JP2006077041A - Azeotrope-like composition - Google Patents

Azeotrope-like composition Download PDF

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JP2006077041A
JP2006077041A JP2004259294A JP2004259294A JP2006077041A JP 2006077041 A JP2006077041 A JP 2006077041A JP 2004259294 A JP2004259294 A JP 2004259294A JP 2004259294 A JP2004259294 A JP 2004259294A JP 2006077041 A JP2006077041 A JP 2006077041A
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azeotrope
composition
weight
ether
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JP4578186B2 (en
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Michinori Yokozawa
道則 横澤
Hideaki Kikuchi
秀明 菊地
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Chemours Mitsui Fluoroproducts Co Ltd
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Du Pont Mitsui Fluorochemicals Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a new azeotropic composition exhibiting an azeotropic property or behavior (an azeotrope-like property) close to the azeotrope and capable of replacing a cleaning agent suitably used for degreasing of grease, processed oil, etc., used for metal components as processing or rust prevention and removal of flux in production of a semiconductor and further, other applications such as a foaming agent, a working medium, a dispersing agent and an electrical insulating agent by using, as a base, a hydrofluoro ether free from fear disrupting an ozone layer and not containing chlorine. <P>SOLUTION: The azeotrope-like composition is composed of at least one hydrofluoro ether selected from a nonafluorobutyl ethyl ether and 1,2,2,2-tetrafluoroethyl 2,2,2-trifluoromethyl ether, and a fluorinated alcohol. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、高度にフッ素化されたハイドロフルオロエ−テルをベ−スとする共沸乃至それに近い挙動を示す新規な組成物に関するものである。更に詳しくは、加工や錆止めとして金属部品に使用されているグリ−スや加工油等の脱脂及び半導体製造時のフラックス除去のために好適に使用される洗浄剤のほか、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途を代替することが可能な新規な共沸様組成物に関する。   The present invention relates to a novel composition exhibiting azeotropic or close behavior based on a highly fluorinated hydrofluoroether. More specifically, in addition to cleaning agents suitably used for degreasing grease and processing oil used for metal parts as processing and rust prevention and flux removal during semiconductor manufacturing, foaming agents, working media, The present invention relates to a novel azeotrope-like composition capable of replacing applications such as a dispersant and an electrical insulating agent.

クロロフルオロカ−ボンは毒性が少なく難燃性で、化学的、熱的に安定なものが多いため、溶剤、発泡剤、冷媒等に広く使用され、フラックスや加工油等の洗浄には、クロロフルオロカ−ボン系溶剤である1,1,2−トリクロロ−1,2,2−トリフルオロエタン(CFC−113,沸点約48度)、或いは塩素系溶剤である1,1,1−トリクロロエタン等が使用されて来た。   Chlorofluorocarbons are less toxic and flame retardant, and many are chemically and thermally stable. Therefore, they are widely used in solvents, foaming agents, refrigerants, etc. 1,1,2-trichloro-1,2,2-trifluoroethane (CFC-113, boiling point of about 48 degrees), which is a fluorocarbon solvent, or 1,1,1-trichloroethane, which is a chlorine solvent Has been used.

しかし、オゾン層保護の観点からウイ−ン条約(1985年)やモントリオ−ル議定書(1987年)に基づき、わが国でもCFC−11(トリクロロフルオロメタン)、CFC−12(ジクロロジフルオロメタン)、CFC−113、CFC−114(1,2−ジクロロテトラフルオロエタン)、CFC−115(クロロペンタフルオロエタン)などのクロロフルオロカ−ボンについては、1995年までに生産が事実上停止された。また、塩素系溶剤については、衛生や環境面の影響が懸念されている。   However, from the viewpoint of protecting the ozone layer, CFC-11 (trichlorofluoromethane), CFC-12 (dichlorodifluoromethane), CFC- in Japan are also based on the Vienna Convention (1985) and the Montreal Protocol (1987). Production of chlorofluorocarbons such as 113, CFC-114 (1,2-dichlorotetrafluoroethane), and CFC-115 (chloropentafluoroethane) was virtually stopped by 1995. In addition, regarding chlorinated solvents, there are concerns about the impact on hygiene and the environment.

