JP2006066082A - Anisotropic conductive connector, adapter device, as well as electric inspection device of circuit device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an anisotropic conductive connector and an adapter device capable of surely attaining electric connection to each of electrodes with necessary insulation secured between them, even for the electrodes with a small separation interval and fluctuation in height, as well as an electric inspection device of a circuit device equipped with the same. <P>SOLUTION: The anisotropic conductive connector is provided with a complex conductive sheet consisting of a resin insulating sheet having a plurality of openings; an insulating film arranged so as to block each opening of the insulating sheet, made of an elastic polymer substance supported by the insulating sheet; a complex conductive sheet composed of a plurality of rigid conductor extended in a thickness direction of the insulating film, fixed to and supported by the insulation film, arranged so as to be positioned inside each opening of the insulating sheet; and a first and a second anisotropic conductive elastomer sheets arranged on one and the other face of the complex conductive sheet. Each rigid conductor is made free to deform in a thickness direction of the insulating sheet by elasticity of the insulating film. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an anisotropic conductive connector that can be suitably used for electrical inspection of a circuit device such as a printed circuit board, an adapter device including the same, and an electrical inspection device for a circuit device including the adapter device. It is about.

In general, for circuit boards for configuring or mounting electronic components such as package LSIs such as BGA and CSP, MCM, and other integrated circuit devices, before assembling the electronic components or before mounting the electronic components In order to confirm that the wiring pattern of the circuit board has the desired performance, it is necessary to inspect its electrical characteristics.
Conventionally, as a method of performing an electrical inspection of a circuit board, a test electrode device in which a plurality of test electrodes are arranged according to lattice point positions arranged vertically and horizontally, and a circuit board to be inspected on the test electrodes of this test electrode device A method of using a combination with an adapter for electrically connecting the electrodes to be inspected is known. The adapter used in this method is a printed wiring board called a pitch conversion board.
This adapter has a plurality of connection electrodes arranged in accordance with a pattern corresponding to the inspection target electrode of the circuit board to be inspected on one surface, and a lattice point having the same pitch as the inspection electrode of the inspection electrode device on the other surface. A plurality of terminals having a plurality of terminal electrodes arranged at positions, and comprising a current supply connection electrode and a voltage measurement connection electrode arranged in accordance with a pattern corresponding to an electrode to be inspected on a circuit board to be inspected on one side Are known, and the other adapter has, for example, a plurality of terminal electrodes arranged at lattice point positions at the same pitch as the inspection electrodes of the inspection electrode device on the other surface. It is used for an open / short test of each circuit on a circuit board, and the latter adapter is used for an electrical resistance measurement test for each circuit on the circuit board.
Therefore, in the electrical inspection of a circuit board, generally, in order to achieve a stable electrical connection between the circuit board to be inspected and the adapter, a connector is provided between the circuit board to be inspected and the adapter. As an example, an anisotropic conductive elastomer sheet is interposed.

This anisotropically conductive elastomer sheet has conductivity only in the thickness direction, or has a number of pressurized conductive portions that show conductivity only in the thickness direction when pressed.
As such an anisotropically conductive elastomer sheet, those having various structures are conventionally known. For example, in Patent Document 1, conductive particles exhibiting magnetism are arranged in the thickness direction in an elastic polymer substance. An anisotropic conductive elastomer sheet (hereinafter referred to as “dispersed anisotropic conductive sheet”) that is contained in a state in which a chain is formed by orientation and the chain of the conductive particles is dispersed in the plane direction. ) Is disclosed, and Patent Document 2 insulates a plurality of conductive path forming portions extending in the thickness direction from each other by dispersing non-uniformly conductive particles exhibiting magnetism in an elastic polymer material. An anisotropic conductive elastomer sheet formed with an insulating portion (hereinafter referred to as an “unevenly anisotropic conductive sheet”) is disclosed, and Patent Document 3 discloses the surface of the conductive path forming portion and the insulating portion. There is a step between Made the uneven distribution type anisotropically conductive sheet is disclosed.
These anisotropically conductive elastomer sheets are, for example, in the thickness direction with respect to a molding material layer in which conductive particles exhibiting magnetism are contained in a liquid polymer substance-forming material that is cured to become an elastic polymer substance. It is obtained by performing a curing treatment while applying a magnetic field to or after applying a magnetic field. In this anisotropic conductive elastomer sheet, the conductive particles are contained in a base material made of an elastic polymer substance in a state in which the conductive particles are aligned in a thickness direction to form a chain, and are pressed in the thickness direction. Thus, a conductive path is formed by a chain of conductive particles.

And comparing the dispersion-type anisotropic conductive sheet and the uneven distribution-type anisotropic conductive sheet, the dispersion-type anisotropic conductive sheet can be manufactured at a low cost without using a special and expensive mold. This is advantageous compared to the unevenly distributed anisotropic conductive sheet in that it can be used regardless of the pattern of electrodes to be connected and has versatility.
On the other hand, since the unevenly anisotropic anisotropic conductive sheet is formed with an insulating portion that insulates them from each other between adjacent conductive path forming portions, the connection object with a small separation distance between adjacent electrodes is also adjacent. Compared to the dispersive anisotropic conductive sheet in terms of performance that can achieve electrical connection to each of the electrodes in a state where necessary insulation is ensured between the electrodes to be performed, that is, high resolution. It is advantageous.
Thus, in order to improve the resolution of the dispersed anisotropic conductive sheet, it is important to reduce the thickness of the dispersed anisotropic conductive sheet.
However, the anisotropic conductive elastomer sheet having a small thickness absorbs unevenness in the height level of each electrode to be connected, and can achieve electrical connection to each of the electrodes, that is, absorbs unevenness. There is a problem that performance is low. Specifically, the unevenness-absorbing ability of the anisotropic conductive elastomer sheet is about 20% of the thickness of the anisotropic conductive elastomer sheet. For example, in the anisotropic conductive elastomer sheet having a thickness of 100 μm, the height of the electrode is high. A stable electrical connection can be achieved even for a connection object having a thickness variation of about 20 μm. However, in the anisotropic conductive elastomer sheet having a thickness of 50 μm, the variation in the height level of the electrode is 10 μm. It is difficult to achieve stable electrical connection for objects to be connected that exceed.

In order to solve such a problem, a composite conductive sheet in which a movable conductor is supported so as to be movable in the thickness direction with respect to the insulating sheet in a tapered through hole formed in the insulating sheet, and this An anisotropic conductive connector composed of two anisotropic conductive elastomer sheets disposed on one side and the other side of a composite conductive sheet has been proposed (see, for example, Patent Document 4).
According to such an anisotropic conductive connector, since the movable electrode in the composite conductive sheet is movable in the thickness direction, when pressed in the thickness direction, the one side and the other side of the composite conductive sheet Since the two anisotropically conductive elastomer sheets arranged in each are compressed and deformed in conjunction with each other, the sum of the unevenness absorption capacity of both is expressed as the unevenness absorption capacity of the anisotropically conductive connector, and thus high unevenness absorption Performance.
In addition, the thickness necessary to obtain the required unevenness absorbing capacity may be ensured by the total thickness of the two anisotropic conductive elastomer sheets, and each anisotropic conductive elastomer sheet has a small thickness. Since it can be used, high resolution can be obtained.

However, the anisotropic conductive connector described above has the following problems in practice.
In the anisotropic conductive connector described above, the movable conductor of the composite conductive sheet is formed by depositing metal in a tapered through hole formed in the insulating sheet by plating to form a metal body. By pressing, it is obtained by separating the metal body adhered to the inner surface of the through hole. However, when manufacturing an anisotropic conductive connector having a large number of movable conductors, it is difficult to reliably separate all the metal bodies formed on the insulating sheet from the inner surface of the insulating sheet. If some of the functions of the movable conductor fail, and once it is separated from the through hole of the insulating sheet and made into a movable conductor, the movable conductor is insulated during use of the anisotropic conductive connector. As a result, the function as a movable conductor is lost as a result of being fitted into the through hole of the conductive sheet, so that the required unevenness absorbing ability cannot be maintained.

