JP6647873B2 - Inspection device - Google Patents

Description

The present invention relates to inspection apparatus intends line inspection of an article by using electromagnetic waves.

Generates a transmission image of the article with electromagnetic waves by detecting the electromagnetic wave transmitted through the article (X-ray, near infrared, and other electromagnetic waves), and measuring the area of the region corresponding to the article of those translucent over the image, the inspection device you determine whether lack of an article is present on the basis of the area are known (e.g., see Patent Document 1).

JP 2003-59776 A

In inspection apparatus as described above, for example, when, as part of an article is missing slowly, it is difficult to determine the lack of an article is present.

The present invention aims at providing an inspection device that can be accurately determined whether the lack of an article is present.

Inspection apparatus of the present invention includes a irradiation morphism portion you irradiating electromagnetic waves to the article, a detection unit that detect the electromagnetic waves transmitted through the article, Toru article by electromagnetic waves based on the signal output from the detection unit generates excessive image, and an inspection unit for inspecting an article based on transparently image, the inspection unit, the region corresponding to the article of transparently image, obtains a middle point of the width in the predetermined direction, Based on the positions of the plurality of midpoints, it is determined whether or not the article is missing.

In the inspection device this, based on the positions of a plurality of midpoints calculated for the region corresponding to the article of transparently image, determines whether the lack of an article is present. This is based on the knowledge that, even when, for example, a part of an article is loosely loose, the positions of the plurality of midpoints change relatively largely. Therefore, according to the inspection apparatus of this, it is possible to accurately determine whether the lack of an article is present.

The inspection apparatus of the present invention, the inspection unit, if there is a direction in the shape of the article, the region corresponding to the article of transparently image, the angle correction as direction is constant for a given direction May be implemented. According to this, even if the shape of the article is oriented, it is possible to accurately determine whether or not the article has a chip, based on the positions of the plurality of midpoints described above.

In inspection apparatus of the present invention, a region corresponding to the article of transparently image may be a circular or elliptical shape. According to this, it is possible to accurately determine whether or not there is a chip in the article based on the positions of the plurality of midpoints without performing angle correction or the like.

In inspection apparatus of the present invention, the inspection unit, the region corresponding to the article of transparently image, along with determining a first midpoint of the width in the first direction as the midpoint of the width in the predetermined direction, the first direction A second midpoint of the width in the intersecting second direction may be obtained, and it may be determined whether or not the article is chipped based on the positions of the plurality of first midpoints and the positions of the plurality of second midpoints. . According to this, for example, any of a case where a part of the article is loosely chipped along the first direction and a case where the part of the article is loosely chipped along the second direction However, since the chipping of the article can be detected, it is possible to more accurately determine whether or not the article is chipped.

The inspection apparatus of the present invention, the inspection unit, the region corresponding to the article of transparently image, performed rectangle fit to determine the rectangle area is inscribed, also a direction perpendicular to the rectangle longitudinally as a predetermined direction Good. According to this, it is possible to more accurately determine whether or not there is a chip in the article. This is because, at the midpoint of the width in the direction perpendicular to the longitudinal direction of the rectangle, the position of the midpoint changes relatively largely even if, for example, a part of the article is gently chipped. It is based on.

In inspection apparatus of the present invention, the electromagnetic wave may be X-ray. According to this, even if the article is packaged, the chipping of the article can be inspected without being affected by the packaging material or the printing applied to the packaging material.

According to the present invention, it is possible to provide an inspection device that can be accurately determined whether the lack of an article is present.

A configuration diagram of an X-ray examination apparatus is a inspection device according to an embodiment of the present invention. FIG. 2 is a block diagram of a control unit of the X-ray inspection apparatus of FIG. 3 is a flowchart illustrating an inspection procedure performed by an inspection unit of a control unit in FIG. 2. (A) is a figure which shows the area | region corresponding to the oval-shaped article which does not have a chip, and (b) is a figure which shows the area | region corresponding to the oval-shaped article which has a chip. (A) is a figure which shows the area | region corresponding to the oval-shaped article which does not have a chip, and (b) is a figure which shows the area | region corresponding to the oval-shaped article which has a chip. (A) is a figure which shows the area | region corresponding to the rectangular article which does not have a chip, and (b) is a figure which shows the area | region corresponding to the rectangular article which has a chip. (A) is a figure which shows the area | region corresponding to the rectangular article which does not have a chip, and (b) is a figure which shows the area | region corresponding to the rectangular article which has a chip. It is a figure which shows the area | region corresponding to the rectangular article without a chip. (A) is a figure which shows the area | region corresponding to the elliptical-shaped article which has a chipping along a conveyance direction, (b) is the area | region corresponding to the elliptical-shaped article which has a chipping along a direction perpendicular to a conveyance direction. FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings, the same or corresponding portions are denoted by the same reference characters, and redundant description will be omitted.
[Configuration of X-ray inspection apparatus]

