JP2006090793A - X-ray fluoroscopic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray fluoroscopic device for intuitively performing the positioning of a specimen stage to move a watch point to the center of a fluoroscopic visual field, and moreover, keeping the watch point from getting out of an X-ray fluoroscopic image plane even if the specimen stage is turned/inclined in its positioned state. <P>SOLUTION: Optical images are displayed which are obtained by photographing a fluoroscoping object W by using optical cameras 5 and 6 from two directions substantially orthogonal to each other and including an X-ray fluoroscoping direction. Markers M1 and M2 for expressing the position of an X-ray optical axis L are superimposedly displayed on the respective optical images. The markers M1 and M2 are moved on the optical image to designate the watch point V, thereby moving the specimen stage 3 to position the watch point V on the optical axis L. In this state, when turning/inclining the specimen stage 3, the specimen stage 3 is automatically moved so that the watch point V is positioned on the optical axis L and remains at the same position in the optical axis L direction. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an industrial X-ray fluoroscopic apparatus, and more particularly to an X-ray fluoroscopic apparatus suitable for observing an internal result of an aluminum casting or the like under non-destructive conditions.

As a device that inspects internal defects of articles such as aluminum castings in a non-destructive manner, the inspection object (perspective object) is fixed between the X-ray source and the X-ray detector. An X-ray fluoroscopic apparatus in which a tilted sample stage is arranged is known (for example, see Patent Document 1).
In this type of apparatus, in general, the specimen stage is manually translated so that the point of interest is located at the center of the field of view, and the specimen is not only seen through from one direction, but also the specimen. While rotating or tilting the stage, the presence / absence or shape of an internal defect or the position on the fluoroscopic object is observed.
JP 2003-279502 A

  By the way, in the X-ray fluoroscopic apparatus as described above, there is a case where it is difficult to intuitively grasp which position of the fluoroscopic object is fluoroscopically, particularly in a state where fluoroscopy is performed at a high magnification. In such a case, when changing the point of interest, it may be impossible to immediately determine in which direction the sample stage may be moved.

  In such a case, the perspective magnification is reduced by changing the distance between the X-ray source and the fluoroscopic object, and the current fluoroscopic direction and the position of the visual field center are confirmed from the fluoroscopic image covering the entire fluoroscopic object. In general, there is a work procedure of determining the direction in which the sample stage should be moved, etc., and then increasing the fluoroscopic magnification after the movement to perform fluoroscopy, which contributes to a reduction in work efficiency. .

  Further, as shown in a plan view in FIG. 8, the sample stage S is positioned so that the point of interest V is seen through, that is, the point of interest V on the fluoroscopic object W is positioned on the X-ray optical axis L. When the sample stage S is rotated around its rotation center axis R in order to change the fluoroscopic direction in the state where the target point V is not located on the rotation center axis R of the sample stage S, As a result of the point V deviating from the X-ray optical axis L, the fluoroscopic image of the target point V moves on the X-ray fluoroscopic screen, and the image of the target point V is X-ray fluoroscopic screen especially when the fluoroscope is viewed at a high magnification. May move outside.

  Further, as shown in FIG. 9, even when the sample stage S is tilted around the tilting center axis T, it was positioned at the center of the visual field before tilting, and thus was positioned on the X-ray optical axis L. As a result of the attention point V deviating from the X-ray optical axis L, the image of the attention point V may move outside the X-ray fluoroscopic screen.

  In such a case, it is difficult to move the sample stage so that the image of the point of interest is returned to the X-ray fluoroscopic screen again while maintaining a high magnification. Therefore, the image of the point of interest is reduced by reducing the magnification. After the sample stage is positioned so that the image of the point of interest is positioned in the vicinity of the center on the X-ray fluoroscopic screen in that state, the troublesome work such as increasing the fluoroscopic magnification is forced.

  The present invention has been made in view of such circumstances, and can intuitively position the sample stage for moving the point of interest to the center of the visual field, and can rotate and / or rotate the sample stage in the positioned state. Alternatively, an object of the present invention is to provide an X-ray fluoroscopic apparatus in which the point of interest does not go out of the X-ray transmission screen even when tilted.