それに代る低沸点溶剤として、パーフルオロブチルメチルエーテルが知られているが、パーフルオロブチルメチルエーテルは、油やフラックス等の汚れに対して洗浄性能が低く、使用できる分野が限られている。   Perfluorobutyl methyl ether is known as an alternative low-boiling solvent, but perfluorobutyl methyl ether has a low cleaning performance against dirt such as oil and flux, and the fields where it can be used are limited.

そのため、パーフルオロブチルメチルエーテルの洗浄性能を改善する試みが行われてきた。例えば、特開2000−143568号公報にはパーフルオロブチルメチルエーテル、含臭素炭化水素及び低級アルコールよりなる共沸様組成物が提案されている。さらに、特表平10−510579号公報には、ペルフルオロブチルメチルエーテルと、ケトン、アルコール、環状アルカン、塩素化アルカン、一部フッ素化アルコール、HCFCなどの有機溶剤との組成物が提案されている。   Therefore, attempts have been made to improve the cleaning performance of perfluorobutyl methyl ether. For example, JP 2000-143568 A proposes an azeotrope-like composition comprising perfluorobutyl methyl ether, a bromine-containing hydrocarbon and a lower alcohol. Further, JP-A-10-510579 proposes a composition of perfluorobutyl methyl ether and an organic solvent such as ketone, alcohol, cyclic alkane, chlorinated alkane, partially fluorinated alcohol, or HCFC. .

本発明者らは、従来公知の組成物とは異なり、洗浄使用工程において蒸留操作があっても組成変化が少なく組成物の特性を維持することができ、且つ回収や再利用に好都合な共沸乃至それに近い挙動(共沸様)を示す、オゾン層を破壊する恐れが無く、塩素を含まない新規な組成物を鋭意研究した結果、本発明に到達した。
特開2000−143568号公報 特表平10−510579号公報
Unlike the conventionally known compositions, the present inventors can maintain the properties of the composition with little composition change even if there is a distillation operation in the washing and use process, and are azeotropic for convenient recovery and reuse. As a result of diligent research on a novel composition that does not contain the ozone layer and exhibits a behavior close to that (azeotrope-like) and does not contain chlorine, the present invention has been achieved.
JP 2000-143568 A Japanese National Patent Publication No. 10-510579

本発明は、オゾン層を破壊する恐れが無く、塩素を含まないハイドロフルオロエ−テルをベ−スとして、加工や錆止めとして金属部品に使用されているグリ−スや加工油等の脱脂及び半導体製造時のフラックス除去のために好適に使用される洗浄剤ほか、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途を代替することが可能な共沸乃至それに近い挙動(共沸様)を示す新規な組成物を提供する。   The present invention is based on a hydrofluoroether containing no chlorine, which has no fear of destroying the ozone layer, and is used for degreasing and semiconductors such as grease and processing oil used for metal parts as processing and rust prevention. Azeotropic or similar behavior (azeotrope-like) that can replace applications such as detergents, foaming agents, working media, dispersants, electrical insulation, etc., as well as cleaning agents that are used favorably for flux removal during manufacturing A novel composition is provided.

本発明は、ノナフルオロブチルエチルエ−テル及び1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエ−テルから選ばれる少なくとも1つのハイドロフルオロエ−テルとフッ素化アルコ−ルからなる共沸様組成物を提供する。   The present invention relates to fluorination with at least one hydrofluoroether selected from nonafluorobutylethyl ether and 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl ether. An azeotrope-like composition comprising alcohol is provided.

フッ素化アルコ−ルが、2,2,3,3−テトラフルオロプロパノ−ル、2,2,3,3,3−ペンタフルオロプロパノ−ルから選ばれる少なくとも1つである共沸様組成物は本発明の好ましい態様である。   An azeotrope-like composition in which the fluorinated alcohol is at least one selected from 2,2,3,3-tetrafluoropropanol and 2,2,3,3,3-pentafluoropropanol The product is a preferred embodiment of the present invention.

