JP2006046605A - Fluid control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid control device of high reliability and durability capable of returning a valve to an initial state without operating an external pump and forming a purge line. <P>SOLUTION: This fluid control device comprises the valve for controlling the flow of fluid. A first flow channel 101, a second flow channel 102, the valve 103 positioned between the first and second flow channels, and having a movable member 105 for blocking the flow by closing the first flow channel when the fluid flows from the second flow channel to the first flow channel, and a heat generating element 104 mounted on the first flow channel to change the valve from the close state to an open state, are provided. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a fluid control device having a valve for controlling the flow of fluid, and particularly in a miniaturized analysis system (μ-TAS: Micro Total Analysis System) that performs chemical analysis or chemical synthesis on a chip. The present invention relates to a fluid control apparatus using a valve for controlling a flow.

  In recent years, with the development of three-dimensional microfabrication technology, attention has been focused on a system that integrates minute flow channels, fluid elements such as pumps and valves, and sensors on a substrate such as glass or silicon, and performs chemical analysis on the substrate. ing. These systems are called miniaturized analysis systems, μ-TAS (Micro Total Analysis System) or Lab on a Chip. A substrate on which a microchannel and a fluid control element are formed on a substrate is called a μTAS chip. By reducing the size of the chemical analysis system, it is possible to reduce the ineffective volume and greatly reduce the amount of the sample. In addition, the analysis time can be shortened and the power consumption of the entire system can be reduced. Furthermore, the low price of the system can be expected by downsizing. Since μ-TAS can reduce the size and cost of the system and significantly reduce the analysis time, it can be applied in the medical field such as home medical care and bedside monitor, and in the bio field such as DNA analysis and proteome analysis. Expected.

  In the above-described μ-TAS, various types of valves have been proposed so far in order to control the flow of fluid in the microchannel. A microvalve formed on a silicon substrate using a micromachining technique has been reported (see Non-Patent Document 1). The microvalve can control the flow of fluid by driving a silicon diaphragm with a piezoelectric actuator.

Further, as shown in FIG. 9, a movable body made of a polymer is movable in a micro channel 902 in which a bypass line 901 is formed so that a fluid can pass only in one direction (the direction from right to left in FIG. 9). There has been reported an example in which a check valve (non-return valve) in which only one direction of flow can pass is formed by forming the member 903 and moving the movable member 903 by the flow of fluid (non-valve) Patent Document 2). In this way, a valve that is not provided with an actuator and operates by the fluid itself is called a passive valve. Since the passive valve does not require an actuator, the fluid can be controlled with a relatively simple structure and has high reliability and durability. Furthermore, there are advantages such as low production costs.
M.M. Esashi, S .; Shoji, and A.A. Nakano, “Normally Closed Microvalve and Micropump Fabricated on a Silicon Wafer,” Sensors and Actuators, Vol. 20, no. 1-2, p. 163-169, 1989 B. J. et al. Kirby and T. J. et al. Shepodd, “Microvalve Architecture for High-Pressure Hydrologic and Electric fluid Control in Microchips,” Micro Total Analystism Systems, 200%. 338-340

However, when the fluid control device is configured using the microvalve described in the prior art, there are the following problems.
The problem of the prior art will be described with reference to FIG. Once the valve is closed as shown in FIG. 9 (b), the valve does not return to the initial state (FIG. 9 (a)) unless fluid is flowed from the right side in the figure or the pressure on the left side in the figure is released. . For this reason, it is necessary to drive an external pump or to provide a purge line. Further, when a fluid system is configured by arranging a plurality of passive valves shown in FIG. 9, it may be difficult to individually return only desired valves to the initial state. Thereby, a fluid system for realizing desired fluid control may not be configured.

An object of the present invention is to provide a fluid control device that can return a valve to an initial state without operating an external pump or providing a purge line, and has high reliability and durability.
Furthermore, the subject of this invention is providing the fluid control system which can return each valve | bulb independently to the initial state.

  The present invention for solving the above-mentioned problems is a fluid control device including a valve for controlling the flow of fluid, and includes a first flow path, a second flow path, and the first flow path. When the fluid flows from the second flow path to the first flow path, the first flow path is closed and closed to shut off the flow. A fluid control apparatus comprising: a valve having a movable member that is configured; and means for bringing the valve from a closed state to an open state in the first flow path.

