JP2006061827A - Drawing control method for liquid drop delivery apparatus, liquid drop delivery apparatus, production method electro-optical apparatus, electro-optical apparatus and electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing control method or the like for a liquid drop delivery apparatus capable of storing/standing-by a function liquid drop delivery head in the drawing stand-by state not operated during drawing treatment in the function-maintaining state and transferring it from the drawing stand-by state to the operation state in a short time. <P>SOLUTION: The drawing control method for the liquid drop delivery apparatus is provided with a drawing step for moving a group of operation units 36 comprising at least one carriage unit 31 of a plurality of carriage units 31 to a drawing area 41 and delivering the function liquid from the function liquid drop delivery head 72 onto a workpiece W to perform the drawing; and a storage step for moving a group of drawing stand-by units 37 comprising carriage units 31 other than the group of operation units 36 of the plurality of carriage units 31 to a drawing stand-by area 42 and storing the respective function liquid drop delivery head 72 to the function maintaining state. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a drawing control method of a droplet discharge device, a droplet discharge device, a method of manufacturing an electro-optical device, and an electro-optical device that perform drawing processing by discharging a functional liquid to a workpiece by a plurality of functional droplet discharge heads The present invention relates to an apparatus and an electronic device.

Conventionally, various electro-optical devices (flat panel display: FPD) typified by color filters such as liquid crystal display devices and organic EL devices, using a functional droplet discharge head capable of discharging minute droplets by an inkjet method. A droplet discharge device to be manufactured is known. In such a droplet discharge device, in order to avoid a decrease in discharge accuracy due to sub-scanning and to shorten the tact time, a plurality of function droplet discharges to a carriage (unit support mechanism) like a so-called line printer. It is considered that a wide drawing line that covers the drawing target width in a direction orthogonal to the discharge scanning direction of the workpiece is configured by all the discharge nozzles of the plurality of functional liquid droplet discharge heads mounted on the head (for example, , See Patent Document 1).
JP 2002-82216 A

  In such a droplet discharge device, a functional droplet discharge head that does not operate may be generated even during the drawing process. For example, when a drawing process is performed on a work (small work) having a drawing width narrower than a wide drawing line, only a part of the functional liquid droplet ejection heads constituting a partial drawing line corresponding to the narrow drawing width is used. It operates and discharges functional fluid. At this time, in the functional liquid droplet ejection head that does not operate, the functional liquid of the ejection nozzle dries during the drawing process, which causes nozzle clogging. Then, after the drawing process for the small work, even if an attempt was made to perform the drawing process on a work (large work) having a drawing width corresponding to the wide drawing line of the full-function liquid droplet ejection head, it was not in operation. In order to eliminate nozzle clogging in the functional liquid droplet ejection head, it is necessary to perform a function recovery process over a considerable time. Therefore, in the conventional droplet discharge device, the function droplet discharge head that does not operate during the drawing process cannot be stored in a state where the discharge function is maintained.

  Of course, it is also conceivable to remove the functional liquid droplet ejection head that does not operate from the carriage and fill the flow path in the head with a storage liquid (such as a solvent for the functional liquid) for storage. However, even in this case, it takes time to attach and detach the functional liquid droplet ejection head, and it is necessary to fill the flow path in the head with the functional liquid before the operation, and the transition from the storage state to the operation state takes a short time. I couldn't let you.

  According to the present invention, in a droplet discharge device including a plurality of functional droplet discharge heads, a functional droplet discharge head in a drawing standby state that does not operate during a drawing process can be stored in a function maintaining state and kept waiting. Provided are a droplet discharge device drawing control method, a droplet discharge device, a method for manufacturing an electro-optical device, an electro-optical device, and an electronic apparatus that can perform a transition from a drawing standby state to an operating state in a short time. With the goal.

A drawing control method for a droplet discharge device according to the present invention includes a functional droplet discharge head into which a functional liquid is introduced and a carriage on which the functional droplet discharge head is mounted. A plurality of carriage units configured to be freely movable,
While moving the working unit group composed of at least one carriage unit among the plurality of carriage units to the drawing area and moving the working unit group relative to the work facing the drawing area in the X-axis direction, A drawing standby unit group consisting of a carriage unit other than the operating unit group among a plurality of carriage units as a drawing standby area And a storage step of storing the functional liquid droplet ejection heads of the drawing standby unit group in a function maintaining state.

  The liquid droplet ejection apparatus of the present invention has a functional liquid droplet ejection head into which a functional liquid is introduced and a carriage on which the functional liquid droplet ejection head is mounted, and individually moves between a drawing area and a drawing standby area. A plurality of carriage units configured freely, and an operation unit group consisting of at least one carriage unit among the plurality of carriage units is moved relative to the work in the X-axis direction while moving in the drawing area. A functional liquid is ejected from the functional liquid droplet ejection head onto the workpiece to perform the drawing process, and among the plurality of carriage units, the functional liquid droplet ejection head of the drawing standby unit group composed of carriage units other than the operating unit group is provided. A liquid droplet ejection apparatus for storing a function in a state of maintaining a function in a drawing standby area, wherein a plurality of carriage units are drawn. A carriage moving means for individually moving between the drawing standby area and the drawing standby area, and a functional liquid droplet discharging head provided in the drawing standby area and facing the functional liquid droplet discharging head of the drawing standby unit group that has moved to the drawing standby area. Controls the head storage means and the carriage moving means to keep the function in a function-maintaining state, moves the operating unit group to the drawing area so as to be used for drawing processing, and draws the drawing standby unit group so as to face the storage means. And a movement control means for moving to the area.

  According to these configurations, while the operating unit group is moved to the drawing area and the drawing process is performed by the functional liquid droplet ejection head, the drawing standby unit group is moved to the drawing standby area and the functional liquid droplets are moved. The discharge head can be stored while maintaining the discharge function. Furthermore, the drawing standby unit group stored in the drawing standby area can be moved to the drawing area to function as an operating unit group. That is, the drawing standby unit group can be shifted from the drawing standby state to the operating state in a short time.

  In the above-described drawing control method and droplet discharge device of the droplet discharge device, the operation unit group is configured such that a plurality of discharge nozzles of the functional droplet discharge head are continuously arranged in the Y-axis direction orthogonal to the X-axis direction. It is preferable that a minimum number of carriage units that cover a drawing target width in the Y-axis direction of the workpiece by a drawing line.

  According to this configuration, since the functional liquid can be discharged over the entire drawing width in the Y-axis direction of the work by one discharge scanning (main scanning), the operation unit group is drawn on the Y-axis for the drawing line. It is not necessary to move in the direction (sub-scan) and perform the ejection scan again. Furthermore, a carriage unit that is not equipped with a functional liquid droplet ejection head that operates during the drawing process can be stored in the drawing standby area as a drawing standby unit group.

  In the above-described droplet discharge device, the drawing standby area is composed of a pair arranged on both sides of the movement trajectory of the plurality of carriage units across the drawing area, and each is provided with a head storage means. It is preferable.

  According to this configuration, some of the carriage units on one drawing standby area side may be moved to the drawing standby area as a drawing standby unit group. May be moved to the drawing standby area as a drawing standby unit group, and a part of the carriage units on each drawing standby area side may be moved to the drawing standby area as a drawing standby unit group. Also good. That is, it is possible to increase the degree of freedom of reuse between the operating unit group and the drawing standby unit group.

  In these cases, the head storage means preferably has a capping unit including a plurality of caps that hermetically seal the functional liquid droplet ejection heads of the drawing standby unit group.

