JP2006096841A - Solid lubricant film and method for producing the same, and roll sliding member having solid lubricant film formed thereon - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To simply trap the fine particles worn away from the roll sliding member. <P>SOLUTION: An amorphous or multilayer solid lubricant film is formed on the body to be treated. The film formation is carried out by using the closed magnetic imbalance magnetron sputtering (UBMS) apparatus that has the targets 16a, 16b, 16c and 16d for being sputtered, the imbalance magnetic field-generating means 11, 12 for generating an imbalance magnetic field on the surface of the targets, and an arranging means 14 for arranging the body to be treated so that the substance to be sputtered from the targets may be adhered to the body to be treated. Since at least one of the target (16b) is constituted with a magnetic substance (Ni), the solid lubricant film formed on the treated body is not almost influenced when the film is formed on the body to be treated, but when the film becomes powdery particles by the outer influence, they are influenced with the magnetic field. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a solid lubricating film and a manufacturing method thereof, a rolling sliding member on which a solid lubricating film is formed, for example, a rolling bearing used in general for machine tools, a non-lubricated bearing used in a vacuum, BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solid lubricant film suitable for forming a film on a rolling slide member used in a linear guide device such as a linear guide or a ball screw, a manufacturing method thereof, and a rolling slide member on which a solid lubricant film is formed. .

  For example, in a rolling sliding member such as a rolling bearing, a liquid lubricant such as grease or oil is supplied in order to reduce rolling friction or sliding friction of a rolling element and improve durability of the bearing. Yes.

  On the other hand, solid lubrication has been applied to rolling sliding members in which the use of grease or the like is restricted or used in an oil-free environment. However, since solid lubrication exhibits a lubricating function due to the self-sacrificing property, it has the property that generation of wear powder is inevitable. Therefore, conventionally, efforts have been made to positively trap wear powder that is inevitably generated in solid lubrication and to realize stable sliding / rolling operation (for example, see Patent Documents 1 and 2 below). .

  The wear powder trap can be performed by using a wiper, an air seal, a polymer adhesive, or the like in the atmosphere, but these methods cannot be used in a vacuum. Therefore, since it is difficult to apply solid lubrication in a vacuum, it has been unavoidable to use low-vapor pressure oil and trap the wear powder using its viscosity.

Japanese Patent Application Laid-Open No. 08-312645 JP 2004-80968 A US Pat. No. 5,556,519

  However, in a method using a liquid lubricant typified by low vapor pressure oil or the like, the vapor of the lubricant becomes a source of environmental pollution. Therefore, there is a problem when the rolling sliding member is used under a sealed vacuum that requires high cleanliness such as semiconductor manufacturing equipment.

  The present invention has been made in view of such problems, and uses rolling sliding members in environments where it is necessary to avoid the diffusion of wear powder, for example, manufacturing sites such as semiconductors and displays manufactured under high vacuum. In this case, the present invention provides a new solid lubricating film having excellent characteristics as a solid lubricating film and capable of suitably trapping generated abrasion powder.

  The solid lubricant film according to the present invention is a solid lubricant film formed on a workpiece by a sputtering method, and at least one of a plurality of targets to be sputtered is made of a magnetic material. It is characterized in that it is hardly affected by a magnetic field when it is formed into a film on the object to be processed and is affected by a magnetic field when powdered by receiving an external force.

  Another solid lubricating film according to the present invention has a plurality of targets to be sputtered, non-equilibrium magnetic field generating means for generating a non-equilibrium magnetic field on the surface of the target, and a material sputtered from the target. And a disposing means for opposingly disposing the object to be processed, and using a closed magnetic field unbalanced magnetron sputtering apparatus that forms a film on the object to be processed in an electromagnetically closed state, A solid lubricant film formed on the substrate, wherein at least one of the targets is made of a magnetic material, and is hardly affected by a magnetic field and is subjected to an external force when formed on the object to be processed. It is characterized by being affected by a magnetic field when it becomes powder by.

  In the solid lubricant film according to the present invention, it is preferable that the magnetic body is composed of at least one element of Ni, Fe, Co, or a combination thereof.

  Further, the solid lubricating film according to the present invention can be formed in an amorphous or layered form on the object to be processed.

  The method for producing a solid lubricant film according to the present invention is hardly affected by a magnetic field when it is formed on an object to be processed, and is affected by a magnetic field when powdered by receiving an external force. And forming at least one of a plurality of targets to be sputtered by a magnetic material when the solid lubricant film is formed on the object to be processed by sputtering. Features.

