received by the light receiving means is reflected by the light receiving lens by the light receiving lens. An optical displacement sensor that receives light on a surface and measures the displacement of a measurement object by a triangulation method is known.

このように、受光手段が複数の画素を有する場合に、図4に示すように、測定対象物からの反射光が受光されると、測定対象物の表面状態によっては、受光手段の受光面に集光ムラ(斑点模様)が生じる。この集光ムラが生じると測定対象物に対して精度の高い検出、判別が困難となるので、従来装置として、CCDイメージセンサの受光面を測定対象物の変位方向に沿って複数の画素を配列させ各画素に特定の幅を持たせたうえで、光強度のばらつきを平均化する特定の演算を行ない、集光ムラの影響を除去しようとするものが知られている(例えば、特許文献1)。
特開平10−332335号公報
In this way, when the light receiving means has a plurality of pixels, as shown in FIG. 4, when reflected light from the measurement object is received, depending on the surface state of the measurement object, the light receiving surface of the light receiving means Condensation unevenness (spot pattern) occurs. When this unevenness in light collection occurs, it becomes difficult to detect and discriminate the measurement object with high accuracy. As a conventional apparatus, the light receiving surface of the CCD image sensor is arranged along the displacement direction of the measurement object. It is known that each pixel is given a specific width, and a specific calculation for averaging the variation in light intensity is performed to remove the influence of light collection unevenness (for example, Patent Document 1). ).
JP-A-10-332335

しかし、従来装置では特定の演算が必要とされるため構成が複雑となり、また、測定対象物によっては、その表面状態により集光ムラが依然として十分に抑制できず、精度の高い検出、判別が困難となる場合があった。測定対象物の有無を測定する距離設定型の光電センサにおいても同様の問題があった。   However, the conventional apparatus requires a specific operation and thus the configuration is complicated. Also, depending on the object to be measured, the unevenness of light collection cannot be sufficiently suppressed due to the surface state, and it is difficult to detect and discriminate with high accuracy. There was a case. The distance setting type photoelectric sensor for measuring the presence or absence of the measurement object has the same problem.

本発明は、前記の問題点を解決して、受光面に複数の画素を有する受光手段を用いる場合に、簡単な構成で、測定対象物の表面状態にかかわらず、受光面の集光ムラを十分に抑制できる光学センサを提供することを目的とする。   The present invention solves the above-mentioned problems, and when using a light receiving means having a plurality of pixels on the light receiving surface, the light receiving surface has a simple configuration, and the light collecting surface has uneven light collection regardless of the surface state of the measurement object. An object is to provide an optical sensor that can be sufficiently suppressed.

前記目的を達成するために、本発明の一構成にかかる光学センサは、受光レンズと複数の画素からなる受光面をもつ受光手段とを有し、測定対象物からの反射光を受光レンズにより受光手段の受光面上に受光させて、測定対象物の変位または有無を測定するものであって、受光レンズと受光手段間に設けられ、受光レンズからの光を拡散させて受光手段の受光面上に受光させる拡散シートを備えている。   In order to achieve the above object, an optical sensor according to one configuration of the present invention includes a light receiving lens and a light receiving means having a light receiving surface composed of a plurality of pixels, and receives reflected light from a measurement object by the light receiving lens. The light is received on the light receiving surface of the means to measure the displacement or presence of the measurement object, and is provided between the light receiving lens and the light receiving means, and diffuses the light from the light receiving lens on the light receiving surface of the light receiving means. A diffusion sheet for receiving light is provided.

この構成によれば、受光レンズと受光手段間に設けられた拡散シートにより、受光レンズからの光を拡散させて受光手段の受光面に受光させるので、受光面の光分布を均一化して集光ムラを小さくするから、簡単な構成で、測定対象物の表面状態にかかわらず、受光面の集光ムラを十分に抑制できる。   According to this configuration, the light from the light receiving lens is diffused and received by the light receiving surface of the light receiving means by the diffusion sheet provided between the light receiving lens and the light receiving means, so that the light distribution on the light receiving surface is made uniform and condensed. Since the unevenness is reduced, it is possible to sufficiently suppress the uneven light collection on the light receiving surface with a simple configuration regardless of the surface state of the measurement object.

