JP2006063274A - Detergent for electric/electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a detergent that enables surely preventing electrostatic charge, does not erode wiring etc., and enables producing electric/electronic components in a good yield. <P>SOLUTION: This detergent comprises, as main components, (1) a hydrocarbon-based solvent of 93-100 mass%, (2) an organic solvent other than the hydrocarbon-based one of 0-7 mass% such as octanol, and (3) an organic onium salt represented by general formula (I) (wherein Z is N or P, R<SP>1</SP>-R<SP>4</SP>are each a 4-20C hydrocarbon group which may be substituted, and relative to R<SP>1</SP>-R<SP>4</SP>, the ratio of the carbon numbers of a group having the most carbon numbers to a group having the least carbon numbers is ≤2, and X<SP>-</SP>is an anion represented by formula (II) (wherein A<SP>1</SP>, A<SP>2</SP>are each a fluoroacyl group etc.)) of 0.001-10 pts.mass based on the total of (1) and (2) of 100 pts.mass such as tetraoctyl ammonium-2, 2, 2-trifluoro-N-(trifluoromethane sulfonyl)acetamide. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cleaning agent for electrical and electronic parts such as silicon wafers, compound semiconductors, printed boards, mounting boards, magnetic heads, magnetic disks and the like.

  An electric element such as a magnetic head is manufactured by repeating processes such as film formation, polishing, and cutting. In these processes, wax, silicone oil are used to fix an element or substrate made of metal, semiconductor, etc. to a processing apparatus. Etc. are used. If this wax or the like remains on the element surface, it may interfere with the next film forming process.

  For this reason, it is necessary to remove wax and the like. Generally, petroleum (hydrocarbon) cleaning agents such as normal hexane are used as cleaning agents for removing wax and the like. However, non-polar solvents such as petroleum solvents are easily charged, and there is a problem that not only there is a danger of being ignited by generated static electricity, but also an element is destroyed by static electricity.

  For this problem, it is also known that a detergent obtained by adding an anionic surfactant to a hydrocarbon solvent has an effect of preventing the generation of static electricity to some extent. However, the anionic surfactant does not necessarily dissolve well, or even once dissolved, precipitation occurs with time, which causes a problem in storage stability of the solution. Furthermore, when the molded product is washed with a cleaning agent having such a problem, there is a problem that a powdery white product is formed on the surface of the molded product after drying, and the surface is soiled. In order to solve this problem, a method is known in which charging is suppressed by adding a polar solvent to the hydrocarbon-based cleaning agent in addition to the anionic surfactant (for example, Patent Document 1).

  On the other hand, an organic onium salt composed of an organic ammonium salt and an imide compound is kneaded by melt blending with a thermoplastic polymer, kneaded into a fiber or film, or alkyl acrylate to give antistatic properties to a pressure-sensitive adhesive. (For example, see Patent Documents 2 and 3).

  Since the organic onium salt composed of the organic ammonium salt and the imide compound is a salt and exhibits a liquid state even near room temperature, various studies have been made as an electrolyte of a lithium ion battery or an electric double layer capacitor (for example, Patent Document 4, 5).

JP-A-6-136387 Special table 2003-511505 gazette International Publication No. 03/011958 Pamphlet International Publication No. 03/012900 Pamphlet JP-A-7-272882

  As described above, conventionally used anionic surfactants have low solubility in hydrocarbon organic solvents, and it is difficult to obtain sufficient antistatic properties. By using a polar solvent in combination, it is possible to improve the solubility of the anionic surfactant, but this time a new problem arises that the water absorption of the cleaning agent becomes high.

  When a large amount of water is contained in the cleaning agent, corrosion is likely to proceed due to the influence of this water, so that the fine wiring of the electronic / electronic component is likely to be damaged and the yield is lowered.

