JP2006073123A - Near-field light slider and near-field light recording/reproducing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a near-field light slider in which a reproduction bit rate of a near-field light memory is increased without requiring a complex means such as a scan system and a near-field light recording/reproducing apparatus using the near-field light slider. <P>SOLUTION: This near-field light slider is composed of a substrate 11 being optically flat, has a function in which surface plasmon or near-field light is generated at a plane being vertical when it is opposed to a recording medium surface of the substrate 11, and a parallel reproduction near-field light head constituted of metal fine particles column which are periodically arranged, propagating a wave motion excited by the surface plasmon or the near-field light, and dividing is formed. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a near-field light slider that uses a surface plasmon effect to generate near-field light with high efficiency, and a near-field optical recording / reproducing apparatus that performs optical recording with a large recording capacity using the near-field light slider. is there.

  In recent years, there has been a remarkable increase in capacity of information storage devices, and in the next 10 to 15 years, there is a possibility of realizing a storage capacity of about 1 TB on a disk with a diameter of 12 cm. In such a high-density information storage device, the amount of information that can be recorded is large, and at the same time, if the speed at which information is recorded and reproduced, that is, the so-called bit rate is not fast, the amount of information that can be recorded is large. In short, it's not practical. Therefore, the bit rate needs to be fast.

  One means for realizing such a large capacity storage device is an optical memory using near-field light. However, even in the conventionally proposed optical memory, there is a limit to increasing the bit rate because only one head emits near-field light during recording and reproduction.

  In order to solve this, the bit rate is obtained by scanning the laser beam, which is a near-field light source, one-dimensionally at a higher speed than the bit rate of a single head and performing recording and reproduction in a quasi-parallel manner. Has been proposed (see, for example, Patent Document 1).

The outline is shown in FIGS.
As shown in FIGS. 1 and 2, a protrusion formed of the same material as the substrate 2a formed of a high refractive index material, having a tapered tapered surface on the outer wall and an elongated light emitting portion 5a at the tip. A microlens 4a made of the same material as that of the substrate 2a is provided on the surface facing the portion 3a to prevent light incident on the microlens 4a from being reflected at the boundary between the microlens 4a and the substrate 2a. Is used effectively. The incident light is condensed on the light emitting portion 5a by the microlens 4a to realize a very small light spot on the light emitting portion.

  Further, as shown in FIG. 3, the laser light incident on the optical probe 1a is emitted from the apex of the protrusion 3a while periodically changing the direction in which the laser light is reflected by swinging the galvanometer mirror 13a. Scanning in the long side direction of the light emitting portion 5a toward the portion 5a. Tracking error detection and tracking actuation can be cited as one process when information is recorded on or reproduced from the recording medium 14a by the optical system 7a of the optical pickup. On the recording medium 14a, there is a land groove as a guide groove for guiding the track to each track except in the case of the ROM type incapable of writing. A so-called beam wobbling operation is performed by the galvanometer mirror 13a so that the position of the emitted light is swung with a width smaller than the track width. Then, the wobbling is performed from the timing at which the emitted light hits the land or groove of the recording medium 14a and the intensity of the reflected light that is reflected from the recording medium 14a at that time and incident on the PD 12a through the galvano mirror 13a, the beam splitter 10a, and the collimating lens 9b. The deviation between the center position of the outgoing light fluctuation width and the track center position can be detected, and so-called track error detection can be performed. Further, from this value, the galvano mirror 13a can be controlled by the control circuit from the PD 12a to the galvano mirror 13a so that the center position of the outgoing light fluctuation width coincides with the track center position.

  Further, when recording on or reproducing from the recording medium 14a, the direction in which the laser light is reflected is changed by swinging the galvano mirror 13a, and the light emitting portion 5a provided at the apex of the projection 3a of the optical probe 1a is changed. By scanning in the long side direction, recording or reproduction can be performed on a plurality of tracks of the recording medium 14a. That is, in some cases, the optical probe 1a is slidingly contacted with the recording medium 14a in order to reduce the gap between the recording medium 14a and the optical probe 1a. In this case, the rotational speed of the recording medium 14a is preferably slow from the viewpoint of friction and wear. As described above, when the rotation speed of the recording medium 14a is decreased, the recording / reproducing speed is decreased.

On the other hand, since the long side of the light emitting portion 5a of the optical probe 1a has a length of a plurality of tracks, the long side of the light emitting portion 5a is connected to the track 15a of the recording medium 14a as shown in FIG. By positioning the optical probe 1a on the recording medium 14a via the suspension 16a so as to be orthogonal to each other and swinging the recording and reproducing beam, it is possible to perform recording or reproduction on the plurality of tracks 15a. In particular, the recording / reproducing speed can be improved. In particular, when the tracking operation is performed, it is sufficient that the long side direction of the light emitting portion 5a has a size for two tracks.
However, in the case of the present invention, there is a disadvantage that the apparatus becomes complicated, for example, a scanning system is necessary.

JP 2003-141768 A

  The present invention solves the above-mentioned disadvantages of the prior art, and provides a near-field light slider that increases the reproduction bit rate of a near-field light memory without requiring a complicated means such as a scanning system. An object of the present invention is to provide a near-field optical recording / reproducing apparatus using an optical slider.

  In addition, the present invention solves the above-mentioned drawbacks of the prior art, and does not require complicated means such as a scanning system, and at the same time, increases the reproduction bit rate of the near-field optical memory and performs recording and reproduction in one. An object of the present invention is to provide a near-field light slider that can be realized by a slider, and to provide a near-field light recording / reproducing apparatus using the near-field light slider.

  In addition, the present invention solves the above-mentioned drawbacks of the prior art, and even when the track width between recording media varies, the near-field optical recording / reproducing can increase the reproduction bit rate of the near-field optical memory. An object is to provide an apparatus.

  In addition, the present invention solves the above-mentioned drawbacks of the prior art and increases the reproduction bit rate of the near-field light memory without requiring a complicated means such as a scanning system, and a complicated light source angle adjusting mechanism. It is an object of the present invention to provide a near-field optical recording / reproducing apparatus that does not require or does not require the movement of a light source and can simultaneously perform recording and reproduction with a single slider.

  The present invention provided in order to solve the above-described problems has a function of generating surface plasmon or near-field light on a surface which is made of an optically flat substrate and is perpendicular to the surface of the recording medium on the substrate. A near-field light comprising: a parallel reproduction near-field optical head formed of a row of fine metal particles that is periodically arranged and propagates and divides a wave excited by the surface plasmon or near-field light It is a slider (claim 1).

  The present invention provided in order to solve the above-described problems has a function of generating surface plasmon or near-field light on a surface which is made of an optically flat substrate and is perpendicular to the surface of the recording medium on the substrate. A parallel reproducing near-field optical head composed of metal fine particle rows that are periodically arranged and propagate and divide waves excited by the surface plasmon or near-field light; and a vertical direction different from the vertical plane of the substrate A near-field light slider characterized in that a recording near-field light head having a function of generating surface plasmons or near-field light is formed on a surface.

  Here, in the near-field light slider according to claim 2, the surface on which the parallel reproduction near-field light head of the substrate is formed and the surface on which the recording near-field light head is formed are parallel to each other. It is preferable.

  The present invention provided in order to solve the above-described problems has a function of generating surface plasmon or near-field light on a surface which is made of an optically flat substrate and is perpendicular to the surface of the recording medium on the substrate. And a parallel reproducing near-field optical head composed of a row of fine metal particles that is periodically arranged and propagates and divides a wave excited by the surface plasmon or near-field light. A near-field light slider characterized in that a recording near-field light head having a function of generating plasmons or near-field light is formed.

  The present invention provided to solve the above-mentioned problems has a function of generating surface plasmon or near-field light on a surface which is made of an optically flat substrate and is parallel to the surface of the substrate facing the recording medium surface. The near-field light slider is formed by forming a parallel reproduction near-field light head composed of metal fine particle rows that are periodically arranged and propagate and divide the wave excited by the surface plasmon or near-field light. Claim 5).

  The present invention provided to solve the above-mentioned problems has a function of generating surface plasmon or near-field light on a surface which is made of an optically flat substrate and is parallel to the surface of the substrate facing the recording medium surface. A parallel reproduction near-field optical head composed of a row of fine metal particles that is periodically arranged and propagates and divides a wave excited by the surface plasmon or near-field light, and has a surface on the parallel surface. A recording near-field optical head having a function of generating plasmons or near-field light is formed, and the parallel reproduction near-field optical head and the recording near-field optical head are respectively disposed in the vicinity of opposite side end surfaces of the substrate. This is a near-field light slider characterized in that (claim 6).

  The present invention provided to solve the above-mentioned problems has a function of generating surface plasmon or near-field light on a surface which is made of an optically flat substrate and is parallel to the surface of the substrate facing the recording medium surface. A parallel reproduction near-field optical head composed of a row of fine metal particles that is periodically arranged and propagates and divides a wave excited by the surface plasmon or near-field light, and has a surface on the parallel surface. A recording near-field optical head having a function of generating plasmons or near-field light is formed, and the parallel reproduction near-field optical head and the recording near-field optical head are disposed in the vicinity of the same side end surface of the substrate. The near-field light slider is characterized in that (claim 7).

  The present invention provided to solve the above-described problems uses the near-field light slider according to any one of claims 1 to 7, and the position where the divided waves reach in the parallel reproduction near-field light head. The near-field light slider is characterized in that the distance between is larger than the wavelength in the air of the light source to be used.

  The present invention provided to solve the above-described problems uses the near-field light slider according to any one of claims 1 to 8, and the position where the divided waves reach in the parallel reproduction near-field light head. The near-field optical recording / reproducing apparatus tilts the angle of the near-field light slider with respect to the track direction of the recording medium so that the distance between the recording medium and the track of the recording medium coincides with each other (claim 9). ).

  The present invention provided to solve the above-mentioned problems uses the near-field light slider according to claim 8 and reads information on marks and pits recorded on the recording medium by the parallel reproduction near-field light head. A near-field optical recording / reproducing apparatus, wherein light is detected by a photodetector array (claim 10).

  The present invention provided to solve the above-mentioned problems uses the near-field light slider according to any one of claims 2 to 4 and 6 and switches the light from one light source to perform the parallel reproduction. A near-field optical recording / reproducing apparatus having a function of irradiating light to either the near-field optical head or the recording near-field optical head (claim 11).