  According to this configuration, the functional liquid of the discharge nozzle of the functional liquid droplet discharge head can be prevented from drying without using a complicated mechanism, and can be stored in a function maintaining state.

In these cases, in the drawing standby area, suction means for sucking the functional liquid from the discharge nozzle of the functional liquid droplet ejection head in an airtight state, and wiping means for wiping the nozzle surface of the functional liquid droplet ejection head after suction with a wiping sheet; It is preferable to further comprise.
In the case where the head storage means has a capping unit, it is preferable to use both the capping unit and the suction means.

  According to this configuration, even if the discharge nozzle of the functional liquid droplet discharge head is dried and the functional liquid is thickened before the drawing standby unit group moves to the drawing standby area, the thickened functional liquid is removed. While removing by suction, the functional liquid adhering to the nozzle surface by the suction process can be wiped off. That is, the ejection function of the functional liquid droplet ejection head in which nozzle clogging has occurred can be recovered.

  In these cases, the apparatus further includes an X-axis table that mounts the workpiece and moves the workpiece in the X-axis direction, and the carriage moving unit mounts and mounts a plurality of carriage units side by side in the Y-axis direction orthogonal to the X-axis direction. A Y-axis table that moves each carriage unit in the Y-axis direction is preferable.

According to this configuration, by mounting a plurality of carriage units side by side on the Y-axis table, a plurality of carriage units can be arranged along the Y-axis direction in the drawing area. Therefore, a wide drawing line can be formed in the Y-axis direction, which is a direction orthogonal to the ejection scanning direction (X-axis direction). That is, it is possible to discharge over a wide area of the workpiece by one discharge scanning.
In this case, it is preferable that the drive source for the Y-axis table is a linear motor.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming unit made of functional droplets is formed on a workpiece using the above-described droplet discharge device.

  An electro-optical device according to the present invention is characterized in that a film forming unit using functional droplets is formed on a workpiece using the above-described droplet discharge device.

  According to these configurations, the functional liquid droplet ejection head that does not operate during the drawing process can be stored and kept in the function maintaining state, and can be shifted from the drawing standby state to the operating state in a short time. Droplet discharge device Since the droplet discharge device is used for manufacturing, the electro-optical device can be manufactured efficiently. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, a droplet discharge device to which the present invention is applied will be described with reference to the accompanying drawings. The liquid droplet ejection apparatus according to the present embodiment is installed in a drawing system incorporated in an FPD production line such as a liquid crystal display device, and a functional liquid ejection head that uses special liquid such as special ink or light-emitting resin liquid. In other words, a film forming portion made of functional droplets is formed on a substrate such as a color filter of a liquid crystal display device. First, a drawing system provided with the present droplet discharge device will be briefly described. Note that values such as the size of the substrate described below are approximate numbers.

  FIG. 1 is a schematic plan view of the drawing system. As shown in the figure, the drawing system S is composed of three drawing units Su, and R, G, B three colored layers 508R on the introduced work W (color filter filter substrate 500A), Color filters are manufactured by forming 508G and 508B (see FIG. 19). Each drawing unit Su corresponds to each color of R, G, and B, and is designed to form a colored layer for each color on the workpiece W introduced sequentially. However, each of the droplet discharge devices 1 is configured to be capable of discharging (drawing) R, G, and B color functional liquids (filter materials), and each drawing unit Su can apply three colored layers on the workpiece W. It is also possible to form

  Each drawing unit Su is connected to the droplet discharge device 1 for forming the colored layer 508, the workpiece loading / unloading device 2 that is arranged in parallel to the droplet discharge device 1, and loads and unloads the workpiece W, and each device. A host computer 3 for controlling the entire drawing unit Su. The droplet discharge device 1 is accommodated in the chamber device 4. The chamber device 4 is a so-called thermal chamber, and accommodates the entire droplet discharge device 1 under temperature control so that droplet discharge to the workpiece W is performed under a constant temperature condition. The chamber device 4 includes a box-shaped chamber body 11 that directly accommodates the entire droplet discharge device 1, an air conditioner 12 that performs temperature management so that the temperature in the chamber body 11 is constant, and a control that controls this. Board (not shown). Further, although not shown, an opening / closing door serving as a work loading / unloading opening is formed in front of the right side surface of the chamber body 11. When the work W is introduced into the droplet discharge device 1, the opening / closing door is opened. The droplet discharge device 1 accommodated in the chamber main body 11 can be accessed via this.

The workpiece carry-in / out device 2 includes a robot arm 13 for transferring the workpiece W, and the workpiece W before drawing is loaded into the drawing unit Su via the robot arm 13 and is transferred to the droplet discharge device 1. In addition, the drawn work W is collected from the droplet discharge device 1 and carried out of the drawing unit Su.
Note that reference numeral 5 shown in the figure is an installation space for installing a drying device, and a drying device for vaporizing the functional liquid solvent of the functional liquid discharged to the workpiece W according to the situation is depicted in the drawing unit Su. It can be installed inside.

  Next, the droplet discharge device according to the present invention will be described. As shown in FIGS. 2 to 4, the droplet discharge device 1 includes a large common platform 21 installed on the floor, a drawing device 22 widely placed on the entire area of the common platform 21, and a drawing device 22. The maintenance means 23 is provided to maintain and restore the function of the functional liquid droplet ejection head 72 by the maintenance means 23 and to perform a drawing process for discharging the functional liquid onto the workpiece W by the drawing device 22. . Further, the droplet discharge device 1 incorporates a controller 24 (control unit 132, see FIG. 9) and the like that are connected to the host computer 3 and control each unit of the droplet discharge device 1.

  A work W (see FIG. 2) introduced into the droplet discharge device 1 is a transparent substrate made of quartz glass, polyimide resin, or the like, and will be described later in detail, but a pixel region in which a colored layer 508 is formed in advance. 507a is built in. The droplet discharge device 1 can perform a drawing process on a workpiece W having a size of 1800 mm × 1500 mm at the maximum. There are various sizes of workpieces W, for example, seven types of 300 mm × 250 mm, 500 mm × 415 mm, 680 mm × 565 mm, 880 mm × 735 mm, 1100 mm × 915 mm, 1500 mm × 1250 mm, 1800 mm × 1500 mm are used. The seven types of workpieces W are referred to as a first workpiece Wa, a second workpiece Wb,..., A seventh workpiece Wg in order from the smallest size (see FIG. 7).

  First, the drawing device 22 in the droplet discharge device 1 and the drawing process using the drawing device 22 will be described. The drawing device 22 is installed on a plurality (seven) of carriage units 31 including a plurality (twelve) of functional liquid droplet ejection heads 72 and a carriage 73 on which these are mounted, and the common platform 21, and a work W is mounted thereon. The X-axis table 32 for moving the workpiece W in the X-axis direction, and the seven carriage units 31 individually in the Y-axis direction. Y-axis table 33 to be moved, functional liquid supply means 34 including seven functional liquid supply units 101 for supplying functional liquid to functional droplet discharge heads 72 mounted on seven carriage units 31, and workpiece W And image recognition means 35 (see FIG. 9) for recognizing an image of the carriage unit 31 and the like.

  A region where the movement trajectory of the workpiece W by the X-axis table 32 and the movement trajectory of the carriage unit 31 by the Y-axis table 33 intersect is a drawing area 41 for performing drawing processing. An area outside the X axis table 32 on the movement trajectory of the carriage unit 31 is a drawing standby area 42, and the maintenance means 23 is installed in the drawing standby area 42. On the other hand, the area on the near side of the X-axis table 32 is a work carry-in / out area 43 where the work W is carried into and out of the droplet discharge device 1.

