JP2006091684A - Optical waveguide structure and optical module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical waveguide structure and an optical module used for an optical communication and an optical information processing in which the optical waveguide is made into an array by forming a core part on both curved faces of a clad composing the optical waveguide structure, a highly positioning accuracy necessary for forming the optical module is assured and an excellent assemblability is given. <P>SOLUTION: The optical waveguide structure 15 or the optical module including the optical waveguide structure, which emits a plurality of incident light beams which are made incident from a face to the other face by turning the advance direction, is composed of a first clad 16 on the both front and rear faces of which grooves are provided along the advance direction of light and a transparent material having a refractive index larger than that of the first clad, and has at least a core 17 embedded in the groove, and a second clad 18 and a third clad 19 provided on the both front and rear faces of the first clad, respectively, in the state that the clads are integrated as a unit with the first clad to cover at least the exposed face of the core 17. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical module used for optical communication and optical information processing, and more particularly to an optical module having an optical waveguide structure that performs optical coupling between a planar optical element and an optical fiber.

  A surface-emitting laser, which is an example of a surface-type optical element, can be highly integrated by an array arrangement as compared with an edge-emitting laser. Therefore, in recent years, surface emitting lasers have been used as key components in optical communication technology and optical information processing technology that require large-capacity transmission and high integration.

  FIG. 24 shows a conventional example of an optical module using a surface emitting laser. As shown in the figure, the optical module 6 includes a substrate 1, a surface optical element 2, and an optical fiber 3 including a core 3A and a clad 3B. In the optical module 6 of FIG. 24, the optical fiber 3 is arranged perpendicular to the substrate 1 on which the surface optical element 2 is mounted.

  In order to reduce the thickness of the optical module 6, it is desirable to arrange the optical fiber 3 in parallel to the substrate 1. For this purpose, the light emitted from the planar optical element 2 is bent by approximately 90 degrees. In addition, a part to be incident on the optical fiber 3 is newly required.

As described above, in order to bend the light emitted from the surface optical element by approximately 90 degrees, an inclined mirror is arranged in the light path as shown in FIG. 25, and the light reflected by the inclined mirror is used. (For example, refer to Patent Document 1, Patent Document 2, Patent Document 3, etc.).
As another conventional technique, it is also known to bend an arrayed optical fiber by approximately 90 degrees to couple a planar optical element and the optical fiber (see, for example, Patent Documents 4 and 5).
JP-A-62-35304 JP-A-5-88029 International Publication No. 00/08505 Pamphlet US Pat. No. 6,137,929 Japanese Patent Laid-Open No. 10-246827

  In the conventional example of FIG. 25 in which an inclined mirror is disposed in the light path, the light emitted from the surface optical element 2 is converged by the lens 4 and guided to the optical fiber 3 through the inclined mirror 5. At this time, in order to accurately guide the emitted light to the optical fiber 3, the refractive index of the lens 4, the refractive index of the end surfaces 5a and 5c of the inclined mirror 5, the reflectance of the inclined surface 5b, and the like are desired values. Need to be adjusted. In addition, it is necessary to precisely match the positional relationships of the planar optical element 2, the optical fiber 3, the lens 4, and the tilting mirror 5.

  Specifically, in an optical module having a waveguide opening dimension of 50 μm in length and breadth, position accuracy within a range of ± 5 μm (allowable misalignment range) is required to prevent an increase in optical coupling loss.

  Patent Documents 1 to 3 disclose an optical module using an inclined mirror for optical coupling between a light emitting element and an optical fiber, and in order to prevent an increase in light coupling loss in the optical module, as described above. Processing technology for processing the tilting mirror with high accuracy, and further, precise alignment technology of the optical axis of the emitted light emitted from the light emitting element, the reflection point position of the tilting mirror, and the core portion of the arrayed optical waveguide are required. There's a problem.

  Further, Patent Document 4 discloses an optical module in which an arrayed optical fiber is bent by approximately 90 degrees. However, the arrayed optical fiber is bent or fixed while maintaining high dimensional accuracy. Processing technology is required.

