JP2006106329A5 - - Google Patents

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JP2006106329A5
JP2006106329A5 JP2004292542A JP2004292542A JP2006106329A5 JP 2006106329 A5 JP2006106329 A5 JP 2006106329A5 JP 2004292542 A JP2004292542 A JP 2004292542A JP 2004292542 A JP2004292542 A JP 2004292542A JP 2006106329 A5 JP2006106329 A5 JP 2006106329A5
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optical
deformable
curved member
close contact
deforming
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JP2004292542A
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Japanese (ja)
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JP2006106329A (en
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Priority to JP2004292542A priority Critical patent/JP2006106329A/en
Priority claimed from JP2004292542A external-priority patent/JP2006106329A/en
Publication of JP2006106329A publication Critical patent/JP2006106329A/en
Publication of JP2006106329A5 publication Critical patent/JP2006106329A5/ja
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Claims (14)

変形可能な反射面とそれに対向した曲面形状の部材を有し、更に前記変形可能な反射面を変形させるための変形手段を有し、前記曲面形状の部材に前記変形可能な反射面を密着させることにより前記反射面を変形させることを特徴とする可変形状ミラーと、撮像素子を有する光学装置。 It has a deformable reflective surface and a curved member facing it, and further has deformation means for deforming the deformable reflective surface, and the deformable reflective surface is brought into close contact with the curved member. An optical apparatus having a deformable mirror and an image sensor, wherein the reflecting surface is deformed by the above. 変形可能な反射面とそれに対向した曲面形状の部材を有し、更に前記変形可能な反射面を変形させるための変形手段を有し、前記曲面形状の部材に前記変形可能な反射面を密着させることにより前記反射面を変形させることを特徴とする可変形状ミラーを光路上に複数個有する光学装置。 It has a deformable reflective surface and a curved member facing it, and further has deformation means for deforming the deformable reflective surface, and the deformable reflective surface is brought into close contact with the curved member. An optical apparatus having a plurality of deformable mirrors on the optical path, wherein the reflecting surface is deformed by the above. 前記複数の可変形状ミラーのうち一つの反射面が前記曲面形状の部材に密着しているときに、少なくとも他の一つの可変形状ミラーの反射面は前記曲面形状の部材に密着していないことを特徴とする請求項2に記載の光学装置。When one reflecting surface of the plurality of deformable mirrors is in close contact with the curved member, at least one reflecting surface of the other deformable mirror is not in close contact with the curved member. The optical device according to claim 2. 変形可能な透過面とそれに対向した曲面形状の部材を有し、更に前記変形可能な透過面を変形させるための変形手段を有し、前記曲面形状の部材に前記変形可能な透過面を密着させることにより前記透過面を変形させることを特徴とする可変焦点レンズを有する光学装置。It has a deformable transmission surface and a curved member facing it, and further has deformation means for deforming the deformable transmission surface, and the deformable transmission surface is brought into close contact with the curved member. An optical apparatus having a varifocal lens, wherein the transmission surface is deformed by this. 請求項4に記載の可変焦点レンズを光路上に複数有する光学装置。An optical apparatus having a plurality of variable focus lenses according to claim 4 on an optical path. 前記複数の可変焦点レンズのうちの一つの変形可能な透過面が前記曲面形状の部材に密着しているときに、少なくとも他の一つの可変焦点レンズの変形可能な透過面は前記曲面形状の部材に密着していないことを特徴とする請求項5に記載の光学装置。When one deformable transmission surface of the plurality of variable focus lenses is in close contact with the curved member, at least another deformable transmission surface of the variable focus lens is the curved member. The optical device according to claim 5, wherein the optical device is not in close contact with the optical device. 変形可能な反射面とそれに対向した第1の曲面形状の部材を有し、更に前記変形可能な反射面を変形させるための第1の変形手段を有し、前記第1の曲面形状の部材に前記変形可能な反射面を密着させることにより、前記反射面を変形させることを特徴とする可変形状ミラーと、変形可能な透過面とそれに対向した第2の曲面形状の部材を有し、更に前記変形可能な透過面を変形させるための第2の変形手段を有し、前記第2の曲面形状の部材に前記変形可能な透過面を密着させることにより前記透過面を変形させることを特徴とする可変焦点レンズとを備えた光学装置。A deformable reflective surface and a first curved member opposed to the deformable reflective surface; further comprising first deforming means for deforming the deformable reflective surface; A deformable reflecting mirror that deforms the reflecting surface by closely contacting the deformable reflecting surface; a deformable transmitting surface; and a second curved member facing the deformable reflecting surface; And a second deforming means for deforming the deformable transmitting surface, wherein the deformable transmitting surface is deformed by bringing the deformable transmitting surface into close contact with the second curved member. An optical device comprising a variable focus lens. 