JP 51-93393 A Japanese Patent Laid-Open No. 53-147772 JP-A-61-250906 JP 2001-351702 A

The present invention has been made based on the circumstances as described above, and a first object of the present invention is also for a connection object having a small separation distance between adjacent electrodes and variations in the height level of the electrodes. Another object of the present invention is to provide an anisotropic conductive connector that can reliably achieve electrical connection to each of the electrodes in a state where necessary insulation is ensured between adjacent electrodes.
The second object of the present invention is that even if the circuit device to be inspected has a small separation distance between the adjacent electrodes to be inspected and the height level of the electrodes to be inspected varies, An object of the present invention is to provide an adapter device that can reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between the inspection electrodes.
A third object of the present invention is to provide a circuit device that is an object to be inspected even if the distance between adjacent electrodes to be inspected is small and the height level of the electrodes to be inspected varies. It is an object of the present invention to provide an electrical inspection device for a circuit device that can reliably perform a required electrical inspection for the circuit device.

An anisotropic conductive connector according to the present invention includes an insulating sheet made of a resin having a plurality of openings, an insulating sheet made of an elastic polymer material disposed so as to close each opening of the insulating sheet and supported by the insulating sheet. A composite conductive sheet composed of a plurality of rigid conductors extending in the thickness direction of the insulating film, and a film, and fixedly supported by the insulating film and disposed in the opening of the insulating sheet;
A first anisotropic conductive elastomer sheet disposed on one surface of the composite conductive sheet; and a second anisotropic conductive elastomer sheet disposed on the other surface of the composite conductive sheet. ,
Each of the rigid conductors in the composite conductive sheet can be displaced in the thickness direction with respect to the insulating sheet by the elasticity of the insulating film.

In the anisotropic conductive connector of the present invention, each of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet has a thickness of conductive particles exhibiting magnetism in the elastic polymer material. It is preferable that the conductive particles are contained in a state in which chains are formed by being aligned in the direction and dispersed in the plane direction.
In such an anisotropic conductive connector, it is preferable that the thickness of each of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet is 20 to 100 μm.
Moreover, it is preferable that the number average particle diameter of electroconductive particle is 3-20 micrometers.

The adapter device of the present invention has an adapter body having a connection electrode region in which a plurality of connection electrodes are formed in accordance with a pattern corresponding to an electrode to be inspected in a circuit device to be inspected on the surface;
The anisotropic conductive connector having a plurality of rigid conductors arranged in accordance with a pattern corresponding to the connection electrode in the adapter body, disposed on the connection electrode region of the adapter body. Features.

The adapter device according to the present invention has a plurality of connection electrode pairs each formed of two connection electrodes for current supply and voltage measurement according to a pattern corresponding to an electrode to be inspected in a circuit device to be inspected on the surface. An adapter body having a connecting electrode region;
The anisotropic conductive connector having a plurality of rigid conductors arranged in accordance with a pattern corresponding to the connection electrode in the adapter body, disposed on the connection electrode region of the adapter body. Features.

  An electrical inspection device for a circuit device according to the present invention comprises the adapter device described above.

According to the anisotropic conductive connector of the present invention, each of the rigid conductors in the composite conductive sheet is displaceable in the thickness direction with respect to the insulating sheet by the elasticity of the insulating film. When pressed in the thickness direction by the electrode, the first anisotropic conductive elastomer sheet disposed on one side of the composite conductive sheet and the second anisotropic conductive disposed on the other side of the composite conductive sheet Since the elastomer sheet compresses and deforms in conjunction with each other when the rigid conductor is displaced, the sum of the irregularity absorbing ability of both is expressed as the irregularity absorbing capacity of the anisotropic conductive connector, and thus obtains a high irregularity absorbing capacity. be able to.
In addition, the thickness necessary for obtaining the required unevenness absorbing capability may be ensured by the total thickness of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet. Since a thing with small thickness can be used as a property elastomer sheet, high resolution can be obtained.
Further, since each of the rigid conductors is fixedly supported by the insulating film, there is no problem in the displacement function of the rigid conductors during the production of the composite conductive sheet or the use of the anisotropic conductive connector.
Therefore, even for a connection object in which the separation distance between adjacent electrodes is small and the height level of the electrodes varies, electrical connection to each of the electrodes is performed in a state where necessary insulation is ensured between the adjacent electrodes. Connection can be reliably achieved.

  According to the adapter device of the present invention, since the anisotropic conductive connector is provided, the circuit device to be inspected has a small separation distance between adjacent inspected electrodes, and the height level of the inspected electrodes Even if there is a variation, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between adjacent electrodes to be inspected.

  According to the electrical inspection device for a circuit device of the present invention, since the adapter device is provided, the circuit device to be inspected has a small separation distance between adjacent electrodes to be inspected, and the height of the electrodes to be inspected is high. Even if there are variations in level, the required electrical inspection can be reliably executed for the circuit device.

Hereinafter, embodiments of the present invention will be described in detail.
<Anisotropic conductive connector>
FIG. 1 is an explanatory cross-sectional view showing a configuration of an example of the anisotropic conductive connector of the present invention, and FIG. 2 is an explanatory cross-sectional view showing an enlarged main part of the anisotropic conductive connector shown in FIG. is there. The anisotropic conductive connector 10 includes a composite conductive sheet 11, a first anisotropic conductive elastomer sheet 16 disposed on one surface (upper surface in FIG. 1) of the composite conductive sheet 11, and a composite conductive sheet. 11 and the second anisotropic conductive elastomer sheet 17 disposed on the other surface.

  The composite conductive sheet 11 has an insulating sheet 12 made of a resin in which a plurality of openings 13 are formed. An integrated insulating film 14 made of an elastic polymer material is provided on the insulating sheet 12 with the insulating property. It arrange | positions so that all the openings 13 of the sheet | seat 12 may be block | closed, and is supported by adhere | attaching the said insulating sheet 12 integrally. In the insulating film 14, a plurality of rigid conductors 15 extending in the thickness direction of the insulating film 14 are provided according to a specific pattern at locations located in the opening 13 of the insulating sheet 12. In the illustrated example, each of the one end portion 15a and the other end portion 15b of the rigid conductor 15 is formed so as to protrude from one surface and the other surface of the insulating film 14, and each of the one end portion 15a and the other end portion 15b has a diameter. The diameter of the central portion 15c embedded in the insulating film 14 is larger. The specific pattern in the rigid conductor 15 is a pattern corresponding to an electrode to be connected, for example, an inspected electrode of a circuit device to be inspected. Each of the rigid conductors 15 can be displaced in the thickness direction with respect to the insulating sheet 12 by the elasticity of the insulating film 14.

Examples of the material constituting the insulating sheet 12 include resin materials such as liquid crystal polymer, polyimide resin, polyester resin, polyaramid resin, and polyamide resin, glass fiber reinforced epoxy resin, glass fiber reinforced polyester resin, and glass fiber reinforced polyimide resin. For example, a fiber-reinforced resin material such as an epoxy resin or a composite resin material containing an inorganic material such as alumina or poron nitride as a filler can be used.
Further, when the anisotropic conductive connector 10 is used in a high temperature environment, it is preferable to use the insulating sheet 12 having a linear thermal expansion coefficient of 3 × 10 ⁻⁵ / K or less, more preferably 1 × 10 ^{−6 to} 2 × 10 ⁻⁵ / K, particularly preferably 1 × 10 ^{−6 to} 6 × 10 ⁻⁶ / K. By using such an insulating sheet 12, the displacement of the rigid conductor 15 due to the thermal expansion of the insulating film 14 can be suppressed.
Moreover, it is preferable that the thickness of the insulating sheet 12 is 10-200 micrometers, More preferably, it is 15-100 micrometers.

As a material constituting the insulating film 14, a polymer substance having a crosslinked structure is preferable. Various materials can be used as the curable polymer substance-forming material that can be used to obtain such an elastic polymer substance. Specific examples thereof include polybutadiene rubber, natural rubber, and polyisoprene rubber. , Conjugated diene rubbers such as styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, blocks such as styrene-butadiene-diene block copolymer rubber, styrene-isoprene block copolymer Examples include copolymer rubber and hydrogenated products thereof, chloroprene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene-diene copolymer rubber. In these, it is preferable to use a silicone rubber from a viewpoint of durability, a moldability, and an electrical property.
As the silicone rubber, those obtained by crosslinking or condensing liquid silicone rubber are preferable. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of a condensation type, an addition type, a vinyl group or a hydroxyl group. Good. Specific examples include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, methyl phenyl vinyl silicone raw rubber, and the like.
The silicone rubber preferably has a molecular weight Mw (referred to as a standard polystyrene-converted weight average molecular weight; the same shall apply hereinafter) of 10,000 to 40,000. Moreover, since favorable heat resistance is obtained for the insulating film 14 obtained, the molecular weight distribution index (the value of the ratio Mw / Mn between the standard polystyrene equivalent weight average molecular weight Mw and the standard polystyrene equivalent number average molecular weight Mn. .) Is preferably 2 or less.
Moreover, it is preferable that the thickness of the insulating film 14 is 15-500 micrometers, More preferably, it is 20-400 micrometers.

