JP2006068859A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006068859A5 JP2006068859A5 JP2004256538A JP2004256538A JP2006068859A5 JP 2006068859 A5 JP2006068859 A5 JP 2006068859A5 JP 2004256538 A JP2004256538 A JP 2004256538A JP 2004256538 A JP2004256538 A JP 2004256538A JP 2006068859 A5 JP2006068859 A5 JP 2006068859A5
- Authority
- JP
- Japan
- Prior art keywords
- guide
- recess
- sliding
- cylindrical
- contact plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (2)
および、
前記軸受ハウジング材(304)を支持する中央が円筒状体(309a)の主軸ハウジング材(309)、該主軸ハウジング材の中央円筒状体(309a)内に設けられた上方部にフランジ部(306a)を備える主軸(306)、該主軸を水平方向に回転させる回転機構(305)、該主軸(306)上に該主軸の軸心(306c)と前記空気軸受の円筒状回転体の軸心(302a)とが同一直線上の位置に在るように前記主軸を軸受するころがり軸受(307)、主軸上部に設けられたフランジ部(306a)側壁外面に水平方向に固定され、かつ、主軸(306)回転時に前記円板状案内板(308)の凹部(308a)壁に触れてロ−タリ−テ−ブルの円筒状回転体(302)を回転させる1対の案内ピン(306b)、を備える主軸装置(310)、
よりなるロ−タリ−テ−ブル装置(3)。 A cylindrical rotating body (302) is housed inside the cylindrical outer fixing portion (301) in a non-contact manner so that the upper and lower portions protrude from the cylindrical outer fixing portion, and the outer side of the cylindrical rotating body and the cylindrical outer side are arranged. An air bearing that supplies compressed air from a supply pipe (303) to a narrow gas passage formed between the inside of the fixed portion and supports the cylindrical rotating body in a non-contact manner on the cylindrical fixed portion, and an outer periphery of the side wall of the air bearing And a bearing housing member (304) surrounding the bottom, a disc-shaped guide plate (308) having two concave portions (308a) symmetrically on the bottom fixed to the lower part of the cylindrical rotating body (302), the cylinder A rotary table (300) comprising a round electromagnetic chuck (3a) fixed to the upper portion of the cylindrical rotating body (302),
and,
The spindle housing material (309) having a cylindrical body (309a) at the center for supporting the bearing housing material (304), and a flange portion (306a) at an upper portion provided in the central cylindrical body (309a) of the spindle housing material. ), A rotation mechanism (305) for rotating the main shaft in the horizontal direction, an axis (306c) of the main shaft on the main shaft (306), and an axis of the cylindrical rotating body of the air bearing ( 302a) is a roller bearing (307) for bearing the main shaft so that the main shaft (306a) is located on the same straight line, a flange portion (306a) provided on the upper portion of the main shaft is fixed horizontally to the outer surface of the side wall, and the main shaft (306) And a pair of guide pins (306b) for rotating the rotary table (302) of the rotary table by touching the recess (308a) wall of the disc-shaped guide plate (308) during rotation. main Device (310),
A rotary table device (3).
前記ガイド本体(100)は、ベッド(11)の上面に左右対称に4条の突起体(12a,12b,12c,12d)を設けて3条の凹部(13a,13b,13c)を設け、外側の突起体(12a,12d)の上面に当て板(14a,14b)を内方に向けて前記第一凹部(13a)と第三凹部(13c)の上方一部を塞ぐように敷設して第一凹部レ−ル(13a)と第二凹部レ−ル(13c)を設けたガイド本体(100)であり、
スライド本体(200)は、そのテ−ブル(21)下面に前記ガイド本体(100)に設けられた内側の突起体(12b,12c)の上面に当接するとともに、ガイド本体(100)に設けられた当て板(14a,14b)の内側面に外側面が対向する突起体(22a,22b)を左右対称に設け、更にその突起体(22a,22b)の下面途中より外側に向けてガイド本体(100)の第一凹部(13a)と第三凹部(13c)の両側面に側面が対向する当て板(23a,23b)を敷設した段部脚構造のスライド本体(200)であり、
前記ガイド本体(100)の第二突起体(12b)、第三突起体(12c)の上面と、スライド本体(200)の突起体(22a,22b)の下面が当接する面で第一摺動面(31,31)を、
前記ガイド本体(100)の当て板(14a,14b)の下面と、スライド本体(200)の当て板(23a,23b)の上面が当接する面で第二摺動面(32,32)を、
前記ガイド本体(100)の当て板(14a,14b)の内側面と、スライド本体(200)の突起体(22a,22b)の外側面が対向する面で第三摺動面(33,33)を、
前記ガイド本体(100)の第一凹部(13a)を形成する第二突起体(12b)の内側面とスライド本体(200)の当て板(23a)の左側面が対向する面で第四摺動面(34a)を、および前記ガイド本体(100)の第三凹部(13c)を形成する第三突起体(12c)の内側面とスライド本体(200)の当て板(23b)の右側面が対向する面で第四摺動面(34b)を、
前記ガイド本体(100)の第一凹部(13a)を形成する第一突起体(12a)の左側面とスライド本体(200)の当て板(23a)の右側面が対向する面で第五摺動面(35a)を、および前記ガイド本体(100)の第三凹部(13c)を形成する第四突起体(12d)の右側面とスライド本体(200)の当て板(23b)の左側面が対向する面で第五摺動面(35b)を設け、
前記スライド本体(200)の第一摺動面(31)を形成する(突起体22a,22b)の下面に油ポケット(41,41)を、第二摺動面(32)を形成する当て板(23a,23b)の上面に油ポケット(42,42)を、第三摺動面(33)を形成する第一および第二突起体(22a,22b)の外側面に油ポケット(43,43)を、第四摺動面(34)を形成する当て板(23a,23b)の外側面に油ポケット(44,44)を適宜な位置に設けて成る、
