JP2006131492A - Aluminum nitride powder and its production method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently produce an AlN powder having a small average particle size, a small specific surface area and a low oxygen content. <P>SOLUTION: In a production method of the aluminum nitride powder, a mixed powder containing 100 pts.wt. aluminum nitride raw material powder and 0.01-15 pts.wt. carbonaceous substance is subjected to a first heat-treatment at 1,400-1,600°C in a non-oxidative atmosphere with a carbon dioxide gas concentration of 0-10 vol.% and subsequently to a second heat-treatment at 500-800°C in an oxidative atmosphere. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an aluminum nitride powder and a method for producing the same.

  Aluminum nitride powder (AlN powder) is mainly used as a sintering powder for producing an AlN sintered body. The AlN sintered body is manufactured by molding and sintering AlN powder together with a sintering aid. This AlN sintered body is used for various applications including a semiconductor substrate and a semiconductor package base material. In particular, the AlN sintered body has a high thermal conductivity compared to general alumina ceramics and the like, and its thermal expansion coefficient is almost the same as that of silicon. Yes.

  However, since the sintering temperature of the AlN sintered body is as high as about 1800 ° C., the manufacturing cost is higher than that of alumina ceramics. Therefore, if the sintering temperature can be lowered, the production cost of the AlN sintered body can be reduced.

  As a method for lowering the sintering temperature, it is generally considered to reduce the average particle diameter of the AlN powder. However, when the average particle size is reduced, the oxygen content of the AlN powder increases with an increase in the specific surface area, which causes a problem that the high thermal conductivity that is characteristic of the AlN sintered body is impaired. Moreover, an increase in specific surface area requires a large amount of binder at the time of sintering, which not only increases the cost, but also causes a decrease in the dimensional accuracy of the sintered body.

  By the way, as an industrial production method of AlN powder, a direct nitriding method (hereinafter referred to as “direct method”, and a powder obtained thereby is referred to as “direct method powder”) and a reductive nitriding method (hereinafter referred to as “reducing method”). The powder obtained by this is roughly classified into “reduction method powder”).

  The reduction method is a method in which a mixture of alumina powder and carbon powder is heated in a nitrogen or ammonia atmosphere to reduce and nitride the alumina. However, in the reduction method, an expensive powder among alumina is used as a raw material, and the reduction proceeds by an endothermic reaction. Therefore, it is necessary to perform the treatment at a high temperature of 1500 ° C. or more for 12 hours or more. In addition, in the reduction method, since each powder particle reacts uniformly with nitrogen in the atmosphere, it is necessary to fill the alumina powder thinly in the layer during the reduction treatment, and the amount that can be reduced at a time is limited. From these points, the reduction method has a drawback that the production cost becomes high.

  On the other hand, the direct method is a method in which metal aluminum powder is heated in a nitrogen atmosphere for nitriding synthesis. The direct method powder is obtained by pulverizing the bulk AlN obtained by the direct method. Since the direct method is an exothermic reaction and can be produced at a much lower temperature and in a shorter time than the reduction method, the AlN powder can be supplied at a lower cost.

  However, the direct method powder generally has a higher oxygen content than the reduction method powder, and it is difficult to obtain a sintered body having high thermal conductivity. The reason is that, in the direct method, grain growth or coalescence proceeds by reaction heat during synthesis, and thus a pulverization step of the produced nitride is required after the nitriding step in order to reduce the average particle size. That is, in this pulverization process, the new surface produced is very reactive and reacts with a very small amount of oxygen or moisture in the atmosphere. And, in the pulverized particle surface layer, hydrates or oxides are easily formed, and as a result, the oxygen content is increased. In addition, many irregularities or cracks are introduced into the pulverized powder, and the shape thereof is also angular, and the specific surface area increases due to the generation of fine powder generated by pulverization, which also contains oxygen. It is a factor that increases the amount.

  From the above, although the direct method is an inexpensive powder manufacturing method, it is difficult to obtain a sintered body having sufficient thermal conductivity from the powder obtained thereby.

On the other hand, after mixing carbon black powder with crude aluminum nitride powder, the oxygen content and the carbon content are reduced by heating at 1200 to 1700 ° C. in a non-oxidizing atmosphere containing NH ₃ (Patent Document) 1) is known.