  In particular, many surfactants conventionally used contain alkali metal ions such as sodium ions and halogen ions such as chlorine ions and bromine ions, and these alkali metal ions and halogen ions promote corrosion. Since it has an action, it is difficult to use it for cleaning electronic / electronic parts. In addition, since a perchlorate ion, a borofluoride ion, etc. are hydrolyzed to produce a halogen ion, a detergent containing a surfactant having these anions cannot be used.

  Therefore, since there is almost no static charge and no corrosion of wiring, etc., even when used for cleaning electronic and electronic parts, destruction of elements, etc. and corrosion will not occur, thus producing electric / electronic parts with high yield There has been a demand for a cleaning agent that can be used.

  The present inventors have intensively studied to solve the above problems. And when organic onium salt with a specific structure is adopted as an antistatic agent, it is found that it dissolves well in hydrocarbon solvents without adding almost any polar solvent that increases the hydrophilicity of the solvent. As a result, the present invention was completed.

That is, the present invention
(1) Hydrocarbon solvent: 93 to 100% by mass,
(2) Organic solvents other than hydrocarbon solvents: 0 to 7% by mass, and
(3) The following general formula (I)

{In the above formula, Z represents a nitrogen atom or a phosphorus atom; R ¹ , R ² , R ³ and R ⁴ each independently represent a hydrocarbon group having 4 to 20 carbon atoms, and Among the R ¹ , R ² , R ³ and R ⁴ , the ratio of the carbon number of the hydrocarbon group having the largest number of carbon atoms to the hydrocarbon group having the smallest number of carbon atoms is 2 or less, and X ⁻ represents the following formula ( II)

(In the above formula, A ¹ and A ² each independently represents a fluoroacyl group, a fluoroalkoxycarbonyl group, a fluoroalkylsulfonyl group, a fluoroalkoxysulfonyl group, or a nitrile group). }
An organic onium salt represented by: 0.001 to 10 parts by mass with respect to 100 parts by mass in total of (1) and (2),
Is a cleaning agent for electrical and electronic parts.

  The cleaning agent of the present invention is mainly composed of a hydrocarbon solvent (93 to 100% by mass) and contains only 7% by mass or less of other organic solvents. There is almost no. Further, by adopting an organic onium salt having a specific structure as an antistatic component, it can be well dissolved in a solvent mainly composed of the above hydrocarbon solvent, and high antistatic properties can be obtained even in a small amount. As a result, even when used for cleaning magnetic heads, printed boards, mounting bases, magnetic recording disks, etc., it is possible to produce electrical / electronic components with a high yield without causing damage to elements due to corrosion or static electricity. Moreover, there is almost no risk of ignition due to electrostatic charging.

  The cleaning agent of the present invention contains an organic solvent and an organic onium salt as main components, and the solvent is (1) an organic solvent other than a hydrocarbon solvent (93 to 100% by mass and 7% by mass or less) , Non-hydrocarbon organic solvent). When the proportion of the hydrocarbon-based solvent is less than 93% by mass, not only the detergency (solubility) of wax, grease, silicone oil, etc. is lowered, but also the water absorption is rapidly increased. Corrosion is likely to occur. Further, when a halogen-based solvent is a main component, halogen ions generated by the decomposition of the halogen-based solvent may promote corrosion.

  As the hydrocarbon solvent, known hydrocarbon organic solvents may be used for cleaning electric and electronic parts, and saturated hydrocarbon solvents such as normal paraffin hydrocarbons, isoparaffin hydrocarbons, and naphthene hydrocarbons. Examples thereof include a solvent, an aromatic hydrocarbon solvent, and a mixture thereof. Normal paraffinic hydrocarbons or isoparaffinic hydrocarbons are preferred, and normal paraffinic hydrocarbons are particularly preferred because of low toxicity and excellent detergency. In consideration of volatility and flammability, normal paraffin hydrocarbons having 6 to 25 carbon atoms are preferable, and normal paraffin hydrocarbons having 8 to 20 carbon atoms are more preferable. Specific examples of such normal paraffin hydrocarbons include hexane, heptane, octane, nonane, decane, undecane, dodecane, tetradecane, hexadecane, and octadecane. Examples of isoparaffin hydrocarbons include isooctane, isononane, isodecane, isoundecane, and isododecane. Examples of naphthene hydrocarbons include cyclopentane, alkylcyclopentane, cyclohexane, alkylcyclohexane, and decalin. Aromatic hydrocarbons Examples thereof include toluene, xylene, alkylbenzene and the like. In consideration of various properties such as detergency (solubility), volatility, odor, flash point, specific gravity, color, etc., these hydrocarbon compounds can be used alone or in combination of two or more to form the material to be cleaned. Those having good solubility with respect to the object to be removed can be appropriately selected and combined depending on the application and used as a hydrocarbon solvent.

