JP2006049352A - Suscepter apparatus - Google Patents
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本発明は、IC、LSI、VLSI等の半導体装置、液晶装置(LCD)等を製造する際に用いられる半導体ウエハ、金属ウエハ、ガラス板等の板状試料を固定する際に用いて好適なサセプタ装置に関するものである。 The present invention is a susceptor suitable for fixing a plate-like sample such as a semiconductor wafer, a metal wafer, or a glass plate used when manufacturing a semiconductor device such as an IC, LSI, or VLSI, or a liquid crystal device (LCD). It relates to the device.
従来、半導体装置や液晶装置等の製造工程においては、半導体ウエハ、金属ウエハ、ガラス板等の板状試料の表面に各種の処理を施すことが行われており、この各種処理に際しては、板状試料を固定するとともに、この板状試料を好ましい一定の温度に維持するためにサセプタ装置が用いられ、これまでにも様々な構造のサセプタ装置が提案されている(例えば、特許文献1参照)。 Conventionally, in the manufacturing process of a semiconductor device, a liquid crystal device, and the like, various treatments have been performed on the surface of a plate-like sample such as a semiconductor wafer, a metal wafer, or a glass plate. A susceptor device has been used to fix the sample and maintain the plate-like sample at a preferable constant temperature, and susceptor devices having various structures have been proposed so far (see, for example, Patent Document 1).
図12は、従来のサセプタ装置の1例を示す断面図であり、このサセプタ装置1は、絶縁体からなるサセプタ基体2の表面2aの周縁部に所定幅及び所定高さのリング状の周縁壁3が設けられ、この周縁壁3の内側の表面2aに周縁壁3と同一の高さの柱状突起4が複数本設けられ、柱状突起4、4、…のそれぞれの頂面4a、即ち板状試料Wとの接触面には、表面粗さRa(中心線平均粗さ)が0.35μm〜3.0μmとなるように粗面加工が施され、周縁壁3の頂面3a及び柱状突起4の頂面4aにより板状試料Wを支持する構成になっている。
FIG. 12 is a cross-sectional view showing an example of a conventional susceptor device. This susceptor device 1 has a ring-shaped peripheral wall having a predetermined width and a predetermined height at the peripheral portion of the
このサセプタ基体2には、厚み方向に貫通する冷却ガス導入孔5が形成されるとともに、その表面2aに平行に静電吸着力を発生させるための内部電極6が配設され、この内部電極6に電極挿入孔7に設けられた取り出し電極8により電圧を印加することにより、板状試料Wを静電吸着しつつ、この板状試料Wを冷却ガス導入孔5を流動する冷却ガスにより好ましい一定の温度に維持するようになっている。
The susceptor base 2 is formed with a cooling
また、近年、プラズマCVD装置、プラズマエッチング装置、スパッタリング装置、イオン注入装置等のプラズマを使用する装置、特にプラズマエッチング装置においては、これらの装置に搭載されているサセプタ装置の静電吸着面の汚染物やパーティクルを除去するために、静電吸着面に板状試料を静電吸着固定する前に、プラズマを用いて反応チャンバー内をクリーニングする、いわゆるウエハレスドライクリーニングを施すことが行われ始めている。
しかしながら、上述した従来のサセプタ装置1においては、板状試料Wの処理が増加するに従って、サセプタ基体2の柱状突起4、4、…それぞれの頂面4aが板状試料Wとの接触により磨耗することにより、これらの頂面4aの表面状態が経時的に変化し、板状試料Wとの接触状態を一定に保つことが難しいという問題点があった。
この場合、サセプタ基体2と板状試料Wとの間の熱伝導度が経時的に変化し、板状試料Wを一定の温度に維持することが難しくなるために、板状試料W毎に均一的な処理を施すことができないという問題点があった。
また、柱状突起4の頂面4aと板状試料Wの接触面との間にパーティクルが入り込み易く、このパーティクルが入り込んだ場合、静電吸着力が低下し、冷却ガスのシール性も低下するという問題点もあった。
However, in the above-described conventional susceptor device 1, the
In this case, the thermal conductivity between the susceptor substrate 2 and the plate sample W changes with time, and it becomes difficult to maintain the plate sample W at a constant temperature. There was a problem that it was not possible to perform a typical process.
In addition, particles easily enter between the
一方、ウエハレスドライクリーニングでは、このドライクリーニング中にサセプタ装置の板状試料の載置面がプラズマに直接曝されるため、ウエハレスドライクリーニングが累積されるにしたがって、この載置面の表面状態が経時的に変化し、その結果、板状試料との接触状態が変化し、静電吸着力が変動し、電圧印加中止後の離脱性が変化する(静電チャックの場合)他、サセプタ装置の板状試料載置面と板状試料との間の熱伝導性が経時的に変化し、板状試料を所定の温度に一定に維持することができなくなり、板状試料毎に均一的な処理を施すことができなくなるという問題点があった。
さらに、板状試料の面内温度の均一性も低下するために、板状試料の処理面全域にわたる均一な処理ができなくなり、パーティクルも発生し易くなるという問題点もあった。
On the other hand, in waferless dry cleaning, the mounting surface of the plate-like sample of the susceptor device is directly exposed to plasma during this dry cleaning, so the surface state of this mounting surface is increased as waferless dry cleaning is accumulated. Changes over time, and as a result, the state of contact with the plate sample changes, the electrostatic adsorption force fluctuates, the detachability after voltage application stops (in the case of an electrostatic chuck), and the susceptor device The thermal conductivity between the plate-like sample mounting surface and the plate-like sample changes over time, and the plate-like sample cannot be kept constant at a predetermined temperature. There was a problem that the processing could not be performed.
Furthermore, since the uniformity of the in-plane temperature of the plate-like sample is also lowered, there is a problem that uniform treatment over the entire processing surface of the plate-like sample cannot be performed and particles are easily generated.
本発明は、上記の事情に鑑みてなされたものであって、サセプタ装置に板状試料を繰り返し載置した場合においても、また、ウエハレスドライクリーニング処理時間が増大した場合においても、サセプタ装置と板状試料との間の熱伝導特性が大きく変化することがなく、パーティクルの発生も少なく、板状試料の裏面へのパーティクルの付着を防止することが可能であり、さらに、サセプタ装置を静電チャックとして用いた場合においても、静電吸着力が変動したり、電圧印加中止後の離脱性が変化することもないサセプタ装置を提供することを目的とする。 The present invention has been made in view of the above circumstances, and even when a plate-like sample is repeatedly placed on the susceptor device, and when the waferless dry cleaning processing time is increased, the susceptor device The heat conduction characteristics with the plate-shaped sample do not change greatly, the generation of particles is small, it is possible to prevent particles from adhering to the back surface of the plate-shaped sample, and the susceptor device is electrostatically Even when used as a chuck, an object is to provide a susceptor device in which the electrostatic attraction force does not fluctuate and the detachability after voltage application is stopped does not change.
本発明者は、鋭意検討した結果、サセプタ基体の表面(一主面)に複数の突起部を設け、これらの突起部それぞれの頂面に複数の微小突起部を設け、これら微小突起部それぞれの頂面を板状試料を載置する載置面とすれば、サセプタ装置の板状試料との接触面(載置面)の表面状態が磨耗により変化したとしても、板状試料との接触状態への影響が軽微であり、また、ウエハレスドライクリーニングにおける処理時間が増大しても、サセプタ装置の板状試料との接触面の表面状態の変化が軽微であることを知見し、本発明を完成するに至った。 As a result of intensive studies, the present inventor has provided a plurality of protrusions on the surface (one main surface) of the susceptor base, and provided a plurality of minute protrusions on the top surface of each of these protrusions. If the top surface is the mounting surface on which the plate-like sample is placed, even if the surface state of the contact surface (mounting surface) with the plate-like sample of the susceptor device changes due to wear, the contact state with the plate-like sample It has been found that the change in the surface state of the contact surface with the plate sample of the susceptor device is slight even if the processing time in waferless dry cleaning is increased, and the present invention is It came to be completed.
すなわち、本発明のサセプタ装置は、基体の一主面に複数の突起部を設け、これらの突起部それぞれの頂面に複数の微小突起部を設け、これら微小突起部それぞれの頂面を板状試料を載置する載置面としたことを特徴とする。
このサセプタ装置では、突起部それぞれの頂面に設けられた微小突起部それぞれの頂面を板状試料を載置する載置面としたことにより、サセプタ装置に板状試料を繰り返し載置した場合においても、また、ウエハレスドライクリーニング処理時間が増大した場合においても、サセプタ装置と板状試料との間の熱伝導特性の経時的変動を抑えることが可能になり、その結果、パーティクルの発生も少なくなり、板状試料の裏面へのパーティクルの付着を防止することも可能である。
さらに、サセプタ装置を静電チャックとして用いた場合においても、静電吸着力が変動したり、電圧印加中止後の離脱性が変化する等もなくなる。
That is, the susceptor device of the present invention is provided with a plurality of projections on one main surface of the base, a plurality of microprojections on the top surface of each of these projections, and the top surface of each of these microprojections is plate-shaped. It is characterized by having a mounting surface on which the sample is mounted.
In this susceptor device, when the top surface of each micro-projection provided on the top surface of each projection is used as a mounting surface on which the plate-like sample is placed, the plate-like sample is repeatedly placed on the susceptor device In addition, even when the waferless dry cleaning processing time is increased, it is possible to suppress the temporal variation of the heat conduction characteristics between the susceptor device and the plate-like sample, and as a result, generation of particles is also possible. It is also possible to reduce the adhesion of particles to the back surface of the plate-like sample.