  In the technique disclosed in Patent Document 5, a polymer flexible optical waveguide is manufactured on a flat substrate and then peeled off from the substrate and embedded and fixed along the groove of the curved substrate. , Misalignment, or twist is likely to occur, and it is difficult to ensure the positional accuracy within ± 5 μm.

  In the present invention, the core portion is formed in the grooves on the front and back surfaces of the clad constituting the optical waveguide structure so that the optical waveguide is arrayed, and high alignment accuracy required when forming the optical module is ensured. In addition, an object of the present invention is to provide an optical module having good assemblability.

  In order to solve these problems, according to the present invention, there is provided an optical waveguide structure that emits a plurality of incident light incident from one surface from the other surface while changing the traveling direction. A first clad provided with grooves on both front and back along the traveling direction; a transparent material having a refractive index higher than the refractive index of the first clad; and at least a core embedded in the groove; An optical light covering a surface including the exposed surface of the core and having a second cladding and a third cladding respectively provided on the front and back surfaces of the first cladding in a state of being integrated with the first cladding. By using the waveguide structure, high alignment accuracy required when forming the optical module is ensured.

  Further, according to the present invention, there is provided an optical waveguide structure that emits a plurality of incident light incident from one surface from the other surface while changing the traveling direction, and grooves are formed on both front and back surfaces along the traveling direction of the light. A first clad provided with a transparent material having a refractive index higher than that of the first cladding, at least a core embedded in the groove, and at least a surface including the exposed surface of the core An optical waveguide structure having a second clad and a third clad provided on the front and back surfaces of the first clad in a state of being covered and integrated with the first clad, and a surface light emitting device And an optical transmission medium realize an optical module with a simple configuration and easy assembly.

  The present invention provides an optical waveguide structure in which a plurality of incident light incident from one surface is emitted from the other surface by changing the traveling direction, and grooves are provided on both front and back surfaces along the traveling direction of light. 1 is provided, and the core is embedded in the groove, thereby ensuring high alignment accuracy required when forming the optical module and having good assemblability. Become.

(First embodiment)

  FIG. 1 shows an example of an optical module according to the present invention. The figure is a side view of the optical module. In FIG. 1, 11 is a substrate, 12 is an array-shaped optical element, 13 is an array-shaped optical fiber, 13A is an optical fiber core, 13B is an optical fiber cladding, 15 is an optical waveguide structure, and 16 is a first optical fiber structure. A cladding part, 17 is a core part, 18 is a second cladding part, and 19 is a third cladding part.

  The optical waveguide structure 15 is disposed between the arrayed planar optical element 12 and the arrayed optical fiber 13, and emits light emitted from the arrayed planar optical element 12 at a desired angle, for example, FIG. In this example, the optical fiber 13 has a function of bending to approximately 90 degrees and guiding it to the arrayed optical fiber 13. Therefore, the optical waveguide structure 15 according to the present invention can arrange the arrayed optical fibers 13 in parallel to the substrate 1, thereby enabling the optical module to be thinned.

  2 to 7 show a specific configuration of the optical waveguide structure 15. 2, 4 and 6 are views of the optical waveguide structure 15 as viewed from the side. 3, FIG. 5, and FIG. 7 show the optical waveguide structure 15 as viewed from the front.

As shown in FIGS. 2 and 3, the optical waveguide structure 15 includes a first clad part 16, a second clad part 18, and a third clad part 19. The first clad portion 16 has a first end face 16A and a second end face 16B. The both end faces 16A and 16B are in a substantially right-angled positional relationship, and the ends of the first curved face 16C and the second curved face 16E are included in a part of the peripheral edge.
Grooves 16D for forming a core part are formed on the curved surfaces 16C and 16E. The second clad portion 18 has a first end face 18A and a second end face 18B. The both end surfaces 18A and 18B are in a substantially right-angled positional relationship like the first clad portion, and include the ends of the first curved surface 18C and the second curved surface 18E in a part of the periphery thereof. . The third clad portion 19 is also configured by a first end surface 19A, a second end surface 19B, a first curved surface 19C, and a second curved surface 19E that have the same relationship as the second clad portion. 2 and 3, for convenience of illustration, the first clad part 16, the second clad part 18, and the third clad part 19 are shown separated from each other. However, the optical waveguide structure 15 is shown in FIG. After the fabrication, the curved surfaces 16C and 16E of the first cladding part are covered with the curved surface 18E of the second cladding part and the curved surface 19C of the third cladding part, respectively.