  In order to obtain sufficient detergency and low water absorption, the blending amount of the hydrocarbon-based organic solvent needs to be 93% by mass or more in the total organic solvent blended in the cleaning agent, and is 95% by mass or more. It is preferable that it is 98% by mass or more, more preferably 99% by mass or more.

  The solvent in the cleaning agent of the present invention contains the above hydrocarbon solvent as a main component, but it is also preferable to add a small amount of another organic solvent in order to improve the solubility of the organic onium salt described later. However, common non-hydrocarbon organic solvents, such as alcohols, ethers, ketones, esters, amides, etc., are highly hydrophilic. Therefore, the compounding quantity needs to be 7 mass% or less. Halogen solvents also have toxic and corrosive problems.

  It is preferable to use primary alcohols as non-hydrocarbon organic solvents, because the effect of improving the solubility of organic onium salts in hydrocarbon solvents is high even with a small amount of addition. It is difficult, and since it does not easily volatilize during storage and use, it is a linear primary class having 6 to 20 carbon atoms in terms of excellent storage stability such as phase separation and prevention of crystal precipitation. Alcohol is preferred. Specific examples of the linear primary alcohol having 6 to 20 carbon atoms include 1-hexanol, 1-heptanol, 1-octanol, 1-decanol, 1-dodecanol and the like.

  If the total amount is 7% by mass or less, it is possible to use a non-hydrocarbon solvent other than the primary alcohol as necessary for the preparation of detergency and other characteristics. From the viewpoint of making the cleaning agent as low as possible and further having excellent storage stability, organic solvents other than hydrocarbon organic solvents and linear primary alcohols having 6 to 20 carbon atoms are as much as possible. It is preferable not to mix. Non-hydrocarbon organic solvents other than the linear primary alcohol include secondary alcohols such as isopropyl alcohol, polyhydric alcohols such as diethylene glycol and glycerin, diethyl ether, diisopropyl ether, tetrahydrofuran, 1, 4 -Ethers such as dioxane, ethylene glycol dimethyl ether, propylene glycol dimethyl ether and diethylene glycol diethyl ether, esters such as ethyl acetate, propyl acetate and butyl acetate, ketones such as acetone, methyl ethyl ketone, 2-pentanone, 3-pentanone and 2-hexanone And nitriles such as acetonitrile and propionitrile.

  As the organic solvent in the cleaning agent of the present invention, it is easy to stably dissolve an organic onium salt in an amount capable of imparting a necessary and sufficient antistatic property over a long period of time, and it is possible to keep water absorption low. It is preferable that the hydrocarbon-based organic solvent is a mixed solvent composed of 99.999 to 93% by mass and the linear primary alcohol having 6 to 20 carbon atoms is 0.001 to 7% by mass. More preferably, the organic solvent is 99.99 to 95% by mass, the linear primary alcohol having 6 to 20 carbon atoms is 0.01 to 5% by mass, and the hydrocarbon organic solvent is 99.9%. It is particularly preferred that the linear primary alcohol having ˜98 mass% and C 6-20 is 0.1 to 2 mass%.