Further, even when the susceptor device is used as an electrostatic chuck, the electrostatic attraction force does not fluctuate and the detachability after the voltage application is stopped does not change.
本発明のサセプタ装置においては、前記突起部の前記一主面に沿う断面積は8×10−3mm2以上かつ8×10−1mm2以下であり、前記微小突起部の前記一主面に沿う断面積は2×10−5mm2以上かつ2×10−3mm2以下であることが好ましい。
このサセプタ装置では、前記突起部の前記一主面に沿う断面積が8×10−3mm2未満であると、この突起部が磨耗し易くなり、パーティクル発生の原因となるからであり、一方、この断面積が8×10−1mm2を越えると、この突起部の形状に呼応した温度差分布が板状試料に発生するからである。
In the susceptor device of the present invention, a cross-sectional area along the one principal surface of the protrusion is 8 × 10 −3 mm 2 or more and 8 × 10 −1 mm 2 or less, and the one principal surface of the minute protrusion is Is preferably 2 × 10 −5 mm 2 or more and 2 × 10 −3 mm 2 or less.
In this susceptor device, if the cross-sectional area along the one principal surface of the protrusion is less than 8 × 10 −3 mm 2 , the protrusion easily wears and causes particle generation. This is because, when the cross-sectional area exceeds 8 × 10 −1 mm 2 , a temperature difference distribution corresponding to the shape of the protrusion is generated in the plate-like sample.
また、前記微小突起部においては、その前記一主面に沿う断面積が2×10−5mm2未満であると、ウエハレスドライクリーニングを施した場合に、処理時間が増大するに伴ってプラズマに曝されることにより、微小突起部の板状試料に対向する面の表面状態が経時的に大きく変化し、サセプタ装置の熱特性が変動するからであり、一方、微小突起部の前記一主面に沿う断面積が2×10−3mm2を越えると、この微小突起部と微小突起部間に形成される微細な溝部との間に熱伝導性に差異が生じるために板状試料に局所的な温度差が生じ、また、微小突起部上に付着したパーティクルが上記の溝部に落下できず、微小突起部の頂面と板状試料との間にパーティクルが介在することとなり、板状試料と微小突起部との間の熱伝導特性が変化するからである。 Further, when the cross-sectional area along the one main surface is less than 2 × 10 −5 mm 2 in the microprojection portion, the plasma increases as the processing time increases when waferless dry cleaning is performed. This is because the surface state of the surface of the microprojection facing the plate-like sample changes greatly with time, and the thermal characteristics of the susceptor device fluctuate. If the cross-sectional area along the surface exceeds 2 × 10 −3 mm 2 , a difference in thermal conductivity occurs between the microprojection and the microgroove formed between the microprojections, so the plate sample A local temperature difference occurs, and the particles adhering to the microprojections cannot fall into the groove, and the particles are interposed between the top surface of the microprojections and the plate-like sample. The heat conduction characteristics between the sample and the microprojection Because it changes.
本発明のサセプタ装置においては、前記微小突起部の前記突起部の頂面からの高さは、1μm以上かつ10μm以下であることが好ましい。
このサセプタ装置では、微小突起部の前記突起部の頂面からの高さが1μm未満であると、板状試料の裏面にパーティクルが付着し易くなり、また、パーティクルが付着した際の熱伝導率の変化が大きくなるからであり、一方、微小突起部の前記突起部の頂面からの高さが10μmを越えると、パーティクル付着の防止効果や熱伝導性の変化の防止効果の増大が望めず、吸着力が低下し、微小突起部の加工時に形状崩れ等が生じ易く、加工コストの増加をもたらすからである。
In the susceptor device according to the present invention, it is preferable that the height of the minute protrusion from the top surface of the protrusion is 1 μm or more and 10 μm or less.
In this susceptor device, if the height of the microprojection from the top surface of the projection is less than 1 μm, particles easily adhere to the back surface of the plate-like sample, and the thermal conductivity when the particles adhere On the other hand, if the height of the microprojection from the top surface of the projection exceeds 10 μm, it cannot be expected to increase the effect of preventing the adhesion of particles or the effect of changing the thermal conductivity. This is because the attracting force is reduced, the shape of the microprojections is easily broken during processing, and the processing cost is increased.
本発明のサセプタ装置においては、前記突起部における前記複数の微小突起部の前記一主面に沿う面積の合計は、前記突起部の頂面の面積の1%以上かつ40%以下であることが好ましい。
このサセプタ装置では、複数の微小突起部の前記一主面に沿う面積の合計が突起部の頂面の面積の1%未満であると、必要な静電吸着力を確保することが難しくなるからであり、一方、複数の微小突起部の前記一主面に沿う面積の合計が突起部の頂面の面積の40%を越えると、載置面にパーティクルが付着し易くなり、しかも電圧印加中止後の板状試料の脱離性を確保することが難しくなるからである。
In the susceptor device of the present invention, the sum of the areas along the one principal surface of the plurality of microprojections in the projection may be 1% or more and 40% or less of the area of the top surface of the projection. preferable.
In this susceptor device, if the total area along the one main surface of the plurality of minute protrusions is less than 1% of the area of the top surface of the protrusions, it is difficult to ensure the required electrostatic attraction force. On the other hand, if the sum of the areas along the one principal surface of the plurality of microprojections exceeds 40% of the area of the top surface of the protrusion, particles are likely to adhere to the mounting surface, and voltage application is stopped. This is because it becomes difficult to ensure the detachability of the later plate-like sample.
本発明のサセプタ装置においては、前記微小突起部の頂面の周縁部は、曲面とされていることが好ましい。
このサセプタ装置では、微小突起部の頂面の周縁部を曲面としたことにより、板状試料との接触による板状試料の損傷を防止すると共に、板状試料のズレによる前記微小突起部の頂面の形状変化を抑制し、板状試料の載置面と板状試料との間の熱伝導性の変化を防止する。
In the susceptor device of the present invention, it is preferable that the peripheral edge portion of the top surface of the minute protrusion is a curved surface.
In this susceptor device, the peripheral edge of the top surface of the microprojection is curved, thereby preventing damage to the plate sample due to contact with the plate sample, and the top of the microprojection due to displacement of the plate sample. The shape change of the surface is suppressed, and the change in thermal conductivity between the mounting surface of the plate sample and the plate sample is prevented.
本発明のサセプタ装置においては、前記曲面の曲率半径は、0.5μm以上かつ5μm以下であることが好ましい。
このサセプタ装置では、前記曲面の曲率半径を0.5μm以上かつ5μm以下としたことにより、前記微小突起部の外周部の欠け、板状試料との接触による板状試料の損傷、およびパーティクルの発生を抑制する。
In the susceptor device of the present invention, it is preferable that the curvature radius of the curved surface is 0.5 μm or more and 5 μm or less.
In this susceptor device, the curvature radius of the curved surface is set to 0.5 μm or more and 5 μm or less, so that the chip of the outer periphery of the microprojection is chipped, the plate sample is damaged by contact with the plate sample, and particles are generated. Suppress.
本発明のサセプタ装置においては、前記複数の突起部及び前記複数の微小突起部は、炭化ケイ素を1重量%以上かつ12重量%以下含む酸化アルミニウム−炭化ケイ素複合焼結体であり、前記酸化アルミニウムの平均粒子径は2μm以下、前記炭化ケイ素の平均粒子径は0.2μm以下であることが好ましい。 In the susceptor device of the present invention, the plurality of protrusions and the plurality of micro protrusions are an aluminum oxide-silicon carbide composite sintered body containing silicon carbide in an amount of 1 wt% to 12 wt%, and the aluminum oxide The average particle diameter of the silicon carbide is preferably 2 μm or less, and the average particle diameter of the silicon carbide is preferably 0.2 μm or less.
このサセプタ装置では、炭化ケイ素の含有量が1重量%未満であると、酸化アルミニウムの平均粒子径が2μmより大きくなり、よって、プラズマエッチングされ易くなるからであり、一方、12重量%を越えると、サセプタ基体の固有抵抗値が1×108Ω・cmより小さくなり、良好なサセプタ基体とならないからである。 In this susceptor device, if the silicon carbide content is less than 1% by weight, the average particle diameter of aluminum oxide becomes larger than 2 μm, and therefore, plasma etching is likely to occur, whereas if it exceeds 12% by weight. This is because the specific resistance value of the susceptor substrate is smaller than 1 × 10 8 Ω · cm, and the susceptor substrate is not good.
また、酸化アルミニウムの平均粒子径を2μm以下とすることにより、酸化アルミニウム−炭化ケイ素複合焼結体がプラズマエッチングされてスパッタ痕が形成されることを防止する。
また、炭化珪素の平均粒子径を0.2μm以下とすることにより、プラズマ照射時の電場が酸化アルミニウム−炭化ケイ素複合焼結体中の炭化珪素粒子の部分に集中して炭化珪素粒子の周辺が損傷することを防止する。
Further, by setting the average particle diameter of aluminum oxide to 2 μm or less, it is possible to prevent the aluminum oxide-silicon carbide composite sintered body from being plasma etched and forming a sputter mark.