  4 and 5 are views for explaining the core portion of the optical waveguide structure 15 according to the present invention. The core portion 17 is formed in the groove 16 </ b> D in the first cladding portion 16. A transparent material having a higher refractive index than that of the first cladding portion 16 is used for the core portion 17, and the core portion 17 is formed by filling the groove 16 </ b> D in FIG. 3 with the transparent material.

  6 and 7 show a state where the optical waveguide structure 15 according to the present invention is completed. As shown in the drawing, the second clad part 18 and the third clad part 19 are bonded to the first clad part 16 in which the core part 17 is formed, and the optical waveguide structure 15 is completed.

  In addition, as a forming material of the clad part or the core part (specifically, the first clad part 16, the second clad part 18, the third clad part 19 and the core part 17) in the optical waveguide structure of the present invention. Transparent solid materials such as plastic, glass, and quartz can be used. From the viewpoint of moldability, it is more preferable to use plastic or low melting point glass.

  The first clad part 16, the second clad part 18, and the third clad part 19 are produced by an injection molding method. In addition to the injection molding method, for example, press molding, mechanical cutting, laser ablation, sand blasting, or plasma processing can be used in combination.

Further, the groove 16D formed in the first clad portion has a rectangular cross-sectional shape in FIG. 3, for example. However, the shape is not necessarily limited to this shape. For example, a trapezoidal shape, an inverted trapezoidal shape, and the bottom of the groove are curved. It may be a rectangular shape or a semicircular shape.
(Second Embodiment)
8 and 9 show examples in which a lens is integrated with the optical waveguide structure 15, FIG. 8 shows a side surface thereof, and FIG. 9 shows a front surface thereof. As shown in the figure, the lens 20 is formed in an integrated state on the end face of the optical waveguide structure 15. Therefore, the optical waveguide structure 15 according to the present invention does not require adjustment of the positional relationship between the optical axis of the lens and the reflection point of the mirror, which has been a problem in the prior art, and can ensure a desired alignment accuracy. It has the merit of becoming.
(Third embodiment)
FIGS. 10 to 13 show an example of an optical waveguide structure in which the cross-sectional area of the core portion gradually changes along the light propagation direction (having a tapered structure). 10 and 12 show a side surface of an optical waveguide structure having a core portion with a tapered structure, and FIGS. 11 and 13 show a front surface, respectively. The core portion 21 shown in FIGS. 10 and 11 has a structure in which the cross-sectional area of the core portion 21 increases from the light incident side opening 21A side toward the light emitting side opening 21B side, as shown in FIGS. The core part 21 has a structure in which the cross-sectional area of the core part 21 decreases as it approaches the light exit side opening 21B side from the light incident side opening 21A side.

Such an optical waveguide structure having a so-called tapered structure core portion has a function of reducing the coupling loss of light. Therefore, the light emitting area of the surface optical element and the core diameter of the optical transmission medium such as an optical fiber (opening portion) It is effective to use for an optical module whose dimensions do not match.
(Fourth embodiment)
FIGS. 14 to 16 show an optical module including a planar optical element array, a plastic fiber array, and an optical waveguide structure. FIG. 14 is a top view of a principal part of the optical module, and FIGS. 15 and 16 show a side surface and a front surface of the optical waveguide structure 23, respectively.