  The present invention provided to solve the above-described problems is a first embodiment in which the near-field light slider according to any one of claims 2 to 4 and 6 and 7 is used to irradiate a parallel reproduction near-field light head with light. A light source and a second light source for irradiating light to the recording near-field optical head and having a function of irradiating one or both of the parallel reproduction near-field optical head and the recording near-field optical head A near-field optical recording / reproducing apparatus characterized by the above (claim 12).

  The present invention provided to solve the above-mentioned problems is a near-field optical recording / reproducing apparatus according to claim 11 or 12, wherein a prism is provided on the near-field optical slider. (Claim 13).

  The present invention provided to solve the above-mentioned problems is a near-field optical recording / reproducing apparatus according to claim 11 or 12, wherein a galvano mirror is provided on the near-field light slider. A playback device (claim 14).

  As an effect of the present invention, according to the near-field light slider of claim 1, surface plasmon is generated on the perpendicular surface to the recording medium when the near-field light slider faces the recording medium surface, Since it is a parallel reproducing near-field optical head that has a function to generate field light and is composed of periodically arranged metal fine particle rows that propagate and divide waves excited by these surface plasmons or near-field light, The drawbacks of the technology are solved and only at the time of reproduction, but the reproduction bit rate of the near-field optical memory can be increased without requiring complicated means such as a scanning system.

  According to the near-field light slider of claim 2, a function of generating surface plasmon or generating near-field light on a surface perpendicular to the recording medium when the near-field light slider faces the recording medium surface. And having a first (for reproduction) near-field optical head composed of periodically arranged metal fine particle rows that propagate and divide the waves excited by the surface plasmons or near-field light, and Since it is a near-field light slider having a second (recording) near-field light head having a function of generating surface plasmons on a vertical plane different from the surface or generating near-field light, a scanning system, etc. Thus, the reproduction bit rate of the near-field optical memory can be increased and recording and reproduction can be performed with a single slider.

  According to the near-field light slider of claim 3, in the near-field light slider of claim 2, two perpendicular surfaces to the recording medium are parallel end surfaces of the substrate on which the near-field light slider is manufactured. The near-field light slider is characterized by the fact that the reproduction bit rate of the near-field light memory can be increased and recording and reproduction can be performed with a single slider without requiring complicated means such as a scanning system. can do.

  According to the near-field light slider of claim 4, a function of generating surface plasmon or generating near-field light on a surface perpendicular to the recording medium when the near-field light slider faces the recording medium surface. And having a first (for reproduction) near-field optical head composed of periodically arranged metal fine particle rows that propagate and divide the waves excited by the surface plasmons or near-field light, and Since this is a near-field light slider having a second (recording) near-field light head that has the function of generating surface plasmons or generating near-field light on the same vertical plane as the surface, it is difficult to scan a complicated system such as a scanning system. In addition to speeding up the reproduction bit rate of the near-field optical memory without using any other means, it is possible to provide another means that enables recording and reproduction with a single slider.

  According to the near-field light slider of claim 5, a function of generating surface plasmons or generating near-field light on a parallel surface with the recording medium when the near-field light slider faces the recording medium surface. Since this is a near-field light slider having a parallel reproducing near-field light head composed of periodically arranged metal fine particle rows that propagate and divide waves excited by these surface plasmons or near-field light, The reproduction bit rate of the near-field optical memory can be increased without requiring complicated means such as a system.

  According to the near-field light slider of claim 6, the function of generating surface plasmons or generating near-field light on a parallel surface with the recording medium when the near-field light slider faces the recording medium surface. And having a first (for reproduction) near-field optical head composed of periodically arranged metal fine particle rows that propagate and divide waves excited by the surface plasmons or near-field light, and the parallel A near-field light slider having a second (recording) near-field light head having a function of generating surface plasmons or generating near-field light in the same parallel plane as the surface, wherein the first ( Since the near-field light head is characterized in that the near-field light head for reproduction and the second near-field light head for recording (recording) are arranged in the vicinity of the opposing end faces, Without requiring miscellaneous means, with the speed of the reproduction bit rate of the near-field optical memory, it can allow a single slider recording and playback.

  The near-field light slider according to claim 7 has a function of generating surface plasmon or generating near-field light on a parallel surface with the recording medium when the near-field light slider faces the recording medium surface. And having a first (for reproduction) near-field optical head composed of periodically arranged metal fine particle rows that propagate and divide waves excited by the surface plasmons or near-field light, and the parallel A near-field light slider having a second (recording) near-field light head having a function of generating surface plasmons or generating near-field light in the same parallel plane as the surface, wherein the first ( Since the near-field light slider is characterized in that the near-field light head for reproduction and the second near-field light head for recording (recording) are arranged in the vicinity of the same end face, complicated means such as a scanning system can be used. Without necessity, along with the speed of the reproduction bit rate of the near-field optical memory, it can allow a single slider recording and playback.

  According to the near-field light slider of claim 8, in the first (reproducing) near-field light head of the near-field light slider of claims 1 to 7, the interval between the positions where the divided waves reach is used. The near-field optical slider using the near-field slider according to Claims 1 to 7 has a complicated structure such as a scanning system. The reproduction bit rate of the near-field optical memory can be increased without requiring any means.

According to the near-field optical recording / reproducing apparatus of claim 9, in the first (reproducing) near-field optical head of the near-field light slider according to claims 1 to 8, an interval between positions where the divided waves reach Since the near-field light recording / reproducing apparatus tilts the angle of the near-field light slider with respect to the track direction of the recording medium so that the track intervals of the recording medium coincide with each other,
The near-field slider according to claims 1 to 7 can enable a high-speed reproduction bit rate of the near-field optical memory even when the track width between the recording media varies.

  According to the near-field light recording / reproducing apparatus of the tenth aspect, the first (reproducing) near-field light head of the near-field light slider according to the eighth aspect reads the mark and pit information recorded on the recording medium. The near-field optical recording / reproducing apparatus is characterized in that the detected light is detected by a photodetector array, so that the reproduction bit rate of the near-field optical memory can be increased without the need for complicated means such as a scanning system. Can do.

  According to the near-field light recording / reproducing apparatus of claim 11, the first (reproducing) is performed by switching light from one light source using the near-field light sliders of claims 2 to 4, 6, and 7. Since this is a near-field optical recording / reproducing apparatus having a function of irradiating light to either the near-field optical head or the second (recording) near-field optical head, it is possible to approach without requiring complicated means such as a scanning system. The reproduction bit rate of the field light memory can be increased, and recording and reproduction can be performed with a single slider.

  According to the near-field light recording / reproducing apparatus of claim 12, a light source for irradiating light to the first (reproducing) near-field light head using the near-field light sliders of claims 2 to 4, 7, and 8; A light source for irradiating light to the second (recording) near-field light head, and one of the first (for reproduction) near-field light head and the second (for recording) near-field light head, or Since the near-field optical recording / reproducing apparatus has a function of irradiating light to both, the reproducing bit rate of the near-field optical memory is increased without requiring complicated means such as a scanning system, and at the same time, recording and reproduction are performed simultaneously. This can be done with two sliders.

  According to the near-field light recording / reproducing apparatus of claim 13, in the near-field light slider of claims 11 and 12, the near-field light recording / reproducing apparatus is characterized in that a prism is provided on the near-field light slider. Accelerates the near-field optical memory playback bit rate without requiring complicated means such as a scanning system, and does not require a complicated light source angle adjustment mechanism, or does not require movement of the light source, and simultaneously records and reproduces Can be achieved with a single slider.

  The near-field optical recording / reproducing apparatus according to claim 14 is the near-field optical recording / reproducing apparatus according to claim 11 or 12, wherein a galvanometer mirror is provided on the near-field light slider. Therefore, the reproduction bit rate of the near-field optical memory can be increased without requiring complicated means such as a scanning system, and a complicated light source angle adjustment mechanism is not required, and recording and reproduction can be performed with one slider. be able to.

A near-field light slider (optical head device) and a near-field light recording / reproducing device as the premise of the present invention will be described with reference to FIGS.
An object of the present invention is to provide an optical head device having a configuration capable of efficiently generating near-field light from a near-field probe portion by efficiently using surface plasmons.
5 is a perspective view of a near-field light slider (optical head device), FIG. 6 is a diagram showing an example of the arrangement of fine structures formed on the metal film of the optical head device shown in FIG. 5, and FIG. 7 is the periodic fine structure. FIG. 8 is a schematic configuration diagram of a near-field optical recording / reproducing device using the optical head device of FIG. 5, and FIG. 9 is a proximity view using the optical head device of FIG. It is a schematic block diagram of a field optical recording / reproducing apparatus.

  As shown in FIG. 5, the optical head device according to the present invention has a metal film 12b on a plane (for example, an upper surface) formed on an optically flat substrate 11b, and the plane and the optical axis incident on the plane. Is an angle at which surface plasmon is excited on the metal film 12b, and has a periodic fine structure 13b on the metal film 12b, so that the near-field light can be efficiently and stably emitted. Can be generated.

  In FIG. 8, the light emitted from the laser light source 41b is converted into a parallel light beam by a collimator lens (not shown), and enters the optical head device 42b (1) having the structure shown in FIG. At this time, it is necessary to control the incident light so as to be p-polarized with respect to the metal film (metal film 12b in FIG. 5) formed on the optical head device 42b (1). The light incident on the optical head device 42b (1) generates surface plasmons at the metal film interface, and the periodic fine structure formed on the optical head device 42b (1) concentrates the plasmons at a predetermined focal point, thereby providing an optical Near-field light is generated from the head device 42b (1). When the optical head device 42b (1) and the recording medium 47b are sufficiently close to the wavelength of the irradiation light, the generated near-field light is coupled to the recording medium 47b and forms a recording mark on the recording layer 45b.