In addition, the fluid control system of the present invention preferably includes a plurality of fluid control devices.
The fluid in the present invention is a gas or a liquid.

According to the present invention, it is possible to provide a fluid control device capable of returning a valve to an initial state without operating an external pump or providing a purge line.
Furthermore, according to the present invention, it is possible to provide a fluid control system including a plurality of valves and capable of independently returning individual valves to the initial state.

Hereinafter, embodiments of the present invention will be described in detail.
FIG. 1 is a schematic view showing an example of the configuration of a fluid control apparatus according to the present invention. The fluid control device of the present invention includes a first flow path 101, a second flow path 102, a valve portion 103, and a heating element 104 formed in the first flow path 101. The valve unit 103 includes a movable member 105 and a bypass line 106, thereby allowing a flow from the first flow path 101 to the second flow path 102 to pass therethrough and from the second flow path 102 to the first flow path 101. It functions as a one-way valve that shuts off the flow toward. The heating element 103 is electrically connected to an electrode (not shown), and is connected to an external pulse power source via the electrode. Thereby, a pulse voltage can be applied to the heating element 103.

The valve function of the fluid control device of FIG. 1 will be described with reference to FIG.
When a fluid flows from the first flow path 101 to the second flow path 102, the movable member 105 moves in the left direction in the figure by the flow (due to the pressure difference generated by the flow). At this time, the flow can pass through the valve portion 103 by flowing through the bypass line 106 (FIG. 2A).

  On the other hand, when a fluid flows from the second channel 102 to the first channel 101, the movable member 105 moves in the right direction in the figure. At this time, since the movable member 105 closes the entrance of the flow path 101, the flow is interrupted (FIG. 2B).

  A threshold characteristic can be given to the opening and closing of the valve unit 103. That is, when the fluid flows from the second flow path to the first flow path, the movable member 105 does not move and the fluid can pass at a flow rate equal to or lower than a specific threshold flow rate. . When the flow rate is equal to or higher than the threshold value, the movable member 105 moves and blocks the flow by blocking the entrance of the first flow path. This threshold value can be controlled by changing the friction coefficient between the flow path wall surface of the valve portion 103 to which the movable member 105 moves and the movable member. In addition, the desired value is set according to the design of the flow path design such as the shape of the bypass line 106 and the second flow path, the ratio of the cross-sectional area, the cross-sectional area of the valve portion, and the mass, size, and shape of the movable member It is possible.

Next, a method of returning the valve, which is an important aspect of the present invention, from the closed state (FIG. 2B) to the open state (FIG. 2A) will be described with reference to FIG.
In the closed state of FIG. 3 (a), a pulse voltage is applied to the heating element 302 and rapidly heated to a temperature at which film boiling occurs. Thereby, bubbles 301 are generated on the surface of the heating element (FIG. 3B).

Bubbles generated on the surface of the heating element 302 expand rapidly. Due to the expansion force of the bubbles, the movable member 303 moves to the left in the figure (FIGS. 3C to 3D).
Next, the bubble 301 turns into contraction (FIG. 3E). When the bubbles contract, the movable member 303 may move slightly to the right due to the contraction force of the bubbles. However, as the movable member 303 moves to the left as compared with FIG. 3A in the initial state, the bypass line 304 is opened and the flow path cross section becomes wider. It becomes smaller than the displacement at the time of bubble expansion. For this reason, the valve part 305 can return to an open state (FIG.3 (f)).

  As means for applying energy to the fluid in the first flow path and returning the valve to the open state, for example, an actuator using micromachine technology such as an electrostatic actuator or a piezoelectric actuator can be used. In particular, as described in this embodiment, energy is applied without forming a complicated means such as a membrane in the flow path by using a method of generating bubbles by using a thin film heating element. It is possible.

  The means can be used as a recovery means when the valve member 103 is clogged with particles or the like and the movable member 303 cannot be moved. For example, by generating bubbles using the heating element element in a state where particles or the like are clogged, the particles can be removed and the valve function can be recovered.

