JP2006073069A - 磁気ヘッド、ヘッドサスペンションアッセンブリ、および磁気再生装置 - Google Patents
磁気ヘッド、ヘッドサスペンションアッセンブリ、および磁気再生装置 Download PDFInfo
- Publication number
- JP2006073069A JP2006073069A JP2004253279A JP2004253279A JP2006073069A JP 2006073069 A JP2006073069 A JP 2006073069A JP 2004253279 A JP2004253279 A JP 2004253279A JP 2004253279 A JP2004253279 A JP 2004253279A JP 2006073069 A JP2006073069 A JP 2006073069A
- Authority
- JP
- Japan
- Prior art keywords
- film
- magnetic
- magnetic head
- layer
- bias voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
- G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Abstract
【解決手段】磁気ヘッドの基板4上にスパッタ法によりSi膜3を形成し、前記Si膜3上にバイアス電圧0VでのFCVA法により下層ta−C膜2を成膜することでSi膜3とのミキシングを防止する。さらに、下層ta−C膜2上に高バイアス電圧でのFCVA法により上層のta−C膜1を形成するようにする。これにより、優れた耐摩耗性を持つ保護膜を提供することができる。
【選択図】 図3
Description
特許文献1においてはFCVA法に加えてCVD法も併用しているために成膜装置が2つ必要である。よって量産性の低下やコスト増加などといった不具合を伴う。
Claims (7)
- 磁気記録媒体に近接して用いられる磁気ヘッドにおいて、
基板と、
この基板上に積層される密着層と、
この密着層上に積層され前記磁気記録媒体に対向する保護層とを具備し、
この保護層は、
前記密着層上に積層材料をFCVA(Filtered Cathodic Vacuum Arc)法により第1のバイアス電圧のもとで積層して形成される第1層と、
前記第1のバイアス電圧よりも高い第2のバイアス電圧のもとで前記積層材料を前記FCVA法により前記第1層よりも前記磁気記録媒体に近接して積層して形成される第2層とを備えることを特徴とする磁気ヘッド。 - 前記第1のバイアス電圧はアース電位であることを特徴とする請求項1に記載の磁気ヘッド。
- 前記密着層はSi膜であり、
前記保護層は、ta−C膜であることを特徴とする請求項1に記載の磁気ヘッド。 - 前記Si膜は、スパッタ法により前記基板上にSi元素を積層して形成されることを特徴とする請求項3に記載の磁気ヘッド。
- 前記第2層は、sp3結合のC元素を前記第1層よりも多く含むことを特徴とする請求項3に記載の磁気ヘッド。
- 請求項1乃至5のいずれかに記載の磁気ヘッドと、当該磁気ヘッドを磁気記録媒体の記録面に対向支持する支持機構とを具備することを特徴とするヘッドサスペンションアッセンブリ。
- 請求項6に記載のヘッドサスペンションアッセンブリを具備し、磁気記録媒体に記録された磁気的情報を前記磁気ヘッドを用いて読み取ることを特徴とする磁気再生装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004253279A JP2006073069A (ja) | 2004-08-31 | 2004-08-31 | 磁気ヘッド、ヘッドサスペンションアッセンブリ、および磁気再生装置 |
SG200504854A SG120241A1 (en) | 2004-08-31 | 2005-07-14 | Magnetic head head suspension assembly magnetic reproduction apparatus and method of manufacturing magnetic head |
US11/189,982 US7369357B2 (en) | 2004-08-31 | 2005-07-27 | Magnetic head, head suspension assembly, magnetic reproduction apparatus, and method of manufacturing magnetic head |
CNB200510087683XA CN100338651C (zh) | 2004-08-31 | 2005-07-29 | 磁头、磁头悬架组件、磁性再现设备以及制造磁头的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004253279A JP2006073069A (ja) | 2004-08-31 | 2004-08-31 | 磁気ヘッド、ヘッドサスペンションアッセンブリ、および磁気再生装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006073069A true JP2006073069A (ja) | 2006-03-16 |
Family
ID=35942676
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004253279A Pending JP2006073069A (ja) | 2004-08-31 | 2004-08-31 | 磁気ヘッド、ヘッドサスペンションアッセンブリ、および磁気再生装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7369357B2 (ja) |
JP (1) | JP2006073069A (ja) |
CN (1) | CN100338651C (ja) |
SG (1) | SG120241A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014520250A (ja) * | 2011-04-25 | 2014-08-21 | ウオーターズ・テクノロジーズ・コーポレイシヨン | 保護被膜を有するバルブ |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110058279A1 (en) * | 2009-07-31 | 2011-03-10 | Flint Eric | Overcoat having a low silicon/carbon ratio |
US20130163119A1 (en) * | 2010-09-07 | 2013-06-27 | National University Of Singapore | Head-Media Interface in a Hard Disk Drive |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0528465A (ja) * | 1991-07-19 | 1993-02-05 | Nippon Steel Corp | 磁気デイスク保護膜の製造方法 |
