JP2006064486A - X-ray inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of performing both of the inspection of foreign matter due to X rays and the inspection of the crack or hole of an X-ray shield member due to X rays. <P>SOLUTION: One inspection mode of a foreign matter inspection mode for inspecting whether foreign matter is mixed with an inspection target 2 and a crack/hole inspection mode for inspecting whether a crack or a hole is present in the inspection target 2 is set by an operation part 10 and a control part 9 controls a feed device 1, an X-ray source 3 and an image processing part 6 on the basis of the set inspection modes. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an X-ray inspection apparatus capable of performing both inspection of X-ray foreign matter and inspection of cracks and holes in X-ray protection products.

A conventional X-ray inspection apparatus is disclosed in Patent Document 1. This Patent Document 1 is an X-ray liquid amount inspection apparatus that continuously inspects the liquid level of a can or the like in which contents such as beer are enclosed. This X-ray liquid quantity inspection device consists of two rows of X-ray detectors arranged in a straight line, and the two rows of X-ray detector surfaces are coated with two types of layers having different X-ray wavelength selectivity. Determining whether the object to be detected at the height is a low atomic number substance or a high atomic number substance based on a difference signal between detection signals from the X-ray detection elements of the same height in the two rows. By providing a determination unit that determines the amount of liquid in the container and a display unit that displays the determination result, it is possible to accurately determine to which height the liquid has been injected.
JP 2002-357472 A

However, in the X-ray liquid level inspection apparatus of Patent Document 1, no consideration is given to performing both foreign matter inspection by X-rays and inspection of cracks and holes of X-ray shielding objects by X-rays.
An object of the present invention is to provide an X-ray inspection apparatus capable of both inspection of foreign matter by X-rays and inspection of cracks and holes of X-ray shields by X-rays.

  The object is to place a plurality of objects to be inspected on a moving means for moving in a predetermined direction, an X-ray source for irradiating one of the inspected objects placed on the moving means with X-rays, and the X-ray source. And an X-ray detector that detects the transmitted X-rays of the one object to be inspected, an image processing means for imaging the transmitted X-rays detected by the X-ray detector, and an image by the image processing means In the X-ray inspection apparatus provided with a display for displaying the converted transmission X-ray image, the foreign object inspection mode for inspecting whether or not the foreign object is mixed in the inspection object and the inspection object are cracked or A mode setting means for setting one inspection mode of a crack hole inspection mode for inspecting whether or not a hole exists, and the moving means based on the inspection mode set by the mode setting means, the X-ray source, Control for controlling the X-ray detector and the image processing means It is achieved by having a stage.

  According to the present invention, it is possible to perform both foreign matter inspection using X-rays and inspection of cracks and holes in X-ray shielding objects using X-rays.

An embodiment of an X-ray inspection apparatus according to the present invention will be described with reference to the drawings.
FIG. 1 is a schematic configuration diagram illustrating an X-ray inspection apparatus according to the present invention, and FIG. 2 is an explanatory diagram illustrating an example from the X-ray detector of the X-ray inspection apparatus of FIG. 1 to an image processing unit.

  The X-ray inspection apparatus includes a transport apparatus 1, an X-ray source 3 disposed at a position where X-rays can be irradiated onto the inspection object 2 placed on the transport apparatus 1, and an X-ray disposed opposite to the X-ray source 3. The detector 4, the signal processor 5 electrically connected to the X-ray detector 4, the image processor 6 electrically connected to the signal processor 5, and the image processor 6 electrically connected A television monitor 7, a photoelectric detector 8 (81, 82) provided at a position where it can be detected that the inspection object 2 is transported to the X-ray irradiation area of the X-ray source 3 by the transport device 1, and the transport device 1 A control unit 9 electrically connected to each of the X-ray source 3, the X-ray detector 4, the image processing unit 6 and the photoelectric detector 8, and an operation unit 10 electrically connected to the control unit 9, have.

The conveying device 1 is a device that places a plurality of objects to be inspected and moves in a predetermined direction, and is, for example, a belt conveyor. Here, it is assumed that the inspection object 2 is conveyed in the direction of the arrow.
Inspected object 2 is to inspect foreign matter mixed in food, clothing, etc. (in the foreign matter inspection mode) and to inspect cracks and holes in lead materials of X-ray protective clothing (in the crack hole inspection mode). is there.
The X-ray source 3 irradiates the inspection object 2 with X-rays, and is an X-ray tube or the like.
The X-ray detector 4 detects a transmitted X-ray of the inspection object 2 and is a line sensor. The line sensor is a multi-channel X-ray detection element arranged in a one-dimensional direction.

