JP2006089156A - Glass substrate storage device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a glass substrate storage device capable of installing an optical measurement means to measure the position of a glass substrate held on a hand on a fixed part. <P>SOLUTION: An optical measurement means 35 to measure the position of a glass substrate 12 on a hand is arranged at the fixed position in the middle of a way in which the hand is advanced/retracted to/from a magazine. The glass substrate storage device has an inclination operation means to operate the inclination (θ) of the glass substrate 12 on the hand based on the measurement signal of the optical measurement means 35 when the hand is advanced/retracted by a predetermined distance, and also has an inclination correction means to control a turning means so as to correct the inclination of the glass substrate 12 operated by the inclination operation means. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a glass substrate storage device for storing a glass substrate such as a liquid crystal panel in a magazine using a transfer robot.

  In a glass substrate storage device for storing glass substrates such as liquid crystal panels in a magazine using a transfer robot, a magazine having a storage shelf for storing a large number of glass substrates in the vertical direction is prepared. The glass substrates are taken out one by one and sent to a manufacturing process apparatus or the like, and the glass substrates subjected to the necessary processing in the manufacturing process apparatus or the like are stored in the original magazine or another magazine by a transfer robot. ing.

  In this type of glass substrate storage device, the glass substrate taken out from the magazine is rotated by a predetermined angle in a horizontal plane, and then sent to a manufacturing process device or the like, and subjected to necessary processing by the manufacturing process device or the like. After the glass substrate is taken out from the manufacturing process apparatus or the like, the glass substrate is turned and directed to the magazine side, and stored in the magazine. At this time, depending on the holding state of the glass substrate with respect to the robot hand, the glass substrate may rarely be displaced with respect to the robot hand during turning. In this case, a slight misalignment in the advancing / retreating direction of the robot hand is not a problem. However, when the glass substrate is stored in the magazine with the misalignment in the direction orthogonal to the advancing / retreating direction, the edge portion of the glass substrate May come into contact with the magazine storage shelf and break.

Conventionally, what was described in patent document 1 is known as what detects the position shift of the glass substrate in conveyance, and corrects the position shift. In such a device described in Patent Document 1, a plurality of sensors for detecting the position of the glass substrate are provided in a robot hand that supports the glass substrate, and the inclination of the glass substrate is detected based on signals from these sensors. It has become.
JP 10-338346 A (paragraphs 0013 and 0014, FIG. 2)

  In the above-described conventional device, since the robot hand is provided with a sensor, at least three sensors are required to detect the displacement of the glass substrate on the robot hand, and the robot hand is lightened. In addition to this, there is a problem that the cost becomes high and the wiring of the movable part becomes troublesome.

  In this type of glass substrate storage device, it is necessary to narrow the vertical pitch of the magazine storage shelves for storing glass substrates, for example, to about 10 mm. There is a problem that the wiring is a limitation in reducing the vertical pitch of the storage shelf.

  The present invention has been made to solve the above-described conventional problems, and it is intended to provide a glass substrate storage device in which an optical measuring means for measuring the position of a glass substrate with respect to a hand can be installed in a fixed portion. Is.

  In order to solve the above-mentioned problem, the structural features of the glass substrate storage device according to the first aspect of the present invention include a hand that holds a glass substrate and can move forward and backward with respect to the magazine, and moves the hand forward and backward. In a glass substrate storage apparatus in which a glass substrate is stored in a magazine by a transfer robot having an advancing / retreating movement means and a turning means for rotating the hand, the hand is fixed while the hand moves forward / backward with respect to the magazine. An optical measuring means for measuring the position of the glass substrate on the hand is disposed at a position, and the glass substrate on the hand is measured based on a measurement signal of the optical measuring means when the hand is moved forward and backward by a predetermined distance. An inclination amount calculating means for calculating an inclination amount is provided, and the inclination means for controlling the turning means so as to correct the inclination of the glass substrate based on the calculation result by the inclination amount calculating means. Is that with a correction means.

  According to a second aspect of the present invention, there is provided a structural feature of the glass substrate storage device according to the first aspect, wherein the optical measuring means has parallel light in a direction orthogonal to the advancing / retreating direction of the hand. And measuring the position of the side edge of the glass substrate based on the fact that part of the parallel light is blocked by the side edge of the glass substrate on the hand.

