JP2006145257A - Lens holder, lens measuring instrument, and lens holder adjustment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lens holder with its position highly accurately adjusted with respect to a prescribed direction, and especially to the rotational axis of a rotative drive part, and also provide a lens measuring instrument using the lens holder, and a lens holder adjustment method. <P>SOLUTION: This lens holder 120 used for holding a lens 105 under inspection, comprises a lens hold part 122 for holding the lens 105, and a reflective surface 123 for reflecting light in a direction substantially orthogonal to a plane including the hold part 122. Preferably, the lens holder 120 has a cylindrical shape while the hold part 122 is formed on one end face of the cylindrical shape. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a lens holder for holding a test lens, a lens measuring device for measuring the amount of eccentricity of the test lens using the lens holder, and a lens holder adjusting method.

  In the conventional lens eccentricity measuring apparatus, the lens to be tested is first held on the lens holder. Next, the lens holder is rotated around a predetermined rotation axis by a rotation driving unit such as a spindle. The eccentricity measuring unit measures the amount of eccentricity of the rotating test lens. Here, it is necessary to make the rotation axis of the spindle coincide with the central axis of the lens holder. Therefore, the tilt (tilt) of the lens holder with respect to the rotation axis of the spindle is adjusted. In order to adjust the tilt of the lens holder, for example, as proposed in Patent Document 1, a parallel plane plate is placed on the upper surface of the lens holder. The eccentricity measuring unit irradiates parallel plane plates with parallel light. The plane parallel plate reflects the irradiated parallel light. The eccentricity measuring unit detects a change in the optical path of the light reflected by the parallel flat plate. Thereby, the inclination of the lens holder is adjusted.

Japanese Patent Laid-Open No. 9-288041

  However, for example, when a foreign object or the like is present on the surface on which the parallel flat plate is placed, the parallel flat plate is placed on the lens holder in a state where an attachment error has occurred. This becomes more remarkable when the lens holder has a small diameter for measuring a small-diameter lens. Even when the plane accuracy of the plane parallel plate is low, the plane parallel plate is placed on the lens holder in a state different from the predetermined state. As a result, in the prior art, it may be difficult to adjust the tilt of the lens holder with high accuracy.

  The present invention has been made in view of the above, and an object of the present invention is to provide a lens holder capable of highly accurately adjusting the position in a predetermined direction, a lens measuring device using the lens holder, and a lens holder adjusting method. And

  In order to solve the above-described problems and achieve the object, according to the first aspect of the present invention, there is provided a lens holder for holding a test lens, a lens holding unit for holding the test lens, and a lens holding And a reflecting surface that reflects light in a direction substantially orthogonal to a plane including the portion.

  According to a preferred aspect of the present invention, the lens holder has a cylindrical shape, the lens holding portion is formed on one end surface of the cylindrical shape, and the reflection surface is formed in the vicinity of the one end surface of the cylindrical shape. It is desirable that the surface be substantially perpendicular to the central axis.

  According to a preferred aspect of the present invention, it is desirable that the lens holding portion and the reflecting surface are formed on the same surface.

  According to a preferred aspect of the present invention, it is desirable that a recess is provided in the vicinity of the end surface on which the lens holding portion is formed.

  According to a preferred aspect of the present invention, it is desirable to further have a through hole for sucking the lens to be examined.

  Moreover, according to the preferable aspect of this invention, it is desirable to have further the suction part connected to the through-hole.

  According to a preferred aspect of the present invention, the first magnet is provided in the vicinity of the end surface where the test lens holding portion is formed, and the first magnet is provided so as to face the first magnet through the test lens. It is desirable to have a second magnet.

  According to a preferred aspect of the present invention, it is desirable to have a biasing portion that presses the lens to be tested against the lens holding portion.

  According to the second aspect of the present invention, the lens holder holding portion for fixing the lens holder holding the lens to be examined, the rotation driving portion for rotating the lens holder holding portion, and the reflection surface formed on the lens holder. It is possible to provide a lens measuring device including a displacement detection unit that detects displacement.

  Moreover, according to the preferable aspect of this invention, a displacement detection part is based on the detection result of the light irradiation part which irradiates light to a reflective surface, the light detection part which light-receives the light reflected from the reflective surface, and a light detection part. It is desirable to have an arithmetic unit that calculates the displacement of the reflecting surface.

  According to a preferred aspect of the present invention, it is desirable to have a display unit that displays the displacement of the reflecting surface calculated by the calculation unit. The displacement detector preferably measures the displacement of the surface of the test lens.

  According to the third aspect of the present invention, in the adjustment method of the lens holder that holds the lens to be examined, a displacement detection step of detecting the displacement of the reflecting surface based on the reflected light from the reflecting surface formed on the lens holder. And an adjustment step of adjusting at least one of the position and the inclination of the lens holder based on the displacement of the reflecting surface.

  According to a preferred aspect of the present invention, the displacement detection step further includes a light irradiation step for irradiating light on the reflection surface, a rotation step for rotating the lens holder, and light reflected from the reflection surface as a point image. And a calculation step for calculating the displacement of the reflecting surface based on the point image information. In the adjustment step, the position of the detected point image is approximately in a state where the lens holder is rotated. It is desirable to adjust at least one of the position and the inclination of the lens holder so as to be constant.

  According to a preferred aspect of the present invention, in the adjustment step, in a state where the lens holder is rotated, at least one of the position and the inclination of the lens holder so that the central axis and the rotation axis of the lens holder substantially coincide with each other. It is desirable to adjust.

  In the first aspect of the present invention, the lens holder includes a reflecting surface. The reflecting surface reflects light in a direction substantially orthogonal to the plane including the lens holding portion. Thereby, the reflecting surface of the lens holder reflects, for example, irradiated parallel light in a direction substantially orthogonal to the plane including the lens holding portion. The lens holder may be inclined with respect to the rotation axis of the rotation drive unit that rotates the lens holder. At this time, the optical path of the parallel light reflected by the reflecting surface changes according to the inclination. Based on this change, the tilt of the lens holder can be adjusted. In the present invention, the lens holder itself has a reflecting surface. For this reason, it is not necessary to use a parallel plane plate separately. Thereby, the problem of the attachment error of the plane parallel plate with respect to a lens holder does not arise. As a result, position adjustment, in particular inclination adjustment, can be performed with high accuracy with respect to a predetermined direction, particularly with respect to the rotation axis of the rotation drive unit.

  In the second aspect of the present invention, the displacement detection unit optically detects the displacement of the reflecting surface formed on the lens holder, for example. In order to optically detect the displacement of the reflecting surface, for example, the reflecting surface is irradiated with parallel light. The reflecting surface reflects parallel light in a direction corresponding to the tilt of the lens holder. A displacement detection part detects the change of the optical path of the light reflected by the reflective surface. Thereby, the displacement detection part can detect the displacement of a lens holder by non-contact. In the present invention, it is not necessary to use a plane-parallel plate when adjusting the position of the lens holder. Thereby, the problem of the mounting error of the plane parallel plate with respect to the lens holder does not occur. As a result, the position adjustment, particularly the inclination of the lens holder can be adjusted with high accuracy with respect to the rotation axis of the rotation drive unit. Therefore, the amount of eccentricity of the test lens can be measured with high accuracy.