  The greatest feature of the present invention is the following general formula (I) as an antistatic component:

{In the above formula, Z represents a nitrogen atom or a phosphorus atom; R ¹ , R ² , R ³ and R ⁴ each independently represent a hydrocarbon group having 4 to 20 carbon atoms, and Among the R ¹ , R ² , R ³ and R ⁴ , the ratio of the carbon number of the hydrocarbon group having the largest number of carbon atoms to the hydrocarbon group having the smallest number of carbon atoms is 2 or less, and X ⁻ represents the following formula ( II)

(In the above formula, A ¹ and A ² each independently represents a fluoroacyl group, a fluoroalkoxycarbonyl group, a fluoroalkylsulfonyl group, a fluoroalkoxysulfonyl group, or a nitrile group). }
In the point which mix | blends 0.001-10 mass parts with respect to a total of 100 mass parts of the said organic solvent.

  Onium salts and surfactants other than those represented by the above formula (I) have low solubility in organic solvents containing hydrocarbon organic solvents as the main component as described above, or low antistatic performance. Therefore, sufficient antistatic properties cannot be obtained. In other words, with known antistatic agents other than those described above, in order to dissolve the amount necessary to obtain sufficient antistatic properties, the amount of non-hydrocarbon organic solvent exceeds 7% by mass and is much larger. It is necessary to mix | blend, Therefore, it will become a thing with remarkably high water absorption. In the case of a compound containing an alkali metal ion or a halogen ion, there is a problem of further promoting corrosion.

  On the other hand, the organic onium salt represented by the above formula (I) has high solubility in hydrocarbon solvents, and does not require blending of non-hydrocarbon organic solvents, or a small amount can be blended. There is almost no worsening of sex. Furthermore, since the organic onium salt represented by the above formula (I) is not dissolved in water, it is possible to easily remove alkali metal ions and halogen ions that may be mixed as synthetic impurities by washing with ion exchange water or the like. There are also advantages.

  In the above formula (I), Z represents a nitrogen atom or a phosphorus atom. That is, the compound represented by the above formula (I) is a quaternary ammonium salt or a quaternary phosphonium salt.

In the above formula (I), R ¹ , R ² , R ³ and R ⁴ each independently represent a hydrocarbon group having 4 to 20 carbon atoms, and the R ¹ , R ² , R 4 The ratio of the number of carbon atoms of the hydrocarbon group having the largest number of carbon atoms and the hydrocarbon group having the smallest number of carbon atoms among ³ and R ⁴ is 2 or less. When any one of R ¹ , R ² , R ³ and R ⁴ is a hydrocarbon group having 3 or less carbon atoms, the solubility in the hydrocarbon-based solvent is extremely reduced, and the formula (I In order to dissolve the same amount as the organic onium salt represented by (), a large amount of non-hydrocarbon solvent is required, and corrosive problems are likely to occur. Further, when R is a hydrogen atom, not only the same problem as described above occurs but also the thermal stability is lowered.

  On the other hand, when it has a substituent having 21 or more carbon atoms, the interaction between onium cations is increased, and it is assumed that the mobility of ions when dissolved in a hydrocarbon solvent decreases. However, sufficient conductivity (antistatic property) cannot be obtained.

These R ¹ , R ² , R ³ and R ⁴ may all be the same hydrocarbon group or different hydrocarbon groups, but the hydrocarbon group having the largest number of carbon atoms (hereinafter referred to as the maximum hydrocarbon group), The ratio of the number of carbon atoms to the hydrocarbon group having the smallest number of carbon atoms (hereinafter referred to as the minimum hydrocarbon group) must be 2 or less. When the ratio of the carbon number of the maximum hydrocarbon group to the carbon number of the minimum hydrocarbon group exceeds 2, sufficient conductivity cannot be obtained. This is presumed to be because the dissociation degree of the anion and cation is lowered by specifically interacting with the anion at the shortest hydrocarbon group portion.

