JP2006038549A - Grade determining method - Google Patents

Grade determining method Download PDF

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JP2006038549A
JP2006038549A JP2004216967A JP2004216967A JP2006038549A JP 2006038549 A JP2006038549 A JP 2006038549A JP 2004216967 A JP2004216967 A JP 2004216967A JP 2004216967 A JP2004216967 A JP 2004216967A JP 2006038549 A JP2006038549 A JP 2006038549A
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grade
feature points
inspection object
feature
area
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JP4581529B2 (en
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Osamu Hirose
修 廣瀬
Masaki Nozawa
正樹 野沢
Takeomi Sasao
健臣 笹尾
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Sumitomo Chemical Co Ltd
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Sumitomo Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a grade determining method for determining the grade of an inspection target such as a powder or a film on the basis of the number or ratio of feature points featured by a plurality of the feature quantities of the feature points present on the inspection target. <P>SOLUTION: Two kinds of feature quantities x and y are measured in relation to a plurality of the feature points present on the inspection target and a plurality of grade regions are set on a plane having the feature quantities x and y as axes. The feature points are plotted on the plane and, on the basis of the number of the feature points contained in the respective grade regions or the ratio of the feature points in the respective grade regions with respect to all of the feature points, the grade of the inspection target is judged. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、検査対象物の等級判定方法に関する。詳しくは粉体やフィルム等の検査対象物の等級を、検査対象物に存在する特徴点の複数の特徴量よって特徴付けられる特徴点の数または比率に基づいて判定する方法に関する。   The present invention relates to a method for determining the grade of an inspection object. More specifically, the present invention relates to a method for determining the grade of an inspection object such as powder or film based on the number or ratio of feature points characterized by a plurality of feature amounts of feature points existing in the inspection object.

検査対象物の等級判定方法として、検査対象物をカメラにより撮像して得た2次元画像パターンから対象物の特徴量を算出し、この特徴量を基準値と比較して検査対象物の等級判定を行う方法が知られている。例えば、特許文献1には、具体例として、茄子の形状に関するパラメータと色から個々の茄子の等級判定することが開示されている。
しかしながら、この方法は、個々の検査対象物を1特徴点として判定するものであり、例えば、白色粉体中の有色物または異物やフィルム中の変色部や傷のような複数の特徴点を有する検査対象物を複数の特徴量によって特徴付けられる特徴点の数または比率に基づいて等級判定するものではない。
特開平6−347239号公報
As a method for determining the grade of an inspection object, the feature amount of the object is calculated from a two-dimensional image pattern obtained by imaging the inspection object with a camera, and the feature amount is compared with a reference value to determine the grade of the inspection object. The method of doing is known. For example, Patent Document 1 discloses, as a specific example, determining an individual insulator grade from parameters and colors related to the insulator shape.
However, this method determines an individual inspection object as one feature point, and has, for example, a plurality of feature points such as a colored object in a white powder or a foreign object, a discolored portion in a film, and a scratch. The inspection object is not graded based on the number or ratio of feature points characterized by a plurality of feature quantities.
JP-A-6-347239

本発明の目的は、粉体やフィルム等の検査対象物の等級を、検査対象物に存在する特徴点の複数の特徴量よって特徴付けられる特徴点の数または比率に基づいて判定する方法を提供することにある。   An object of the present invention is to provide a method for determining the grade of an inspection object such as powder or film based on the number or ratio of feature points characterized by a plurality of feature quantities of feature points existing in the inspection object. There is to do.

本発明者らはかかる課題を解決するために、検査対象物に存在する複数の特徴点に基づいて判定する方法について鋭意検討した結果、(1)複数の特徴点に関してそれぞれ2種類の特徴量x、yを計測し、x、yを軸とする平面に複数の等級領域を設定し、該特徴点を該平面にプロットし、または(2)複数の特徴点に関してそれぞれ3種類の特徴量x、y、zを計測し、x、y、zを軸とする空間に複数の等級領域を設定し、該特徴点を該空間にプロットし、各等級領域内に含まれる特徴点の数または全特徴点に対する各等級領域内の特徴点の比率に基づいて等級を判定することによって、精度良く、容易に検査対象物の等級を判定できることを見出し、本発明を完成するに至った。   In order to solve such a problem, the present inventors have intensively studied a method for determining based on a plurality of feature points existing in an inspection object. As a result, (1) two types of feature amounts x for a plurality of feature points, respectively. , Y are measured, a plurality of grade regions are set on a plane having x and y as axes, and the feature points are plotted on the plane, or (2) three types of feature amounts x, Measure y, z, set a plurality of grade areas in the space with x, y, z as axes, plot the feature points in the space, and the number of feature points included in each grade area or all features By determining the grade based on the ratio of the feature points in each grade area to the points, it was found that the grade of the inspection object can be easily determined with high accuracy, and the present invention has been completed.