As shown in FIG. 1, X-ray inspection apparatus (inspection apparatus) 1 includes an apparatus main body 2, the support legs 3, the shield box 4, the conveyor 5, X-ray irradiation unit (irradiation morphism section) 6 When provided with X-ray detection section (detection section) 7, a display operation unit 8, a control unit 10, a. The X-ray inspection apparatus 1 acquires an X-ray transmission image of the article G ( a transmission image of the article by electromagnetic waves ) while transporting the article G, and inspects the article G based on the X-ray transmission image (for example, a storage number inspection). , Foreign material contamination inspection, missing item inspection, crack chipping inspection, etc.).

  The article G before inspection is carried into the X-ray inspection apparatus 1 by the carry-in conveyor 51, and the article G after inspection is carried out of the X-ray inspection apparatus 1 by the carry-out conveyor 52. The article G determined to be defective by the X-ray inspection device 1 is sorted out of the production line by a sorting device (not shown) arranged downstream of the unloading conveyor 52, and is determined to be a non-defective product by the X-ray inspection device 1. The article G passes through the distribution device as it is.

  The apparatus main body 2 houses a control unit 10 and the like. The support leg 3 supports the apparatus main body 2. The shield box 4 is provided in the apparatus main body 2 and prevents leakage of X-rays. The shield box 4 has a carry-in port 4a and a carry-out port 4b. The articles G before inspection are carried into the shield box 4 from the carry-in conveyor 51 via the carry-in entrance 4a, and the articles G after inspection are carried out from inside the shield box 4 to the carry-out conveyor 52 via the carry-out exit 4b. . Each of the carry-in entrance 4a and the carry-out exit 4b is provided with an X-ray shielding curtain (not shown) for preventing X-ray leakage.

  The transport conveyor 5 is arranged in the shield box 4 and transports the articles G along the transport direction A from the entrance 4a to the exit 4b. The transport conveyor 5 is, for example, a belt conveyor spanned between the entrance 4a and the exit 4b.

The X-ray irradiator 6 is arranged in the shield box 4 and irradiates the articles G conveyed by the conveyor 5 with X-rays ( electromagnetic waves ). The X-ray irradiator 6 includes, for example, an X-ray tube that emits X-rays and a collimator that spreads the X-rays emitted from the X-ray tube in a fan shape in a plane perpendicular to the transport direction A.

  The X-ray detector 7 is arranged in the shield box 4 and detects X-rays transmitted through the article G and the conveyor 5. The X-ray detector 7 is configured as, for example, a line sensor. Specifically, the X-ray detector 7 includes a plurality of photodiodes arranged one-dimensionally along a horizontal direction perpendicular to the transport direction A, and a scintillator arranged on the X-ray incident side with respect to each photodiode. And In this case, the X-ray detector 7 converts the X-ray incident on the scintillator into light, and converts the light incident on each photodiode into an electric signal.

  The display operation unit 8 is provided in the apparatus main body 2 and displays various information, receives input of various conditions, and the like. The display operation unit 8 is, for example, a liquid crystal display, and displays an operation screen as a touch panel. In this case, the operator can input various conditions via the display operation unit 8.

The control unit 10 is disposed in the apparatus main body 2 and controls the operation of each unit of the X-ray inspection apparatus 1. The control unit 10 includes a CPU (Central Processing Unit), a ROM (Read Only Memory), a RAM (Random Access Memory), and the like. The signal output from the X-ray detection unit 7 and subjected to A / D conversion is input to the control unit 10. The control unit 10 functions as an inspection unit that generates an X-ray transmission image of the article G based on the signal and inspects the article G based on the X-ray transmission image.
[Configuration of inspection unit]

  As illustrated in FIG. 2, the control unit 10 includes, as an inspection unit 11, an area extraction unit 12, a rectangle fitting unit 13, an angle correction unit 14, a midpoint extraction unit 15, and a missing determination unit 16. Have. In the control unit 10, the inspection unit 11, the area extraction unit 12, the rectangle fitting unit 13, the angle correction unit 14, the midpoint extraction unit 15, and the lack determination unit 16 are configured as software. However, these units may be configured as hardware.