As the material constituting the rigid conductor 15, a metal material having rigidity can be suitably used. Specific examples thereof include simple metals such as nickel, cobalt, copper, gold, and aluminum, or alloys thereof. Can do.
Moreover, it is preferable that each diameter of the one end part 15a and the other end part 15b in the rigid conductor 15 is 70 to 150% of the diameter of the electrode to be connected, for example, the electrode to be inspected.
Moreover, the diameter of the center part 15c in the rigid conductor 15 should just be smaller than each diameter of the one end part 15a and the other end part 15b, However For example, it is preferable that it is 20-120 micrometers.
Moreover, it is preferable that the protrusion height from the insulating film 14 in the one end part 15a and the other end part 15b of the rigid conductor 15 is 5-100 micrometers.

Such a composite conductive sheet 11 can be manufactured as follows, for example. First, as shown in FIG. 3, an appropriate support plate 36 is prepared, and a coating material 14B is formed on the support plate 36 by applying a liquid polymer material forming material that is cured to become an elastic polymer material. To do. Thereafter, as shown in FIG. 4, an insulating sheet 12 having an opening 13 is disposed on the surface of the coating film 14 </ b> B, and a polymer substance forming material is further applied so as to close the opening 13 of the insulating sheet 12. Thereby, as shown in FIG. 5, the insulating film material layer 14A having a shape corresponding to the shape of the insulating film 14 to be formed is formed. Then, by curing the insulating film material layer 14A, the insulating film 14 is formed in the insulating sheet 12 so as to close each of the openings 13 as shown in FIG.
In the above, a printing method such as screen printing, a roll coating method, a blade coating method, or the like can be used as a method for applying the polymer substance forming material.
The curing process of the insulating film material layer 14A is usually performed by a heat treatment. The specific heating temperature and heating time are appropriately set in consideration of the type of polymer substance forming material constituting the insulating film material layer 14A.

Next, in the insulating film 14 formed on the insulating sheet 12, as shown in FIG. 7, a plurality of through holes penetrating in the thickness direction of the insulating film 14 according to the pattern corresponding to the pattern of the rigid conductor 15 to be formed. 15H is formed. Thereafter, as shown in FIG. 8, a thin metal layer 18 is formed on the entire surface of one surface and the other surface of the insulating film 14 and the entire inner wall surface of each through hole 15H of the insulating film 14, and as shown in FIG. A resist film 37 having a plurality of pattern holes 37 </ b> H communicating with the through holes 15 </ b> H of the insulating film 14 is formed on the surface of a portion of the metal thin layer 18 that is in contact with one surface of the insulating film 14, and the metal thin layer 18 is insulated. A resist film 38 having a plurality of pattern holes 38H communicating with the through holes 15H of the insulating film 14 is formed on the surface of the portion in contact with the other surface of the film 14. Then, an electrolytic plating process is performed using the thin metal layer 18 as a common electrode to deposit metal on the exposed portion of the thin metal layer 18, and the pattern hole 37H, the resist film 37, 38 in the through hole 15H and the resist film 37, 38 are formed. By filling the metal in 38H, a rigid conductor 15 extending in the thickness direction of the insulating film 14 is formed as shown in FIG. Thereafter, each of the resist films 37 and 38 is removed, and further, an etching process is performed to remove the thin metal layer 18, whereby the composite conductive sheet 11 as shown in FIG. 11 is obtained.
In the above, as a method of forming the through hole 15H in the insulating film 14, a racer processing method can be used.
Further, as a method of forming the thin metal layer 18 on the insulating film 14, an electroless plating method can be used.
Moreover, it is preferable that the thickness of the metal thin layer 18 is 0.2-10 micrometers.

In the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 in this example, the conductive particles P exhibiting magnetism are in the thickness direction in the insulating elastic polymer material. The chain is formed in such a state that a chain is formed by being oriented so that the chain is formed, and the chain of the conductive particles P is dispersed in the plane direction.
Examples of the elastic polymer material forming the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17 include the elastic polymer material constituting the insulating film 14 in the composite conductive sheet 11 described above. What was illustrated can be used.

As the conductive particles P contained in the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17, the particles can be easily aligned in the thickness direction by a method described later. For this reason, conductive particles exhibiting magnetism are used. Specific examples of such conductive particles include particles of metal having magnetism such as iron, cobalt, nickel, particles of these alloys, particles containing these metals, or these particles as core particles, The core particles are formed by plating the surface of the core particles with a metal having good conductivity such as gold, silver, palladium, rhodium, or non-magnetic metal particles or inorganic particles such as glass beads or polymer particles. The surface of the particles may be plated with a conductive magnetic metal such as nickel or cobalt.
Among these, it is preferable to use nickel particles as core particles and the surfaces thereof plated with gold having good conductivity.
The means for coating the surface of the core particles with the conductive metal is not particularly limited, and for example, chemical plating or electrolytic plating, sputtering, vapor deposition or the like is used.

When the conductive particles P used are those in which the surface of the core particles is coated with a conductive metal, good conductivity can be obtained. Therefore, the coverage of the conductive metal on the particle surface (the surface area of the core particles) The ratio of the covering area of the conductive metal with respect to is preferably 40% or more, more preferably 45% or more, and particularly preferably 47 to 95%.
Further, the coating amount of the conductive metal is preferably 0.5 to 50% by mass of the core particle, more preferably 2 to 30% by mass, further preferably 3 to 25% by mass, and particularly preferably 4 to 20%. % By mass. When the conductive metal to be coated is gold, the coating amount is preferably 0.5 to 30% by mass of the core particles, more preferably 2 to 20% by mass, and further preferably 3 to 15%. % By mass.

Moreover, it is preferable that the number average particle diameter of the electroconductive particle P is 3-20 micrometers, More preferably, it is 5-15 micrometers. When this number average particle diameter is too small, it may be difficult to orient the conductive particles P in the thickness direction in the production method described later. On the other hand, when the number average particle diameter is excessive, it may be difficult to obtain an anisotropic conductive elastomer sheet with high resolution.
The particle size distribution (Dw / Dn) of the conductive particles P is preferably 1 to 10, more preferably 1.01 to 7, still more preferably 1.05 to 5, particularly preferably 1.1. ~ 4.
Further, the shape of the conductive particles P is not particularly limited, but spherical particles, star-shaped particles, or agglomerated particles 2 can be easily dispersed in the polymer substance-forming material. Secondary particles are preferred.
Further, as the conductive particles P, those whose surfaces are treated with a coupling agent such as a silane coupling agent or a lubricant can be appropriately used. By treating the particle surface with a coupling agent or a lubricant, the durability of the resulting anisotropic conductive elastomer sheet is improved.

  Such conductive particles P are preferably contained in the anisotropic conductive elastomer sheet at a volume fraction of 10 to 40%, particularly 15 to 35%. When this ratio is too small, an anisotropic conductive elastomer sheet having sufficiently high conductivity in the thickness direction may not be obtained. On the other hand, if this ratio is excessive, the resulting anisotropic conductive elastomer sheet tends to be fragile, and the elasticity necessary for the anisotropic conductive elastomer sheet may not be obtained.

  Moreover, it is preferable that each thickness of the 1st anisotropically conductive elastomer sheet 16 and the 2nd anisotropically conductive elastomer sheet 17 is 20-100 micrometers, More preferably, it is 25-70 micrometers. When this thickness is too small, sufficient unevenness absorbing ability may not be obtained. On the other hand, if this thickness is excessive, high resolution may not be obtained.

The first anisotropic conductive elastomer sheet 16 can be manufactured as follows.
First, as shown in FIG. 12, each of the sheet-like one side molding member 30 and the other side molding member 31, and an opening 32K having a shape that matches the planar shape of the target first anisotropic conductive elastomer sheet 16. And a frame-shaped spacer 32 having a thickness corresponding to the thickness of the first anisotropic conductive elastomer sheet 16, and a liquid polymer substance-forming material that is cured to become an elastic polymer substance A conductive elastomer material containing conductive particles is prepared.
Then, as shown in FIG. 13, the spacer 32 is disposed on the molding surface (the upper surface in FIG. 13) of the other surface side molding member 31, and the opening 32 </ b> K of the spacer 32 on the molding surface of the other surface side molding member 31. Then, the prepared conductive elastomer material 16B is applied, and then the one-surface side molded member 30 is arranged on the conductive elastomer material 16B so that the molding surface (the lower surface in FIG. 13) is in contact with the conductive elastomer material 16B. To do.
In the above, as the one side molding member 30 and the other side molding member 31, a resin sheet made of polyimide resin, polyester resin, acrylic resin, or the like can be used.
Moreover, it is preferable that the thickness of the resin sheet which comprises the one surface side molded member 30 and the other surface side molded member 31 is 50-500 micrometers, More preferably, it is 75-300 micrometers. If this thickness is less than 50 μm, the strength required for the molded member may not be obtained. On the other hand, when the thickness exceeds 500 μm, it may be difficult to apply a magnetic field having a required strength to the conductive elastomer material layer described later.