  Another method for producing a solid lubricating film according to the present invention is hardly affected by a magnetic field when it is formed on an object to be processed, and a solid that is affected by a magnetic field when powdered by receiving an external force. A method for producing a lubricating film, comprising: a plurality of targets to be sputtered; a non-equilibrium magnetic field generating means for generating a non-equilibrium magnetic field on the surface of the target; and a material to be sputtered from the target. And at least one of the targets is made of a magnetic material, and a closed magnetic field imbalanced magnetron sputtering film is formed on the object to be processed in an electromagnetically closed state. The solid lubricant film is formed on the object to be processed by using an apparatus.

  In the method for producing a solid lubricating film according to the present invention, it is preferable that the magnetic body is composed of at least one element of Ni, Fe, Co, or a combination thereof.

  In the method for producing a solid lubricant film according to the present invention, the solid lubricant film may be formed in an amorphous or layered form on the object to be processed.

  In addition, the solid lubricating film according to the present invention is preferably formed on the surface of the rolling sliding member.

  The solid lubricating film according to the present invention has excellent characteristics as solid lubrication in the state of the film, and when it becomes a wear powder, it is affected by a magnetic field and is easily trapped by a permanent magnet or the like. Therefore, when using a rolling sliding member in an environment where it is necessary to avoid the diffusion of wear powder, for example, a manufacturing site such as a semiconductor or a display manufactured under high vacuum, the solid lubricating film according to the present invention should be employed. For example, while maintaining the excellent characteristics as solid lubricant, the wear powder can be easily trapped only by disposing a permanent magnet, an electromagnet or the like in the vicinity of the generation source of the wear powder. That is, according to the solid lubricating film of the present invention, it is possible to apply solid lubrication under high vacuum.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments for carrying out the invention will be described with reference to the drawings. The following embodiments do not limit the invention according to each claim, and all combinations of features described in the embodiments are not necessarily essential to the solution means of the invention. .

  Furthermore, in the present embodiment, a case where a solid lubricant film is formed on a rolling sliding member using a closed magnetic field imbalance magnetron sputtering apparatus (hereinafter referred to as a CUMS apparatus) will be described as an example. The sliding member can be any type of rolling / sliding used in general rolling bearings used for machine tools, non-lubricated bearings used in vacuum, linear guide devices such as linear guides and ball screws. It includes a member with a moving action.

[Configuration of CUMS device]
First, a CUMS apparatus used for forming a solid lubricant film according to the present embodiment will be described with reference to the drawings. FIG. 1 is a schematic view showing the upper surface of a general CUMS apparatus used in this embodiment. FIG. 2 is a schematic diagram showing a side view of a general CUMS device used in this embodiment.

  The CUMS apparatus illustrated in FIGS. 1 and 2 has four magnetrons 10a, 10b, 10c, and 10d. These four magnetrons 10a, 10b, 10c, and 10d are respectively connected to the outer ring magnet 11 and the magnetron 10a. And an inner core magnet 12 located in the center. The four magnetrons 10a, 10b, 10c, and 10d are installed around a carrier 14 that is an arrangement means for arranging an object 13 to be deposited at an appropriate position. The carrier 14 is configured to rotate around one axis in the direction of the arrow A, and this rotation can be realized by a driving mechanism such as a motor 15.

  In the CUMS apparatus shown in FIGS. 1 and 2, the outer ring magnets 11 of the magnetrons 10b and 10d are S poles, and the inner core magnets 12 are N poles. On the other hand, the outer ring magnets 11 of the magnetrons 10a and 10c are N poles, and their inner core magnets 12 are S poles. With such a configuration, the magnetic field lines B of the four magnetrons 10a, 10b, 10c, and 10d form a continuous barrier, and can capture electrons diffused from the magnetron plasma. That is, since the magnetic field lines B can limit the work space C so as to surround the carrier 14, it is possible to form a film on the object 13 while being electromagnetically closed. With such a configuration, the CUMS apparatus can generate high-density plasma at a low voltage, and a high-quality thin film can be formed. The working space C formed by the magnetic field lines B can be arbitrarily set in the range, and is not limited to the upper and lower ends in the axial direction of the carrier 14.