すなわち本発明は、検査対象物に存在する複数の特徴点に関してそれぞれ2種類の特徴量x、yを計測し、x、yを軸とする平面に複数の等級領域を設定し、該特徴点を該平面にプロットし、各等級領域内に含まれる特徴点の数または全特徴点に対する各等級領域内の特徴点の比率に基づいて検査対象物の等級を判定することを特徴とする等級判定方法である。   That is, the present invention measures two types of feature amounts x and y for a plurality of feature points existing in the inspection object, sets a plurality of grade regions on a plane having x and y as axes, and determines the feature points. A grade determination method characterized by plotting on the plane and determining the grade of the inspection object based on the number of feature points included in each grade area or the ratio of the feature points in each grade area to all the feature points It is.

また本発明は、検査対象物に存在する複数の特徴点に関してそれぞれ3種類の特徴量x、y、zを計測し、x、y、zを軸とする空間に複数の等級領域を設定し、該特徴点を該空間にプロットし、各等級領域内に含まれる特徴点の数または全特徴点に対する各等級領域内の特徴点の比率に基づいて検査対象物の等級を判定することを特徴とする等級判定方法である。   Further, the present invention measures three types of feature amounts x, y, and z with respect to a plurality of feature points existing in the inspection object, and sets a plurality of grade regions in a space with x, y, z as axes, The feature points are plotted in the space, and the grade of the inspection object is determined based on the number of feature points included in each grade area or the ratio of the feature points in each grade area to the total feature points. It is a grade judgment method to do.

本発明によって、粉体やフィルム等の検査対象物の等級を、精度良く、容易に判定することができる。   According to the present invention, the grade of an inspection object such as a powder or a film can be easily determined with high accuracy.

本発明における検査対象物として具体的には、メチオニン等の粉体、アクリル板、光学フィルム等のシート状またはフィルム状の製品等が挙げられるが、これらに限定されるものではない。
白色粉体等は乾燥時に着色し、程度によって黄色〜茶〜こげ茶〜黒色の有色部が含まれることがある。また、フィルム等も異物や、部分的に変色した部分を有することがある。これらの有色部、異物および変色した部分等が特徴点として抽出される。これらの特徴点は、通常、検査対象物の欠陥領域である。
特徴点の2種類の特徴量x、yとしては、通常、強度情報と形状情報が、強度情報としては、検査対象物の正常背景の平均明度と欠陥領域の明度との差または正常背景の平均色度と欠陥領域と色度との差が、形状情報としては、欠陥領域の大きさを表す量が採用される。
以下、検査対象物として粉体を例に、本発明を具体的に説明する。
Specific examples of the inspection object in the present invention include powders such as methionine, sheet-like or film-like products such as acrylic plates and optical films, but are not limited thereto.
White powder or the like is colored when dried, and may contain colored parts of yellow to brown to dark brown to black depending on the degree. Moreover, a film etc. may also have a foreign material and the part discolored partially. These colored portions, foreign matters, discolored portions, and the like are extracted as feature points. These feature points are usually defective areas of the inspection object.
As the two types of feature quantities x and y of the feature points, normally, intensity information and shape information are used, and the intensity information is the difference between the average brightness of the normal background of the inspection object and the brightness of the defect area or the average of the normal background. As the shape information, the difference between the chromaticity, the defect area, and the chromaticity represents an amount representing the size of the defect area.
Hereinafter, the present invention will be described in detail by taking powder as an example of the inspection object.