However, since NH ₃ is used in this method, there are problems in terms of cost and workability. Moreover, although it is said that the sintered compact board | substrate which has high heat conductivity is obtained with the said technique, it cannot be said that it is enough.

  In addition, a granular mixture composed of aluminum nitride and free carbon, a carbon-containing organic material and a carbonaceous additive selected from the group consisting of these is non-oxidizing selected from the group consisting of argon, nitrogen and a mixture thereof. A method for reducing the amount of oxygen by heating at 1350 to 1750 ° C. in an atmosphere (Patent Document 2) is described.

  However, this method requires accurate addition of the carbon amount and is difficult to control.

  Moreover, after heat-processing the mixed powder containing 1-15 weight part of carbonaceous materials with respect to 100 weight part of aluminum nitride raw material powder in non-oxidizing atmosphere at 1600-1850 degreeC, it heat-treats at 600-800 degreeC in oxidizing atmosphere. Thus, a method for producing aluminum nitride powder (Patent Document 3) is known.

However, since the AlN powder obtained by this method is remarkably agglomerated and difficult to be directly subjected to sintering, a pulverization step is necessary. The addition of the pulverization process causes not only an increase in cost but also a re-increase in the amount of oxygen, and as a result, an AlN powder excellent in sinterability cannot be obtained.
JP-A-5-310406 JP-A-60-71576 JP 2003-104777 A

  As described above, in any method, it is difficult to obtain an AlN sintered body having high thermal conductivity at low cost.

  Accordingly, the main object of the present invention is to efficiently produce AlN powder having a small average particle diameter and specific surface area and a low oxygen content. A further object of the present invention is to provide an AlN sintered body having high thermal conductivity.

  As a result of intensive studies in view of the problems of the prior art, the present inventor has found that an AlN powder obtained by a specific method can achieve the above object, and has completed the present invention.

  That is, the present invention relates to the following aluminum nitride powder and a method for producing the same.

  1. After first heat-treating mixed powder containing 100 parts by weight of aluminum nitride raw material powder and 0.01 to 15 parts by weight of carbonaceous material at 1400 to 1600 ° C. in a non-oxidizing atmosphere having a carbon dioxide gas concentration of 0 to 10% by volume And a second heat treatment at 500 to 800 ° C. in an oxidizing atmosphere.

  2. 2. The method according to 1 above, wherein the aluminum nitride raw material powder has an oxygen content of 1.2% by mass or more.

  3. 3. The production method according to 1 or 2 above, wherein the aluminum nitride raw material powder is a powder obtained by a direct nitriding method.

  4). 4. The production method according to any one of 1 to 3 above, wherein the non-oxidizing atmosphere is composed of 0 to 10% by volume of carbon dioxide gas and the balance substantially consists of non-oxidizing gas.

  5. 5. The production method according to 4 above, wherein a carbon dioxide concentration of 0 to 10% by volume is maintained while supplying a non-oxidizing gas to the system during the first heat treatment.

  6). 6. The production method according to 4 or 5 above, wherein the non-oxidizing gas is an inert gas.

  7. Aluminum nitride powder obtained by the production method according to any one of 1 to 6 above.

8). Oxygen content 0.9 mass% or less, the carbon content 0.2 wt% or less, an average particle diameter of 3μm or less and a specific surface area of 4.0 m ² / g or less is 7. The aluminum nitride powder according.

  9. 9. Aluminum nitride granules obtained by granulating the aluminum nitride powder described in 8 above.

  10. 10. An aluminum nitride sintered body obtained by sintering the aluminum nitride powder described in 8 or the aluminum nitride granule described in 9.

  11 11. The aluminum nitride sintered body according to 10 above, wherein the thermal conductivity is 150 W / mK or more.

  According to the method for producing an aluminum nitride powder of the present invention, an aluminum nitride powder in which the oxygen content, the carbon content, etc. are controlled within a specific range can be obtained efficiently. For this reason, the aluminum nitride powder of the present invention can exhibit excellent sinterability and the like.

  Therefore, the aluminum nitride powder of the present invention can obtain sufficient sinterability even at a relatively low temperature. Further, as a result of using a relatively small amount of binder, a sintered body can be manufactured with high dimensional accuracy.

  The aluminum nitride sintered body of the present invention can exhibit high thermal conductivity. For this reason, it is effective as a heat radiating plate, other structural members, etc. used for electronic devices, such as IC.

