JP2006035853A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006035853A5 JP2006035853A5 JP2005179158A JP2005179158A JP2006035853A5 JP 2006035853 A5 JP2006035853 A5 JP 2006035853A5 JP 2005179158 A JP2005179158 A JP 2005179158A JP 2005179158 A JP2005179158 A JP 2005179158A JP 2006035853 A5 JP2006035853 A5 JP 2006035853A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- protective layer
- ink
- layer
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011241 protective layer Substances 0.000 claims 8
- 239000010410 layer Substances 0.000 claims 6
- 238000005338 heat storage Methods 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229920005992 thermoplastic resin Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005179158A JP4378322B2 (ja) | 2004-06-25 | 2005-06-20 | インクジェット記録ヘッドの製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004188890 | 2004-06-25 | ||
| JP2005179158A JP4378322B2 (ja) | 2004-06-25 | 2005-06-20 | インクジェット記録ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006035853A JP2006035853A (ja) | 2006-02-09 |
| JP2006035853A5 true JP2006035853A5 (enExample) | 2008-08-07 |
| JP4378322B2 JP4378322B2 (ja) | 2009-12-02 |
Family
ID=35901334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005179158A Expired - Fee Related JP4378322B2 (ja) | 2004-06-25 | 2005-06-20 | インクジェット記録ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4378322B2 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4898171B2 (ja) * | 2005-09-02 | 2012-03-14 | セイコーインスツル株式会社 | 発熱抵抗素子部品の製造方法、およびそれを用いた製造されたサーマルヘッドおよびプリンタ |
| US8241510B2 (en) * | 2007-01-22 | 2012-08-14 | Canon Kabushiki Kaisha | Inkjet recording head, method for producing same, and semiconductor device |
| JP4721465B2 (ja) * | 2008-08-28 | 2011-07-13 | キヤノン株式会社 | 記録ヘッド及び記録ヘッドの製造方法 |
| JP5701014B2 (ja) | 2010-11-05 | 2015-04-15 | キヤノン株式会社 | 吐出素子基板の製造方法 |
| JP7134831B2 (ja) * | 2018-10-17 | 2022-09-12 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
-
2005
- 2005-06-20 JP JP2005179158A patent/JP4378322B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2005178364A5 (enExample) | ||
| CN101557938A (zh) | 具有改进的腔室壁的液体喷射器 | |
| US8714711B2 (en) | Liquid recording head and method of manufacturing the same | |
| US8449783B2 (en) | Method of manufacturing liquid ejection head substrate | |
| JP2009132133A5 (enExample) | ||
| US8597529B2 (en) | Method for processing substrate and method for producing liquid ejection head and substrate for liquid ejection head | |
| JP2009012223A5 (enExample) | ||
| CN104487254A (zh) | 具有受控粘合剂结合部的流体喷射组件 | |
| KR20100027761A (ko) | 잉크 토출 장치 및 그 제조방법 | |
| JP2007230234A5 (enExample) | ||
| CN101376283A (zh) | 喷墨打印头和制造该喷墨打印头的方法 | |
| JP4594755B2 (ja) | インクジェットプリントヘッドを作製する方法 | |
| JP5043539B2 (ja) | 液体噴射記録ヘッドの製造方法 | |
| JP2005212486A5 (enExample) | ||
| JP2006035853A5 (enExample) | ||
| KR101301497B1 (ko) | 잉크젯 프린트헤드 및 그 제조방법 | |
| JP2008087410A5 (enExample) | ||
| CN108136776B (zh) | 流体喷射设备 | |
| JP5294657B2 (ja) | インクジェット記録ヘッド | |
| JP4378322B2 (ja) | インクジェット記録ヘッドの製造方法 | |
| JP2006130742A5 (enExample) | ||
| JPH05338168A (ja) | インクジェット記録ヘッド | |
| JP2007261169A (ja) | 液体噴射ヘッド | |
| US20070019039A1 (en) | Thermally driven inkjet printhead | |
| US6908564B2 (en) | Liquid discharge head and method of manufacturing the same |