  According to the third aspect of the present invention, the displacement detecting step detects the displacement of the reflecting surface based on the reflected light from the reflecting surface formed on the lens holder. In order to optically detect the displacement of the reflecting surface, for example, the reflecting surface is irradiated with parallel light. The reflecting surface reflects parallel light in a direction corresponding to the tilt of the lens holder. In the displacement detection step, a change in the optical path of the light reflected by the reflecting surface is detected. Thereby, in the displacement detection step, the displacement of the lens holder can be detected without contact. In the present invention, it is not necessary to use a plane-parallel plate in the adjustment step of the lens holder. Thereby, the problem of the mounting error of the plane parallel plate with respect to the lens holder does not occur. As a result, the position adjustment, particularly the inclination of the lens holder can be adjusted with high accuracy with respect to the rotation axis of the rotation drive unit. Thus, the step of placing the plane parallel plate on the lens holder can be omitted. Furthermore, the amount of eccentricity of the test lens can be measured with high accuracy.

  Embodiments of a lens holder, a lens measuring device, and a lens holder adjusting method according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

  FIG. 1 shows a schematic configuration of a lens measuring apparatus 100 according to Embodiment 1 of the present invention. The lens measuring device 100 mainly includes a lens measuring unit 110, a position adjusting unit 130, and a rotation driving unit 140. The calculation / control unit 150 is connected to the lens measurement unit 110 and the rotation driving unit 140. The lens measurement unit 110 and the calculation / control unit 150 correspond to a displacement detection unit.

  The light source 111 supplies light to be irradiated to a lens holder 120 described later. As the light source 111, for example, a semiconductor laser or a white light source can be used. The light from the light source 111 enters the collimator lens 112. The collimator lens 112 converts incident light into substantially parallel light and emits it. The light converted into substantially parallel light is incident on the polarization beam splitter 113. The polarization beam splitter 113 transmits polarized light having a specific vibration direction and reflects polarized light having a vibration direction orthogonal to the specific vibration direction. The polarizing beam splitter 113 transmits, for example, p-polarized light and reflects s-polarized light. The p-polarized light that has passed through the polarization beam splitter 113 is incident on the quarter-wave plate 114. The polarized light transmitted through the quarter-wave plate 114 enters the objective optical system 115.

  The objective optical system 115 condenses incident light at the focal position. The objective optical system 115 is configured such that the focal length can be adjusted according to the purpose of use or the radius of curvature of the lens 105 to be examined. For example, the objective optical system 115 is configured to be exchangeable with another objective optical system (not shown) having a different focal length. Thereby, the light can be condensed at a predetermined focal position by appropriately replacing the objective optical system 115. Further, the objective optical system 115 may be configured to be capable of zooming. Also by this, light can be condensed at a predetermined focal position. Furthermore, it is desirable that the focal position is at infinity, that is, parallel light can be emitted when the objective optical system 115 is zoomed.

  The center of curvature of the first surface 105a of the test surface 105 is adjusted to match the focal position of the objective optical system 115. The condensed light from the objective optical system 115 is reflected by the first surface 105 a of the test lens 105. The first surface 105a is the test surface. The test lens 105 is held by the lens holder 120. Detailed procedures of the lens holder 120 adjustment method and the eccentricity measurement method will be described later. The light reflected by the first surface 105a is incident on the objective optical system 115 again. The light traveling through the objective optical system 115 in the direction opposite to the outward path passes through the quarter-wave plate 114. The ¼ wavelength plate 114 is transmitted twice in the forward path and the return path. Thereby, for example, p-polarized light is converted into s-polarized light. The converted s-polarized light is reflected by the polarization plane of the polarization beam splitter 113. The light reflected by the polarization plane of the polarization beam splitter 113 passes through the lens systems 116 and 117 and is collected on the light receiving surface of the optical position detection element 118. As the optical position detection element 118, for example, a two-dimensional CCD or the like can be used. The light position detection element 118 corresponds to a light detection unit. An optical system extending from the light source 111 to the objective optical system 115 along the direction in which the light travels corresponds to the light irradiation unit. Furthermore, an optical system from the objective optical system 115 to the optical position detection element 118 along the reflected light from the lens 105 corresponds to a light detection unit. Therefore, the polarization beam splitter 113 and the objective optical system 115 share the functions of the light irradiation unit and the light detection unit, respectively.

  Next, the position adjustment unit 130 and the rotation driving unit 140 will be described. The test lens 105 is sucked and held by the lens holder 120 by suction. The configuration for sucking and holding the test lens 105 and the detailed configuration of the lens holder 120 will be described later. The position adjustment unit 130 includes a movable stage 132. The movable stage 132 is configured so that the shift (position) and tilt (tilt) can be adjusted. The lens holder 120 has a female thread portion 121 formed at the center of the bottom surface. In addition, a male screw portion 126 is formed at the central portion of the movable stage 132. The male screw portion 126 corresponds to the lens holder holding portion. The lens holder 120 is fixed to the movable stage 132 by screwing both screw portions.

  FIG. 1 shows a cross-sectional configuration of a shift adjustment mechanism. The movable stage 132 is sandwiched between the shift adjustment knob 131 and the compression spring 133. The movable stage 132 is further sandwiched between another shift adjustment knob (not shown) and a compression spring (not shown) provided in the orthogonal direction. Thereby, the movable stage 132 is movable in the shift direction in the xy plane.

  FIG. 2 shows a cross-sectional configuration of a tilt adjustment mechanism of the position adjustment unit 130. The position adjustment unit 130 is attached to the rotation drive unit 140 by a ball joint 136 and two tilt adjustment knobs 134. In FIG. 2, only one of the two tilt adjustment knobs is shown, and the other knob is not shown. A compression spring 135 is disposed between the tilt adjustment knob 134 and the rotation drive unit 140. Thereby, the tilt (tilt) of the movable stage 132 can be adjusted with respect to the rotation axis AX of the rotation drive unit 140. As described above, the position adjustment unit 130 can use a known configuration in which shift and tilt can be adjusted. Further, a movable stage for tilt adjustment and a movable stage for shift adjustment may be arranged to overlap each other.

  Returning to FIG. 1, the description will be continued. The rotation drive unit 140 is rotated about the rotation axis AX by the rotation motor 151. For example, an air spindle can be used as the rotation driving unit 140. The light source 111, the collimator lens 112, and the objective optical system 115 are arranged so as to be coaxial with the rotation axis AX of the rotation driving unit 140. The rotation drive unit 140 rotates the entire position adjustment unit 130 around the rotation axis AX.

  The calculation / control unit 150 calculates the displacement of the reflection surface 123 of the lens holder 120 described later based on the detection signal from the optical position detection element 118. Further, the calculation / control unit 150 controls the rotation motor 151. The calculation / control unit 150 corresponds to a calculation unit. The display unit 153 displays the light reception result of the optical position detection element 118 and the calculated displacement amount.