  In order to solve the above-described problems, in the X-ray fluoroscopic apparatus of the present invention, an X-ray source and an X-ray detector are arranged to face each other, and a sample stage for fixing a fluoroscopic object is provided between them. In addition, an X-ray fluoroscopic apparatus provided with a drive mechanism that moves, rotates, and tilts the sample stage relative to the pair of the X-ray source and the X-ray detector, and images a fluoroscopic object on the sample stage. An optical camera and two optical images obtained by photographing the fluoroscopic object from two directions substantially orthogonal to each other including the X-ray fluoroscopic direction by the optical camera, and the position of the X-ray optical axis on each optical image Display means for displaying each marker representing the position, designation means for moving each marker on the display screen to designate the point of interest, and an X-ray optical axis at a position on the fluoroscopic object specified by the two markers Match The sample stage positioning means for automatically driving the moving mechanism to position the X-ray fluoroscopic image of the target point at the center of the X-ray fluoroscopic screen, and the target point when the sample stage is rotated or tilted. The X-ray fluoroscopic image is characterized by comprising a point of interest tracking means for driving and controlling the moving mechanism so that the center of the X-ray fluoroscopic screen is maintained and the fluoroscopic magnification is maintained (Claim 1). .

  Here, in the present invention, the two optical images to be displayed on the display unit are configured as live images by two optical cameras arranged in directions substantially orthogonal to each other (Claim 2), or Any of the configurations (claim 3) in which two optical images to be displayed on the display device are taken and stored in advance by one camera can be employed.

  In the present invention, an optical camera is provided in an X-ray fluoroscopic apparatus to photograph the appearance of a fluoroscopic object on a sample stage, and two optical images photographed from directions substantially perpendicular to each other including the X-ray fluoroscopic direction are displayed on a display. At the same time, by specifying a point of interest by moving a marker representing the position of the X-ray optical axis superimposed on each optical image, the sample stage is positioned on the X-ray optical axis. A sample that automatically moves the sample stage, and when the sample stage is rotated and / or tilted, the X-ray fluoroscopic image of the point of interest maintains the center of the X-ray fluoroscopic screen, and the fluoroscopic magnification is maintained. By providing a function for moving the stage, an object is to solve the problem.

  That is, by superimposing a marker representing the position of the X-ray optical axis on two optical images obtained by photographing a fluoroscopic object from directions substantially orthogonal to each other, the fluoroscopic position (field center) and direction at that time are displayed. It can be judged intuitively. Then, by using the fact that one point on a three-dimensional coordinate can be specified by using a marker representing an X-ray optical axis on two optical images taken from directions substantially orthogonal to each other, these markers are moved. By designating the point of interest on the fluoroscopic object, the sample table is automatically moved so that the designated point is located on the X-ray optical axis, for example, fluoroscopy is performed at a high magnification. Even in the state, the operation of moving the attention point to the center of the visual field can be performed intuitively.

  Then, when the sample stage is rotated and / or tilted, the sample stage is automatically moved so that the fluoroscopic image of the point of interest located at the center of the visual field at that time maintains the center. The point is always located at the center of the sample stage without departing from the X-ray fluoroscopy screen regardless of the rotation / tilt of the sample stage, the point of interest is shifted outside the X-ray fluoroscopy screen, and the magnification is decreased to find this. Is no longer necessary.

  According to the present invention, a point of interest is designated by moving a marker on two optical images of a fluoroscopic object photographed from directions substantially orthogonal to each other by an optical camera, so that the point becomes the center of the X-ray fluoroscopic screen. Since the sample stage is automatically moved so that it is positioned, for example, when the sample stage is moved from the current point of interest to the next point of interest while being seen through at a high perspective magnification, An operation such as confirming the direction of movement by reducing the magnification is not necessary, and the point can be immediately moved to the center of the field of fluoroscopy by intuitively designating the point of interest.