Further, by setting the average particle diameter of silicon carbide to 0.2 μm or less, the electric field at the time of plasma irradiation concentrates on the portion of silicon carbide particles in the aluminum oxide-silicon carbide composite sintered body, and the periphery of the silicon carbide particles is Prevent damage.
本発明のサセプタ装置においては、前記一主面の周縁部に沿って連続する壁部を設け、この壁部の頂面及び前記微小突起部の頂面を前記板状試料を載置する載置面としたことが好ましい。
このサセプタ装置では、前記一主面の周縁部に沿って設けられた連続する壁部の頂面及び前記微小突起部の頂面を前記板状試料を載置する載置面としたことにより、前記板状試料の載置面と前記板状試料との間の隙間に冷却ガスをシールすることが可能である。
In the susceptor device according to the present invention, a wall portion continuous along the peripheral edge portion of the one main surface is provided, and the plate-like sample is placed on the top surface of the wall portion and the top surface of the microprojection portion. It is preferable to use a surface.
In this susceptor device, the top surface of the continuous wall portion provided along the peripheral edge portion of the one main surface and the top surface of the microprojection portion are set as mounting surfaces on which the plate-like sample is mounted, It is possible to seal the cooling gas in the gap between the plate-like sample mounting surface and the plate-like sample.
本発明のサセプタ装置においては、前記壁部の頂面の内周側には、その周方向に沿う段差部が形成され、前記頂面の前記段差部を除く領域を前記板状試料を載置する載置面としたことが好ましい。
このサセプタ装置では、前記壁部の頂面の内周側に、その周方向に沿う段差部を形成し、前記頂面の前記段差部を除く領域と前記微小突起部の頂面とを前記板状試料を載置する載置面としたことにより、前記壁部の頂面上へのパーティクルの付着が低減され、パーティクル付着による冷却ガスのシール性の低下を大幅に低減する。
In the susceptor device of the present invention, a step portion along the circumferential direction is formed on the inner peripheral side of the top surface of the wall portion, and the plate-like sample is placed in an area excluding the step portion on the top surface. It is preferable to use a mounting surface.
In this susceptor device, a step portion along the circumferential direction is formed on the inner peripheral side of the top surface of the wall portion, and the region excluding the step portion on the top surface and the top surface of the microprojection portion are connected to the plate. By using the mounting surface for mounting the shaped sample, the adhesion of particles to the top surface of the wall portion is reduced, and the deterioration of the sealing performance of the cooling gas due to the particle adhesion is greatly reduced.
本発明のサセプタ装置においては、前記段差部に、複数の第2の微小突起部を設け、これら第2の微小突起部それぞれの頂面を前記板状試料を載置する載置面としたことが好ましい。
このサセプタ装置では、前記段差部に、複数の第2の微小突起部を設け、これら第2の微小突起部それぞれの頂面と、前記壁部の頂面と、前記微小突起部の頂面とを前記板状試料を載置する載置面としたことにより、第2の微小突起部の頂面上へのパーティクルの付着が低減され、パーティクル付着による冷却ガスのシール性の低下を大幅に低減する。
In the susceptor device of the present invention, the step portion is provided with a plurality of second microprojections, and the top surface of each of the second microprojections is used as a placement surface on which the plate-like sample is placed. Is preferred.
In this susceptor device, the step portion is provided with a plurality of second microprojections, the top surface of each of the second microprojections, the top surface of the wall, and the top surface of the microprojections. Is a mounting surface on which the plate-like sample is mounted, so that the adhesion of particles to the top surface of the second microprojection is reduced, and the deterioration of the sealing performance of the cooling gas due to the adhesion of particles is greatly reduced. To do.
本発明のサセプタ装置においては、前記段差部に、その周方向に沿って連続する第2の壁部を設け、この第2の壁部の頂面を前記板状試料を載置する載置面としたことが好ましい。
このサセプタ装置では、前記段差部に、その周方向に沿って連続する第2の壁部を設け、この第2の壁部の頂面と、前記(第1の)壁部の頂面と、前記微小突起部の頂面とを前記板状試料を載置する載置面としたことにより、パーティクル付着による冷却ガスのシール性の低下を低減するとともに、十分な吸着力を確保することが可能になる。
In the susceptor device according to the present invention, the stepped portion is provided with a second wall portion that is continuous along the circumferential direction, and the top surface of the second wall portion is placed on the plate-like sample. It is preferable that
In this susceptor device, the stepped portion is provided with a second wall portion continuous along the circumferential direction thereof, the top surface of the second wall portion, the top surface of the (first) wall portion, By making the top surface of the microprojection part a mounting surface on which the plate-like sample is mounted, it is possible to reduce a decrease in cooling gas sealing performance due to particle adhesion and to secure a sufficient adsorbing force. become.
本発明のサセプタ装置においては、前記第2の壁部の前記段差部からの高さは、1μm以上かつ10μm以下であることが好ましい。
このサセプタ装置では、第2の壁部の前記段差部からの高さが1μm未満であると、板状試料の裏面にパーティクルが付着し易くなり、また、パーティクルが付着した際の熱伝導率の変化が大きくなるからであり、一方、第2の壁部の前記段差部からの高さが10μmを越えると、パーティクル付着の防止効果や熱伝導性の変化の防止効果の増大が望めず、吸着力が低下し、微小突起部の加工時に形状崩れ等が生じ易く、加工コストの増加をもたらすからである。
In the susceptor device of the present invention, it is preferable that the height of the second wall portion from the step portion is 1 μm or more and 10 μm or less.
In this susceptor device, when the height of the second wall portion from the stepped portion is less than 1 μm, particles easily adhere to the back surface of the plate-like sample, and the thermal conductivity of the particles when adhered On the other hand, if the height of the second wall portion from the stepped portion exceeds 10 μm, the effect of preventing the adhesion of particles and the effect of preventing the change of thermal conductivity cannot be expected, and adsorption This is because the force is reduced, the shape of the microprojections is easily broken during processing, and the processing cost is increased.
本発明のサセプタ装置においては、前記基体内に、内部電極を備えたことが好ましい。
この内部電極は、直流電圧が印加されて静電吸着力を発生させるための内部電極、高周波電力が印加されてプラズマを発生させるための内部電極、交流電圧または直流電圧が印加されて発熱するヒータ用の内部電極のいずれであってもよい。
In the susceptor device of the present invention, it is preferable that an internal electrode is provided in the substrate.
This internal electrode includes an internal electrode for generating an electrostatic attraction force by applying a DC voltage, an internal electrode for generating plasma by applying a high frequency power, and a heater that generates heat when an AC voltage or a DC voltage is applied. Any of the internal electrodes may be used.
以上説明したように、本発明のサセプタ装置によれば、基体の一主面に複数の突起部を設け、これらの突起部それぞれの頂面に複数の微小突起部を設け、これら微小突起部それぞれの頂面を板状試料を載置する載置面としたので、サセプタ装置に板状試料を繰り返し載置した場合においても、また、ウエハレスドライクリーニング処理時間が増大した場合においても、サセプタ装置と板状試料との間の熱伝導特性の経時的変動を抑えることができ、よって、板状試料毎に均一な処理を施すことができる。また、パーティクルの発生も抑制することができ、板状試料の裏面へのパーティクルの付着を防止することができる。
さらに、サセプタ装置を静電チャックとして用いた場合には、静電吸着力の変動を抑制し、電圧印加中止後の離脱性が変化する虞もなくなる。
As described above, according to the susceptor device of the present invention, a plurality of protrusions are provided on one main surface of the base, and a plurality of minute protrusions are provided on the top surfaces of these protrusions. Since the top surface of the substrate is a mounting surface on which the plate-like sample is placed, the susceptor device can be used even when the plate-like sample is repeatedly placed on the susceptor device or when the waferless dry cleaning processing time increases. Variation of the heat conduction characteristics between the plate-like sample and the plate-like sample can be suppressed with time, and thus a uniform treatment can be performed for each plate-like sample. Moreover, generation | occurrence | production of a particle can also be suppressed and adhesion of the particle to the back surface of a plate-shaped sample can be prevented.
Further, when the susceptor device is used as an electrostatic chuck, fluctuations in electrostatic attraction force are suppressed, and there is no possibility that the detachability after voltage application is stopped will change.
本発明のサセプタ装置の各実施の形態について、静電吸着用の内部電極を備えた静電チャック装置を例にとり説明する。
なお、以下の各実施の形態は、発明の趣旨をより良く理解させるために具体的に説明するものであり、特に指定のない限り、本発明を限定するものではない。
Each embodiment of the susceptor device of the present invention will be described by taking an electrostatic chuck device provided with an internal electrode for electrostatic attraction as an example.
The following embodiments are specifically described for better understanding of the gist of the invention, and do not limit the present invention unless otherwise specified.