  Next, a configuration in which the lens holder 120 holds the test lens 105 by suction will be described. FIG. 3 shows a cross-sectional configuration for adsorbing and holding the test lens 105. As described above, the lens holder 120 is fixed to the movable stage 130 via the screw portion 121. The lens holder 120 has a cylindrical shape. A through hole 142 is formed in the inner peripheral portion of the lens holder 120. In addition, a suction hole 142 is formed in the movable stage 130 so as to be continuous with the through hole 142. Further, a suction hole 141 is also formed in the rotation drive unit 140 so as to be connected to the suction hole 142. A suction part 152 is provided at the end of the suction hole 141. The suction unit 152 is a pump that sucks air. When the suction unit 152 sucks air, the air is sucked in the direction indicated by the arrow in FIG. Thereby, the test lens 105 is sucked and held by the lens holder 120.

(Configuration of lens holder)
FIG. 4 shows a schematic configuration of the lens holder 120. As described above, the lens holder 120 has a hollow cylindrical shape, specifically, a cylindrical shape. A lens holding portion 122 is formed on one end surface of the cylindrical shape. The lens holding part 122 further includes an inner lens holding part 122a and an outer lens holding part 122b.

  In addition, a reflection surface 123 is formed on one end surface of the lens holder 120. The reflecting surface 123 is a surface that is substantially orthogonal to the cylindrical central axis AXL. The reflecting surface 123 reflects light incident in a parallel direction along the central axis AXL in a direction substantially orthogonal to the plane including the lens holding portion 122. Thus, the lens holding part 122 and the reflective surface 123 are formed on the same surface.

  The lens holder 120 is made of a metal such as brass or stainless steel, for example. And it can be set as a reflective surface by grind | polishing a cylindrical end surface. More preferably, it is desirable to deposit aluminum or the like in order to increase the reflectance. The dimensions of the lens holder 120 are, for example, a diameter of about 5 mm to 10 mm and a height of about 50 mm. And it is comprised suitably in order to hold | maintain a small aperture lens. Moreover, it is good also as a structure which hold | maintains a medium aperture lens and a large aperture lens, without being limited to this dimension.

  The hollow portion inside the lens holder 120 constitutes the above-described through hole 124. Air is sucked through the through hole 124. When measuring the eccentricity of the first surface 105a of the test lens 105, the test lens 105 is placed so that the second surface 105b and the lens holding portion 122 are in contact with each other. When the second surface 105b is a convex surface, the test lens 105 is held by the inner lens holding portion 122a. On the other hand, when the second surface 105b of the test lens 105 is concave, the test lens 105 is held by the outer lens holding portion 122b.

(Lens holder adjustment method)
Next, a method for adjusting the lens holder will be described with reference to FIGS. 5-1, 5-2, and 5-3. In FIGS. 5-1, 5-2, and 5-3, for convenience of explanation, the movable stage is divided into a movable stage 132a for tilt adjustment and a movable stage 132b for shift adjustment. Prior to measuring the eccentricity of the lens 105, tilt adjustment and shift adjustment of the lens holder 120 are performed. By adjusting the tilt of the lens holder 120, the tilt (tilt) of the lens holder 120 with respect to the rotation axis AX of the rotation driving unit 140 is set to a substantially zero state. Further, by adjusting the shift of the lens holder 120, the position (shift) of the lens holder 120 with respect to the rotation axis AX of the rotation driving unit 140 is set to a substantially zero state. In this embodiment, the lens measurement unit 110 optically performs tilt adjustment and shift adjustment. These adjustments include a displacement detection step and an adjustment step.

  A procedure for adjusting the tilt of the lens holder 120 will be described with reference to FIG. During the tilt adjustment, the lens holder 120 is fixed to the movable stage 132 as described above. The focal length of the objective optical system 115 of the lens measurement unit 110 is adjusted to infinity. In the light irradiation step, the parallel light L1 is irradiated from the lens measurement unit 110 to the lens holder 120. The reflecting surface 123 of the lens holder 120 reflects the irradiated parallel light L <b> 1 in a direction substantially orthogonal to a plane including the lens holding unit 122. The reflected parallel light L1 (hereinafter referred to as “measurement light” as appropriate) is incident on the lens measurement unit 110 again.

  Returning to FIG. 1, the description will be continued. The measurement light that has passed through the objective optical system 115 and the quarter-wave plate 114 is incident on the polarization beam splitter 113. As described above, the measurement light is reflected by the polarization plane of the polarization beam splitter 113. Then, the reflected measurement light travels along the optical path LB. The measuring light is condensed as a point image on the light receiving surface of the optical position detecting element 118 by the lens systems 116 and 117 (point image receiving step). The optical position detection element 118 converts measurement light condensed as a point image into an image signal. The converted image signal is output to the calculation / control unit 150. The display unit 153 displays the state of the point image received by the optical position detection element 118 on the monitor.

  Consider a state in which the lens holder 120 is not tilted with respect to the rotation axis AX of the rotation drive unit 140. The state where there is no tilt refers to a state where the reflecting surface 123 and a plane substantially orthogonal to the rotation axis AX of the rotation driving unit 140 coincide. When there is no tilt, the optical path LB of the measurement light reflected by the reflecting surface 123 and the optical path LA of the irradiation light (outward path) from the light source 111 to the objective optical system 115 are coaxial. Here, the optical path LA of the irradiation light (outward path) from the light source 111 to the objective optical system 115 and the rotation axis AX of the rotation driving unit 140 are configured to be coaxial.

  The position adjusting unit 130 is rotated around the rotation axis AX by the rotation driving unit 140. Thereby, in the rotation step, the lens holder 120 also rotates about the rotation axis AX. When the lens holder 120 is not tilted, the optical path LB of the measurement light reflected by the reflecting surface 123 during rotation is constant and does not change. For this reason, the condensing position in the optical position detection element 118 is also constant. As a result, in the point image receiving step, the position of the point image of the measurement light displayed on the display unit 153 does not move.

  On the other hand, let us consider a state in which the lens holder 120 is tilted with respect to the rotation axis AX of the rotation driving unit 140. The state where the tilt exists means a state where the reflecting surface 123 and the plane substantially orthogonal to the rotation axis AX of the rotation driving unit 140 do not coincide with each other. In the presence of tilt, the optical path LB of the measurement light reflected by the reflecting surface 123 and the optical path LA of the irradiation light (outward path) from the light source 111 to the objective optical system 115 are different.

  In a state where the lens holder 120 is tilted, the optical path LB of the measurement light reflected by the reflecting surface 123 during rotation differs from the optical path LA of the illumination light (outward path) according to the tilt amount. For this reason, the optical path LB of the measurement light and the rotation axis AX are not coaxial. As a result, in the point image receiving step, the position of the point image of the measurement light displayed on the display unit 153 draws an arc-shaped locus. The measurer moves the tilt adjustment movable stage 132a (FIG. 5-1) on the light receiving surface of the optical position detecting element 118 so that the radius of the circular locus of the point image is as small as possible, preferably approximately zero. Adjust. Thus, in the adjustment step, the inclination of the lens holder 120 is adjusted so that the position of the detected point image is substantially constant while the lens holder 120 is being rotated.