14 to 16, reference numeral 22 denotes an array-type planar optical element composed of planar optical elements arranged at a pitch of 250 μm, 23 is an optical waveguide structure, 25A to 25D are core portions, and 27A to 27D are 500 μm pitches. Arranged arrays, and 27 respectively indicate arrayed plastic fibers. Reference numeral 24 denotes a first cladding part, 25 denotes a core part, 26 denotes a second cladding part, and 28 denotes a third cladding part. As shown in FIG. 14, even when the pitch of the arrayed planar optical elements and the pitch of the optical transmission medium are different, by using such an optical waveguide structure 23, the arrayed planar optical elements 22 and It becomes possible to optically couple the arrayed plastic fibers 27 while suppressing an increase in light coupling loss.
(Fifth embodiment)
FIG. 17 shows an inner side surface of an optical module manufactured using the optical waveguide structure according to the present invention. In FIG. 17, 40 is an optical waveguide structure, 41 is a printed circuit board, 42 is an arrayed surface optical element such as a surface laser or photodiode disposed on the printed circuit board, 43 is a first cladding part, 43A. Is a curved surface formed in the first clad part 43 to bend the light traveling direction in a right angle direction, 43B is a lens, 43C is a space formed at one end of the first clad part to cover the surface optical element, 44 Denotes a core part, 45 denotes a second cladding part, 49 denotes a third cladding part, 46 denotes an optical fiber ribbon, and 47 denotes an MT (mechanically transferable) type optical connector. Although not shown, a plurality of grooves along the light traveling direction is formed on the curved surface 43A, and a core portion is formed in the groove.

  FIG. 18 is an enlarged view of a portion surrounded by a broken line in FIG. In FIG. 18, a lens 43 </ b> B is formed at a portion of the first cladding portion 43 that faces the arrayed surface optical element 42. In the case where the arrayed surface optical element 42 is a laser, the light emitted from the arrayed surface optical element 42 is focused by the lens 43B and is applied to the core part 44 embedded in the groove of the first cladding part 43. It has an incident structure.

  FIG. 19 shows the top surface of the optical module described in FIG. In FIG. 19, the first clad portion 43 is mounted on the printed circuit board 41 by alignment pins 48A. At this time, the array-type surface optical element 42 mounted on the printed circuit board 41 and the lens 43B integrally formed with the first clad portion 43 are positioned so as to accurately face each other. Further, the two-dimensional array MT type optical connector 47 to which the optical fiber ribbon 46 is attached by the alignment pins 48B is mounted on the first clad portion 43. At this time, the core portion 44 and the optical fiber ribbon 46 formed in the first clad portion 43 are positioned so as to face each other accurately.

FIG. 20 shows an optical waveguide structure according to the present invention. In the figure, 43D is an alignment pin hole for inserting an alignment pin 48A used for mounting on the printed circuit board 41, and 43E is a two-dimensional array MT type to which an optical fiber ribbon 46 is attached. This is an alignment pin hole for inserting an alignment pin 48B used when the optical connector 47 is mounted. 43F is an insertion hole into which the second clad portion 45 is inserted. 43A is a curved surface covered by the third cladding part 49. A plurality of grooves (not shown) are formed in the curved surface 43A of the first clad portion 43 and the upper surface 43G of the insertion hole 43F, and the core portion 44 is filled by filling the plurality of grooves with a liquid ultraviolet curable resin. (Not shown) is formed.
As shown in the figure, the second cladding portion 45 is inserted into the insertion hole 43F formed in the first cladding portion 43, and the curved surface 43A of the first cladding portion 43 is covered with the third cladding portion 49. The optical waveguide structure in the present invention is completed.

  21 to 23 show the inner side surface, the lower surface, and the front surface of the first cladding portion 43, respectively. In FIGS. 21 and 22, a lens 43 </ b> B is formed on the lower surface of the first cladding portion 43 at a location facing the core portion 44. Further, a space 43C is formed on the lower surface of the first clad portion 43, and a wall 43I surrounding the space 43C is formed when the first clad portion 43 is mounted on the printed circuit board 41 (not shown). It has a function of preventing external dust from entering the array surface optical element 42 (not shown). The wall 43I is formed with an alignment pin hole 43D for inserting an alignment pin 48A used when the first clad portion 43 is mounted on the printed circuit board 41 (not shown).