前記変形可能な透過面又は反射面が、前記対向配置された曲面状の部材に変形しているが密着していない状態となるように前記変形手段を制御することで、フォーカス、ブレ補正、光学系の製造誤差の補正、光学系の温度変化の補正、光学系の湿度変化の補正、光学系の経時変化の補正のうちの何れかを行なうことを特徴とする、請求項1乃至7に何れかに記載の光学装置。By controlling the deforming means so that the deformable transmitting surface or reflecting surface is deformed but not in close contact with the curved member disposed oppositely, focus, blur correction, optical Any one of correction of a manufacturing error of the system, correction of temperature change of the optical system, correction of humidity change of the optical system, and correction of change with time of the optical system is performed. An optical device according to claim 1. 変倍時に、前記変形可能な透過面又は反射面が、前記対向配置された曲面状の部材に密着する状態となるように前記変形手段を制御することを特徴とする、請求項1乃至8に何れかに記載の光学装置。9. The deforming means is controlled so that the deformable transmitting surface or reflecting surface is in close contact with the curved member arranged opposite to each other at the time of zooming. An optical device according to any one of the above. 変形可能な光学面とそれに対向した曲面形状の部材を有し、更に前記変形可能な光学面を変形させるための変形手段を有し、前記曲面形状の部材に変形可能な光学面を密着させることにより、前記変形可能な光学面を変形させることが可能な光学特性可変光学素子を有する光学装置。A deformable optical surface and a curved member facing the deformable optical surface; and a deforming means for deforming the deformable optical surface, wherein the deformable optical surface is closely attached to the curved member. An optical apparatus having an optical property variable optical element capable of deforming the deformable optical surface. 請求項10に記載の光学特性可変光学素子を光路上に複数個有する光学装置。An optical apparatus comprising a plurality of optical property variable optical elements according to claim 10 on an optical path. 前記複数の光学特性可変光学素子のうちの一つ光学面が前記曲面形状の部材に密着しているときに、少なくとも他の一つの光学特性可変光学素子の光学面は前記曲面形状の部材に密着していないことを特徴とする請求項11に記載の光学装置。When one optical surface of the plurality of optical property variable optical elements is in close contact with the curved member, at least one optical surface of the other optical property variable optical element is in close contact with the curved member. The optical device according to claim 11, wherein the optical device is not. 請求項10に記載の光学特性可変光学素子が、前記変形可能な光学面が前記曲面形状の部材に密着している状態と、変形力が加わるが前記曲面形状の部材に密着していない状態と、変形力の加わらない状態の3状態を取り得るように前記変形手段により制御されることを特徴とする光学装置。The optical property variable optical element according to claim 10, wherein the deformable optical surface is in close contact with the curved member, and a state in which a deforming force is applied but is not in close contact with the curved member. The optical device is controlled by the deformation means so as to be able to take three states in which no deformation force is applied. 請求項10に記載の光学特性可変光学素子を有し、前記変形可能な光学面が前記曲面形状の部材に変形しているが密着していない状態となるように前記変形手段を制御することで、フォーカス、ブレ補正、光学系の製造誤差の補正、光学系の温度変化の補正、光学系の経時変化の補正のうちの何れかを行なうことを特徴とする光学装置。11. The optical characteristic variable optical element according to claim 10, wherein the deformable optical surface is deformed to the curved member but is not in close contact with the deforming means. An optical apparatus that performs any one of focusing, blurring correction, optical system manufacturing error correction, optical system temperature change correction, and optical system change over time.
JP2004292542A 2004-10-05 2004-10-05 Optical device Withdrawn JP2006106329A (en)

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JP2006106329A JP2006106329A (en) 2006-04-20
JP2006106329A5 true JP2006106329A5 (en) 2007-10-25

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009013230A1 (en) * 2007-07-23 2009-01-29 Carl Zeiss Smt Ag Optical system of a microlithographic projection exposure apparatus
CN102037390A (en) * 2008-04-23 2011-04-27 萨曼·达尔马蒂拉克 Variable optical systems and components
KR102125082B1 (en) * 2015-08-21 2020-06-19 한국전자통신연구원 Image processing apparatus and control method thereof

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