Next, as shown in FIG. 14, the conductive elastomer material 16 </ b> B is clamped by the one-surface-side molded member 30 and the other-surface-side molded member 31 using the pressure roll device 35 including the pressure roll 33 and the support roll 34. Thus, the conductive elastomer material layer 16 </ b> A having a required thickness is formed between the one side molding member 30 and the other side molding member 31. In the conductive elastomer material layer 16A, as shown in an enlarged view in FIG. 15, the conductive particles P are contained in a uniformly dispersed state.
Thereafter, for example, a pair of electromagnets are arranged on the back surface of the one-surface-side molded member 30 and the back surface of the other-surface-side molded member 31, and the electromagnets are operated to generate a parallel magnetic field in the thickness direction of the conductive elastomer material layer 16A. Make it work. As a result, in the conductive elastomer material layer 16A, the conductive particles P dispersed in the conductive elastomer material layer 16A maintain the state of being dispersed in the plane direction as shown in FIG. However, a plurality of conductive particles P, which are aligned in the thickness direction, are formed so as to be dispersed in the plane direction.
In this state, the conductive elastomer material layer 16A is cured, so that the conductive particles P are aligned in the thickness direction in the elastic polymer substance, and the conductive particles P are formed by the conductive particles P. A first anisotropic conductive elastomer sheet 16 is produced which contains chains in a state dispersed in the plane direction.

In the above, the curing process of the conductive elastomer material layer 16A can be performed while the parallel magnetic field is applied, but can also be performed after the parallel magnetic field is stopped.
The intensity of the parallel magnetic field applied to the conductive elastomer material layer 16A is preferably 0.02 to 2.5 Tesla on average.
The curing treatment of the conductive elastomer material layer 16A is appropriately selected depending on the material to be used, but is usually performed by heat treatment. The specific heating temperature and heating time are appropriately selected in consideration of the type of the polymer material constituting the conductive elastomer material layer 16A, the time required to move the conductive particles P, and the like.

  Further, the second anisotropic conductive elastomer sheet 17 can be manufactured by the same method as the first anisotropic conductive elastomer sheet 16.

According to such an anisotropic conductive connector 10, each of the rigid conductors 15 in the composite conductive sheet 11 can be displaced in the thickness direction with respect to the insulating sheet 12 by the elasticity of the insulating film 14. Therefore, when pressurized in the thickness direction by the electrodes to be connected, the first anisotropic conductive elastomer sheet 16 disposed on one surface of the composite conductive sheet 12 and the other surface of the composite conductive sheet 12 are disposed. Since the second anisotropic conductive elastomer sheet 17 is compressed and deformed in conjunction with each other when the rigid conductor 15 is displaced, the sum of the uneven absorption capacity of both is the uneven absorption capacity of the anisotropic conductive connector 10. Therefore, high unevenness absorbing ability can be obtained.
In addition, the thickness necessary for obtaining the required unevenness absorbing capability may be ensured by the total thickness of the first anisotropic conductive elastomer sheet 16 and the second anisotropic conductive elastomer sheet 17. Since a thin conductive elastomer sheet can be used, high resolution can be obtained.
Further, since each of the rigid conductors 15 is fixedly supported by the insulating film 14, a problem occurs in the displacement function of the rigid conductor 15 during manufacture of the composite conductive sheet 12 or use of the anisotropic conductive connector 10. There is nothing.
Therefore, even for a connection object in which the separation distance between adjacent electrodes is small and the height level of the electrodes varies, electrical connection to each of the electrodes is performed in a state where necessary insulation is ensured between the adjacent electrodes. Connection can be reliably achieved.

<Adapter device>
FIG. 17 is an explanatory cross-sectional view showing a configuration of the adapter device according to the first example of the present invention, and FIG. 18 is an explanatory cross-sectional view showing an adapter main body in the adapter device shown in FIG. This adapter device is for inspecting a circuit device used for, for example, performing an open / short test on a circuit device such as a printed circuit board, and has an adapter body 20 made of a multilayer wiring board.
On the surface of the adapter body 20 (upper surface in FIGS. 17 and 18), a connection electrode region in which a plurality of connection electrodes 21 are arranged according to a specific pattern corresponding to the pattern of the electrode to be inspected of the circuit device to be inspected. 25 is formed.
A plurality of terminal electrodes 22 are arranged on the back surface of the adapter main body 20 according to lattice point positions having a pitch of 0.8 mm, 0.75 mm, 1.5 mm, 1.8 mm, 2.54 mm, for example. The internal wiring portion 23 is electrically connected to the connection electrode 21.
On the surface of the adapter main body 20, the anisotropic conductive connector 10 basically configured as shown in FIG. 1 and the second anisotropic conductive elastomer sheet 17 are basically provided on the connection electrode region 25. And is fixed to the adapter body 20 by appropriate means (not shown).
In the anisotropic conductive connector 10, a plurality of rigid conductors 15 are arranged on the composite conductive sheet 11 in accordance with the same pattern as the specific pattern related to the connection electrode 21 in the adapter body 20. The flexible connector 10 is disposed such that each of the rigid conductors 15 in the composite conductive sheet 11 is positioned immediately above the connection electrode 21 of the adapter body 20.

  According to such an adapter device, since the anisotropic conductive connector 10 having the configuration shown in FIG. 1 is provided, the circuit device to be inspected has a small separation distance between adjacent electrodes to be inspected, and Even if the height level varies, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between adjacent electrodes to be inspected.

FIG. 19 is an explanatory cross-sectional view showing a configuration of the adapter device according to the second example of the present invention, and FIG. 20 is an explanatory cross-sectional view showing an adapter main body in the adapter device shown in FIG. This adapter device is for testing a circuit device used for conducting an electrical resistance measurement test of each wiring pattern on a circuit device such as a printed circuit board, and has an adapter body 20 made of a multilayer wiring board.
On the surface of the adapter main body 20 (the upper surface in FIGS. 19 and 20), connection electrodes for current supply (hereinafter referred to as “current supply”) that are spaced apart from each other and are electrically connected to the same electrode to be inspected. A connection electrode region 25 in which a plurality of connection electrode pairs 21a each including a connection electrode 21b and a voltage measurement connection electrode (hereinafter also referred to as a "voltage measurement electrode") 21c are formed. Has been. These connection electrode pairs 21a are arranged according to a pattern corresponding to the pattern of the electrodes to be inspected of the circuit device to be inspected.
A plurality of terminal electrodes 22 are arranged on the back surface of the adapter main body 20 according to lattice point positions having a pitch of 0.8 mm, 0.75 mm, 1.5 mm, 1.8 mm, 2.54 mm, for example.
Each of the current supply electrode 21 b and the voltage measurement electrode 21 c is electrically connected to the terminal electrode 22 by the internal wiring portion 23.
On the surface of the adapter main body 20, the anisotropic conductive connector 10 basically configured as shown in FIG. 1 and the second anisotropic conductive elastomer sheet 17 are basically provided on the connection electrode region 25. And is fixed to the adapter body 20 by appropriate means (not shown).
In the anisotropic conductive connector 10, a plurality of rigid conductors 15 are arranged on the composite conductive sheet 11 according to the same pattern as the specific pattern related to the connection electrodes 21 b and 21 c in the adapter body 20. The two-way conductive connector 10 is arranged such that each of the rigid conductors 15 in the composite conductive sheet 11 is positioned immediately above the connection electrodes 21 b and 21 c of the adapter body 20.

  According to the adapter device described above, since the anisotropic conductive connector 10 having the configuration shown in FIG. 1 is provided, the circuit device to be inspected has a small separation distance between adjacent inspected electrodes, and the height of the inspected electrodes is high. Even if there are variations in level, it is possible to reliably achieve electrical connection to each of the electrodes to be inspected in a state where necessary insulation is ensured between adjacent electrodes to be inspected.