  In addition, when the sample stage is rotated / tilted, the sample stage automatically moves so that the point of interest maintains the center of the fluoroscopic screen. However, the operation of deviating from the X-ray fluoroscopic screen and reducing the fluoroscopic magnification to search for it becomes unnecessary.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a configuration diagram of an embodiment of the present invention, and is a diagram illustrating a schematic diagram showing a mechanical configuration and a block diagram showing a system configuration.

  An X-ray detector 2 is disposed opposite to the X-ray source 1 in the horizontal direction, and a sample stage 3 for mounting the fluoroscopic object W is disposed therebetween. The sample stage 3 has a moving mechanism for moving in the X-ray optical axis direction (x-axis direction) from the X-ray source 1, in the y-axis direction orthogonal to the x-axis direction on the horizontal plane, and in the vertical z-axis direction. And a rotation mechanism for rotation (φ) around the rotation center axis R parallel to the z axis, and tilting for tilting (θ) about the tilt center axis T parallel to the y axis. It also has a built-in mechanism. Each of these mechanisms is driven and controlled by a driving signal from a 5-axis control device 4 placed under the control of the personal computer 11.

  The X-ray detector 2 is a combination of an image intensifier and a CCD, or a panel type detector. The output of the X-ray detector 2 is taken into a capture board 12 a built in the personal computer 11 and is displayed on the display 13. Live display as a fluoroscopic image.

  A CCD camera 5 is disposed adjacent to and immediately below the X-ray detector 2. The CCD camera 5 can take an image of the fluoroscopic object W on the sample stage 3 from a direction substantially equivalent to that of the X-ray detector 2. Further, another CCD camera 6 is also disposed immediately above the sample stage 3. The CCD camera 6 moves in the x and y directions in conjunction with the movement of the sample stage in the x and y directions. For example, the CCD camera 6 is columnar with respect to a table that moves in the x and y axis directions by the moving mechanism of the sample stage 3. (Not shown).

  The outputs of the CCD cameras 5 and 6 are taken into individual capture boards 12b and 12c incorporated in the personal computer 11, respectively, and optical images obtained when the fluoroscopic object W is viewed from a substantially X-ray fluoroscopic direction. Then, the fluoroscopic object W is displayed live on the display unit 13 as an optical image viewed from above.

  The personal computer computer 11 displays a marker representing the position of the X-ray optical axis L on the optical image of the fluoroscopic object W by the CCD cameras 5 and 6 and moves the marker by the operation unit 14 as shown below. Then, by specifying the point of interest, a sample table positioning program for table positioning for driving and controlling the moving mechanism of the sample table 3 is installed so that the specified point is positioned on the X-ray optical axis. At the same time, when the sample table 3 is rotated about the rotation center axis R and tilted about the tilt center axis T, the fluoroscopic object located at the center of the X-ray fluoroscopic screen before rotation or before tilting. Attention for automatically moving the sample table 3 so that the point of interest on the object W maintains the center of the fluoroscopic screen Into tracking program has been installed.

The operation of the embodiment of the present invention by executing each program will be described below.
First, the fluoroscopic object W is placed thereon in a state where the sample stage 3 is positioned at an initial position, for example, (0, 0, z ₀ ) in xyz coordinates. As shown in the display example of FIG. 2, the display unit 13 has two optical image screens 13b and 13c for displaying an optical image adjacent to the X-ray fluoroscopic screen 13a for displaying the X-ray fluoroscopic image. An optical image obtained by photographing the fluoroscopic object W from directly above it with the CCD camera 6 is displayed on one optical image screen 13b, and the fluoroscopic object W is X-rayed by the CCD camera 5 on the other optical image screen 13c. Optical images taken from substantially the same direction as the fluoroscopic direction are displayed live.

  Further, on each of the optical image screens 13b and 13c, markers M1 and M2 indicating the position of the X-ray optical axis L are displayed so as to be superimposed on the optical image of the fluoroscopic object W. On the optical image screen 13b displaying an optical image taken from directly above the fluoroscopic object W, the marker M1 of the X-ray optical axis L is displayed as a line, and on the optical image screen 13c displaying the optical image viewed from the fluoroscopic direction. The marker M2 of the X-ray optical axis L is displayed as a point.