  Although details will be described later, the droplet discharge device 1 moves an operation unit group 36 (see FIG. 10) including at least one carriage unit 31 among the seven carriage units 31 to the drawing area 41. At the same time, with respect to the work W facing the drawing area 41, the working unit group 36 is moved relatively in the X axis direction, and the functional liquid is ejected from the functional liquid droplet ejection head 72 onto the work W to perform the drawing process. In addition, the drawing standby unit group 37 (see FIG. 10) including the carriage units 31 other than the operating unit group 36 is moved to the drawing standby area 42, and the functional liquid droplet ejection head 72 is stored in the function maintaining state. Is supposed to do.

  The X-axis table 32 sets the introduced work W, an X-axis air slider 52 that supports the set table 51 slidably in the X-axis direction, and extends in the X-axis direction. A pair of left and right X-axis linear motors 53, 53 that move the workpiece W in the X-axis direction via the X-axis, and a pair of X-axis guide rails that are provided in parallel to the X-axis linear motor 53 and guide the movement of the X-axis air slider 54, and an X-axis linear scale (not shown) for grasping the position of the set table 51. When the pair of X-axis linear motors 53 and 53 are driven, the X-axis air slider 52 is moved in the X-axis direction while using the pair of X-axis guide rails 54 and 54 as a guide, and the workpiece set on the set table 51 W moves in the X-axis direction.

  The set table 51 is disposed on the X-axis air slider 52 connected to the suction table 56 for directly sucking and setting the workpiece W, the rotating unit 58 connected to the lower part of the suction table 56, and the lower part of the rotating unit 58. It has a fixed portion 59 and has a workpiece θ axis table 57 that finely adjusts (θ correction) the θ position of the workpiece W via the suction table 56.

The suction table 56 is formed in a substantially square shape in plan view, and the length of one side thereof is set to be approximately 1800 mm in accordance with the length of the long side of the workpiece W having the maximum size. The long side of the workpiece W can be set in any direction of any one of horizontal orientation (the long side of the workpiece W is parallel to the Y-axis direction). However, in this embodiment, it is assumed that the workpiece W is set horizontally. In addition, the workpieces W of any size are set center-aligned.
A regular flushing box 116 of the maintenance means 23 is installed on the fixed portion 59 of the work θ-axis table 57 adjacent to the drawing area 41 side (the right side in FIG. 4) of the suction table 56.

  On the other hand, the Y-axis table 33 is supported on a pair of front and rear support stands 66, 66 extending in the Y-axis direction, spans between the drawing area 41 and the drawing standby area 42, and includes seven carriage units 31. These are moved individually between the drawing area 41 and the drawing standby area 42. The Y-axis table 33 includes seven bridge plates 61 that respectively suspend the seven carriage units 31 and seven sets that support the seven bridge plates 61 with both ends so that the seven bridge plates 61 are aligned in the Y-axis direction. A Y-axis slide table 62, a pair of front and rear Y-axis linear motors 63, 63 extending in the Y-axis direction and moving each bridge plate 61 in the Y-axis direction via each set of Y-axis slide tables 62; Two Y-axis guide rails 64 that extend in the axial direction and guide the movement of the seven bridge plates 61 (four in total) and a Y-axis linear scale that detects the movement position of each carriage unit 31 ( (Not shown).

When the pair of Y-axis linear motors 63, 63 are driven, the seven sets of Y-axis slide tables 62 can be moved independently, and the seven carriage units 31 can be individually moved in the Y-axis direction. According to this, each movement with respect to the seven carriage units 31 can be performed with a simple structure and high accuracy. Of course, it is also possible to move the seven carriage units 31 together in the Y-axis direction by simultaneously moving the seven sets of Y-axis slide tables 62 in the Y-axis direction.
In this embodiment, seven carriage units 31 are mounted side by side on a single Y-axis table 33. However, a plurality of Y-axis tables 33 are provided, and the seven carriage units 31 are divided and mounted. May be.

Furthermore, on the bridge plate 61 supported by each pair of Y-axis slide tables 62, a head electrical unit 97 for driving the 12 functional liquid droplet ejection heads 72 mounted on the corresponding carriage units 31 is provided. The seven head electrical units 97 are arranged in a staggered manner so as not to interfere with each other (noise prevention). In addition, brackets 67 are fixed outwardly on the front and rear side surfaces of the pair of front and rear support stands 66 and 66, and a Y-axis accommodation box 68 is supported on each bracket 67. The two Y-axis housing boxes 68 have four Y-axis cable carriers 69 (cable bear: registered trademark) corresponding to the staggered arrangement of the seven head electrical units 97, four and three. Each Y-axis cable carrier 69 is configured such that a flexible flat cable connected to the head electrical unit 97 can follow the movement of each carriage unit 31.
Further, the tank units (not shown) of the seven functional liquid supply units 101 are arranged in a staggered manner so as to face each of the head electrical units 66.

  As shown in FIGS. 2 and 5, the seven carriage units 31 are suspended from the seven bridge plates 61 of the Y-axis table 33 and are arranged in the Y-axis direction. The head unit 71 is composed of individual functional liquid droplet ejection heads 72 and a carriage 73 on which the head unit 71 and a valve unit 104 (described later) of the functional liquid supply unit 101 are mounted. The seven carriage units 31 are arranged in order from the drawing area 41 side to the drawing standby area 42 side (from the left side to the right side in FIG. 5) in order, the first carriage unit 31a, the second carriage unit 31b,. The seventh carriage unit 31g.

  As shown in FIGS. 4 and 5, each carriage 73 includes a support plate 76 having a substantially parallelogram in plan view for positioning and fixing the head unit 71 and the valve unit 104, a carriage body 77 for holding the support plate 76, a carriage A main body 77 is suspended and connected to an upper portion of the carriage main body 77, and a head θ-axis table 78 for finely adjusting (θ-axis correction) the θ position of the head unit 71 via the carriage main body 77, and the head θ-axis table 78. And a head Z-axis table 79 that finely adjusts the Z position of the head unit 71 (Z-axis correction) via a head θ-axis table 78 and a carriage body 77. Although not shown, each support plate 76 serves as a reference for positioning (position recognition) each carriage unit 31 (head unit 71) in the X-axis, Y-axis, and θ-axis directions on the premise of image recognition. A pair of reference pins is provided.

  The support plate 76 is made of a thick plate having a substantially parallelogram shape in a plan view made of stainless steel or the like. The support plate 76 positions twelve functional liquid droplet ejection heads 72 and each functional liquid droplet by a head holding member (not shown). Twelve mounting openings (not shown) for fixing the ejection head 72 from the back side are formed. The support plate 76 is detachably supported by the carriage body 77, and the head unit 71 is mounted on the carriage 73 via the support plate 76 together with the valve unit 104.

  As shown in FIG. 6, the functional liquid droplet ejection head 72 is a so-called double series, a functional liquid introduction part 81 having two series of connecting needles 82, and a double series of head substrates connected to the functional liquid introduction part 81. 83, and a head main body 84 which is connected to the lower side (upper side in the figure) of the functional liquid introduction portion 81 and in which an in-head flow path filled with the functional liquid is formed. The connection needle 82 is connected to a functional liquid tank (not shown) via a pressure adjustment valve 105 (see FIG. 5) described later, and supplies the functional liquid to the flow path in the head of the functional liquid droplet ejection head 72. The head main body 84 includes a cavity 91 formed of a piezo element and the like, and a nozzle plate 92 having a nozzle surface 93 in which two nozzle rows 94 and 94 are formed in parallel to each other.