  Here, in the calculation step, the calculation / control unit 150 may calculate the displacement (tilt direction) of the reflection surface 123 based on the detection result of the optical position detection element 118. Then, based on the calculation result, the measurer adjusts the tilt adjustment movable stage 132a so that the radius of the arc-shaped locus of the point image becomes substantially zero. Further, the area of the reflection surface 123 corresponds to the amount of measurement light received by the optical position detection element 118. For this reason, if the area | region of the reflective surface 123 is enlarged, the light quantity of measurement light will increase. As a result, the brightness of the point image becomes brighter. Therefore, the measurer can adjust the tilt more easily.

  Next, with reference to FIG. 5B, a procedure for adjusting the shift of the lens holder 120 will be described. During the shift adjustment, the ball lens 160 is placed on the lens holder 120. The ball lens 160 is a reference lens having a high sphericity. The ball lens 160 contacts the lens holder 120 at the inner lens holding portion 122a. For this reason, the ball lens 160 is sucked and held by the inner lens holding portion 122a. The focal length of the objective optical system 115 of the lens measurement unit 110 is adjusted. Specifically, the ball center position of the ball lens 160 and the focal position of the objective optical system 115 are matched. Thereby, the condensed (convergent) light L <b> 2 is irradiated from the lens measurement unit 110 to the lens holder 120. The ball lens 160 reflects the irradiated condensed light L <b> 2 in the direction of the objective optical system 115. The reflected light (hereinafter referred to as “measurement light” as appropriate) enters the lens measurement unit 110 again.

  Returning to FIG. 1, the description will be continued. The measurement light that has passed through the objective optical system 115 and the quarter-wave plate 114 is incident on the polarization beam splitter 113. As described above, the measurement light is reflected by the polarization plane of the polarization beam splitter 113. Next, the reflected measurement light travels along the optical path LB. Then, the measurement light is condensed as a point image on the light receiving surface of the optical position detection element 118 by the lens systems 116 and 117. Similar to the tilt adjustment, the display unit 153 displays the state of the point image received by the optical position detection element 118 on the monitor.

  Consider a state in which the lens holder 120 is not shifted with respect to the rotation axis AX of the rotation driving unit 140. The state where there is no shift refers to a state where the center of the ball lens 160 exists on the rotation axis AX of the rotation drive unit 140. When there is no shift, the optical path LB of the measurement light reflected by the ball lens 160 and the optical path LA of the irradiation light (outward path) from the light source 111 to the objective optical system 115 are coaxial.

  Similarly to the tilt adjustment, the position adjustment unit 130 is rotated around the rotation axis AX by the rotation driving unit 140. Thereby, the ball lens 160 also rotates around the rotation axis AX. When there is no shift in the lens holder 120, the optical path LB of the measurement light reflected by the ball lens 160 during rotation is constant and does not change. For this reason, the condensing position in the optical position detection element 118 is also constant. As a result, the position of the point image of the measurement light displayed on the display unit 153 does not move.

  On the other hand, a state in which the lens holder 120 is shifted with respect to the rotation axis AX of the rotation driving unit 140 is considered. The state where the shift exists means a state where the position of the ball center of the ball lens 160 does not exist on the rotation axis AX of the rotation driving unit 140. In a state where there is a shift, the optical path LB of the measurement light reflected by the ball lens 160 and the optical path LA of the irradiation light (outward path) from the light source 111 to the objective optical system 115 are different.

  The position adjusting unit 130 is rotated around the rotation axis AX by the rotation driving unit 140. As a result, the lens holder 120 also rotates about the rotation axis AX. In a state where there is a shift in the lens holder 120, the optical path LB of the measurement light reflected by the ball lens 160 during rotation differs from the optical path LA of the illumination light (outward path) according to the shift amount. For this reason, the optical path LB of the measurement light and the rotation axis AX are not coaxial. As a result, the position of the point image of the measurement light displayed on the display unit 153 draws an arc-shaped locus. The measurer adjusts the shift adjustment movable stage 132b on the light receiving surface of the optical position detection element 118 so that the radius of the circular locus of the point image is preferably as small as possible, preferably approximately zero.

  In a state where the tilt adjustment and the shift adjustment of the lens holder 120 are completed, the cylindrical center axis AXL of the lens holder 120 and the rotation axis AX of the rotation driving unit 140 substantially coincide with each other. In this state, the eccentricity of the test lens 105 is next measured.

(Measurement of the eccentricity of the test lens)
A procedure for measuring the eccentricity of the lens 105 will be described with reference to FIG. The lens 105 to be tested is held by suction on the lens holder 120 in a state where the shift adjustment and the tilt adjustment are completed. At this time, it arrange | positions so that the 1st surface 105a and the objective optical system 115 may oppose. Further, a mark (a mark) for recognizing the rotation direction is formed in a region outside the effective diameter of the lens 105 to be examined. The focal length of the objective optical system 115 of the lens measurement unit 110 is adjusted. Specifically, the position of the center of curvature of the first surface 105a of the lens 105 to be tested is matched with the focal position of the objective optical system 115. The condensed light L <b> 3 is irradiated from the lens measurement unit 110 to the lens holder 120. The first surface 105 a of the test lens 105 reflects the irradiated condensed light L <b> 3 toward the objective optical system 115. The reflected light (hereinafter referred to as “measurement light” as appropriate) enters the lens measurement unit 110 again.

  Returning to FIG. 1, the description will be continued. The measurement light that has passed through the objective optical system 115 and the quarter-wave plate 114 is incident on the polarization beam splitter 113. As described above, the measurement light is reflected by the polarization plane of the polarization beam splitter 113. Next, the reflected measurement light travels along the optical path LB. Then, the measurement light is condensed as a point image on the light receiving surface of the optical position detection element 118 by the lens systems 116 and 117. Similar to the tilt adjustment and the shift adjustment, the display unit 153 displays the state of the point image received by the optical position detection element 118 on the monitor.

  The position adjusting unit 130 is rotated around the rotation axis AX by the rotation driving unit 140. As a result, the lens holder 120 also rotates about the rotation axis AX. The point image draws an arc-shaped locus on the light receiving surface of the optical position detecting element 118 according to the amount of eccentricity of the first surface 105a of the lens 105 to be examined. The display unit 153 displays the position of the point image of the measurement light. The calculation / control unit 150 calculates the displacement (the amount of eccentricity) of the first surface 105 a based on the detection result (image signal) from the optical position detection element 118 and the position of the mark formed on the lens 105 to be examined.

  Next, the measurer places the second lens 105 on the lens holder 120 so that the second surface 105 b of the lens 105 to be tested faces the objective optical system 115. Then, similarly to the first surface 105a described above, the eccentricity measurement of the second surface 105b is performed. In this way, it is possible to measure the eccentricity of both surfaces of the test lens 105.

