JP2006128078A5 - - Google Patents
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- Publication number
- JP2006128078A5 JP2006128078A5 JP2005240542A JP2005240542A JP2006128078A5 JP 2006128078 A5 JP2006128078 A5 JP 2006128078A5 JP 2005240542 A JP2005240542 A JP 2005240542A JP 2005240542 A JP2005240542 A JP 2005240542A JP 2006128078 A5 JP2006128078 A5 JP 2006128078A5
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Priority Applications (13)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005240542A JP3858043B2 (ja) | 2004-09-29 | 2005-08-23 | プラズマ処理装置 |
US11/663,983 US7886688B2 (en) | 2004-09-29 | 2005-09-20 | Plasma processing apparatus |
KR1020077009562A KR101020463B1 (ko) | 2004-09-29 | 2005-09-20 | 플라즈마 처리 장치 |
US11/664,133 US7886689B2 (en) | 2004-09-29 | 2005-09-20 | Plasma processing apparatus |
CN2005800318901A CN101023713B (zh) | 2004-09-29 | 2005-09-20 | 等离子加工设备 |
CN2005800318920A CN101023714B (zh) | 2004-09-29 | 2005-09-20 | 等离子加工设备 |
PCT/JP2005/017252 WO2006035629A1 (ja) | 2004-09-29 | 2005-09-20 | プラズマ処理装置 |
PCT/JP2005/017251 WO2006035628A1 (ja) | 2004-09-29 | 2005-09-20 | プラズマ処理装置 |
EP05785311A EP1796442B1 (en) | 2004-09-29 | 2005-09-20 | Plasma processing system |
KR1020077009447A KR101020411B1 (ko) | 2004-09-29 | 2005-09-20 | 플라즈마 처리 장치 |
DE602005024702T DE602005024702D1 (de) | 2004-09-29 | 2005-09-20 | Plasmaverarbeitungssystem |
TW094132666A TWI291203B (en) | 2004-09-29 | 2005-09-21 | Plasma processing apparatus |
TW094132660A TW200623972A (en) | 2004-09-29 | 2005-09-21 | Plasma treatment device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004285506 | 2004-09-29 | ||
JP2005240542A JP3858043B2 (ja) | 2004-09-29 | 2005-08-23 | プラズマ処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006128078A JP2006128078A (ja) | 2006-05-18 |
JP2006128078A5 true JP2006128078A5 (nl) | 2006-07-27 |
JP3858043B2 JP3858043B2 (ja) | 2006-12-13 |
Family
ID=36722547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005240542A Expired - Fee Related JP3858043B2 (ja) | 2004-09-29 | 2005-08-23 | プラズマ処理装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3858043B2 (nl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007250426A (ja) * | 2006-03-17 | 2007-09-27 | Sharp Corp | プラズマ処理装置の電極構造およびこれを備えたプラズマ処理装置 |
JP4820241B2 (ja) * | 2006-08-29 | 2011-11-24 | 株式会社ケーヒン | 配線基板収納構造 |
JP2008153065A (ja) * | 2006-12-18 | 2008-07-03 | Sekisui Chem Co Ltd | プラズマ処理装置 |
-
2005
- 2005-08-23 JP JP2005240542A patent/JP3858043B2/ja not_active Expired - Fee Related
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