<Electrical inspection equipment for circuit devices>
FIG. 21 is an explanatory diagram showing the configuration of the first example of the circuit board electrical inspection apparatus according to the present invention. This electrical inspection device performs, for example, an open / short test on a circuit device 5 such as a printed circuit board having electrodes 6 and 7 to be inspected on both sides, and the circuit device 5 is placed in an inspection execution region E. The holder 2 for holding is provided with a positioning pin 3 for arranging the circuit device 5 at an appropriate position in the inspection execution region E. Above the inspection execution area E, an upper-side adapter device 1a and an upper-side inspection head 50a configured as shown in FIG. 17 are arranged in this order from the bottom, and further above the upper-side inspection head 50a, A side support plate 56a is disposed, and the upper side inspection head 50a is fixed to the upper side support plate 56a by a column 54a. On the other hand, below the inspection execution area E, a lower-side adapter device 1b and a lower-side inspection head 50b configured as shown in FIG. 17 are arranged in this order from the top, and further below the lower-side inspection head 50b. The lower side support plate 56b is disposed, and the lower side inspection head 50b is fixed to the lower side support plate 56b by a support 54b.
The upper side inspection head 50a includes a plate-like inspection electrode device 51a and an anisotropic conductive sheet 55a having elasticity that is fixed and arranged on the lower surface of the inspection electrode device 51a. The inspection electrode device 51a has a plurality of pin-shaped inspection electrodes 52a arranged on the lower surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the upper-side adapter device 1a. The electric wire 53a is electrically connected to a connector 57a provided on the upper support plate 56a, and is further electrically connected to a tester inspection circuit (not shown) via the connector 57a.
The lower inspection head 50b is composed of a plate-shaped inspection electrode device 51b and an anisotropic conductive sheet 55b having elasticity and fixed to the upper surface of the inspection electrode device 51b. The inspection electrode device 51b has a plurality of pin-shaped inspection electrodes 52b arranged on the upper surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the lower adapter device 1b. Each of these inspection electrodes 52b The electric wire 53b is electrically connected to a connector 57b provided on the lower support plate 56b, and is further electrically connected to an inspection circuit (not shown) of the tester via the connector 57b.

  The anisotropic conductive sheets 55a and 55b in the upper side inspection head 50a and the lower side inspection head 50b are each formed with a conductive path forming portion that forms a conductive path only in the thickness direction. As such anisotropically conductive sheets 55a and 55b, those in which the respective conductive path forming portions are formed so as to protrude in the thickness direction on at least one surface are preferable in terms of exhibiting high electrical contact stability.

In such an electrical inspection device for circuit boards, the circuit device 5 to be inspected is held in the inspection execution region E by the holder 2, and in this state, each of the upper support plate 56a and the lower support plate 56b is By moving in the direction approaching the circuit device 5, the circuit device 5 is pinched by the upper adapter device 1a and the lower adapter device 1b.
In this state, the electrode 6 to be inspected on the upper surface of the circuit device 5 is electrically connected to the connection electrode 21 in the upper adapter device 1a via the anisotropic conductive connector 10, and this upper adapter device. The terminal electrode 22 of 1a is electrically connected to the inspection electrode 52a of the inspection electrode device 51a through the anisotropic conductive sheet 55a. On the other hand, the electrode 7 to be inspected on the lower surface of the circuit device 5 is electrically connected to the connection electrode 21 in the lower adapter device 1b via the anisotropic conductive connector 10, and the terminal of the lower adapter device 1b. The electrode 22 is electrically connected to the inspection electrode 52b of the inspection electrode device 51b via the anisotropic conductive sheet 55b.

  In this way, the test electrodes 6 and 7 on both the upper and lower surfaces of the circuit device 5 are respectively connected to the test electrode 52a of the test electrode device 51a in the upper test head 50a and the test electrode device 51b in the lower test head 50b. By being electrically connected to each of the test electrodes 52b, a state of being electrically connected to the test circuit of the tester is achieved, and a required electrical test is performed in this state.

  According to the electrical inspection apparatus for a circuit board described above, since the upper adapter device 1a and the lower adapter device 1b are configured as shown in FIG. Even if the distance between the electrodes 6 and 7 is small and the height levels of the electrodes 6 and 7 to be inspected vary, a required electrical inspection can be reliably performed on the circuit device 5.

FIG. 22 is an explanatory diagram showing the configuration of the second example of the circuit board electrical inspection apparatus according to the present invention. This electrical inspection device is for performing an electrical resistance measurement test of each wiring pattern on a circuit device 5 such as a printed circuit board on which both electrodes 6 and 7 to be inspected are formed. The holder 2 for holding in the inspection execution area E is provided, and the holder 2 is provided with positioning pins 3 for arranging the circuit device 5 at an appropriate position in the inspection execution area E.
Above the inspection execution area E, an upper-side adapter device 1a and an upper-side inspection head 50a configured as shown in FIG. 19 are arranged in this order from the bottom, and further above the upper-side inspection head 50a, A side support plate 56a is disposed, and the upper side inspection head 50a is fixed to the upper side support plate 56a by a column 54a. On the other hand, below the inspection execution area E, a lower-side adapter device 1b and a lower-side inspection head 50b configured as shown in FIG. 19 are arranged in this order from the top, and further below the lower-side inspection head 50b. The lower side support plate 56b is disposed, and the lower side inspection head 50b is fixed to the lower side support plate 56b by a support 54b.
The upper side inspection head 50a includes a plate-like inspection electrode device 51a and an anisotropic conductive sheet 55a having elasticity that is fixed and arranged on the lower surface of the inspection electrode device 51a. The inspection electrode device 51a has a plurality of pin-shaped inspection electrodes 52a arranged on the lower surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the upper-side adapter device 1a. The electric wire 53a is electrically connected to a connector 57a provided on the upper support plate 56a, and is further electrically connected to a tester inspection circuit (not shown) via the connector 57a.
The lower inspection head 50b is composed of a plate-shaped inspection electrode device 51b and an anisotropic conductive sheet 55b having elasticity and fixed to the upper surface of the inspection electrode device 51b. The inspection electrode device 51b has a plurality of pin-shaped inspection electrodes 52b arranged on the upper surface thereof at lattice point positions having the same pitch as the terminal electrodes 22 of the lower adapter device 1b. Each of these inspection electrodes 52b The electric wire 53b is electrically connected to a connector 57b provided on the lower support plate 56b, and is further electrically connected to an inspection circuit (not shown) of the tester via the connector 57b.
The anisotropic conductive sheets 55a and 55b in the upper side inspection head 50a and the lower side inspection head 50b have basically the same configuration as that of the electrical inspection apparatus of the first example.

In such an electrical inspection device for circuit boards, the circuit device 5 to be inspected is held in the inspection execution region E by the holder 2, and in this state, each of the upper support plate 56a and the lower support plate 56b is By moving in the direction approaching the circuit device 5, the circuit device 5 is pinched by the upper adapter device 1a and the lower adapter device 1b.
In this state, the electrode 6 to be inspected on the upper surface of the circuit device 5 is connected to both the current supply electrode 21b and the voltage measurement electrode 21c in the connection electrode pair 21a of the upper-side adapter device 1a. The terminal electrode 22 of the upper adapter device 1a is electrically connected to the inspection electrode 52a of the inspection electrode device 51a via the anisotropic conductive sheet 55a. On the other hand, the electrode 7 to be inspected on the lower surface of the circuit device 5 is connected to both the current supply electrode 21b and the voltage measurement electrode 21c in the connection electrode pair 21a of the lower adapter device 1b via the anisotropic conductive connector 10. The terminal electrode 22 of the lower adapter device 1b is electrically connected to the inspection electrode 52b of the inspection electrode device 51b via the anisotropic conductive sheet 55b.

  In this way, the test electrodes 6 and 7 on both the upper and lower surfaces of the circuit device 5 are respectively connected to the test electrode 52a of the test electrode device 51a in the upper test head 50a and the test electrode device 51b in the lower test head 50b. By being electrically connected to each of the test electrodes 52b, a state of being electrically connected to the test circuit of the tester is achieved, and a required electrical test is performed in this state. Specifically, a constant current is supplied between the current supply electrode 21b in the upper-side adapter device 1a and the current-supply electrode 21b in the lower-side adapter device 1b, and in the upper-side adapter device 1a. One of the plurality of voltage measuring electrodes 21c is designated, and the designated one voltage measuring electrode 21c is connected to the inspected electrode 5 on the upper surface side electrically connected to the voltage measuring electrode 21c. A voltage is measured between the voltage measuring electrode 21c in the lower adapter device 1b and electrically connected to the corresponding electrode 6 to be inspected on the lower surface side. Based on the obtained voltage value, the designated voltage is measured. The electrical resistance value of the wiring pattern formed between the upper electrode under test 5 electrically connected to one voltage measuring electrode 21c and the corresponding other electrode 6 under test is taken. It is. And the electrical resistance of all the wiring patterns is measured by sequentially changing the designated voltage measuring electrode 21c.