  The area extracting unit 12 extracts an area corresponding to the article G from the X-ray transmission image. When it is set that the shape of the article G has an orientation, the rectangle fitting unit 13 performs a rectangle fitting for obtaining a rectangle inscribed by the region extracted by the region extracting unit 12. The angle correction unit 14 performs angle correction on the area where the rectangle fitting is performed by the rectangle fitting unit 13 so that the longitudinal direction of the rectangle is parallel to the transport direction A.

  The midpoint extracting unit 15 conveys the area extracted by the area extracting unit 12 (the area where the angle correction is performed by the angle correcting unit 14 when the shape of the article G is set to be oriented). A plurality of midpoints in a direction perpendicular to the direction A are extracted. The missing determining unit 16 determines whether or not the article G is missing based on the positions of the plurality of middle points extracted by the middle point extracting unit 15.

  Note that the shape having an orientation with respect to the article G (or an area corresponding to the article G in the X-ray transmission image) is defined as a predetermined shape at a predetermined position of the article G (or an area corresponding to the article G in the X-ray transmission image). And a polygonal shape such as a triangular shape or a rectangular shape (including a chamfered corner). On the other hand, the shape having no orientation for the article G (or an area corresponding to the article G in the X-ray transmission image) includes a circular shape and an elliptical shape.

In the area corresponding to the article G in the X-ray transmission image, the midpoint of the width in the predetermined direction is the midpoint of a line connecting two intersections of a straight line parallel to the predetermined direction and the outer edge of the area. . For example, as shown in FIG. 4, the middle point extracting unit 15 includes a straight line parallel to a direction B (a direction perpendicular to the transport direction A) and an outer edge of a region R (a region corresponding to the article G in the X-ray transmission image). A plurality of midpoints P of a line segment connecting the two intersections with are extracted. The midpoint extracting unit 15 sets a plurality of straight lines parallel to the direction B over the entire region R, and extracts a plurality of midpoints P. At this time, the plurality of middle points P may be extracted continuously (that is, as adjacent pixels) or may be extracted intermittently (that is, as every other pixel).
[Inspection processing by inspection unit]

The inspection procedure by the inspection unit 11 described above will be described in more detail with reference to the flowchart of FIG. In the following, description will be made separately for [when the shape of the article G is set to have no direction] and [when the shape of the article G is set to have a direction].
[When the shape of the article G is set to have no orientation]

  First, the region extraction unit 12 acquires an X-ray transmission image of the article G (S01 in FIG. 3), and binarizes the X-ray transmission image, for example, to correspond to the article G in the X-ray transmission image. The region R is extracted (S02 in FIG. 3). Subsequently, when it is set in advance that the shape of the article G has no direction (in the case of “NO” in S03 of FIG. 3), the middle point extracting unit 15 performs the processing as shown in FIGS. 4 and 5. For the region R extracted by the region extracting unit 12, a plurality of midpoints P in a direction (predetermined direction) B perpendicular to the transport direction A are extracted (S04 in FIG. 3).

  FIGS. 4 and 5 are diagrams illustrating the region R when the shape of the article G is elliptical and the shape of the article G is set to have no orientation.

  As shown in FIG. 4A, when the direction of the major axis of the ellipse is parallel to the transport direction A and there is no chip in the article G, a straight line obtained from the plurality of midpoints P by the least squares method A plurality of midpoints P are located on L. On the other hand, as shown in FIG. 4B, when the direction of the major axis of the ellipse is parallel to the transport direction A and the article G has a chip, it is obtained from the plurality of midpoints P by the least square method. The plurality of midpoints P are not located on the straight line L, and particularly, the midpoint P having a chipped portion is relatively far away from the straight line L.