1. Method for Producing Aluminum Nitride Powder The method for producing aluminum nitride powder of the present invention comprises a mixed powder containing 100 parts by weight of aluminum nitride raw material powder and 0.01 to 15 parts by weight of carbonaceous material at a carbon dioxide concentration of 0 to 10% by volume. A first heat treatment is performed at 1400 to 1600 ° C. in a non-oxidizing atmosphere, and then a second heat treatment is performed at 500 to 800 ° C. in an oxidizing atmosphere.

(1) Aluminum nitride raw material powder The aluminum nitride raw material powder is not limited in its composition (oxygen content, etc.) and average particle diameter, and any AlN powder can be used. Moreover, the manufacturing method is not limited, either, a direct method, a reduction method, etc. may be sufficient.

  In particular, the average particle diameter of the aluminum nitride raw material powder is preferably about 0.7 to 2 μm. The particle size can be adjusted as appropriate using a known pulverization method, classification method or the like.

  In the present invention, in particular, an aluminum nitride raw material powder having an oxygen content of 1.2% by mass or more can be suitably used. Such an AlN powder can generally be produced by a direct method. That is, in the method of the present invention, the AlN powder obtained by the direct method can be suitably used as the aluminum nitride raw material powder.

  The direct method can be carried out according to a known direct nitriding method. For example, an AlN powder can be obtained by pulverizing a lump obtained by heating aluminum powder having a purity of 99.9% by mass or more in a nitrogen atmosphere. The heating temperature is not limited, but it is usually preferably about 600 to 1200 ° C, particularly 650 to 1100 ° C. In addition, the holding time can be appropriately set according to the heating temperature or the like, but is usually about 10 to 120 minutes. The pulverization method may be a known method such as pulverization by a ball mill, rod mill, vibration mill, jaw crusher, roll crusher, or the like.

(2) Carbonaceous material The carbonaceous material is not limited as long as it has carbon as a main component, and for example, a carbon simple substance such as carbon black and carbon flakes, an organic substance containing an organic resin, or the like can be used. The carbonaceous material is preferably in a powder form, and in particular, a carbonaceous material powder having an average particle diameter of about 10 nm to 1 μm can be suitably used.

  The amount of carbonaceous material used can be appropriately set according to the type or specific surface area of the carbonaceous material used, the oxygen content of the AlN raw material powder, etc. It is desirable that the content be about 0.01 to 15 parts by weight (particularly 0.1 to 7 parts by weight). If the carbonaceous material is less than 0.01 parts by weight, the oxygen removal effect may be insufficient. Moreover, when a carbonaceous substance exceeds 15 weight part, there exists a possibility that the bulk density of powder may become low and productivity may fall. However, the amount may exceed 15 parts by weight if the productivity is not significantly hindered.

(3) Preparation of mixed powder The preparation method of mixed powder is not specifically limited. For example, an aluminum nitride raw material powder and a carbonaceous material may be mixed. What is necessary is just to mix so that it may become uniform using well-known apparatuses, such as a blender and a mixer, for example.

(4) Deoxygenation treatment of mixed powder The first heat treatment is performed on the mixed powder obtained by mixing the aluminum nitride raw material powder and the carbonaceous material. That is, heat treatment is performed at 1400 to 1600 ° C. in a non-oxidizing atmosphere having a carbon dioxide gas concentration of 0 to 10% by volume.

  Deoxidation of the aluminum nitride raw material powder is mainly performed by the first heat treatment. Thereby, mainly reduction of oxygen content and specific surface area can be aimed at. In general, the surface of the direct method powder before the first heat treatment has a large number of irregularities due to the pulverization process, and is in a state of wrinkles and cracks. By performing the first heat treatment, the AlN powder eliminates surface wrinkles and cracks in order to reduce the surface energy, so that the surface area is reduced. On the surface of the AlN powder, the energy of grain growth is deprived by the reduction reaction with carbon, and the increase in particle diameter does not progress slowly, while the surface area decreases in advance, resulting in the surface area per unit weight. The specific surface area can be reduced to a predetermined value.

  As described above, the atmosphere of the first heat treatment is a non-oxidizing atmosphere having a carbon dioxide gas concentration of 0 to 10% by volume. If the carbon dioxide concentration exceeds 10% by volume, the progress of the reduction reaction is hindered, and it becomes difficult to sufficiently reduce the oxygen content. The lower limit value of the carbon dioxide gas concentration is not particularly limited as long as it can be produced industrially, but is usually about 5 ppm by volume.

