JP2006101585A5 - - Google Patents

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Publication number
JP2006101585A5
JP2006101585A5 JP2004281939A JP2004281939A JP2006101585A5 JP 2006101585 A5 JP2006101585 A5 JP 2006101585A5 JP 2004281939 A JP2004281939 A JP 2004281939A JP 2004281939 A JP2004281939 A JP 2004281939A JP 2006101585 A5 JP2006101585 A5 JP 2006101585A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004281939A
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Japanese (ja)
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JP2006101585A (en
JP4670094B2 (en
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Application filed filed Critical
Priority to JP2004281939A priority Critical patent/JP4670094B2/en
Priority claimed from JP2004281939A external-priority patent/JP4670094B2/en
Publication of JP2006101585A publication Critical patent/JP2006101585A/en
Publication of JP2006101585A5 publication Critical patent/JP2006101585A5/ja
Application granted granted Critical
Publication of JP4670094B2 publication Critical patent/JP4670094B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2004281939A 2004-09-28 2004-09-28 Superconducting bearing and magnetic levitation device Expired - Fee Related JP4670094B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004281939A JP4670094B2 (en) 2004-09-28 2004-09-28 Superconducting bearing and magnetic levitation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004281939A JP4670094B2 (en) 2004-09-28 2004-09-28 Superconducting bearing and magnetic levitation device

Publications (3)

Publication Number Publication Date
JP2006101585A JP2006101585A (en) 2006-04-13
JP2006101585A5 true JP2006101585A5 (en) 2006-12-07
JP4670094B2 JP4670094B2 (en) 2011-04-13

Family

ID=36240869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004281939A Expired - Fee Related JP4670094B2 (en) 2004-09-28 2004-09-28 Superconducting bearing and magnetic levitation device

Country Status (1)

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JP (1) JP4670094B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8791614B2 (en) 2008-12-19 2014-07-29 Lam Research Ag Device for treating disc-like article and method for operating same
DE112014006618A5 (en) * 2014-08-11 2017-02-09 Festo Ag & Co. Kg guide means

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0779020A (en) * 1993-06-30 1995-03-20 Ngk Insulators Ltd Superconducting current limiter
JP2636168B2 (en) * 1994-04-21 1997-07-30 工業技術院長 Superconducting bearing device
US5557155A (en) * 1994-05-23 1996-09-17 University Of Chicago Optimization of superconducting tiling pattern for superconducting bearings
JP3361016B2 (en) * 1996-09-26 2003-01-07 株式会社東芝 Superconducting member and manufacturing method thereof
JP4331850B2 (en) * 2000-03-07 2009-09-16 新日本製鐵株式会社 Superconducting bearing
JP4220733B2 (en) * 2002-07-05 2009-02-04 新日本製鐵株式会社 Superconducting magnetic bearing

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