  Each nozzle row 94 has a length of, for example, 1 inch (approximately 25.4 mm), and each nozzle row 94 includes 180 nozzles 95 arranged at an equal pitch (approximately 140 μm). One nozzle row 94 is shifted from the other nozzle row 94 by a half pitch (70 μm) in the nozzle row direction, and the dot density (resolution) is 360 dpi.

  Further, due to the structure of the flow path in the head, the discharge amount from the nozzles 95 located at both ends becomes larger than the discharge amount from the nozzle 95 located at the center portion, so that each of the ten nozzles at both ends. 95 is a non-ejection nozzle, and 160 nozzles 95 in the center are used as ejection nozzles, so that the functional liquid is ejected only from the ejection nozzle and the functional liquid is not ejected from the non-ejection nozzle. Therefore, a partial drawing line Lp (see FIG. 7) is configured by 160 discharge nozzles in the center of each nozzle row 94.

  The head substrate 83 is provided with two series of connectors 96, 96, and each connector 96 is connected to the head electrical unit 97 (head driver 141, see FIG. 9) via a flexible flat cable. Has been. When a drive waveform is applied from the controller 24 to the cavity 91 via the head electrical unit 97, functional droplets are ejected from each nozzle 95 by the pump action of the cavity 91. Therefore, the droplet discharge amount and the discharge timing are controlled by controlling the magnitude of the drive waveform applied to the cavity 91 (the magnitude of the applied voltage value) and the period.

As shown in FIGS. 5 and 7, each functional liquid droplet ejection head 72 is mounted on the support plate 76 so that the two nozzle rows 94, 94 are parallel to the Y-axis direction when mounted on the carriage 73. It is fixed. The twelve functional liquid droplet ejection heads 72 are closely overlapped in the width direction (X-axis direction), and all the ejection nozzles (160 × 12) are continuous in the Y-axis direction (stepwise). ).
In FIG. 7, only the functional liquid droplet ejection head 72 and the support plate 76 are shown in each carriage unit 31 to simplify the drawing, and the functional liquid droplet ejection head 72 mounted on each carriage unit 31 is shown. The number is 4, and the number of nozzles 95 (discharge nozzles) of each functional liquid droplet discharge head 72 is 3 × 2 rows.

  A partial drawing line Lp is constituted by all nozzles 95 (discharge nozzles) of all (12) function liquid droplet discharge heads 72 of each carriage unit 31, and all (12 × 7) function liquids of seven carriage units 31. All the nozzles 95 (discharge nozzles) of the droplet discharge head 72, that is, seven partial drawing lines Lp are continuous to form one maximum width drawing line Lm. Therefore, the length of the partial drawing line Lp is approximately 271 mm (25.4 mm / 180 × 160 × 12), and the length of the maximum width drawing line Lm is approximately 1897 mm (271 mm × 7).

  In the present embodiment, the functional liquid droplets in the drawing area 41 are moved relative to the workpiece W while the working unit group 36 including at least one carriage unit 31 out of the seven carriage units 31 is moved in the X-axis direction. A drawing process is performed by discharging the functional liquid from the discharge head 72 onto the workpiece W.

  Then, the working unit group 36 has a drawing target width in the Y-axis direction of the workpiece W by a partial drawing line group in which all the nozzles 95 (discharge nozzles) of the functional droplet discharge head 72 are continuously formed in the Y-axis direction. It consists of a minimum number of carriage units 31 on the drawing area 41 side that covers (the length of the long side of the horizontally placed workpiece W).

  Specifically, when drawing processing is performed on a first workpiece Wa having a size of 300 mm × 250 mm, an operation unit group 36 is configured by two carriage units 31 (first and second carriage units 31 a and b). (In this case, the length of the partial drawing line group is about 542 mm), and when drawing processing is performed on the second workpiece Wb having a size of 500 mm × 415 mm, the two carriage units 31 (first and second carriages) are similarly used. The operation unit group 36 is configured by the units 31a and b), and in the case of the third workpiece Wc of 680 mm × 565 mm, the operation unit group 36 is configured by the three carriage units 31 (first to third carriage units 31a to 31c). (In this case, the length of the partial drawing line group is approximately 813 mm), and in the case of the fourth work Wd of 880 mm × 735 mm An operation unit group 36 is constituted by four carriage units 31 (first to fourth carriage units 31a to 31d) (in this case, the length of the partial drawing line group is approximately 1084 mm), and a first work We of 1100 mm × 915 mm. In this case, the operating unit group 36 is constituted by five carriage units 31 (first to fifth carriage units 31a to 31e) (in this case, the length of the partial drawing line group is approximately 1355 mm), and the 1500 mm × 1250 mm first unit. In the case of 6 workpieces Wf, an operation unit group 36 is constituted by six carriage units 31 (first to sixth carriage units 31a to f) (in this case, the length of the partial drawing line group is approximately 1626 mm), 1800 mm × In the case of a seventh workpiece Wg of 1500 mm, all (seven) carriage units 31 (first to seventh carriages) The operation unit group 36 is composed of the unit units 31a to 31g (in this case, the length of the partial drawing line group is approximately 1897 mm).

  As described above, when the seven carriage units 31 are divided and mounted on the plurality of Y-axis tables 33, the number of combinations of the carriage units 31 constituting the operation unit group 36 can be increased. For example, when two Y-axis tables 33 are provided, four carriage units 31 are mounted side by side on one Y-axis table 33, and three carriage units 31 are mounted side by side on the other Y-axis table 33, 3 In order to configure the operation unit group 36 by the carriage units 31, three of the four carriage units 31 of one Y-axis table 33 may be used, and the other Y-axis table 33 may be configured. All (three) carriage units 31 may be used, and one or two of the four carriage units 31 of one Y-axis table and three of the other Y-axis table 33 may be used. Two or one of the carriage units 31 may be used.

  As described above, the length of the partial drawing line group constituted by all the nozzles 95 (discharge nozzles) of the full-function droplet discharge head 72 of the operation unit group 36 corresponds to the drawing target width of the workpiece W. The functional liquid can be discharged with respect to the drawing target width of the workpiece W by one discharge scanning. That is, after performing the ejection scan, it is not necessary to shift the operation unit group 36 in the Y-axis direction by the length of the partial drawing line group and perform the ejection scan again. Furthermore, the carriage unit 31 that is not mounted with the functional liquid droplet ejection head 72 that operates during the drawing process can be stored in the drawing standby area 42 as the drawing standby unit group 37 (details will be described later).

Each of the functional liquid supply units 101 of the functional liquid supply means 34 includes a tank unit including 12 functional liquid tanks that store the functional liquid, and 12 units that adjust the hydraulic head pressure between the functional liquid tank and the functional liquid droplet ejection head 72. Valve unit 104 composed of the pressure adjusting valve 105, twelve tank-side liquid supply tubes (not shown) for connecting twelve functional liquid tanks and twelve pressure adjusting valves 105, and twelve pressure adjustments. The valve 105 and twelve functional liquid droplet ejection heads 72 (each of the two connecting needles 82) have 24 head side liquid supply tubes (not shown) respectively connected via branch joints (not shown). is doing. Then, the functional liquid in each functional liquid tank is introduced into the corresponding functional liquid droplet ejection head 72 via the tank side liquid supply tube, the pressure adjustment valve 105, and the head side liquid supply tube.
As described above, the tank unit is installed on the bridge plate 61 so as to face the head electrical unit 97, and the valve unit 104 is mounted side by side with the head unit 71 on the support plate 76 of the carriage unit 31. Has been. However, the tank unit may be mounted side by side with the head unit 71 and the valve unit 104 on the support plate 76.

