JP2006114954A - Electrooptic device and electronic apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electrooptic device provided with an antenna and a display section that can be downsized and adopts a configuration whereby a mounted device can be downsized. <P>SOLUTION: The electrooptic device is characterized in to include: at least one board provided with the display section and display section drive wires used for driving the display section; a first antenna 120 at least part of which is arranged in the board; a second antenna 122 configured such that the second antenna 122 is independently provided with the first antenna, arranged in a way of being two-dimensionally overlapped on part of the first antenna, and not two-dimensionally overlapped on the other parts of the first antenna; and a communication circuit electrically connected to the first and the second antennas and for controlling transmission / reception of data via the first and the second antennas. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an electro-optical device and an electronic apparatus, and more particularly to a configuration of an electro-optical device having a wireless communication function.

  Various electronic devices having a function of communicating with other devices wirelessly have been widely used. For example, under a technology using RFID (Radio Frequency Identification) for identifying a user or an article, an IC tag (RFID) in which various data is stored and the IC tag are contactless. A device for writing and reading data (hereinafter simply referred to as “reader / writer”) is used. Each of the RFID and the reader / writer is provided with an antenna and a communication chip that modulates and demodulates electromagnetic waves.

  In the RFID and the reader / writer, the antenna is usually a loop antenna, and only one antenna is provided for each device. These antennas communicate reliably even when the distance from the communication partner device is long, or even if an object that shields or obstructs radio waves, such as metal or liquid, exists between the antenna and the communication partner device. It is hoped that. In general, since each device has only a single communication chip, only a single type of information can be used even if the usable frequency band of the antenna is wide.

On the other hand, in the technical field of mobile communication terminals, a proposal is made to use a helical antenna with a high gain to increase reception sensitivity and transmission radio wave intensity, and a plurality of communication control processing units are used so that a plurality of communication modes can be executed. Proposals have already been made (for example, Patent Document 1).
JP 11-215022 (FIGS. 7 and 8)

  Many electronic devices that perform communication have a display device. For example, most mobile communication terminals are now equipped with a display device, and the same applies to RFID reader / writers. An RFID that is read and written by a reader / writer may be provided with a display device for providing information to humans. In these techniques, since the antenna is usually manufactured and assembled separately from the display device, if the antenna is provided, the size of the device increases and it is difficult to incorporate the antenna into a small electronic device such as a portable electronic device. In addition, it is conceivable to integrate the antenna with the display device. However, in this case, the design freedom of the display device is narrowed, and there is a problem that structural restrictions are imposed on the display device.

  In addition, when the reader / writer is downsized, the transmission / reception function is restricted due to the deterioration of the antenna performance.If the distance from the RFID is increased, or if there is a shield or obstacle such as metal or liquid, the data There is a problem that a defect occurs in reading and writing.

  Furthermore, regarding the communication performance between the RFID and the reader / writer, it is assumed that it is necessary to ensure a good communication state in many scenes or to adapt to many communication modes. For example, with the spread of RFID, There are many occasions where multiple data are read and written simultaneously, and it is thought that the need to configure multiple types of data to be able to be transmitted and received will increase, but with a conventional reader / writer equipped with a single antenna, When communicating, it cannot be optimized for the wireless band that uses the antenna, so transmission / reception performance cannot be improved, and it is necessary to read and process even unnecessary categories of data. There is a problem that it is difficult to ensure the possible communication performance.

  Therefore, the present invention solves the above-described problems, and an object of the present invention is to reduce the size of an on-board device in an electro-optical device that includes both an antenna and a display unit. It is to provide a configuration that can. Another object of the present invention is to provide a configuration in which restrictions on design of a display unit are reduced in an electro-optical device including both an antenna and a display unit. Furthermore, another object is to provide a configuration capable of ensuring communication performance adaptable to various usage modes in an electro-optical device including both an antenna and a display unit.

  The electro-optical device according to the present invention includes a display unit and at least one substrate provided with a display unit drive wiring for driving the display unit, a first antenna at least partially disposed in the substrate, Provided independently of the first antenna, arranged so as to planarly overlap a part of the first antenna, and configured not to planarly overlap the remaining part of the first antenna And a communication circuit that is electrically connected to the first antenna and the second antenna and controls data communication via the first antenna and the second antenna. It is characterized by comprising.

  According to the present invention, at least a part of the first antenna is arranged in the substrate, and the second antenna is arranged so as to overlap the part of the first antenna in a plane. Thus, it is possible to arrange a plurality of antennas in a compact manner, and to reduce structural restrictions on the display unit. For example, a plurality of antennas can be compactly arranged in a region that does not overlap with the display unit in a planar manner. In addition, since the second antenna is arranged so as not to overlap with the remaining portion of the first antenna, the side on which the radio wave propagates with respect to the first antenna, or the radio wave Even when the second antenna is arranged on the side to be transmitted, wireless communication can be reliably performed by both antennas. Furthermore, since the first antenna and the second antenna are provided independently, each antenna can be optimized, so that communication performance can be improved and independent in a plurality of frequency bands. Thus, it becomes possible to ensure communication performance adaptable to various usage modes, such as enabling communication.

  In the communication circuit according to the present invention, the first communication circuit connected to the first antenna and the second communication circuit connected to the second antenna are configured separately. Is preferred. In this way, transmission / reception data in each antenna can be processed completely independently without complicating the configuration of the communication circuit. That is, since the plurality of antennas arranged on the substrate are independent from each other and are electrically connected to the plurality of communication circuits, respectively, different frequencies can be used. For example, reception and transmission of a plurality of types of information using different frequency channels can be realized. The communication circuit according to the present invention includes a communication circuit having only a transmission function or only a reception function. Furthermore, examples of the electro-optical device according to the present invention include a liquid crystal display device, an OLED (Organic Light Emitting Diode) display device, a plasma display device, and electrophoresis.

  In the present invention, the wiring width of the first antenna is preferably larger than the wiring width of the second antenna. According to this, even when the second antenna is disposed on the side where the radio wave is propagated or the side where the radio wave should be transmitted with respect to the first antenna, the transmission / reception performance of the first antenna is improved. It is possible to suppress the decrease.

  In the present invention, it is preferable that a portion of the first antenna arranged in the substrate is formed of the same layer as a conductive material or a semiconductor constituting the display portion or the display portion driving wiring. As described above, since the antenna portion arranged on the substrate is in the same layer as the conductive material or the semiconductor material constituting the display unit or the display unit drive wiring, the antenna is connected to the display unit or the display unit drive wiring in the same process or continuously. It becomes possible to manufacture in the process. Therefore, the manufacturing process can be simplified.