  As described above, in this embodiment, the lens holder 120 includes the reflecting surface 123. The reflecting surface 123 reflects the parallel light emitted from the objective optical system 115 in a direction substantially orthogonal to the plane including the lens holding unit 122. Based on the measurement light reflected by the reflecting surface 123, the tilt (tilt) of the lens holder 123 can be adjusted. In the present embodiment, the lens holder 120 itself includes the reflecting surface 123. For this reason, it is not necessary to use a parallel plane plate separately. Thereby, the problem of the attachment error of the plane parallel plate with respect to the lens holder 120 does not arise. As a result, the position of the lens holder 120 can be optically adjusted with respect to the rotation axis AX of the rotation driving unit 140, particularly, the inclination can be adjusted with high accuracy. Further, for example, even if a foreign object adheres to the reflection surface 123, the position of the point image of the optical position detection element 118 is not affected. As a result, the tilt adjustment of the lens holder 120 can be performed with high accuracy even when foreign matter is attached to the reflecting surface 123.

  FIG. 6 illustrates a perspective configuration of the lens holder 220 according to the second embodiment. The lens holder 220 has a hollow cylindrical shape. A lens holding portion 222 is formed on one end surface of the cylindrical shape. The lens holding part 222 further includes an inner lens holding part 222a and an outer lens holding part 222b. In all the following embodiments, the same portions as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted.

  A reflection surface 223 is formed on one end surface of the lens holder 220. The reflective surface 223 is formed in a region lower than the lens holding part 222 by a predetermined height h. In addition, the reflection surface 223 is discretely provided at substantially intervals along the circumferential direction on the end surface of the annular zone shape. Thereby, the lens holding part 222 and the reflecting surface 223 are configured to repeat unevenness alternately along the circumferential direction. The reflection surface 223 is a surface substantially orthogonal to the cylindrical center axis AXL. The reflection surface 223 reflects light incident in a direction parallel to the central axis AXL in a direction substantially orthogonal to a plane including the lens holding unit 222. Further, similarly to the first embodiment, a through hole (not shown) is formed.

  For example, the lens holder 220 sucks and holds a convex surface like the ball lens 160 described above by the inner lens holding portion 222a. Further, when holding the concave surface side of the lens to be examined, it is held by suction by the outer lens holding portion 222b.

  In this embodiment, in addition to the effects of the first embodiment, the following effects are further obtained. The test lens 105 is held by the lens holding unit 222a. The reflection surface 223 is formed in a region lower than the lens holding part 222 by a predetermined height. For this reason, the test lens 105 does not come into contact with the reflecting surface 223. As a result, for example, even when the lens holder 220 is repeatedly used, damage to the reflecting surface 223 due to contact can be reduced. As a result, the reflectance of the reflecting surface 223 can be maintained.

(First Modification of Example 2)
FIG. 7 shows a configuration of a lens holder 320 according to a first modification of the present embodiment. The reference symbol (a) in FIG. 7 indicates a perspective configuration of the lens holder 320, and the reference symbol (b) indicates a cross-sectional configuration. The lens holder 320 has a hollow cylindrical shape. An annular lens holding portion 322 is formed on the outer peripheral portion and the inner peripheral portion of one end surface of the cylindrical shape. The lens holding part 322 further includes an inner lens holding part 322a and an outer lens holding part 322b.

  In addition, an annular reflecting surface 323 is formed in an intermediate region between the two lens holding portions 322. The reflection surface 323 is formed in a region lower than the lens holding portion 322 by a predetermined height h. As a result, the lens holding portion 322 and the reflection surface 323 are configured to repeat unevenness alternately along the radial direction. The reflective surface 323 is a surface that is substantially orthogonal to the cylindrical central axis AXL. The reflecting surface 323 reflects light incident in a parallel direction along the central axis AXL in a direction substantially orthogonal to a plane including the lens holding portion 322. Further, as in the first embodiment, a through hole 124 is formed.

  For example, the lens holder 320 sucks and holds a convex surface like the ball lens 160 described above by the inner lens holding portion 322a. Further, when holding the concave surface side of the lens to be examined, it is held by suction by the outer lens holding portion 322b. In this modification, the reflection surface 323 is formed in a region lower than the lens holding portion 322 by a predetermined height h. For this reason, the test lens 105 does not come into contact with the reflecting surface 323. As a result, for example, even when the lens holder 320 is repeatedly used, damage to the reflecting surface 323 due to contact can be reduced. As a result, the reflectance of the reflecting surface 323 can be maintained. Further, the test lens 105 can be sucked and held by the entire circumference of the lens holding portion 322a or the lens holding portion 322b. As a result, it is possible to more reliably attract and hold the lens 105 to be tested as compared with the second embodiment.

(Second Modification of Example 2)
FIG. 8 shows a perspective configuration of a lens holder 420 according to a second modification of the present embodiment. The lens holder 420 has a hollow cylindrical shape. An annular lens holding portion 122 is formed on the inner peripheral portion of one end surface of the cylindrical shape. The lens holding part 122 further includes an inner lens holding part 122a and an outer lens holding part 122b.

  In addition, an annular reflecting surface 423 is formed outside the lens holding portion 122. The reflective surface 423 is formed in a region lower than the lens holding part 122 by a predetermined height h. The reflecting surface 423 is a surface that is substantially orthogonal to the cylindrical central axis AXL. The reflecting surface 423 reflects light incident in a direction parallel to the central axis AXL in a direction substantially orthogonal to the plane including the lens holding unit 122. Further, similarly to the first embodiment, a through hole (not shown) is formed.

  For example, the lens holder 420 sucks and holds a convex surface such as the above-described ball lens 160 by the inner lens holding portion 122a. Further, when holding the concave surface side of the lens to be examined, the lens is sucked and held by the outer lens holding portion 122b. In this modification, the reflection surface 423 is formed in a region lower than the lens holding part 122 by a predetermined height h. For this reason, the test lens 105 does not come into contact with the reflecting surface 223. As a result, for example, even when the lens holder 420 is repeatedly used, damage to the reflecting surface 423 due to contact can be reduced. As a result, the reflectance of the reflecting surface 423 can be maintained. Furthermore, the area of the reflective surface 423 can be formed to an arbitrary size while reducing the diameter of the lens holding portion 122. As a result, the lens holder 420 can hold, for example, a small-diameter lens. At the same time, a sufficient amount of reflected light from the reflecting surface 423 can be secured.

  FIG. 9A illustrates a perspective configuration near the end of the lens holder 520 according to the third embodiment. In the lens holder 520 of the present embodiment, a notch 524 is formed on the outer peripheral side surface along the central axis AXL.

  FIG. 9-2 shows a cross-sectional configuration of a plane including the center axis AXL of the lens holder 520. The test lens 105 has a protrusion 106 on the outer side of the effective diameter. Then, the protrusion 106 is engaged with the notch 524. Thereby, when the test lens 105 is placed on the lens holder 520, the test lens 105 can be easily positioned. In some cases, the lens surface of the test lens 105 is intentionally decentered. In such an eccentric lens, the lens surface has an inclination (tilt) by a predetermined amount in advance. When the test lens 105 and the lens holder 520 can be easily positioned as in the present embodiment, the positioning reproducibility is high. High reproducibility of positioning is useful when measuring an eccentric lens as described above.