  The two image recognition means 35 are disposed so as to face both the front and rear sides of the workpiece carry-in / out area 43, and two units recognize each of two workpiece alignment marks (not shown) formed on both long side portions of the workpiece W, respectively. The head recognition camera 107 (see FIG. 9) connected to the X-axis air slider 52 of the X-axis table 32 and the head recognition camera 107 (see FIG. 9) that recognizes two reference pins of each carriage 73 (support plate 76). And a functional liquid droplet (dot) that is mounted on the Y-axis table 33 so as to be movable in the Y-axis direction by a camera moving mechanism (not shown) attached to the Y-axis table 33 and discharged onto the workpiece W or the like from above. It has two dot recognition cameras 108 (see FIG. 9) that capture and recognize images. Based on the image recognition results of these various cameras, the above-described position correction of the workpiece W and the head unit 71 is performed.

  Here, with reference to FIG. 2 thru | or FIG. 4, the discharge operation | movement to the workpiece | work W by the drawing apparatus 22, ie, drawing operation, is demonstrated easily. First, as a preparation before discharging the functional liquid, the workpiece W is set on the suction table 56 by the workpiece loading / unloading device 2, and the position correction of the workpiece W is performed by the workpiece θ-axis table 57 in the θ-axis direction correction. And position data correction of the workpiece W in the X-axis direction and the Y-axis direction. Before and after, the active unit group 36 that moves to the drawing area 41 and the drawing standby unit group 37 that moves to the drawing standby area 42 are sorted (details will be described later). Further, the position correction of each head unit 71 of the working unit group 36 moved to the drawing area 41 includes the position correction in the θ-axis direction by the head θ-axis table 78, the position correction in the Y-axis direction by the Y-axis table 33, and the head unit. 71 is performed by correcting the position data in the X-axis direction.

  After the position correction of the workpiece W and the head unit 71 is performed, the drawing apparatus 22 moves the workpiece W in the X-axis direction by the X-axis table 32 while being controlled by the controller 24 (control unit 132). In synchronization with this, the functional liquid droplet ejection head 72 of the operation unit group 36 is selectively driven to eject the functional liquid onto the workpiece W. Subsequently, the functional liquid is discharged again to the workpiece W while moving the workpiece W backward. In this way, drawing on the workpiece W is performed by repeating the reciprocating movement of the workpiece W in the X-axis direction and the driving of the functional liquid droplet ejection head 72 a plurality of times. That is, the functional liquid is discharged onto the work W from the functional liquid droplet ejection head 72 of the operating unit group 36 while moving the operating unit group 36 relative to the work W facing the drawing area 41 in the X-axis direction. Drawing processing is performed.

  In the drawing process, the functional liquid may be discharged only when the workpiece W moves forward. Alternatively, the work W may be fixed and the operating unit group 36 may be moved in the X-axis direction. Furthermore, in the present embodiment, as described above, the drawing target width of the work W corresponds to the length of the partial drawing line group of the operating unit group 36, but the drawing target width of the work W corresponds to the operating unit group 36. The length may be longer than the length of the partial drawing line group. In this case, the functional liquid droplet ejection head 72 is driven while the operation unit group 36 is reciprocated with respect to the workpiece W to perform ejection scanning (main scanning). Then, the working unit group 36 is moved in the Y-axis direction by the length of the partial drawing line group by the Y-axis table 33 (sub-scanning), and the main scanning for the workpiece W is performed again. Then, the main scanning and the sub scanning are repeated several times to discharge the droplets from the end to the end of the workpiece W.

  Next, with reference to FIGS. 3 and 8, the maintenance means 23 in the droplet discharge device 1 and the function maintenance / recovery processing of the functional droplet discharge head 72 by this will be described. The maintenance means 23 stores the functional liquid droplet ejection heads 72 mounted on the drawing standby unit group 37 including the carriage units 31 on the drawing standby area 42 side other than the operating unit group 36 in a state in which the ejection function is maintained. The discharge function is restored. The maintenance means 23 sucks the functional liquid droplet ejection head 72 and forcibly discharges the functional liquid from the functional liquid droplet ejection head 72, and the functional liquid droplet ejection head 72 that is contaminated with the functional liquid. A wiping unit 113 for wiping the nozzle surface 93, seven divided suction units 112 (described later) of the suction unit 111, and eight unit lifting mechanisms 115 that individually support the wiping unit 113 so as to be lifted and lowered individually. The unit lifting / lowering means 114 is supported on the angle base 118 and disposed in the drawing standby area 42. Further, the maintenance means 23 has a regular flushing box 116 disposed on the workpiece θ-axis table 57 and a pair of pre-discharge flushing boxes (not shown) disposed on both the front and rear sides of the set table 51. is doing.

  The suction unit 111 has seven divided suction units 112 arranged in the Y-axis direction corresponding to the seven carriage units 31. Each of the divided suction units 112 faces the carriage unit 31 from below and includes twelve caps 121 and twelve caps 121 that are hermetically sealed to the nozzle surfaces 93 of the twelve functional liquid droplet ejection heads 72. And a ejector (not shown) that applies a suction force to the functional liquid droplet ejection head 72 via the sealed cap 121. The seven divided suction units 112 are arranged in order from the drawing area 41 side to the drawing standby area 42 side (from the left side to the right side in FIG. 3) in order, the first divided suction unit 112a, the second divided suction unit 112b, ... 7th division suction unit 112g.

  The twelve caps 121 are arranged on the cap support member 122 so as to correspond to the twelve functional liquid droplet ejection heads 72 mounted on each carriage 73. Therefore, in the entire suction unit 111, 12 × 7 caps 121 are arranged following the arrangement pattern of the all-function droplet discharge heads 72 of the seven carriage units 31. Each corresponding cap 121 can be sealed at a time. Further, by driving the ejector with the cap 121 sealed to the nozzle surface 93, the functional liquid sucked out from the nozzle 95 is removed to remove the functional liquid thickened in the functional liquid droplet ejection head 72. Can do.

  Therefore, the suction unit 111 hermetically seals the functional liquid droplet ejection head 72 with each cap 121, so that the functional liquid of the nozzle 95 of the functional liquid droplet ejection head 72 is dried without using a complicated mechanism. The functional liquid droplet ejection head 72 is stored in a function maintaining state, and the functional liquid with increased viscosity is discharged by being sucked from the nozzles 95 of the functional liquid droplet ejection head 72 in an airtight state by the caps 121. be able to.

  The wiping unit 113 is arranged on the drawing area 41 side of the drawing standby area 42, that is, between the drawing area 41 and the suction unit 111, and the functional liquid adheres and becomes dirty due to the suction of the functional liquid droplet ejection head 72. The nozzle surface 93 is wiped with a wiping sheet 123 impregnated with a cleaning liquid. With such an arrangement, the wiping unit 113 can finish the suction by the suction unit 111 and sequentially face the carriage unit 31 that individually moves to the drawing area 41, and performs the wiping process on the functional liquid droplet ejection head 72. Be able to. Then, the ejection function of the functional liquid droplet ejection head 72 in which nozzle clogging has occurred can be recovered by the above-described suction processing and wiping to wipe off the functional liquid adhering to the nozzle surface 93 by the suction processing.

  As shown in FIG. 4, the periodic flushing box 116 is for receiving flushing that is performed when drawing on the workpiece W is temporarily stopped, and is provided on the workpiece θ-axis table 57. When the set table 51 faces the workpiece carry-in / out area 43 for replacement, the regular flushing box 116 faces the drawing area 41 and receives the flushing from the functional liquid droplet ejection head 72.