  The four magnetrons 10a, 10b, 10c, and 10d are provided with targets 16a, 16b, 16c, and 16d serving as sputtering supply materials. These targets 16a, 16b, 16c and 16d are arranged so as to cover the pole faces of the magnets 11 and 12 facing the carrier 14. Since each magnetron 10a, 10b, 10c, 10d has a soft iron back plate (not shown), the inner magnetic circuit is completed by each magnetron 10a, 10b, 10c, 10d.

  As can be seen from the above description, according to the CUMS apparatus according to the present embodiment, the object 13 to be processed that is disposed so as to adhere the sputtered substances from the targets 16a, 16b, 16c, and 16d is not balanced. It can be confined within a non-equilibrium magnetic field created by magnets 11, 12 arranged as generating means. Therefore, the CUMS apparatus can form a film on the workpiece 13 in the work space C that is electromagnetically closed. Such a configuration is achieved by intentionally generating a non-equilibrium magnetic field on the surfaces of the targets 16a, 16b, 16c, and 16d in an electromagnetically closed space, thereby generating a high-density plasma at a low voltage. This is because it can be generated, and a high-quality thin film can be formed on the object 13 to be processed.

  When using the CUMS device, an inert gas such as argon is supplied into the chamber of the device. The supply of the inert gas can be performed by an inert gas control loop 20 as shown in FIG. The inert gas control loop 20 includes a high-speed solenoid valve 21, a light emission monitor 22, and a photomultiplier tube 23, so that a suitable working environment can be maintained by constantly monitoring the state of the inert gas in the room. It has become. In such a room, a voltage having a potential difference is applied to the magnetrons 10a, 10b, 10c, and 10d. Electrons are accelerated by this potential difference to ionize the gas, and more electrons and argon ions. Can be generated. In addition, ions can be generated by a pulse voltage or a radio frequency (RF). The argon ions existing in the room bombard the targets 16a, 16b, 16c, and 16d of the supply material to produce a solid lubricating film of the supply material.

[Method of forming solid lubricant film]
A. Setting conditions of CUMS device Next, a specific method for producing the solid lubricant film according to the present embodiment will be described with reference to CUMS apparatus described above. As a CUMS apparatus for performing sputtering, as shown in FIG. 3, a closed magnetic field unbalanced magnetron sputtering apparatus manufactured by Tier, Coatings, Ltd. with a carrier 14 rotating in the center (Patent Document 3: Dennis Gerald in 1996) U.S. Pat. No. 5,556,519 to Tier) was used. According to such an apparatus, sputtering with a high ion current can be performed at a low voltage, so that a homogeneous and high-density thin film can be produced in a relatively short time.

  A carrier 30 shown in FIG. 3 is provided with a jig 30 for fixing the object 13 to be processed. The jig 30 can rotate and revolve in addition to simple rotation. Therefore, the object 13 to be processed attached to the jig 30 can be formed with a solid lubricating film that makes the film thickness and film quality important as a rolling member uniform.

  Here, as a characteristic point of the CUMS device used in the present embodiment, at least one of the targets 16a, 16b, 16c, and 16d installed so as to surround the carrier 14 is configured by a magnetic material. Can be mentioned. This is because the solid lubricant film according to the present embodiment is formed by forming at least one of the plurality of targets 16a, 16b, 16c, and 16d to be sputtered with a magnetic material. This is because the film 13 is hardly affected by the magnetic field when it is formed and is affected by the magnetic field when powdered by receiving external force.

  For the magnetic material, it is preferable to employ a magnetic material composed of at least one element of Ni, Fe, and Co or a combination thereof. However, the magnetic material is not limited to those using these elements, and various materials can be employed. For example, a magnetic material using an element having an element number of 64 or more can be used. However, since these are elements having a very high specific gravity, it is usually preferable to employ Ni, Fe, or Co. In the embodiment described below, Ni that is an element having a relatively small specific gravity is employed as the target 16b.

In the present embodiment, MoS ₂ is used for the other targets 16a, 16c, and 16d. This time, MoS ₂ was used for the targets 16a, 16c, and 16d because this is a well-known solid lubrication. However, the target material is not limited to MoS ₂ alone, and other target materials can be applied. For example, it is preferable to employ a compound whose crystal has a layered structure, such as WS ₂ or graphite. However, to repeat, in the CUMS apparatus according to the present embodiment, at least one of the targets 16a, 16b, 16c, and 16d needs to be made of a magnetic material.