(First Modification of Example 3)
FIG. 10A illustrates a perspective configuration near the end of the lens holder 620 according to the first modification of the third embodiment. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. In the lens holder 620 of this embodiment, a protrusion 621 is formed on a part of the annular reflecting surface 123.

  FIG. 10-2 shows a cross-sectional configuration of the lens holder 620. The test lens 105 has a hole 107 in the outer portion of the effective diameter. Then, the protrusion 621 is engaged with the hole 107. Thereby, when the test lens 105 is placed on the lens holder 620, the test lens 105 can be easily positioned. Note that the hole 107 may be formed in a groove shape.

  FIG. 11 illustrates a perspective configuration in the vicinity of the end of the lens holder 720 according to the fourth embodiment. The lens holder 720 has a triangular prism shape having a recess at the center. The reflection surface 723 has a hollow triangular shape. Further, as shown in FIG. 12, the lens holder 820 may be formed in a hexagonal prism shape having a recess at the center. At this time, the reflecting surface 823 has a hollow hexagonal shape. In each of the above embodiments, the lens holder holds the test lens 105 by suction. On the other hand, the present embodiment is different in that the lens holder holds the test lens 105 with a magnetic force.

  FIG. 13 shows a cross-sectional configuration when the lens holder 820 holds the test lens 105. A concave portion 821 is formed at the center of the lens holder 820. A first magnet 824 is provided on the bottom surface of the recess 821. The movable stage 132 is provided on the base portion 825. The base portion 825 is provided with a columnar arm portion 827. An arm portion 827 is provided with a second magnet 828 at one end thereof, and an actuator portion 826 is provided at the other end of the arm portion 827. As described above, the first magnet 824 and the second magnet 828 are arranged to face each other with the lens 105 to be measured interposed therebetween. And the magnetic pole of the 1st magnet 824 and the magnetic pole of the 2nd magnet 828 are comprised so that attractive force may generate | occur | produce between both magnets.

  The actuator unit 826 moves the arm unit 827 to an arbitrary position and direction. The actuator portion 826 is not limited to one location, and may be provided at a plurality of positions of the arm portion 827. Thereby, the freedom degree of the moving direction of the arm part 827 becomes large. The actuator unit 827 brings the second magnet 828 close to the outer edge of the lens 105 to be tested. The first magnet 824 is fixed to the recess 821 of the lens holder 820. As a result, the second magnet 828 is pulled in the direction of the first magnet 824. Therefore, the test lens 105 is fixed by the first magnet 824 and the second magnet 828. Note that at least the second magnet 828 is desirably disposed in a region outside the optical path of the irradiation light from the lens measurement unit 110.

  In this embodiment, the test lens 105 can be held on the lens holder 820 with a simple configuration. Moreover, the holding method by suction is not used. For this reason, it is not necessary to form a through hole in the lens holder 820. As a result, the area 823 of the reflecting surface can be increased. Therefore, as described above, the tilt adjustment of the lens holder 820 can be performed based on the bright point image. Further, the first magnet 824 and the second magnet 828 can be provided at arbitrary positions as long as they are outside the optical path of the irradiation light or the reflected measurement light. By providing the magnet outside the optical path, it is possible to reduce damage to the area (effective diameter area) where the light beam of the lens 105 is incident due to contact. In addition, the lens holder 820 is not limited to the above-described shape, and may have other configurations as long as it has a polygonal shape. In addition, since the holding is not performed by suction, a gap may be generated between the lens 105 to be tested and the lens holding portion 122. Although not shown, when the lens holder 720 holds the test lens 105, the same configuration as that of the lens holder 820 described above may be used.

(First Modification of Example 4)
14 and 15 show perspective configurations of lens holders 920 and 925 according to a first modification of the present embodiment. In both lens holders 920 and 925, the first magnet is formed on the end face instead of being provided on the bottom face of the central recess. In the quadrangular prism-shaped lens holder 920 shown in FIG. 14, first magnets 921a and 921b are provided in the vicinity of two opposing sides. In the hexagonal columnar lens holder 925 shown in FIG. 15, first magnets 926 a, 926 b, and 926 c are provided alternately with the reflecting surface 123.

(Second Modification of Example 4)
FIG. 16 shows a cross-sectional configuration when the lens holder 820 according to the second modification of the present embodiment holds the lens 105 to be examined. A concave portion 821 is formed at the center of the lens holder 105. A weight 829 is provided at one end of the arm portion 827. The weight 829 corresponds to the urging portion. The weight 829 presses the test lens 105 against the inner lens holding portion 122a. Thereby, the test lens 105 can be held with a simpler configuration. In the present embodiment and its modifications, the lens holder may be cylindrical.

  FIG. 17 illustrates a cross-sectional configuration in the vicinity of the lens holder 1020 according to the fifth embodiment. In the first embodiment, the lens holder 120 and the movable stage 132 are fixed via the screw portions 121 and 126. On the other hand, in this embodiment, a cone portion 1021 is formed in the vicinity of the other end of the lens holder 1020. In addition, the movable stage 132 has a receiving portion 1022 for receiving the cone portion 1021. The receiving portion 1022 is a conical recess. As a result, the positioning in the direction along the central axis AXL can be performed more accurately as compared with the fixing by the screw.

(Modification of Example 5)
FIG. 18A illustrates an in-plane cross-sectional configuration including the central axis AXL according to a modification of the fifth embodiment. FIG. 18-2 shows a cross-sectional configuration in a plane orthogonal to the central axis AXL. A portion of the movable stage 132 that receives the lens holder 120 includes a first movable stage 132c and a second movable stage 132d. As shown in FIG. 18-2, the first movable stage 132c and the second movable stage 132d have a semicircular ring shape. The first movable stage 132c and the second movable stage 132d are fixed by the screw portion 138. Then, the lens holder 120 is fixed by so-called hugging. Thereby, the lens holder 120 can be fixed to the movable stage 132 with a simple configuration.

  FIG. 19A illustrates a perspective configuration of a lens holder 120a according to the sixth embodiment. FIG. 19-2 shows a cross-sectional configuration in a plane orthogonal to the central axis AXL. The lens holder 120a of the present embodiment has a shape obtained by cutting a hollow cylindrical lens holder along a plane passing through the central axis AXL. The lens holder 120b has a similar shape. And as shown to FIGS. 19-2, the lens holder 120a and the lens holder 120b are fixed by the screw part 125a and the screw part 125b. This constitutes an integral lens holder.

  In the first embodiment, in order to form the through hole 124, it is necessary to cut out the central portion of the cylindrical member and cut it. Compared to this, in the present embodiment, the through hole 124 can be easily formed.