図1は本発明で使用する装置の例を示す図である。装置は粉体画像測定装置1と画像処理装置7からなり、粉体画像測定装置は、その上部に粉体を照明する2本の蛍光灯3と粉体の画像を撮影するラインセンサ2、およびその下部に粉体を等速移動させる1軸ステージ6を備えており、粉塵防止対策として、それらを透明ガラス板5で隔離している。
透明ガラス板としては約10mm厚さのものが使用され、その上部に2本の直管蛍光灯を配置している。2方向から照らすことによって粉体表面の凹凸による印影をなくすることができる。蛍光灯は2本に限るものでなく、多く配置しても良い。
FIG. 1 is a diagram showing an example of an apparatus used in the present invention. The apparatus comprises a powder image measuring device 1 and an image processing device 7. The powder image measuring device has two fluorescent lamps 3 for illuminating the powder on the upper portion thereof, a line sensor 2 for photographing an image of the powder, and A uniaxial stage 6 for moving powder at a constant speed is provided at the lower part thereof, and these are isolated by a transparent glass plate 5 as a dust prevention measure.
A transparent glass plate having a thickness of about 10 mm is used, and two straight tube fluorescent lamps are arranged on the top thereof. By illuminating from two directions, imprints due to irregularities on the powder surface can be eliminated. The number of fluorescent lamps is not limited to two, and many fluorescent lamps may be arranged.

粉体はトレーに入れ、表面を擦り切り、平らにし、1軸ステージに積載し、等速で移動させる。
ラインセンサで粉体表面を1次元撮影し、粉体が等速移動することによって2次元画像が得られる。撮影面積は、特に限定されるものではないが、例えば、視野80mm×移動距離200mm(160cm)とする。
ラインセンサからの映像信号は画像処理装置7で処理し、粉体の等級を判定する。
The powder is put in a tray, the surface is scraped off, flattened, loaded on a single axis stage, and moved at a constant speed.
A two-dimensional image is obtained by taking a one-dimensional image of the powder surface with a line sensor and moving the powder at a constant speed. The imaging area is not particularly limited, and is, for example, a visual field of 80 mm × a moving distance of 200 mm (160 cm 2 ).
The video signal from the line sensor is processed by the image processing device 7 to determine the powder grade.

図2は本発明で使用する装置の他の例を示す図である。ラインセンサの代わりに2台のエリアセンサ2、および複数本の蛍光灯3が配置されている。蛍光灯3と透明ガラス板5との間に拡散フィルム4が配置され、視野全体を均一に照明する。その他は図1と同様である。
エリアセンサでは、粉体表面を停止状態で撮影し、1画面分を移動しながら順次撮影する。撮影面積は、特に限定されるものではないが、例えば、視野30mm×28mm×カメラ2台、1軸ステージ長さ240mm(144cm)とする。
FIG. 2 is a diagram showing another example of an apparatus used in the present invention. Instead of the line sensor, two area sensors 2 and a plurality of fluorescent lamps 3 are arranged. A diffusion film 4 is disposed between the fluorescent lamp 3 and the transparent glass plate 5 to uniformly illuminate the entire field of view. Others are the same as in FIG.
In the area sensor, the powder surface is photographed in a stopped state, and sequentially photographed while moving one screen. The imaging area is not particularly limited. For example, the field of view is 30 mm × 28 mm × two cameras, and the uniaxial stage length is 240 mm (144 cm 2 ).

センサとしては、通常CCDカメラが使用され、撮影して得られるデジタル信号を画像処理装置で処理する。
この粉体の場合の特徴点は、通常、正常粉体とは異なる欠陥領域である正常粉体と色または濃淡の異なる粉体または異物が挙げられる。
この複数存在する特徴点に関してそれぞれ2種類の特徴量x、yを計測する。特徴量としては、強度情報である正常領域の平均明度と欠陥領域との明度差または正常領域の平均色度と欠陥領域との色度差が、形状情報としては欠陥領域の大きさを表す量が挙げられる。
具体的には、白色粉体中の有色部を計測する。有色部は、程度によって黄色〜茶〜こげ茶〜黒色を示し、領域によってその程度が異なる。通常、有色部の明度と大きさを計測する。
As a sensor, a CCD camera is usually used, and a digital signal obtained by photographing is processed by an image processing apparatus.
A characteristic point in the case of this powder is usually a powder or a foreign substance having a color or shade different from that of a normal powder which is a defect region different from that of the normal powder.
Two types of feature amounts x and y are measured for the plurality of feature points. As the feature amount, the intensity difference between the average brightness of the normal area and the defect area, or the difference between the average chromaticity of the normal area and the defect area, and the shape information represents the size of the defect area. Is mentioned.
Specifically, the colored part in the white powder is measured. A colored part shows yellow-brown-dark brown-black according to a grade, and the grade changes with areas. Usually, the brightness and size of the colored part are measured.