  Although not shown, the pair of pre-discharge flushing boxes are for receiving pre-discharge flushing performed immediately before discharging the functional liquid onto the workpiece W, and are arranged so as to sandwich the set table 51 in the X-axis direction. . Thereby, it is possible to receive the flushing performed immediately before the ejection driving of the functional liquid droplet ejection head 72 accompanying the reciprocation of the workpiece W.

  The regular flushing box 116 and the pair of pre-discharge flushing boxes are each formed in a rectangular box shape in plan view, and an absorbent material (not shown) for absorbing the functional liquid is laid on the bottom surface. In addition, since the long side (Y-axis direction) of each flushing box is formed corresponding to the length of the maximum width drawing line Lm, the operation unit group 36 is configured by all the carriage units 31. In addition, flushing from the functional liquid droplet ejection head 72 can be received.

  Next, with reference to FIG. 9, a control system of the entire droplet discharge device 1 will be described. The control system of the droplet discharge apparatus 1 basically includes a host computer 3 and a drive unit 131 having various drivers for driving the functional droplet discharge head 72, the X-axis table 32, the Y-axis table 33, the maintenance means 23, and the like. And a control unit 132 (controller 24) that comprehensively controls the entire droplet discharge device 1 including the drive unit 131.

  The host computer 3 is configured by connecting a computer 17 connected to a controller 24 to a keyboard 17 and a display 18 for displaying an image of an input result or the like by the keyboard 17.

  The drive unit 131 includes a head driver 141 that controls the ejection of the functional liquid droplet ejection head 72, a moving driver 142 that controls the motors of the X-axis table 32 and the Y-axis table 33, and a suction unit of the maintenance unit 23. 111, a wiping unit 113, and a maintenance driver 143 that drives and controls the unit lifting mechanism 115.

  The control unit 132 includes a CPU 151, a ROM 152, a RAM 153, and a P-CON 154, which are connected to each other via a bus 155. The ROM 152 has a control program area for storing a control program to be processed by the CPU 151, and a control data area for storing control data for performing a drawing operation and image recognition.

  The RAM 153 includes, in addition to various register groups, a drawing data storage unit that stores drawing data for discharging functional liquid to the workpiece W, a position data storage unit that stores position data of the workpiece W and the functional liquid droplet ejection head 72, It has various storage units such as a setting storage unit that stores various settings (such as settings of an operation unit group 36 and a drawing standby unit group 37 described later) input from the keyboard 17 by an operator, and performs various operations for control processing. Used as a region.

  In addition to various drivers of the drive unit 131, various cameras of the image recognition means 35 are connected to the P-CON 154, and a logic circuit is constructed to supplement the functions of the CPU 151 and handle interface signals with peripheral circuits. Built in. For this reason, the P-CON 154 receives various commands and the like from the host computer 3 as they are or processes them and imports them into the bus 155, and in conjunction with the CPU 151, the data and control signals output from the CPU 151 and the like to the bus 155 Or it processes and outputs to the drive part 131. FIG.

  The CPU 151 inputs various detection signals, various commands, various data, etc. via the P-CON 154 according to the control program in the ROM 152, processes various data, etc. in the RAM 153, and then drives via the P-CON 154. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 131 and the like. For example, the CPU 151 controls the functional droplet discharge head 72, the X-axis table 32, and the Y-axis table 33 to perform drawing on the workpiece W under predetermined droplet discharge conditions and predetermined movement conditions.

  Here, with reference to FIG. 10 thru | or FIG. 13, drawing control by the droplet discharge apparatus 1 of this embodiment is demonstrated in detail. As described above, the droplet discharge device 1 moves the operating unit group 36 to the drawing area 41 and moves the operating unit group 36 relative to the workpiece W facing the drawing area 41 in the X-axis direction. However, the functional liquid droplet ejection head 72 ejects the functional liquid onto the workpiece W to perform the drawing process, and the drawing standby unit group 37 is moved to the drawing standby area 42 and the functional liquid droplet ejection head 72 is moved. Perform maintenance processing to keep the function maintained. The drawing process and the maintenance process are performed by controlling each apparatus of the drawing apparatus 22 and each unit of the maintenance means 23 by the controller 24.

  Here, a drawing process performed for each of the two workpieces W will be described. First, the active unit group 36 and the drawing standby unit group 37 are sorted based on the size of the first workpiece W introduced into the droplet discharge device 1. For example, when the first workpiece W is a fourth workpiece Wd having a size of 880 mm × 735 mm, the operator uses the keyboard 17 to set the four carriage units 31 (first to fourth carriages) on the drawing area 41 side. Units 31a to 31d) are set as the operation unit group 36, and the three carriage units 31 (fifth to seventh carriage units 31e to g) on the drawing standby area 42 side are set as the drawing standby unit group 37 (unit group sorting). (Refer to FIG. 10A).

  This unit group sorting setting is performed by the operator sorting the carriage units 31 into either the operation unit group 36 or the drawing standby unit group 37 as described above, and the operator sets the drawing target width of the workpiece W. The controller 24 may perform sorting based on the input value. Further, a sensor for detecting the length of the workpiece W set in the set table 51 in the Y-axis direction is provided, and the controller 24 detects the detected value. You may sort based on.

  Next, the Y-axis table 33 is driven and controlled, and the fifth to seventh carriage units 31e to 31g set as the drawing standby unit group 37 are moved to the drawing standby area 42 and set as the operating unit group 36. The first to fourth carriage units 31a to 31d are moved to the center in the Y-axis direction of the drawing area 41 (see FIG. 10B).

  Subsequent to the sorting of the working unit group 36 and the drawing standby unit group 37, the work W is set on the X-axis table 32, and the position of the work W and the working unit group 36 is corrected as described above (FIG. 11). (See (a)). And the drawing means 22 discharges a functional liquid with respect to the workpiece | work W, ie, performs a drawing process, receiving control of the controller 24 (refer FIG.11 (b)).

  On the other hand, for the drawing standby unit group 37 (fifth to seventh carriage units 31e to g) moved to the drawing standby area 42, the corresponding divided suction unit 112 (fifth to seventh divided suction units 112e to 112g). Thus, each functional liquid droplet ejection head 72 is sealed and stored in a function maintaining state (see FIGS. 10B and 11). According to this, while the operating unit group 36 is moved to the drawing area 41 and the drawing process is performed by the functional liquid droplet ejection head 72, the drawing standby unit group 37 is moved to the drawing standby area 42, The functional liquid droplet ejection head 72 can be stored while maintaining the ejection function.

  When the drawing process for the set fourth work Wd (880 mm × 735 mm) is completed in this way, the fourth work Wd that has been drawn is carried out of the drawing unit Su.

  Subsequently, the drawing process performed on the second workpiece W will be described by dividing the size of the second workpiece W into large and small cases. First, when the second workpiece W is a workpiece W having a size larger than the first workpiece W (fourth workpiece Wd) (for example, the fifth workpiece We of 1100 mm × 915 mm), the operator The group sorting setting is changed, that is, the first to fifth carriage units 31a to 31e are set as the operating unit group 36, and the sixth and seventh carriage units 31f and g are set as the drawing standby unit group 37 (FIG. 12 ( a)).

  Next, the Y-axis table 33 is driven and controlled, the fifth carriage unit 31e newly set as the drawing standby unit group 37 is moved to the drawing area 41 (see FIG. 12B), and the operating unit group 36 The first to fifth carriage units 31a to 31e set as are positioned at the center of the drawing area 41 in the Y-axis direction. Here, since the fifth carriage unit 31e has been stored in the function maintaining state in the drawing standby area 42 (fifth divided suction unit 112e), the fifth carriage unit 31e functions as the operating unit group 36 simply by moving it to the drawing area 41. be able to. In addition, it is preferable to perform the suction process by the fifth divided suction unit 112e and the wiping unit 113 as necessary, but also in this case, the nozzle 95 is not excessively dried by capping. Therefore, the time required for the suction process can be short.