  In the present invention, it is preferable that a portion of the first antenna disposed in the substrate is made of the same material as a conductive material or a semiconductor constituting the display portion or the display portion drive wiring. As described above, the antenna portion arranged on the substrate is formed of the same conductive material or semiconductor material as the conductive material or semiconductor material constituting the display portion or the display portion drive wiring. It can be manufactured in the same process as the drive wiring or in a continuous process. Therefore, the manufacturing process can be simplified.

  In the present invention, it is preferable that the first antenna extends over a plurality of layers in the substrate. As a result, the antenna performance can be improved. Specifically, the first antenna is formed from a plurality of conductive layers made of a conductive material or a semiconductor material.

  In this case, as the form in which the first antenna is formed from a plurality of conductive layers, a plurality of specific modes can be adopted. One is that the antenna is formed in a spiral (each conductive layer does not form a completely closed loop, and one end of one conductive layer is connected to another adjacent conductive layer. The other end is not connected to the other conductive layer. In this case, each antenna is essentially a multi-turn helical antenna, and has higher communication reliability, that is, reception sensitivity and transmission radio wave intensity than a single-turn antenna. In another embodiment, the antennas are formed in a lattice shape (the conductive layers are electrically connected to each other at a plurality of locations separated from each other). In this case, each antenna has a plurality of conductive layers connected in parallel, but is essentially equivalent to a single turn antenna. Therefore, although its reception sensitivity and transmission radio wave intensity are not high, the function of the antenna is maintained as long as the other conductive layer is effectively connected even if one conductive layer is disconnected because the conductive layers are parallel. Is done.

  In any case, it is more preferable that the conductive layers adjacent to each other are electrically connected to each other through a plurality of connecting portions. According to this, even if one connection part is disconnected, as long as another connection part is effectively connected, conduction between the conductive layers is maintained.

  According to another electro-optical device of the invention, at least one substrate provided with a display unit and a display unit drive wiring for driving the display unit, and a first antenna at least part of which is disposed in the substrate. And at least a part of the first antenna is disposed within the substrate, is provided independently of the first antenna, and is disposed so as to overlap with a part of the first antenna in a plane. A second antenna configured so as not to planarly overlap a remaining portion of the antenna, and electrically connected to the first antenna and the second antenna, and the first antenna and the second antenna And a communication circuit for controlling data communication via the two antennas.

  According to this invention, at least a part of the first antenna and the second antenna is disposed in the substrate, and the second antenna is disposed so as to overlap the part of the first antenna in a plane. With this configuration, it is possible to arrange a plurality of antennas in a more compact manner, and to reduce structural constraints on the display unit. For example, a plurality of antennas can be compactly arranged in a region that does not overlap with the display unit in a planar manner. In addition, since the second antenna is arranged so as not to overlap with the remaining portion of the first antenna, the side on which the radio wave propagates with respect to the first antenna, or the radio wave Even when the second antenna is arranged on the side to be transmitted, wireless communication can be reliably performed by both antennas. Furthermore, since the first antenna and the second antenna are provided independently, each antenna can be optimized, so that communication performance can be improved and independent in a plurality of frequency bands. Thus, it becomes possible to ensure communication performance adaptable to various usage modes, such as enabling communication.

  In the communication circuit according to the present invention, the first communication circuit connected to the first antenna and the second communication circuit connected to the second antenna are configured separately. Is preferred. In this way, transmission / reception data in each antenna can be processed completely independently without complicating the configuration of the communication circuit. That is, since the plurality of antennas arranged on the substrate are independent from each other and are electrically connected to the plurality of communication circuits, respectively, different frequencies can be used. For example, reception and transmission of a plurality of types of information using different frequency channels can be realized. The communication circuit according to the present invention includes a communication circuit having only a transmission function or only a reception function. Furthermore, examples of the electro-optical device according to the present invention include a liquid crystal display device, an OLED (Organic Light Emitting Diode) display device, a plasma display device, and electrophoresis.

  Also in this invention, it is preferable that the wiring width of the first antenna is larger than the wiring width of the second antenna.

  In this case, it is preferable that the first antenna is disposed in a lower layer than the second antenna. According to this, when the second antenna is formed on the first antenna because the first antenna is disposed below the second antenna in the substrate, the wiring of the first antenna is performed. Since the width is large and the wiring width of the second antenna is small, the difficulty of patterning the second antenna due to the step formed in the upper layer of the first antenna can be reduced.

  In the present invention, a portion of the first antenna and the second antenna arranged in the substrate is formed of the same layer as the conductive material or semiconductor constituting the display portion or the display portion driving wiring. Preferably it is. Moreover, the part arrange | positioned in the said board | substrate among the said 1st antenna and the 2nd antenna is each comprised with the same material as the electrically conductive material or semiconductor which comprises the said display part or the said display part drive wiring. Is preferred. Furthermore, it is preferable that the first antenna and the second antenna respectively extend over a plurality of layers in the substrate.

  In each of the above inventions, it is preferable that the first antenna and the second antenna are formed at positions that do not overlap the display unit and the display unit drive wiring in a planar manner. The first antenna and the second antenna can be provided so as to overlap the display portion and the display portion driving wiring in a planar manner. However, by providing the first antenna and the second antenna so as not to overlap the display portion and the display portion drive wiring in a plan view, the structural restrictions of the display portion and the display portion drive wiring are eliminated, and the structure is complicated. Can be relaxed.

  Next, an electronic apparatus according to the invention includes the electro-optical device according to any one of the above. The electro-optical device according to the invention can be provided in various electronic apparatuses. In particular, it is effective to be provided in portable electronic devices that are required to be miniaturized, such as mobile phones, portable information terminals, and electronic watches. Further, for example, the electronic device may be an RFID reader / writer, or an RFID read / written by the reader / writer. Further, various readers / writers of such RFIDs or various electronic devices equipped with RFIDs can be configured.

  Embodiments according to the present invention will be described below with reference to the accompanying drawings. In the drawings shown below, the dimensions and ratios of the respective parts are appropriately changed from the actual ones for convenience of illustration.

[1. Electro-optical device]
In the following description, a liquid crystal display panel is taken as an example of the electro-optical device according to the embodiment of the invention. As shown in FIG. 1, a liquid crystal display panel (electro-optical device) 100 includes an array substrate 102 and a counter substrate 104 that face each other. A peripheral sealing material 106 is disposed between the peripheral edge of the array substrate 102 and the peripheral edge of the counter substrate 104, and the peripheral sealing material 106 bonds the substrates 102 and 104 together. A large number of spherical spacers 108 are arranged between the substrates 102 and 104, and both are kept parallel by the spacers 108. A space defined by the substrates 102 and 104 and the peripheral sealing material 106 is filled with a liquid crystal 105 as an electro-optical material.