図3は画像処理の例を説明する図である。(A)は撮影して得られた原画像の断面波形を示す。横軸は位置、通常、粉体の移動方向に直角方向の位置を示し、縦軸は明度を256階調で示している。
照明強度の不均一等により正常部にも存在する明度の不均一を除去し、正常領域の明度を一定にするためにシェーディング補正を行う。原画像と、例えば正常領域の平均として求めたシェーディング画像(B)との差分に128階調を加算し、128階調を基準とする波形(C)とする。
FIG. 3 is a diagram illustrating an example of image processing. (A) shows a cross-sectional waveform of an original image obtained by photographing. The horizontal axis indicates the position, usually the position perpendicular to the moving direction of the powder, and the vertical axis indicates the brightness in 256 gradations.
Shading correction is performed in order to remove the non-uniformity of brightness existing in the normal part due to non-uniform illumination intensity, etc., and to keep the brightness of the normal area constant. For example, 128 gradations are added to the difference between the original image and the shading image (B) obtained as an average of normal regions, for example, to obtain a waveform (C) based on the 128 gradations.

正常領域と有色部とを識別するために、シェーディング補正後の画像について閾値を設定する。通常、シェーディング補正後の画像について明度の標準偏差σを求め、128−kσを閾値とする(E)。この閾値以下を有色部、すなわち特徴点と判定する。ここで、kは有色部抽出の際の感度を調整するために適宜定める係数であって、通常、1〜3程度の値が用いられる。kの値が小さいほど、わずかな明度差でも有色部として抽出されるがノイズ成分の抽出も多くなる。逆に、kの値が大きいほど、ノイズ成分を抽出しにくくなるが有色部の抽出感度も低下する。kの値は実際の製品を評価しながら実験的に定めるのがよい。
その際、有色部以外のノイズ成分が抽出されることがあるが,これらは通常、有色部と比較して面積が小さいため、微小領域を除去するような処理を用いることによりノイズを消去することができる。
In order to distinguish between the normal region and the colored portion, a threshold is set for the image after shading correction. Usually, a standard deviation σ of lightness is obtained for an image after shading correction, and 128−kσ is set as a threshold (E). Below this threshold is determined as a colored portion, that is, a feature point. Here, k is a coefficient that is appropriately determined in order to adjust the sensitivity at the time of color portion extraction, and a value of about 1 to 3 is usually used. As the value of k is smaller, even a slight brightness difference is extracted as a colored portion, but noise components are also extracted more. Conversely, the larger the value of k, the more difficult it is to extract the noise component, but the extraction sensitivity of the colored portion also decreases. The value of k should be determined experimentally while evaluating the actual product.
At that time, noise components other than the colored part may be extracted, but these usually have a smaller area than the colored part, so that the noise is eliminated by using a process that removes a minute region. Can do.

次に、有色部毎にラベリングを行う。そしてラベリングした欠陥領域毎に、強度情報としてここでは平均明度を、寸法情報としてここでは面積(画素数またはそれをmm2に換算した値)を求める。ここでいう面積とは、(E)の斜線部の面積ではなく、画像の平面の面積である。ここでは白地に黒を抽出するので、平均明度そのものを使うと、数値が大きい(128階調に近い)ほど正常であることを意味する。強度情報として、平均明度の128階調との差を用いると黒色に近いほど数値が大きくなるので直感的に分かりやすくなる。したがって、欠陥の濃度としては128階調との差を用いるのが好ましい。 Next, labeling is performed for each colored portion. For each labeled defect area, the average brightness is obtained here as intensity information, and the area (number of pixels or a value obtained by converting it into mm 2 ) is obtained here as dimension information. The area here is not the area of the shaded portion in (E) but the area of the plane of the image. Here, since black is extracted on a white background, using the average brightness itself means that the larger the value (closer to 128 gradations), the more normal. If the difference between the average brightness and 128 gradations is used as the intensity information, the closer the color is to black, the larger the numerical value, which makes it easier to understand intuitively. Therefore, it is preferable to use the difference from the 128 gradations as the defect density.