  A structural feature of the glass substrate storage device according to the invention described in claim 3 is that, in claim 1, the hand includes suction holding means for sucking and holding the glass substrate.

  Furthermore, the structural features of the glass substrate storage device according to the invention described in claim 4 are: a hand that holds the glass substrate and can move forward and backward with respect to the magazine; and a forward / backward moving means for moving the hand forward and backward; In a glass substrate storage device in which a glass substrate is stored in a magazine by a transfer robot having a turning means for turning the hand, the hand is placed at a fixed position in the middle of the hand moving forward and backward with respect to the magazine. An optical measuring means for measuring the position of the upper glass substrate is arranged, and if it is determined by the measurement by the optical measuring means that the position of the glass substrate on the hand interferes with the magazine, An advance / retreat movement stop means for stopping the advance / retreat movement is provided.

  According to the glass substrate storage device according to claim 1 configured as described above, the optical measuring means for measuring the position of the glass substrate on the hand is disposed at a fixed position in the middle of the hand moving forward and backward with respect to the magazine. Therefore, compared to the case where a measuring means (sensor) is provided in the hand, the configuration of the hand can be simplified by eliminating the need for wiring, and it is easy to reduce the weight and size of the hand. There is an effect that can be realized.

  According to the glass substrate storage device according to claim 2 configured as described above, the optical measuring means is configured to have parallel light in a direction orthogonal to the advancing / retreating movement direction of the hand. The measuring means has an effect that the positional deviation of the glass substrate in the direction orthogonal to the forward / backward movement direction of the hand can be easily measured.

  According to the glass substrate storage device according to claim 3 configured as described above, since the hand is provided with suction holding means for sucking and holding the glass substrate, the glass substrate is held by the suction holding hand during transport by the transport robot. There is an effect that it is stably held on the hand and is less likely to be displaced.

  According to the glass substrate storage device according to claim 4 configured as described above, when it is determined by the measurement by the optical measurement means that the position of the glass substrate on the hand interferes with the magazine, the subsequent advance and retreat of the hand is performed. Since it is a configuration equipped with an advancing / retreating movement stopping means for stopping movement, it is possible to easily and reliably avoid the damage of the glass substrate due to contact with the magazine, and to notify the operator of the abnormal state, There is an effect that it becomes possible to investigate the cause of the glass substrate being tilted and held on the hand.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. 1 and 2, reference numeral 10 denotes a glass substrate transfer robot, and 11 denotes a magazine having a storage shelf for storing a large number of glass substrates 12 such as liquid crystal panels in the vertical direction. The transfer robot 10 has, for example, an orthogonal coordinate shape having four degrees of freedom. A slide table 14 is mounted on the fixed frame 13 so as to be horizontally movable in the Y-axis direction, and is installed on the fixed frame 13. The movement is controlled by a Y-axis servo motor 15 via a ball screw mechanism. An elevating block 16 is mounted on the slide table 14 so as to be vertically movable in the Z-axis direction, and the movement is controlled by a Z-axis servomotor 17 installed on the slide table 14 via a ball screw mechanism. A swing shaft 18 is supported by the lift block 16 so as to be rotatable about a vertical axis, and is rotated by a θ-axis servo motor 19 installed on the lift block 16 via a speed reducer.

  A swivel base 20 is installed on the swivel shaft 18. A hand 21 is mounted on the swivel base 20 so as to be horizontally movable in the X-axis direction, and is moved and controlled by an X-axis servo motor 22 installed on the swivel base 20 via a ball screw mechanism. . A guide rail 31 is installed on the swivel base 20 along the X-axis direction, and the hand 21 is guided by the guide rail 31 so as to be slidable in the X-axis direction. The hand 21 is made of a thin and flat plate material so that it can enter the storage shelf of the magazine 11, and a plurality of suction holding means 32 for holding the glass substrate 12 by vacuum suction on the upper surface of the hand 21 have a predetermined interval. Arranged.

  The X-axis, Y-axis, Z-axis, and θ-axis servomotors 22, 15, 17, 19 are connected to a robot controller 24 via a servo CPU 23 as shown in FIG. Encoders 25, 26, 27, and 28 are connected to the servo motors 22, 15, 17, and 19, respectively, and the motor rotation amount of each axis is fed back to the servo CPU 23. As a result, the hand 21 is positioned and controlled at pre-programmed target positions on the X, Y, Z, and θ axes.