[第1の実施形態]
図1は、本発明の第1の実施形態の静電チャック装置を示す断面図、図2は同静電チャック装置の要部を示す拡大断面図、図3は同静電チャック装置の要部を示す拡大平面図であり、この静電チャック装置11は、円板状の基体12と、この基体12の下面側にシリコン樹脂系接着剤13を介して接着一体化された金属製の温度調節ベース部材14とを主体として構成されている。
[First Embodiment]
1 is a cross-sectional view showing an electrostatic chuck device according to a first embodiment of the present invention, FIG. 2 is an enlarged cross-sectional view showing a main part of the electrostatic chuck device, and FIG. 3 is a main part of the electrostatic chuck device. The
基体12は、上面(一主面)21a側が半導体ウエハ、金属ウエハ、ガラス板等の板状試料Wを載置するための載置面とされた円形状の誘電体板21と、この誘電体板21の下面(他の一主面)21b側に対向配置された円板状の絶縁部材22と、誘電体板21と絶縁部材22との間に挟持された面状の内部電極23と、内部電極23の外周側にこれを囲む様に設けられた環状の絶縁部材24とを主体として構成されている。
The
一方、温度調節ベース部材14には、その内部に水や有機溶媒等の冷却用媒体を循環させる流路25が形成されている。
そして、これら基体12及び温度調節ベース部材14の中央部には、誘電体板21に静電吸着された板状試料Wを脱着するために、板状試料Wを図中下方から押圧する押圧部材(図示略)を挿通させるための貫通孔26が形成されている。
On the other hand, the temperature
And in the center part of these base |
また、絶縁部材22及び温度調節ベース部材14の中央部近傍には、電極挿入孔27が形成され、この電極挿入孔27には内部電極23に電圧を印加するための取り出し電極28が装填されている。この取り出し電極28の上端部は内部電極23に電気的に接続されている。
Further, an
また、誘電体板21、絶縁部材22、内部電極23及び温度調整ベース部材14には、これらを貫通する冷却ガス導入孔29が形成され、この冷却ガス導入孔29により絶縁部材21と板状試料Wの下面との隙間にHe等の冷却ガスが供給されるようになっている。
The
上記の誘電体板21の上面21aには、その周縁部を除き、この上面21aに沿う断面が略円形状の円柱状の突起部31が複数個設けられ、これらの突起部31各々の頂面31aには、この頂面31aに沿う断面が略円形状の円柱状の微小突起部32が複数個設けられ、これらの微小突起部32各々の頂面32aは、頂面31a、すなわち上面21aに平行とされている。
The
また、この上面21aの周縁部には、He等の冷却ガスが漏れないように、この周縁部に沿って連続し、かつ突起部31と微小突起部32との合計高さと同じ高さの壁部33が、この上面21aの周縁部を一巡する様に形成されている。
この静電チャック装置では、微小突起部32各々の頂面32a上に板状試料Wを載置し、内部電極23に所定の電圧を印加することにより、静電気力を利用して板状試料Wを吸着固定することが可能な構造となっている。
上記の突起部31の上面21aに沿う断面積は8×10−3mm2以上かつ8×10−1mm2以下が好ましく、より好ましくは2×10−2mm2以上かつ4×10−1mm2以下である。
In addition, a wall having a height equal to the total height of the
In this electrostatic chuck device, the plate-like sample W is placed on the
The cross-sectional area along the
ここで、突起部31の上面21aに沿う断面積を上記の様に限定した理由は、断面積が8×10−3mm2未満であると、微小突起部32、32…が突起部31の上面21aの周縁部に形成される(掛かる)割合が増加し、微小突起部32、32…が磨耗し易くなり、パーティクル発生の原因となるからであり、一方、この断面積が8×10−1mm2を越えると、板状試料Wに突起部31の形状に呼応した温度差分布が形成され、板状試料Wの温度分布の面内均一性が保持できなくなり、その結果、板状試料Wの特性分布が大きくなるからである。
Here, the reason why the cross-sectional area along the
また、微小突起部32の上面21aに沿う断面積は2×10−5mm2以上かつ2×10−3mm2以下が好ましく、より好ましくは8×10−5mm2以上かつ4×10−4mm2以下である。
Further, the cross-sectional area along the
ここで、微小突起部32の上面21aに沿う断面積を上記の様に限定した理由は、断面積が2×10−5mm2未満であると、ウエハレスドライクリーニングを施した場合に、処理時間が増大するに伴い、プラズマに曝されて主として微小突起部32の側面部がエッチングされることにより、微小突起部32の板状試料Wに対向する面の表面状態が経時的に大きく変化し、静電チャック装置の熱特性が変動するからであり、一方、この断面積が2×10−3mm2を越えると、この微小突起部32、32間に形成される平坦部35との間に熱伝導性に差異が生じるために板状試料Wに局所的な温度差が生じ、また、微小突起部32上に付着したパーティクルが上記の平坦部35に落下できず、微小突起部32の頂面32aと板状試料Wとの間にパーティクルが介在することとなり、板状試料Wと微小突起部32との間の熱伝導特性が変化するからである。
Here, the reason why the cross-sectional area along the
これにより、誘電体板21の静電吸着面がウエハレスドライクリーニング中、直接プラズマに曝されてウエハドライクリーニングの累積時間が増加しても、微小突起部32の表面状態における表面粗さの変動が軽微であり、もって、板状試料Wとの間の熱伝導特性が変化することはなく、板状試料Wごとに均一な処理を施すことができる。また、パーティクルの発生も少なく、静電吸着力の変動や電圧印加中止後の離脱性の変化もない。したがって、ウエハレスドライクリーニングを繰り返し行っても何らの支障はない。
Thereby, even if the electrostatic adsorption surface of the
微小突起部32の、突起部31の頂面31aからの高さは、1μm以上かつ10μm以下が好ましく、より好ましく1μm以上かつ5μm以下である。
微小突起部32の高さが1μm未満であると、微小突起部32、32、…の頂面32a、32a、…に付着したパーティクルが微小突起部32、32間に形成される平坦部35、35、…に落下できず、また平坦部35、35、…内のパーティクルも容易に微小突起部32、32、…の頂面32a、32a、…に移動し易くなるために、板状試料Wの裏面にパーティクルが付着し易くなり、また、パーティクルが付着したときの熱伝導率の変化が大きくなってしまうからであり、一方、高さが10μmを超えると、パーティクルの付着防止効果や熱伝導率変化の防止効果が望めず、吸着力が低下し、微小突起部32、32、…の加工時に形状崩れ等が生じ易くなり、加工コストの増加をもたらすからである。
The height of the
When the height of the
突起部31における微小突起部32、32、…の上面21aに沿う面積の合計は、突起部31の頂面31aの面積の1%以上かつ40%以下であることが好ましい。
ここで、微小突起部32の面積の合計を1%以上としたのは、必要な静電吸着力を確保するためであり、また、この面積の合計を40%以下としたのは、静電吸着面に存在するパーティクルを付着させ難くし、しかも電圧印加中止後の板状試料Wの脱離性を確保するためである。
It is preferable that the total area along the
Here, the reason why the total area of the
この微小突起部32は、図4に示すように、中央部の平坦な頂面32aと、外周部のR形状の曲面部32bとからなるもので、頂面32aのRa(中心線平均粗さ)は0.01μm〜0.3μmが好ましく、より好ましくは0.01μm〜0.1μmであり、また、曲面部32bの曲率(R)は0.5μm〜5μmが好ましく、より好ましくは1μm〜2μmである。
As shown in FIG. 4, the
この微小突起部32では、頂面32aのRaを0.01μm〜0.3μmとしたことにより、板状試料Wとの接触によって板状試料Wが損傷することを防止すると共に、板状試料Wのズレによる突起部31の頂面31aの表面粗さの変化を抑制し、板状試料Wの載置面である微小突起部32の頂面32aと板状試料Wとの間の熱伝導性の変化を防止することができる。また、曲面部32bの曲率(R)を0.5μm〜5μmとしたことにより、微小突起部32、32…の外周部の欠け、板状試料Wとの接触による板状試料Wの損傷、パーティクルの発生等を抑制することができる。
In this
また、突起部31、31…の頂面31aの合計面積の吸着領域の全面積(誘電体板21の表面の面積から壁部33の面積を除いた面積)に対する比は0.5〜30%、好ましくは5〜15%の範囲とされている。この面積比を0.5%以上とするのは必要な静電吸着力を確保するためであり、30%以下とするのは静電吸着面に存在するパーティクルを付着させ難くし、しかも電圧印加中止後の板状試料Wの脱離性を確保するためである。
Further, the ratio of the total area of the
また、突起部31、31に挟まれる平坦部36の深さHは10μm〜50μmが好ましく、より好ましくは30μm〜45μmである。
平坦部36の深さHが10μm未満であると、板状試料Wが平坦部36の底面に接触する可能性があり、一方、平坦部36の深さHが50μmを超えると、吸着力の低下の原因となるので好ましくない。
また、Heガス等の冷却ガスによる冷却効果を考慮すると、平坦部36の深さHを特に30μm〜45μmとすることにより、冷却ガス圧の均一化が達成されて板状試料Wの面内温度が均一となるので好ましい。
Further, the depth H of the
If the depth H of the
Further, in consideration of the cooling effect by the cooling gas such as He gas, by making the depth H of the
誘電体板21、突起部31及び微小突起部32は、ともに、セラミックスからなるものである。
このセラミックスとしては、窒化アルミニウム、酸化アルミニウム、窒化珪素、酸化ジルコニウム、サイアロン、窒化ホウ素、炭化珪素から選択された1種からなるセラミックス、あるいは2種以上を含む複合セラミックスが好ましい。
The
As this ceramic, a ceramic made of one selected from aluminum nitride, aluminum oxide, silicon nitride, zirconium oxide, sialon, boron nitride and silicon carbide, or a composite ceramic containing two or more kinds is preferable.