  According to the electrical inspection apparatus for a circuit board described above, since the upper side adapter device 1a and the lower side adapter device 1b are configured as shown in FIG. 19, the circuit device 5 to be inspected is adjacent to the electrode to be inspected. Even if the distance between the electrodes 6 and 7 is small and the height levels of the electrodes 6 and 7 to be inspected vary, a required electrical inspection can be reliably performed on the circuit device 5.

In the present invention, the present invention is not limited to the above-described embodiment, and various modifications as described below can be added.
In the anisotropic conductive connector 10, the material constituting the rigid conductor 15 of the composite conductive sheet 11 is not limited to a metal material as long as it is a rigid conductor. What contains electroconductive powder etc. can be used.
Further, as shown in FIG. 23, the composite conductive sheet 11 includes an insulating sheet 12 in which a single opening 13 is formed, and an integral insulating film 14 disposed so as to close the opening 12 of the insulating sheet 12. The thing of the structure which has these may be sufficient.
In addition, as shown in FIG. 24, the composite conductive sheet 11 includes an insulating sheet 12 in which a plurality of openings 13 are formed, and a plurality of insulating films that are arranged so as to block one opening 13 of the insulating sheet 12, respectively. 14 may be used.
The composite conductive sheet 11 includes an insulating sheet in which a plurality of openings are formed, one or more insulating films disposed so as to close one opening of the insulating sheet, and a plurality of insulating sheets. It may be configured to have one or more insulating films arranged so as to close the opening.
In the electrical inspection apparatus, the circuit device to be inspected is not limited to the printed circuit board, but may be a semiconductor integrated circuit device such as a package IC or MCM.

  Hereinafter, specific examples of the present invention will be described, but the present invention is not limited to the following examples.

<Production of evaluation circuit device>
An evaluation circuit device having the following specifications was produced.
That is, this evaluation circuit device has a size of 200 mm (vertical) × 140 mm (horizontal) × 0.8 mm (thickness), and the upper surface side inspected electrode and the lower surface side inspected electrode are each composed of solder bumps. The total number of the upper surface side electrodes to be inspected is 2400, each having a diameter of about 200 μm, a protruding height of about 50 μm, and a minimum pitch of 400 μm. The total number of lower surface side electrodes to be inspected is 2400, and is formed in the same pattern as the upper surface side electrode to be inspected, each having a diameter of about 150 μm, a protruding height of about 50 μm, and a minimum pitch of 400 μm. Further, the upper surface side inspection electrode and the lower surface side inspection electrode are electrically connected to each other in a one-to-one relationship by internal wiring.

<Example 1>
In the following manner, an upper-side adapter device and a lower-side adapter device for electrical inspection of the evaluation circuit device were manufactured, and the circuit device inspection device shown in FIG. 22 was configured.

[Upper adapter device]
(1) Production of composite conductive sheet:
Prepare a laminated sheet (“Espanex LB18-50-18NEP” manufactured by Nippon Steel Chemical Co., Ltd.) in which copper foil is laminated on both sides of a resin sheet made of a liquid crystal polymer having a thickness of 50 μm. A resist film was formed by laminating a dry film resist on the foil. Next, by performing exposure processing and development processing on the formed resist film, a circular pattern hole having a diameter of 350 μm is formed in the resist film in accordance with a pattern corresponding to the upper surface side inspected electrode in the circuit device for evaluation. Then, an etching process was performed to form an opening having the same pattern as the pattern hole of the resist film in the copper foil, and then the resist film was removed.
And, for the resin sheet in the laminated sheet, laser processing is performed through the opening formed in the copper foil to form an opening, and then the copper foil on both sides in the laminated sheet is removed by etching treatment, An insulating sheet having an opening formed in accordance with a pattern corresponding to the upper surface side inspected electrode in the circuit device for evaluation was produced.
This insulating sheet is made of a liquid crystal polymer and has dimensions of 190 mm × 130 mm × 50 μm. Each of the openings is a circle having a diameter of 400 μm and the total number of openings is 2400.

Next, an addition-type liquid silicone rubber is applied to the surface of the support plate to form a coating film having a thickness of 10 μm. The produced insulating sheet is disposed on the coating film, and the addition-type liquid silicone is further disposed. By applying rubber, an integral insulating film material layer having a total thickness of 70 μm, which is arranged so as to close each opening of the insulating sheet, is formed, and 120 ° C. with respect to this insulating film material layer, By performing the curing process under conditions of 1 hour, an insulating film having a thickness of 70 μm was formed on the insulating sheet.
By subjecting the obtained insulating film to laser processing, two through-holes with a diameter of 50 μm extending in the thickness direction of the insulating film are provided in a portion located in each opening of the insulating sheet, in total. 4800 pieces were formed. Thereafter, the entire surface of one surface and the other surface of the insulating film and the entire inner wall surface of each of the through holes of the insulating film are subjected to electroless plating to form a thin metal layer made of copper, and one surface of the insulating film in the thin metal layer A resist film having 4800 pattern holes each having a diameter of 60 μm communicating with the through hole of the insulating film is formed on the surface of the portion in contact with the insulating film, and on the surface of the portion in contact with the other surface of the insulating film in the metal thin layer, 4800 resist films each having a diameter of 60 μm and communicating with the through hole of the insulating film were formed. Then, an electroplating process was performed using the thin metal layer as a common electrode, and the metal was filled into the through hole of the insulating film and the resist pattern, thereby forming a rigid conductor made of copper extending in the thickness direction of the insulating film. . Each of the rigid conductors has a diameter at one end and the other end of 60 μm and a diameter at the center of 50 μm. Thereafter, each of the resists was removed, and further, an etching process was performed to remove the metal thin layer, thereby producing a composite conductive sheet. The minimum distance between the centers of adjacent rigid conductors on one side and the other side of the obtained composite conductive sheet is 120 μm, and the minimum separation distance is 60 μm.

(2) Production of anisotropically conductive elastomer sheet:
A conductive elastomer material was prepared by adding 400 parts by weight of conductive particles having a number average particle size of 12 μm to 100 parts by weight of addition-type liquid silicone rubber and mixing them, followed by defoaming treatment under reduced pressure.
In the above, as the conductive particles, nickel particles are used as core particles, and the core particles are subjected to electroless gold plating (average coating amount: an amount that is 2% by weight of the weight of the core particles).

After arranging a frame-shaped spacer having a rectangular opening of 120 mm × 120 mm and a thickness of 50 μm on the molding surface of the other side molding member, the prepared material for conductive elastomer is applied in the opening of the spacer. The one-surface side molded member was placed on the conductive elastomer material so that the molding surface was in contact with the conductive elastomer material.
In the above, a polyester resin sheet having a thickness of 0.1 mm was used as the one-surface-side molded member and the other-surface-side molded member.
Then, using the pressure roll apparatus which consists of a pressure roll and a support roll, the one surface side molded member and the other surface side molding are performed by sandwiching the conductive elastomer material with the one surface side molded member and the other surface side molded member. A conductive elastomer material layer having a thickness of 50 μm was formed between the members.
Then, an electromagnet is disposed on the back surface of each of the one side molding member and the other side molding member, and a parallel magnetic field of 0.3 T is applied to the conductive elastomer material layer in the thickness direction at 120 ° C., 0 A rectangular anisotropic conductive elastomer sheet having a thickness of 50 μm was produced by curing the material layer for the conductive elastomer under the condition of .5 hours.
As described above, two dispersive anisotropic conductive sheets are manufactured, one of which is disposed as one first anisotropic conductive elastomer sheet on one surface of the composite conductive sheet, and the other is the second anisotropic conductive sheet. An anisotropic conductive connector for an upper-side adapter device was manufactured by disposing the conductive elastomer sheet on the other surface of the composite conductive sheet.