  The signal processing unit 5 amplifies or adds an electric signal corresponding to the transmitted X-ray detected by the line sensor 4. That is, as shown in FIG. 2, the signal processing unit 5 is configured such that each channel output of the line sensor is connected to the amplifier 51, the output of the amplifier 51 is connected to the signal switch 52, and the output of the signal switch 52 is the computing unit. The output of the computing unit 53 is connected to the image processing unit 6. The amplifier 51 amplifies the signal from the line sensor 4. The signal switcher 52 and the arithmetic unit 53 compress the signal amplified by the amplifier 51 to the number of channels effective for image processing.

The image processing unit 6 inputs the signal amplified and compressed by the signal processing unit 5 and forms an image.
The television monitor 7 displays the image formed by the image processing unit 6.
The photoelectric detector 8 includes a light emitting unit 81 and a light receiving unit 82, and the inspection object 4 approaches the X-ray source 3 near the light path between the light emitting unit 81 and the light receiving unit 82 by the inspection object 4. Detect that.

  The control unit 9 controls the X-ray source 3 to irradiate the inspection object 4 with X-rays based on the approach of the inspection object 2 detected by the photoelectric detector 8. Further, the control unit 9 causes the image processing unit 6 to perform image processing on the result of the signal processing unit 5 performing signal processing on the transmitted X-rays of the inspection object 2 detected by the line sensor 4. This image processing is performed differently depending on the foreign substance inspection mode or the crack hole inspection mode. That is, in the foreign substance inspection mode, since a small X-ray transmission thickness such as food is handled, a parameter suitable for image processing of a relatively low energy transmission X-ray signal is set. On the other hand, in the crack hole inspection mode, in order to inspect cracks and holes in the lead plate, parameters suitable for image processing of a relatively high energy transmitted X-ray signal are set.

  The operation unit 10 is for setting various parameters for the operator to control the control unit 9, and is a parameter input device for inputting while watching the television monitor 7, such as a keyboard and a mouse.

Next, the operation of the first embodiment of the X-ray inspection apparatus of the present invention will be described.
FIG. 3 is a flowchart for explaining the procedure of an embodiment of the X-ray inspection apparatus of the present invention.
(Step 31)
The operator selects the foreign object inspection mode or the crack hole inspection mode on the operation unit 10 and sets the inspection mode.

(Step 32)
The control unit 9 determines whether the inspection mode set in the step is the foreign object inspection mode or the crack hole inspection mode. As a result of the determination, if the foreign object inspection mode, the process proceeds to step 33, and if it is the crack hole inspection mode, the process proceeds to step 34.

(Step 33)
The operator sets parameters for the foreign substance inspection mode in the operation unit 10. When the foreign object inspection mode is selected, an image processing parameter (for example, a threshold value for binarization processing) for foreign object inspection is input. A plurality of types of parameters can be stored in the control unit 9, and can be called up as necessary.
The control unit 9 proceeds to step 35 after the parameter of the foreign substance inspection mode.

(Step 34)
The operator sets parameters for the crack hole inspection mode in the operation unit 10. When the hole crack inspection mode is selected, image processing parameters for detecting holes and cracks (for example, a threshold value for binarization processing, but the air portion around the object to be inspected is not processed) are input. A plurality of types of these parameters can be stored in the control device 3, and can be recalled as necessary. The control unit 9 proceeds to step 35 after the parameter of the crack hole inspection mode.

(Step 35)
The control unit 9 sends an inspection start signal to the transport apparatus 1, turns on a switch of a motor that drives the transport apparatus 1, and starts an inspection.
(Step 36)
The transport apparatus 1 transports the inspection object 2 in the direction of the arrow in the drawing.
(Step 37)
The light emitter 81 and the light receiver 82 photoelectrically detect that the inspection object 2 has approached the X-ray irradiation area of the X-ray source 3.

(Step 38)
The control unit 9 switches on the X-ray source 3 by the approach of the inspection object 2 photoelectrically detected in the previous step, and irradiates the inspection object 2 with X-rays. Here, the X-ray irradiation conditions from the X-ray source 3 can be adjusted as appropriate according to the X-ray transmission thickness of the inspection object 2 and the tube voltage, tube current, and irradiation time.

(Step 39)
The line sensor 4 detects transmitted X-rays of the inspection object 2 irradiated in the previous step.
The signal processing unit 5 performs signal processing such as amplification of the transmitted X-ray signal of the inspection object 2. The image processing unit 6 forms an image from the transmitted X-ray signal of the inspection object 2 subjected to signal processing.