  A transparent pixel electrode 110 and a thin film transistor (hereinafter referred to as TFT as appropriate) for driving the pixel electrode are formed on one surface of the array substrate 102 (surface facing the counter substrate 104). A transparent common electrode 112 is formed on one surface of the counter substrate 104 (the surface facing the array substrate 102). The array substrate 102 and the counter substrate 104 including these electrodes can be manufactured from materials known in the technical field of liquid crystal display panels. That is, the substrates 102 and 104 can be manufactured by depositing a semiconductor forming a transparent electrode driving TFT and ITO (indium tin oxide) forming a transparent electrode on a transparent substrate as a support substrate. The pixel electrode 110 and the common electrode 112 are covered with alignment films 114 and 116, respectively. Although not illustrated, the counter substrate 104 may be provided with a plurality of color filters and a black matrix.

  Two antennas, that is, a first antenna 120 and a second antenna 122 are arranged on the array substrate 102 so as to overlap each other. The first antenna 120 is completely embedded in the array substrate 102. On the other hand, the lower portion of the second antenna 122 is embedded in the array substrate 102, and the uppermost portion is at the same height as the pixel electrode 110 and is joined to the array substrate 102.

  Although not shown in FIG. 1, each of the first antenna 120 and the second antenna 122 is connected to a separate IC chip. Each IC chip includes a communication circuit, which can modulate and demodulate electromagnetic waves and controls data transmission / reception via a connected antenna. Therefore, the antenna and the IC chip constitute a communication device that performs non-contact communication.

  The communication circuit preferably has both a transmission function and a reception function, but may have only one of the transmission function and the reception function. In addition, a first IC circuit connected to both the first antenna 120 and the second antenna 122 and a first communication circuit connected to the first antenna 120 in the IC chip; A second communication circuit connected to the second antenna 122 may be included. Furthermore, a common communication circuit connected to both the first antenna 120 and the second antenna 122 may be provided.

  Further, the IC chip may be used for charging using the principle of electromagnetic induction via the antennas 120 and 122 in addition to communication using electromagnetic waves. Each IC chip may include a storage circuit for storing the communicated data and a control circuit for generating the data to be communicated.

  These antennas 120 and 122 are manufactured when the array substrate 102 is manufactured. More specifically, the pixel electrode 110 or the drive wiring for driving the pixel electrode is configured simultaneously with the step of forming the pixel electrode 110 as the display unit or the drive wiring (including TFT) for driving the pixel electrode on the array substrate 102. The conductive material or semiconductor material is the same as the conductive material or semiconductor material. Hereinafter, a method for manufacturing the array substrate 102 will be described. The specific configuration of the TFT and the drive wiring will also be clarified through the description of the manufacturing method.

  First, as shown in FIG. 2, an alloy antenna bottom layer 12 and a light shielding layer (black matrix) 14 are simultaneously formed from the same conductive material on a support substrate 10 made of, for example, glass or quartz. Specifically, a film of a simple metal, an alloy, or a silicide including at least one of Ti, Cr, W, Ta, Mo, and Pb, which is preferably an opaque refractory metal, is formed on the entire surface of the support substrate 10. And deposited by sputtering. The antenna bottom layer 12 and the light shielding layer 14 are patterned by etching this film.

  Next, as shown in FIG. 3, a base insulating layer 16 made of a silicon nitride film, a silicon oxide film, or the like is deposited on the antenna bottom layer 12 and the light shielding layer 14. Further, as shown in FIG. 4, a hole reaching the antenna lowermost layer 12, that is, an antenna contact hole 18 is formed in the base insulating layer 16.

  Next, as shown in FIG. 5, the transistor active layer 22 and the antenna intermediate layer 20 are simultaneously formed on the base insulating layer 16 from the same semiconductor material. At this time, the antenna contact hole 18 is also filled with the semiconductor material of the antenna intermediate layer 20. The antenna intermediate layer 20 is formed above and in contact with the lowermost antenna layer 12, and the transistor active layer 22 is formed above the light shielding layer 14 at a distance.

  This semiconductor material is preferably a semiconductor having a low resistance value, such as a polysilicon film. Specifically, the polysilicon film may be formed by, for example, depositing an amorphous silicon film on the base insulating layer 16 and then annealing the amorphous silicon film. Instead of depositing the amorphous silicon film, a polysilicon film may be deposited directly on the base insulating layer 16 by a low pressure CVD method or the like. Then, the transistor active layer 22 and the antenna intermediate layer 20 are patterned by etching this film. Preferably, the antenna intermediate layer 20 is further subjected to a process for reducing its resistance. For example, it can be made conductive by diffusing P ions inside.

  Next, as shown in FIG. 6, a gate insulating film 23 covering the transistor active layer 22 and the antenna intermediate layer 20 is formed. The gate insulating film 23 includes a thermal silicon oxide film 24 and a high temperature silicon oxide film (HTO film) 26. The thermally oxidized silicon film 24 is obtained by oxidizing the surface of the polysilicon film of the transistor active layer 22 and the antenna intermediate layer 20 at a temperature of about 900 to 1300 ° C. The HTO film 26 is obtained by being deposited by a low pressure CVD method or the like. Further, as shown in FIG. 7, a hole reaching the antenna intermediate layer 20, that is, an antenna contact hole 28 is formed in the gate insulating film 23.

  Next, as shown in FIG. 8, the gate electrode (scanning line) 32 and the antenna uppermost layer 30 are simultaneously formed on the gate insulating film 23 from the same conductive material or semiconductor material. At this time, the antenna contact hole 28 is also filled with a conductive material or a semiconductor material of the antenna uppermost layer 30. The antenna top layer 30 is formed above and in contact with the antenna intermediate layer 20, and the gate electrode (scanning line) 32 is formed above and spaced from the transistor active layer 22 and extends in a direction perpendicular to the paper surface. .

  The conductive material or semiconductor material forming the gate electrode 32 and the antenna uppermost layer 30 may be a single metal, alloy or silicide film, or a polysilicon film. For example, the antenna top layer 30 and the gate electrode 32 may be patterned by depositing a film of a simple metal, an alloy, or a silicide by sputtering and etching the film. It is also possible to obtain the antenna uppermost layer 30 and the gate electrode 32 which are made conductive by diffusing P ions inside the polysilicon film. At this point, the first antenna 120 having three conductive layers of the antenna bottom layer 12, the antenna intermediate layer 20, and the antenna top layer 30 is formed.