  More specifically, the non-oxidizing atmosphere may be an atmosphere in which the carbon dioxide concentration is 0 to 10% by weight and the aluminum nitride raw material powder is not oxidized. For example, the portion other than the carbon dioxide gas in the non-oxidizing atmosphere is any of non-oxidizing gas such as inert gas (argon, helium, nitrogen, etc.) or reducing gas (ammonia, etc.), vacuum, etc. Also good. In particular, the non-oxidizing gas is preferable in terms of easy control of the carbon dioxide gas concentration. Therefore, for example, as the non-oxidizing atmosphere, it is desirable to suitably employ an atmosphere composed of 0 to 10% by volume of carbon dioxide gas and the balance being substantially non-oxidizing gas. As the non-oxidizing gas, an inert gas is preferable, and nitrogen gas is most preferable.

  During the first heat treatment, carbon dioxide gas is generally generated by a reduction reaction with a carbonaceous material. For this reason, it is desirable to control so that a carbon dioxide gas concentration may not exceed 10 volume%. For example, it is preferable to maintain a carbon dioxide concentration of 0 to 10% by volume while supplying a non-oxidizing gas (preferably an inert gas) into the system. Thereby, the raise of a carbon dioxide gas concentration (partial pressure) can be suppressed efficiently. The replenishment of the non-oxidizing gas may be performed continuously, intermittently, or temporarily. When continuously carried out, the inflow amount of the non-oxidizing gas per unit time may be increased or decreased during the process.

  In addition, a method for increasing the total amount of non-oxidizing gas by increasing the first heat treatment time while introducing a certain amount of non-oxidizing gas, a method for reducing the processing amount of aluminum nitride raw material powder, etc. Therefore, it is possible to suppress an increase in carbon dioxide concentration.

  The carbon dioxide concentration in the system can be monitored using a known monitor device or the like.

  The carbon dioxide gas concentration in the present invention is a value obtained as CO conversion by the following equation.

A = C × 100 / B (%)
B = D / 22.4 (mol)
C = E × (FG) / 16 (mol)
Where D = total amount of inert gas during the first treatment (L)
E = Mass of aluminum nitride raw material powder (g)
F = Amount of oxygen in aluminum nitride raw material powder (wt%)
G = Oxygen content of mixed powder after first treatment (wt%)

The first heat treatment temperature is usually about 1400 to 1600 ° C., but is preferably 1450 to 1550 ° C. When the heat treatment temperature is less than 1400 ° C., it is difficult to sufficiently reduce the oxygen content even by a reduction reaction with a carbonaceous material. Moreover, when it exceeds 1600 degreeC, an AlN powder will aggregate and the grinding | pulverization process which breaks aggregation prior to 2nd heat processing is required. During the pulverization process, the oxygen content and the specific surface area increase again, and the purpose during the deoxygenation process cannot be achieved.

  The treatment time of the first heat treatment can be appropriately changed depending on the heat treatment temperature or the like, but is usually about 1 to 5 hours.

(4) Decarbonizing treatment of mixed powder After performing the first heat treatment, heat treatment is performed at 500 to 800 ° C. in an oxidizing atmosphere. In the second heat treatment, carbon remaining in the mixed powder mainly after the first heat treatment can be removed.

  The second heat treatment atmosphere is an oxidizing atmosphere. Specifically, any of oxygen-containing atmosphere, air (in air), and the like may be used. In the present invention, it is particularly desirable to be in the atmosphere.

  The second heat treatment temperature is usually about 500 to 800 ° C, preferably 550 to 650 ° C. When the heat treatment temperature is less than 500 ° C., the combustion reaction of the carbonaceous material does not proceed, and it becomes difficult to remove carbon. Moreover, when it exceeds 800 degreeC, an oxygen content will be increased on the contrary.

  The heat treatment time can be appropriately changed depending on the heat treatment temperature and the like, but is usually about 3 to 10 hours.

  The production method of the present invention is suitable for production of the aluminum nitride powder of the present invention, and is particularly effective as a method of producing aluminum nitride powder for sintering.

2. Aluminum Nitride Powder The aluminum nitride powder of the present invention has an oxygen content of 0.9% by mass or less, a carbon content of 0.2% by weight or less, an average particle size of 3 μm or less, and a specific surface area of 4.0 m ² / g or less.