  FIG. 4 shows an example of a specific configuration of the heating element 103. The heating element 401 is formed on the wall surface of the first flow path 402. The heating element 401 has a configuration in which the upper surface of the thin film resistor 403 is sandwiched between the protective layer 404 and the lower surface is sandwiched between the heat storage layers 405. Both ends of the thin film resistor 401 are electrically connected to the wiring 407 through contact holes 406 formed in the protective layer 402. The wiring 407 is connected to an external power source that generates a pulse voltage. By applying a pulse voltage to the thin film resistor 403 through the wiring 407, bubbles can be generated on the surface along the heating element 401.

  The thickness of the heating element 401 is generally about several μm although it depends on the thickness and material of the thin film resistor, protective layer, and heat storage layer. Therefore, when the μTAS chip is formed in a flow path having a width of several tens of μm to several hundreds of μm, which is a general width of the flow path, the heating element is less likely to be a steric hindrance to the fluid flow.

Examples of the material of the thin film resistor 403 include a metal material or a semiconductor such as silicon having conductivity.
The role of the protective layer 404 is to protect the surface of the thin film resistor from chemical reaction. Therefore, the material of the protective layer 404 is preferably a material with high chemical resistance. For example, an insulating material such as SiO ₂ or Si ₃ N ₄ and a metal material such as Ta can be used. The protective layer 404 also has a role of protecting the thin film resistor 403 from an impact (cavitation impact) that occurs when the bubbles shrink and disappear.

The role of the heat storage layer 405 is to prevent the heat generated in the thin film resistor 403 from being dissipated to the substrate side. By forming the heat storage layer 405, the heat energy generated in the thin film resistor 403 can be efficiently used for generating bubbles. Examples of the material of the heat storage layer 405 include insulator materials such as SiO ₂ and Si ₃ N ₄ .

  The material for constituting the fluid control device of the present invention is not particularly limited as long as it has resistance to the fluid to be conveyed. For example, metal materials such as stainless steel and aluminum, glass materials, semiconductor materials such as silicon, silicone resins, acrylic resin materials, and the like can be given. Moreover, when using an electroosmotic flow for the conveyance of a liquid, it is possible to select the material which generates an electroosmotic flow.

  The material of the movable member 105 is not particularly limited as long as it is resistant to the fluid to be conveyed. For example, metal materials such as stainless steel and aluminum, glass materials, semiconductor materials such as silicon, silicone resins, acrylic resin materials, ceramic materials such as alumina and zirconia, and the like can be given.

  The shape of the movable portion 105 may be any shape that can close the first flow path 101 and can be held in the valve portion 103. A spherical shape is particularly preferable from the viewpoint of symmetry regarding the flow. Further, it is possible to improve the sealing performance by forming the movable member 105 from a deformable material such as a polymer and deforming it according to the shape of the channel when the channel 101 is closed.

  FIG. 5 is a schematic view showing another example of the configuration of the fluid control device of the present invention. The fluid control device of the present invention includes a first flow path 501, a second flow path 502, a valve portion 503, and a heating element 504 formed in the first flow path 501. The valve portion 503 includes a flat plate 505, a leaf spring 506, and a valve seat portion 507. In a state where there is no fluid flow, the flat plate 505 is elastically supported by the valve seat 507 with a gap 508 by a plate spring 506. The heating element 504 is electrically connected to an electrode (not shown), and is connected to an external pulse power source via the electrode. Thereby, a pulse voltage can be applied to the heating element 503.

The configuration of the heating element 503 is the same as the configuration shown in FIG.
The position where the heating element 503 is arranged is on the first flow path 501 side, and there is no particular limitation as long as the bubble generation force reaches the valve portion. In FIG. 5, it is arranged on the bottom surface of the first channel 501, but may be arranged on the side surface of the first channel 501, for example.

Hereinafter, the opening / closing operation of the valve unit 503 will be described.
When fluid flows from the second flow path 502 to the first flow path 501, a pressure drop occurs when flowing through the gap 508. Due to this pressure drop, the pressure on the first flow path 501 side (downstream side) of the flat plate 505 becomes lower than the pressure on the second flow path 502 side (upstream side). Due to this pressure difference, the flat plate 505 moves toward the valve seat portion 507. The flat plate 505 stops at a position where the driving force generated by the pressure difference and the restoring force are balanced by the plate spring 506. The pressure difference generated before and after the flat plate 505 increases as the fluid flow rate increases. In order for the valve to be closed, there is a flow rate that is a threshold value. When the flow rate is larger than the threshold flow rate, the flat plate 505 contacts the valve seat portion 507, closes the inlet of the first flow path 501, and the valve is closed (FIG. 5B). That is, the valve unit 503 functions as a valve through which fluid can pass only when the flow rate is equal to or lower than a specific threshold value. The threshold flow rate described above includes the distance of the gap 508, the shape of the flat plate 505, the cross-sectional shape of the first flow path 501, the cross-sectional shape of the second flow path 502, the shape of the leaf spring 505, the number, the thickness. It can be changed by changing design parameters such as.