  Thereafter, in the same manner as described above, the fifth workpiece We is set on the X-axis table 32 (see FIG. 13A), the drawing standby unit group 37 is stored in the function maintaining state, and drawing processing is performed by the operating unit group 36. Perform (see FIG. 13B). As described above, since the fifth carriage unit 31e in the drawing standby state can be brought into the operation state in a short time, the partial drawing line group corresponding to the drawing target width of the fifth work We can be configured in a short time. Can do.

  When the second workpiece W is a workpiece W having a size smaller than the first workpiece W (fourth workpiece Wd) (for example, the second workpiece Wb of 500 mm × 415 mm), the operator The group sorting setting is changed, that is, the first to second carriage units 31 a to 31 b are set as the operation unit group 36, and the third to seventh carriage units 31 c to g are set as the drawing standby unit group 37.

  Accordingly, the Y-axis table 33 is driven and controlled, and the third and fourth carriage units 31 c and d newly set as the drawing standby unit group 37 are moved to the drawing standby area 42. Thereafter, in the same manner as described above, the drawing standby unit group 37 is stored in the function maintaining state and the drawing process is performed by the operating unit group 36.

  Further, when the second workpiece W is the same size workpiece W (fourth workpiece Wd) as the first workpiece W (fourth workpiece Wd), the same unit group sorting setting as described above, that is, first to first While the fourth carriage units 31a to 31d are set as the operation unit group 36 and the fifth to seventh carriage units 31e to 31g are set as the drawing standby unit group 37, the drawing standby unit group 37 is stored in the function maintaining state. Drawing processing is performed by the operating unit group 36.

  As described above, according to the droplet discharge device 1 of the present embodiment, the functional droplet discharge head 72 of the drawing standby unit group 37 that does not operate during the drawing process can be stored and kept in a function-maintained state. In addition, the drawing standby state can be shifted to the operating state in a short time.

  Next, a second embodiment of the droplet discharge device 1 will be described with reference to FIG. The droplet discharge device 1 of the second embodiment has substantially the same configuration as the droplet discharge device 1 of the first embodiment, and includes the common gantry 21 and the drawing device 22 (carriage unit 31, X-axis table). 32, Y-axis table 33, etc.), maintenance means 23 (suction unit 111, wiping unit 113, etc.), etc., but in the first embodiment, maintenance means 23 is provided in a single drawing standby area 42. On the other hand, in the second embodiment, a pair of drawing standby areas 42 and 42 are arranged on both sides of the movement trajectory of the seven carriage units 31 with the drawing area 41 sandwiched in the Y-axis direction. The difference is that the waiting area 42 is provided with the maintenance means 23. Of the pair of drawing standby areas 42, the left side of the drawing is a first drawing standby area 42a, and the right side of the drawing is a second drawing standby area 42b.

  Accordingly, the droplet discharge device 1 of the second embodiment also maintains the function of the functional droplet discharge head 72 of the drawing standby unit group 37 that does not operate during the drawing process, similarly to the droplet discharge device 1 of the first embodiment. The state can be stored and kept in a standby state, and the drawing standby state can be shifted to the operating state in a short time.

  In addition, in the droplet discharge device 1 of the second embodiment, the degree of freedom of using the operating unit group and the drawing standby unit group can be increased for the seven carriage units 31. Specifically, in the first embodiment, as described above, when the drawing process is performed on the fourth work Wd, the operation unit group 36 is the first to fourth carriage units 31a to 31d. The drawing standby unit group 37 is the fifth to seventh carriage units 31e to 31g. That is, the unit group sorting setting for the active unit group 36 and the drawing standby unit group 37 is determined in one way.

  On the other hand, as shown in FIGS. 15 and 16, in the second embodiment, when drawing processing is performed on the fourth work, the working unit group 36 is drawn by the first to fourth carriage units 31 a to 31 d. When the standby unit group 37 is the fifth to seventh carriage units 31e to 31g (standby in the second drawing standby area 42b) (see FIG. 15A), the operating unit group 36 is the second to fifth carriage unit 31b. To e, when the drawing standby unit group 37 is the first carriage unit 31a (standby in the first drawing standby area 42a) and the sixth and seventh carriage units 31f.g (standby in the second drawing standby area 42b) (FIG. 15 (b)), the operation unit group 36 is the third to sixth carriage units 31c to f, and the drawing standby unit group 37 is the first and second carriage units 31a. In the case of (standby in the first drawing standby area 42a) and the seventh carriage unit 31g (standby in the second drawing standby area 42b) (see FIG. 16 (a)), the operating unit group 36 includes the fourth to seventh carriage units. In 31d to g, the drawing standby unit group 37 can be set in four ways as in the case of the first to third carriage units 31a to 31c (standby in the first drawing standby area 42a) (see FIG. 16B). Is possible.

  In the second embodiment, the suction unit 111 of each maintenance means 23 includes seven divided suction units 112 to increase the degree of freedom of use of the seven carriage units 31, and any of the suction units 111. In any case, it is possible to seal the caps 121 respectively corresponding to the all-function droplet discharge heads 72 of the seven carriage units 31 at a time. Of course, in order to save the space of the entire droplet discharge device, both the suction units 111 may have seven divided suction units 112 (for example, one is four and the other is three).

  Furthermore, in this embodiment, as the case where the active unit group 36 and the drawing standby unit group 37 are sorted, in addition to the case where the partial drawing line group corresponding to the drawing width of the workpiece W is configured as described above, There may be a case where the carriage unit 31 is divided into a plurality of sets and a plurality of different types of functional liquids are introduced.

  Specifically, as shown in FIG. 17, for example, the R functional liquid is introduced into the first and second carriage units 31a and 31b, and the G functional liquid is introduced into the third and fourth carriage units 31c and 31d. Then, the B functional liquid is introduced into the fifth and sixth carriage units 31e and f, and the R, G, and B three-color colored layers 508R, 508G, and 508B are formed on the workpiece W by one droplet discharge device 1. Thus, it is possible to manufacture a color filter. It should be noted that the functional liquid is not introduced into the seventh carriage unit 31g, but always waits in the second drawing standby area 42b (the seventh divided suction unit 112g).

  First, the first and second carriage units 31a and 31b are moved as the operating unit group 36 to the drawing area 41, and the third to sixth carriage units 31c to 31f are set as the drawing standby unit group 37 and the second drawing standby area 42b ( To the third to sixth divided suction units 112c to 112f). Then, the main scanning and sub-scanning of the operation unit group 36 is performed, the R functional liquid is discharged to the workpiece W to perform the drawing process, and the drawing standby unit group 37 is stored in the function maintaining state. (See (a) of the same figure).

  Subsequently, the first and second carriage units 31a and 31b are moved as the drawing standby unit group 37 from the drawing area 41 to the first drawing standby area 42a (the first and second divided suction units 112a and 112b), and the first The third and fourth carriage units 31c and 31d are moved from the second drawing standby area 42b to the drawing area 41 as the operating unit group 36. Then, the G functional liquid is discharged by the operating unit group 36 to perform the drawing process, and the drawing standby unit group 37 is kept in a function maintaining state (see FIG. 5B).