(1) Oxygen content Oxygen content is 0.9 mass% or less normally, Preferably it is 0.7 mass% or less. When the oxygen content exceeds 0.9 mass%, the thermal conductivity of the sintered body obtained from the powder of the present invention becomes low, and it becomes unsuitable for uses such as a heat dissipation substrate. In addition, although the lower limit of oxygen content is not limited, Generally it should just be about 0.5 mass%.

  The oxygen content in the present invention indicates a value measured by a dissolved infrared absorption method in an inert gas (measuring device “EMGA-550” manufactured by Horiba, Ltd.).

(2) Carbon content Carbon content is 0.2 mass% or less normally, Preferably it is 0.1 mass% or less. If the carbon content exceeds 0.2% by mass, the function of the sintering aid may be hindered during sintering, and the sinterability may be adversely affected. In addition, the lower limit value of the carbon content is not particularly limited, but generally it may be about 0.01% by mass.

  The carbon content in the present invention is a value measured by a combustion infrared absorption method (measurement device “EMIA-510” manufactured by Horiba, Ltd.) in an oxygen stream.

(3) Average particle diameter The average particle diameter is usually 3 µm or less, preferably 2 µm or less. When the average particle diameter exceeds 3 μm, the sintering temperature increases. The lower limit of the average particle diameter is not particularly limited, but is generally about 0.5 μm.

  The average particle size in the present invention was measured with water as a dispersion medium using a particle size distribution microtrack particle size distribution measuring device (“HRA9320-X100” manufactured by Nikkiso Co., Ltd.). The particle size distribution of the present invention is all based on weight.

  Further, as a reference value of the average particle diameter, an average value of 100 particles arbitrarily selected by observation with a scanning electron microscope is shown. In addition, the particle diameter of each particle | grain was taken as the average value of the longest diameter and the shortest diameter.

(4) Specific surface area The specific surface area is usually 4.0 m ² / g or less, preferably 3.5 m ² / g or less. When the specific surface area exceeds 4.0 m ² / g, a relatively large amount of binder is required, which not only increases the cost, but also reduces the dimensional accuracy of the sintered body. The lower limit of the specific surface area is not particularly limited, but is generally about 1 m ² / g.

  The specific surface area in this invention shows the value measured by BET method using the measuring apparatus "NOVA2000" made by Yuasa Ionics.

(5) Production method of AlN powder The AlN powder of the present invention is prepared, for example, as described in 1. above. It can manufacture suitably by the manufacturing method (namely, manufacturing method of this invention). That is, the AlN powder obtained by the production method of the present invention is also included in the present powder.

  The AlN powder of the present invention is particularly effective as a sintering powder. For example, the AlN powder of the present invention is optimal as a raw material powder for producing a sintered heat dissipation substrate.

3. AlN sintered body obtained from AlN powder of the present invention An AlN sintered body can be obtained by molding and sintering the AlN powder of the present invention according to a known method. For example, a molded body obtained by press-molding a raw material containing the AlN powder of the present invention, if necessary, a sintering aid (Y ₂ O ₃ , La ₂ O ₃ , CaO, etc.), a binder, etc. in a nitrogen atmosphere 1600 An AlN sintered body can be produced by sintering at about ˜2000 ° C.

  Further, if necessary, the AlN powder of the present invention is granulated according to a known method such as rolling granulation method or stirring granulation method to form aluminum nitride granules, and then molded and sintered according to a known method. Thus, an AlN sintered body can be obtained. What is necessary is just to set the average particle diameter of an aluminum nitride granule suitably in the range of about 10-100 micrometers generally.

  The AlN sintered body has a particularly high thermal conductivity (usually 150 W / mK or more, preferably 170 W / mK or more), and can be suitably used for applications utilizing high thermal conductivity. For example, it is useful as a heat dissipation board and various structural members.

  Hereinafter, the present invention will be described more specifically with reference to examples and comparative examples. However, the present invention is not limited to these examples.

  The thermal conductivity of the sintered body was measured by a laser flash method using a thermal constant measuring device “LF / TCM-FA8510B” (manufactured by Rigaku).

Production Example 1
Aluminum nitride raw material powders used in Examples and Comparative Examples were prepared. This was obtained by directly pulverizing the bulk AlN obtained by the direct nitriding method. This powder had an average particle size of 1.2 μm, a specific surface area of 7.8 m ² / g, an oxygen content of 1.95% by mass, and a carbon content of 0.03% by mass. This powder was used as an aluminum nitride raw material powder.