  The advancing / retreating means in claim 1 includes the X-axis servomotor 22, the ball screw mechanism, and the encoder 25, and the turning means includes the θ-axis servomotor 19, the reducer, and the encoder 28. Etc. are constituted.

  When the glass substrate 12 that has undergone predetermined processing in a manufacturing process apparatus (not shown) is stored in a predetermined storage shelf of the magazine 11 using the transfer robot 10 having the above-described configuration, the manufacturing process apparatus is provided. The glass substrate 12 is transferred onto the hand 21 by the pickup device, and the glass substrate 12 is sucked and held on the hand 21 by a plurality of suction holding means 32. In this state, the turntable 20 of the transfer robot 10 is turned by a predetermined angle (for example, 180 °) by the turning means, and the glass substrate 12 sucked and held on the hand 21 is made to face the storage shelf of the magazine 11. Thereafter, the hand 21 is advanced by a predetermined amount in the X-axis direction by the advancing / retreating means, and the glass substrate 12 is advanced to a position above a predetermined storage shelf. Subsequently, the suction by the suction holding means 32 is released and the hand 21 is lowered by a slight amount in the Z-axis direction, whereby the glass substrate 12 is transferred from the hand 21 onto a predetermined storage shelf of the magazine 11. Thereafter, the hand 21 is retracted by a predetermined amount in the X-axis direction and is detached from the magazine 11.

  A support frame 34 is erected on a fixed part in the middle of the movement of the hand 21 with respect to the magazine 11, for example, the fixed frame 13, and the glass substrate 12 on the hand 21 is placed on the upper end of the support frame 34. Optical measuring means 35 for measuring the side edge position is provided. The optical measuring means 35 includes a laser beam having parallel light extending in a strip shape in a direction orthogonal to the advancing / retreating movement direction of the hand 21 and a light receiving sensor for receiving the laser beam. When a part of the light is blocked, an electric signal corresponding to the blocked light reception amount is output. That is, the optical measuring means 35 measures in advance how much the light shielding position when the laser beam is partially shielded from the apparatus origin, and actually measures the side edge position of the glass substrate 12. The side edge position of the glass substrate 12 can be obtained based on the difference between the measured values with respect to the origin of the apparatus and the resolution (distance per unit measured value).

  Next, a method for measuring the positional deviation of the glass substrate 12 on the hand 21 using the optical measuring means 35 will be described with reference to FIG. In the following, it is assumed that the glass substrate 12 is held in the posture indicated by the solid line A on the hand 21 in the initial state.

  The first measurement point P1 in which the hand 21 is moved forward from the original position (retreat end position) P0 toward the magazine 11 by a predetermined amount in the X-axis direction, and the hand 21 is further advanced by a set amount (ΔX) in the X-axis direction. At the second measurement point P2, the side edge position of the glass substrate 12 on the hand 21 is measured by the optical measuring means 35, respectively. The glass substrate 12 at the first and second measurement points P1 and P2 is indicated by two-dot chain lines I and II, respectively. FIG. 4 shows a state as if the optical measuring means 35 has moved in the X-axis direction by a set amount (ΔX) for easy understanding.

  Assuming that the measurement signals of the optical measurement means 35 at the first and second measurement points P1 and P2 are S1 and S2, respectively, based on the difference ΔS (ΔS = S1−S2) between the two measurement signals, the two points The amount of deviation ΔY in the Y-axis direction of the side edge position of the glass substrate 12 can be calculated. Therefore, the inclination of the glass substrate 12 on the hand 21 is determined based on the distance ΔX in the X-axis direction between the two points and the amount of deviation ΔY in the Y-axis direction of the side edge position of the glass substrate 12 between the two points. It can be determined as described below.

  As described above, by arranging the optical measuring means 35 at the fixed position, a plurality of points on the glass substrate 12 can be measured by the set of optical measuring means 35 by using the forward / backward movement of the hand 21.

  In this case, if the parallel light of the optical measuring means 35 is not blocked at all by the glass substrate 12 at the first measurement point P1 or the second measurement point P2, or if it is completely blocked by the glass substrate 12, the Y of the glass substrate 12 is Since the glass substrate 12 exists at a position where the axial displacement amount ΔY cannot be calculated, it is treated as abnormal.

  Next, based on the flowchart of FIG. 5, the operation | movement which correct | amends the position shift of the glass substrate 12 on the hand 21 is demonstrated.

