JP2006035853A5 - - Google Patents
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- Publication number
- JP2006035853A5 JP2006035853A5 JP2005179158A JP2005179158A JP2006035853A5 JP 2006035853 A5 JP2006035853 A5 JP 2006035853A5 JP 2005179158 A JP2005179158 A JP 2005179158A JP 2005179158 A JP2005179158 A JP 2005179158A JP 2006035853 A5 JP2006035853 A5 JP 2006035853A5
- Authority
- JP
- Japan
- Prior art keywords
- forming
- protective layer
- ink
- layer
- heating element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011241 protective layer Substances 0.000 claims 8
- 239000010410 layer Substances 0.000 claims 6
- 238000005338 heat storage Methods 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 2
- 229910052581 Si3N4 Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 230000001681 protective effect Effects 0.000 claims 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229920005992 thermoplastic resin Polymers 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005179158A JP4378322B2 (ja) | 2004-06-25 | 2005-06-20 | インクジェット記録ヘッドの製造方法 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004188890 | 2004-06-25 | ||
| JP2005179158A JP4378322B2 (ja) | 2004-06-25 | 2005-06-20 | インクジェット記録ヘッドの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006035853A JP2006035853A (ja) | 2006-02-09 |
| JP2006035853A5 true JP2006035853A5 (enrdf_load_stackoverflow) | 2008-08-07 |
| JP4378322B2 JP4378322B2 (ja) | 2009-12-02 |
Family
ID=35901334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005179158A Expired - Fee Related JP4378322B2 (ja) | 2004-06-25 | 2005-06-20 | インクジェット記録ヘッドの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4378322B2 (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4898171B2 (ja) * | 2005-09-02 | 2012-03-14 | セイコーインスツル株式会社 | 発熱抵抗素子部品の製造方法、およびそれを用いた製造されたサーマルヘッドおよびプリンタ |
| US8241510B2 (en) * | 2007-01-22 | 2012-08-14 | Canon Kabushiki Kaisha | Inkjet recording head, method for producing same, and semiconductor device |
| JP4721465B2 (ja) * | 2008-08-28 | 2011-07-13 | キヤノン株式会社 | 記録ヘッド及び記録ヘッドの製造方法 |
| JP5701014B2 (ja) | 2010-11-05 | 2015-04-15 | キヤノン株式会社 | 吐出素子基板の製造方法 |
| JP7134831B2 (ja) * | 2018-10-17 | 2022-09-12 | キヤノン株式会社 | 液体吐出ヘッドの製造方法 |
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2005
- 2005-06-20 JP JP2005179158A patent/JP4378322B2/ja not_active Expired - Fee Related