(3) Manufacture of adapter body:
According to the configuration shown in FIG. 19, an adapter body having the following specifications was manufactured.
That is, this adapter body has a vertical and horizontal dimension of 200 mm × 140 mm, a substrate material is a glass fiber reinforced epoxy resin, and each of the electrode regions for connection on the surface of the adapter body has a rectangular shape of 120 μm × 60 μm. 2400 connecting electrode pairs in which the current supply electrode and the voltage measurement electrode are arranged with a separation distance of 60 μm (the distance between the centers is 120 μm) correspond to the pattern of the upper surface side inspected electrode of the circuit device for evaluation described above. Are arranged according to the pattern to be. In addition, on the back surface of the adapter body, 4800 terminal electrodes having a diameter of 400 μm are arranged in accordance with the grid point positions with a pitch of 750 μm, and each of the current supply electrode and the voltage measurement electrode is connected to the terminal electrode. Are electrically connected to each other in a one-to-one relationship by internal wiring.
And the upper side adapter apparatus was manufactured by aligning and arrange | positioning and fixing said anisotropically conductive connector on the electrode area | region for a connection in the surface of this adapter main body.

[Lower adapter device]
A lower adapter device was manufactured in the same manner as the upper adapter device described above.

[Production of inspection equipment]
Using the above-mentioned upper adapter device and lower adapter device, an inspection device suitable for the inspection section of a rail-carrying circuit board automatic inspection machine (product name: STARREC V5) according to the configuration shown in FIG. Was made.
In the upper inspection head and the lower inspection head of the inspection apparatus, 4800 pin-shaped inspection electrodes are arranged in each inspection electrode plate apparatus in accordance with lattice point positions with a pitch of 750 μm.
Further, each of the anisotropic conductive sheets in the upper side inspection head and the lower side inspection head has an unevenly distributed anisotropic conductive sheet in which 4800 conductive path forming portions extending in the thickness direction are insulated from each other by an insulating portion. It is. More specifically, each of the conductive path forming portions contains nickel particles (average particle diameter of 35 μm) subjected to gold plating in a silicone rubber at a rate of 25% in volume fraction. They are arranged according to the grid point positions with a pitch of .75 mm. Further, each of the conductive path forming portions is formed so as to protrude from both surfaces of the insulating portion, and the diameter is 0.4 mm and the thickness is 0.6 mm, and the protruding height from both surfaces of the insulating portion is Each is 0.05 mm. On the other hand, the insulating part is made of silicone rubber, and its thickness is 0.5 mm.

[Evaluation]
(1) Connection stability test:
The above-described inspection apparatus was mounted on the inspection section of the rail conveyance type automatic circuit board inspection machine “STARREC V5”, and the evaluation circuit apparatus was aligned and arranged in the inspection area of the inspection apparatus. Next, a pressing operation is performed on the evaluation circuit device with a predetermined press load. In this state, the current supply electrode in the upper adapter device and the current supply in the lower adapter device are used for the evaluation circuit device. While applying a current of 1 mA between the electrodes, the voltage between the voltage measuring electrode in the upper adapter device and the voltage measuring electrode in the lower adapter device was measured to measure the electrical resistance value. Then, the number of inspection points (hereinafter referred to as “NG inspection points”) at which the measured electric resistance value was 10Ω or more was measured. After performing the operation of measuring the number of NG inspection points 10 times in total, the ratio of NG inspection points in the total number of inspection points (2400 × 10 = 24000) (hereinafter referred to as “NG inspection point ratio”) was calculated. And the process of calculating | requiring such a NG test | inspection ratio is performed by changing a press load in steps in the range of 100-210 kgf, and the minimum press load (below NG test | inspection point becomes 0.01% or less) , And referred to as “connectable load”). In the actual circuit board inspection, the NG inspection point ratio is required to be 0.01% or less. When the NG inspection point ratio exceeds 0.01%, a non-defective circuit board to be inspected is required. Therefore, it is difficult to perform highly reliable electrical inspection on the circuit board.
In the above-described step of obtaining the NG inspection point ratio, every time the operation for measuring the number of NG inspection points is completed once, the pressure applied to the evaluation circuit device is released to make the state non-pressurized, and then the next NG inspection is performed. An operation for measuring the score was performed. The results are shown in Table 1 below.
In the above, that the load which can be connected is a small value means that the uneven | corrugated absorbability in an anisotropically conductive connector is high. Further, by using an anisotropic conductive connector having a high unevenness absorbing ability, a stable electrical connection to the circuit device can be achieved with a small load. Deterioration due to pressurization is suppressed in each of the inspection circuit boards. As a result, the service life of each component in the inspection device is extended, and it is possible to use a relatively low durability component as the component of the inspection device. Can be reduced, which is preferable.

(2) Durability test:
The above-described inspection apparatus was mounted on the inspection section of the rail conveyance type automatic circuit board inspection machine “STARREC V5”, and the evaluation circuit apparatus was aligned and arranged in the inspection area of the inspection apparatus. Next, a pressing operation is performed on the evaluation circuit device with a press load of 130 kgf and 150 kgf, and in this state, the current supply electrode in the upper adapter device and the current in the lower adapter device are used for the evaluation circuit device. Measure the electrical resistance by measuring the voltage between the voltage measuring electrode in the upper adapter device and the voltage measuring electrode in the lower adapter device while applying a current of 1 mA to the supply electrode. Thus, the number of NG inspection points was measured, and the NG inspection point ratio was calculated. And the process which calculates | requires this NG test | inspection point ratio was made into 1 cycle, and 30000 cycles were performed in total. In this test, every time the step for obtaining the NG inspection point ratio was completed once, the pressure applied to the circuit device for evaluation was released to make it an unpressurized state, and then the step for obtaining the NG inspection point proportion was performed. The results are shown in Table 2 below.

[Insulation test]
The above inspection device is installed in the inspection section of the rail transport type automatic circuit board inspection machine “STARCREC V5”, and the surface of the inspection device is 100 mm in length and width and 0.8 mm in thickness on the surface. A substrate made of a treated glass fiber reinforced epoxy resin was placed. Next, a pressing operation was performed on the substrate with a predetermined press load, and the electrical resistance value between the current supply electrode and the voltage measurement electrode in each of the connection electrode pairs of the upper adapter device was measured. Then, the number of connection electrode pairs (hereinafter referred to as “insulation good electrode pairs”) having a measured electric resistance value of 10 kΩ or more was measured. After performing the operation of measuring the number of electrode pairs with good insulation 10 times in total, the ratio of electrode pairs with good insulation in the total number of electrode pairs (2400 × 10 = 24000) (hereinafter referred to as “proportion of electrode pairs with good insulation”). Was calculated. In actual circuit board inspection, it is necessary that the ratio of electrode pairs with good insulation is 99% or more. When the ratio of electrode pairs with good insulation is less than 99%, the ratio is supplied to the current supply electrode. Current leaks to the voltage measurement electrode, and a defective circuit board to be inspected may be determined as a non-defective product, so that it is difficult to perform a highly reliable electrical inspection on the circuit board. And the process of calculating | requiring such an insulation good electrode pair ratio was performed changing the press load in the range of 100-210 kgf in steps. The results are shown in Table 3.

<Comparative example 1>
A conductive elastomer material was prepared by adding 400 parts by weight of conductive particles having a number average particle size of 12 μm to 100 parts by weight of addition-type liquid silicone rubber and mixing them, followed by defoaming treatment under reduced pressure.
In the above, as the conductive particles, nickel particles are used as core particles, and the core particles are subjected to electroless gold plating (average coating amount: an amount that is 2% by weight of the weight of the core particles).
Next, after arranging a frame-shaped spacer having a rectangular opening of 120 mm × 120 mm and having a thickness of 100 μm on the molding surface of the other side molding member, the prepared conductive elastomer material is placed in the opening of the spacer. The one side molding member was applied on the conductive elastomer material so that the molding surface was in contact with the conductive elastomer material.
In the above, a polyester resin sheet having a thickness of 0.1 mm was used as the one-surface-side molded member and the other-surface-side molded member.
Then, using the pressure roll apparatus which consists of a pressure roll and a support roll, the one surface side molded member and the other surface side molding are performed by sandwiching the conductive elastomer material with the one surface side molded member and the other surface side molded member. A conductive elastomer material layer having a thickness of 100 μm was formed between the members.
Next, an electromagnet is disposed on the back surface of each of the one-side molding member and the other-side molding member, and a parallel magnetic field of 0.3 T is applied to the conductive elastomer material layer in the thickness direction at 120 ° C., 0 A rectangular anisotropic conductive elastomer sheet having a thickness of 100 μm was produced by curing the material layer for the conductive elastomer under the condition of 5 hours.
Then, an upper side adapter device and a lower side adapter device are manufactured in the same manner as in Example 1 except that the above anisotropic conductive elastomer sheet is used instead of the anisotropic conductive connector, and an inspection device is manufactured. The inspection device was subjected to a connection stability test, a durability test, and an insulation test. The results are shown in Tables 1 to 3.