また、これらを構成する材料は、単一であっても混合物であってもよいが、熱膨張係数が可能な限り内部電極23の熱膨張係数に近似したもので、しかも焼結し易いものが好ましい。また、誘電体板21の上面21a側は静電吸着面となるから、特に誘電率が高い材質であって、静電吸着する板状試料Wに対して不純物とならないものを選択することが好ましい。
以上のことを考慮すれば、誘電体板21、突起部31及び微小突起部32は、実質的に1重量%〜12重量%の炭化珪素を含み、残部を酸化アルミニウムとする炭化珪素−酸化アルミニウム複合焼結体が好ましい。
Further, the material constituting these may be a single material or a mixture, but the one having a thermal expansion coefficient that is as close as possible to that of the
In consideration of the above, the
この炭化珪素−酸化アルミニウム複合焼結体は、室温(25℃)における体積固有抵抗値が1×108Ω・cm〜1×1015Ω・cm程度であるから、静電チャックの絶縁部材(誘電体板)として好適であり、しかも、耐プラズマ性も向上したものとなっている。 Since this silicon carbide-aluminum oxide composite sintered body has a volume resistivity value of about 1 × 10 8 Ω · cm to 1 × 10 15 Ω · cm at room temperature (25 ° C.), an insulating member ( It is suitable as a dielectric plate) and has improved plasma resistance.
ここで、この炭化珪素−酸化アルミニウム複合焼結体における炭化珪素の含有量が1重量%未満であると、誘電体板21に含有される酸化アルミニウム粒子の平均粒子径が2μmより大きくなり、よって、プラズマエッチングされ易くなるからであり、一方、12重量%を越えると、誘電体板21の体積固有抵抗値が1×108Ω・cmより小さくなり、静電チャックとして好ましい体積固有抵抗値とならないからである。
この複合焼結体においては、少量の不純物は許容される。しかしながら、アルミニウム(Al)、珪素(Si)以外の金属不純物が0.1重量%を越えると、ウエハ等の板状試料を汚染する可能性が高くなるとともに、電気抵抗の温度依存性が大きくなるので好ましくない。
Here, when the content of silicon carbide in the silicon carbide-aluminum oxide composite sintered body is less than 1% by weight, the average particle diameter of the aluminum oxide particles contained in the
In this composite sintered body, a small amount of impurities is allowed. However, if the amount of metal impurities other than aluminum (Al) and silicon (Si) exceeds 0.1% by weight, there is a high possibility that a plate-like sample such as a wafer will be contaminated, and the temperature dependence of electrical resistance will increase. Therefore, it is not preferable.
また、この炭化珪素−酸化アルミニウム複合焼結体における炭化珪素粒子の平均粒子径は0.2μm以下が好ましい。
炭化珪素粒子の平均粒子径が0.2μmを超えると、プラズマ照射時の電場が炭化珪素−酸化アルミニウム複合焼結体中の炭化珪素粒子の部分に集中し、炭化珪素粒子の周辺が損傷を受け易くなるからである。
Moreover, the average particle diameter of the silicon carbide particles in this silicon carbide-aluminum oxide composite sintered body is preferably 0.2 μm or less.
If the average particle diameter of the silicon carbide particles exceeds 0.2 μm, the electric field during plasma irradiation concentrates on the silicon carbide particles in the silicon carbide-aluminum oxide composite sintered body, and the periphery of the silicon carbide particles is damaged. It is because it becomes easy.
また、この炭化珪素−酸化アルミニウム複合焼結体における酸化アルミニウム粒子の平均粒子径は2μm以下が好ましい。
酸化アルミニウム粒子の平均粒子径が2μmを超えると、炭化珪素−酸化アルミニウム複合焼結体がプラズマエッチングされ、スパッタ痕が形成され易くなり、表面粗さが粗くなるからである。
The average particle diameter of the aluminum oxide particles in the silicon carbide-aluminum oxide composite sintered body is preferably 2 μm or less.
This is because when the average particle diameter of the aluminum oxide particles exceeds 2 μm, the silicon carbide-aluminum oxide composite sintered body is plasma-etched, and sputtering marks are easily formed, resulting in a rough surface roughness.
なお、誘電体板21、突起部31及び微小突起部32が共に、1重量%〜12重量%の炭化珪素を含み、残部を酸化アルミニウムとする炭化珪素−酸化アルミニウム複合焼結体により構成されている必要はなく、少なくとも突起部31及び微小突起部32のみが1重量%〜12重量%の炭化珪素を含む炭化珪素−酸化アルミニウム複合焼結体により構成されていてもよい。
The
また、絶縁部材22は、誘電体板21と異なる構造を有する絶縁部材からなっていても良いが、誘電体板21と同じ構造を有する複合焼結体からなっていることが望ましい。誘電体板21と同じ構造を有する複合焼結体であれば、ハロゲンガスやプラズマに対する耐食性に優れ、高い強度及び硬度を有し、耐熱性、耐熱衝撃性に優れたものにすることができるとともに、静電チャックの製造工程を簡略化することができるので望ましい。
The insulating
次に、本実施形態の静電チャック装置の製造方法について説明する。
ここでは、誘電体板21、絶縁部材22,突起部31及び微小突起部32を、実質的に1重量%〜12重量%の炭化珪素を含む炭化珪素−酸化アルミニウム複合焼結体を用いて製造する場合を例にとり説明する。
用いる炭化珪素粒子の原料粉末としては、平均粒子径が0.1μm以下の炭化珪素粉末を用いることが好ましい。
Next, a method for manufacturing the electrostatic chuck device of this embodiment will be described.
Here, the
As the raw material powder for the silicon carbide particles to be used, it is preferable to use silicon carbide powder having an average particle size of 0.1 μm or less.
その理由は、炭化珪素粉末の平均粒子径が0.1μmを越えると、得られた炭化珪素−酸化アルミニウム複合焼結体は、炭化珪素粒子の平均粒子径が0.2μmを超えることとなり、誘電体板21及び絶縁部材22の強度向上の効果が小さくなるからである。
また、この炭化珪素−酸化アルミニウム複合焼結体からなる誘電体板21は、プラズマに曝されたときに電場が炭化珪素粒子の部分に集中して大きな損傷を受け易くなり、プラズマ耐性が低く、プラズマ損傷後の静電吸着力が低下する虞があるからである。
The reason is that when the average particle diameter of the silicon carbide powder exceeds 0.1 μm, the obtained silicon carbide-aluminum oxide composite sintered body has an average particle diameter of the silicon carbide particles exceeding 0.2 μm. This is because the effect of improving the strength of the
In addition, the
この炭化珪素粉末としては、プラズマCVD法により得られた粉末が好ましく、特に、非酸化性雰囲気のプラズマ中に、シラン化合物またはハロゲン化珪素と炭化水素の原料ガスを導入し、反応系の圧力を1×105Pa(1気圧)未満から1.33×10Pa(0.1Torr)の範囲で制御しつつ気相反応させることにより得られた平均粒子径が0.1μm以下の超微粉末が、焼結性に優れ、高純度であり、粒子形状が球状であるために成形時の分散性が良好であるので、好ましい。 The silicon carbide powder is preferably a powder obtained by a plasma CVD method, and in particular, a silane compound or silicon halide and hydrocarbon source gas is introduced into the plasma in a non-oxidizing atmosphere, and the pressure of the reaction system is increased. An ultrafine powder having an average particle size of 0.1 μm or less obtained by performing a gas phase reaction while controlling in a range of less than 1 × 10 5 Pa (1 atm) to 1.33 × 10 Pa (0.1 Torr), The sinterability is excellent, the purity is high, and the particle shape is spherical, so that the dispersibility during molding is good, which is preferable.
一方、酸化アルミニウム粒子の原料粉末としては、平均粒子径が1μm以下の酸化アルミニウム粉末を用いることが好ましい。
その理由は、平均粒子径が1μmを越える酸化アルミニウム粉末を用いて得られた炭化珪素−酸化アルミニウム複合焼結体においては、複合焼結体中の酸化アルミニウム粒子の平均粒子径が2μmを越えるために、誘電体板21の板状試料を載置する側の上面21aがプラズマによりエッチングされ易くなるために、スパッタ痕が形成されることとなり、この上面21aの表面粗さが粗くなり、静電チャック装置11の静電吸着力が低下する虞があるからである。
なお、使用する酸化アルミニウム粉末としては、平均粒子径が1μm以下のものであれば特段限定されず、高純度のものであればよい。
On the other hand, it is preferable to use an aluminum oxide powder having an average particle diameter of 1 μm or less as a raw material powder for aluminum oxide particles.
The reason is that in the silicon carbide-aluminum oxide composite sintered body obtained by using the aluminum oxide powder having an average particle diameter exceeding 1 μm, the average particle diameter of the aluminum oxide particles in the composite sintered body exceeds 2 μm. In addition, since the
The aluminum oxide powder to be used is not particularly limited as long as the average particle diameter is 1 μm or less, and it may be high-purity.
次いで、上記の炭化珪素粉末と酸化アルミニウム粉末とを、炭化珪素粉末が1〜12重量%、残部が酸化アルミニウム粉末となるように秤量、混合する。
次いで、得られた混合粉を、金型を用いて所定形状に成形し、その後、得られた成形体を、例えば、ホットプレス(HP)を用いて、加圧しながら焼成し、炭化珪素−酸化アルミニウム複合焼結体を得る。
Next, the silicon carbide powder and the aluminum oxide powder are weighed and mixed so that the silicon carbide powder is 1 to 12% by weight and the balance is the aluminum oxide powder.