70から99重量%のノナフルオロブチルエチルエ−テル、及び30から1重量%の2,2,3,3−テトラフルオロプロパノ−ルからなる共沸様組成物は本発明の好ましい態様である。   An azeotrope-like composition comprising 70 to 99% by weight of nonafluorobutyl ethyl ether and 30 to 1% by weight of 2,2,3,3-tetrafluoropropanol is a preferred embodiment of the present invention. .

50から99重量%のノナフルオロブチルエチルエ−テル、及び50〜1重量%の2,2,3,3,3−ペンタフルオロプロパノ−ルからなる請求項1〜3記載の共沸様組成物は本発明の好ましい態様である。   4. An azeotrope-like composition according to claim 1 comprising 50 to 99% by weight of nonafluorobutyl ethyl ether and 50 to 1% by weight of 2,2,3,3,3-pentafluoropropanol. The product is a preferred embodiment of the present invention.

80〜99.5重量%の1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエ−テル、及び20〜0.5重量%の2,2,3,3,3−ペンタフルオロプロパノ−ルからなる共沸様組成物は本発明の好ましい態様である。   80-99.5 wt% 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl ether, and 20-0.5 wt% 2,2,3,3 An azeotrope-like composition comprising 3-pentafluoropropanol is a preferred embodiment of the present invention.

本発明によれば、オゾン層を破壊する恐れが無く、塩素を含まないハイドロフルオロエ−テルをベ−スとして、共沸乃至それに近い挙動を示す新規な組成物が提供される。
本発明によれば、本発明は共沸乃至それに近い挙動を示す組成であるため、使用工程において蒸留操作があっても成分の組成変化が少なく、該組成物の特性を維持することができ、組成物の回収や再利用に好都合な組成物が提供される。
本発明によれば、炭化水素系油等の溶解性がハイドロフルオロエ−テル単独の場合よりも向上した組成物が提供される。
According to the present invention, there is provided a novel composition which has no fear of destroying the ozone layer and exhibits azeotropic or similar behavior based on a hydrofluoroether containing no chlorine.
According to the present invention, since the present invention is a composition exhibiting azeotropic or similar behavior, there is little change in composition of components even if there is a distillation operation in the use process, and the characteristics of the composition can be maintained. A composition is provided that is convenient for recovery and reuse of the composition.
According to the present invention, a composition in which the solubility of a hydrocarbon-based oil or the like is improved as compared with the case of hydrofluoroether alone is provided.

本発明は、ノナフルオロブチルエチルエ−テル、及び1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエ−テルから選ばれる少なくとも1つのハイドロフルオロエ−テルとフッ素化アルコ−ルからなる共沸様組成物を提供する。
まず、本発明のハイドロフルオロエ−テルについて説明する。
The present invention relates to at least one hydrofluoroether selected from nonafluorobutylethyl ether and 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl ether and fluorine. An azeotrope-like composition comprising a modified alcohol is provided.
First, the hydrofluoroether of the present invention will be described.

本発明のハイドロフルオロエ−テルは、ノナフルオロブチルエチルエ−テル(以下、HFE−569sfということがある)及び1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエ−テル(以下、HFE347pc−fということがある)から選ばれる少なくとも1種である。   The hydrofluoroether of the present invention includes nonafluorobutylethyl ether (hereinafter sometimes referred to as HFE-569sf) and 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl. It is at least one selected from ether (hereinafter sometimes referred to as HFE347pc-f).