  Further, the third and fourth carriage units 31 c and d are moved as the drawing standby unit group 37 from the drawing area 41 to the first drawing standby area 42 a (the third and fourth divided suction units 112 c and d), and the fifth The sixth carriage units 31e and f are moved from the second drawing standby area 42b to the drawing area 41 as the operating unit group 36. Then, the functional unit B is discharged by the operation unit group 36 to perform the drawing process, and the drawing standby unit group 37 is stored in the function maintaining state (see FIG. 10C).

  In this way, it is possible to discharge / draw R, G, and B color functional liquids with one droplet discharge device 1 (drawing unit Su), and to perform drawing processing of functional liquids of a certain color. After that, the drawing process of the functional liquid of the next color can be performed in a short time.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 18 is a flowchart showing the manufacturing process of the color filter, and FIG. 19 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in a bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 19B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 19C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and the colored layer (film forming unit) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 19 (d), functional droplets are ejected by the functional droplet ejection head 72 and each pixel region 507a surrounded by the partition wall portion 507b is placed. Make it land. In this case, the functional liquid droplet ejection head 72 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 20 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 19, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 20 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the functional liquid droplet ejection head 72. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 72.

FIG. 21 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 22 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 23 is a cross-sectional view of an essential part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 24, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and an opposing surface. It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 25, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The region to be subjected to the lyophilic treatment is the first laminated portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using, for example, oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 72, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 51 of the droplet discharge device 1 shown in FIG. 2, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 27, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 72 to each opening 619 that is a pixel region. Discharge inside. Then, as shown in FIG. 28, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 29, the second composition containing the light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 29) is used as a functional droplet as a pixel region ( A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 30, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In the case of this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 72, as shown in FIG. 31, the same steps as in the case of the light emitting layer 617b corresponding to blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 32, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 33 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 51 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 72. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 72, and corresponding. Land in the color discharge chamber 705.

Next, FIG. 34 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 35A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

It is a plane schematic diagram of a drawing system. It is an external appearance perspective view of a droplet discharge device. It is a top view of a droplet discharge device. It is a side view of a droplet discharge device. It is explanatory drawing of a some carriage unit. It is an external appearance perspective view of a functional droplet discharge head. It is a figure explaining the drawing line comprised by all the discharge nozzles of a some carriage unit, and a workpiece | work size. It is an external appearance perspective view of a maintenance means. It is the block diagram explaining the control system of the droplet discharge apparatus. It is explanatory drawing of the drawing process with respect to the 4th workpiece | work using a droplet discharge apparatus. It is explanatory drawing of the drawing process with respect to the 4th workpiece | work using a droplet discharge apparatus following FIG. It is explanatory drawing of the drawing process with respect to the 5th workpiece | work following the drawing process with respect to the 4th workpiece | work using the droplet discharge apparatus of FIG. It is explanatory drawing of the drawing process with respect to the 5th workpiece | work using a droplet discharge apparatus following FIG. It is a top view of the droplet discharge device concerning a 2nd embodiment. It is explanatory drawing of the drawing process with respect to the 4th workpiece | work using the droplet discharge apparatus which concerns on 2nd Embodiment. FIG. 16 is an explanatory diagram of a drawing process for a fourth work using the droplet discharge device according to the second embodiment, similarly to FIG. 15. It is explanatory drawing of the drawing process which discharges the functional liquid of R, G, B color using the droplet discharge apparatus which concerns on 2nd Embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 24 ... Controller 31 ... Carriage unit 32 ... X-axis table 33 ... Y-axis table 36 ... Working unit group 37 ... Drawing standby unit group 41 ... Drawing area 42 ... Drawing standby area 72 ... Functional droplet discharge head 73 ... Carriage 95 ... Nozzle 111 ... Suction unit 113 ... Wiping unit 121 ... Cap 123 ... Wiping sheet Lp ... Partial drawing line W ... Workpiece

Claims (11)

A plurality of carriage units each having a functional liquid droplet ejection head into which a functional liquid is introduced and a carriage on which the functional liquid droplet ejection head is mounted are configured to be individually movable between a drawing area and a drawing standby area. Prepared,
The working unit group including at least one carriage unit among the plurality of carriage units is moved to the drawing area, and the working unit group is moved relative to the work facing the drawing area in the X-axis direction. However, a drawing step of performing drawing processing by discharging the functional liquid onto the workpiece from the functional droplet discharge head of the operating unit group;
Among the plurality of carriage units, a drawing standby unit group composed of carriage units other than the operating unit group is moved to the drawing standby area, and the functional liquid droplet ejection heads of the drawing standby unit group are stored in a function maintaining state. Storage process to
A drawing control method for a droplet discharge device, comprising:   The operating unit group is a drawing target of the workpiece in the Y-axis direction by a drawing line in which a plurality of ejection nozzles of the functional liquid droplet ejection head are continuously formed in the Y-axis direction orthogonal to the X-axis direction. The drawing control method for a droplet discharge device according to claim 1, comprising a minimum number of the carriage units covering a width. A plurality of carriage units each having a functional liquid droplet ejection head into which a functional liquid is introduced and a carriage on which the functional liquid droplet ejection head is mounted are configured to be individually movable between a drawing area and a drawing standby area. Prepared,
While moving an operation unit group composed of at least one carriage unit among the plurality of carriage units relative to the workpiece in the X-axis direction, the function liquid droplet ejection head of the operation unit group in the drawing area moves from the functional droplet discharge head. While performing the drawing process by discharging the functional liquid onto the workpiece,
A droplet discharge device that stores the functional droplet discharge head of a drawing standby unit group composed of carriage units other than the operating unit group among the plurality of carriage units in a function maintaining state in the drawing standby area,
Carriage moving means for individually moving the plurality of carriage units between the drawing area and the drawing standby area;
Head storage means provided in the drawing standby area, facing the functional liquid droplet ejection head of the drawing standby unit group that has moved to the drawing standby area, and storing the functional liquid droplet ejection head in a function maintaining state;
Movement for controlling the carriage moving means to move the operating unit group to the drawing area so as to be used for the drawing process and to move the drawing standby unit group to the drawing standby area so as to face the storage means Control means;
A droplet discharge device further comprising:   The operating unit group is a drawing target of the workpiece in the Y-axis direction by a drawing line in which a plurality of ejection nozzles of the functional liquid droplet ejection head are continuously formed in the Y-axis direction orthogonal to the X-axis direction. The droplet discharge device according to claim 3, comprising a minimum number of the carriage units covering a width.   The drawing standby area is composed of a pair of elements arranged on both sides of the movement trajectory of the plurality of carriage units across the drawing area, and the head storage unit is provided respectively. The droplet discharge device according to claim 3 or 4.   6. The capping unit according to claim 3, wherein the head storage unit includes a capping unit including a plurality of caps that hermetically seal the functional liquid droplet ejection heads of the drawing standby unit group. Droplet discharge device. A suction means for sucking a functional liquid from a discharge nozzle of the functional liquid droplet discharge head in an airtight state in the drawing standby area;
Wiping means for wiping the nozzle surface of the functional liquid droplet ejection head after suction with a wiping sheet;
The liquid droplet ejection apparatus according to claim 3, further comprising: An X-axis table for mounting the workpiece and moving the workpiece in the X-axis direction;
The carriage moving means is a Y-axis table that mounts the plurality of carriage units side by side in the Y-axis direction orthogonal to the X-axis direction and moves the carriage units in the Y-axis direction. The liquid droplet ejection apparatus according to claim 3.   9. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 3 is used to form a film forming portion with functional droplets on the workpiece.   An electro-optical device using the droplet discharge device according to claim 3, wherein a film forming portion is formed by functional droplets on the workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 9 or the electro-optical device according to claim 10.

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