Next, the obtained mixed powder is molded into a predetermined shape using a mold, and then the obtained molded body is fired while being pressed using, for example, a hot press (HP), and silicon carbide-oxidized An aluminum composite sintered body is obtained.
ホットプレス(HP)の条件としては、加圧力は、特に制限されるものではないが、炭化珪素−酸化アルミニウム複合焼結体を得る場合には、例えば、5〜40MPaが好ましい。加圧力が5MPaを下回ると、充分な焼結密度の複合焼結体が得られず、一方、加圧力が40MPaを超えると、黒鉛等からなる治具が変形損耗するからである。 As the conditions for hot pressing (HP), the pressure is not particularly limited, but when obtaining a silicon carbide-aluminum oxide composite sintered body, for example, 5-40 MPa is preferable. This is because if the applied pressure is less than 5 MPa, a composite sintered body having a sufficient sintered density cannot be obtained, while if the applied pressure exceeds 40 MPa, a jig made of graphite or the like is deformed and worn.
また、焼成する際の温度としては、1650〜1850℃が好ましい。焼成温度が1650℃未満であると、充分緻密な炭化珪素−酸化アルミニウム複合焼結体を得ることができず、一方、1850℃を超えると、焼成過程にて焼結体の分解や粒成長が生じ易くなるからである。
また、焼成時の雰囲気としては、アルゴン雰囲気、窒素雰囲気等の不活性雰囲気が炭化珪素の酸化を防止するので好ましい。
Moreover, as a temperature at the time of baking, 1650-1850 degreeC is preferable. When the firing temperature is less than 1650 ° C., a sufficiently dense silicon carbide-aluminum oxide composite sintered body cannot be obtained. On the other hand, when the firing temperature exceeds 1850 ° C., decomposition and grain growth of the sintered body occur during the firing process. This is because it tends to occur.
Further, as the atmosphere during firing, an inert atmosphere such as an argon atmosphere or a nitrogen atmosphere is preferable because it prevents oxidation of silicon carbide.
この様にして得られた2枚の炭化珪素−酸化アルミニウム複合焼結体のうち、一方の複合焼結体の所定位置に電極挿入孔27を機械加工により形成し、絶縁部材22とする。
また、この絶縁部材22の内部電極を形成する領域内に、導電性フィラーを含むペーストを塗布して導電層を形成し、この導電層を形成した領域の外側の領域に、絶縁性フィラーを含むペーストを塗布し、絶縁層を形成する。
一方、上記の2枚の複合焼結体のうち、他方の複合焼結体の表面(板状試料の載置面となる面)をRa(中心線平均粗さ)が0.3μm以下となるように研磨して平坦面とし、誘電体板21とする。
Of the two silicon carbide-aluminum oxide composite sintered bodies obtained in this manner, an
Also, a conductive layer is formed by applying a paste containing a conductive filler in the region where the internal electrode of the insulating
On the other hand, Ra (center line average roughness) is 0.3 μm or less on the surface of the other composite sintered body (the surface on which the plate-like sample is placed) of the two composite sintered bodies. The
次いで、電極挿入孔27に取り出し電極28を挿入し、この絶縁部材22の導電層及び絶縁層が形成されている面と、誘電体板21の研磨されていない面とを対向して重ね合わせ、次いで、これら誘電体板21及び絶縁部材22を、例えば、1600℃以上に加熱しながら加圧し、上記の導電層により内部電極23を形成するとともに、絶縁層により接合層となる絶縁部材24を形成し、誘電体板21及び絶縁部材22を内部電極23及び絶縁部材24を介して接合する。
突起部31,微小突起部32及び壁部33は、例えば、砥石加工、レーザ彫刻等の機械的加工、あるいはブラスト加工を用いて形成することができる。
Next, the take-out
The
以下、ブラスト加工法を用いて製造する方法について、図5に基づき説明する。
まず、図5(a)に示すように、炭化珪素−酸化アルミニウム複合焼結体41の板状試料の載置面となる平坦な面を再研磨し、Ra(中心線平均粗さ)が、例えば、0.01〜0.3μmの表面41aとし、この表面41aを脱脂・洗浄する。
洗浄は、例えば、アセトン、メタノール、エタノール、2−プロパノール等の有機溶剤を用い、脱脂を行う。その後、温水等にて洗浄を行う。
Hereinafter, the manufacturing method using the blast processing method will be described with reference to FIG.
First, as shown in FIG. 5A, a flat surface serving as a mounting surface for the plate-like sample of the silicon carbide-aluminum oxide composite sintered
For cleaning, for example, degreasing is performed using an organic solvent such as acetone, methanol, ethanol, or 2-propanol. Thereafter, washing is performed with warm water or the like.
洗浄後、この表面41a上に、所定のパターンを有するマスク42を載置する。このマスク42のパターンは、図1〜図3に示す突起部31のパターンと同一形状とする。このマスク42としては、紫外線や可視光に感光する感光性樹脂(レジスト)やメタルマスク等の板状マスクが用いられる。
After cleaning, a
次いで、このマスク42を用いて複合焼結体41の表面41aにブラスト加工を施す。これにより、図5(b)に示すように、マスク42によって覆われている部分が研削されずに残って突起部31となり、マスク42によって覆われている部分が研削されて平坦部36となる。
このブラスト加工に使用される粒子としては、アルミナ、炭化珪素、ガラスビーズ等が好適に用いられる。これらの粒径としては、粒度分布における累積百分率が50%(D50)で8.5μm〜60μm程度が好ましい。
Next, blasting is performed on the
As particles used for the blasting, alumina, silicon carbide, glass beads, or the like is preferably used. As these particle sizes, the cumulative percentage in the particle size distribution is preferably about 8.5 μm to 60 μm at 50% (D50).
次いで、図5(c)に示すように、マスク42を除去する。この際、マスク42が感光性樹脂からなる場合には、塩化メチレン等の剥離液を用いる。
これにより、炭化珪素−酸化アルミニウム複合焼結体41の表面41aに、突起部31及び平坦部36が同時に形成される。
Next, as shown in FIG. 5C, the
Thereby, the
次いで、図5(d)に示すように、突起部31、31、…それぞれの頂面31aにマスク43を設ける。このマスク43のパターンは、微小突起部32のパターンと同一形状とする。
このマスク43としては、紫外線や可視光に感光する感光性樹脂(レジスト)やメタルマスク等の板状マスクが用いられる。
Next, as shown in FIG. 5D, a
As the
次いで、このマスク43を用いて突起部31、31、…それぞれの頂面31aにブラスト加工を施す。これにより、図5(e)に示すように、マスク43によって覆われている部分が研削されずに残って微小突起部32となり、マスク43によって覆われている部分が研削されて平坦部35となる。
この際、平坦部36がブラスト加工により研削されないように、この平坦部36を耐ブラスト性の高い有機高分子(レジスト)等で覆っておくのが望ましい。
このブラスト加工に使用される粒子の粒径としては、粒度分布における累積百分率が50%(D50)で6μm〜17μm程度が好ましい。
Next, using this
At this time, it is desirable to cover the
The particle size of the particles used for the blasting is preferably about 6 μm to 17 μm with a cumulative percentage in the particle size distribution of 50% (D50).