  Next, as shown in FIG. 9, an interlayer insulating film 34 that covers the gate electrode 32 and the antenna uppermost layer 30 is formed. The interlayer insulating film 34 can be formed by depositing silicon oxide or silicon nitride by, for example, CVD. Further, a pair of holes reaching the transistor active layer 22 is formed in the interlayer insulating film 34 and the gate insulating film 23, and a source electrode 36 and a drain electrode 37 filling the holes are formed from a conductive material. Simultaneously with the formation of the source electrode 36 and the drain electrode 37, the antenna bottom layer 38 of another antenna (second antenna 122) can be formed of the same conductive material.

  In the present embodiment, the antenna bottom layer 38 is formed so as to overlap with a part of the first antenna 120 in a plane, and is configured not to overlap with the remaining part of the first antenna 120 in a plane. . Specifically, all of the antenna bottom layer 38 is any part of the first antenna 120 (at least one of the three conductive layers of the antenna bottom layer 12, the antenna intermediate layer 20, and the antenna top layer 30). 1) and the first antenna 120 has a portion (remainder) that does not overlap with the antenna bottom layer 38 in a plane. Particularly in the case of the present embodiment, the three conductive layers of the first antenna 120, which are the antenna bottom layer 12, the antenna intermediate layer 20, and the antenna top layer 30, have the same wiring width W1, and are planar with each other. Therefore, the lowermost antenna layer 38 is configured to overlap with any of the three conductive layers in a plane.

  In the present embodiment, the wiring width W2 of the antenna bottom layer 38 is formed to be smaller than the wiring width W1 of the first antenna 120. Therefore, even if the antenna bottom layer 38 is formed above the first antenna 120, the antenna bottom layer 38 overlaps a part of the first antenna 120 in a plane, but the antenna The antenna bottom layer 38 does not overlap with the remaining part in a planar manner.

  Here, in the illustrated form, the antenna bottom layer 38 is formed above the already formed first antenna 120, but the second antenna 122 configured to include this antenna bottom layer 38 is the result. In particular, the antenna bottom layer 38 may be formed at a position that does not overlap the first antenna 120 as long as it is configured to overlap a part of the first antenna 120 in a planar manner. Further, a part of the antenna bottom layer 38 may be formed so as to overlap with a part of the first antenna 120 in a plan view, and the remaining part of the antenna bottom layer 38 may be formed so as not to overlap the first antenna 120. .

  Next, an interlayer insulating film 40 that covers the source electrode 36, the drain electrode 37, and the antenna bottom layer 38 is formed. The interlayer insulating film 40 can be formed in the same manner as the interlayer insulating film 34. In addition, a hole reaching the antenna bottom layer 38, that is, an antenna contact hole 42 is formed in the interlayer insulating film 40.

  Next, as shown in FIG. 10, a capacitor electrode (capacitor electrode line) 46 and an antenna intermediate layer 48 are simultaneously formed on the interlayer insulating film 40 from the same conductive material or semiconductor material. At this time, the antenna contact hole 42 is also filled with the conductive material or semiconductor material of the antenna intermediate layer 48. The antenna intermediate layer 48 is formed above and in contact with the lowermost antenna layer 38, and the capacitor electrode 46 is formed above and spaced from the gate electrode (scanning line) 32, and extends in a direction perpendicular to the paper surface. The capacitor electrode 46 is disposed opposite to at least a part of the drain electrode 37, and a storage capacitor is formed between the capacitor electrode 46 and the drain electrode 37.

  Here, the conductive material or semiconductor material forming the capacitor electrode 46 and the antenna intermediate layer 48 may be the same as or similar to the conductive material or semiconductor material forming the gate electrode 32 and the antenna uppermost layer 30 described above. it can. The antenna intermediate layer 48 is preferably configured in exactly the same manner as the antenna bottom layer 38 with respect to the planar arrangement condition with respect to the first antenna 120. For example, the antenna intermediate layer 48 is configured to overlap with a part of the first antenna 120 in a plane and not to overlap with the rest of the first antenna 120 in a plane. The wiring width W2 is smaller than the wiring width W1 of the first antenna 120.

  Next, as shown in FIG. 11, an interlayer insulating film 50 that covers the capacitor electrode 46 and the antenna intermediate layer 48 is formed. The interlayer insulating film 50 can also be formed by depositing silicon oxide or silicon nitride by, for example, the CVD method. Further, a pair of holes reaching the source electrode 36 and the drain electrode 37 are formed in the interlayer insulating films 50 and 40, and a hole reaching the antenna intermediate layer 48 (antenna contact hole) is formed in the interlayer insulating film 50. . Then, the antenna intermediate layer 52, the source electrode (data line) 54, and the drain electrode 55 are formed by filling these holes with a conductive material. In this way, the antenna intermediate layer 52, the source electrode 54, and the drain electrode 55 are simultaneously formed of the same conductive material. The antenna intermediate layer 52 is formed above and in contact with the antenna intermediate layer 48, the source electrode 54 is formed above and in contact with the source electrode 36, and the drain electrode 55 is in contact with and above the drain electrode 37. Is formed.

  The antenna intermediate layer 52 is preferably configured in exactly the same manner as the antenna bottom layer 38 and the antenna intermediate layer 48 with respect to the planar arrangement condition with respect to the first antenna 120. For example, the antenna intermediate layer 52 is configured to overlap with a part of the first antenna 120 in a plane and not to overlap with the rest of the first antenna in a plane. The wiring width W2 is smaller than the wiring width W1 of the first antenna 120.

  Further, an interlayer insulating film 56 covering the source electrode 54, the drain electrode 55, and the antenna intermediate layer 52 is formed. The interlayer insulating film 56 can be formed in the same manner as the interlayer insulating film 34. Further, a hole reaching the drain electrode 55 and the antenna lowermost layer 38, that is, an antenna contact hole, is formed in the interlayer insulating film 56. Thereafter, these holes are filled with ITO (Indium Tin Oxide) to form the pixel electrode 110 and the antenna uppermost layer 58. In this way, the pixel electrode 110 and the antenna uppermost layer 58 are simultaneously formed of the same conductive material. The pixel electrode 110 is formed on and above the drain electrode 55, the source electrode 54 is formed on and above the source electrode 36, and the drain electrode 55 is formed on and above the drain electrode 37. ing.