本発明のフッ素化プロパノ−ルとしては、炭素数2〜4、好ましくは2〜3のフッ素化アルコールを挙げることができる。好ましい具体例としては、トリフルオロエタノール、テトラフルオロプロパノール、ペンタフルオロプロパノール、ヘキサフルオロプロパノールなどを挙げることができる。中でも、特に好ましいのは、2,2,3,3−テトラフルオロプロパノ−ル(以下、TFPということがある)、2,2,3,3,3−ペンタフルオロプロパノ−ル(以下、PFPということがある)である。またそれらを混合して使用してもよい。   Examples of the fluorinated phenol of the present invention include fluorinated alcohols having 2 to 4 carbon atoms, preferably 2 to 3 carbon atoms. Preferable specific examples include trifluoroethanol, tetrafluoropropanol, pentafluoropropanol, hexafluoropropanol and the like. Among these, 2,2,3,3-tetrafluoropropanol (hereinafter sometimes referred to as TFP), 2,2,3,3,3-pentafluoropropanol (hereinafter referred to as TFP) are particularly preferable. It may be called PFP). Moreover, you may mix and use them.

本発明の共沸様組成物は、ノナフルオロブチルエチルエ−テル、及び1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエ−テルから選ばれる少なくとも1つのハイドロフルオロエ−テルとフッ素化アルコ−ルからなる。好ましい共沸様組成物として、HFE−569sfとTFPからなる共沸様組成物、HFE−569sfとPFPからなる共沸様組成物、HFE−347pc−fとPFPからなる共沸様組成物を挙げることができる。   The azeotrope-like composition of the present invention comprises at least one hydrofluoric ether selected from nonafluorobutyl ethyl ether and 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl ether. It consists of fluoroether and fluorinated alcohol. Preferred azeotrope-like compositions include azeotrope-like compositions composed of HFE-569sf and TFP, azeotrope-like compositions composed of HFE-569sf and PFP, and azeotrope-like compositions composed of HFE-347pc-f and PFP. be able to.

これらの共沸様組成物の好ましい組成としては、70〜99重量%のHFE−569sfと20〜0.5重量%のTFPからなる共沸様組成物、50〜99重量%のHFE−569sfと50〜0.5重量%のPFPからなる共沸様組成物、70〜99重量%のHFE−347pc−fと20〜0.5重量%のPFPからなる共沸様組成物を挙げることができる。   Preferred compositions of these azeotrope-like compositions include azeotrope-like compositions consisting of 70-99 wt% HFE-569sf and 20-0.5 wt% TFP, 50-99 wt% HFE-569sf, An azeotrope-like composition comprising 50 to 0.5% by weight of PFP, and an azeotrope-like composition comprising 70 to 99% by weight of HFE-347pc-f and 20 to 0.5% by weight of PFP can be mentioned. .

本発明において、共沸様組成物とは、共沸乃至それに近い挙動(共沸様)を示す組成物をいう。本発明の共沸様組成物においては、使用工程において蒸留操作があっても成分の組成変化が少なく共沸様組成物の特性を維持することができるため、組成物の回収や再利用に好都合である。
また、炭化水素系油等の溶解性をハイドロフルオロエ−テル単独の場合よりも向上させることができる。
In the present invention, the azeotrope-like composition refers to a composition that exhibits azeotropy or behavior close to it (azeotrope-like). In the azeotrope-like composition of the present invention, even if there is a distillation operation in the use process, the composition change of the components is small and the characteristics of the azeotrope-like composition can be maintained, which is convenient for the recovery and reuse of the composition. It is.
In addition, the solubility of hydrocarbon oil and the like can be improved as compared with the case of hydrofluoroether alone.

本発明で特に好ましい共沸様組成物として、90.5重量%のHFE−569sfと9.5重量%のTFPからなる共沸様組成物、74.5重量%のHFE−569sfと25.5重量%のPFPからなる共沸様組成物および97重量%のHFE−347pc−fと3重量%のPFPからなる共沸様組成物を挙げることができる。   Particularly preferred azeotrope-like compositions in the present invention are azeotrope-like compositions comprising 90.5% by weight HFE-569sf and 9.5% by weight TFP, 74.5% by weight HFE-569sf and 25.5%. Mention may be made of an azeotrope-like composition consisting of wt% PFP and an azeotrope-like composition consisting of 97 wt% HFE-347pc-f and 3 wt% PFP.