好ましくは、前記拡散シートを前記受光レンズと受光手段間で光軸方向の任意位置に配置させる拡散シート位置調整手段を備えている。この場合、測定対象物の表面状態などに応じて、拡散シートの位置を調整することにより、最適な受光量を得ることができる。   Preferably, there is provided diffusion sheet position adjusting means for arranging the diffusion sheet at an arbitrary position in the optical axis direction between the light receiving lens and the light receiving means. In this case, an optimal amount of received light can be obtained by adjusting the position of the diffusion sheet according to the surface state of the measurement object.

本発明の他の構成にかかる光学センサは、受光レンズと複数の画素からなる受光面をもつ受光手段とを有し、測定対象物からの反射光を受光レンズにより受光手段の受光面に受光させて、測定対象物の変位または有無を測定するものであって、受光レンズと受光手段間に設けられ、一方の面に受光レンズからの光を拡散させて受光手段の受光面に受光させるすりガラスが形成され、他方の面にフィルタコーティングが形成されたデュアルガラスを備えている。   An optical sensor according to another configuration of the present invention includes a light-receiving lens and a light-receiving unit having a light-receiving surface including a plurality of pixels, and causes the light-receiving surface of the light-receiving unit to receive reflected light from the measurement object. A ground glass provided between the light receiving lens and the light receiving means for diffusing the light from the light receiving lens to receive light on the light receiving surface of the light receiving means. A dual glass is formed and formed with a filter coating on the other side.

この構成によれば、受光レンズと受光手段間に設けられたデュアルガラスの一方面のすりガラスにより、レンズからの光を拡散して受光手段の受光面に受光させ、受光面の光分布を均一化して集光ムラを小さくするので、測定対象物の表面状態にかかわらず、受光面の集光ムラを十分に抑制できるとともに、他方の面のフィルタコーティングにより任意の波長の光のフィルタリングが可能となるので、外乱光などに影響されないようにできる。また、すりガラスと光学フィルタを一体化したデュアルガラスを用いているので、本センサの小型化が図られる。   According to this configuration, the light from the lens is diffused by the ground glass on one side of the dual glass provided between the light receiving lens and the light receiving means and received on the light receiving surface of the light receiving means, and the light distribution on the light receiving surface is made uniform. Condensation unevenness is reduced, so that it is possible to sufficiently suppress light collection unevenness on the light receiving surface regardless of the surface state of the measurement object, and it is possible to filter light of any wavelength by the filter coating on the other surface. Therefore, it can be prevented from being affected by disturbance light. Further, since the dual glass in which the ground glass and the optical filter are integrated is used, the size of the sensor can be reduced.

以下、本発明の実施形態を図面にしたがって説明する。図1は、本発明の第1実施形態に係る光学式変位センサを示す構成図である。本センサは、投光レンズ3と、図示しない投光素子と、受光レンズ2と、複数の画素からなる受光面をもつ受光手段(イメージセンサ)1とを有し、各部はホルダ6内に収納されている。本センサは、投光素子からの投光ビームを測定対象物Mに投光レンズ3を介して照射し、測定対象物Mからの反射光を受光レンズ2により受光手段1の受光面1aに受光させて、測定対象物Mの変位、例えば高さ形状を測定するものである。   Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram showing an optical displacement sensor according to the first embodiment of the present invention. This sensor has a light projecting lens 3, a light projecting element (not shown), a light receiving lens 2, and a light receiving means (image sensor) 1 having a light receiving surface composed of a plurality of pixels, and each part is housed in a holder 6. Has been. This sensor irradiates the measuring object M with a light projection beam from the light projecting element through the light projection lens 3, and receives the reflected light from the measurement object M on the light receiving surface 1 a of the light receiving means 1 with the light receiving lens 2. Thus, the displacement of the measuring object M, for example, the height shape is measured.