  In the CUMS apparatus according to the present embodiment, it is possible to add and arrange targets other than those described above. That is, the number of targets is not limited, and the third material is disposed on one of the targets, and the boundary adhesion layer 42 and the multilayer film 40 as illustrated in FIG. 4 or the mixing as illustrated in FIG. It can be added to the film 50 to improve the adhesion and lubricity as solid lubrication, and the film strength. For example, a non-magnetic metal such as Ti can be used as a target, and this can be used only for the boundary adhesion layer 42 formed at the boundary between the surface of the workpiece 13 and the solid lubricant film. In addition, in order to improve adhesiveness, it is preferable to use W, Cr, etc. other than Ti as a target material.

  As the carrier 14, an AISIM 42 was used, and a plate-shaped one having a polished surface was adopted. Further, in order to investigate the magnetism of the wear powder, Si was used as the material of the object 13 to be investigated and compared with the solid lubricant film to be deposited and the magnetism of the wear powder. Regarding the investigation of the magnetism of the wear powder, it may be difficult to perform a precise measurement, and a judgment was made based on whether or not the magnet could be attracted by a commercially available permanent magnet.

I. Operation Procedure of CUMS Device Next, the operation procedure of the CUMS device will be described. First, the apparatus chamber in which sputtering is performed is evacuated to 5 to 6 × 10 ⁻⁶ Torr, and then argon gas is introduced. Further, the apparatus chamber is set to 1 × 10 ⁻³ Torr and −350 V is applied to the carrier 14 The surface is cleaned with a pulse voltage for 15 minutes. By doing in this way, the film | membrane which has the favorable adhesiveness which exhibits the function as solid lubrication can be formed.

  Subsequently, the film was formed by sputtering with the pulse voltage to the carrier 14 set to -30V. The current value at this time is about 0.2 to 1.0 A for each target, and the degree of vacuum is controlled to about 5 mTorr. These conditions can be changed according to the characteristics and productivity of the membrane. The film thickness can be from 0.1 μm to 10 μm, but in order to form a uniform film of about 1 μm, sputtering was performed for 70 minutes under these conditions. In order to obtain a thick film, the sputtering time may be increased.

  The rotation speed of the jig 30 attached to the carrier 14 can be freely set in order to produce the distance between the layers of the multilayer film 40 or the mixed film 50, but is preferably 3 to 10 rotations / minute. In this embodiment, the rotation speed is 5 rotations / minute.

[Structure of the formed solid lubricant film]
Next, the structure of the solid lubricating film formed by the above method will be described. In the present embodiment, the multilayer film 40 and the mixed film (amorphous film) 50 formed using four targets 16a, 16b, 16c, and 16d as shown in FIG. The characteristics of the solid lubrication of the film and the magnetism of the wear powder will be described. The multilayer film 40 is formed as a two-layer structure of a Ni layer single layer and a mixed layer of Ni and MoS ₂ . On the other hand, the mixed film 50 is formed into an amorphous state having no clear crystal structure by sputtering Ni and MoS ₂ simultaneously. Both have Ni which is a magnetic metal as the boundary adhesion layer 42. 4 is a diagram showing the film structure of the solid lubricant film according to the present embodiment when formed on the multilayer film 40, and FIG. 5 shows the book when formed on the mixed film (amorphous film) 50. It is a figure which shows the film | membrane structure of the solid lubricating film which concerns on embodiment.

As the structure of the film to be formed, the layer β in which the proportion of MoS ₂ is higher than that in Ni and the layer β in which Ni is larger is α / β / α / β /.../ β / α. And a multilayer film 40 (see FIG. 4) having a multilayer structure, an amorphous mixed film (amorphous film) 50 (see FIG. 5) having no clear crystal structure, and no clear crystal structure. Is possible. These film structures can be obtained by adjusting the rotation speed of the carrier 14, the energy applied to each target, the voltage to the carrier 14, the shutter of the target, and the like.

  For the α layer and β layer described here, various element ratios and variations can be set. Since the composition of the material can be freely adjusted, it is possible to produce a graded layer or graded film by arbitrarily changing the concentration of each element.

[Characteristics of solid lubricant film]
Table 1 shows the results of investigations on the characteristics of the solid lubricating film from various viewpoints. In this embodiment, the adhesiveness, hardness, wear rate, and presence / absence of magnetism, which are important characteristics as solid lubrication, were confirmed.

  First, in the characteristic evaluation, a scratch test was performed in order to confirm adhesion, which is an important characteristic as solid lubrication. A Rockwell indenter was used as the scratch indenter, a load of 10 to 100 N was applied, the scratch was scratched at a speed of 10 mm / min, and the moving distance at which separation was confirmed with an optical microscope was defined as an Lc point. As shown in Table 1, in both of the multilayer film 40 and the mixed film (amorphous film) 50, a numerical value significantly exceeding 70N, which is generally said to be sufficient as an adhesive force, is obtained, and the adhesiveness is good. confirmed.