次いで、突起部31、31、…及び微小突起部32、32、…が形成された複合焼結体41の脱脂を行う。この脱脂は、アセトン、メタノール、エタノール、2−プロパノール等の有機溶剤を用いて行う。その後、温水等にて洗浄を行う。
これにより、表面に突起部31、31、…及び微小突起部32、32、…が形成される。
その後、基体12の下面側にシリコン樹脂系接着剤13を介して温度調節ベース部材14を接着一体化することにより、本実施形態の静電チャック装置を得る。
Next, the composite
As a result, the
Thereafter, the temperature
以上説明したように、本実施形態の静電チャック装置によれば、基体12を構成する誘電体板21の上面21aに突起部31を複数個設け、これらの突起部31各々の頂面31aに微小突起部32を複数個設けたので、板状試料Wを繰り返し載置した場合においても、また、ウエハレスドライクリーニング処理時間が増大した場合においても、誘電体板21と板状試料Wとの間の熱伝導特性の経時的変動を抑えることができ、また、パーティクルの発生を抑制することができ、板状試料Wの裏面へのパーティクルの付着を防止することができる。
さらに、微小突起部32、32、…各々の頂面32aにより板状試料Wを支持する構成であるから、静電吸着力が変動したり、電圧印加中止後の離脱性が変化する等の虞もない。
As described above, according to the electrostatic chuck device of the present embodiment, a plurality of
Further, since the plate-like sample W is supported by the
[第2の実施形態]
図6は、本発明の第2の実施形態の静電チャック装置の周縁部近傍を示す断面図、図7は、同静電チャック装置の周縁部近傍を示す平面図であり、この静電チャック装置51が第1の実施形態の静電チャック装置11と異なる点は、壁部33の頂面33aの内周側に、その周方向に沿う断面矩形状の段差部52を形成し、残った環状の壁部33B上の頂面を板状試料Wを載置する載置面とし,これら段差部52及び壁部33BによりHe等の冷却ガスをシールするように構成した点である。
残った壁部33Bの幅は10μm〜50μm、その高さは1μm〜10μmである。
[Second Embodiment]
FIG. 6 is a sectional view showing the vicinity of the periphery of the electrostatic chuck device according to the second embodiment of the present invention, and FIG. 7 is a plan view showing the vicinity of the periphery of the electrostatic chuck device. The difference between the
The remaining
ここで、壁部33Bの幅が10μm未満であると、ウエハレスドライクリーニングの処理時間数の増加に伴って壁部33Bのコーナ部が消耗し、冷却ガスのシール性が大幅に低下する他、壁部33Bの加工時に形状崩れ等が生じ易く、加工コストの増加をもたらすからであり、一方、壁部33Bの幅が50μmを超えると、パーティクルが壁部33B上に留まり易くなり、冷却ガスのシール性が低下するからである。
Here, if the width of the
この静電チャック装置51にあっては、段差部52が形成されていない場合には、壁部33の頂面33a上にパーティクルが付着すると、冷却ガスのシール性が大幅に低下するが、この壁部33の頂面33aの内周側に段差部52を形成したことにより、壁部33の頂面33a上にパーティクルが付着するのを低減することができ、もって、パーティクル付着による冷却ガスのシール性の低下を防止することができる。
In this
[第3の実施形態]
図8は、本発明の第3の実施形態の静電チャック装置の周縁部近傍を示す断面図、図9は、同静電チャック装置の周縁部近傍を示す平面図であり、この静電チャック装置61が第2の実施形態の静電チャック装置51と異なる点は、段差部52上に、微小突起部32を複数個設け、残った環状の壁部33B上の頂面及び微小突起部32の頂面32aを板状試料Wを載置する載置面とし、段差部52及び壁部33BによりHe等の冷却ガスをシールするように構成した点である。
微小突起部32の断面積は8×10−5mm2以上かつ2×10−3mm2以下が好ましい。
[Third Embodiment]
FIG. 8 is a sectional view showing the vicinity of the periphery of the electrostatic chuck device according to the third embodiment of the present invention, and FIG. 9 is a plan view showing the vicinity of the periphery of the electrostatic chuck device. The
The cross-sectional area of the
本実施形態の静電チャック装置61においても、第2の実施形態の静電チャック装置51と全く同様の効果を奏することができる。
特に、段差部52上に微小突起部32を複数個設けたので、パーティクル付着による冷却ガスのシール性の低下を防止することができ他、十分な吸着力を確保することができる。
The
In particular, since a plurality of the
[第4の実施形態]
図10は、本発明の第4の実施形態の静電チャック装置を示す断面図、図11は、同静電チャック装置を示す平面図であり、この静電チャック装置71が第2の実施形態の静電チャック装置51と異なる点は、段差部52上に、この段差部52の周方向に沿って連続しかつ壁部33Bと同心円状の壁部33Cを形成し,環状の壁部33B,33C上の頂面及び微小突起部32の頂面32aを板状試料Wを載置する載置面とし、段差部52及び壁部33B、33CによりHe等の冷却ガスをシールするように構成した点である。
[Fourth Embodiment]
FIG. 10 is a cross-sectional view showing an electrostatic chuck device according to a fourth embodiment of the present invention. FIG. 11 is a plan view showing the electrostatic chuck device. The
この壁部33Cの段差部52からの高さは、1μm以上かつ10μm以下であり、この壁部33Cの頂面の幅は、10μm以上かつ50μm以下であることが好ましい。また、この壁部33Cの断面積は8×10−5mm2以上かつ2×10−3mm2以下が好ましい。
The height of the
本実施形態の静電チャック装置71においても、第2の実施形態の静電チャック装置51と全く同様の効果を奏することができる。
特に、段差部52上に、この段差部52の周方向に沿って連続しかつ壁部33Bと同心円状の壁部33Cを形成したので、パーティクル付着による冷却ガスのシール性の低下をより一層防止することができ他、十分な吸着力を確保することができる。
The
In particular, since the
以下、実施例及び比較例を挙げ、本発明をさらに詳しく説明する。ここでは、第4の実施形態に係る静電チャック装置、すなわち図10に示す静電チャック装置71を作製した。
Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples. Here, the electrostatic chuck device according to the fourth embodiment, that is, the
「実施例1」
(静電チャック装置の作製)
平均粒子径0.06μmの炭化珪素超微粒子をプラズマCVD法により気相合成し、この炭化珪素超微粒子と、平均粒子径0.15μmの酸化アルミニウム粉末とを、炭化珪素超微粒子/酸化アルミニウム粉末が重量比で9/91となるように秤量し、均一に混合した。
この混合粉末を粉末成形機を用いて円板状に成形し、次いで、ホットプレス(HP)を用いて、アルゴン雰囲気中、1800℃の温度で4時間、加圧しながら焼成し、直径298mm、厚み4mmの円板状の複合焼結体を2枚作製した。加圧力は40MPaとした。
"Example 1"
(Production of electrostatic chuck device)
Silicon carbide ultrafine particles with an average particle size of 0.06 μm are synthesized in a gas phase by a plasma CVD method. The silicon carbide ultrafine particles and the aluminum oxide powder with an average particle size of 0.15 μm are combined into silicon carbide ultrafine particles / aluminum oxide powder. They were weighed so as to have a weight ratio of 9/91 and mixed uniformly.
This mixed powder was formed into a disk shape using a powder molding machine, and then fired for 4 hours at a temperature of 1800 ° C. in an argon atmosphere using a hot press (HP), with a diameter of 298 mm and a thickness of Two 4 mm disk-shaped composite sintered bodies were produced. The applied pressure was 40 MPa.
得られた複合焼結体の炭化珪素粒子、酸化アルミニウム粒子それぞれの平均粒子径を走査電子顕微鏡(SEM)を用いて測定したところ、それぞれ0.07μm、1.4μmであった。また、この複合焼結体の体積固有抵抗値を、静電チャック装置の使用温度である20℃にて測定したところ、2×1011Ω・cmであった。 When the average particle diameter of each of the silicon carbide particles and aluminum oxide particles of the obtained composite sintered body was measured using a scanning electron microscope (SEM), they were 0.07 μm and 1.4 μm, respectively. Further, the volume resistivity value of the composite sintered body was measured at 20 ° C., which is the operating temperature of the electrostatic chuck device, and found to be 2 × 10 11 Ω · cm.
次いで、この2枚の複合焼結体のうち、一方の複合焼結体の中心より100mm離れた位置に内径5mmの電極挿入孔27を機械加工により形成し、絶縁部材22とした。
また、この絶縁部材22の内部電極を形成する領域内(中心から半径145mm内の領域)に、スクリーン印刷法により導電性ペースト(導電性フィラーを含むペースト)を塗布し、導電層を形成した。
導電性ペーストとしては、炭化タンタル粉末と酸化アルミニウム粉末とを、炭化タンタル粉末/酸化アルミニウム粉末が体積比で35/65となるよう秤量し、有機溶剤等を加えて混練したものを用いた。
Next, an
In addition, a conductive paste (a paste containing a conductive filler) was applied by screen printing to a region (region having a radius of 145 mm from the center) in which the internal electrode of the insulating
As the conductive paste, a tantalum carbide powder and an aluminum oxide powder were weighed so that the volume ratio of tantalum carbide powder / aluminum oxide powder was 35/65, and an organic solvent or the like was added and kneaded.