本センサの受光手段(イメージセンサ)1は、例えば、基板4上に搭載され、イメージセンサシールド5で表面がシールドされている、1次元配列されたリニアイメージセンサである。また、投光素子は例えばレーザーダイオード(LD)である。   The light receiving means (image sensor) 1 of this sensor is, for example, a one-dimensionally arranged linear image sensor mounted on a substrate 4 and having a surface shielded by an image sensor shield 5. The light projecting element is, for example, a laser diode (LD).

本センサは、受光レンズ2とイメージセンサ1間に設けられ、受光レンズ2からの光を拡散させてイメージセンサ1の受光面1aに受光させる拡散シート7を備えている。拡散シート7は例えば樹脂製で、微細な網点(凹凸)状の表面を有しており、受光レンズ2からの光を散乱させた状態で受光面1aに受光させる。このように、拡散シート7により光を散乱状態にすることにより受光面1aの光分布が均一化されるので、図2に示すように、受光面1aの集光ムラが十分に小さくなる。   This sensor is provided between the light receiving lens 2 and the image sensor 1, and includes a diffusion sheet 7 that diffuses light from the light receiving lens 2 and causes the light receiving surface 1 a of the image sensor 1 to receive the light. The diffusion sheet 7 is made of, for example, resin and has a fine halftone dot (concave / convex) surface, and the light receiving surface 1a receives light in a state where light from the light receiving lens 2 is scattered. Thus, since the light distribution on the light receiving surface 1a is made uniform by making the light diffused by the diffusion sheet 7, the light collection unevenness on the light receiving surface 1a becomes sufficiently small as shown in FIG.

この例では、図1の拡散シート7を、受光レンズ2とイメージセンサシールド5間に設けているが、イメージセンサシールド5とイメージセンサ1間に設けるようにしてもよい。   In this example, the diffusion sheet 7 of FIG. 1 is provided between the light receiving lens 2 and the image sensor shield 5, but may be provided between the image sensor shield 5 and the image sensor 1.

また、本センサは、拡散シート7を前記受光レンズ2と受光手段(イメージセンサ)1間で光軸方向の任意位置に配置させる拡散シート位置調整手段8を備えている。拡散シート7の位置調整により、受光量が物理的に制御される。この位置調整は、測定対象物Mの表面状態や本センサの設置状況などに応じて、主として本センサの設置時に行なわれる。この例では、拡散シート位置調整手段8は拡散シート7とイメージセンサシールド5間に設けた所定の厚みをもつスペーサからなる。このスペーサをイメージセンサシールド5と受光面1a間に設けるようにしてもよい。また、拡散シート7自体の厚みを変化させることにより、拡散シート7の位置を調整するようにしてもよい。   The sensor further includes a diffusion sheet position adjusting means 8 for disposing the diffusion sheet 7 at an arbitrary position in the optical axis direction between the light receiving lens 2 and the light receiving means (image sensor) 1. The amount of received light is physically controlled by adjusting the position of the diffusion sheet 7. This position adjustment is performed mainly at the time of installation of the present sensor, depending on the surface state of the measurement object M, the installation status of the present sensor, and the like. In this example, the diffusion sheet position adjusting means 8 is composed of a spacer having a predetermined thickness provided between the diffusion sheet 7 and the image sensor shield 5. This spacer may be provided between the image sensor shield 5 and the light receiving surface 1a. Further, the position of the diffusion sheet 7 may be adjusted by changing the thickness of the diffusion sheet 7 itself.

このように、本発明では、受光レンズ2とイメージセンサ1間に設けられた拡散シート7により、受光レンズ2からの光を拡散させてイメージセンサ1の受光面1aに受光させるので、受光面1aの光分布が均一化して集光ムラを小さくするから、簡単な構成で、測定対象物Mの表面状態にかかわらず、受光面1aの集光ムラを十分に抑制できる。これにより、精度の高い検出、判別が可能な光学式変位センサが得られる。従来、投光側で拡散させることは、例えば液晶の面光源装置で発光側に拡散体を設けて、散乱光を出射させるなどのように知られているものの、集光ムラを十分に抑制するために、受光側で光を拡散させることは全く知られていないものである。   Thus, in the present invention, the light from the light receiving lens 2 is diffused by the diffusion sheet 7 provided between the light receiving lens 2 and the image sensor 1 and is received by the light receiving surface 1a of the image sensor 1, so that the light receiving surface 1a. The light distribution of the light receiving surface 1a is made uniform to reduce the light collection unevenness, and therefore the light collection unevenness of the light receiving surface 1a can be sufficiently suppressed with a simple configuration regardless of the surface state of the measurement object M. Thereby, an optical displacement sensor capable of highly accurate detection and discrimination can be obtained. Conventionally, diffusing on the light-projecting side is known as, for example, providing a diffuser on the light-emitting side of a liquid crystal surface light source device to emit scattered light, but sufficiently suppresses unevenness in light collection Therefore, it is not known at all to diffuse light on the light receiving side.