  On the other hand, when the fluid flows from the first flow path 501 to the second flow path 502, the flow can always pass as is apparent from the structure of the valve portion 503. Therefore, when the flow rate of the flow from the second flow path 502 to the first flow path 501 is larger than the threshold flow rate described above, the valve unit 503 functions as a one-way valve and a check valve. Have.

Next, a method for returning the valve portion 503, which is an important aspect of the present invention, from the closed state (FIG. 5B) to the open state (FIG. 5A) will be described with reference to FIG.
In the closed state of FIG. 6A, a pulse voltage is applied to the heating element 601 to rapidly heat to a temperature at which film boiling occurs. Thereby, bubbles 602 are generated on the surface of the heating element 601 (FIG. 6B).

Bubbles 602 generated on the surface of the heating element 601 expand rapidly. The flat plate 603 moves upward in the figure by the force by which the bubbles expand (FIG. 6C).
Next, the bubble 602 turns into contraction (FIG. 6D). At this time, the flat plate 603 may move downward due to the contraction force of the bubbles and the driving force generated when the fluid moves from the second channel 605 to the first channel 604. When the restoring force of the leaf spring 606 overcomes the driving force described above, the valve unit 607 returns to the open state (FIG. 6D). When the restoring force of the leaf spring 606 is weaker than the driving force described above, the valve portion 607 is closed again (FIG. 6A). Even in this case, the pressure difference between the first flow path 604 side and the second flow path 605 side is smaller due to the movement of the fluid compared to before the heating element is driven. Therefore, by repeating the steps of FIGS. 6A to 6D several times, the driving force due to the movement of the fluid described above gradually decreases, and the valve unit 607 is in the open state of FIG. It is possible to return to

  The material of the leaf spring 506 and the flat plate 505 is not particularly limited as long as the material is resistant to the solution to be analyzed and has some resistance to elastic deformation. For example, silicon is desirable. It is also possible to use resin materials such as silicone resin and acrylic resin. If necessary, the surface may be coated.

  The material forming the first channel 501 and the second channel 502 is not particularly limited as long as it is a material resistant to the solution to be analyzed. For example, glass, silicon, silicone resin, acrylic resin, and the like can be given. In addition, when an electroosmotic flow is used for transporting a liquid, a material that generates the electroosmotic flow can be selected.

  The shape of the flat plate 505 is not particularly limited as long as it is a shape that can shield the entrance of the first flow path 501. A circular shape is particularly preferable from the viewpoint of flow symmetry. In particular, it is preferable to configure the valve portion 503 by arranging a circular flat plate having the same center as that of the flow path with respect to the flow path having a circular cross-sectional shape. As a result, the fluid flow and pressure distribution in the valve portion 503 are symmetric with respect to the central axis, and the displacement of the shielding portion can be stabilized. Further, it is preferable to arrange the leaf springs symmetrically with respect to the central axes of the flat plate 505 and the valve portion 503.

  By combining a plurality of fluid control devices of the present invention, it is possible to systemize and control the fluid. Examples of the system include a system that cuts out a predetermined amount of a liquid sample from a flow path and introduces it into the next process.

Hereinafter, the present invention will be described in more detail with reference to examples.
Note that the dimensions, shape, liquid feeding means, liquid feeding conditions, and the like in the examples are merely examples, and can be arbitrarily changed as design matters as long as they satisfy the requirements of the present invention.

Example 1
In this example, a system was constructed in which a fluid sample of the present invention was used to cut out a fixed amount of liquid sample and introduce it to the next step in the microchannel system. 7A and 7B are conceptual diagrams showing an embodiment in which a microchannel system is configured using the fluid control device of the present invention.

