JP2006032335A - Anisotropic conductive adhesion film - Google Patents

Anisotropic conductive adhesion film Download PDF

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JP2006032335A
JP2006032335A JP2005197477A JP2005197477A JP2006032335A JP 2006032335 A JP2006032335 A JP 2006032335A JP 2005197477 A JP2005197477 A JP 2005197477A JP 2005197477 A JP2005197477 A JP 2005197477A JP 2006032335 A JP2006032335 A JP 2006032335A
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conductive particles
film
adhesive
conductive
anisotropic conductive
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Hideji Kanota
秀司 叶多
Junji Shirogane
淳司 白金
Isao Tsukagoshi
功 塚越
Yukihisa Hirozawa
幸寿 廣澤
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Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an anisotropic conductive adhesion film capable of reducing the secondary coagulation of conductive particles with a small amount of additional particles and coping with a fine pitch while keeping conventional connection properties. <P>SOLUTION: The measurement ratio of the number of conductive particles a per unit area of the anisotropic conductive adhesion film and the number of conductive particles b after circuit connection (b/a×100) is 30% or more. It is preferable to carry out the measurement of the conductive particles by using an optical microscope in a scale factor of 200 times. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、電子部品と回路板や回路板同士を接着固定すると共に、両者の電極同士を電気的に接続する異方導電性接着フィルムに関する。   The present invention relates to an anisotropic conductive adhesive film that bonds and fixes an electronic component and a circuit board or circuit boards and electrically connects both electrodes.

異方導電性接着フィルムは、基板と基板の回路接続や基板回路と半導体チップとの電気的接続を行うために用いられ、例えば、液晶基板と駆動基板とをフラットケーブルにより電気的に接続するために用いられている。この異方導電性接着フィルムは、絶縁性接着剤と導電性粒子とからなり、導電性粒子は、高分子核体の表面が金属薄層により実質的に被覆してなる粒子或いは金属粒子、及び両者を混合した粒子である。この異方導電性接着フィルムの製造方法は、通常エポキシ樹脂等の絶縁性樹脂とカップリング剤、硬化剤、硬化促進剤および導電性粒子を混入・分散した接着剤ワニスをキャリアフィルム(セパレータ)上に塗布・乾燥して製される。さらに、この表面に導電性粒子を含まないワニスを塗布して複層化したものも使用されている。
特開平07−136556号公報 特開平02−230672号公報 特開昭60−184478号公報
The anisotropic conductive adhesive film is used to connect a circuit between a substrate and a circuit or an electrical connection between a substrate circuit and a semiconductor chip, for example, to electrically connect a liquid crystal substrate and a driving substrate with a flat cable. It is used for. The anisotropic conductive adhesive film comprises an insulating adhesive and conductive particles, and the conductive particles are particles or metal particles in which the surface of the polymer core is substantially covered with a thin metal layer, and The particles are a mixture of both. The manufacturing method of this anisotropic conductive adhesive film usually includes an insulating resin such as an epoxy resin, a coupling agent, a curing agent, a curing accelerator, and an adhesive varnish mixed and dispersed with conductive particles on a carrier film (separator). It is manufactured by applying and drying. Further, a varnish that does not contain conductive particles is applied to the surface to form a multilayer.
JP 07-136556 A Japanese Patent Laid-Open No. 02-230672 JP 60-184478 A

ところで、近年では、電子機器の発達に伴い、配線の高密度化や回路の高機能化が進んでおり、その結果として、接続回路の高精細化においても、接続電極間スペースが、従来では200μm程度であったものが、50μm以下のものが要求されるようになってきている。これに伴い、接続部材における接続においても、密度の高い接続回路に対応できることが要求されている。   By the way, in recent years, with the development of electronic devices, the density of wirings and the functions of circuits have been advanced. However, it has been demanded that the thickness is 50 μm or less. In connection with this, also in the connection in a connection member, it is requested | required that it can respond to a high-density connection circuit.