本発明の共沸様組成物は、必要に応じて安定化剤を含んでいてもよい。安定化剤としては、ニトロアルカン類、エポキシド類、フラン類、ベンゾトリアゾール類、フェノール類、アミン類、ホスフェイト類から選ばれる少なくとも1種を含むことができる。安定化剤としては、従来クロロフルオロカーボン類に用いられてきたものから、適宜選択して用いることができる。これらの安定化剤の配合量は、共沸様組成物に対して0.01〜5重量%、好ましくは0.05〜0.5重量%であることが望ましい。   The azeotrope-like composition of this invention may contain the stabilizer as needed. The stabilizer can include at least one selected from nitroalkanes, epoxides, furans, benzotriazoles, phenols, amines, and phosphates. As the stabilizer, those conventionally used for chlorofluorocarbons can be appropriately selected and used. The amount of these stabilizers to be blended is 0.01 to 5% by weight, preferably 0.05 to 0.5% by weight, based on the azeotrope-like composition.

さらに、本発明の共沸様組成物は、本発明の特徴を損なわない範囲で、必要に応じて、アルコール類、ケトン類、エーテル類、エステル類、炭化水素類、アミン類、グリコールエーテル類、シロキサン類などの他の成分を含むことができる。   Furthermore, the azeotrope-like composition of the present invention is an alcohol, a ketone, an ether, an ester, a hydrocarbon, an amine, a glycol ether, Other components such as siloxanes can be included.

本発明の共沸様組成物は、洗浄剤、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途に用いることができる。
洗浄剤用途としては、金属部品、プラスチック部品、ゴム製品、ガラス製品、及びこれらを組み合わせた精密機械部品、電子部品の、微粒子や油脂などの汚染物除去用洗浄剤として、或いはドライクリーニング用洗浄剤として用いることができる。洗浄剤として用いる場合、常温洗浄法での拭い落とし、浸漬、はけ洗い、フラッシュ、スプレー、超音波洗浄、或いは、加熱洗浄法での沸騰状態での浸漬、蒸気すすぎ、蒸気洗浄等が適用でき、これらを適宜組み合わせることにより更に効果的に洗浄することができる。
分散剤用途としては、潤滑剤、撥水撥油剤、防錆剤、及び金属部品や、プラスチック部品、ガラス部品等に塗料等を均一に塗布するための媒体として、効果的に用いることができる。
The azeotrope-like composition of this invention can be used for uses, such as a cleaning agent, a foaming agent, a working medium, a dispersing agent, and an electrical insulation agent.
As cleaning agents, metal parts, plastic parts, rubber products, glass products, precision machine parts combining these, and electronic parts as cleaning agents for removing contaminants such as fine particles and oils and fats, or dry cleaning agents Can be used as When used as a cleaning agent, wiping off, dipping, brushing, flushing, spraying, ultrasonic cleaning, or immersion in boiling state, steam rinsing, steam cleaning, etc. can be applied. Further, these can be washed more effectively by appropriately combining them.
As a dispersant, it can be effectively used as a medium for uniformly applying a coating material to a lubricant, a water / oil repellent, a rust preventive, a metal part, a plastic part, a glass part or the like.

次に実施例及び比較例を示して、本発明をより具体的に説明するが、本発明はこれらの例によって何ら制限されるものではない。   EXAMPLES Next, although an Example and a comparative example are shown and this invention is demonstrated more concretely, this invention is not restrict | limited at all by these examples.

(実施例 1)
HFE−569sf(沸点76.9℃(測定値))約200gをフラスコ(300ml)に入れ沸騰させた。その中に任意の量のTFP(沸点約110℃(測定値))を添加していき、液相の温度変化を調べた。その結果、当初76.9℃であった沸点が74.7℃まで低下した。このときの液相及びガス相の組成をガスクロマトグラフ(島津製作所製GC−14A)により分析したところ、HFE−569sfが90.5重量%、TFPが9.5重量%であった。
本実施例から、90.5重量%のHFE−569sf及び9.5重量%のTFPからなる組成物は、沸点が74.7℃に低下し気相と液相の組成がほぼ同一となり、共沸様組成物となっていることがわかる。
(Example 1)
About 200 g of HFE-569sf (boiling point 76.9 ° C. (measured value)) was placed in a flask (300 ml) and boiled. An arbitrary amount of TFP (boiling point: about 110 ° C. (measured value)) was added thereto, and the temperature change of the liquid phase was examined. As a result, the boiling point, which was originally 76.9 ° C., decreased to 74.7 ° C. When the composition of the liquid phase and the gas phase at this time was analyzed by a gas chromatograph (GC-14A, manufactured by Shimadzu Corporation), HFE-569sf was 90.5% by weight and TFP was 9.5% by weight.
From this example, the composition consisting of 90.5 wt% HFE-569sf and 9.5 wt% TFP has a boiling point of 74.7 ° C. and the composition of the gas phase and the liquid phase is almost the same, It turns out that it is a boiling-like composition.