  FIG. 7A is a schematic diagram of the microchannel system of the present embodiment. The system includes a first fluid control device 701, a second fluid control device 702, a flow path 703, a fluid pump 704, and an analysis element 705. The respective components 701 to 705 described above are connected in a positional relationship as shown in FIG.

Hereinafter, a method of introducing a fixed amount of liquid sample into the analysis element using the microchannel system of FIG.
First, using the pump 704, the carrier liquid 706 is filled into the first fluid control device 701, the second fluid control device 702, the flow path 703, and the analysis element 705 (FIG. 7B). At this time, the first fluid control device 701 and the second fluid control device 702 are fed under a fluid feeding condition such that the flow rate of the carrier liquid 706 is smaller than the threshold flow rate of both fluid control devices. In this case, since the movable member 707 and the movable member 708 do not move, the carrier liquid 706 can flow as shown in the figure.

  Next, the liquid sample 709 to be analyzed is moved in the direction from the first fluid control device to the second fluid control device by using a liquid feeding means (not shown) on the upstream side of the first fluid control device 701. Flow (FIG. 7C). At this time, the flow in the first fluid control device is always in a passable direction. The liquid feeding condition is set so that the flow rate of the flow in the second fluid control device is less than the threshold flow rate. Further, the flow path is designed so that the flow resistance in the direction toward the analysis element 705 and the pump 704 is larger than the direction toward the second fluid control device 702. As shown in FIG. 7C, in the channel 703, the liquid sample 709 is introduced only into the cutout portion 710.

  Next, the pump 704 is operated, and the carrier liquid is supplied under a liquid supply condition in which the flow rates in the first fluid control device 701 and the second fluid control device 702 are equal to or higher than the threshold flow rate. At this time, the movable portion 707 and the movable portion 708 move, so that the valve portions in the first fluid control device 701 and the second fluid control device 702 are closed. As a result, the liquid sample 711 in the cutout unit 710 is cut out and introduced into the analysis element 705 (FIG. 7D).

  After the analysis is completed, by driving the heating element 712 of the first fluid control device and the heating element 713 of the second fluid control device, the movable parts 707 and 708 are moved, and the first fluid control device 701 and the first fluid control device 701 are moved. The valve part in the second fluid control device 702 is opened. In this state, the pump 704 is driven and the carrier liquid is fed at a flow rate equal to or lower than the threshold flow rate of the fluid control device, whereby the first fluid control device 701, the second fluid control device 702, The path 703 and the analysis element 705 are filled (FIG. 7E).

With the above operation, the microchannel system returns to the initial state shown in FIG. Thereafter, different liquid samples can be analyzed by repeating the same steps.
In FIG. 7E, when the threshold flow rates of the first fluid control device 701 and the second fluid control device 702 are different, the first fluid control device 701 and the second fluid control device 702 are changed. At the same time, it may be difficult to fill the carrier liquid in the open state. Alternatively, it may not be difficult but efficient. In such a case, the following operations are performed after the analysis is completed.

  First, by driving only the heating element 712 of the first fluid control device, the movable portion 707 is moved, and the valve portion in the first fluid control device 701 is opened. In this state, the pump 704 is driven, and the liquid for carrier is fed at a flow rate equal to or lower than the threshold flow rate of the first fluid control device 701, whereby the first fluid control device 701, the flow path 703, and the analysis. The element 705 is filled. At this time, since the valve portion in the second fluid control element 702 is closed, the liquid sample 711 remains in the second fluid control element 702.

  Next, the valve in the first fluid control device 701 is operated by operating the pump 704 and supplying the carrier liquid for a short time under a liquid supply condition in which the flow rate in the first fluid control device 701 is equal to or higher than the threshold flow rate. The part is closed.

  Next, by driving only the heating element 713 of the second fluid control device, the movable portion 708 is moved, and the valve portion in the second fluid control device 702 is opened. In this state, the pump 704 is driven, and the carrier fluid is supplied at a flow rate equal to or lower than the threshold flow rate of the second fluid control device 702, thereby filling the second fluid control device 702.

That is, in the fluid system of the present invention, since a plurality of fluid control devices can be individually driven, it is possible to control the fluid, which was difficult with the conventional fluid control device.
In this fluid system, since the volume of the liquid sample introduced into the analysis element 705 is defined by the volume of the cutout portion 710, a constant amount of liquid sample can always be introduced into the analysis element. This makes it possible to perform a reproducible analysis.