The hydrocarbon groups in R ¹ , R ² , R ³ and R ⁴ are halogen atoms such as fluorine atom, chlorine atom and bromine atom, alkoxy groups having 1 to 10 carbon atoms such as methoxy group and ethoxy group, etc. May be bonded, but the solubility in hydrocarbon solvents is good, the water absorption of the organic onium salt itself is low, and further considering the chemical stability and environmental impact More preferably, it is a hydrocarbon group having no substituent.

  The hydrocarbon group having 4 to 20 carbon atoms may be linear, branched or cyclic, and may be a known hydrocarbon group. Specific examples of the hydrocarbon group include butyl, hexyl, octyl, 2-ethylhexyl, octadecyl and other alkyl groups having 4 to 20 carbon atoms, such as phenyl, naphthyl and tolyl. C6-C20 aralkyl groups, such as a 6-20 aryl group and a benzyl group, are mentioned. In view of solubility and chemical stability, the alkyl group is preferably an alkyl group having 4 to 20 carbon atoms, and more preferably an alkyl group having 6 to 15 carbon atoms.

Specific examples of the quaternary ammonium cation and the quaternary phosphonium cation, which are cation moieties in the organic onium salt represented by the general formula (I), include tetrabutylammonium cation, tetrahexylammonium cation, and tetraoctylammonium cation. Symmetric quaternary ammonium cations in which R ^{1 to} R ⁴ are all the same bonded to a central nitrogen atom such as tetradecyl ammonium cation; butyl trioctyl ammonium cation, hexyl trioctyl ammonium cation, tridecyl octyl ammonium cation , dibutyl octyl ammonium cation, one or two are different from the other pseudo-symmetrical quaternary ammonium cations of R ¹ to R ^4, such as dihexyl dioctyl ammonium cation Tetraethyl phosphonium cation, tetrabutylphosphonium cation, symmetric phosphonium cations R ¹ to R ⁴ are all the same, such as tetra-octyl phosphonium cation; butyl trioctyl phosphonium cations, hexyl trioctyl phosphonium cation, tri-decyl octyl phosphonium cation, dibutyl octyl Pseudosymmetric quaternary phosphonium cations in which one or two of R ^{1 to} R ⁴ are different from others, such as phosphonium cation and dihexyl dioctyl phosphonium cation.

Among them, since high conductivity can be obtained with a small amount of addition, a symmetrical quaternary quaternary in which R ^{1 to} R ⁴ such as tetrabutylammonium cation, tetrahexylammonium cation, tetraoctylammonium cation, and tetradecylammonium cation are all the same. Ammonium cations are particularly preferably used.

In the general formula (I), X ⁻ represents the following formula (II):

(In the above formula, A ¹ and A ² each independently represents a fluoroacyl group, a fluoroalkoxycarbonyl group, a fluoroalkylsulfonyl group, a fluoroalkoxysulfonyl group, or a nitrile group).

When A ¹ and A ² are other than a fluoroacyl group, a fluoroalkoxycarbonyl group, a fluoroalkylsulfonyl group, a fluoroalkoxysulfonyl group, or a nitrile group, the anion cannot be stably present or dissolved in a hydrocarbon solvent. It is difficult to dissociate, or even if dissolved, the dissociation is insufficient and the necessary conductivity (antistatic property) cannot be obtained.

Examples of the fluoroacyl group include a trifluoroacetyl group and a pentafluoropropionyl group. Examples of the fluoroalkoxycarbonyl group include a perfluoromethoxyacetyl group and a perfluoromethoxypropionyl group. Examples of the fluoroalkylsulfonyl group include a trifluoromethanesulfonyl group. Perfluoromethoxymethanesulfonyl group, and examples of the fluoroalkoxysulfonyl group include a perfluoromethoxymethanesulfonyl group, a perfluoromethoxyethanesulfonyl group, and the like. As these A ¹ and A ² , a group having 3 or less carbon atoms is preferable, and a group having 2 or less carbon atoms is more preferable in that high antistatic properties can be obtained with a smaller amount.