  As shown in FIG. 4, the hand 21 holds the glass substrate 12 taken out from a manufacturing process apparatus (not shown), and moves forward and backward in the X-axis direction toward a storage shelf in which the magazine 11 is defined. Since the forward / backward movement amount of the hand 21 is detected by the encoder 25, the optical measurement is performed at the first measurement point P1 and the second measurement point P2 that is separated from the first measurement point P1 by a certain amount (ΔX) in the X-axis direction. Measurement signals S1 and S2 of the measuring means 35 are taken in and stored in a predetermined storage area of the robot controller 24, respectively. Based on the measurement signals S1 and S2 of the optical measuring means 35, the side edge position of the glass substrate 12 on the hand 21 can be measured. When the hand 21 arrives at the second measurement position P2, the forward / backward movement of the hand 21 is temporarily stopped, and it is necessary to correct the positional deviation of the glass substrate 12 on the hand 21 as described below. Is judged.

  That is, first, in step 101 of FIG. 5, the measurement signals S1 and S2 of the optical measurement means 35 at the first and second measurement points P1 and P2 measured as described above are read. Subsequently, in step 103, it is determined whether or not the value of the measurement signal S1 is within a predetermined range that is larger than the set value A and smaller than the set value B. Similarly, in step 105, it is determined whether or not the value of the measurement signal S2 is within a predetermined range that is greater than the set value A and less than the set value B. Here, for example, the set value A is set to the minimum value that can be measured by the optical measuring means 35, and the set value B is set to the maximum value. In at least one of the above-described steps 103 and 105, when it is determined that the values of the measurement signals S1 and S2 are not within the predetermined range (the determination result is “N”), the parallel light from the optical measurement unit 35 is transmitted by the glass substrate 12. In such a case, the glass substrate 12 is present at a position where the amount of deviation ΔY in the Y-axis direction of the glass substrate 12 cannot be calculated. Therefore, the process proceeds to step 107, an abnormal signal is output, and the correction operation is terminated.

  However, since the amount of positional deviation of the side edge position of the glass substrate 12 on the hand 21 is usually limited to a range that blocks a part of the parallel light of the optical measuring means 35, the steps 103 and 105 are usually performed. When the condition is satisfied (the determination result is “Y”), the routine proceeds to step 109.

  In step 109, positions Y1 and Y2 in the Y-axis direction of the side edges of the glass substrate 12 at the first and second measurement points P1 and P2 are obtained based on the measurement signals S1 and S2, respectively. A displacement amount ΔY (ΔY = Y1−Y2) in the Y-axis direction between the positions Y1 and Y2 is obtained. Next, at step 111, the tilt angle θ of the glass substrate 12 on the hand 21 is calculated based on the following equation.

  θ = tan (ΔX / ΔY)

  That is, while the hand 21 moves from the first measurement point P1 to the second measurement point P2 by the set amount ΔX (ΔX = P1-P2), the shift amount ΔY in the Y-axis direction of the side edge position of the glass substrate 12 The tilt angle θ of the glass substrate 12 on the hand 21 is calculated. In this case, it can be determined in which direction the glass substrate 12 is inclined depending on whether the amount of deviation ΔY in the Y-axis direction takes a positive value or a negative value. The above-described step 111 constitutes the tilt amount calculating means in claim 1.

  In the following step 113, it is determined whether or not the inclination angle θ is smaller than the allowable value C. If it is determined that the inclination angle θ is smaller than the allowable value C (the determination result is “Y”), the inclination correction is performed. Since there is no need, it transfers to step 115. On the other hand, when it is determined in step 113 that the tilt angle θ is larger than the allowable value C (the determination result is “N”), the process proceeds to step 117 and a position correction cycle described later is executed. Here, the allowable value C is set to a minute angle at which the glass substrate 12 does not contact the storage shelf of the magazine 11.

  In step 115, it is determined whether or not the position Y1 (Y2) in the Y-axis direction obtained in step 109 is smaller than the allowable value D, and it is determined that it is smaller than the allowable value D (the determination result is “Y”). In that case, it is determined that there is no need to correct the position of the glass substrate 12, and the routine proceeds to step 119. In step 119, the advance of the hand 21 is commanded, and the hand 21 is advanced from the second measurement point P2 toward the magazine 11 to the advance end position. Here, the allowable value D is set to a minute amount that the glass substrate 12 does not contact the storage shelf of the magazine 11.

