JP2006080550A5 - - Google Patents

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Publication number
JP2006080550A5
JP2006080550A5 JP2005303795A JP2005303795A JP2006080550A5 JP 2006080550 A5 JP2006080550 A5 JP 2006080550A5 JP 2005303795 A JP2005303795 A JP 2005303795A JP 2005303795 A JP2005303795 A JP 2005303795A JP 2006080550 A5 JP2006080550 A5 JP 2006080550A5
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JP
Japan
Prior art keywords
processing chamber
vacuum processing
shower plate
region
gas supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005303795A
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English (en)
Japanese (ja)
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JP2006080550A (ja
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Publication date
Application filed filed Critical
Priority to JP2005303795A priority Critical patent/JP2006080550A/ja
Priority claimed from JP2005303795A external-priority patent/JP2006080550A/ja
Publication of JP2006080550A publication Critical patent/JP2006080550A/ja
Publication of JP2006080550A5 publication Critical patent/JP2006080550A5/ja
Pending legal-status Critical Current

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JP2005303795A 2005-10-19 2005-10-19 プラズマ処理装置 Pending JP2006080550A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005303795A JP2006080550A (ja) 2005-10-19 2005-10-19 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005303795A JP2006080550A (ja) 2005-10-19 2005-10-19 プラズマ処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001361897A Division JP3757159B2 (ja) 2001-11-28 2001-11-28 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JP2006080550A JP2006080550A (ja) 2006-03-23
JP2006080550A5 true JP2006080550A5 (https=) 2006-06-15

Family

ID=36159697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005303795A Pending JP2006080550A (ja) 2005-10-19 2005-10-19 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP2006080550A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7450475B2 (ja) * 2020-06-30 2024-03-15 東京エレクトロン株式会社 プラズマ処理装置

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