  Specific examples of the anion represented by the general formula (II) include sulfonylamide anions such as bis (trifluoromethanesulfonyl) imide anion, bis (pentafluoroethanesulfonylimide) anion, trifluoromethanesulfonylnonafluorobutanesulfonylamide anion, and the like. 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide anion, 2,2,2-trifluoro-N- (perfluoroethanesulfonyl) acetamide anion, 2,2,2 -Trifluoro-N- (perfluoropropanesulfonyl) acetamide anion, 2,2,3,3,3-pentafluoro-N- (trifluoromethanesulfonyl) propionamide anion, 2,2,3,3,3 -Pentafluoro-N (Perfluoroethane sulfonyl) propionamide anion, 2,2,3,3,3-pentafluoro -N- (perfluoropropane sulfonyl) propionamide sulfonyl amides anions such as anions and the like. Among them, bis (trifluoromethanesulfone) imide anion and 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide anion are preferable because high conductivity can be obtained in a small amount. 2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide anion is particularly preferred because of its high solubility in hydrocarbon solvents.

  In the organic onium salt used in the composition of the present invention, the combination of the anion and the organic onium cation is not particularly limited, and specific examples of the organic onium salt that is particularly preferably used include tetrabutyl. Symmetric ammonium such as ammonium bis (trifluoromethanesulfonyl) imide, tetrahexylammonium bis (trifluoromethanesulfonyl) imide, tetraoctylammonium bis (trifluoromethanesulfonyl) imide, tetradecylammonium bis (trifluoromethanesulfonyl) imide Bis (trifluoromethanesulfonyl) imides; Tetrabutylphosphonium bis (trifluoromethanesulfonyl) imide, Tetraoctylphosphonium bis (trifluoro Bis (trifluoromethanesulfonyl) imides such as symmetric phosphonium bis (trifluoromethanesulfonyl) imides such as tansulfonyl) imide; tetrabutylammonium 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide, Tetrahexylammonium 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide, tetraoctylammonium 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide, tetradecylammonium 2, Symmetrical ammonium 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamides such as 2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide; tetrabutyl Symmetrical phosphoniums such as suphonium, 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide, tetraoctylphosphonium, 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide, 2,2, Examples include 2-trifluoro-N- (trifluoromethanesulfonyl) acetamides. By using such a compound, high conductivity can be obtained with a small addition amount, and the composition can have high hydrophobicity.

  In addition, the said organic onium salt may use 2 or more types together as needed.

  In the cleaning agent of the present invention, the amount of the organic onium salt is 0.001 to 10 parts by mass with respect to 100 parts by mass of the organic solvent. As the amount is increased, the conductivity (antistatic property) is also improved. However, the antistatic property required in general detergent applications can be sufficiently obtained with a compounding amount of 10 parts by mass or less, and is too much. And, there is a tendency that water absorption becomes high and it becomes difficult to dissolve. More preferably, it is 0.01-5 mass parts, Especially preferably, it is 0.05-1 mass part.

  The cleaning agent of the present invention comprises (1) the hydrocarbon-based organic solvent, (3) the organic onium salt, and (2) the non-hydrocarbon-based organic solvent, which is blended as necessary. You may mix | blend a well-known substance, for example, antioxidant, etc. as a mixing | blending component of hydrocarbon type | system | group (petroleum type | system | group) detergent in the range which does not reduce an effect. Moreover, although the cleaning agent of this invention is based also on the storage conditions and use conditions, it may absorb and contain about several tens to several hundred ppm of water. In other words, depending on storage conditions, use conditions, and the like, conventionally known cleaning agents absorb a few percent of water, but the cleaning agents of the present invention are essentially non-hygroscopic and are subject to normal conditions. Below, it absorbs only tens to hundreds of ppm of water.