異方導電性接着フィルムを高分解能化するための基本的な考え方は、導電性粒子の粒径を隣接電極間の絶縁部分よりも小さくすることで、隣接電極間における絶縁性が確保され、併せて導電性粒子の含有量をこの粒子同士が接触しない程度とすることにより、接続部分における導通性が確実に得られるということである。ところが、従来の方法では、接着剤ワニス中に、微小径の導電性粒子を添加・分散させるので、この接着剤ワニスを混合・分散させてから、キャリアフィルムに塗布するまでの間に、途中で導電性粒子が沈降したり、あるいは電荷を帯びて導電性粒子の二次凝集が発生しやすく、隣接する電極間の絶縁性が保持できなくなり、また導電性粒子の含有量を減少すると、接続すべき回路上の導電性粒子数も減少することから接触点数が不足し、接続電極間での導通が得られなくなる。
また、接続配線の高密度化に伴って、接続電極の面積が小さくなるので、接続抵抗が増大するのを防止するために、導電性粒子の添加量を増加しなければならないが、あまり増加すると、異方導電性接着フィルムを介して基板と基板あるいは基板と半導体チップに圧力を加えて接続・固定するときに、接続電極間の導電性粒子が、絶縁性接着剤と共に接続電極と接続電極の間の空間に流動し、その結果、接続電極間に導電性粒子が多く集まるので、ますます、電極間の短絡する可能性が高くなる。したがって、長期信頼性を保ちながら接続部材を高分解能することは困難であった。
The basic idea for increasing the resolution of an anisotropic conductive adhesive film is to reduce the particle size of the conductive particles smaller than the insulating portion between adjacent electrodes, ensuring insulation between adjacent electrodes. Thus, by setting the content of the conductive particles to such an extent that the particles do not contact each other, the conductivity at the connection portion can be obtained with certainty. However, in the conventional method, conductive particles having a small diameter are added and dispersed in the adhesive varnish, so that the adhesive varnish is mixed and dispersed before it is applied to the carrier film. If the conductive particles settle or are charged and secondary aggregation of the conductive particles is likely to occur, insulation between adjacent electrodes cannot be maintained, and if the content of the conductive particles is reduced, the connection is established. Since the number of conductive particles on the power circuit also decreases, the number of contact points is insufficient, and conduction between the connection electrodes cannot be obtained.
In addition, as the connection wiring density is increased, the area of the connection electrode is reduced. Therefore, in order to prevent an increase in connection resistance, the amount of conductive particles added must be increased. When connecting / fixing the substrate and the substrate or the substrate and the semiconductor chip by applying pressure to the substrate and the semiconductor chip via the anisotropic conductive adhesive film, the conductive particles between the connection electrodes are bonded to the connection electrode and the connection electrode together with the insulating adhesive. As a result, a large amount of conductive particles gather between the connecting electrodes, so that the possibility of a short circuit between the electrodes becomes higher. Therefore, it has been difficult to increase the resolution of the connecting member while maintaining long-term reliability.

本発明は、接続時の導電性粒子流れを抑制し、少ない添加粒子量で導電性粒子の二次凝集を少なくし、かつ従来の接続特性を保持したまま、微細ピッチに対応できる異方導電性接着フィルムを提供することを目的とする。   The present invention suppresses the flow of conductive particles at the time of connection, reduces the secondary aggregation of the conductive particles with a small amount of added particles, and maintains the conventional connection characteristics, and is capable of supporting the fine pitch. An object is to provide an adhesive film.

本発明は、以下のような異方導電性接着フィルムを提供することにより、上記課題を解決するものである。
(1) 異方導電フィルムの単位面積当たりの導電粒子数aと、回路接続した後の導電粒子数bとの計測の比(b/a×100)が30%以上である異方導電性接着フィルム。
(2) 導電性粒子の計測が、200倍の光学顕微鏡を用いて行うものである上記(1)
に記載の異方導電性接着フィルム。
This invention solves the said subject by providing the following anisotropically conductive adhesive films.
(1) Anisotropic conductive adhesion in which the measurement ratio (b / a × 100) between the number of conductive particles a per unit area of the anisotropic conductive film and the number of conductive particles b after circuit connection is 30% or more the film.
(2) The above (1), wherein the conductive particles are measured using a 200 × optical microscope.
An anisotropic conductive adhesive film described in 1.

本発明に係る異方導電性接着フィルムは、回路接続時の導電性粒子流れが抑制されるので、添加導電性粒子量を少なくしても従来の接続特性を保持でき、かつ導電性粒子の二次凝集粒子径も小さくできるので、微細ピッチに対応でき、その工業的価値は大である。   Since the anisotropic conductive adhesive film according to the present invention suppresses the flow of conductive particles at the time of circuit connection, the conventional connection characteristics can be maintained even if the amount of the added conductive particles is reduced, and two conductive particles are used. Since the secondary agglomerated particle size can be reduced, it can be applied to fine pitches, and its industrial value is great.