(実施例 2)
HFE−569sf(沸点76.7℃(測定値))約100gをフラスコ(300ml)に入れ沸騰させた。その中に任意の量のPFP(沸点約81.0℃(測定値))を添加していき、液相の温度変化を調べた。その結果、当初76.7℃であった沸点が69.0℃まで低下した。このときの液相及び及びガス相の組成をガスクロマトグラフ(島津製作所製GC−14A)により分析したところ、HFE−569sfが74.5重量%、PFP濃度は25.5重量%であった。
本実施例から、74.5重量%のHFE−569sf及び25.5重量%のPFPからなる本発明の組成物は、沸点が69.0℃に低下し気相と液相の組成がほぼ同一となり、共沸様組成物となっていることがわかる。
(Example 2)
About 100 g of HFE-569sf (boiling point 76.7 ° C. (measured value)) was placed in a flask (300 ml) and boiled. An arbitrary amount of PFP (boiling point: about 81.0 ° C. (measured value)) was added thereto, and the temperature change of the liquid phase was examined. As a result, the boiling point, which was initially 76.7 ° C., decreased to 69.0 ° C. When the composition of the liquid phase and the gas phase at this time was analyzed by a gas chromatograph (GC-14A manufactured by Shimadzu Corporation), HFE-569sf was 74.5% by weight and the PFP concentration was 25.5% by weight.
From this example, the composition of the present invention consisting of 74.5% by weight of HFE-569sf and 25.5% by weight of PFP has a boiling point lowered to 69.0 ° C. and the composition of the gas phase and the liquid phase is almost the same. It can be seen that the composition is an azeotropic-like composition.

(実施例 3)
HFE−347pc−f(沸点57.2℃(測定値))約100gをフラスコ(300ml)に入れ沸騰させた。その中に任意の量のPFP(沸点約81.0℃(測定値))を添加していき、液相の温度変化を調べた。その結果、当初57.2℃であった沸点が57.1℃まで低下した。このときの液相及び及びガス相の組成をガスクロマトグラフ(島津製作所製GC−14A)により分析したところ、HFE−347pc−fが97.0重量%、PFP濃度は3.0重量%であった。
本実施例から、97.0重量%のHFE−347pc−f及び3.0重量%のPFPからなる本発明の組成物は、沸点が57.1度に低下し気相と液相の組成がほぼ同一となり、共沸様組成物となっていることがわかる。
(Example 3)
About 100 g of HFE-347pc-f (boiling point 57.2 ° C. (measured value)) was placed in a flask (300 ml) and boiled. An arbitrary amount of PFP (boiling point: about 81.0 ° C. (measured value)) was added thereto, and the temperature change of the liquid phase was examined. As a result, the boiling point, which was 57.2 ° C. at the beginning, dropped to 57.1 ° C. When the composition of the liquid phase and the gas phase at this time was analyzed by a gas chromatograph (GC-14A, manufactured by Shimadzu Corporation), HFE-347pc-f was 97.0% by weight and the PFP concentration was 3.0% by weight. .
From this example, the composition of the present invention consisting of 97.0% by weight of HFE-347pc-f and 3.0% by weight of PFP has a boiling point lowered to 57.1 degrees and a composition of the gas phase and the liquid phase. It turns out that it becomes substantially the same and becomes an azeotrope-like composition.