このようにして計測した特徴点の特徴量、すなわち欠陥領域である有色部の強度情報である明度および形状情報である面積を用いて等級判定を行う。
明度および面積をx、y軸とする特徴平面に複数の等級領域を設定する。設定方法はx軸とy軸の交点を中心とする多重の円または楕円によって行われるが、これらに限定されるものではなく、x軸とy軸を辺とする矩形や三角形でもよい。図4は実施例の結果を示すが、この例では多重の楕円で等級領域を設定している。楕円間の間隔は等間隔である必要はなく、また楕円の曲率も予め定められたものである必要はない。設定方法は、特徴点について予め把握している特徴の傾向から判断して選択される。
Grade determination is performed using the feature quantities measured in this way, that is, the brightness that is the intensity information of the colored portion that is the defect area and the area that is the shape information.
A plurality of grade regions are set on a feature plane having lightness and area as x and y axes. The setting method is performed by a plurality of circles or ellipses centered on the intersection of the x axis and the y axis, but is not limited thereto, and may be a rectangle or a triangle whose sides are the x axis and the y axis. FIG. 4 shows the result of the example. In this example, the grade region is set by multiple ellipses. The intervals between the ellipses need not be equal, and the curvature of the ellipses need not be predetermined. The setting method is selected based on the tendency of the feature that is known in advance for the feature point.

この特徴平面に計測された特徴点をプロットする。この作業を計算機内部で行い、計算機で領域内であるかどうかを判定する場合も、具体的に平面にプロットしないけれども、実質的にプロットすることと変わりなく、同等である。
各等級領域に存在してよい特徴点の個数をあらかじめ設定しておき、この閾値を超えるかどうかによってその各等級領域を満たすかどうかを判断する。閾値は複数設定することもでき、○△×判定とすることができる。
また、各等級領域に存在する特徴点の数が全特徴点数に占める比率に基づき、その各等級領域を満たすかどうかを判定することもできる。
これらの判定法の場合、通常、等級条件を満たす最も下位の等級値をその検査対象物の等級とする。すなわち、等級Bの条件は満たすが、等級Bより下位の等級Cの条件は満たさず、さらに下位の等級Dの条件を満たす場合、その検査対象物の等級はDとする。なお、判定基準はこれに限定されるものではない。
The measured feature points are plotted on this feature plane. Even when this operation is performed inside the computer and it is determined whether or not it is within the area by the computer, although it is not specifically plotted on a plane, it is equivalent to substantially plotting.
The number of feature points that may exist in each grade area is set in advance, and whether or not each grade area is satisfied is determined based on whether or not this threshold value is exceeded. A plurality of threshold values can be set, and it can be determined as ΔΔ ×.
Further, based on the ratio of the number of feature points existing in each grade area to the total number of feature points, it can be determined whether or not each grade area is satisfied.
In the case of these judgment methods, the lowest grade value that satisfies the grade condition is usually set as the grade of the inspection object. That is, if the condition of the grade B is satisfied but the condition of the grade C lower than the grade B is not satisfied and the condition of the lower grade D is satisfied, the grade of the inspection object is D. Note that the criterion is not limited to this.

2種類の特徴量(x,y)に代えて、検査対象物に存在する複数の特徴点に関してそれぞれ3種類の特徴量(x,y,z)を計測し、x、y、zを軸とする空間に複数の等級領域を設定し、該特徴点を該空間にプロットし、各等級領域内に含まれる特徴点の数または全特徴点に対する各等級領域内の特徴点の比率に基づいて検査対象物の等級を判定することもできる。
例えば、検査対象物が色彩をもつ物体であり、特徴点が色または明度が異なる領域であり、特徴量として明度差、色差、面積を計測して行う。
この場合、x、y、zを軸とする空間に等級領域を設定して行う以外は、x、yを軸とする平面に等級領域を設定して行う場合と同様に行われる。
Instead of the two types of feature values (x, y), three types of feature values (x, y, z) are measured for a plurality of feature points existing in the inspection object, and x, y, z are used as axes. Set multiple grade areas in the space to be plotted, plot the feature points in the space, and inspect based on the number of feature points included in each grade area or the ratio of feature points in each grade area to all feature points The grade of the object can also be determined.
For example, the inspection object is an object having a color, the feature point is an area having a different color or brightness, and the brightness difference, the color difference, and the area are measured as feature amounts.
In this case, except that the grade area is set in a space having x, y, and z as axes, the process is performed similarly to the case where the grade area is set in a plane having x, y as axes.