  In FIG. 23, an insertion hole 43 </ b> F for inserting the second cladding part 45 is formed in the front of the first cladding part 43. Further, alignment pins 48B (not shown) used when mounting a two-dimensional array MT optical connector 47 (not shown) having an optical fiber ribbon 46 (not shown) attached around the insertion hole 43F. ) Is inserted through the alignment pin hole 43E. A groove 43H in which the core portion 44 is embedded is formed in the curved surface 43G on the upper surface side of the insertion hole 43F. Further, in the first clad portion 43, a groove 43H for embedding the core portion 44 is also formed on the curved surface 43A.

  The first clad portion 43 is produced by injection molding a molten thermoplastic resin (for example, polyolefin resin) having a refractive index of 1.50. The opening size of the core portion 44 formed in the first clad portion 43 is 50 μm each in length and width, and the diameters of the alignment pin holes 43D and 43E are 700 μm. The second clad portion 45 is produced by injection molding a molten thermoplastic resin (for example, polyolefin resin) having a refractive index of 1.50. The third clad portion 49 is formed of a thermoplastic resin (for example, a polyolefin resin) having a refractive index of 1.50 like the first and second clad portions, but the shape may be a film shape. . For the core portion 44, a liquid ultraviolet curable resin (for example, epoxy resin) having a refractive index of 1.55 is used.

  Next, the manufacturing procedure of the core part 44 is demonstrated. First, the liquid ultraviolet curable resin (for example, epoxy resin) is filled in the groove 43H in the first clad portion 43. Subsequently, the second clad part 45 is inserted into the first clad part 43. At this time, the liquid ultraviolet curable resin filled in the groove 43H completely fills the groove 43H, and the liquid ultraviolet curable resin overflowing without entering the groove 43H is thinly extended along the second cladding portion 45. The extended liquid ultraviolet curable resin functions to bond the first cladding portion 43 and the second cladding portion 45 together. Similarly, the liquid ultraviolet curable resin is thinly extended along the third clad portion 49 and functions to bond the first clad portion 43 and the third clad portion 49 together. Finally, the core portion 44 is formed by irradiating ultraviolet rays and curing the liquid ultraviolet curable resin, and at the same time, the first clad portion 43, the second clad portion 45 and the third clad portion 49 are bonded, The optical waveguide structure 40 is completed.

  The optical waveguide structure manufactured in this manner is provided with alignment pin holes, and is fixed to the substrate 41 on which the arrayed planar optical element 42 is mounted using alignment pins 48A. Also, an array MT optical connector 47 to which an optical fiber ribbon 46 is attached is fixed to the front surface of the optical waveguide structure by using alignment pins 48B, thereby completing the optical module according to the present invention.

  As described above, the optical waveguide structure according to the present invention can be formed into an array without generating a shift, a bend, or a twist of the optical waveguide by forming core portions on both curved surfaces of the first cladding portion. Therefore, it is possible to ensure high alignment accuracy required when forming the optical module.

  In the optical waveguide structure according to the present invention, since the light exit surface and the light incident surface are substantially perpendicular to each other, the array optical fiber is parallel to the substrate on which the array surface optical element is mounted. Therefore, the optical module can be thinned.

  The optical waveguide structure according to the present invention is required when forming an optical module because an alignment pin hole for mounting the array-shaped surface optical element and the array-shaped optical fiber is formed in advance. High alignment accuracy can be ensured.

  Further, since the lens is integrally formed in the optical waveguide structure according to the present invention, the combination of the lens and the tilting mirror as in the conventional example is not necessary, and troublesome optical axis alignment is not required.