  The antenna uppermost layer 58 is also preferably configured in exactly the same manner as the antenna lowermost layer 38 and the antenna intermediate layers 48 and 52 with respect to the planar arrangement condition with respect to the first antenna 120. For example, the antenna top layer 58 is configured to overlap with a part of the first antenna 120 in a plane and not to overlap with the rest of the first antenna in a plane. The wiring width W2 is smaller than the wiring width W1 of the first antenna 120.

  At this point, the second antenna 122 having four conductive layers of the antenna bottom layer 38, the antenna intermediate layers 48 and 52, and the antenna top layer 58 is formed. The second antenna 122 is configured to overlap with a part of the first antenna 120 in a plane and not to overlap with the remaining part of the first antenna 120 in a plane. That is, at least one part of the second antenna 122 overlaps with at least one part of the first antenna 120 in a plane, and no part of the second antenna 122 overlaps in a plane. There is a portion (remainder) of one antenna 120.

  In the present embodiment, each conductive layer (antenna bottom layer 12, antenna intermediate layer 20, and antenna top layer 30) of the first antenna 120 has the same wiring width W1, and each of the second antenna 122 The conductive layers (antenna bottom layer 38, antenna intermediate layers 48 and 52, and antenna top layer 58) have the same wiring width W2, and the wiring width W1 is larger than the wiring width W2. Particularly, in the illustrated example, the conductive layers of the first antenna 120 are completely overlapped with each other, and the conductive layers of the second antenna 122 are also completely overlapped with each other. The second antenna 122 is disposed above each conductive layer of the antenna 120, and each conductive layer of the first antenna 120 has a portion (remainder) that does not overlap with the second antenna 122 in a plan view. .

  In the present invention, the first antenna 120 and the second antenna 122 do not need to be formed of a plurality of conductive layers as described above, and may be formed of a single conductive layer. Further, the plurality of conductive layers need not have the same wiring width, and may have different wiring widths. In this case, the average wiring width of the first antenna 120 only needs to be larger than the average wiring width of the second antenna 122.

  As described above, the array substrate 102 including the pixel electrode 110 serving as a display portion, pixel electrode driving wiring (including TFTs), the first antenna 120, and the second antenna 122 is formed. The Thus, the manufacturing process can be simplified by forming the antenna portion arranged on the array substrate 102 with the same conductive material or semiconductor material in the same process as the display portion or the display portion drive wiring. .

  In the case where the second antenna 122 is formed above the first antenna 120 as described above, the first antenna 120 (antenna uppermost layer 30) is used for the lower ground of the second antenna 122 (antenna lowermost layer 38). Although a step is generated on the surface of the interlayer insulating film 34, the wiring width W <b> 2 of the second antenna 122 is smaller than the wiring width W <b> 1 of the first antenna 120, and is formed due to the first antenna 120. Since the second antenna 122 can be arranged while avoiding the step, the step on the base surface affects the patterning of the second antenna 122 (antenna bottom layer 38) and prevents a patterning failure. The

  FIG. 12 is a perspective view of an example of the array substrate 102. In this figure, the first antenna 120 and the second antenna 122 are emphasized, and illustration of pixel electrodes and drive wirings that form an image range is omitted. The first antenna 120 includes three conductive layers of an antenna lowermost layer 12, an antenna intermediate layer 20, and an antenna uppermost layer 30, and is formed in a lattice shape. That is, the conductive layers are electrically connected to each other at a plurality of locations separated from each other. A non-conductive gap S <b> 1 is provided in each of the antenna bottom layer 12, the antenna intermediate layer 20, and the antenna top layer 30.

  The first antenna 120 is connected to an IC chip 124 that includes the communication circuit described above. Connection lines 125 extending from both terminals of the IC chip 124 are connected to both ends of the antenna uppermost layer 30 across the gap S1. The second antenna 122 includes four conductive layers of an antenna bottom layer 38, an antenna intermediate layer 48, an antenna intermediate layer 52, and an antenna top layer 58, which are also formed in a lattice shape. A non-conductive gap S <b> 2 is provided in the antenna bottom layer 38, the antenna intermediate layer 48, the antenna intermediate layer 52, and the antenna top layer 58.

  The second antenna 122 is connected to an IC chip 126 that includes the communication circuit described above. Both terminals of the IC chip 126 are connected to both ends of the antenna top layer 58 across the gap S2. In this example, each of the antennas 120 and 122 formed in a lattice shape has a plurality of conductive layers connected in parallel, but is essentially equivalent to a single-turn antenna. Therefore, although its reception sensitivity and transmission radio wave intensity are not high, the function of the antenna is maintained as long as the other conductive layer is effectively connected even if one conductive layer is disconnected because the conductive layers are parallel. Is done. In addition, since the conductive layers adjacent to each other are electrically connected to each other at a plurality of connection portions (portions that are conductively connected through the antenna contact holes), even if one connection portion is disconnected, other connection portions are not connected. As long as it is effectively connected, conduction between the conductive layers is maintained.

  FIG. 13 is a perspective view of another example of the array substrate 102. In this figure as well, as in FIG. 13, the first antenna 120 and the second antenna 122 are emphasized, and the illustration of the pixel electrode and the drive wiring that become the image range is omitted. The first antenna 120 includes three conductive layers of an antenna lowermost layer 12, an antenna intermediate layer 20, and an antenna uppermost layer 30, and is formed in a spiral shape. That is, each conductive layer does not form a completely closed loop, and one end of one conductive layer is connected to another adjacent conductive layer, but the other end is connected to the other conductive layer. Not. A connection line 125 extending from both terminals of the IC chip 124 is connected to one end of the antenna uppermost layer 30 and one end of the antenna lowermost layer 12.

  The second antenna 122 includes four conductive layers of an antenna lowermost layer 38, an antenna intermediate layer 48, an antenna intermediate layer 52, and an antenna uppermost layer 58, and is also formed in a spiral shape. The IC chip 126 is connected to one end of the antenna uppermost layer 58 and one end of the antenna lowermost layer 38. In this example, each of the antennas 120 and 122 is essentially a multi-turn helical antenna, and has higher communication reliability, that is, reception sensitivity and transmission radio wave intensity than a single-turn antenna. Also in this example, as shown in the figure, the end portions of the conductive layer are electrically connected to each other by a plurality of connection portions (portions that are conductively connected through the antenna contact holes), so that one connection portion is disconnected. However, as long as other connection portions are effectively connected, conduction between the conductive layers is maintained.