In the case of reproduction, the near-field light component that passes through the recording medium 47b is converted into a parallel light beam by the objective lens 48b, and a spot is formed on the photodetector 50b by the imaging lens 49b. The information recorded on the recording medium 47b can be reproduced by the brightness of the light intensity on the photodetector 50b. Further, by detecting the light beam reflected from the optical head device 42b (1) by the photodetector 51b, the difference in reflectance between the recorded mark and the unrecorded portion of the recording medium 47b of the generated near-field light is detected. In this way, the information recorded on the recording medium 47b can be reproduced.
However, in the present invention, since there is only one head that emits near-field light during recording and reproduction, there is a limit to increasing the bit rate.

(1) First embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (constituent operations of claims 1, 8 and 10)
FIG. 10 is a perspective view of the near-field light slider. In the near-field light slider 10, a metal film 12 is formed on the upper side of the plane (right end face in the drawing) of a rectangular parallelepiped and optically flat substrate 11 made of a transparent material such as optical glass. As the substrate 10, quartz, polycarbonate, or the like can be used. Further, as the metal film 12, a metal such as Au, Ag, or Al can be used, and the periodic fine structure 13 is formed on the metal film.

  The periodic fine structure 13 may be a small depression or bulge, and can be processed using a focused ion beam, an atomic force microscope, a tunnel microscope, or the like. When the Ag or Au metal film is formed and the substrate is quartz, the degree of adhesion is improved by applying a chromium (Cr) base film of several nm.

Incident light to the near-field light slider is incident at a specific incident angle from the side of the substrate 11 where the metal film 12 is not formed. When p-polarized light is applied to the metal film 12 and the incident angle satisfies a certain condition, surface plasmons can be excited at the interface between the metal film 12 and the outer space. For example, when the material of the metal film 12 is Ag and the wavelength λ of the incident light in vacuum is 633 nm, the refractive index n of the metal film 12 is 0.065-4.0i. The upper surface of the metal film 12 is air, and its refractive index is about 1.0. In this case, the propagation constant (wave number) k of the surface plasmon excited on the surface of the metal film 12 is expressed by the following equation (1), where the propagation constant k ₀ of incident light is k ₀ = 2π / λ.

Here, when the material of the metal film 12 is Ag, the substrate is quartz, and the refractive index n _f is 1.457, the surface plasmon can be excited with an angle θ of about 45.1 degrees. This method is the excitation of surface plasmons by the so-called Kretschmann arrangement. In addition to Ag, the angle θ is, for example, 46.2 degrees for Au and 43.9 degrees for Al. This time, an Ag thin film deposited by 80 nm was used.

  The generated surface plasmon is scattered by the periodic fine structure 13 formed in the metal film 12, but if an appropriate structure is formed, it is possible to form a plasmon lens in which plasmons are concentrated at a point having a certain focal length. is there. By arranging the scattering source 14 at this concentrated point, the plasmon is converted to near-field light, and can be used as a near-field light probe that is more efficient than before.

FIG. 6 shows an example of the arrangement of the periodic fine structure. Here, a spherical fine structure is arranged in an arc shape on a radius R with the condensing point as an origin. Here, α _n is an angle formed between the y-axis and the n-th spherical microstructure on the radius R. In FIG. 6, when surface plasmons propagate from the y-axis + ∞ direction, the plasmons that are scattered by the spherical fine structures are superimposed on the origin in the same phase, so that the plasmons enhanced than usual are Obtainable. Further enhanced near-field light can be obtained by arranging a fine structure as a scattering source at the origin.

Here, when the periodic structure has the focal point as the origin and the wave number of the incident plasmon is k, when the nth fine structure is arranged in an arc shape on the radius R in the relationship of the following expression (2), A plasmon lens in which plasmons concentrate can be formed.
kR-kRcos αn = 2πn (2)

Table 1 below shows an arrangement example of the fine structure of the n-th surface with respect to each incident wavelength. Table 1 shows the arrangement of the left half of the fine structure with respect to the y-axis, but as shown in FIG. In the example shown here, the radius R is set to 5 μm. This radius R must be set to be equal to or smaller than the plasmon propagation length. Since the propagation length here was 9.1 μm, the radius was 5 μm. Further, as shown in FIG. 6, the angle α formed by the nth fine structure and the y axis is desirably 45 degrees or less (α _n <45 degrees).

  In FIG. 10, there are scattering source particles 14 in which the plasmons are concentrated and enhanced at the center of the fine structures 13 arranged in an arc shape. From here, the metal fine particle array 15 is arranged. A metal film does not exist under the metal fine particle array 15 and is formed directly on the surface of a dielectric substrate 11 such as quartz or polycarbonate. Although FIG. 10 shows an example, the metal fine particle array 15 is branched into four. This branch interval d is larger than the wavelength of the light source used in the air. Their ends are on the lower surface of the substrate 11 (ie, the near-field light slider). The number of branches is not particularly limited to four.

  The operation when the near-field light slider 10 is opposed to the recording medium 100 will be described with reference to FIG. Laser light is applied to the metal film 12 on the end face of the slider 10 from the transparent substrate 10 side of the slider 10 under the condition that the surface plasmon is generated. It is necessary to control the laser beam so that the metal film 12 becomes p-polarized light. As a result, surface plasmons are generated on the metal film 12, and the plasmons are concentrated on the scattering source fine particles 14 by the fine structure 13 arranged in the arc shape. The plasmon generated here is propagated by the metal fine particle array 15.

This propagation has been disclosed in the prior art ("Electromagnetic energy transport along arrays of closely spaced metal rods as an analogue to plasmonic devices", Stefan A. Maier, Mark L. Brongersma, and Harry A. Atwatera, Applied Physics. Letters, Vol. 78, No. 1, 1 January 2001, pp. 16-18).
That is, when a metal fine particle having a diameter smaller than the wavelength of the electromagnetic wave to be used is provided on the dielectric, and a metal fine particle array having an interval smaller than the electromagnetic wave wavelength is provided, and the fine particle at one end of the metal fine particle array is excited by the electromagnetic wave, This is a phenomenon in which energy propagates along the metal fine particle array. Ninety percent of the energy does not go out of the metal particulate array, but is transmitted in a confined state. Propagation speed is 0.6c (c = speed of light). The propagation loss was 3db for a length of about 2.2λ. This propagation occurs locally in a region smaller than the wavelength of the electromagnetic wave. In the propagation of electromagnetic waves in vacuum, this does not occur due to the diffraction limit. FIG. 12 shows the simulation results described in the paper. In FIG. 12, (a) shows the case where the metal fine particles are arranged in a straight line, and (b) shows the case where the metal fine particles are arranged in an L shape. Not only a straight line but also a right angle can be propagated.

  In FIG. 11, the plasmon is divided into four parts by the branching of the metal fine particle array 15 and reaches near the lower surface of the end face of the near-field light slider 10. Near-field light is generated around the plasmons that have reached a plurality (four) of metal fine particles closest to the bottom surface of the substrate 11 in the metal fine particle array 15.

  The recording medium 100 has a recording layer 102 having a nanostructure, and further there is a fine particle arrangement layer 103 in which metal fine particles 103a are arranged in a film thickness direction in a dielectric 103b. The fine particle array layer 103 is a surface protective layer that protects the recording layer 102 material from moisture and gas in the surrounding atmosphere, and also protects the recording layer 102 from mechanical destruction due to contact between the slider (optical head) 10 and the recording medium 100. It also serves as a sliding-resistant layer.

  Due to the plasmons that have reached the metal fine particles closest to the lower surface of the substrate 11 described above, the near-field light generated around them excites the fine particles from the outermost surface of the fine particle array layer 103. This energy propagates toward the recording layer 102 along the fine particle arrangement of the fine particle arrangement layer 103 as shown in the prior art. Almost no energy goes out of the fine particle array, and so it propagates in a confined state. The propagating energy is within the range of 0.05λ (λ is the wavelength of the light used in vacuum) from the particle array, and 90% of the energy is confined. Therefore, when λ = 780 nm, almost 90% of the energy is confined within the range of about 40 nm from the fine particle arrangement, so that if the distance between the fine particle rows is larger than this, the energy is transferred to the adjacent fine particle row. Absent. In this way, plasmons reach the nanostructure recording layer 102 in which information is recorded. The plasmon excites the nanostructure recording layer 102. And propagation light is radiated from here. Here, a so-called mark whose physical properties (refractive index, absorption coefficient, etc.) are changed by information is recorded in the nanostructure recording layer 102. Therefore, the intensity excited by the plasmon differs depending on the location. That is, information can be read by propagating light emitted from the previous nanostructure recording layer 102. The above operations work for each of the four branches.

Next, a near-field light recording / reproducing apparatus using the near-field light slider of the present invention will be described.
FIG. 13 is a schematic configuration diagram of a near-field optical recording / reproducing apparatus showing an embodiment of the present invention. In the near-field optical recording / reproducing apparatus 110, the near-field optical slider 10 having the structure shown in FIG. The recording medium 100 is irradiated with field light. The near-field light slider 10 is formed in a slider shape, is supported by a suspension 19, and is traversed on the rotating recording medium 100. The recording medium 100 includes a fine particle array layer (surface protective layer = sliding resistant layer) 103, a nanostructure recording layer 102, and an underlayer 104 if necessary, and is configured to withstand abrasion with the slider portion by the fine particle array layer 103. Has been.

  In FIG. 13, the light emitted from the laser light source 111 is converted into a parallel light beam by a collimator lens (not shown) and enters the near-field light slider 10 having the structure shown in FIG. Then, the four portions of the nanostructure recording layer 102 are excited simultaneously by the above-described operation, and the propagation light having the intensity corresponding to the recorded information is emitted. When detecting the emitted propagating light from the side of the recording medium 100 opposite to the near-field light slider 10, the propagating light component is converted into a parallel light beam by the objective lens 115, and is formed on the photodetector array 117 by the imaging lens 116. Tie spots. The information recorded on the recording medium 100 can be reproduced by the light intensity on the photodetector array 117. At this time, the branch interval d of the near-field light slider 10 is set larger than the wavelength of the laser beam. Therefore, the interval between the excited portions in the nanostructured recording layer 102 of the recording medium 100 is also equal to or greater than the wavelength. Therefore, the propagating light emitted from these can be imaged on the photodetector array 117 as separate spots. If each light detection part of the light detector array 117 is arranged according to each of these image formation point positions, information on four points in the nanostructure recording layer 102 can be reproduced in parallel (simultaneously). That is, the reproduction bit rate is quadrupled, and high-speed reproduction is possible. Note that the above four points are merely examples, and if the number of branches is further increased, further high-speed playback is possible.