静圧直動案内機構(60)であることを特徴とする、ロ−タリ−研削装置(1)。
The rotary table device (3) according to claim 1 and a grinding wheel head (5) capable of moving up and down in a vertical direction with respect to the round electromagnetic chuck (3a) of the rotary table device (5). ) In a rotary grinding apparatus (1) comprising a grinding table (2) provided with a tool table (200) movably installed in the front-rear direction, the tool table (200) includes: A slide body (200) having an oil pocket on a sliding surface that slides in a non-contact manner on a guide body (100) having a pair of rail portions (13a, 13c) on the upper surface. The guide body (100) and the slide body (200) to constitute a static pressure linear motion guide device (60),
The guide body (100) is provided with four protrusions (12a, 12b, 12c, 12d) symmetrically on the upper surface of the bed (11), and three recesses (13a, 13b, 13c). The protrusions (12a, 12d) are laid on the upper surface of the first recesses (13a) and the third recesses (13c) so that the contact plates (14a, 14b) face inward so as to close the upper portions. A guide body (100) provided with one recess rail (13a) and a second recess rail (13c);
The slide body (200) abuts on the lower surface of the table (21) on the upper surface of the inner projections (12b, 12c) provided on the guide body (100) and is provided on the guide body (100). Protruding bodies (22a, 22b) whose outer surfaces face the inner side surfaces of the contact plates (14a, 14b) are symmetrically provided, and further guide bodies (22a, 22b) are directed outward from the middle of the lower surface of the projecting bodies (22a, 22b). 100) a slide body (200) having a stepped leg structure in which side plates are opposed to both side surfaces of the first recess (13a) and the third recess (13c).
First sliding is performed on the surface where the upper surfaces of the second protrusion (12b) and the third protrusion (12c) of the guide body (100) and the lower surface of the protrusions (22a, 22b) of the slide body (200) abut. The surface (31, 31)
The second sliding surface (32, 32) is a surface where the lower surface of the contact plate (14a, 14b) of the guide body (100) and the upper surface of the contact plate (23a, 23b) of the slide body (200) abut.
A third sliding surface (33, 33) is a surface where the inner surface of the contact plate (14a, 14b) of the guide body (100) and the outer surface of the protrusion (22a, 22b) of the slide body (200) face each other. The
The fourth sliding is performed on the surface where the inner surface of the second protrusion (12b) forming the first recess (13a) of the guide body (100) and the left surface of the contact plate (23a) of the slide body (200) face each other. The inner surface of the third protrusion (12c) forming the surface (34a) and the third recess (13c) of the guide body (100) and the right side surface of the contact plate (23b) of the slide body (200) are opposed to each other. The fourth sliding surface (34b)
Fifth sliding is performed between the left side surface of the first protrusion (12a) forming the first recess (13a) of the guide body (100) and the right side surface of the contact plate (23a) of the slide body (200). The right side surface of the fourth protrusion (12d) forming the surface (35a) and the third recess (13c) of the guide body (100) and the left side surface of the contact plate (23b) of the slide body (200) face each other. A fifth sliding surface (35b) is provided on the surface to be
An oil pocket (41, 41) is formed on the lower surface of the projections (22a, 22b) forming the first sliding surface (31) of the slide body (200), and a contact plate is formed on the second sliding surface (32). Oil pockets (42, 42) on the upper surface of (23a, 23b), and oil pockets (43, 43) on the outer surfaces of the first and second protrusions (22a, 22b) forming the third sliding surface (33). ), Oil pockets (44, 44) are provided at appropriate positions on the outer surface of the contact plate (23a, 23b) forming the fourth sliding surface (34).