  Next, the hardness of the solid lubricating film was measured. The hardness as solid lubrication is preferably 500 HV or more in terms of Vickers hardness. In the solid lubricating film according to this embodiment, a Fischer scope made for measuring the hardness of the thin film is used, and a load of 0.4 to 1000 mN is applied, and the load and unloading are repeated 5 times or more during this period. Thus, the hardness corresponding to the Vickers hardness was obtained. As a result, a numerical value of 700 HV or higher was achieved in any film.

The pin-on-disk test for measuring the wear rate was carried out at atmospheric pressure and humidity of 25-40%. As a result, a very small and excellent wear rate of 1.6 × 10 ⁻¹⁶ m ³ / Nm or less was obtained. It was revealed that the friction coefficient was 0.07 or less in any film under the same conditions, and the friction coefficient was sufficiently low as a solid lubricating film. Since MoS ₂ is said to have a lower coefficient of friction in vacuum than in an environment containing moisture as in air, further effects as solid lubrication can be expected in vacuum.

  About magnetism, the adhesion degree was confirmed with a commercially available permanent magnet, and it was confirmed that the wear powder was adsorbed to the magnet in both cases of the multilayer film 40 and the mixed film (amorphous film) 50. In particular, in the amorphous mixed film 50, although no magnetic property was confirmed in the film state, it was confirmed by the solid lubricating film formed on the glass that it became magnetic for the first time when it became a wear powder state. This is because the solid lubricant film according to the present embodiment was formed on a glass substrate having a large mass, and the film itself was hardly affected by the external magnetic field in the film formation state. In this case, it is considered that the mass is reduced, so that it is easily affected by the magnetic field. As another reason, it can be considered that at the film stage, the amorphous monoatomic state has become clustered or aggregated by rolling and becomes magnetized. .

  In addition, when the relative permeability of the wear powder was measured, it was confirmed to be 1.02 or more. This relative permeability is a value sufficient to trap wear powder with a permanent magnet or an electromagnet. For example, a rolling sliding member is suitably used even in an environment such as a sealed vacuum that requires high cleanliness. Can be used. In order to trap the wear powder more suitably, it is desirable that the relative permeability is 1.4 or more, and the manufacturing conditions of the above-described solid lubricating film (for example, the rotational speed of the jig 30 attached to the carrier 14, By adjusting the target material, sputtering time, etc., it is possible to produce a solid lubricating film that satisfies these values.

  Further, the solid lubricating film preferably has zero magnetism in the film state, but may have weak magnetism (that is, the magnetism when formed into a film is substantially zero). . This can be said in any case of the multilayer film 40 and the mixed film (amorphous film) 50, which affects the permanent magnets and electromagnets installed on the rolling sliding member to trap the wear powder. The presence of magnetism in the range not given is allowed. As the weak magnetism source, the influence of magnetic elements such as Ni existing in the boundary adhesion layer 42 is the largest.

  From the above results, it was confirmed that the film formed by sputtering has sufficient characteristics as solid lubrication, and the wear powder can be easily attracted by a permanent magnet or the like. Further, it has become clear that, among sputtering apparatuses, it is particularly desirable to use a UBMS apparatus capable of generating high-density plasma at a low voltage for the formation of a good quality and stable solid lubricating film.

  Based on the above results, the inventors have devised that the generated wear powder can be easily trapped if a solid lubricating film using a CUMS device is applied to a rolling sliding member. In other words, in the prior art, the rolling sliding member itself must be made of a magnetic material, or an adhesive material must be disposed in the vicinity of the wear powder generation source. In addition, efficient wear powder trapping is difficult. However, according to the solid lubricating film according to the present embodiment, the rolling sliding member itself is hardly affected by the magnetic field, and only the wear powder is affected by the magnetic field, so that it is easy to install an electromagnet or a permanent magnet. By simply changing the structure, it is possible to reliably trap the wear powder.

  In particular, the solid lubricant film according to the present embodiment uses a rolling sliding member in an environment where it is necessary to avoid the diffusion of wear powder, for example, in a manufacturing site such as a semiconductor or a display manufactured under high vacuum. It is suitable for. If the solid lubricant film according to the present embodiment is used for a rolling sliding member, it becomes possible to trap wear powder reliably and easily even in an environment where a vacuum state or high cleanliness is required. It is.