Further, by detecting the light beam reflected from the near-field light slider 10 by the photodetector array 118, the difference in reflectance between the recorded mark and the unrecorded portion of the recording medium 100 of the generated near-field light is detected. However, the information recorded on the recording medium 100 can be reproduced in the same manner as in the case of the transmission.
The above reproducing head is hereinafter referred to as a “parallel reproducing near-field optical head”.

(2) Second embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (configuration operation of claims 2, 11 and 12)
FIG. 14 is a perspective view of a near-field light slider showing an embodiment of the invention of claim 2. As in the first embodiment, a parallel reproducing near-field optical head (metal film 22, fine structure 23, scattering source metal fine particle 24, metal fine particle array 25) is provided on the right end face of the near-field light slider 20 (FIG. 14 ( b)). This operation is as described in the first embodiment. In this embodiment, a recording near-field light head is provided in the near-field light slider 20 separately (FIG. 14C).

Since the parallel reproduction near-field optical head excites the recording layer of the recording medium at the same time, when the near-field light slider 20 is irradiated with a laser beam having a recording power or higher, information is similarly obtained in the number of recording layer portions branched in the recording medium. Will be recorded. This is not preferable because the recording density is reduced to a fraction of the number of branches. Therefore, when recording, a recording near-field optical head is provided separately from the parallel reproduction near-field optical head. In this embodiment, the recording near-field optical head is manufactured in a plane parallel to the end surface of the near-field light slider 20 on which the parallel reproduction near-field optical head is formed (all cross sections in the substrate 21). FIG. 14B (FIG. 14C) shows the configuration. Similar to the parallel reproducing near-field optical head, there is a scattering source fine particle 28 in which the plasmon is concentrated and enhanced at the center of the fine structure 27 arranged in an arc shape on the metal film 26. However, there is no branching and there is only one row of metal fine particles 29. Although this single row of fine metal particles 29 is not necessary as a basic function, for convenience of the optical system used, the arcuate microstructure 13 of the parallel reproducing near-field optical head and the microstructure 27 of the recording near-field optical head are described. Since it is better that the heights coincide with each other, the metal near-field optical head for recording is also provided with the metal fine particle array 29. The arrangement of the recording near-field optical head in the arcuate microstructure 27 is the same as that of the parallel reproducing near-field optical head.
The branch interval of the metal fine particle example 25 in the parallel reproducing near-field optical head is the same as that in the first embodiment.

  Next, a near-field light recording / reproducing apparatus using the near-field light slider 20 of the present invention will be described. FIG. 15 is a schematic configuration diagram of a near-field optical recording / reproducing apparatus according to claim 11 provided with the near-field light slider according to claim 2. The apparatus configuration is basically the same as in FIG. 13, but differs in that a recording function is added. At the time of reproduction, it is the same as in the first embodiment. During recording, the direction in which the laser light source emits light is changed so that the recording near-field optical head (on the metal film 26 side) is irradiated with laser light. The power of the laser beam at this time is increased until information can be written in the recording layer 102 of the recording medium 100. Since the recording near-field optical head has one metal fine particle array 29, as described above, there is no problem that the portions in the plurality of recording layers 102 are recorded. Further, since the power is not branched, the power can be concentrated to one, so that the power emitted from the laser light source can be made smaller than that in the case of using the parallel reproducing near-field optical head. In the above description, a method of using one laser light source for recording and reproduction has been described. However, a separate recording laser 211 may be provided for recording and a dedicated reproduction laser 212 may be used separately for recording.

FIG. 16 is a schematic configuration diagram of a variation of the second embodiment of the near-field optical recording / reproducing apparatus of the present invention. Here, the configuration is such that one laser is translated and used separately for a recording laser and a reproducing laser. Alternatively, a configuration may be adopted in which a reproducing laser 222 separate from the recording laser 221 is disposed in parallel with the recording laser 221.
Here, when one laser light source is selectively used as a recording laser and a reproducing laser, either recording or reproducing operation is performed. When the recording laser and the reproduction laser are provided separately, both can be performed simultaneously, that is, recording and reproduction can be performed simultaneously.
The branch interval of the metal fine particle example 25 in the parallel reproducing near-field optical head is the same as that of the first embodiment, and each imaging point on the photodetector array 117 corresponding to the branch position of the metal fine particle example 25 is the same. If the respective light detection portions of the light detector array 117 are arranged in accordance with the positions, information on four points in the nanostructure recording layer 102 can be reproduced in parallel (simultaneously).

(3) Third embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (configuration operation of claims 3, 11 and 12)
FIG. 17 is a perspective view of a near-field light slider showing an embodiment of the invention of claim 3. Similar to the first embodiment, a parallel reproducing near-field optical head (metal film 32, fine structure 33, scattering source metal fine particles 34, metal fine particle array 35) is provided on the right end face of the near-field light slider 30 in the figure (see FIG. 17 (b)). This operation is as described in the first embodiment. In the present embodiment, a recording near-field light head (metal film 36, fine structure 37, scattering source metal fine particles 38, metal fine particle array 39) is separately provided on the left end face of the near-field light slider 30 in the drawing (FIG. FIG. 17 (c)). The reason for providing the recording head is the same as in the second embodiment. That is, the recording near-field optical head is manufactured on the other end surface (the other end surface of the substrate 31) parallel to the end surface of the near-field light slider on which the parallel reproduction near-field optical head is formed. The configuration, operation, and effect of the recording head are the same as those of the recording head shown in the second embodiment.
Note that the branch interval d of the parallel reproducing near-field optical head is the same as that of the first embodiment.

Next, a near-field light recording / reproducing apparatus using the near-field light slider 30 of the present invention will be described. FIG. 18 is a schematic configuration diagram of a near-field optical recording / reproducing apparatus showing an embodiment of the present invention. Except for the fact that it is a near-field light slider 30, the apparatus configuration, operation, and effects are basically the same as those in FIG. Based on the principle that surface plasmons are generated, the laser beam is irradiated from the dielectric side (that is, the substrate side of the near-field light slider) during recording and reproduction.
Note that one laser light source may be used for recording and reproduction by changing the direction in which light is emitted, or may be separately used for recording and reproducing laser 211 for recording and for reproduction 212 for reproduction. When one laser light source is used as a recording laser and a reproducing laser, either recording or reproducing operation is performed. When the recording laser and the reproduction laser are in separate items, both can be performed simultaneously, that is, recording and reproduction can be performed simultaneously.
The branch interval of the metal fine particle example 35 in the parallel reproducing near-field optical head is the same as that of the first embodiment, and each imaging point on the photodetector array 117 corresponding to the branch position of the metal fine particle example 35 is the same. If the respective light detection portions of the light detector array 117 are arranged in accordance with the positions, information on four points in the nanostructure recording layer 102 can be reproduced in parallel (simultaneously).

(4) Fourth embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (configuration operations of claims 4, 11 and 12)
FIG. 19 is a perspective view of a near-field light slider showing an embodiment of the invention of claim 4. A parallel reproduction near-field optical head (metal film 42, fine structure 43, scattering source metal fine particles 44, metal fine particle array 45) is provided on the half surface of the right end face of the near-field light slider 40, as in the first embodiment. This operation is as described in the first embodiment. In the present embodiment, the recording near-field light head (metal film 42, fine structure 47, scattering source metal fine particles 48, metal fine particle array 49) is also separated from the right end face of the near-field light slider 40 (that is, parallel reproduction near-field light). It is provided on the other half of the surface on which the head is provided. The reason for providing the recording head is the same as in the second embodiment. The configuration is shown on the left side of FIG. 19A (FIG. 19B). The configuration, operation, and effect of the recording head are the same as those of the recording head shown in the second embodiment.
Note that the branch interval d of the parallel reproducing near-field optical head is the same as that of the first embodiment.

Next, a near-field light recording / reproducing apparatus using the near-field light slider 40 of the present invention will be described. FIG. 20 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing an embodiment of the present invention. Except for the near-field light slider 30, the apparatus configuration, operation, and effects are basically the same as those in FIG. However, as shown in FIG. 20A (FIG. 20B), the laser corresponding to the region where the recording near-field optical head for recording and the parallel near-field optical head for recording are formed on the surface of the metal film 42. The light source is moved in parallel to selectively use a recording laser and a reproducing laser. Alternatively, the recording laser 411 and the reproducing laser 412 may be separately arranged in parallel to the end face.
When one laser light source is used as a recording laser and a reproducing laser, either recording or reproducing operation is performed. When the recording laser and the reproduction laser are in separate items, both can be performed simultaneously, that is, recording and reproduction can be performed simultaneously.
The branch interval of the metal fine particle example 45 in the parallel reproducing near-field optical head is the same as that of the first embodiment, and each imaging point on the photodetector array 117 corresponding to the branch position of the metal fine particle example 45 is the same. If the respective light detection portions of the light detector array 117 are arranged in accordance with the positions, information on four points in the nanostructure recording layer 102 can be reproduced in parallel (simultaneously).

(5) Fifth embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (configuration operation of claims 5 and 9)
FIG. 21 is a perspective view of a near-field light slider showing an embodiment of the invention of claim 5. In the near-field light slider 50, the metal film 52 described above, the fine structure 53 and the scattering source fine particles 54 arranged in an arc shape in a spherical shape on the metal film 52, and the branched metal fine particle array 55 include: The near-field light slider 50 is formed on a plane parallel to the recording medium when facing the recording medium surface. As a result, near-field light is generated in the vicinity of the metal fine particle closest to the side end surface of the near-field light slider 50. This constitutes a parallel reproduction near-field optical head. The configurations, operations, and effects of the fine structures 53, the scattering source fine particles 54, and the branched metal fine particle arrays 55 arranged in an arc shape are the same as those in the first embodiment.

  FIG. 22 is an operation explanatory diagram when the near-field light slider 50 is opposed to the recording medium 100. The parallel reproduction near-field optical head (metal film 52, fine structure 53, scattering source metal fine particles 54, metal fine particle array 55) is formed on a plane parallel to the recording medium 100 of the substrate 51, and the laser beam L Is the same as that of FIG. 11 in the first embodiment except that the light is irradiated on the parallel plane on which the parallel reproducing near-field optical head is formed.