  In addition, as shown in FIG. 5A, when the direction of the major axis of the ellipse is not parallel to the transport direction A and there is no chip in the article G, it is obtained from the plurality of midpoints P by the least square method. Although all the midpoints P are not located on the straight line L, all the midpoints P are located near the straight line L along the straight line L. On the other hand, as shown in FIG. 5B, when the direction of the major axis of the ellipse is not parallel to the transport direction A and the article G is chipped, it is determined from the plurality of midpoints P by the least square method. The plurality of midpoints P are not located on the straight line L, and particularly, the midpoint P having a chipped portion is relatively far away from the straight line L.

  As described above, when it is set that the shape of the article G is not oriented (that is, when the region R has a circular shape or an elliptical shape), for example, the straight line L is longer than a predetermined distance (that is, the predetermined pixel When there is an intermediate point P that is more than (number more than), it can be determined that the article G is missing.

  Subsequent to S04 in FIG. 3, the chip determining unit 16 determines whether or not the article G is chipped based on the positions of the plurality of middle points P extracted by the middle point extracting unit 15 (FIG. 3. S05). Specifically, as described above, when there is no midpoint P separated from the straight line L by a predetermined distance or more, the chip determination unit 16 determines that the article G has no chip, and If there is a midpoint P separated by a predetermined distance or more, it is determined that the article G is missing.

Subsequently, when the chipping determination unit 16 determines that there is no chipping (in the case of “NO” in S05 of FIG. 3), the inspection unit 11 is, for example, a shaker arranged downstream of the X-ray inspection apparatus 1. The chipless processing for passing the article G as it is to the dispensing apparatus is performed (S06 in FIG. 3). On the other hand, when the chip determination unit 16 determines that there is a chip (in the case of “YES” in S05 in FIG. 3), the inspection unit 11 is, for example, a distribution arranged downstream of the X-ray inspection apparatus 1. A chipping process for distributing the article G to the outside of the production line is performed on the device (S07 in FIG. 3).
[When the shape of the article G is set to be oriented]

First, the region extraction unit 12 acquires an X-ray transmission image of the article G (S01 in FIG. 3), and binarizes the X-ray transmission image, for example, to correspond to the article G in the X-ray transmission image. The region R is extracted (S02 in FIG. 3). Subsequently, if it is set in advance that the shape of the article G has an orientation (in the case of “ YES ” in S03 of FIG. 3), the rectangular fitting unit 13 sets the area extracting unit as shown in FIG. A rectangle fitting for obtaining a rectangle S inscribed by the region R extracted by the step 12 is performed (S08 in FIG. 3). Subsequently, as shown in FIG. 7, the angle correction unit 14 corrects the angle of the region R in which the rectangular fitting is performed by the rectangular fitting unit 13 so that the longitudinal direction C of the rectangle S is parallel to the transport direction A. (S09 in FIG. 3). Subsequently, the midpoint extracting unit 15 extracts a plurality of midpoints P in the direction (predetermined direction) B perpendicular to the transport direction A in the region R where the angle correction has been performed by the angle correcting unit 14 (S04 in FIG. 3). ).

  FIG. 6 and FIG. 7 are diagrams illustrating a region R when the shape of the article G is rectangular and the shape of the article G is set to be oriented.

  As shown in FIG. 7A, when the longitudinal direction C of the rectangle S is parallel to the transport direction A and there is no chip in the article G, a straight line obtained from the plurality of midpoints P by the least squares method A plurality of midpoints P are located on L. On the other hand, as shown in FIG. 7B, when the longitudinal direction C of the rectangle S is parallel to the transport direction A and the article G has a chip, it is determined from the plurality of midpoints P by the least square method. The plurality of midpoints P are not located on the straight line L, and particularly, the midpoint P having a chipped portion is relatively far away from the straight line L.

  Even if there is no chip in the article G, unless the angle correction is performed so that the longitudinal direction C of the rectangle S is parallel to the transport direction A, as shown in FIG. Are not located on the straight line L obtained by the least-squares method.

  As described above, when the shape of the article G is set to have a direction, for example, the angle is corrected so that the longitudinal direction C of the rectangle S is parallel to the transport direction A, and then the straight line L When there is a midpoint P that is separated by a predetermined distance or more (that is, by a predetermined number of pixels) or more, it can be determined that the article G is missing.