  In this manner, the glass substrate 12 is stored in a predetermined storage shelf of the magazine 11 by the advance of the hand 21. However, the glass substrate 12 is stored in the tilt angle θ of the glass substrate 12 on the hand 21. In addition, since the deviation amount ΔY in the Y-axis direction is also performed under the condition that it is within the allowable error range, the edge portion of the glass substrate 12 can be performed without contacting the storage shelf of the magazine 11, and the glass substrate 12 It is possible to reliably prevent the glass substrate 12 from being damaged by the edge portion coming into contact with the storage shelf of the magazine 11. On the other hand, if it is determined in step 115 that the position Y1 (Y2) in the Y-axis direction is larger than the allowable value D (the determination result is “N”), the process proceeds to step 117 and a position correction cycle described later is performed. Executed.

  One function of the position correction cycle is an operation of turning the turning shaft 18 of the robot 10 by the turning means by the inclination angle θ calculated in the step 111 to correct the angular posture of the glass substrate 12 on the hand 21. Consists of. As a result, the glass substrate 12 is corrected to an angular posture in which the side edge is parallel to the X-axis direction, as indicated by a two-dot chain line III in FIG. However, with the turning of the turning shaft 18, the glass substrate 12 is shifted by Y0 in the Y-axis direction with respect to the normal position in the Y-axis direction. Therefore, another function of the position correction cycle is to drive the Y-axis servo motor 15 of the transfer robot 10 by an amount (Y0) in which the glass substrate 12 is displaced in the Y-axis direction as the turning shaft 18 turns. Then, the swivel base 18 is corrected and moved in the Y axis direction, and the center of the glass substrate 12 in the Y axis direction is centered so as to coincide with the center of the storage shelf of the magazine 11. As a result, the glass substrate 12 on the hand 21 is positioned at the normal angular position indicated by the solid line B in FIG. 4 and the center in the Y-axis direction. The step 117 described above constitutes the inclination correcting means in claim 1.

  In this way, when the position correction cycle is completed, the routine proceeds to step 119, where the advance of the hand 21 is commanded as described above. Also in this case, since the glass substrate 12 is corrected for the inclination angle θ and the like, it is smoothly stored in a predetermined storage shelf without contacting the magazine 11.

  In the above-described positional deviation correction operation of the glass substrate 12, the turning shaft 18 is turned in a state where the hand 21 is positioned at the second measurement point P <b> 2, so that the glass substrate 12 held on the hand 21 is rotated. The turning radius increases, and the amount of movement in the Y-axis direction increases with turning. Therefore, prior to turning the turning shaft 18 by the tilt angle θ, the hand 21 is once returned to the retracted end position P0 in the X-axis direction, and the hand 21 is turned by the tilt angle θ as described above at the retracted end position P0. By doing so, as indicated by a two-dot chain line IV in FIG. 4, the amount of movement of the glass substrate 12 in the Y-axis direction accompanying the turning of the hand 21 can be reduced as much as possible. As a result, the operation of centering the glass substrate 12 in the Y-axis direction after turning the hand 21 can be made unnecessary. Thereafter, the hand 21 is advanced from the retracted end position in the X-axis direction to the advanced end position, and the glass substrate 12 is stored in the storage shelf of the magazine 11.

  FIG. 6 is a flow chart showing another embodiment of the present invention. The difference from the flow chart of FIG. 5 is that when the glass substrate 12 on the hand 21 is tilted beyond an allowable error, there is some abnormality. As a matter of occurrence, the further forward / backward movement of the hand 21 is stopped to notify the operator of the abnormal state.

  That is, as described above, when it is determined in step 113 that the inclination angle θ is larger than the allowable value C, or in step 115, the position Y1 (Y2) in the Y-axis direction is larger than the allowable value D. If it is determined, the position correction cycle is not immediately executed, and further advance / retreat movement of the hand 21 is stopped in step 121, and the operator is notified of the abnormal state in step 123. Since the other points are the same as those in the above embodiment, the description will be omitted, and common parts will be given the same reference numerals.