  Next, a near-field optical recording / reproducing apparatus using the near-field light slider 50 of the present invention will be described. FIG. 23 is a schematic configuration diagram of a near-field optical recording / reproducing apparatus showing an embodiment of the present invention. Basically, except that the parallel reproducing near-field optical head is formed on the parallel surface of the substrate 51 with the recording medium 100 and that the laser light is irradiated on the parallel surface of the substrate 51, FIG. This is the same device configuration, operation, and effect.

The configuration operation of claim 9 will be described with reference to FIG. In FIG. 24 (a), the pitch of the data string of the recording medium 100 (here, marks are arranged on the land) and the branch interval (metal fine particle array) of the parallel reproduction near-field optical head of the near-field light slider 50, for example. The case where 55 branch intervals) coincide is shown. However, the land interval may change slightly due to the inherent difference between the recording media. In this case, as shown in FIG. 24 (b), the near-field light slider 50 is tilted with respect to the data string, that is, the extending direction of the land and groove, so that the branch interval and the pitch of the data string of the recording medium are matched. I do.
This technique can be applied to all embodiments of the parallel reproduction near-field light slider of the present invention.

(6) Sixth embodiment of a near-field light slider and a near-field light recording / reproducing device according to the present invention (configuration operations of claims 6, 11 and 12)
FIG. 25 is a perspective view of a near-field light slider showing an embodiment of the invention of claim 6. Similar to the fifth embodiment, the parallel reproduction near-field optical head (metal film 62, fine structure 63, scattering source metal fine particle 64, metal fine particle is formed on the parallel surface of the near-field light slider 60 (substrate 61) with the recording medium. Column 65) is provided. This operation is as described in the first embodiment. In the present embodiment, the recording near-field light head (metal film 62, fine structure 67, scattering source metal fine particles 68) is also separated from the parallel surface of the near-field light slider 60 with the recording medium (that is, parallel reproduction near-field light). The surface provided with the head) is provided on the metal film 62. The reason for providing the recording head is the same as in the second embodiment. The configuration is shown on the right side of the view A in FIG. 25 (FIG. 25B). Its configuration, operation, and effect are the same as in the second embodiment. However, in this case, there is no one row of metal fine particles extending from the scattering source fine particles of the recording near-field light head. This is because the recording near-field optical head and the parallel reproducing near-field optical head are arranged in the vicinity of the opposing side end surfaces of the substrate 61, respectively. However, the one row of fine metal particles may be provided. The branch interval of the parallel reproducing near-field optical head is the same as that in the first embodiment.

  Next, a near-field optical recording / reproducing apparatus using the near-field light slider 60 of the present invention will be described. FIG. 26 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing an embodiment of the present invention. The configuration, operation, and effect are basically the same as those of the apparatus shown in FIG. 23, except that a recording function is added. At the time of reproduction, it is the same as in the fifth embodiment. At the time of recording, the direction in which the laser light source emits light is changed so that the near-field optical head for recording is irradiated with the laser light. The power of the laser beam at this time is increased until information can be written in the recording layer 102 of the recording medium 100. Since the recording near-field light head is one of the scattering source metal fine particles 68, there is no problem that the portions in the plurality of recording layers 102 are recorded as described above. Further, since the power is not branched, the power can be concentrated to one, so that the power emitted from the laser light source can be made smaller than that in the case of using the parallel reproducing near-field optical head. In the above description, a method of using one laser light source for recording and reproduction has been described. However, a separate recording laser 611 for recording and a dedicated reproduction laser 612 for reproduction may be provided separately. When one laser light source is used as a recording laser and a reproducing laser, either recording or reproducing operation is performed. When the recording laser and the reproduction laser are provided separately, both can be performed simultaneously, that is, recording and reproduction can be performed simultaneously.

(7) Seventh embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (constituent operations of claims 7, 11 and 12)
27 is a perspective view of a near-field light slider showing an embodiment of the invention of claim 7. FIG. Similar to the sixth embodiment, a parallel reproduction near-field optical head (metal film 72, fine structure 73, scattering source metal fine particle 74, metal fine particle array 75) on the parallel surface of the near-field light slider 70 with the recording medium, and A recording near-field optical head (metal film 72, fine structure 77, scattering source metal fine particles 78) is provided. Its configuration, operation, and effect are the same as in the sixth embodiment. However, the recording near-field optical head and the parallel reproduction near-field optical head are disposed in the vicinity of the end face on the same side of the near-field light slider 70 (substrate 71). Further, there is no row of metal fine particles extending from the scattering source fine particles 78 of the recording near-field light head. This is because the recording near-field optical head and the parallel reproduction near-field optical head are disposed in the vicinity of the same end surface of the near-field light slider. However, the one row of fine metal particles may be provided. The branch interval of the parallel reproducing near-field optical head is the same as that in the first embodiment.

Next, a near-field optical recording / reproducing apparatus using the near-field light slider 70 of the present invention will be described. FIG. 28 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing an embodiment of the present invention. Except for the near-field light slider 70, the apparatus configuration, operation, and effects are basically the same as those in FIG. However, as shown in FIG. 28A (FIG. 28B), the laser corresponds to the region where the recording near-field optical head and the parallel reproducing near-field optical head are formed on the surface of the metal film 72. The light source is moved in parallel to selectively use a recording laser and a reproducing laser. Alternatively, the recording laser 711 and the reproducing laser 712 may be separately arranged in parallel to the end face.
When one laser light source is used as a recording laser and a reproducing laser, either recording or reproducing operation is performed. When the recording laser and the reproduction laser are in separate items, both can be performed simultaneously, that is, recording and reproduction can be performed simultaneously.
The branch interval of the metal fine particle example 75 in the parallel reproducing near-field optical head is the same as that of the first embodiment, and each imaging point on the photodetector array 517 corresponding to the branch position of the metal fine particle example 75 is the same. If the respective light detection portions of the light detector array 517 are arranged in accordance with the positions, information on four points in the nanostructure recording layer 102 can be reproduced in parallel (simultaneously).

(8) Eighth embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (configuration operation of claim 13)
FIG. 29 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing a first embodiment of claim 13. In this example, a near-field light slider 80A based on the near-field light slider 30 shown in the third embodiment is used. In the near-field light slider 80A, a concave prism having two inclined surfaces polished to optical smoothness is provided on the side opposite to the recording medium 100 of the substrate 81a. When laser light is incident on the left prism slope in the figure, the laser light is refracted in the left direction, and a near-field optical head having a plasmon lens on the metal film 82a and a metal fine particle array that divides the near-field light, That is, it reaches the parallel reproducing near-field optical head (the end face on the left side of FIG. 29). Further, when laser light is incident on the prism slope on the right side in the drawing, the laser light is refracted in the right direction, and a near-field optical head for recording a metal film having a plasmon lens and metal fine particle rows on the metal film 86a ( (The end face on the right side of FIG. 29). When there is one laser light source, the laser light source is arranged on the right side during recording, and is arranged on the left side during reproduction. As a result, by the effect of the prism, the recording near-field optical head and the parallel reproduction near-field optical head are appropriately irradiated with laser light, and recording or reproduction is performed. Further, if two laser light sources are used as the recording dedicated laser 811 and the reproduction dedicated laser 812, it is not necessary to move the laser light source. In the present invention, the laser light source may be arranged perpendicular to the upper surface of the near-field light head. Generally, in terms of mechanism, the parallel movement (in the case of FIG. 29) has a simpler mechanical structure than the movement by changing the angle (FIG. 18), and is superior in terms of cost and reliability. Even if two laser light sources are used and a moving mechanism is not required, the angle (right angle) is simpler and more accurate with respect to the angle adjustment than the arbitrary angle. As described above, in the present invention, the configuration and adjustment of the apparatus can be simplified.

  FIG. 30 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing a second embodiment of the invention of the thirteenth aspect. Here, a convex prism having two inclined surfaces polished to optical smoothness is provided on the side of the substrate 81b of the near-field light slider 80B opposite to the recording medium. Operations and effects are the same as in the first embodiment (FIG. 29) except that the positions of the recording laser light source and the reproducing laser light source are reversed.

  FIG. 31 is a schematic configuration diagram of a near-field optical recording / reproducing apparatus using a near-field light slider 80C based on the near-field light slider 40 shown in the fourth embodiment. In the near-field light slider 80C of FIG. 31A (FIG. 31B), a concave prism having two inclined surfaces polished to optical smoothness is provided on the opposite side of the substrate 81c from the recording medium 100. . When the laser light is incident on the prism slope on the right side in FIG. 31B, the laser light is refracted in the right direction to divide the fine structure 83c, the scattering source metal fine particles 84c and the near-field light on the metal film 82c. It reaches the near-field optical head having the metal fine particle array 85c, that is, the parallel reproduction near-field optical head. Further, when laser light is incident on the prism slope on the left side in the figure, the laser light is refracted in the left direction, and there is a fine structure 87c on the metal film 82c, scattering source metal fine particles 88c, and metal fine particle arrays 89c. A near-field optical head is reached. When there is one laser light source, the laser light source is arranged on the left side during recording, and is arranged on the right side during reproduction. As a result, by the effect of the prism, the recording near-field optical head and the parallel reproduction near-field optical head are appropriately irradiated with laser light, and recording or reproduction is performed. Further, if two laser light sources are used and used as a recording dedicated laser 831 and a reproduction dedicated laser 832, it is not necessary to move the laser light source. Here, a concave prism is taken as an example, but a similar operation and effect can be achieved with a convex prism.

  FIG. 32 is a schematic configuration diagram of a near-field optical recording / reproducing apparatus using a near-field light slider 80D based on the near-field light slider 60 shown in the sixth embodiment. In the near-field light slider 80D of FIG. 32, a concave prism having two inclined surfaces polished to optical smoothness is provided on the side opposite to the recording medium 100 of the substrate 81d. The operations and effects are the same as those of the embodiment shown in FIG. 29 except that the laser beam reaches the parallel reproducing near-field optical head and the recording near-field optical head formed on the lower surface of the substrate 81d. Here, a concave prism is taken as an example, but a similar operation and effect can be achieved with a convex prism.