以下、実施例を示し、本発明を具体的に示すが、本発明は下記の実施例に制限されるものではない。   EXAMPLES Hereinafter, although an Example is shown and this invention is shown concretely, this invention is not restrict | limited to the following Example.

図1に示す装置を用いて、メチオニン粉体の等級判定を行った。
幅450mm×長さ500mm×高さ500mmの粉体画像測定装置(1)の内部に厚さ10mmの透明ガラス板(5)を配置し、その上方に2本の蛍光灯(3)と粉体の画像を撮影するラインセンサ(2)を配置した。粉体はトレーに入れ、表面を擦り切り、平らにし、1軸ステージに積載し、30mm/secで移動させた。
撮影面積は、視野80mm×移動距離200mmで160cmとした。解像度が40μm/ピクセルであり、2000画素×5000ラインの1枚画像が得られた。
Using the apparatus shown in FIG. 1, the grade of methionine powder was determined.
A transparent glass plate (5) having a thickness of 10 mm is arranged inside a powder image measuring device (1) having a width of 450 mm, a length of 500 mm, and a height of 500 mm, and two fluorescent lamps (3) and a powder are disposed above the transparent glass plate (5). The line sensor (2) for taking the image of is arranged. The powder was put in a tray, the surface was scraped off, flattened, loaded on a single axis stage, and moved at 30 mm / sec.
The imaging area was 160 cm 2 with a visual field of 80 mm × movement distance of 200 mm. A single image of 2000 pixels × 5000 lines was obtained with a resolution of 40 μm / pixel.

これを画像処理装置7で処理した。方法は図3に示すとおり、シェーディング補正を行い、閾値を設定して有色部(欠陥領域)と判定し、欠陥領域毎にラベリングを行い、ラベリングした領域毎に、明度およびその面積(画素数)を求めた。
なお、使用した機器仕様を次に示す。
蛍光灯:ツイン蛍光灯ツイン27ワット 3波長形昼光色 FPL27EX-D National製
ラインセンサ:CCDライン白黒カメラ NS2048 NED製
レンズ:Micro−NIKKOR (株)ニコン製
画像処理装置(7):FHC330A(画像入力ボード),FVL(画像処理ライブラリ) (株)ファースト製
This was processed by the image processing apparatus 7. As shown in FIG. 3, the shading correction is performed, a threshold value is set, a colored portion (defective region) is determined, labeling is performed for each defective region, and the brightness and the area (number of pixels) for each labeled region. Asked.
The equipment specifications used are shown below.
Fluorescent lamp: Twin fluorescent lamp Twin 27 watts 3 wavelength daylight FPL27EX-D National line sensor: CCD line black and white camera NS2048 NED
Lens: Micro-NIKKOR Nikon Corporation Image processing device (7): FHC330A (image input board), FVL (image processing library) First Corporation

x軸が欠陥濃度(明度の128階調からの差で表す)、y軸が欠陥面積(画素数で表す)である平面に楕円で等級領域を設定した。下式(1)のx、yに、それぞれ(50、100)、(70、200)、(90、300)、(110、400)を代入して、4本の楕円を画き、5つの等級領域を設定した。 A grade region is set as an ellipse on a plane in which the x-axis is the defect density (represented by a difference from 128 gradations of brightness) and the y-axis is the defect area (represented by the number of pixels). Substituting (50, 100), (70, 200), (90, 300), (110, 400) into x 0 and y 0 in the following formula (1), respectively, draws four ellipses, and 5 Two grade areas were set.

Figure 2006038549
Figure 2006038549

4サンプル(No.1〜No.4)について計測しその結果を設定した等級領域にプロットした。結果を表1および図4に示す。
各等級領域に許容する欠陥個数を設定し、この基準個数を満たしているかどうかを判定した。
その結果を基に、各サンプルの等級判定を行った。なお、等級条件を満たす最も下位の等級値をその検査対象物の等級とした。
Measurement was performed on four samples (No. 1 to No. 4), and the results were plotted in the set grade region. The results are shown in Table 1 and FIG.
The number of defects allowed in each grade area was set, and it was determined whether or not this reference number was satisfied.
Based on the result, the grade of each sample was determined. The lowest grade value that satisfies the grade condition was taken as the grade of the inspection object.