  The method for producing the cleaning agent of the present invention is not particularly limited, and a predetermined amount of organic onium salt may be mixed with a solvent and dissolved. The method for dissolving the organic onium salt in the solvent is not particularly limited, and the organic onium salt may be added to the solvent as it is and dissolved, but the onium salt that has been melted by heating is added to the organic solvent and mixed. And a method in which the organic onium salt is dissolved in a solvent (non-hydrocarbon solvent such as alcohol) that dissolves well and then added to the solvent is preferably used. Moreover, when insoluble matter arises, it is preferable to remove by filtration etc.

  The cleaning composition of the present invention is preferably used for cleaning electrical / electronic components to which wax, silicone, lubricating oil or processing oil adheres. Among them, it is particularly suitably used for cleaning various electronic components (such as electrical elements and semiconductor substrates) in which the presence of moisture, corrosion, and surface smoothness are problems. Specific examples include a silicon wafer with a circuit pattern formed thereon, a thin film magnetic head, a compound semiconductor, a printed circuit board, a mounting substrate, a magnetic recording disk, etc., and is particularly suitable for cleaning a magnetic head. . As a cleaning method, a known cleaning method may be used. For example, a cleaning agent is sprayed on the object to be cleaned with a spray and then wiped with a cloth or a brush, or a cloth, sponge, or felt previously containing a cleaning agent. For example, a method of wiping with a cleaning agent, or a method of immersing in a cleaning agent and cleaning with a brush and then air-drying may be used. An appropriate method may be selected according to the use and the characteristics of the cleaning agent.

  Products, processed products, and the like that have been cleaned in this way have their surfaces cleanly removed with oils such as wax and are not soiled by the cleaning agent. In addition, the cleaning object is not charged, dust and the like are less likely to adhere, and a clean surface is always maintained, so that the product value is not impaired or unnecessary cleaning or cleaning is omitted in the manufacturing or processing process. be able to. Furthermore, the risk of electrostatic breakdown and ignition due to charging of the cleaning composition is reduced, and extra safety devices and special processes can be omitted.

EXAMPLES Hereinafter, although an Example is given and this invention is demonstrated further in detail, this invention is not limited to these.
(1) Measurement of specific resistance Using a Tokuyama continuous specific resistance meter TOR-2000, the specific resistance was measured at room temperature.
(2) Measurement of water content after standing After the composition was stirred at room temperature for 24 hours in the open air, the water content was measured using a Karl Fischer moisture meter.

Example 1
Tetraoctylammonium-2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide was used as the organic onium salt, and after dissolving 4.54 g (6.4 mmol) in 30 g of 1-octanol, It was added to 4 L (3004 g) of a paraffinic solvent TPS-2250 (manufactured by Tokuyama, Inc., flash point 71 ° C.) to obtain a colorless transparent uniform composition. The specific resistance of this composition was measured and found to be 10.8 GΩ. This composition was applied with a voltage of 1000 V using a charged plate monitor 158 manufactured by TREK, and the decay time to 500 V was measured. As a result, it was 2.8 seconds, and it was confirmed that there was sufficient antistatic properties. The moisture content of this composition after standing was 49 ppm.

Examples 2-5, Comparative Example 1
A colorless transparent and uniform composition was obtained in the same manner as in Example 1 except that the amount of the organic onium salt or 1-octanol was changed as shown in Table 1, and the specific resistance and water content were measured. The results are also shown in Table 1.

Comparative Example 2
5. instead of tetraoctylammonium · 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide, methyltrioctylammonium · 2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide salt When performed in the same manner as in Example 1 except that 4 mmol was used, the specific resistance was 354 GΩ. The moisture content of this composition after standing was 40 ppm.

Comparative Examples 3-7
The specific resistance and water content were measured in the same manner as in Example 1 except that the addition amount of the organic onium salt was fixed at 6.4 mmol and the type and the amount of 1-octanol were changed as shown in Table 1. did.