  Specific methods for trapping wear powder in rolling sliding members include a method in which permanent magnets and electromagnets (coils) are arranged around a guide that is a source of wear powder, and wear powder by magnetizing the slide rail. A method of attaching, a method of magnetizing the end plate, and the like are effective.

  As mentioned above, although preferred embodiment of this invention was described, the technical scope of this invention is not limited to the range as described in the said embodiment. Various modifications or improvements can be added to the embodiment. It is apparent from the description of the scope of claims that embodiments with such changes or improvements can be included in the technical scope of the present invention.

It is the schematic which shows the upper surface of the common CUMS apparatus used by this embodiment. It is the schematic which shows the side surface of the common CUMS apparatus used by this embodiment. It is a figure for demonstrating the sealed field non-equilibrium magnetic field sputtering apparatus made by Tier, Coatings, Limited used for manufacturing the solid lubricating film which concerns on this embodiment. It is a figure which shows the film | membrane structure of the solid lubricating film which concerns on this embodiment at the time of forming in a multilayer film. It is a figure which shows the film | membrane structure of the solid lubricating film which concerns on this embodiment at the time of forming in a mixed film (amorphous film).

Explanation of symbols

10a, 10b, 10c, 10d magnetron, 11 outer ring magnet, 12 inner core magnet, 13 workpiece, 14 carrier, 15 motor, 16a, 16b, 16c, 16d target, 20 inert gas control loop, 21 high-speed solenoid valve , 22 luminescence monitor, 23 photomultiplier tube, 40 multilayer film, 42 boundary adhesion layer, 50 mixed film (amorphous film), B magnetic field line, C work space, α MoS ₂ ratio higher than Ni layer, β The layer with more Ni as opposed to α.

Claims (9)

A solid lubricant film formed on a workpiece by sputtering,
By configuring at least one of the plurality of targets to be sputtered with a magnetic material,
When the film is formed on the object, it is hardly affected by the magnetic field,
A solid lubricating film characterized by being affected by a magnetic field when powdered by receiving external force. A plurality of targets to be sputtered;
Non-equilibrium magnetic field generating means for generating a non-equilibrium magnetic field on the surface of the target;
An arrangement means for arranging an object to be treated so that a substance to be sputtered from the target adheres;
A solid lubricant film formed on the object by using a closed magnetic field unbalanced magnetron sputtering device that forms an film on the object in an electromagnetically closed state,
At least one of the targets is made of a magnetic material,
When the film is formed on the object, it is hardly affected by the magnetic field,
A solid lubricating film characterized by being affected by a magnetic field when powdered by receiving external force. In the solid lubricating film according to claim 1 or 2,
The magnetic body is composed of at least one element of Ni, Fe, and Co, or a combination thereof. In the solid lubricating film according to any one of claims 1 to 3,
A solid lubricating film formed on the object to be processed in an amorphous or layered form. When the film is formed on the workpiece, it is hardly affected by the magnetic field.
A method for producing a solid lubricating film that is affected by a magnetic field when powdered by receiving external force,
When forming the solid lubricating film on the object to be processed by sputtering, at least one of a plurality of targets to be sputtered is made of a magnetic material. Production method. When the film is formed on the workpiece, it is hardly affected by the magnetic field.
A method for producing a solid lubricating film that is affected by a magnetic field when powdered by receiving external force,
A plurality of targets to be sputtered;
Non-equilibrium magnetic field generating means for generating a non-equilibrium magnetic field on the surface of the target;
Disposing means for disposing a target object so that a substance to be sputtered from the target adheres;
Have
At least one of the targets is made of a magnetic material, and the solid lubrication is performed on the target object by using a closed magnetic field imbalance magnetron sputtering apparatus that forms a film on the target object in an electromagnetically closed state. A method for producing a solid lubricating film, comprising forming a film. In the manufacturing method of the solid lubricating film of Claim 5 or 6,
The method for producing a solid lubricant film, wherein the magnetic body is composed of at least one element of Ni, Fe, and Co or a combination thereof. In the manufacturing method of the solid lubricating film of any one of Claims 5-7,
The method for producing a solid lubricant film, wherein the solid lubricant film is formed in an amorphous or layered form on the object to be processed.   A rolling sliding member, wherein the solid lubricating film according to any one of claims 1 to 4 is formed on a surface.

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