  Now, in the state where the display is performed as described above, in order to designate a part that the operator wants to pay attention to, that is, a point of interest, the marker displayed on each of the optical image screens 13b and 13c is operated by operating the operation unit 14. A movement command is given by moving M1 and M2 so as to point to the point of interest V. As a result, the personal computer 11 supplies a drive control signal to the moving mechanism of the sample stage 3 via the 5-axis controller 4 so that the point of interest V on the fluoroscopic object W is positioned on the X-ray optical axis L. The sample stage 3 is automatically moved. Thereby, the X-ray fluoroscopic image displayed on the X-ray fluoroscopic screen 13a is in a state where the image of the point of interest V is located at the center of the screen. At this time, the images on the optical image screens 13b and 13c of the display unit 13 return the markers M1 and M2 to the center as shown in FIG. 2 and digitally scroll the optical images as shown in FIG. To move. In this state, even if the sample table 3 is moved in the X-ray optical axis direction (x-axis direction) to enlarge the fluoroscopic image, the image of the point of interest V is always located at the center of the X-ray fluoroscopic screen 13a.

  As described above, when the sample stage 3 is rotated around the rotation center axis R in a state where the image of the attention point V is located at the center of the X-ray fluoroscopic screen 13a, the personal computer 11 The point of interest V is located on the X-ray optical axis L and does not move in the x-axis direction so that the image is maintained at the center of the X-ray fluoroscopic screen 13a and the fluoroscopic magnification is maintained. In order to maintain the state, as shown in a plan view in FIG. 4, a drive control signal is supplied to the moving mechanism of the sample stage 3 via the 5-axis controller 4 to automatically move the sample stage 3 in the x and y directions. Move.

  Even when the sample stage 3 is tilted about the tilting central axis T, the personal computer 11 maintains the perspective magnification while the image of the point of interest V is located at the center of the X-ray fluoroscopic screen 13a. That is, in order to maintain the state where the point of interest V is located on the X-ray optical axis L and does not move in the x-axis direction, as shown in a side view in FIG. A drive control signal is supplied to the moving mechanism of the sample stage 3 to move the sample stage 3 in the x and z directions.

The amount of movement of the sample stage 3 in the x, y, and z directions when the sample stage 3 is rotated and tilted can be calculated as follows. That is, the angle around the rotation center axis R before rotation is φ ₁ , the angle around the tilt center axis T before tilt is θ _1, and the angles after rotation and after tilt are φ ₂ and θ ₂ , respectively. And xyz coordinates of the sample stage 3 before tilting are (r · cos φ ₁ · cos θ ₁ , r · cos φ ₁ · sin θ ₁ , rsin φ ₁ ), after rotation and tilting (r · cos φ ₂ · cos θ ₂ , r · cos φ ₂ · sin θ ₂ , rsin φ ₂ ), the sample stage 3 may be moved in each axial direction by the difference in coordinates in the x, y, and z axis directions before and after rotation / tilting.

  According to the above-described embodiment of the present invention, the image of the point of interest V can be positioned at the center of the X-ray fluoroscopic screen 13a by moving the markers M1 and M2 on the optical image of the fluoroscopic object W. In this state, when the sample stage 3 is rotated or tilted, it is possible to maintain the state where the image of the point of interest V is located at the center of the X-ray fluoroscopic screen 13a. Thus, the point of interest can be intuitively positioned at the center of the X-ray fluoroscopic screen without the need for changing and confirming the fluoroscopic magnification, and the sample stage 3 is rotated or tilted in that state. Even in this case, it is possible to maintain the state in which the image of the point of interest is always located at the center of the X-ray fluoroscopic screen 13a. Tasks such as Find an image of waiting was a point of interest is not required.