JPH05143931A (ja) * | 1991-11-25 | 1993-06-11 | Sumitomo Metal Ind Ltd | 薄膜磁気ヘツドの製造方法 |
JPH0644559A (ja) * | 1992-04-20 | 1994-02-18 | Nec Corp | 磁気ディスクおよびその製造方法 |
JPH0652511A (ja) * | 1992-07-31 | 1994-02-25 | Matsushita Electric Ind Co Ltd | 磁気ヘッドとその製造方法 |
EP0643385A3 (en) | 1993-09-12 | 1996-01-17 | Fujitsu Ltd | Magnetic recording medium, magnetic head and magnetic recording device. |
US5476691A (en) | 1994-01-21 | 1995-12-19 | International Business Machines, Inc. | Surface treatment of magnetic recording heads |
WO1995023878A1 (en) | 1994-03-03 | 1995-09-08 | Diamonex, A Unit Of Monsanto Company | Diamond-like carbon coated transducers for magnetic recording media |
WO1995027570A1 (en) | 1994-04-08 | 1995-10-19 | Ray Mark A | Selective plasma deposition |
US5901021A (en) * | 1995-05-19 | 1999-05-04 | Sanyo Electric Co., Ltd. | Thin-film magnetic head |
US6110329A (en) | 1996-06-25 | 2000-08-29 | Forschungszentrum Karlsruhe Gmbh | Method of manufacturing a composite material |
US6303214B1 (en) | 1999-04-14 | 2001-10-16 | Seagate Technology Llc | Magnetic recording medium with high density thin dual carbon overcoats |
JP3624843B2 (ja) | 2001-03-16 | 2005-03-02 | 株式会社島津製作所 | 保護膜および保護膜作成方法 |
US20040061976A1 (en) * | 2002-07-11 | 2004-04-01 | Masatoshi Nakayama | Thin-film magnetic head, method for producing the same and magnetic disk device having a slider using the same |
CN1282159C (zh) | 2002-07-11 | 2006-10-25 | Tdk股份有限公司 | 薄膜磁头,生成该薄膜的方法以及使用该薄膜的磁盘装置 |
JP2004213735A (ja) * | 2002-12-27 | 2004-07-29 | Toshiba Corp | 電子装置 |
WO2004077519A2 (en) * | 2003-02-27 | 2004-09-10 | Mukundan Narasimhan | Dielectric barrier layer films |
US7038890B2 (en) | 2003-07-29 | 2006-05-02 | Hitachi Global Storage Technologies Netherlands B.V. | Current perpendicular to the planes (CPP) sensor with a highly conductive cap structure |
US7280312B2 (en) | 2004-06-16 | 2007-10-09 | Tdk Corporation | Method for producing a protective thin film for a magnetic head |
CN2763884Y (zh) * | 2004-12-30 | 2006-03-08 | 鸿富锦精密工业(深圳)有限公司 | 资料存取器固定装置 |
US20060159844A1 (en) * | 2005-01-18 | 2006-07-20 | Fuji Photo Film Co., Ltd. | Process and apparatus for producing magnetic recording medium |
JP2007149158A (ja) * | 2005-11-24 | 2007-06-14 | Shinka Jitsugyo Kk | スライダおよびスライダの製造方法 |
-
2004
- 2004-08-31 JP JP2004253279A patent/JP2006073069A/ja active Pending
-
2005
- 2005-07-14 SG SG200504854A patent/SG120241A1/en unknown
- 2005-07-27 US US11/189,982 patent/US7369357B2/en not_active Expired - Fee Related
- 2005-07-29 CN CNB200510087683XA patent/CN100338651C/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014520250A (ja) * | 2011-04-25 | 2014-08-21 | ウオーターズ・テクノロジーズ・コーポレイシヨン | 保護被膜を有するバルブ |
US10428967B2 (en) | 2011-04-25 | 2019-10-01 | Waters Technologies Corporation | Valves having protective coatings |
Also Published As
Publication number | Publication date |
---|---|
CN100338651C (zh) | 2007-09-19 |
SG120241A1 (en) | 2006-03-28 |
US20060044679A1 (en) | 2006-03-02 |
US7369357B2 (en) | 2008-05-06 |
CN1744199A (zh) | 2006-03-08 |
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