  12 and 13, the plurality of antennas 120 and 122 arranged on the array substrate 102 are independent from each other and are electrically connected to the IC chips 124 and 126, respectively. A frequency band can be used. Therefore, as an electronic apparatus having this liquid crystal display panel, for example, reception and transmission of a plurality of types of information using different frequency channels can be realized.

  12 and 13, similarly to the antennas 120 and 122, the connection lines (for example, the connection lines 125) that connect the IC chips 124 and 126 and the antennas 120 and 122 are displayed or displayed. Simultaneously with the step of forming the portion drive wiring, the display portion or the display portion drive wiring may be formed of the same conductive material or semiconductor material as the conductive material or semiconductor material.

  The IC chips 124 and 126 can be separately manufactured and mounted on the array substrate 102 without being arranged inside the array substrate 102. However, the same conductive material or semiconductor material as the conductive material or semiconductor material constituting the display unit or display unit drive wiring is formed simultaneously with the step of forming the display unit or display unit drive wiring for the communication circuit equivalent to the IC chips 124, 126. May be formed. According to this, it is possible to further simplify the manufacturing process. In this case, the position (height) where the communication circuit in the array substrate 102 is arranged is arbitrary.

  FIGS. 14 to 17 show examples of arrangement of the antennas 120 and 122 provided around the display area 130 (area where the plurality of pixel electrodes 110 are arranged). In the example shown in FIG. 14, both the first antenna 120 and the second antenna 122 are formed so as to circulate around the display area 130 outside the display area 130. In the example shown in FIG. 15, the first antenna 120 and the second antenna 122 are formed on one side of the display area 130 outside the display area 130. More specifically, in the illustrated example, both are arranged outside one side of the rectangular display area 130. Further, in the example shown in FIG. 16, the first antenna 120 and the second antenna 122 are both arranged outside two adjacent sides of the display area 130 configured in a rectangular shape. In the example shown in FIG. 17, the first antenna 120 and the second antenna 122 are both arranged outside three adjacent sides of the rectangular display area 130, and the antenna installation area is adjacent as a whole. It spreads outside the three sides.

  In the example shown in FIGS. 14 and 15, the first antenna 120 and the second antenna 122 are arranged so as to partially overlap each other over almost the entire periphery of the display area 130. In the example shown in FIGS. 16 and 17, the first antenna 120 and the second antenna 122 at least partially overlap each other in a partial area around the display area 130, and completely overlap in other areas. Not. Thus, by providing a region where the first antenna 120 and the second antenna 122 do not overlap at all, a usage mode in which communication is possible with any antenna (for example, radio wave transmission / reception direction, communication distance, etc.) It is possible to widen the range. In the case of such a configuration, particularly when the antenna is a loop antenna or a helical antenna as shown in the drawing, there are portions that do not overlap each other between the regions surrounded by the respective antennas. As a result, it becomes easier to secure the antenna performance and the mutual interference between the antennas can be reduced.

  In the example shown in FIGS. 15 to 17, a display unit driving circuit (not shown) such as a liquid crystal driving circuit is provided outside the display region 130 in a portion where the first antenna 120 and the second antenna 122 are not formed. It is preferable to form Accordingly, the liquid crystal display device (electro-optical device) 100 including the display unit driving circuit can be configured in a compact manner. In particular, the peripheral area extending outside the display area 130 can be configured to be small. Further, as will be described later, such a configuration is preferable in order to prevent the antenna and the display unit drive wiring from overlapping each other. In the case where the display unit driving circuit is formed of a semiconductor IC, the semiconductor IC may be mounted on at least one of the substrates 102 and 104.

As described above, the antennas 120 and 122 can be arranged in various patterns, and other patterns other than the above examples can be adopted. Note that in the liquid crystal display panel, the scanning lines, the data lines, and the like are connected to a driving circuit outside the pixel region 130, so that the conductive layers constituting the antennas 120 and 122 are arranged so as not to be in contact with these lines. Must. If the individual antennas are arranged so as not to overlap with a shielding object such as a pattern of a layer not forming the antenna portion, the reception state and the like are further improved. Arranging the antenna so that it does not overlap the display drive wiring prevents the deterioration of the panel characteristics such as the contrast due to the delay of the drive signal of the display drive wiring due to the increase of the coupling capacity, etc. You can also. Furthermore, reliable separation can be achieved by interposing at least one interlayer insulating film between the antenna 120 and the antenna 122. By increasing the thickness of the interlayer insulating film, it is possible to suppress a delay in communication due to a coupling capacitance or the like generated between antennas.
Further, at least one conductive layer that is not electrically connected to the antenna is formed between the antenna 120 and the antenna 122 through an insulating film or the like, and a predetermined electric signal is sent to these conductive layers. Alternatively, the conductive layer functions as a shield layer by fixing to a predetermined potential. As a result, it is possible to prevent malfunctions and misrecognitions due to communication delay of each antenna or interference between antennas to the minimum.

  As described above, the liquid crystal display panel is exemplified as the electro-optical device 100, but the configuration of the electro-optical device 100 is not limited. For example, the present invention can be applied to various display panels such as OLED (Organic Light Emitting Diode) display panels such as organic EL (Electroluminescent) display panels, plasma display panels, and electrophoretic display panels.

[2. Electronics]
FIG. 18 shows a portable electronic device 140 including the electro-optical device according to the invention. The portable electronic device 140 may be an RFID reader / writer or an RFID read / written by the reader / writer. Also, an electronic device such as an RFID reader / writer or a mobile phone equipped with an RFID may be used. As shown in the figure, in the portable electronic device 140, the first antenna 120 and the twenty-first antenna 122 are arranged around the display screen 142 formed by the display area of the electro-optical device. The portable electronic device 140 is provided with various buttons and keys as input devices. Among these buttons 144, the button 144 includes a non-contact communication device having the first antenna 120 and the IC chip 124, and a second one. It is pushed down to selectively switch which non-contact communication device having the antenna 122 and the IC chip 126 is used.

  In short, the portable electronic device 140 includes a first communication mode in which certain information is received or transmitted by the first antenna 120 and the IC chip 124 using a certain frequency band by a control device (not shown), and others. The second antenna 122 and the IC chip 126 are configured to be able to operate in a second communication mode in which other types of information are received or transmitted using the frequency band. The button 144 is for switching between the first communication mode and the second communication mode, and the control device executes the communication mode switching process by operating the button 144.