  Subsequent to S04 in FIG. 3, the chip determining unit 16 determines whether or not the article G is chipped based on the positions of the plurality of middle points P extracted by the middle point extracting unit 15 (FIG. 3. S05). Specifically, as described above, when there is no midpoint P separated from the straight line L by a predetermined distance or more, the chip determination unit 16 determines that the article G has no chip, and If there is a midpoint P separated by a predetermined distance or more, it is determined that the article G is missing.

Subsequently, when the chipping determination unit 16 determines that there is no chipping (in the case of “NO” in S05 of FIG. 3), the inspection unit 11 is, for example, a shaker arranged downstream of the X-ray inspection apparatus 1. A chipless process for passing the article G as it is to the dispensing device is performed (S06 in FIG. 3). On the other hand, when the chip determination unit 16 determines that there is a chip (in the case of “YES” in S05 in FIG. 3), the inspection unit 11 is, for example, a distribution arranged downstream of the X-ray inspection apparatus 1. A chipping process for distributing the article G to the outside of the production line is performed on the device (S07 in FIG. 3).
[Action and effect]

  As described above, the X-ray inspection apparatus 1 determines whether or not there is a chip in the article G based on the positions of the plurality of midpoints P obtained for the region R corresponding to the article G in the X-ray transmission image. judge. This is based on the knowledge that the positions of the plurality of midpoints P are relatively largely changed even when, for example, a part of the article G is loosely loosened. For example, in the case where a part of the article G is gently chipped, the area of the region R corresponding to the article G, the peripheral length of the outer edge of the area R corresponding to the article G, and the like are located at the position of the middle point P. Shows a big change. Therefore, according to the X-ray inspection apparatus 1, it is possible to accurately determine whether or not the article G has a chip.

  Further, in the X-ray inspection apparatus 1, when the inspection unit 11 has an orientation in the shape of the article G, the longitudinal direction C of the rectangle S is in the transport direction A in the region R corresponding to the article G in the X-ray transmission image. Angle correction is performed so as to be parallel to. Thus, even if the shape of the article G is oriented, it is possible to accurately determine whether or not the article G has a chip, based on the positions of the plurality of middle points P described above.

In the X-ray inspection apparatus 1, the region R corresponding to the article G in the X-ray transmission image may have a circular shape or an elliptical shape. In this case, it is possible to accurately determine whether or not the article G has a chip based on the positions of the plurality of midpoints P without performing angle correction or the like.
[Modification]

  As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said Embodiment.

  For example, for the region R corresponding to the article G in the X-ray transmission image, the inspection unit 11 may calculate a plurality of midpoints P in the predetermined direction without obtaining the midpoint P in the direction B. Based on the position of the midpoint P, it can be determined whether or not the article G has a chip. As an example, for an article G without a chip, if a plurality of midpoints P in the predetermined direction are determined and the positions of the respective midpoints P are stored, each of the extracted midpoints is extracted from the stored position of the midpoint P. When the position of P is more than a predetermined distance (that is, more than a predetermined number of pixels), it can be determined that the article G is missing. Further, in the above embodiment, when the midpoint P that is separated from the straight line L by a predetermined distance or more (that is, by a predetermined number of pixels) exists, it is determined that the article G is missing. It may be determined whether or not the article G has a chip. A line connecting the plurality of midpoints P is compared with a straight line L or a linear shape of a regular article (an article G without a chip) to determine whether or not the article G has a chip based on the similarity. Is also good. Alternatively, in the case where a line connecting the plurality of midpoints P is a straight line for a regular article (an article G having no chipping), the article G has a chipping based on the degree of curvature of the line connecting the plurality of midpoints P. It may be determined whether or not.

  Further, the inspection unit 11 does not need to perform the angle correction so that the longitudinal direction C of the rectangle S is parallel to the transport direction A, but may perform the angle correction so that the orientation is constant with respect to a predetermined direction. It is possible to determine whether or not the article G has a chip in the shape of the article G. As an example, if the position of each of the midpoints P in the case where the angle correction is performed so that the orientation is constant with respect to the predetermined direction for the article G having no chip is stored, the stored position of each of the midpoints P is stored. Accordingly, when the position of each of the extracted midpoints P is separated by a predetermined distance or more (that is, by a predetermined number of pixels or more), it can be determined that the article G is missing. Further, the angle correction may be performed so as to be line-symmetric with respect to a line extending in a direction perpendicular to a predetermined direction for obtaining the midpoint P of the width. In this case, as for the article G having no chip, the plurality of extracted midpoints P are located on the line, so that it is possible to easily determine whether the article G has a chip.