以下、本発明を実施例に示した図面を参照にしながら説明するが、本発明はこれに限定されるものではない。
図1(a)〜(c)、図2は本発明による異方導電性接着フィルムの断面模式図である。セパレータ3上に形成した絶縁性接着剤2の表面層に導電性粒子1を散布し、その後、絶縁性接着剤の表面層に導電性粒子を埋め込み配置したものが図1(a)〜(c)に示すものである。導電性粒子の埋め込み具合は、絶縁性接着剤の種類によって異なるが、基本的には、絶縁性接着剤から導電性粒子が剥がれなければ問題はない。埋め込む有効距離は図2に示すように、図1の異方導電性接着フィルムに、絶縁性接着剤4を貼り合わせ導電性粒子を厚み方向の特定位置に配置して実験的に求めることができる。これらの導電性粒子の粒子径は、接続すべき回路の絶縁幅(スペース)よりも小さくすることが隣接回路との絶縁性を保持することから必要である。
Hereinafter, the present invention will be described with reference to the drawings shown in the embodiments, but the present invention is not limited thereto.
1 (a) to 1 (c) and FIG. 2 are cross-sectional schematic views of an anisotropic conductive adhesive film according to the present invention. 1 (a) to (c) in which conductive particles 1 are dispersed on the surface layer of the insulating adhesive 2 formed on the separator 3 and then the conductive particles are embedded in the surface layer of the insulating adhesive. ). The degree of embedding of the conductive particles varies depending on the type of the insulating adhesive, but basically there is no problem unless the conductive particles are peeled off from the insulating adhesive. As shown in FIG. 2, the effective distance for embedding can be obtained experimentally by attaching the insulating adhesive 4 to the anisotropic conductive adhesive film of FIG. 1 and placing the conductive particles at specific positions in the thickness direction. . It is necessary for the particle diameter of these conductive particles to be smaller than the insulation width (space) of the circuit to be connected, in order to maintain the insulation with the adjacent circuit.

剥離性フィルム基材上に形成した絶縁性接着剤層の表面層に均一配置する方法は、例えば、散布、磁場や帯電の利用、メッシュ孔への充填、スクリーン印刷の利用、表面張力の利用等があるが、導電性粒子を同一電荷に帯電させて散布する方式が好ましい。具体的には、エアチューブをエジェクタと接続し、エジェクタの吸い込み口に導電性粒子を落とし、エアの流れと共に散布させる方法が適用できる。   The method of uniformly arranging the surface layer of the insulating adhesive layer formed on the peelable film substrate is, for example, spraying, use of magnetic field or charging, filling of mesh holes, use of screen printing, use of surface tension, etc. However, a method in which conductive particles are charged with the same charge and dispersed is preferable. Specifically, a method in which an air tube is connected to an ejector, conductive particles are dropped into a suction port of the ejector, and dispersed together with an air flow can be applied.

導電性粒子を剥離性フィルム基材上に形成した絶縁性接着剤層の表面に配置された導電性粒子は、導電性粒子を配置した絶縁性接着剤の表面に、絶縁性接着剤に粘着しない表面を有するプラスチックフィルムを重ね、プレスやラミネート等により圧力を加えることによって、絶縁性接着剤の表面層に埋め込むことができる。さらに導電性粒子を埋め込む際に、絶縁性接着剤を加熱することが好ましい。加熱する温度としては、絶縁性接着剤が硬化しない程度であって、その後に行う基板と基板との接続時に必要なタック性、塑性変形性を残す程度に加熱することが好ましく、その他の時間や圧力の条件等と共に、絶縁性接着剤の種類によって、予め実験的に求めておくことができる。
接続する回路厚みが両方とも厚い場合には、導電性粒子を配置した絶縁性接着剤面に、さらに絶縁性接着剤を貼り合わせ、絶縁性接着剤の厚み方向の特定の位置に導電性粒子を配置させた多層の接着フィルムが好ましい。
The conductive particles arranged on the surface of the insulating adhesive layer in which the conductive particles are formed on the peelable film substrate do not stick to the insulating adhesive on the surface of the insulating adhesive on which the conductive particles are arranged. It is possible to embed in the surface layer of the insulating adhesive by overlapping the plastic film having the surface and applying pressure by pressing or laminating. Furthermore, it is preferable to heat the insulating adhesive when embedding the conductive particles. The heating temperature is such that the insulating adhesive is not cured, and is preferably heated to such an extent that the tackiness and plastic deformation necessary for the subsequent connection between the substrate and the substrate remain, and other times and It can be experimentally determined in advance depending on the type of the insulating adhesive together with the pressure condition and the like.
When both circuit thicknesses to be connected are thick, an insulating adhesive is further bonded to the insulating adhesive surface on which the conductive particles are arranged, and the conductive particles are placed at specific positions in the thickness direction of the insulating adhesive. An arranged multilayer adhesive film is preferred.