  In this embodiment, a fluid system is configured using the fluid control device of the present invention. Thereby, the purge operation of the flow path after the analysis can be easily performed in a short time. As a result, the time required for the entire analysis work can be shortened, and the analysis efficiency can be improved.

An example in which HPLC (High Performance Liquid Chromatography) analysis is performed using the flow channel system shown in FIG. 7 will be described.
As the carrier solution 706, a solution obtained by mixing 100 mM phosphate buffer (pH = 7.0) and methanol at 75:25 is used. As the liquid sample 709, a mixed aqueous solution in which benzoic acid, salicylic acid, and phenol are dissolved in a 100 mM phosphate buffer (pH = 7.0) is used. As the analytical element 705, an ODS (octadecylated silica) column for HPLC is used.

  Using the process described above, a liquid sample 709 is introduced into an HPLC column and separated into components. By detecting each separated component with an ultraviolet light absorption detector having a wavelength of 280 mm, three distinct signal peaks based on the difference in elution time of benzoic acid, salicylic acid, and phenol can be obtained.

Example 2
In this embodiment, the microchannel system shown in FIGS. 8A and 8B is configured using the fluid control device of the present invention. This microchannel system is used for a bypass line when a sample to be analyzed is introduced into an analyzer. When a sample is introduced into the analyzer, there is a possibility that impurities and the like are mixed in the initial sample when the pretreated sample is introduced into the analyzer. By using this microchannel system, it is possible to remove the initial sample by flowing it through the bypass line and analyze only the sample excluding impurities.

  As shown in FIG. 8A, the microchannel system includes a first channel 801, a second channel 802, a third channel 803, a fourth channel 804, a pump 805, a fluid A control device 806 and an analysis element 807 are included. A pump 805 is connected to one end of the first flow path. One end of the first channel 801 opposite to the end to which the pump 805 is connected is branched into a second channel 802 and a fourth channel 804. A liquid transfer device 806 is disposed between the second flow path 802 and the third flow path 803. An analysis element 807 is connected to the fourth flow path 804. When the valve unit of the fluid control device 806 is in the open state, the flow path resistance on the second flow path 802 side is designed to be lower than the flow path resistance on the fourth flow path 804 side. Has been.

Hereinafter, a method for introducing a sample of an analytical element using the microchannel system of FIG.
First, using the pump 805, the flow paths 801 to 804, the fluid control device 806, and the analysis element 807 are filled with the carrier liquid 809 (FIG. 8A).

  Next, a liquid sample 808 to be analyzed is introduced into the first flow path 801 using a pump 805. As the liquid feeding condition, a liquid feeding condition in which the valve unit of the fluid control device 806 is not closed, that is, a liquid feeding condition in which the flow rate in the fluid control device 806 is equal to or lower than the threshold flow rate is used. At this time, since the channel resistance on the second channel 802 side is lower than the channel resistance on the fourth channel 804 side (analysis element 807 side), the liquid sample is on the second channel side 802. And is not introduced into the analysis element 807 (FIG. 8B). The second flow path 802, the fluid control device 806, and the third flow path 803 serve as a bypass line.

  After a liquid sample is transported to the second flow path 802 side for a certain period of time and the sample including the initial impurities is removed, the flow rate in the fluid control device 806 is equal to or higher than the threshold flow rate. Switch to liquid delivery conditions. Thereby, the valve | bulb part of the fluid control apparatus 806 will be in a closed state. The liquid sample 808 stops flowing to the second channel 802 side, is introduced into the analysis element 807, and is analyzed (FIG. 8C).

  After the analysis is completed, the carrier liquid 809 is fed while the valve unit of the fluid control device 806 is closed. As a result, the fourth channel 804 and the analysis element 807 are replaced with the carrier liquid 809 (FIG. 8D).

  Next, the heating element 810 of the fluid control device 806 is driven to open the valve. If the drive does not return to the open state once, the drive is performed a plurality of times to return to the open state. In this state, the carrier liquid 809 is fed under a liquid feeding condition in which the valve unit of the fluid control device 806 is not closed. Thereby, the first flow path 801, the fluid control device 806, and the third flow path 803 are replaced with the carrier liquid (FIG. 8E).