  In addition, as shown in FIG. 9A, the inspection unit 11 sets the region R corresponding to the article G in the X-ray transmission image as the midpoint P of the width in the predetermined direction, as shown in FIG. In addition, a first middle point P1 of the width in the direction B perpendicular to the transport direction A is obtained, and as shown in FIG. 9B, a second direction (here, the transport direction A) intersecting the first direction is used. ) May be obtained. Then, the inspection unit 11 may determine whether or not the article G is missing based on the positions of the plurality of first middle points P1 and the positions of the plurality of second middle points P2.

  According to this, for example, when a part of the article G is gently chipped along the first direction (here, the direction B perpendicular to the transport direction A) (the case of FIG. 9B). In any of the cases where the part of the article G is gently chipped along the second direction (here, the transport direction A) (the case of FIG. 9A), the article G Since it is possible to detect the chipping occurring in the object G, it is possible to more accurately determine whether or not the article G has a chipping. Note that the first direction and the second direction do not necessarily need to be orthogonal to each other as shown in FIGS. 9A and 9B, but may intersect with each other.

  Further, the inspection unit 11 may perform the rectangular fit for a purpose other than the angle correction. As an example, for the region R corresponding to the article G in the X-ray transmission image, the inspection unit 11 performs the rectangle fitting for finding the rectangle S in which the region R is inscribed, and sets the direction orthogonal to the longitudinal direction C of the rectangle S to: The predetermined direction for finding the midpoint P of the width may be used. According to this, it is possible to more accurately determine whether or not the article G is missing. This is because at the midpoint P of the width in the direction orthogonal to the longitudinal direction C of the rectangle S, even if, for example, a part of the article G is loosely loose, the position of the midpoint P is relatively small. It is based on the knowledge that it will change significantly.

Further, the present invention generates a transmission image of the article by electromagnetic waves by detecting the electromagnetic wave transmitted through the article (near infrared, and other electromagnetic waves), inspect the goods on the basis of those translucent over the image, X-rays it is applicable to inspection device other than the inspection apparatus. However, when X-rays are used as electromagnetic waves , even if the article G is packaged, it is possible to inspect the chipping of the article G without being affected by the packaging material or the printing applied to the packaging material. can do.

1 ... X-ray inspection apparatus (inspection apparatus), 6 ... X-ray irradiator (irradiation morphism portion), 7 ... X-ray detector (detecting section), 11 ... inspection unit, G ... article.

Claims (6)

And irradiation morphism portion you irradiating electromagnetic waves to the article,
A detection unit that detect the electromagnetic waves transmitted through the article,
Before it generates transparently image of the article by electromagnetic waves on the basis of a signal output from the dangerous out section, and an inspection unit for inspecting the article based on the previous KiToru over images,
The measurement part, for the region corresponding to the article of the prior KiToru over image, obtains a middle point of the width in the predetermined direction, based on the positions of the plurality of the midpoint, whether lack is present in the article the judges, inspection equipment. The measurement part, if there is a direction in the shape of the article, for the region corresponding to the article of the prior KiToru over images, the angle correction as the direction to the predetermined direction is constant implementation is, inspection apparatus according to claim 1. The region corresponding to the article of the prior KiToru over image is a circular or elliptical shape, inspection apparatus according to claim 1. The inspection unit, before the said region corresponding to the article of KiToru over the image, with determining a first midpoint of the width in the first direction as the midpoint of the width in the predetermined direction, the first direction A second midpoint of the width in the intersecting second direction is determined, and it is determined whether or not the article is chipped based on the positions of the plurality of first midpoints and the positions of the plurality of second midpoints. , inspection apparatus of any one of claims 1 to 3. The measurement part, for the region corresponding to the article of the prior KiToru over images, implementing a rectangle fit to determine the rectangle the area inscribed, the direction perpendicular to the longitudinal direction of the rectangular and the predetermined direction , inspection apparatus of any one of claims 1 to 4. The electromagnetic wave is an X-ray, inspection apparatus of any one of claims 1 to 5.

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