FIG. 33 is a schematic configuration diagram of a near-field optical recording / reproducing apparatus using a near-field light slider 80E based on the near-field light slider 70 shown in the seventh embodiment. In the near-field light slider 80E in FIG. 33A (FIG. 33B), a concave prism having two inclined surfaces polished to optical smoothness is provided on the side opposite to the recording medium 100 of the substrate 81e. . The operations and effects are the same as those of the embodiment shown in FIG. 31 except that the laser light reaches the parallel reproducing near-field optical head and the recording near-field optical head formed on the lower surface of the substrate 81e. Here, a concave prism is taken as an example, but a similar operation and effect can be achieved with a convex prism.
In the above-described near-field light sliders 80A to 80E, the prism is provided integrally with the substrate. However, a predetermined prism may be provided on the near-field light slider separately from the substrate.

(9) Ninth embodiment of a near-field light slider and a near-field light recording / reproducing apparatus according to the present invention (configuration operation of claim 14)
FIG. 34 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing a first embodiment of the fourteenth aspect. In this example, the near-field light slider 30 shown in the third embodiment was used. On the opposite side of the near-field light slider 30 from the recording medium 100, a mirror Ma having a variable angle galvanometer mirror structure is placed. This may be a so-called MEMS (Micro Electro Mechanical Systems) device or an assembly of individual components. When the mirror Ma is tilted to the right side, the laser light is reflected to the left side in the figure, and a near-field light head having a metal fine particle array that divides the near-field light, that is, a parallel reproduction near-field light head (end face on the left side in FIG. 34). To reach. When the mirror Ma is tilted to the left, the laser light is reflected to the right, the laser light is reflected to the right, and reaches the recording near-field light head (the end face on the right side in FIG. 34). Accordingly, the recording near-field optical head and the parallel reproduction near-field optical head are appropriately irradiated with the laser beam by the effect of the variable angle mirror, and recording or reproduction is performed.

  In particular, when a variable angle mirror of a MEMS device is used as the mirror Ma, the variable angle of the variable angle mirror is determined with sufficient and uniform accuracy. When this is assembled, the laser light source 911 and the angle variable mirror Ma may be arranged vertically on the upper surface of the near-field light slider 30. As described above, regarding the angle adjustment, the vertical (right angle) is simpler and more accurate than the arbitrary angle. In addition, the accuracy of changing the mirror angle of the angle variable mirror is much higher than moving the position of the laser light source. Therefore, in the present invention, the configuration and adjustment of the apparatus can be performed easily and with high accuracy.

  FIG. 35 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing a second embodiment of the fourteenth aspect. In this example, the near-field light slider 40 shown in the fourth embodiment was used. Here, a mirror Mb having a variable galvanometer mirror structure is placed on the opposite side of the near-field light slider 40 from the recording medium 100. The operations and effects are the same as those in the embodiment of FIG. 34 except that the laser light reaches the parallel reproduction near-field optical head and the recording near-field optical head formed on the same side surface of the substrate 41, so that the description is omitted.

  FIG. 36 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing a third embodiment of the fourteenth aspect. In this example, the near-field light slider 60 shown in the sixth embodiment was used. Here, on the opposite side of the near-field light slider 60 from the recording medium 100, a mirror Mc having a variable angle galvano mirror structure is placed. Except for the fact that the laser beam reaches the parallel reproduction near-field optical head and the recording near-field optical head formed on the same lower surface of the substrate 61, the operations and effects are the same as in the embodiment of FIG.

  FIG. 36 is a schematic block diagram of a near-field optical recording / reproducing apparatus showing the fourth embodiment of the fourteenth aspect. In this example, the near-field light slider 70 shown in the seventh embodiment was used. Here, a mirror Md having a variable galvanometer mirror structure is placed on the opposite side of the near-field light slider 70 from the recording medium 100. The operations and effects are the same as those in the embodiment of FIG. 34 except that the laser beam reaches the parallel reproducing near-field optical head and the recording near-field optical head formed on the same lower surface of the substrate 71, so that the description is omitted.

Further, the near-field light slider shown above is not limited to the one using a plasmon lens, but is provided with an optical waveguide 13a on the end face of the slider as shown in FIG. 38, or a bow tie as shown in FIG. A metal bow tie head 13b called a mold may be provided. Alternatively, an open type probe slider shown in Japanese Patent Application Laid-Open No. 2001-93251, a protruding type probe slider shown in Japanese Patent Application Laid-Open No. 2001-208672, and the specification of Japanese Patent Application No. 2000-301292. A wedge-type probe slider may be used.
In the embodiments, the metal fine particles and the recording fine particles are shown as being spherical. However, the present invention is not particularly limited thereto, and may be an elliptical sphere, a cube, a rectangular parallelepiped, or the like.

  Note that the recording medium that can be used in the present invention is not limited to the recording medium 100 shown in the above embodiment, and may be, for example, as shown in FIG. The structure is basically the same as that shown in FIG. 11, but the structure of the recording layer is different. The recording layer 202 is in a state in which recording fine particles 202a are dispersed in a dielectric 202b. The diameter of the recording fine particles 202 a is preferably equal to the metal fine particles 103 a of the fine particle arrangement layer 103. In addition, it is preferable that the pitch between the metal fine particles closest to the recording layer 202 in the fine particle array layer 103 and the recording fine particles immediately below the metal fine particles be equal to the pitch between the metal fine particles in the fine particle array layer 103. Further, it is preferable that the dielectric constant of the dielectric 103 b of the fine particle array layer 103 is close to the dielectric 202 b of the recording layer 202. The recording fine particles 202a themselves are preferably an alloy containing a metal as a main component. Under these conditions, the energy of the light propagating through the fine particle array can be efficiently coupled to the recording fine particles 202a. So-called impedance matching is achieved. A so-called phase change material is suitable as the material of the recording fine particles 202a. Examples include AgInSbTe, GeSbTe, AgInSbTeGe, InTe, SbTe and the like. Since these are alloys, their specific resistance is almost equal to that of the metal fine particles 103a in the fine particle arrangement layer 103, and thus the propagated energy is efficiently coupled. Phase change materials cause a phase change between a crystalline phase and an amorphous phase. The specific resistance changes between the two phases by almost 6 orders of magnitude. Therefore, the coupling from the metal fine particles 103a to the recording fine particles 202a is greatly different between when the recording particles are in a crystalline phase and when they are in an amorphous phase. As a result, the energy propagated from the array of metal fine particles 103a to the recording fine particles 202a varies depending on the phase state of the recording fine particles 202a. The light energy transmitted to the recording particulates 202a is detected from the opposite side of the slider or is detected by reflected light. Therefore, the detected light amount varies depending on the state of the recording particulates 202a. That is, information can be read (information reproduction). Although the phase change material has been described as the recording fine particles 202a, other materials may be used as long as the optical characteristics can be changed by the light used for recording and reproduction is possible.

FIG. 41 shows another embodiment of the recording medium. The fine particle arrangement layer 103 is the same as the above embodiment. The recording layer 302 is in a state where recording fine particles 302a are dispersed in a dielectric 302b. However, the structure of the recording fine particles 302a is different from that of the above embodiment. Here, it is constituted by a core metal fine particle 302a ₁ and an optical recording material 302a ₂ provided so as to enclose it. The material of the metal fine particle 302a _{1 serving as} the nucleus is preferably the same as that of the metal fine particle 103a of the fine particle arrangement layer 103.

Varies depending permittivity and characteristics of the optical recording material 302a ₂ of the dielectric recording particulates 302a, the diameter of the recording particulates 302a, i.e. metal particles 302a ₁ and the optical recording material 302a ₂ (in our example the phase change material) were combined It is preferable that the diameter or the diameter of the metal fine particle 302 a _{1 serving} as a nucleus is equal to the metal fine particle 103 a of the fine particle arrangement layer 103. Further, it is preferable that the pitch between the metal fine particles 103 a closest to the recording layer 302 in the fine particle array layer 103 and the recording fine particles 302 a immediately below the metal fine particles 103 a be equal to the pitch between the metal fine particles 103 a in the fine particle array layer 103. Further, it is preferable that the dielectric constant of the dielectric 103 b of the fine particle array layer 103 is close to the dielectric constant of the dielectric 302 b of the recording layer 302.

Further, the optical recording material 302a ₂ of the recording fine particles 302a is preferably an alloy containing a metal as a main component. Under these conditions, the energy of the light propagating through the fine particle array can be efficiently coupled to the recording fine particles 302a. So-called impedance matching is achieved. A so-called phase change material is suitable as a material for the recording fine particles. Examples include AgInSbTe, GeSbTe, AgInSbTeGe, InTe, SbTe and the like. Since these are alloys, their specific resistances are almost equal to those of the metal fine particles 103a in the fine particle arrangement layer 103 and the metal fine particles 302a _{1 serving} as the nuclei of the recording fine particles 302a, and thus the propagated energy is efficiently coupled. . Phase change materials cause a phase change between a crystalline phase and an amorphous phase. The specific resistance changes between the two phases by almost 6 orders of magnitude. Therefore, the coupling from the metal fine particles 103a to the recording fine particles 302a is greatly different when the recording particles 302a are in the crystalline phase and when they are in the amorphous phase. As a result, the energy that propagates from the arrangement of the metal fine particles 103a to the recording fine particles 302a changes depending on the phase state of the phase change material of the recording fine particles 302a. Since the light energy transmitted to the recording particles 302a is detected from the opposite side of the slider or by reflected light, the detected light amount varies depending on the state of the recording particles 302a. That is, information can be read (information reproduction). Although the phase change material has been described as the recording fine particles 302a, other materials may be used as long as the optical characteristics can be changed by the light used for recording and reproduction is possible.

FIG. 42 shows an example of another recording medium. The fine particle arrangement layer 103 is the same as the above embodiment. The recording layer 402 is in a state where recording fine particles 402a are dispersed in a dielectric 402b. However, the structure of the recording fine particles 402a is different from that of the above embodiment. Here, it is constituted by metal fine particles 402a _{1 serving as} nuclei and an optical recording material 402a ₂ provided so as to enclose the particles. The material of the metal fine particle 402 a _{1 serving as} a nucleus is preferably the same as the metal fine particle 103 a of the fine particle arrangement layer 103.