Figure 2006038549
Figure 2006038549

本発明で使用する装置の例を示す図である。It is a figure which shows the example of the apparatus used by this invention. 本発明で使用する装置の他の例を示す図である。It is a figure which shows the other example of the apparatus used by this invention. 画像処理の例を説明する図である。It is a figure explaining the example of image processing. 実施例における等級領域に特徴点をプロットした図である。It is the figure which plotted the feature point in the grade area | region in an Example.

符号の説明Explanation of symbols

1 粉体画像測定装置
2 ラインセンサ
3 蛍光灯
4 拡散フィルム
5 透明ガラス板
6 1軸ステージ
7 画像処理装置



DESCRIPTION OF SYMBOLS 1 Powder image measuring apparatus 2 Line sensor 3 Fluorescent lamp 4 Diffusion film 5 Transparent glass plate 6 Single axis stage 7 Image processing apparatus



Claims (8)

検査対象物に存在する複数の特徴点に関してそれぞれ2種類の特徴量x、yを計測し、x、yを軸とする平面に複数の等級領域を設定し、該特徴点を該平面にプロットし、各等級領域内に含まれる特徴点の数または全特徴点に対する各等級領域内の特徴点の比率に基づいて検査対象物の等級を判定することを特徴とする等級判定方法。   Two types of feature quantities x and y are measured for a plurality of feature points existing on the inspection object, a plurality of grade areas are set on a plane with x and y as axes, and the feature points are plotted on the plane. A grade determination method characterized by determining the grade of an inspection object based on the number of feature points included in each grade area or the ratio of the feature points in each grade area to all feature points. 検査対象物を撮影して画像を取得し、検査対象物に存在する特徴点を画像処理によって抽出し、抽出された特徴点毎に2種類の特徴量を計測して行うことを特徴とする請求項1記載の等級判定方法。   An image is acquired by photographing an inspection object, feature points existing in the inspection object are extracted by image processing, and two types of feature amounts are measured for each extracted feature point. Item 1 grade evaluation method. 特徴点が検査対象物の欠陥領域であり、2種類の特徴量が欠陥領域の強度情報および形状情報であることを特徴とする請求項1または2記載の等級判定方法。   3. The method according to claim 1, wherein the feature point is a defect area of the inspection object, and the two kinds of feature amounts are intensity information and shape information of the defect area. 強度情報が、検査対象物の正常領域の平均明度と欠陥領域の明度との差または正常領域の平均色度と欠陥領域と色度との差であり、形状情報が、欠陥領域の大きさを表す量である請求項3記載の等級判定方法。   The intensity information is the difference between the average brightness of the normal area of the inspection object and the brightness of the defect area, or the difference between the average chromaticity of the normal area and the defect area and the chromaticity, and the shape information indicates the size of the defect area. 4. The method according to claim 3, wherein the grade is an amount to be expressed. 検査対象物が粉体であり、特徴点が正常粉体と色または濃淡の異なる粉体または異物である請求項1または2記載の等級判定方法。   3. The grade determination method according to claim 1, wherein the inspection object is a powder, and the characteristic point is a powder or a foreign substance having a color or shade different from that of a normal powder. 検査対象物がメチオニン粉体であり、特徴点が正常粉体と色または濃淡の異なる粉体または異物である請求項1、2または5記載の等級判定方法。   The grade determination method according to claim 1, 2 or 5, wherein the object to be inspected is methionine powder, and the characteristic point is a powder or foreign matter having a color or shade different from that of normal powder. 検査対象物がシート状またはフィルム状の製品であり、特徴点が正常領域と色または濃淡の異なる領域、異物、キズまたは気泡である請求項1または2記載の等級判定方法。   The grade determination method according to claim 1 or 2, wherein the inspection object is a sheet-like or film-like product, and the feature point is a region, a foreign matter, a flaw, or a bubble that is different in color or shade from the normal region. 検査対象物に存在する複数の特徴点に関してそれぞれ3種類の特徴量x、y、zを計測し、x、y、zを軸とする空間に複数の等級領域を設定し、該特徴点を該空間にプロットし、各等級領域内に含まれる特徴点の数または全特徴点に対する各等級領域内の特徴点の比率に基づいて検査対象物の等級を判定することを特徴とする等級判定方法。



Three types of feature quantities x, y, and z are measured for a plurality of feature points existing on the inspection object, a plurality of grade regions are set in a space with x, y, and z as axes, and the feature points are A grade determination method characterized by plotting in space and determining the grade of an inspection object based on the number of feature points included in each grade area or the ratio of feature points in each grade area to all feature points.



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