<Comparative example 2>
A conductive elastomer material was prepared by adding 400 parts by weight of conductive particles having a number average particle size of 12 μm to 100 parts by weight of addition-type liquid silicone rubber and mixing them, followed by defoaming treatment under reduced pressure.
In the above, as the conductive particles, nickel particles are used as core particles, and the core particles are subjected to electroless gold plating (average coating amount: an amount that is 2% by weight of the weight of the core particles).
After arranging a frame-shaped spacer having a rectangular opening of 120 mm × 120 mm and a thickness of 50 μm on the molding surface of the other side molding member, the prepared material for conductive elastomer is applied in the opening of the spacer. The one-surface side molded member was placed on the conductive elastomer material so that the molding surface was in contact with the conductive elastomer material.
In the above, a polyester resin sheet having a thickness of 0.1 mm was used as the one-surface-side molded member and the other-surface-side molded member.
Then, using the pressure roll apparatus which consists of a pressure roll and a support roll, the one surface side molded member and the other surface side molding are performed by sandwiching the conductive elastomer material with the one surface side molded member and the other surface side molded member. A conductive elastomer material layer having a thickness of 50 μm was formed between the members.
Then, an electromagnet is disposed on the back surface of each of the one side molding member and the other side molding member, and a parallel magnetic field of 0.3 T is applied to the conductive elastomer material layer in the thickness direction at 120 ° C., 0 A rectangular anisotropic conductive elastomer sheet having a thickness of 50 μm was produced by curing the material layer for the conductive elastomer under the condition of .5 hours.
Then, an upper side adapter device and a lower side adapter device are manufactured in the same manner as in Example 1 except that the above anisotropic conductive elastomer sheet is used instead of the anisotropic conductive connector, and an inspection device is manufactured. The inspection device was subjected to a connection stability test, a durability test, and an insulation test. However, the durability test was performed with 150 kgf and 180 kgf press loads. The results are shown in Tables 1 to 3.

  As is apparent from the results of Tables 1 to 3, according to the anisotropic conductive connector according to Example 1, the high uneven absorption capacity equivalent to the anisotropic conductive elastomer sheet (Comparative Example 1) having a thickness of 100 μm. When it is used in an inspection device, it has a high resolution equivalent to that of an anisotropic conductive elastomer sheet (Comparative Example 2) having a thickness of 50 μm and a stable electrical connection with a small load. In addition, it was confirmed that a long service life can be obtained.

It is sectional drawing for description which shows the structure in an example of the anisotropically conductive connector of this invention. It is sectional drawing for description which expands and shows the principal part of the anisotropically conductive connector shown in FIG. It is sectional drawing for description which shows the state by which the coating film of the polymeric substance forming material was formed on the support body. It is sectional drawing for description which shows the state by which the insulating sheet was arrange | positioned on the coating film of polymeric substance formation material. It is sectional drawing for description which shows the state by which the insulating film material layer was formed on the support body. It is sectional drawing for description which shows the state by which the insulating film was formed in the insulating sheet. It is sectional drawing for description which shows the state by which the through-hole was formed in the insulating film. It is sectional drawing for description which shows the state by which the metal thin layer was formed in the both surfaces of an insulating film, and the inner surface of a through-hole. It is sectional drawing for description which shows the state in which the resist film which has a pattern hole was formed in the surface of a metal thin layer. It is sectional drawing for description which shows the state in which the rigid conductor was formed in the through-hole of an insulating film, and the pattern hole of a resist film. It is sectional drawing for description which expands and shows the principal part of a composite conductive sheet. It is sectional drawing for description which shows the 1st surface side molded member, the other surface side molded member, and spacer for manufacturing a 1st anisotropically conductive elastomer sheet. It is sectional drawing for description which shows the state by which the material for conductive elastomer was apply | coated to the surface of the other surface side molded member. It is sectional drawing for description which shows the state in which the conductive elastomer material layer was formed between the one surface side molded member and the other surface side molded member. It is sectional drawing for description which expands and shows the material layer for electroconductive elastomers shown in FIG. It is sectional drawing for description which shows the state which acted the magnetic field on the thickness direction with respect to the material layer for conductive elastomers shown in FIG. It is sectional drawing for description which shows the structure in the 1st example of the adapter apparatus which concerns on this invention. It is sectional drawing for description which shows the structure of the adapter main body in the adapter apparatus shown in FIG. It is sectional drawing for description which shows the structure in the 2nd example of the adapter apparatus which concerns on this invention. It is sectional drawing for description which shows the structure of the adapter main body in the adapter apparatus shown in FIG. It is explanatory drawing which shows the structure in the 1st example of the electrical inspection apparatus of the circuit apparatus which concerns on this invention. It is explanatory drawing which shows the structure in the 2nd example of the electrical inspection apparatus of the circuit apparatus which concerns on this invention. It is a top view which shows the other example of the composite conductive sheet in the anisotropically conductive connector which concerns on this invention. It is a top view which shows the further another example of the composite electroconductive sheet in the anisotropically conductive connector which concerns on this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1a Upper side adapter apparatus 1b Lower side adapter apparatus 2 Holder 3 Positioning pin 5 Circuit apparatus 6,7 Tested electrode 10 Anisotropic conductive connector 11 Composite conductive sheet 12 Insulating sheet 13 Opening 14 Insulating film 14A Insulating film material layer 14B Coating film 15 Rigid conductor 15a One end portion 15b Other end portion 15c Center portion 15H Through hole 16 First anisotropic conductive elastomer sheet 16A Conductive elastomer material layer 16B Conductive elastomer material 17 Second anisotropic conductivity Elastomer sheet 18 Metal thin layer 20 Adapter body 21, 21 b, 21 c Connecting electrode 21 a Connecting electrode pair 22 Terminal electrode 23 Internal wiring portion 25 Connecting electrode region 30 One side molding member 31 Other side molding member 32 Spacer 32K Opening 33 Pressure roll 34 Support roll 35 Pressure roll device 36 Holding plate 37, 38 Resist film 37H, 38H Pattern hole 50a Upper side inspection head 50b Lower side inspection head 51a, 51b Inspection electrode device 52a, 52b Inspection electrode 53a, 53b Electric wire 54a, 54b Strut 55a, 55b Anisotropic conductive sheet 56a Upper side support plate 56b Lower side support plate 57a, 57b Connector

Claims (7)

Insulating sheet made of resin having a plurality of openings, an insulating film made of an elastic polymer material supported so as to close each opening of the insulating sheet, and fixedly supported on the insulating film And a composite conductive sheet composed of a plurality of rigid conductors arranged in the opening of the insulating sheet and extending in the thickness direction of the insulating film;
A first anisotropic conductive elastomer sheet disposed on one surface of the composite conductive sheet; and a second anisotropic conductive elastomer sheet disposed on the other surface of the composite conductive sheet. ,
Each of the rigid conductors in the composite conductive sheet is displaceable in the thickness direction with respect to the insulating sheet by the elasticity of the insulating film.   Each of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet has a chain formed by orienting conductive particles exhibiting magnetism in the elastic polymer substance so as to be aligned in the thickness direction. 2. The anisotropic conductive connector according to claim 1, wherein the anisotropic conductive connector is contained in a state in which the chain of the conductive particles is dispersed in a plane direction.   The anisotropic conductive connector according to claim 2, wherein each of the first anisotropic conductive elastomer sheet and the second anisotropic conductive elastomer sheet has a thickness of 20 to 100 µm.   The anisotropic conductive connector according to claim 2 or 3, wherein the number average particle diameter of the conductive particles is 3 to 20 µm. An adapter body having a connection electrode region in which a plurality of connection electrodes are formed according to a pattern corresponding to an electrode to be inspected in a circuit device to be inspected on the surface;
5. The difference according to claim 1, further comprising a plurality of rigid conductors arranged on the connection electrode region of the adapter main body and arranged according to a pattern corresponding to the connection electrode in the adapter main body. An adapter device comprising a conductive connector. Adapter main body having a connection electrode region in which a plurality of connection electrode pairs each formed of two connection electrodes for current supply and voltage measurement are formed according to a pattern corresponding to an electrode to be inspected in a circuit device to be inspected on the surface When,
5. The difference according to claim 1, further comprising a plurality of rigid conductors arranged on the connection electrode region of the adapter main body and arranged according to a pattern corresponding to the connection electrode in the adapter main body. An adapter device comprising a conductive connector.   An electrical inspection device for a circuit device, comprising the adapter device according to claim 5.

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