A rotary grinding apparatus (1), which is a static pressure linear motion guide mechanism (60).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004256538A JP4580717B2 (en) | 2004-09-03 | 2004-09-03 | Rotary table device and rotary grinding device including the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004256538A JP4580717B2 (en) | 2004-09-03 | 2004-09-03 | Rotary table device and rotary grinding device including the same |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006068859A JP2006068859A (en) | 2006-03-16 |
JP2006068859A5 true JP2006068859A5 (en) | 2007-10-18 |
JP4580717B2 JP4580717B2 (en) | 2010-11-17 |
Family
ID=36149988
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004256538A Expired - Fee Related JP4580717B2 (en) | 2004-09-03 | 2004-09-03 | Rotary table device and rotary grinding device including the same |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4580717B2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102009356B (en) * | 2010-12-31 | 2012-05-16 | 西安交通大学苏州研究院 | Precision-machined tool static pressure guiding device with composite structure |
JP5739480B2 (en) | 2013-06-21 | 2015-06-24 | ファナック株式会社 | Machine tool having anti-scatter cover |
CN105127764A (en) * | 2015-10-10 | 2015-12-09 | 太仓金凡机械制造有限公司 | Machine tool base |
CN114293211B (en) * | 2021-12-30 | 2023-09-05 | 深圳康诚博信科技有限公司 | Ozone generator with rapid disassembly and assembly structure and preparation method of cathode prefabricated film of ozone generator |
CN114753838B (en) * | 2022-03-29 | 2023-03-10 | 苏州常威机械有限公司 | Multifunctional rotary table for coal mining machine |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05337765A (en) * | 1992-06-05 | 1993-12-21 | Toshiba Mach Co Ltd | Super-precision indexing device |
JPH0752038A (en) * | 1993-08-19 | 1995-02-28 | Nagase Integrex:Kk | Rotary grinding machine |
JP2003071666A (en) * | 2001-08-30 | 2003-03-12 | Toshiba Mach Co Ltd | Rotary table device of machine tool |
-
2004
- 2004-09-03 JP JP2004256538A patent/JP4580717B2/en not_active Expired - Fee Related
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2005195072A5 (en) | ||
JP2006068859A5 (en) | ||
JP2001507293A (en) | Linear drive system for chemical mechanical polishing | |
JP3993856B2 (en) | Double-head surface grinding machine | |
DE502008003344D1 (en) | surface grinding machine | |
JP2007260783A (en) | Polishing surface plate, apparatus and method of surface polishing | |
KR101854647B1 (en) | Rotary type vacuum table using air bearing | |
TWI412424B (en) | Supporting bearing | |
JP5627114B2 (en) | Thin plate workpiece grinding method and double-head surface grinding machine | |
JP4580717B2 (en) | Rotary table device and rotary grinding device including the same | |
ID30452A (en) | TOOLS FOR ROTATING EQUIPMENT | |
KR200419610Y1 (en) | Polishing roller device of stainless steel polishing machine | |
CN208265181U (en) | Support device | |
JP2003019648A (en) | Double ended grinding machine | |
JP3230149B2 (en) | Double-side grinding machine for thin disk-shaped work | |
JP2006102867A5 (en) | ||
JPH11854A (en) | Machining method for wafer and surface grinding machine | |
JP2006181697A (en) | Surface polishing device and method | |
JP4210003B2 (en) | Flat lapping machine | |
JP2000198068A (en) | Sheet type polishing machine | |
JP4425240B2 (en) | Moving device and plane polishing machine using planetary gear mechanism | |
KR20150018040A (en) | plural grinding wheel have processing device for bearing | |
CN203579348U (en) | Grinding mechanism of wall grinding machine | |
JP4589558B2 (en) | Work posture adjustment device | |
JPS6346222Y2 (en) |