  According to this embodiment, when the glass substrate 12 is tilted and held on the hand 21, the storage in the magazine 11 is stopped, so that the glass is similar to the above-described embodiment. Not only can the substrate 12 come into contact with the magazine 11 reliably, but it is possible to prompt the investigation of the cause of the glass substrate 12 being tilted and held on the hand 21 by notifying the operator of the abnormal state. Become. Accordingly, it is possible to take appropriate measures such as reducing the turning speed of the turning shaft 18. Note that the step 121 described above constitutes the advancing / retreating movement stopping means in claim 4.

  In the above-described embodiment, the example in which the optical measuring unit 35 is configured by laser light having parallel light has been described. However, the optical measuring unit 35 may be any device that can measure the positional deviation of the glass substrate 12 on the hand 21. Of course, the configuration is not particularly limited. For example, a large number of spot-shaped laser beams are irradiated in a direction orthogonal to the advancing / retreating movement direction of the hand 21, and these laser beams are arranged in the same direction. A method of detecting with a large number of CCD cameras can also be adopted.

  Further, in the above-described embodiment, the first measurement point P1 and the second measurement point P2 for measuring the side edge position of the glass substrate 12 by the optical measurement means 35 are determined while the hand 21 is moving forward in the X-axis direction. In the first measurement point P1, the original position P0 where the hand 21 is turned to the angle facing the magazine 11 is defined as the first measurement point P1, and the position advanced by the set amount ΔX is the first measurement point P1. Two measurement points P2 may be used.

  Furthermore, in the above-described embodiment, the side edge position of the glass substrate 12 is measured at two points of the first and second measurement points separated by the set amount ΔX in the X-axis direction, and the tilt angle of the glass substrate 12 is measured. Although an example in which θ is obtained has been described, the measurement at two points is not necessarily limited, and the side edge position of the glass substrate 12 is measured from data of a large number of points through which the glass substrate 12 passes, The tilt angle θ can also be obtained.

It is a schematic diagram which shows the whole glass substrate storage apparatus using the robot for conveyance which shows embodiment of this invention. It is a top view of the hand seen from the A direction of FIG. It is a block diagram which shows the control apparatus of the robot for conveyance. It is a figure for demonstrating the method of measuring the position shift of a glass substrate. It is a flowchart which shows the operation | movement which correct | amends the position shift of a glass substrate. It is a flowchart which shows another operation | movement which correct | amends the position shift of a glass substrate.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Transfer robot, 11 ... Magazine, 12 ... Glass substrate, 18 ... Turning axis, 21 ... Hand, 32 ... Adsorption holding means, 35 ... Optical measurement means, P1, P2 ... Measurement point, S1, S2 ... Measurement signal, θ: Tilt angle.

Claims (4)

The glass substrate is stored in the magazine by a transfer robot having a hand that holds the glass substrate and can move forward and backward with respect to the magazine, an advancing / retracting means for moving the hand back and forth, and a turning means for turning the hand. In such a glass substrate storage device, optical measuring means for measuring the position of the glass substrate on the hand is disposed at a fixed position in the middle of the hand moving forward and backward with respect to the magazine, and the hand moves forward and backward by a predetermined distance. An inclination amount calculating means for calculating the inclination amount of the glass substrate on the hand based on the measurement signal of the optical measuring means when moved is provided, and the inclination of the glass substrate is determined based on the calculation result by the inclination amount calculating means. A glass substrate storage device comprising an inclination correcting means for controlling the turning means so as to correct. 2. The optical measurement means according to claim 1, wherein the optical measuring means is configured to have parallel light in a direction orthogonal to the advancing / retreating movement direction of the hand, and a part of the parallel light is formed by a side edge of the glass substrate on the hand. A glass substrate storage device that measures a position of a side edge of a glass substrate based on being blocked. 2. The glass substrate storage device according to claim 1, wherein the hand includes suction holding means for sucking and holding the glass substrate. The glass substrate is stored in the magazine by a transfer robot having a hand that holds the glass substrate and can move forward and backward with respect to the magazine, an advancing / retracting means for moving the hand back and forth, and a turning means for turning the hand. In the glass substrate storage apparatus configured as described above, an optical measuring means for measuring the position of the glass substrate on the hand is disposed at a fixed position in the middle of the hand moving forward and backward with respect to the magazine. A glass substrate storage device comprising an advancing / retreating stopping means for stopping advancing / retreating movement of the hand thereafter when it is determined by measurement that the position of the glass substrate on the hand interferes with the magazine.

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