  Here, in the above embodiment, an example is shown in which two optical images obtained by photographing the fluoroscopic object W from two directions substantially orthogonal to each other are displayed as live images using the two CCD cameras 5 and 6. However, one CCD camera is disposed on the side of the fluoroscopic object W at a known angle with respect to the X-ray optical axis L, and the sample stage 3 is rotated prior to fluoroscopy, and is illustrated in FIG. In this way, a plurality of optical images are taken and stored in a storage device (actually, for example, 360 ° at 5 ° intervals for a total of 72), and among these optical images, the sample stage 3 at the time of fluoroscopy An optical image closest to the one viewed from the X-ray fluoroscopic direction and an optical image photographed from a direction different from the optical image by 90 ° are selected according to the rotation angle, and a display example by the display unit 13 in FIG. As shown, these optical images are displayed on the optical image screens 13b and 13c. Manufacturers M1, be superimposed on the M2, it is possible to obtain the same effects as in the previous examples.

  As for the tilting in the above-described embodiment, the sample stage 3 is not tilted, but the X-ray source 1 and the X-ray detector 2 are supported by, for example, a common C-shaped frame, and the X-ray source for each frame is supported. A configuration in which two pairs of 1 and X-ray detector are tilted with respect to the sample stage 3 may be employed.

  Further, in each of the embodiments described above, an example in which two optical images are displayed simultaneously has been shown. However, when the space of the display is small, these two optical images are selectively switched and displayed. Also good.

In the configuration diagram of the embodiment of the present invention, a schematic diagram showing a mechanical configuration and a block diagram showing a system configuration are shown together. It is explanatory drawing of the example of a display of the indicator 13 in embodiment of this invention. It is explanatory drawing of the example of a display of the indicator 13 after designating an attention point by the movement of the markers M1 and M2 in embodiment of this invention. It is explanatory drawing of the movement of the sample stage 3 performed simultaneously when rotating the sample stage 3 in embodiment of this invention. Similarly, it is an explanatory view of the movement of the sample stage that is simultaneously performed when the sample stage 3 is tilted in the embodiment of the present invention. In other embodiment of this invention using one optical camera, it is explanatory drawing of the example of the optical image of the fluoroscopic target object image | photographed beforehand with the optical camera. It is explanatory drawing of the example of a display of the indicator in other embodiment of this invention. It is explanatory drawing of the reason for which an attention point moves on an X-ray fluoroscopic screen, when rotating the sample stage in the conventional X-ray fluoroscopic apparatus. It is explanatory drawing of the reason for an attention point moving on an X-ray transmissive screen when tilting the sample stage in the conventional X-ray fluoroscopic apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 X-ray source 2 X-ray detector 3 Sample stage 4 5-axis controller 5,6 CCD camera 11 Personal computer 12a, 12b, 12c Capture board 13 Display 14 Operation part L X-ray optical axis M1, M2 Marker R Rotation center Axis T Tilting center axis V Point of interest W Perspective object

Claims (3)

An X-ray source and an X-ray detector are opposed to each other, and a sample stage for fixing a fluoroscopic object is provided between them. The sample stage is a pair of the X-ray source and the X-ray detector. In an X-ray fluoroscopic apparatus provided with a drive mechanism for moving, rotating and tilting relative to
An optical camera for photographing the fluoroscopic object on the sample stage, and two optical images obtained by photographing the fluoroscopic object from two directions substantially orthogonal to each other including the X-ray fluoroscopic direction by the optical camera are displayed. Display means for displaying each marker representing the position of the X-ray optical axis on the optical image, designation means for moving each marker on the display screen to designate a point of interest, and fluoroscopy specified by the two markers A sample stage positioning means for automatically driving the moving mechanism so that the X-ray optical axis coincides with the position on the object and the X-ray fluoroscopic image of the point of interest is positioned at the center of the X-ray fluoroscopic screen; The moving mechanism is driven and controlled so that the X-ray fluoroscopic image of the point of interest maintains the center of the X-ray fluoroscopic screen and maintains the fluoroscopic magnification when the camera is rotated and / or tilted. X-ray fluoroscopy apparatus characterized by comprising a point of interest tracking means that.   The X-ray fluoroscopic apparatus according to claim 1, wherein the two optical images displayed on the display are live images from two optical cameras arranged in directions substantially orthogonal to each other.   2. The X-ray fluoroscopic apparatus according to claim 1, wherein the two optical images displayed on the display are optical images that are previously captured and stored by a single camera.

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