It varies depending permittivity and characteristics of the optical recording material 402a ₂ of dielectric 402b of recording particulates 402a, the diameter of the recording particulates 402a, i.e. combined (organic dye material in the here example) metal particles 402a ₁ and the optical recording material 402a ₂ It is preferable that the diameter of the metal fine particle 402 a _{1 serving} as a nucleus is equal to that of the metal fine particle 103 a of the fine particle array layer 103. Further, the pitch between the metal fine particles 103 a closest to the recording layer 402 in the fine particle array layer 103 and the recording fine particles 402 a immediately below the metal fine particles 103 a is preferably equal to the pitch between the metal fine particles 103 a in the fine particle array layer 103. Further, it is preferable that the dielectric constant of the dielectric 103 b of the fine particle array layer 103 is close to the dielectric constant of the dielectric 402 b of the recording layer 402.
Under these conditions, the energy of the light propagating through the fine particle array can be efficiently coupled to the recording fine particle 402. So-called impedance matching is achieved.

As the optical recording material 402a ₂ of recording particulates 402a, an organic dye material. Examples include cyanine dyes such as phthalocyanine, azaannulene dyes, metal chelate dyes, and the like. The light coupled to the metal fine particle 402a ₁ which is the nucleus of the recording fine particle 402a is present near the metal fine particle 402a ₁ as near-field light. Since the electromagnetic field is confined in a very narrow region of several tens of nanometers, the electromagnetic field strength becomes very strong. The organic dye material is transformed by the energy of the electromagnetic field, and information is recorded. Said modification occurs both due to a change in the molecular structure and shape of the organic dye material. Therefore, the coupling from the metal fine particles 103a to the recording fine particles 402a differs greatly before and after recording on the organic dye material. As a result, the energy propagated from the array of metal fine particles 103a to the recording fine particles 402a varies depending on the state of the organic dye material. Since the light energy transmitted to the recording particulate 402a is detected from the opposite side of the slider or by reflected light, the detected light amount varies depending on the state of the recording particulate 402a. That is, information can be read (information reproduction).

  In addition, although the thing using the organic pigment | dye material was mentioned as the recording fine particle 402a, if the optical characteristic can be changed with the light used for recording and reproduction | regeneration is possible, it will be another material. Also good.

FIG. 43 shows another embodiment of the recording medium. The fine particle arrangement layer 103 is the same as the above embodiment. The recording layer 502 is in a state where recording fine particles 502a are dispersed in a dielectric 502b. However, the structure of the recording fine particles 502a is different from that of the above embodiment. Here, it is composed of metal fine particles 502a _{1 serving as} nuclei and an optical recording material 502a ₂ provided so as to enclose the particles. The material of the metal fine particle 502 a _{1 serving as} a nucleus is preferably the same as that of the metal fine particle 103 a of the fine particle arrangement layer 103.

Varies depending permittivity and characteristics of the optical recording material 502a ₂ of dielectric 502b of recording particulates 502, the diameter of the recording particulates 502, namely (in the case example photochromic material) metal particles 502a ₁ and the optical recording material 502a ₂ combined It is preferable that the diameter or the diameter of the metal fine particle 502 a _{1 serving} as a nucleus is equal to the metal fine particle 103 a of the fine particle arrangement layer 103. Further, it is preferable that the pitch between the metal fine particles 103 a closest to the recording layer in the fine particle array layer 103 and the recording fine particles 502 a immediately below the metal fine particles 103 a is equal to the pitch between the metal fine particles 103 a in the fine particle array layer 103. Further, it is preferable that the dielectric constant of the dielectric 103 b of the fine particle array layer 103 is close to the dielectric constant of the dielectric 502 b of the recording layer 502.
Under these conditions, the energy of the light propagating through the fine particle array can be efficiently coupled to the recording fine particles 502a. So-called impedance matching is achieved.

As the optical recording material 502a ₂ of recording particulates 502a, using a photochromic material. Examples include diarylethene, fluoride, spirobenzopyran, azobenzene and the like represented by the following structural formulas (a), (b), and (c). The light coupled to the metal fine particle 502a ₁ which is the nucleus of the recording fine particle 502a is present near the metal fine particle 502a ₁ as near-field light. Since the electromagnetic field is confined in a very narrow region of several tens of nanometers, the electromagnetic field strength becomes very strong. The absorption spectrum of the photochromic material changes due to the electromagnetic field energy, and information is recorded. The change in the absorption spectrum is that both the real part and the imaginary part of the refractive index of the photochromic material change. Therefore, the coupling from the metal fine particles 103a to the recording fine particles 502a differs greatly before and after recording on the photochromic material. Thereby, the energy propagated from the array of the metal fine particles 103a to the recording fine particles 502a varies depending on the state of the photochromic material. Since the light energy transmitted to the recording particles 502a is detected from the opposite side of the slider or by reflected light, the detected light amount varies depending on the state of the recording particles 502a. That is, information can be read (information reproduction).
In addition, although the thing using the photochromic material was mentioned as the recording fine particle 502a, the optical characteristic may change with the light used for recording, and if it can reproduce | regenerate, it is another material. Also good.

  FIG. 44 shows another embodiment of the recording medium. The fine particle arrangement layer 103 is the same as the above embodiment. The recording layer 602 is in a state where metal fine particles 602a are dispersed in an organic dye material 602b. The material of the metal fine particles 602 a in the recording layer 602 is preferably the same as the metal fine particles 103 a of the fine particle array layer 103.

The diameter of the metal fine particles 602 a in the recording layer 602 is preferably equal to the metal fine particles 103 a of the fine particle array layer 103. Further, it is preferable that the pitch between the metal fine particles 103 a closest to the recording layer in the fine particle array layer 103 and the metal fine particles 602 a in the recording layer 602 immediately below the same is equal to the pitch between the metal fine particles 103 a in the fine particle array layer 103. . In addition, it is preferable that the dielectric constant of the dielectric 103b of the fine particle array layer 103 is close to that of the optical recording material 602b (here, organic dye material) of the recording layer 602.
Under these conditions, the energy of the light propagating through the fine particle array can be efficiently coupled to the metal fine particles 602a in the recording layer 602. So-called impedance matching is achieved.

An organic dye material is used as the optical recording material 602b of the recording layer 602. Examples include cyanine dyes such as phthalocyanine, azaannulene dyes, metal chelate dyes, and the like. The light coupled to the metal fine particles 602a in the recording layer 602 exists around the metal fine particles 602a as near-field light. Since the electromagnetic field is confined in a very narrow region of several tens of nanometers, the electromagnetic field strength becomes very strong. Due to the energy of the electromagnetic field, the organic dye material around the metal fine particles 602a in the recording layer 602 is transformed, and information is recorded. Said modification occurs both due to a change in the molecular structure and shape of the organic dye material. Therefore, the coupling from the metal fine particles 103a to the metal fine particles 602a in the recording layer 602 differs greatly before and after recording on the organic dye material.
Thereby, the energy propagated from the metal fine particle array to the metal fine particles 602a in the recording layer 602 changes depending on the state of the organic dye material.

  Since the light energy transmitted to the metal fine particles in the recording layer 602 is detected from the opposite side of the slider or by reflected light, depending on the state of the recording material (organic dye material) 602b around the metal fine particles 602a in the recording layer 602, The detected light amount changes. That is, information can be read (information reproduction).

  Note that although an organic dye material is used as the optical recording material 602b of the recording layer 602, other materials can be used as long as the optical characteristics thereof can be changed by the light used for recording and reproduction is possible. There may be.

  FIG. 45 shows another embodiment of the recording medium. The fine particle arrangement layer 103 is the same as the above embodiment. The recording layer 702 is in a state where metal fine particles 702a are dispersed in a photochromic material 702b. The material of the metal fine particles 702 a in the recording layer 702 is preferably the same as the metal fine particles 103 a of the fine particle array layer 103.

The diameter of the metal fine particles 702 a in the recording layer 702 is preferably equal to the metal fine particles 103 a of the fine particle array layer 103. Further, the pitch between the metal fine particles 103 a closest to the recording layer 702 in the fine particle array layer 103 and the metal fine particles 702 a in the recording layer 702 immediately below the metal fine particles 103 a may be equal to the pitch between the metal fine particles 103 a in the fine particle array layer 103. preferable. In addition, it is preferable that the dielectric constant of the dielectric 103b of the fine particle arrangement layer 103 is close to that of the optical recording material 702b (here, photochromic material) of the recording layer 702.
Under these conditions, the energy of the light propagating through the fine particle array can be efficiently coupled to the metal fine particles 702a in the recording layer 702. So-called impedance matching is achieved.

  Further, a photochromic material is used as the optical recording material 702b of the recording layer 702. Examples include diarylethene, fluoride, spirobenzopyran, azobenzene and the like represented by the above structural formulas (a), (b), and (c). The light coupled to the metal fine particles 702a in the recording layer 702 exists near the metal fine particles 702a as near-field light. Since the electromagnetic field is confined in a very narrow region of several tens of nanometers, the electromagnetic field strength becomes very strong. The electromagnetic spectrum energy changes the absorption spectrum of the photochromic material around the metal fine particles 702a in the recording layer 702, and information is recorded. The change in the absorption spectrum is that both the real part and the imaginary part of the refractive index of the photochromic material change. Therefore, the coupling from the metal fine particles 103a to the metal fine particles 702a in the recording layer 702 differs greatly before and after recording on the photochromic material.

  Thereby, the energy propagated from the arrangement of the metal fine particles 103a to the metal fine particles 702a in the recording layer 702 varies depending on the state of the photochromic material. Since the light energy transmitted to the metal fine particles 702a in the recording layer 702 is detected from the opposite side of the slider or by reflected light, depending on the state of the recording material (photochromic material) 702b around the metal fine particles 702a in the recording layer 702, The detected light amount changes. That is, information can be read (information reproduction).

  As the optical recording material 702b of the recording layer 702, a material using a photochromic material has been described, but other optical materials can be used as long as the optical characteristics can be changed by the light used for recording and reproduction is possible. This material may be used.