With the above operation, the microchannel system returns to the initial state of FIG. Hereinafter, different liquid samples can be analyzed by repeating the above-described steps as necessary.
In this embodiment, a fluid system is configured using the fluid control device of the present invention. Thereby, the purge operation of the flow path after the analysis can be easily performed in a short time. As a result, the time required for the entire analysis work can be shortened, and the analysis efficiency can be improved.

  The fluid control device of the present invention can return the valve to the initial state without operating an external pump or providing a purge line. In a miniaturized analysis system that performs chemical analysis or chemical synthesis on a chip, It can be used for a valve or the like for controlling the flow of fluid.

It is a conceptual diagram which shows an example of embodiment of the fluid control apparatus of this invention. It is a conceptual diagram which shows operation | movement of the fluid control apparatus of this invention. It is a conceptual diagram which shows operation | movement of the fluid control apparatus of this invention. It is a conceptual diagram which shows the heat generating element used for the fluid control apparatus of this invention. It is a conceptual diagram which shows an example of embodiment of the fluid control apparatus of this invention. It is a conceptual diagram which shows operation | movement of the fluid control apparatus of this invention. It is a conceptual diagram which shows the Example which comprised the microchannel system using the fluid control apparatus of this invention. It is a conceptual diagram which shows the Example which comprised the microchannel system using the fluid control apparatus of this invention. It is a conceptual diagram which shows the Example which comprised the microchannel system using the fluid control apparatus of this invention. It is a conceptual diagram which shows the Example which comprised the microchannel system using the fluid control apparatus of this invention. It is a figure which shows the fluid control apparatus of a prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 101 1st flow path 102 2nd flow path 103 Valve part 104 Heat generating body element 301 Bubble 302 Heat generating element 303 Movable member 304 Bypass line 305 Valve part 401 Heat generating element 402 First flow path 403 Thin film resistor 404 Protection Layer 405 heat storage layer 406 contact hole 407 wiring 501 first flow path 502 second flow path 503 valve section 504 heating element 505 flat plate 506 leaf spring 507 valve seat section 508 gap 601 heating element 602 bubble 603 flat plate 604 first Channel 605 second channel 606 leaf spring 607 valve unit 701 first fluid control device 702 second fluid control device 703 channel 704 pump 705 analysis element 706 carrier liquid 707, 708 movable member 709 liquid sample 710 Cutout part 711 liquid Materials 712, 713 Heating element 801 First flow path 802 Second flow path 803 Third flow path 804 Fourth flow path 805 Pump 806 Fluid control device 807 Analytical element 808 Liquid sample 809 Carrier liquid 810 Heating element Element 901 Bypass line 902 Micro flow path 903 Movable member

Claims (7)

  A fluid control device including a valve for controlling a flow of fluid, the first flow path, a second flow path, and a position between the first flow path and the second flow path. And when the fluid flows from the second flow path to the first flow path, the valve includes a movable member that closes the first flow path and closes the flow path to block the flow; A fluid control device comprising means for changing the valve from a closed state to an open state in the flow path.   The means for opening the valve is means for driving the movable member to open by applying energy to the fluid in the first flow path when the valve is closed. The fluid control apparatus according to claim 1.   The fluid is a liquid, and the means for opening the valve is a heating element that generates bubbles in the flow path by rapidly heating the liquid in the first flow path. The fluid control device according to claim 1, wherein   4. The fluid control device according to claim 1, wherein the valve includes an elastic body for disposing the movable member at a predetermined position of the flow path. 5. Said valve, said first when the pressure differential between the flow path and the second flow path is smaller than the predetermined pressure value P ₀ is passed through the fluid, the pressure differential when the higher P ₀ fluids The fluid control device according to any one of claims 1 to 4, wherein the flow of the fluid is cut off. When the flow rate of the flow from the second flow path to the first flow path is less than a predetermined flow rate Q ₀ , the valve passes the fluid, and when the flow rate is equal to or higher than Q ₀ , the valve The fluid control device according to any one of claims 1 to 5, wherein the fluid control device is cut off.   A fluid control system comprising a plurality of fluid control devices according to any one of claims 1 to 6.

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