  In this case, for example, when the first antenna 120 is arranged on the opposite side (back side) of the display screen 142 of the portable electronic device 140 and the second antenna 122 is arranged on the display screen 142 side (front side), The second antenna 122 can preferentially transmit / receive the radio wave arriving from the front side and the radio wave radiated to the front side, and the first antenna 122 can transmit and receive the radio wave arriving from the back side and the radio wave radiated to the back side. The antenna 120 can transmit and receive with priority.

  However, since the first antenna 120 has a portion that does not overlap with the second antenna 122 in a plan view, the first antenna 120 has a transmission / reception performance with respect to radio waves arriving from the front side and radio waves radiated to the front side. Can be secured. At this time, whether or not the transmission / reception performance of the second antenna 122 is ensured with respect to the radio wave arriving from the back side and the radio wave emitted to the back side is a portion where the second antenna 122 does not overlap the first antenna 120 in a plane. It is affected by whether or not it is equipped.

  In contrast to the above, the first antenna 120 may be arranged on the front side, and the second antenna 122 may be arranged on the back side. In this case, the reception performance of not only the second antenna 122 but also the first antenna 120 can be secured for radio waves coming from the back side, and the second antenna 122 can be used when radio waves are emitted to the back side. In addition, the transmission performance of the first antenna 120 can be ensured. Needless to say, the first antenna 120 has reception performance for radio waves coming from the front side, and the first antenna 120 has transmission performance when emitting radio waves to the front side. At this time, whether or not the transmission / reception performance of the second antenna 122 is ensured with respect to the radio wave arriving from the front side or the radio wave emitted to the front side is a portion where the second antenna 122 does not overlap the first antenna 120 in a plane. It is affected by whether or not it is equipped.

  FIG. 19 shows another portable electronic device 150 including the electro-optical device according to the invention. The portable electronic device 150 may also be an RFID reader / writer, or an RFID read / written by the reader / writer. As illustrated, the portable electronic device 150 includes a display unit casing 156 and an operation unit casing 158.

  The display unit housing 156 and the operation unit housing 158 are connected by a hinge unit 160. The display unit housing 156 rotates relative to the operation unit housing 158 around the hinge unit 160. That is, the portable electronic device 150 is a foldable type, and can take an open posture illustrated in FIG. 19A and a closed posture illustrated in FIG. 19B (a posture in which the housings 156 and 158 overlap). it can.

  The operation unit housing 158 is provided with various buttons and keys as input devices, and the display unit housing 156 is provided with a main screen 152 and a sub screen 154. The main screen 152 is exposed on the inner surface of the display unit casing 156. This inner surface is a surface that appears in the open posture shown in FIG. 19A and is covered and hidden by the operation unit housing 158 in the closed posture shown in FIG. 19B.

  On the other hand, the sub screen 154 is exposed on the outer surface of the display unit housing 156. The outer surface is a surface that is on the back side of the inner surface and always appears regardless of the posture of the portable electronic device 150. The main screen 152 and the sub screen 154 may be the display surfaces of each of the two electro-optical devices, or the light emission of both electro-optical devices of a dual emission type (double-sided emission type: a type that emits light in the opposite two directions). In terms of surface. An organic EL display panel is known as a dual emission type electro-optical device that has been realized. Some dual-emission type electro-optical devices have a function that allows the image to be displayed to be instantaneously reversed, and the same image can be simultaneously displayed on both the main screen and the sub-screen. An optical device may be used.

  In the display unit housing 156, antennas 120 and 122 are arranged around the display area (the main screen 152 and the sub screen 154). The first antenna 120 is provided in a layer near the inner surface where the main screen 152 is exposed, and the second antenna 122 is provided in a layer near the outer surface where the sub-screen 154 is exposed. A protrusion 164 is formed on the display unit housing 156, and a button 162 is provided on the operation unit housing 158. The button 162 is provided to selectively switch between the non-contact communication device having the first antenna 120 and the IC chip 124 and the non-contact communication device having the second antenna 122 and the IC chip 126. ing.

  In short, the portable electronic device 150 uses a first communication mode in which certain information is received or transmitted by the first antenna 120 and the IC chip 124 using a certain frequency band, and another frequency band. The second antenna 122 and the IC chip 126 can operate in a second communication mode in which other types of information are received or transmitted. The button 162 switches between the first communication mode and the second communication mode. Specifically, in the closed posture shown in FIG. 19B, the button 162 is pushed down by the protrusion 164, and the operation mode of the portable electronic device 150 becomes the second communication mode. In the open posture shown in FIG. 19A, the protrusion 164 moves away from the button 162, and the operation mode of the portable electronic device 150 becomes the first communication mode.

  In this device, radio waves arriving from the main screen 152 side are preferentially received by the first antenna 120 with the display unit case 156 opened, and radio waves radiated to the main screen 152 side are received. Is preferentially transmitted from the first antenna 120. On the other hand, radio waves arriving from the sub-screen 154 side are preferentially received by the second antenna 122, and radio waves radiating from the sub-screen 154 side are preferentially transmitted from the second antenna 122. Is called.

  However, the reception performance of not only the second antenna 122 but also the first antenna 120 can be secured for radio waves arriving from the sub-screen 154 side, and also when the radio waves are emitted to the sub-screen 154 side. The transmission performance of not only the second antenna 122 but also the first antenna 120 can be ensured. At this time, whether or not the transmission / reception performance of the second antenna 122 is ensured with respect to the radio wave arriving from the main screen 152 side or the radio wave emitted to the main screen 152 side is determined by the second antenna 122 and the first antenna 120. It is affected by whether or not it has a part that does not overlap in plane.

  In the present embodiment, the first antenna 120 may be disposed on the sub-screen 154 side of the portable electronic device 150, and the second antenna 122 may be disposed on the main screen 152 side. In this case, in the above description, the main should just make the surface 152 side and the sub-screen 154 side opposite to each other.

[3. Modified example]
Various modifications are made to the above embodiment. Specific modes of deformation are as follows. The following aspects may be appropriately combined.
(1) In the above embodiment, the entire antennas 120 and 122 are formed at the same time as the manufacture of the array substrate 102. However, only a part of the antenna is manufactured at the same time as the array substrate 102, and the other portions of the antenna are arrayed. It may be manufactured separately from the substrate 102 and connected to a portion of the antenna on the array substrate 102 (for example, it may be formed on another film or plate). In addition, at least a part of one of the antennas 120 and 122 is formed in the array substrate 102, and the other antenna is formed in a location different from the array substrate 102 (separate film, substrate, counter substrate 104, etc.). May be.
(2) The portable electronic devices 140 and 150 shown in FIGS. 18 and 19 are provided with buttons for switching between the first communication mode and the second communication mode. However, both the non-contact communication apparatus having the first antenna 120 and the IC chip 124 and the non-contact communication apparatus having the second antenna 122 and the IC chip 126 are continuously and simultaneously performed without switching the communication mode. It may be used. That is, separate types of communication may be continuously performed using both frequency bands.
(3) In the above embodiment, one electro-optical device has the two antennas 120 and 122 and the IC chips 124 and 126, but the number of antennas and IC chips is not intended to be limited to the embodiment. It is also possible to provide more than two antennas and IC chips. Further, there is only one IC chip, and both the first antenna and the second antenna may be connected to this IC chip. Further, whether the conductive material or the semiconductor material constituting the display unit of the electro-optical device or the display unit driving wiring is made the same layer as the conductive layer of the antenna is not limited to the embodiment, and may be changed as appropriate. .