(Modification of Example 6)
FIG. 20 shows a perspective configuration of a lens holder according to a modification of the sixth embodiment. The lens holder 120c and the lens holder 120d have a shape obtained by cutting the lens holder described in the first embodiment along a plane orthogonal to the central axis AXL. Thereby, the length of the through-hole 124 formed in each lens holder 120c, 120d can be halved compared with the through-hole 124 of the integral lens holder 120. As a result, the through hole 124 can be easily formed as compared with the first embodiment.

  FIG. 21A illustrates a perspective configuration of the lens holder 1120 according to the seventh embodiment. FIG. 21B shows an in-plane cross-sectional configuration including the central axis AXL. In the lens holder 1120 of the present embodiment, the annular reflecting surface 123 is formed with a curved surface, for example, an arc-shaped convex surface. The top surface of the curved reflecting surface 123 is configured to exist on a surface substantially orthogonal to the central axis AXL. A marker line 123 </ b> L is formed in the vicinity of the top of the reflecting surface 123. The marking line 123L is formed in a color different from the color of the material constituting the lens holder 1120. Thereby, the marker line 123L can be easily recognized. The marker line 123L is used in a lens eccentricity measurement procedure described later.

  FIG. 22A is a schematic diagram illustrating a lens holder adjusting method according to the eighth embodiment. In the first embodiment, the lens holder 120 is tilt-adjusted using the lens measurement unit 110. In this embodiment, tilt adjustment is performed using a non-contact displacement measuring instrument 1210. When the lens holder 120 is tilted, the distance between the reflecting surface 123 and the non-contact displacement measuring instrument 1210 changes in a sine wave shape while the lens holder 120 is rotating around the rotation axis AX. Accordingly, while the lens holder 120 is rotated, the tilt adjusting movable stage 132a is adjusted so that the PV value of the output result of the non-contact displacement measuring instrument 1210 becomes small, and preferably the output value becomes substantially constant. . Thereby, the tilt adjustment of the lens holder 120 can be performed. For this reason, it is possible to adjust the reflection surface 123 without contact. Therefore, damage such as scratches on the reflecting surface 123 and wear can be reduced.

  Further, as shown in FIG. 22-2, the tilt adjustment can be performed by bringing the contact displacement measuring instrument 1110 into contact with the reflecting surface 123. As the contact-type displacement measuring instrument 1110, for example, a pick tester can be used. It is only necessary to bring the contact into contact with the end face of the lens holder 120. Accordingly, the tilt adjustment setting is easy.

  23-1, 23-2, and 23-3 are diagrams illustrating a lens holder adjustment method according to the ninth embodiment. In this embodiment, tilt adjustment and shift adjustment are performed using a non-contact displacement measuring device 1310. The non-contact type displacement measuring instrument 1310 has two functions. The first function is a function as a distance meter that measures the distance from the reflecting surface 123 and the amount of displacement. The second function is a function as an imaging unit (imager) that can observe the measurement point.

  First, the tilt adjustment will be described. FIG. 23A shows a configuration during tilt adjustment. At the time of tilt measurement, the function as a distance meter of the non-contact displacement measuring device 1310 is used. As in the eighth embodiment, while the lens holder 120 is rotated, the tilt adjusting movable stage 132a is adjusted so that the displacement amount of the output from the non-contact displacement measuring device 1310 is minimized.

  In addition, tilt adjustment can be performed by using a function of the non-contact displacement measuring instrument 1310 as an imaging unit. The non-contact displacement measuring device 1310 includes an autofocus mechanism that can move in the optical axis direction. At this time, the light source 111 desirably supplies light in a wavelength region that can be easily recognized by the measurer. In order to reliably form an image (focusing), it is preferable to use the lens holder 1120 including the marker line 123L as described in the seventh embodiment.

  The reflecting surface of the lens holder 1120, particularly the marker line 123L, is set to form an image. Next, the lens holder 1120 is rotated. When the lens holder 1120 is tilted, the marker line 123L moves toward and away from the non-contact displacement measuring instrument 1310. Here, the autofocus function works so that the marker line 123L is uniformly imaged. For example, the non-contact displacement measuring instrument 1310 moves in the optical axis direction according to the amount of movement of the marker line 123L. Accordingly, the measurer adjusts the tilt adjustment movable stage 132a so that the amount of movement of the non-contact displacement measuring instrument 1310 in the optical axis direction is minimized, and preferably approximately zero. Thereby, even when the reflecting surface is not flat, the tilt can be adjusted. Note that the position of the non-contact displacement measuring instrument 1310 may be fixed and the autofocus function may be turned off. At this time, the marker line 123L is blurred according to the tilt during rotation. Accordingly, the measurer adjusts the tilt adjustment movable stage 132a so that the marker line 123L is uniformly imaged without blurring.

  Next, at the time of shift adjustment, the function of the non-contact displacement measuring device 1310 as an imaging unit is used. As shown in FIGS. 23-2 and 23-3, while the lens holder 120 is rotated, an edge portion of the end surface of the lens holder 120, for example, the inner lens holding portion 122a and the outer lens holding portion is held by the non-contact displacement measuring device 1310. The image of the part 122b is observed by the display part 153. When the lens holder 120 is shifted, the image of the edge portion shakes in a plane orthogonal to the rotation axis AX. The shift adjustment movable stage 132b is adjusted so that the shake amount of the edge portion is reduced. Thereby, the shift adjustment of the lens holder 120 can be performed. Thereby, shift adjustment can be performed without using the ball lens 160. Further, when the test lens 105 is only a concave lens, it is not necessary to provide a through hole or a concave portion in the lens holder 120.

  In this embodiment, as described above, shift adjustment and tilt adjustment can be performed by one non-contact displacement measuring instrument 1310. Further, the center axis AX and the rotation axis AXL with respect to the edge portion of the outer diameter of the lens holder can be easily matched.

  The lens holder having various configurations as described above, a lens measuring device, and a lens adjustment method can be used in appropriate combination. Thus, various modifications can be made without departing from the spirit of the present invention.

  As described above, the lens holder of the present invention is useful when measuring eccentricity.