Example 1
5 parts by weight of carbon black powder (average particle diameter: 100 nm) was added to and mixed with 100 parts by weight of the aluminum nitride raw material powder, and calcined at 1400 ° C. for 4 hours in a nitrogen atmosphere with a carbon dioxide gas concentration of 0.5 vol%. At this time, the carbon dioxide concentration was adjusted and maintained by appropriately injecting nitrogen gas into the reaction system. After firing, heat treatment was performed at 600 ° C. in the air for 8 hours. Next, after blending 5 parts by weight of a sintering aid (Y ₂ O ₃ ) and 5 parts by weight of an acrylic binder to both 100 parts of the obtained powder, a molded body of φ10 mm × 3 mm is produced by press molding. This was degreased by heating at 450 ° C. for 2 hours. Next, an AlN sintered body was obtained by performing normal pressure sintering at 1800 ° C. for 3 hours in a nitrogen atmosphere. The thermal conductivity of the AlN sintered body was measured. Table 1 shows the physical properties of the obtained AlN powder and AlN sintered body.

Examples 2-9
An AlN powder was produced in the same manner as in Example 1 except that the production conditions were changed as shown in Table 1, and an AlN sintered body was further produced. The thermal conductivity of the AlN sintered body was measured. The thermal conductivity of the AlN sintered body was measured. Table 1 shows the physical properties of the obtained AlN powder and AlN sintered body.

Comparative Example 1
5 parts by weight of carbon black powder (average particle diameter 100 nm) was added to and mixed with 100 parts by weight of the aluminum nitride raw material powder, followed by firing at 1500 ° C. for 4 hours in a nitrogen atmosphere with a carbon dioxide gas concentration of 5% by volume. After firing, heat treatment was performed in air at 450 ° C. for 8 hours. Next, after blending 5 parts by weight of a sintering aid (Y ₂ O ₃ ) and 5 parts by weight of an acrylic binder to both 100 parts of the obtained powder, a molded body of φ10 mm × 3 mm is produced by press molding. This was degreased by heating at 450 ° C. for 2 hours. Next, an AlN sintered body was obtained by performing normal pressure sintering at 1800 ° C. for 3 hours in a nitrogen atmosphere. The thermal conductivity of the AlN sintered body was measured. Table 1 shows the physical properties of the obtained AlN powder and AlN sintered body.

Comparative Examples 2-6
An AlN powder was produced in the same manner as in Example 1 except that the production conditions were changed as shown in Table 1, and an AlN sintered body was further produced. The thermal conductivity of the AlN sintered body was measured. Table 1 shows the physical properties of the obtained AlN powder and AlN sintered body.

  As is apparent from the results in Table 1, the production method of the present invention provides an aluminum nitride powder having predetermined physical properties, thereby obtaining an aluminum nitride sintered body that exhibits excellent thermal conductivity. I understand. It can be seen that the sintered body can exhibit a high thermal conductivity of 150 W / mK or more, particularly 170 W / mK or more.

Claims (7)

After first heat-treating mixed powder containing 100 parts by weight of aluminum nitride raw material powder and 0.01 to 15 parts by weight of carbonaceous material at 1400 to 1600 ° C. in a non-oxidizing atmosphere having a carbon dioxide gas concentration of 0 to 10% by volume And a second heat treatment at 500 to 800 ° C. in an oxidizing atmosphere. The production method according to claim 1, wherein the oxygen content of the aluminum nitride raw material powder is 1.2 mass% or more. The production method according to claim 1 or 2, wherein the non-oxidizing atmosphere is composed of 0 to 10% by volume of carbon dioxide gas and the balance is substantially made of non-oxidizing gas. The production method according to claim 3, wherein a carbon dioxide concentration of 0 to 10% by volume is maintained while supplying a non-oxidizing gas to the system during the first heat treatment. The aluminum nitride powder obtained by the manufacturing method in any one of Claims 1-4. Oxygen content 0.9 mass% or less, the carbon content 0.2 wt% or less, an average particle diameter of 3μm or less and a specific surface area of 4.0 m ² / g or less aluminum nitride powder according to claim 5, wherein. Aluminum nitride granules obtained by granulating the aluminum nitride powder according to claim 6.