(実施例 4)
90.5gのHFE−569sf及び9.5gのTFPをサンプル瓶(100ml)に採り室温で混合した。その中に0.4gの冷凍機油(スニソ3GS:日本サンオイル製)を入れ室温で振盪したところ、冷凍機油は均一に溶解した。
(Example 4)
90.5 g HFE-569sf and 9.5 g TFP were placed in a sample bottle (100 ml) and mixed at room temperature. 0.4 g of refrigerating machine oil (Sniso 3GS: manufactured by Nihon Sun Oil) was put in it and shaken at room temperature.

(比較例 1)
100gのHFE−569sfをサンプル瓶(100ml)に採り、その中に0.4gの冷凍機油(スニソ3GS:日本サンオイル製)を入れ室温で振盪したところ、静置後二層分離した。
実施例4及び比較例1から明らかなように、本発明の共沸様組成物の油脂に対する溶解性は、HFE−569sf単独の場合に比べ明らかに優れている。
(Comparative Example 1)
100 g of HFE-569sf was placed in a sample bottle (100 ml), 0.4 g of refrigerating machine oil (SUNISO 3GS: manufactured by Nihon Sun Oil) was placed therein and shaken at room temperature, and after standing, two layers were separated.
As is clear from Example 4 and Comparative Example 1, the solubility of the azeotrope-like composition of the present invention in fats and oils is clearly superior to that of HFE-569sf alone.

(実施例 5)
90.5重量%のHFE−569sfと9.5重量%のTFPからなる組成物の引火点を、JIS K−2265に従い測定したところ引火点はなかった。
本発明の共沸様組成物は、TFP単品の可燃性(引火点48℃)に対して、安全性の向上が認められた。
(Example 5)
When the flash point of a composition comprising 90.5% by weight of HFE-569sf and 9.5% by weight of TFP was measured according to JIS K-2265, there was no flash point.
In the azeotrope-like composition of the present invention, an improvement in safety was observed with respect to the flammability of the TFP alone (flash point 48 ° C.).

本発明により、高度にフッ素化された特定のハイドロフルオロエ−テルをベ−スとする、共使用工程において蒸留操作があっても成分の組成変化が少なく、該組成物の特性を維持することができ、組成物の回収や再利用に好都合な沸乃至それに近い挙動(共沸様)を示す新規な組成物を提供することができる。
また、本発明によれば、炭化水素系油等の溶解性がハイドロフルオロエ−テル単独の場合よりも向上した新規な共沸様組成物を提供することができる。
本発明により提供される新規な共沸様組成物は、クロロフロロカーボン、或いは塩素系溶剤の代替として、加工や錆止めとして金属部品に使用されているグリ−スや加工油等の脱脂及び半導体製造時のフラックス除去のために好適に使用される洗浄剤のほか、発泡剤、作動媒体、分散剤、電気絶縁剤等の用途に好適に用いることができる。
According to the present invention, based on a specific highly fluorinated hydrofluoroether, even if there is a distillation operation in the co-use process, there is little change in the composition of the components, and the characteristics of the composition are maintained. It is possible to provide a novel composition that exhibits boiling or a behavior close to that (azeotrope-like) that is convenient for recovery and reuse of the composition.
Moreover, according to this invention, the novel azeotrope-like composition which improved the solubility of hydrocarbon oil etc. compared with the case of a hydrofluoroether single can be provided.
The novel azeotrope-like composition provided by the present invention is used for degreasing grease and processing oil used in metal parts as processing and rust prevention as an alternative to chlorofluorocarbons or chlorinated solvents, and during semiconductor manufacturing. In addition to the cleaning agent suitably used for removing the flux, it can be suitably used for applications such as a foaming agent, a working medium, a dispersing agent, and an electrical insulating agent.