  FIG. 46 shows another embodiment of the recording medium. The fine particle arrangement layer 103 is the same as the above embodiment. The recording layer 802 is in a state where metal fine particles 802a are dispersed in a dielectric material 802b. However, the recording medium 800 here is a read-only ROM type recording medium, and information is recorded depending on the presence or absence of the metal fine particles 802a in the dielectric 802b. Where there are metal fine particles 802a, they are excited by plasmons propagating through the fine particle array layer 103 and emit light, but when there are no metal fine particles 802a, they are not excited and do not emit light. Therefore, by detecting this light, information recorded in the recording medium 800 can be reproduced. The material of the metal fine particles 802 a in the recording layer 802 is preferably the same as that of the metal fine particles 103 a of the fine particle array layer 103.

  The diameter of the metal fine particles 802 a in the recording layer 802 is preferably equal to that of the metal fine particles 103 a in the fine particle array layer 103. Further, the pitch between the metal fine particles 103 a closest to the recording layer 802 in the fine particle array layer 103 and the metal fine particles 802 a in the recording layer 802 immediately below the metal fine particles 103 a may be equal to the pitch between the metal fine particles 103 a in the fine particle array layer 103. preferable. Further, it is preferable that the dielectric constant of the dielectric 103b of the fine particle array layer 103 is close to that of the dielectric material 802b of the recording layer 802.

  Under these conditions, the energy of the light propagating through the fine particle array can be efficiently coupled to the metal fine particles 802a in the recording layer 802. So-called impedance matching is achieved.

It is a block diagram of the optical probe of a prior art. It is a perspective view which shows the structure of the optical probe of a prior art. It is a block diagram of the optical pick-up of a prior art. FIG. 7 is an arrangement diagram of an optical probe with respect to a track of a recording medium of a conventional technique. 1 is a perspective view of a near-field light slider (optical head device) (1) as a premise of the present invention. FIG. It is a figure which shows the example of arrangement | positioning of the fine structure formed in the metal film of the near-field light slider shown in FIG. It is a perspective view of the near-field light slider (optical head apparatus) (2) used as the premise of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (1) used as the premise of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (2) used as the premise of this invention. It is a block diagram of the near-field light slider (1) of this invention. It is a perspective view which shows the relationship between the near-field light slider (1) of this invention, and a recording medium. It is a figure which shows the simulation result of the phenomenon in which electromagnetic energy propagates along a metal microparticle row | line | column. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (1) of this invention. It is a block diagram of the near-field light slider (2) of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (2) of this invention. It is a schematic block diagram of the variation of the near-field optical recording / reproducing apparatus (2) of this invention. It is a block diagram of the near-field light slider (3) of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (3) of this invention. It is a block diagram of the near-field light slider (4) of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (4) of this invention. It is a block diagram of the near-field light slider (5) of this invention. It is a perspective view which shows the relationship between the near-field light slider (5) of this invention, and a recording medium. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (5) of this invention. It is a figure which shows the arrangement | positioning condition with respect to the recording medium of the near-field light slider (5) in FIG. It is a block diagram of the near-field light slider (6) of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (6) of this invention. It is a block diagram of the near-field light slider (7) of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (7) of this invention. It is a block diagram of the near-field light recording / reproducing apparatus (8) using the near-field light slider (8) of this invention. It is a schematic block diagram of the variation 1 of the near-field optical recording / reproducing apparatus (8) of this invention. It is a schematic block diagram of the variation 2 of the near-field optical recording / reproducing apparatus (8) of this invention. It is a schematic block diagram of the variation 3 of the near-field optical recording / reproducing apparatus (8) of this invention. It is a schematic block diagram of the variation 4 of the near-field optical recording / reproducing apparatus (8) of this invention. It is a schematic block diagram of the near-field optical recording / reproducing apparatus (9) of this invention. It is a schematic block diagram of the variation 1 of the near-field optical recording / reproducing apparatus (9) of this invention. It is a schematic block diagram of the variation 2 of the near-field optical recording / reproducing apparatus (9) of this invention. It is a schematic block diagram of the variation 3 of the near-field optical recording / reproducing apparatus (9) of this invention. It is a block diagram of the near-field light slider which provided the optical waveguide in the slider end surface. It is a block diagram of a near-field light slider provided with a metal bow tie type head. It is a block diagram of the recording medium (2) used by this invention. It is a block diagram of the recording medium (3) used by this invention. It is a block diagram of the recording medium (4) used by this invention. It is a block diagram of the recording medium (5) used by this invention. It is a block diagram of the recording medium (6) used by this invention. It is a block diagram of the recording medium (7) used by this invention. It is a block diagram of the recording medium (8) used by this invention.

Explanation of symbols

10, 10A, 10B, 20, 30, 40, 50, 60, 70, 80A, 80B, 80C, 80D, 80E Near-field light slider 11, 21, 31, 41, 51, 61, 71, 81a, 81b, 81c 81d, 81e Substrate 12, 22, 26, 32, 36, 42, 52, 62, 72, 82a, 86a, 82b, 86b, 82c, 82c, 82e Metal films 13, 23, 27, 33, 37, 43, 47, 53, 63, 67, 73, 77, 83c, 87c, 83d, 87d, 83e, 87e Fine structure 14, 24, 28, 34, 38, 44, 48, 54, 64, 68, 74, 77, 84c , 88c Scattering source metal fine particles 15, 25, 29, 35, 39, 45, 49, 55, 65, 75, 85c, 89c Metal fine particle array 19, 59 Suspension 100, 00', 200,300,400,500,600,700,800 recording medium 101 substrate 102,202,302,402,502,602,702,802 recording layer 103 fine particle arrangement layer _{103a, 302a 1, 402a 1,} 502a _1, 602a, 702a, 802a metal particulates 103b, 203b, 302b, 402b, 502b, 802b dielectric 202a, 302a, 402a, 502a recording particulates 302a ₂ phase change material 402a _2, 602b organic dye material 502a _2, 702b photochromic material 111 , 211, 212, 221, 222, 311, 312, 411, 412, 511, 611, 612, 711, 712, 811, 812, 821, 822, 831, 832, 841, 842, 851, 852 11,921,931,941 laser source 115,515 objective lens 116,516 condensing lens 117,118,517,518 photodetector 119 bending mirror Ma, Mb, Mc, Md angle variable mirror

Claims (14)

  It is composed of an optically flat substrate, and has a function of generating surface plasmon or near-field light on a surface perpendicular to the surface of the recording medium of the substrate, and is periodically arranged to place the surface plasmon or proximity A near-field light slider characterized in that a parallel reproducing near-field light head composed of metal fine particle arrays that propagate and divide a wave excited by field light is formed. It is composed of an optically flat substrate, and has a function of generating surface plasmon or near-field light on a surface perpendicular to the surface of the recording medium of the substrate, and is arranged periodically and the surface plasmon or proximity A parallel reproducing near-field optical head composed of a row of fine metal particles that propagate and divide a wave excited by field light;
A near-field light slider, wherein a recording near-field light head having a function of generating surface plasmons or near-field light is formed on a vertical plane different from the vertical plane of the substrate.   3. The near-field light slider according to claim 2, wherein the surface on which the parallel reproduction near-field optical head of the substrate is formed and the surface on which the recording near-field optical head is formed are parallel to each other. A near-field light slider.   It is composed of an optically flat substrate, and has a function of generating surface plasmon or near-field light on a surface perpendicular to the surface of the recording medium of the substrate, and is periodically arranged to place the surface plasmon or proximity A parallel reproducing near-field optical head composed of a row of fine metal particles that propagates and divides waves excited by field light is formed, and has a function of generating surface plasmon or near-field light on the vertical plane A near-field light slider, wherein a near-field light head is formed.   It is composed of an optically flat substrate, and has a function of generating surface plasmon or near-field light on a surface parallel to the surface of the recording medium when facing the surface of the recording medium. A near-field light slider formed with a parallel reproducing near-field light head composed of metal fine particle arrays that propagate and divide a wave excited by field light. It is composed of an optically flat substrate and has a function of generating surface plasmon or near-field light on a surface parallel to the surface of the recording medium when facing the surface of the recording medium. A parallel reproducing near-field optical head composed of metal fine particle arrays that propagate and divide a wave excited by field light is formed, and has a function of generating surface plasmon or near-field light on the parallel plane. A near-field optical head is formed,
The near-field light slider, wherein the parallel reproduction near-field light head and the recording near-field light head are respectively disposed in the vicinity of opposing side end surfaces of the substrate. It is composed of an optically flat substrate and has a function of generating surface plasmon or near-field light on a surface parallel to the surface of the recording medium when facing the surface of the recording medium. A parallel reproducing near-field optical head composed of metal fine particle arrays that propagate and divide a wave excited by field light is formed, and has a function of generating surface plasmon or near-field light on the parallel plane. A near-field optical head is formed,
The near-field light slider, wherein the parallel reproduction near-field light head and the recording near-field light head are disposed in the vicinity of the same end face of the substrate. Using the near-field light slider according to any one of claims 1 to 7,
In the parallel reproducing near-field optical head, a near-field light slider characterized in that an interval between positions where the divided waves reach is larger than a wavelength in air of a light source to be used. Using the near-field light slider according to any one of claims 1 to 8,
In the parallel reproducing near-field optical head, the angle of the near-field light slider with respect to the track direction of the recording medium is tilted so that the interval between the positions where the divided waves reach coincides with the track interval of the recording medium. A near-field optical recording / reproducing apparatus. Using the near-field light slider according to claim 8,
A near-field optical recording / reproducing apparatus, wherein the parallel reproduction near-field optical head detects, by means of a photodetector array, light obtained by reading information on marks and pits recorded on the recording medium. Using the near-field light slider according to any one of claims 2 to 4, 6 and 7,
A near-field optical recording / reproducing apparatus having a function of irradiating light to either the parallel reproducing near-field optical head or the recording near-field optical head by switching light from one light source. Using the near-field light slider according to any one of claims 2 to 4, 6 and 7,
A parallel reproduction near-field optical head having a first light source for irradiating light to the parallel reproduction near-field optical head and a second light source for irradiating light to the recording near-field optical head; 1. A near-field optical recording / reproducing apparatus having a function of irradiating one or both of light.   13. The near-field optical recording / reproducing apparatus according to claim 11 or 12, wherein a prism is provided on the near-field light slider.   13. The near-field optical recording / reproducing apparatus according to claim 11 or 12, wherein a galvanometer mirror is provided on the near-field light slider.

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