また、この絶縁部材22の導電層を形成した領域の外側の領域(中心から半径145〜149mmの領域)に、スクリーン印刷法により酸化アルミニウム粉末を含むペーストを塗布し、絶縁層を形成した。
一方、上記の2枚の複合焼結体のうち、他方の複合焼結体の表面(板状試料の載置面となる面)をRa(中心線平均粗さ)が0.3μmとなるように研磨して平坦面とし、誘電体板21とした。
In addition, a paste containing aluminum oxide powder was applied by screen printing to a region outside the region where the conductive layer of the insulating
On the other hand, Ra (center line average roughness) of the surface of the other composite sintered body (surface on which the plate-like sample is placed) of the two composite sintered bodies is 0.3 μm. A
次いで、上記の電極挿入孔27に炭化タンタルからなる取り出し電極28を挿入し、この絶縁部材22の導電層及び絶縁層が形成されている面と、誘電体板21の研磨されていない面とを、対向して重ね合わせ、次いで、これら誘電体板21及び絶縁部材22を、1700℃に加熱しながら7.5MPaに加圧し、導電層により内部電極23を形成するとともに、絶縁層により接合層となる絶縁部材24を形成し、誘電体板21及び絶縁部材22を内部電極23及び絶縁部材24を介して接合した。
Next, an
次いで、誘電体板21の平坦面(板状試料の載置面となる面)を、Ra(中心線平均粗さ)が0.05μmとなるように研磨し、その後、ブラスト加工により、壁部33、33B、33Cと、断面積が0.2mm2の円柱状の突起部31、31…と、断面積が7×10−4mm2の円柱状の微小突起部32、32…とを形成した。
Next, the flat surface of the dielectric plate 21 (surface on which the plate-like sample is placed) is polished so that Ra (center line average roughness) is 0.05 μm, and then the wall portion is formed by blasting. forming 33,33B, and 33C, a
ここでは、突起部31の頂面31aの合計面積の吸着領域の全面積に対する比を1%、1つの突起部31の頂面31aにおける微小突起部32、32、…の合計面積の突起部31の頂面31aに対する面積比を30%とした。
また、平坦部36からの壁部33B、33Cの頂面までの高さh1を30μm、平坦部36からの突起部31の高さh2を25μm、突起部31の頂面31aからの微小突起部32の高さh3を5μmとした。また、壁部33B、33Cの幅を、共に25μmとした。
Here, the ratio of the total area of the
Further, the height h1 from the
以上のようにして製造された基体12の下部に、内部に冷却用媒体を循環させる流路25が形成された金属製の温度調整ベース部材14をシリコーン系接着剤13にて接着一体化し、静電チャック装置を得た。
A metallic temperature
(静電チャック装置の特性評価)
この静電チャック装置をプラズマCVD装置に搭載し、静電チャック装置の板状試料載置面に直径30cm(12インチ)のシリコンウエハーを、直流1000Vの印加電圧で吸着固定しつつ、シランガスと酸素ガスとの混合ガス(シラン:20v/v%、酸素:80v/v%)を用いて発生させたプラズマ雰囲気下にて、静電チャック装置の板状試料載置面と板状試料との間にHeガスを圧力1.33×103Pa(10torr)にて流しつつ、また、温度調整ベース部材14の流路25に20℃の冷却水を流しつつ、シリコンウエハー上にSiO2膜を成膜し、処理枚数:1枚、100枚、1000枚毎に平均膜厚を測定した。
(Characteristic evaluation of electrostatic chuck device)
This electrostatic chuck apparatus is mounted on a plasma CVD apparatus, and a silicon wafer having a diameter of 30 cm (12 inches) is adsorbed and fixed to a plate-like sample mounting surface of the electrostatic chuck apparatus with a DC 1000 V applied voltage, while silane gas and oxygen Between the plate-like sample mounting surface of the electrostatic chuck device and the plate-like sample in a plasma atmosphere generated using a gas mixture with the gas (silane: 20 v / v%, oxygen: 80 v / v%) A SiO 2 film is formed on the silicon wafer while flowing He gas at a pressure of 1.33 × 10 3 Pa (10 torr) and flowing cooling water at 20 ° C. through the
また、このときのシリコンウエハーの温度を測定するとともに、成膜処理後のシリコンウエハー裏面のパーティクル付着量を測定した。また、Heリーク試験は、別途、シリコンウエハーを直流1000Vの印加電圧で吸着固定し、冷却ガス導入孔29より4.00×103Pa(30torr)のガス圧力にてHeを導入し、そのリーク量を測定した。得られた結果を表1に示す。
In addition, the temperature of the silicon wafer at this time was measured, and the amount of adhered particles on the back surface of the silicon wafer after the film formation process was measured. In the He leak test, a silicon wafer was separately adsorbed and fixed at an applied voltage of 1000 V DC, and He was introduced from the cooling
また、プラズマ処理装置のチャンバー内に、フロン:50v/v%、酸素:50v/v%の混合ガスを1.33×10−1Pa(0.01torr)にて導入し、発生させたプラズマ雰囲気下にて、上部出力1kW、下部バイアス出力0.5kWの条件下、ウエハレスドライクリーニング(WLDC)処理を行った。
ウエハレスドライクリーニング(WLDC)処理の累積時間が1時間、50時間、200時間を経過する毎に、それぞれ上記と同様にして、SiO2膜の膜厚、シリコンウエハーの温度、パーティクル数、Heリーク量を測定した。得られた結果を表2に示す。
Further, a plasma atmosphere generated by introducing a mixed gas of Freon: 50 v / v% and oxygen: 50 v / v% at 1.33 × 10 −1 Pa (0.01 torr) into the chamber of the plasma processing apparatus. Below, a waferless dry cleaning (WLDC) process was performed under conditions of an upper output of 1 kW and a lower bias output of 0.5 kW.
Each time the cumulative time of the waferless dry cleaning (WLDC) process passes 1 hour, 50 hours, and 200 hours, the SiO 2 film thickness, the silicon wafer temperature, the number of particles, and the He leak are the same as above. The amount was measured. The obtained results are shown in Table 2.
「実施例2」
実施例1と同様にして静電チャック装置を得た。
ただし、突起部31の頂面31aの合計面積の吸着領域の全面積に対する比を8%、1つの突起部31の頂面31aにおける微小突起部32、32…の合計面積の突起部31の頂面31aに対する面積比を4%とした。
そして、実施例1に準じて、得られた静電チャック装置の各種特性を評価した。得られた結果を表3、表4に示した。
"Example 2"
An electrostatic chuck device was obtained in the same manner as in Example 1.
However, the ratio of the total area of the
And according to Example 1, the various characteristics of the obtained electrostatic chuck apparatus were evaluated. The obtained results are shown in Tables 3 and 4.
「比較例」
実施例1と同様にして静電チャック装置を得た。
ただし、突起部31の頂面31aには微小突起部32、32…を形成せず、この頂面31aに表面粗し加工を施した。表面粗し加工を行った頂面31aの表面粗さRa(中心線平均粗さ)は0.35μmであった。
そして、実施例1に準じて、得られた静電チャック装置の各種特性を評価した。得られた結果を表5、表6に示した。
"Comparative example"
An electrostatic chuck device was obtained in the same manner as in Example 1.
However, the
And according to Example 1, the various characteristics of the obtained electrostatic chuck apparatus were evaluated. The obtained results are shown in Tables 5 and 6.
「評価結果」
上記の評価結果から、次のことが分かった。
実施例1、2では、ウエハー処理枚数が1000枚まで増加した場合においても、SiO2膜の膜厚、ウエハー温度、Heリーク量は変化しないか、変化したとしてもその変化量が小さかった。このことは、静電チャック装置の板状試料載置面が磨耗しても、その影響がないことを示している。また、パーティクル付着量も少なかった。
"Evaluation results"
The following was found from the above evaluation results.
In Examples 1 and 2, even when the number of processed wafers increased to 1000, the film thickness of the SiO 2 film, the wafer temperature, and the He leak amount did not change, or even if they changed, the change amount was small. This indicates that there is no influence even if the plate-like sample mounting surface of the electrostatic chuck device is worn. Also, the amount of particle adhesion was small.
実施例1、2では、ウエハレスドライクリーニングの累積時間が250時間に達した場合であっても、SiO2膜の膜厚、Heリーク量、ウエハー温度の変化も小さい。このことは、静電チャック装置の板状試料載置面がプラズマによる損傷を受けず、例え損傷を受けてもその影響が軽微であることを示している。また、パーティクル付着量も少ない。 In Examples 1 and 2, even when the cumulative time of waferless dry cleaning reaches 250 hours, changes in the thickness of the SiO 2 film, the amount of He leak, and the wafer temperature are small. This indicates that the plate-like sample mounting surface of the electrostatic chuck device is not damaged by plasma, and the influence is slight even if it is damaged. Also, the amount of particle adhesion is small.
比較例では、ウエハー処理枚数が増加するに伴ってSiO2膜の膜厚、ウエハー温度、Heリーク量が大きく変化していた。このことは、静電チャック装置の板状試料載置面が磨耗すると、その影響が大きいことを示している。また、パーティクル付着量も多い。
この比較例では、ウエハレスドライクリーニングの累積時間が増加するに伴って、SiO2膜の膜厚、ウエハー温度、Heリーク量が大きく変化していた。
このことは、静電チャック装置の板状試料載置面がプラズマによる損傷を受け、その影響が大きいことを示している。また、パーティクル付着量も多い。
In the comparative example, as the number of wafers processed increased, the SiO 2 film thickness, wafer temperature, and He leak amount changed greatly. This indicates that the influence is great when the plate-like sample mounting surface of the electrostatic chuck device is worn. Also, the amount of particle adhesion is large.
In this comparative example, as the accumulated time of the waferless dry cleaning increases, the film thickness of the SiO 2 film, the wafer temperature, and the amount of He leak change greatly.
This indicates that the plate-like sample mounting surface of the electrostatic chuck apparatus is damaged by the plasma, and the influence thereof is large. Also, the amount of particle adhesion is large.
以上により、本実施形態の静電チャック装置によれば、多数の微小突起部32が板状試料Wとの接触により磨耗して微小突起部32の頂面32aの表面状態が変動したとしても、その影響は非常に小さいことが分かった。
また、ウエハレスドライクリーニングの累積時間が増加した場合であっても、静電チャック装置の板状試料載置面の表面状態の変動が軽微であり、よって、板状試料Wとの間の熱伝導特性が変化することはなく、板状試料の処理枚数が増加しても、板状試料ごとに均一な処理を施すことができ、パーティクルの付着量も少ない。
As described above, according to the electrostatic chuck device of the present embodiment, even if a large number of
Even when the accumulated time of the waferless dry cleaning is increased, the fluctuation of the surface state of the plate-like sample mounting surface of the electrostatic chuck device is slight, so that the heat with the plate-like sample W can be reduced. The conduction characteristics do not change, and even if the number of processed plate samples increases, uniform processing can be performed for each plate sample, and the amount of adhered particles is small.
11、51、61、71 静電チャック装置
12 基体
13 シリコン樹脂系接着剤
14 温度調節ベース部材
21 誘電体板
21a 上面
21b 下面
22 絶縁部材
23 内部電極
24 絶縁部材
25 流路
26 貫通孔
27 電極挿入孔
28 取り出し電極
29 冷却ガス導入孔
31 突起部
31a 頂面
32 微小突起部
32a 頂面
33、33B、33C 壁部
41 炭化珪素−酸化アルミニウム複合焼結体
41a 表面
42、43 マスク
52 段差部
11, 51, 61, 71
Claims (13)
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