また、拡散シート位置調整手段8により、拡散シート7が任意位置に配置されるので、測定対象物Mの表面状態などに応じて、拡散シート7の位置を調整することにより、最適な受光量を得ることができる。   Further, since the diffusion sheet 7 is arranged at an arbitrary position by the diffusion sheet position adjusting means 8, the optimum amount of received light can be obtained by adjusting the position of the diffusion sheet 7 according to the surface state of the measurement object M or the like. Obtainable.

つぎに、第2実施形態について説明する。
図3は第2実施形態にかかる光学式変位センサの構成を示す。第2実施形態では、第1実施形態の拡散シート7に代えて、デュアルガラス17を設けている。このデュアルガラス17は、一方の面に受光レンズ2からの光を拡散させて受光手段1の受光面1aに受光させるすりガラス14が形成され、他方の面にフィルタコーティング15が形成されている。すりガラス14は、第1実施形態の拡散シート7と同様に光を散乱状態にすることにより受光面1aの光分布を均一化するものである。フィルタコーティング15は例えば任意の波長の光のみを通す帯域通過フィルタ(BPF)である。その他の構成は第1実施形態と同様である。
Next, a second embodiment will be described.
FIG. 3 shows a configuration of an optical displacement sensor according to the second embodiment. In the second embodiment, a dual glass 17 is provided instead of the diffusion sheet 7 of the first embodiment. The dual glass 17 has a ground glass 14 formed on one surface for diffusing light from the light receiving lens 2 to receive light on the light receiving surface 1a of the light receiving means 1, and a filter coating 15 formed on the other surface. The frosted glass 14 makes the light distribution on the light receiving surface 1a uniform by making light scatter in the same manner as the diffusion sheet 7 of the first embodiment. The filter coating 15 is, for example, a band pass filter (BPF) that passes only light of an arbitrary wavelength. Other configurations are the same as those of the first embodiment.

第2実施形態では、受光レンズ2とイメージセンサ1間に設けられたデュアルガラス17の一方の面のすりガラス14により、受光レンズ2からの光を拡散させてイメージセンサ1の受光面1aに受光させ、受光面1aの光分布を均一化して集光ムラを小さくするので、測定対象物Mの表面状態にかかわらず、受光面1の集光ムラを十分に抑制できるとともに、他方の面のフィルタコーティング15により任意の波長の光だけを通すなどフィルタリングも可能となるので、外乱光などに影響されないようにできる。これにより、精度の高い検出、判別が可能な光学式変位センサが得られる。しかも、すりガラスと光学フィルタを一体化したデュアルガラス17を用いているので、本センサの小型化も図られる。   In the second embodiment, light from the light receiving lens 2 is diffused by the ground glass 14 on one surface of the dual glass 17 provided between the light receiving lens 2 and the image sensor 1 to be received by the light receiving surface 1a of the image sensor 1. Since the light distribution on the light receiving surface 1a is made uniform and the light collection unevenness is reduced, the light collection unevenness on the light receiving surface 1 can be sufficiently suppressed regardless of the surface state of the measurement object M, and the filter coating on the other surface. 15 enables filtering such as passing only light of an arbitrary wavelength, so that it is not affected by disturbance light or the like. Thereby, an optical displacement sensor capable of highly accurate detection and discrimination can be obtained. In addition, since the dual glass 17 in which the ground glass and the optical filter are integrated is used, the size of the sensor can be reduced.