1 is a diagram illustrating a schematic configuration of a lens measuring device according to Embodiment 1. FIG. FIG. 2 is a diagram illustrating a schematic configuration in the vicinity of a lens holder of Example 1. FIG. 6 is another diagram showing a schematic configuration in the vicinity of the lens holder of Example 1. FIG. 3 is a diagram illustrating a schematic configuration of a lens holder of Example 1. It is a figure explaining the lens holder adjustment method in Example 1. FIG. FIG. 10 is another diagram for explaining a lens holder adjusting method according to the first embodiment. FIG. 6 is still another diagram for explaining a measurement method of the test lens in Example 1. 6 is a diagram illustrating a schematic configuration of a lens holder according to Embodiment 2. FIG. 6 is a diagram illustrating a schematic configuration of a lens holder according to a first modification of Example 2. FIG. 6 is a diagram illustrating a schematic configuration of a lens holder according to a second modified example of Embodiment 2. FIG. FIG. 10 is another diagram showing a perspective configuration of the lens holder of Example 3. FIG. 10 is another diagram showing a cross-sectional configuration of the lens holder of Example 3. FIG. 12 is another diagram showing a perspective configuration of a lens holder of a first modification of Example 3. FIG. 12 is another diagram showing a cross-sectional configuration of a lens holder of a first modification of Example 3. FIG. 6 is a diagram illustrating a schematic configuration of a lens holder according to a fourth embodiment. 6 is a diagram illustrating a schematic configuration of another lens holder according to Embodiment 4. FIG. FIG. 6 is a diagram illustrating a schematic configuration for fixing a lens holder according to a fourth embodiment. FIG. 10 is a diagram illustrating a schematic configuration of a lens holder according to a modification of Example 4. FIG. 10 is a diagram illustrating a schematic configuration of a lens holder according to another modified example of Embodiment 4. FIG. 10 is a diagram illustrating a schematic configuration for fixing a lens holder according to a modification of Example 4; It is a figure which shows schematic structure which adheres the lens holder of Example 5. FIG. FIG. 10 is a diagram illustrating a cross-sectional configuration including a central axis to which a lens holder according to a modification of Example 5 is fixed. FIG. 10 is a diagram illustrating a cross-sectional configuration orthogonal to a central axis to which a lens holder according to a modification of Example 5 is fixed. FIG. 10 is a diagram showing a perspective configuration of a lens holder of Example 6. FIG. 10 is a diagram illustrating a cross-sectional configuration orthogonal to the central axis of the lens holder of Example 6. 10 is a diagram illustrating a perspective configuration of a lens holder according to a modification of Example 6. FIG. FIG. 10 is a diagram illustrating a perspective configuration of a lens holder of Example 7. FIG. 10 is a diagram illustrating a cross-sectional configuration of a lens holder of Example 7. It is a figure explaining the lens holder adjustment method in Example 8. FIG. FIG. 10 is a diagram for explaining another lens holder adjustment method according to an eighth embodiment. It is a figure explaining the lens holder adjustment method of Example 9. FIG. FIG. 20 is another diagram for explaining the lens holder adjusting method of Example 9. FIG. 20 is still another diagram for explaining the lens holder adjusting method according to the ninth embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Lens measuring device 105 Test lens 105a 1st surface 105b 2nd surface 106 Protrusion part 107 Hole part 110 Lens measurement part 111 Light source 112 Collimator lens 113 Polarization beam splitter 114 1/4 wavelength plate 115 Objective optical system 116, 117 Lens system 118 Optical position detection element 120 Lens holder 120a, 120b, 120c, 120d Lens holder 121 Screw part 122 Lens holding part 122a Inner lens holding part 122b Outer lens holding part 123 Reflecting surface 124 Through hole 125a, 125b Screw part 126 Screw part 130 Position Adjuster 131 Shift adjustment knob 132 Movable stage 132a Tilt adjustment movable stage 132b Shift adjustment movable stage 132c First movable stage 132d Second movable stage 133 Pressure Spring 134 Tilt adjustment knob 135 Compression spring 136 Ball joint 137 Awl plate 138 Screw part 140 Rotation drive part 141, 142 Suction hole 150 Calculation / control part 151 Motor for rotation 152 Suction part 153 Display part 160 Ball lens 220 Lens holder 222 Lens Support unit 222a Inner lens support unit 222b Outer lens support unit 223 Reflective surface 320 Lens holder 322 Lens support unit 322a Inner lens support unit 322b Outer lens support unit 323 Reflective surface 420 Lens holder 423 Reflective surface 520 Lens holder 524 Notch 620 Lens Holder 621 Protruding part 720 Lens holder 723 Reflecting surface 820 Lens holder 821 Concave part 823 Reflecting surface 824 First magnet 825 Base part 826 Actuator part 827 A 828 Second magnet 829 Weight 920 Lens holder 921a, 921b Magnet 925 Lens holder 926a, 926b, 926c Magnet 1020 Lens holder 1021 Conical part 1022 Receiving part 1120 Lens holder 123L Marking line 1110 Non-contact displacement measuring device 1210 Contact displacement measuring instrument 1310 Non-contact displacement measuring instrument AXL Central axis AX Rotation axis L1 Parallel light L2, L3 Condensed light

Claims (15)

A lens holder for holding a test lens,
A lens holding part for holding the test lens;
A lens holder, comprising: a reflection surface that reflects light in a direction substantially orthogonal to a plane including the lens holding portion. The lens holder has a cylindrical shape,
The lens holding portion is formed on one end surface of the cylindrical shape,
2. The lens holder according to claim 1, wherein the reflection surface is formed in the vicinity of one end surface of the cylindrical shape and is substantially orthogonal to the central axis of the cylindrical shape.   The lens holder according to claim 1, wherein the lens holding portion and the reflection surface are formed on the same surface.   The lens holder according to claim 1, wherein a concave portion is provided in the vicinity of the end surface where the lens holding portion is formed.   The lens holder according to claim 1, further comprising a through hole for sucking the lens to be examined.   The lens holder according to claim 5, further comprising a suction portion connected to the through hole. A first magnet provided in the vicinity of the end surface on which the test lens holding portion is formed;
The lens holder according to claim 1, further comprising a second magnet provided to face the first magnet through the lens to be examined.   The lens holder according to claim 1, further comprising an urging portion that presses the lens to be tested against the lens holding portion. A lens holder holding portion for fixing a lens holder for holding the test lens;
A rotation drive unit that rotates the lens holder holding unit;
A lens measurement apparatus comprising: a displacement detection unit configured to detect a displacement of a reflection surface formed on the lens holder. The displacement detection unit includes a light irradiation unit that irradiates light to the reflection surface;
A light detection unit that receives light reflected from the reflection surface;
The lens measurement device according to claim 9, further comprising: a calculation unit that calculates a displacement of the reflection surface based on a detection result of the light detection unit.   The lens measurement device according to claim 10, further comprising a display unit that displays the displacement of the reflecting surface calculated by the calculation unit.   The lens measurement device according to claim 9, wherein the displacement detection unit measures a displacement of a surface of the lens to be examined. In the adjustment method of the lens holder that holds the test lens,
A displacement detecting step for detecting a displacement of the reflecting surface based on reflected light from the reflecting surface formed on the lens holder;
A lens holder adjustment method comprising: an adjustment step of adjusting at least one of a position and an inclination of the lens holder based on the displacement of the reflection surface. The displacement detection step further includes:
A light irradiation step of irradiating the reflective surface with light;
A rotation step for rotating the lens holder; a point image receiving step for receiving reflected light from the reflection surface as a point image;
Calculating the displacement of the reflecting surface based on the information of the point image,
In the adjusting step, at least one of the position and the tilt of the lens holder is adjusted so that the position of the detected point image is substantially constant while the lens holder is rotated. The lens adjustment method according to claim 13. In the adjusting step, in a state where the lens holder is rotated, at least one of the position and the inclination of the lens holder is adjusted so that the center axis and the rotation axis of the lens holder substantially coincide with each other. The lens adjustment method according to claim 13 or 14.

Images