1 is a cross-sectional view illustrating a liquid crystal display panel that is an electro-optical device according to an embodiment of the invention. Sectional drawing which shows the first process of the method of manufacturing the array substrate of a liquid crystal display panel, forming an antenna in embodiment of this invention. Sectional drawing which shows the next process of FIG. Sectional drawing which shows the next process of FIG. Sectional drawing which shows the next process of FIG. Sectional drawing which shows the next process of FIG. Sectional drawing which shows the next process of FIG. Sectional drawing which shows the next process of FIG. FIG. 9 is a cross-sectional view showing the next step of FIG. 8. Sectional drawing which shows the next process of FIG. FIG. 11 is a cross-sectional view showing the next step of FIG. 10. The perspective view of an example of the array substrate manufactured by the method. The perspective view of the other example of the array substrate manufactured by the said method. The top view which shows an example of the pattern of the antenna which can be manufactured by this invention. The top view which shows the other example of the pattern of the antenna which can be manufactured by this invention. The top view which shows the other example of the pattern of the antenna which can be manufactured by this invention. The top view which shows the other example of the pattern of the antenna which can be manufactured by this invention. 1 is a front view illustrating a portable electronic device including an electro-optical device according to an embodiment of the invention. (A) is a front view which shows the open state of the other portable electronic device provided with the electro-optical apparatus which concerns on embodiment of this invention, (B) is a rear view which shows the closed state of this portable electronic device. .

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Support substrate, 12 ... Antenna bottom layer, 14 ... Light shielding layer, 16 ... Underlayer insulating layer, 18 ... Antenna contact hole, 20 ... Antenna intermediate layer, 22 ... Transistor active layer, 23 ... Gate insulating film, 24 ... Thermal oxidation Silicon film, 26 ... high temperature silicon oxide film (HTO film), 28 ... antenna contact hole, 30 ... antenna top layer, 32 ... gate electrode (scanning line), 34 ... interlayer insulating film, 36 ... source electrode, 37 ... drain electrode 38 ... antenna bottom layer, 40 ... interlayer insulating film, 42 ... antenna contact hole, 46 ... capacitive electrode, 48 ... antenna intermediate layer, 50 ... interlayer insulating film, 52 ... antenna intermediate layer, 54 ... source electrode (data line) 55 ... Drain electrode, 56 ... Interlayer insulating film, 58 ... Antenna top layer, 100 ... Electro-optical device, 102 ... Array substrate, 104 ... Opposing group 110 ... Pixel electrode, 112 ... Common electrode, 120 ... First antenna, 122 ... Second antenna, 124,126 ... IC chip, 140 ... Portable electronic device, 150 ... Portable electronic device, 152 ... Main screen 154 ... Sub-screen.

Claims (18)

At least one substrate provided with a display unit and a display unit drive wiring for driving the display unit;
A first antenna at least partially disposed within the substrate;
Provided independently of the first antenna, disposed so as to planarly overlap a part of the first antenna, and not planarly overlap the remaining part of the first antenna. A configured second antenna;
A communication circuit that is electrically connected to the first antenna and the second antenna and controls data communication via the first antenna and the second antenna;
An electro-optical device comprising:   The electro-optical device according to claim 1, wherein a wiring width of the first antenna is larger than a wiring width of the second antenna.   The portion of the first antenna disposed in the substrate is formed of the same layer as a conductive material or a semiconductor constituting the display unit or the display unit drive wiring. 2. The electro-optical device according to 2.   The portion of the first antenna disposed in the substrate is made of the same material as a conductive material or a semiconductor constituting the display portion or the display portion drive wiring. 2. The electro-optical device according to 2.   5. The electro-optical device according to claim 3, wherein the first antenna extends over a plurality of layers in the substrate. At least one substrate provided with a display unit and a display unit drive wiring for driving the display unit;
A first antenna at least partially disposed within the substrate;
At least a part of the first antenna is disposed in the substrate, is provided independently of the first antenna, and is disposed to overlap with a part of the first antenna in a plane. A second antenna configured to not overlap in plan with the remainder;
A communication circuit that is electrically connected to the first antenna and the second antenna and controls data communication via the first antenna and the second antenna;
An electro-optical device comprising:   The electro-optical device according to claim 6, wherein a wiring width of the first antenna is larger than a wiring width of the second antenna.   The electro-optical device according to claim 7, wherein the first antenna is disposed in a lower layer than the second antenna.   The electro-optical device according to claim 6, wherein at least one insulating film is disposed between the first antenna and the second antenna. Between the first antenna and the second antenna,
The electro-optical device according to claim 9, wherein at least one conductive layer is disposed via an insulating film.   The electro-optical device according to claim 10, wherein the conductive layer is not electrically connected to the antenna portion.   The electro-optical device according to claim 10, wherein the conductive layer is fixed at a constant potential.   Of the first antenna and the second antenna, a portion disposed in the substrate is formed of the same layer as a conductive material or a semiconductor constituting the display portion or the display portion driving wiring. The electro-optical device according to claim 6.   Of the first antenna and the second antenna, portions disposed in the substrate are each made of the same material as a conductive material or a semiconductor constituting the display portion or the display portion driving wiring. The electro-optical device according to claim 6.   The portion of the conductive layer disposed in the substrate is made of the same material as a conductive material or a semiconductor constituting the display portion or the display portion drive wiring, respectively. The electro-optical device according to any one of the above.   The electro-optical device according to claim 13, wherein the first antenna and the second antenna extend over a plurality of layers in the substrate. The first antenna and the second antenna are:
The electro-optical device according to claim 1, wherein the electro-optical device is formed at a position that does not overlap the display unit and the display unit drive wiring in a planar manner. An electronic apparatus comprising the electro-optical device according to claim 1.

Images