なお、各実施形態では、受光手段1に1次元配列されたリニアイメージセンサを用いているが、2次元配列のCCDイメージセンサを用いてもよい。   In each embodiment, a linear image sensor arranged one-dimensionally in the light receiving means 1 is used, but a CCD image sensor arranged in two dimensions may be used.

なお、各実施形態では、拡散シートまたはデュアルガラスを光学式変位センサに用いているが、測定対象物の有無を測定する距離設定型の光電センサに用いてもよい。   In each embodiment, a diffusion sheet or dual glass is used for the optical displacement sensor. However, the diffusion sheet or dual glass may be used for a distance setting type photoelectric sensor that measures the presence / absence of a measurement object.

本発明の第1実施形態に係る光学式変位センサを示す分解斜視図である。It is a disassembled perspective view which shows the optical displacement sensor which concerns on 1st Embodiment of this invention. 図1の光学式変位センサの一部を示す側面図である。It is a side view which shows a part of optical displacement sensor of FIG. 第2実施形態に係る光学式変位センサを示す側面図である。It is a side view which shows the optical displacement sensor which concerns on 2nd Embodiment. 従来の光学式変位センサを示す側面図である。It is a side view which shows the conventional optical displacement sensor.

符号の説明Explanation of symbols

1:受光手段(イメージセンサ)
1a:受光面
2:受光レンズ
7:拡散シート
8:拡散シート位置調整手段
14:すりガラス
15:フィルタコーティング
17:デュアルガラス
M:測定対象物


1: Light receiving means (image sensor)
1a: Light receiving surface 2: Light receiving lens 7: Diffusion sheet 8: Diffusion sheet position adjusting means 14: Ground glass 15: Filter coating 17: Dual glass M: Object to be measured


Claims (3)

受光レンズと複数の画素からなる受光面をもつ受光手段とを有し、測定対象物からの反射光を受光レンズにより受光手段の受光面に受光させて、測定対象物の変位または有無を測定する光学センサであって、
受光レンズと受光手段間に設けられ、受光レンズからの光を拡散させて受光手段の受光面に受光させる拡散シートを備えている光学センサ。
A light receiving unit having a light receiving lens and a light receiving surface composed of a plurality of pixels, the reflected light from the measurement object is received by the light receiving surface of the light receiving unit by the light receiving lens, and the displacement or presence of the measurement object is measured; An optical sensor,
An optical sensor provided with a diffusion sheet that is provided between the light receiving lens and the light receiving means and diffuses the light from the light receiving lens and receives it on the light receiving surface of the light receiving means.
請求項1において、さらに、
前記拡散シートを前記受光レンズと受光手段間で光軸方向の任意位置に配置させる拡散シート位置調整手段を備えている光学センサ。
The claim 1, further comprising:
An optical sensor comprising diffusion sheet position adjusting means for arranging the diffusion sheet at an arbitrary position in the optical axis direction between the light receiving lens and the light receiving means.
受光レンズと複数の画素からなる受光面をもつ受光手段とを有し、測定対象物からの反射光を受光レンズにより受光手段の受光面に受光させて、測定対象物の変位または有無を測定する光学センサであって、
受光レンズと受光手段間に設けられ、一方の面に受光レンズからの光を拡散させて受光手段の受光面に受光させるすりガラスが形成され、他方の面にフィルタコーティングが形成されたデュアルガラスを備えている光学センサ。

A light receiving unit having a light receiving lens and a light receiving surface composed of a plurality of pixels, the reflected light from the measurement object is received by the light receiving surface of the light receiving unit by the light receiving lens, and the displacement or presence of the measurement object is measured; An optical sensor,
It is provided between the light receiving lens and the light receiving means, and is provided with a dual glass having a ground glass formed on one surface for diffusing light from the light receiving lens and receiving light on the light receiving surface of the light receiving means, and a filter coating on the other surface. Optical sensor.

JP2004355292A 2004-12-08 2004-12-08 Optical sensor Pending JP2006162465A (en)

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Application Number Priority Date Filing Date Title
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JP2006162465A true JP2006162465A (en) 2006-06-22

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