Claims (8)

ノナフルオロブチルエチルエ−テル及び1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエ−テルから選ばれる少なくとも1つのハイドロフルオロエーテルとフッ素化アルコールからなる共沸様組成物。   An azeotropic state consisting of at least one hydrofluoroether selected from nonafluorobutyl ethyl ether and 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl ether and a fluorinated alcohol Composition. フッ素化アルコールが、2,2,3,3−テトラフルオロプロパノールおよび2,2,3,3,3−ペンタフルオロプロパノールから選ばれる少なくとも1つである請求項1記載の共沸様組成物。   The azeotrope-like composition according to claim 1, wherein the fluorinated alcohol is at least one selected from 2,2,3,3-tetrafluoropropanol and 2,2,3,3,3-pentafluoropropanol. 70〜99重量%のノナフルオロブチルエチルエーテル、及び30〜1重量%の2,2,3,3−テトラフルオロプロパノールからなる請求項2に記載の共沸様組成物。   3. An azeotrope-like composition according to claim 2, comprising 70-99% by weight of nonafluorobutyl ethyl ether and 30-1% by weight of 2,2,3,3-tetrafluoropropanol. 90.5重量%のノナフルオロブチルエチルエーテル、及び9.5重量%の2,2,3,3−テトラフルオロプロパノールからなる請求項3記載の共沸様組成物。   4. An azeotrope-like composition according to claim 3, comprising 90.5% by weight of nonafluorobutyl ethyl ether and 9.5% by weight of 2,2,3,3-tetrafluoropropanol. 50〜99重量%のノナフルオロブチルエチルエーテル、及び50〜1重量%の2,2,3,3,3−ペンタフルオロプロパノールからなる請求項2に記載の共沸様組成物。   The azeotrope-like composition according to claim 2, comprising 50 to 99% by weight of nonafluorobutyl ethyl ether and 50 to 1% by weight of 2,2,3,3,3-pentafluoropropanol. 74.5重量%のノナフルオロブチルエチルエーテル、及び25.5重量%の2,2,3,3,3−ペンタフルオロプロパノールからなる請求項5に記載の共沸様組成物。   6. An azeotrope-like composition according to claim 5 consisting of 74.5% by weight nonafluorobutyl ethyl ether and 25.5% by weight 2,2,3,3,3-pentafluoropropanol. 80〜99.5重量%の1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエーテル、及び20〜0.5重量%の2,2,3,3,3−ペンタフルオロプロパノールからなる請求項2記載の共沸様組成物。   80-99.5 wt% 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl ether, and 20-0.5 wt% 2,2,3,3,3- The azeotrope-like composition according to claim 2, comprising pentafluoropropanol. 97重量%の1,2,2,2−テトラフルオロエチル−2,2,2−トリフルオロメチルエーテル、及び3重量%の2,2,3,3,3−ペンタフルオロプロパノールからなる請求項7に記載の共沸様組成物。   8. It consists of 97% by weight of 1,2,2,2-tetrafluoroethyl-2,2,2-trifluoromethyl ether and 3% by weight of 2,2,3,3,3-pentafluoropropanol. An azeotrope-like composition as described in 1.
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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04211500A (en) * 1990-02-28 1992-08-03 Daikin Ind Ltd Azeotropic solvent composition
JPH06211718A (en) * 1992-08-17 1994-08-02 Solvay Fluor & Derivate Gmbh Composition comprising 1-chloro-2,2,2-trifluoroethyl- difluoromethyl ether and partially fluorinated alkanol, cooling lubricant comprising same, surface cleaning and removal of water
JPH11505249A (en) * 1995-05-16 1999-05-18 ミネソタ マイニング アンド マニュファクチャリング カンパニー Azeotropic compositions and uses thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04211500A (en) * 1990-02-28 1992-08-03 Daikin Ind Ltd Azeotropic solvent composition
JPH06211718A (en) * 1992-08-17 1994-08-02 Solvay Fluor & Derivate Gmbh Composition comprising 1-chloro-2,2,2-trifluoroethyl- difluoromethyl ether and partially fluorinated alkanol, cooling lubricant comprising same, surface cleaning and removal of water
JPH11505249A (en) * 1995-05-16 1999-05-18 ミネソタ マイニング アンド マニュファクチャリング カンパニー Azeotropic compositions and uses thereof

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