(Step 3A)
The control unit 9 extracts, as abnormality information, information in which the distribution is significantly different from the luminance value distribution of the image formed in the previous step, that is, foreign matter in the foreign matter inspection mode or information on the hole or crack in the crack inspection mode. Then, the presence / absence of the extracted abnormality information is determined. As a result of the determination, if there is abnormality information, the process proceeds to step 3B, and if there is no abnormality information, the process proceeds to step 3C.

(Step 3B)
The control unit 9 causes the image processing unit 6 to perform processing for emphasizing the abnormality information extracted in the step and displaying it on the television monitor 7. For example, when the television monitor 7 is a color monitor, the abnormal information is colored with a color that alerts the operator or the observer. When the television monitor 7 is a black and white monitor, a circle is displayed around the abnormality information to alert the operator or observer.

(Step 3C)
The television monitor 7 displays the image formed in step 3A or step 3B.
(Step 3D)
It is determined whether or not all inspection objects 2 to be inspected have been inspected. As a result of the determination, if the inspection is not completed, the process returns to step 37, and if the inspection is completed, the process is terminated.

As described above, according to the present embodiment, the foreign object inspection mode for inspecting whether or not foreign matter is mixed in the inspection object 2 and whether or not there are cracks or holes in the inspection object 2 are inspected. Since the control unit 9 sets one inspection mode with the operation unit 10 and controls the conveying device 1, the X-ray source 3, and the image processing unit 6 based on the set inspection mode. Both X-ray inspection and X-ray shielding cracks and holes can be performed.
In addition, since abnormal information such as foreign matter, cracks and holes is highlighted, the operator and observer are alerted.

Next, a second embodiment will be described.
In the present embodiment, an evacuation mechanism is provided in which the inspection object 2 from which a foreign object or the like is detected is evacuated at a position downstream of the irradiation region of the X-ray source 3. For this purpose, the control unit 9 generates an evacuation signal for evacuating the object to be inspected 2 based on the presence of a foreign object or a vivid hole in the object to be inspected 2 in the inspection mode.
As a result, the object to be inspected in which foreign matter is mixed or a hole is opened can be accurately rejected.

Next, a third embodiment will be described.
In the present embodiment, the conveyance device 1 is stopped when a foreign object or the like is detected by inspection.
Thereby, since the inspection line itself stops, a fail-safe function is exhibited for the observer.
Although a plurality of embodiments have been described above, these may be used alone or in any combination.
Thereby, the reliability of the inspection of foreign matter or the like can be further improved.

1 is a schematic configuration diagram showing an X-ray inspection apparatus of the present invention. FIG. 2 is an explanatory diagram illustrating an example from the X-ray detector of the X-ray inspection apparatus of FIG. 1 to an image processing unit. The flowchart explaining the procedure of one Embodiment of the X-ray inspection apparatus of this invention.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Conveyance apparatus, 2 ... Test object, 3 ... X-ray source, 6 ... Image processing part, 9 ... Control part, 10 ... Operation part

Claims (4)

  A moving means for mounting a plurality of objects to be inspected and moving in a predetermined direction, an X-ray source for irradiating one of the objects to be inspected placed on the moving means with X-rays, and the X-ray source are arranged opposite to each other. An X-ray detector for detecting transmitted X-rays of the one inspection object, an image processing means for imaging the transmitted X-rays detected by the X-ray detector, and a transmission imaged by the image processing means In an X-ray inspection apparatus having a display for displaying an X-ray image, there is a foreign object inspection mode for inspecting whether or not a foreign object is mixed in the inspection object, and there are cracks or holes in the inspection object. A mode setting means for setting one inspection mode of a crack hole inspection mode for inspecting whether or not the image is present, and at least one of the moving means and the image processing means is controlled based on the inspection mode set by the mode setting means Control means X-ray examination apparatus, characterized in that the.   The X-ray inspection apparatus according to claim 1, wherein the image processing unit performs image processing so that a foreign matter, a crack, or a hole portion of the inspection object is highlighted on the display.   2. The X according to claim 1, wherein the control unit generates an evacuation signal for evacuating the object to be inspected based on the presence of a foreign object or a vivid hole in the object to be inspected according to the inspection mode. Line inspection device.   The X-ray inspection apparatus according to claim 1, wherein the control unit stops the moving unit based on the presence of a foreign object or a vivid hole in the inspection object in the inspection mode.

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