Examples 6 and 7
Colorless, transparent and uniform in the same manner as in Example 1 except that the amount of organic onium salt added was fixed at 6.4 mmol, the type thereof was changed as shown in Table 1, and the amount of 1-octanol was changed to 90 g. The specific resistance and water content were measured. The results are also shown in Table 3.

Examples 7-16
The specific resistance and water content were measured in the same manner as in Example 1 except that the type and amount of the organic onium salt and the amount of 1-octanol were changed as shown in Table 4. The results are also shown in Table 2.

Example 17
Evaluation was performed in the same manner as in Example 1 using isopropyl alcohol instead of 1-octanol. The results are shown in Table 5. In this example, unlike the examples using other solvents, a small amount of white solid was deposited after standing for 24 hours. When the composition after this standing was analyzed by gas chromatography, it was confirmed that the content was lowered due to volatilization of isopropyl alcohol.

Example 18
Evaluation was performed in the same manner as in Example 1 using ethylene glycol instead of 1-octanol. When the blending amount of ethylene glycol was 30 g and 60 g, tetraoctylammonium-2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide was not completely dissolved, so 90 g was used. The results are shown in Table 5.

Example 19
Evaluation was conducted in the same manner as in Example 1 using triethylene glycol monomethyl ether instead of 1-octanol. When the blending amount of triethylene glycol monomethyl ether was 30 g, tetraoctylammonium-2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide was not completely dissolved, so 60 g was used. The results are shown in Table 5.

Examples 20-21
In place of the normal paraffinic solvent TPS-2250, 3004 g of the solvent shown in Table 6 was used, and 9.08 g (12.7 mmol) of tetraoctylammonium-2,2,2-trifluoro-N- (trifluoromethanesulfonyl) acetamide was used. In the same manner as in Example 1, a uniform solution was obtained and evaluated. The results are shown in Table 6.

  FIG. 1 shows the ratio of the hydrocarbon solvent and the value of the moisture content for 24 hours for the example in which 1-octanol was used as the non-hydrocarbon solvent among the examples and comparative examples. As can be seen from the results of the above Examples and Comparative Examples shown in the drawings, when the proportion of the non-hydrocarbon solvent exceeds 7% by mass, the amount of water rapidly increases. The water content immediately after preparation is 5 ppm or less in any of the examples and comparative examples. In addition, when an organic onium salt other than that represented by the formula (1) is used, it is inferior in antistatic property or does not dissolve in a solvent having a non-hydrocarbon solvent ratio of less than 7% by mass. .

The figure which shows the relationship between the ratio of the hydrocarbon-type solvent in a washing | cleaning agent, and the moisture content after 24 hours.

Claims (2)

(1) Hydrocarbon solvent: 93 to 100% by mass,
(2) Organic solvents other than hydrocarbon solvents: 0 to 7% by mass, and
(3) The following general formula (I)

{In the above formula, Z represents a nitrogen atom or a phosphorus atom; R ¹ , R ² , R ³ and R ⁴ each independently represent a hydrocarbon group having 4 to 20 carbon atoms, and Among the R ¹ , R ² , R ³ and R ⁴ , the ratio of the carbon number of the hydrocarbon group having the largest number of carbon atoms to the hydrocarbon group having the smallest number of carbon atoms is 2 or less, and X ⁻ represents the following formula ( II)

(In the above formula, A ¹ and A ² each independently represents a fluoroacyl group, a fluoroalkoxycarbonyl group, a fluoroalkylsulfonyl group, a fluoroalkoxysulfonyl group, or a nitrile group). }
An organic onium salt represented by: 0.001 to 10 parts by mass with respect to 100 parts by mass in total of (1) and (2),
A cleaning agent for electrical and electronic parts. (2) The organic solvent other than the hydrocarbon solvent contains 0.001 to 7% by mass, and the organic solvent other than the hydrocarbon solvent is a linear primary alcohol having 6 to 20 carbon atoms. Item 1. A cleaning agent according to Item 1.

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