Furthermore, the optical waveguide structure according to the present invention can be manufactured by molding such as injection molding or press forming, or by combining techniques such as mechanical cutting, laser ablation, sand blasting, and plasma processing. Its production is easy. In particular, the productivity in the case of producing by performing mold forming is good.
(Appendix 1) An optical waveguide structure for emitting a plurality of incident light incident from one surface from the other surface while changing the traveling direction, and grooves are provided on both the front and back surfaces along the traveling direction of the light. The first clad, and a transparent material having a refractive index higher than that of the first clad, covering at least the core embedded in the groove, and at least the surface including the exposed surface of the core, An optical waveguide structure comprising a second clad and a third clad respectively provided on the front and back surfaces of the first clad in a state of being integrated with the first clad.
(Supplementary note 2) The optical waveguide structure according to supplementary note 1, wherein an arrangement interval of the plurality of cores on the one surface is different from an arrangement interval of the plurality of cores on the other surface.
(Supplementary note 3) The optical waveguide structure according to supplementary note 1, wherein a cross-sectional area of the core on the one surface is different from a cross-sectional area of the core on the other surface.
(Supplementary note 4) The optical waveguide structure according to supplementary note 3, wherein the core has a tapered structure.
(Supplementary note 5) The optical waveguide structure according to supplementary note 1, wherein the core has a rectangular cross section.
(Supplementary note 6) The optical waveguide structure according to supplementary note 1, wherein a lens is provided on one end face of the first cladding.
(Supplementary note 7) The optical waveguide structure according to supplementary note 6, wherein the lens is integrally formed on at least one of one surface or the other surface of the first cladding.
(Additional remark 8) It has a refractive index higher than the refractive index of the light emitting element provided on the board | substrate, the 1st clad | groove in which the groove | channel was provided in the front and back both surfaces along the advancing direction of light It is made of a transparent material, covers at least the core embedded in the groove, and covers at least the surface including the exposed surface of the core, and is integrated with the first cladding on the front and back surfaces of the first cladding, respectively. One surface of an optical waveguide structure having a second clad and a third clad provided, and emitting a plurality of incident light incident from one surface from the other surface while changing the traveling direction A substrate on which a light emitting element is mounted is disposed, an optical fiber is connected to the other surface of the optical waveguide structure, and the light emitting element and the optical fiber are optically connected via the optical waveguide structure. Optical module featuring
(Appendix 9) The optical waveguide structure is formed with an alignment mechanism between the light emitting surface of the light emitting element and the optical waveguide structure, or an alignment mechanism between the optical waveguide structure and the optical fiber. The optical module according to appendix 8, wherein:
(Additional remark 10) The said optical waveguide structure has the concave space which seals the said light emitting element, and the lens is formed in the inner surface of the said concave space in the position which receives the emitted light from the said light emitting element. The optical module according to appendix 8, wherein:

It is a principal part cutting side view showing the optical module produced using the optical waveguide structure by this invention. It is a principal part side view for demonstrating the outline in the case of producing one form of the optical-waveguide structure based on this invention. It is a principal part front view for demonstrating the outline in the case of producing one form of the optical-waveguide structure based on this invention. It is a principal part side view for demonstrating the outline in the case of producing one form of the optical-waveguide structure based on this invention. It is a principal part front view for demonstrating the outline in the case of producing one form of the optical-waveguide structure based on this invention. It is a principal part side view for demonstrating the outline in the case of producing one form of the optical-waveguide structure based on this invention. It is a principal part front view for demonstrating the outline in the case of producing one form of the optical-waveguide structure based on this invention. It is a principal part side view for demonstrating the form which provided the lens in the optical waveguide structure. It is a principal part front view for demonstrating the form which provided the lens in the optical waveguide structure. It is principal part side explanatory drawing showing one form of the optical waveguide structure which has a core part of a taper structure. It is principal part front explanatory drawing showing one form of the optical waveguide structure which has a core part of a taper structure. It is principal part side explanatory drawing showing the other form of the optical waveguide structure which has a core part of a taper structure. It is principal part front explanatory drawing showing the other form of the optical waveguide structure which has a core part of a taper structure. It is a principal part top view showing the optical module which consists of a planar optical element array and a plastic fiber array. It is a principal part side view of the optical waveguide structure seen by FIG. It is a principal part front view of the optical waveguide structure seen by FIG. It is a principal part cutting side view showing the optical module for demonstrating the Example of this invention. FIG. 18 is an enlarged side view of the main part showing a part surrounded by a broken line seen in FIG. 17. It is a principal part top view showing the optical module demonstrated in FIG. It is a principal part exploded slope view for demonstrating the assembly of the optical waveguide structure which is an Example of this invention. It is a principal part cutting side view for demonstrating in detail the structure of a 1st clad part. It is a principal part bottom view for demonstrating in detail the structure of a 1st clad part. It is a principal part front view for demonstrating in detail the structure of a 1st clad part. It is a principal part cutting side view showing the prior art example which has arrange | positioned the optical fiber perpendicular | vertical with respect to the board | substrate. It is a principal part cutting side view showing the prior art example which has arrange | positioned the inclination mirror in the appropriate place in the path | route of light.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate 2 Array surface type optical element 3 Array optical fiber
3A Optical Fiber Core 4 Lens 5 Inclined Mirror 5a Inclined Mirror End Surface 5b Inclined Mirror Reflecting Surface 5c Inclined Mirror End Surface 6 Optical Module 11 Substrate 12 Arrayed Surface Type Optical Element 13 Arrayed Optical Fiber
13A Optical fiber core 13B Optical fiber clad 15 Optical waveguide structure 16 First clad part 16A First clad part end 16B First clad part end 16C First clad part curved face 16D Groove 16E Curved surface 17 of the first cladding portion 18 Core portion 18 Second cladding portion 18A End side 18B of the second cladding portion End side 18C of the second cladding portion Curved surface 18E of the second cladding portion Curved surface of the second cladding portion 19 Third clad part 19A Third clad part edge 19B Third clad part edge 19C Third clad part curved face 19E Third clad part curved face 20 Lens 21 Core part 21A Light incident side opening 21B Light Emission Side Opening 22 Array Surface Type Optical Element 23 Optical Waveguide Structure 24 First Cladding Portion 25 Core Portion 25A Core Portion 25B Core Portion 25C Core Portion 25 D core portion 26 second clad portion 27 arrayed plastic fiber 27A plastic fiber 27B plastic fiber 27C plastic fiber 27D plastic fiber 28 third clad portion 40 optical waveguide structure 41 printed circuit board 42 surface optical element 43 first clad Part 43A Curved surface 43B for slowly bending the light traveling direction in a right-angle direction Lens 43C Space 43D formed on the back surface of the first cladding part to cover the surface optical element Positioning pin hole 43E Positioning pin hole 43F Second Insertion hole 43G into which the clad part 45 is inserted The upper surface 43H of the insertion hole 43F The groove 44I for embedding the core part 43I Wall 44 positioned around the space 43C Core part 45 Second clad part 46 Optical fiber ribbon 47 MT type optical connector 48A Alignment pin 48B Alignment Pin 49 third cladding portion

Claims (5)

An optical waveguide structure that emits a plurality of incident light incident from one surface and changing the traveling direction from the other surface,
A first clad provided with grooves on both the front and back sides along the light traveling direction;
A core made of a transparent material having a refractive index higher than that of the first clad, and at least embedded in the groove;
Covering at least the surface including the exposed surface of the core, and having a second cladding and a third cladding respectively provided on the front and back surfaces of the first cladding in a state of being integrated with the first cladding An optical waveguide structure characterized by that. The optical waveguide structure according to claim 1, wherein an arrangement interval of the plurality of cores on the one surface is different from an arrangement interval of the plurality of cores on the other surface. The optical waveguide structure according to appendix 1, wherein a cross-sectional area of the core on the one surface is different from a cross-sectional area of the core on the other surface. A light emitting element provided on a substrate;
A first clad provided with grooves on both the front and back surfaces along the light traveling direction; a core made of a transparent material having a refractive index higher than the refractive index of the first clad; and at least a core embedded in the groove; Covering at least the surface including the exposed surface of the core, and a second cladding and a third cladding respectively provided on the front and back surfaces of the first cladding in a state of being integrated with the first cladding. A substrate having a light-emitting element mounted on one surface of an optical waveguide structure that emits a plurality of incident light incident from one surface and changing the traveling direction from the other surface;
An optical fiber is connected to the other surface of the optical waveguide structure,
An optical module, wherein the light emitting element and the optical fiber are optically connected via the optical waveguide structure. The optical waveguide structure is provided with an alignment mechanism between the light emitting surface of the light emitting element and the optical waveguide structure or an alignment mechanism between the optical waveguide structure and an optical fiber. The optical module according to claim 4.

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