得られた異方導電性接着フィルムを用いて回路を接続する方法としては、例えば回路に接着フィルムを仮貼付した状態でセパレータを剥離し、その面に他の接続すべき回路を熱プレス、あるいは加熱ロール等で貼り付ければよい。図3はかかる方法により、回路を接続した状態を模式的に示したもので、熱と圧力によって接着剤2が軟化流動すると共に、高分子核体の表面を金属被覆した導電性粒子1も軟化変形し、相互に接触するので両回路5、5’間の導通接着が可能となる。   As a method of connecting a circuit using the obtained anisotropic conductive adhesive film, for example, the separator is peeled off in a state where the adhesive film is temporarily attached to the circuit, and another circuit to be connected is hot-pressed on the surface, or What is necessary is just to stick with a heating roll. FIG. 3 schematically shows a state in which circuits are connected by such a method. The adhesive 2 softens and flows due to heat and pressure, and the conductive particles 1 whose surface is coated with metal are also softened. Since they are deformed and contact each other, conductive bonding between both circuits 5, 5 'becomes possible.

本発明を用いる異方導電性接着フィルムは、絶縁性接着剤の表面層に導電性粒子を配置しているので、回路接続時の接着剤流れに導電性粒子は影響を受け難い。導電性粒子の移動が少ないので、効率良く回路接続ができる。回路接続時の効率がよくなるのと絶縁性接着剤の表面層のみへの配置により、導電性粒子含有量も少なくできるので、導電性粒子の二次凝集径も小さくなる。その結果、異方導電性接着フィルムの単位面積当たりの導電性粒子数aと、回路接続した後の導電粒子数bとの計測の比(b/a×100)を30%以上とすることができ、効率良く回路接続ができる。   In the anisotropic conductive adhesive film using the present invention, the conductive particles are arranged on the surface layer of the insulating adhesive, so that the conductive particles are not easily affected by the adhesive flow at the time of circuit connection. Since there is little movement of conductive particles, circuit connection can be made efficiently. Since the efficiency at the time of circuit connection is improved and the conductive particle content can be reduced by disposing the insulating adhesive only on the surface layer, the secondary aggregated diameter of the conductive particles is also reduced. As a result, the measurement ratio (b / a × 100) between the number of conductive particles a per unit area of the anisotropic conductive adhesive film and the number of conductive particles b after circuit connection may be 30% or more. Can be connected efficiently.

本発明を実施例によりさらに詳細に説明する。
高分子エポキシ樹脂であるフェノキシ樹脂PKHA(ユニオンカーバイド社製、商品名:40重量部)とマイクロカプセル型潜在製硬化剤を含有する液状エポキシ樹脂であるノバキュアHP−3942HP(旭化成工業株式会社製、商品名:100重量部)とを、重量比率30/70で、酢酸エチル30(重量)%となるように希釈し、接着剤ワニスを得た。この接着剤ワニスを、離型処理した50μmの二軸延伸ポリエチレンテレフタレート樹脂フィルム製のセパレータ上に流延・乾燥して、平均厚さ23μmのフィルムAと平均厚さ20μmのフィルムDと平均厚さ15μmのフィルムEと平均厚さ11μmのフィルムFと平均厚さ3μmのフィルムJと平均厚さ8μmのフィルムKと平均厚さ12μmのフィルムLを得た。
The invention is explained in more detail by means of examples.
Phenoxy resin PKHA (product name: 40 parts by weight), which is a polymer epoxy resin, and NovaCure HP-3942HP (product made by Asahi Kasei Kogyo Co., Ltd.), a liquid epoxy resin containing a microcapsule type latent curing agent Name: 100 parts by weight) was diluted at a weight ratio of 30/70 so as to be 30% (by weight) of ethyl acetate to obtain an adhesive varnish. This adhesive varnish was cast and dried on a separator made of a 50 μm biaxially stretched polyethylene terephthalate resin film that had been subjected to a release treatment, and an average thickness of 23 μm film A, an average thickness of 20 μm film D, and an average thickness. A film E having a thickness of 15 μm, a film F having an average thickness of 11 μm, a film J having an average thickness of 3 μm, a film K having an average thickness of 8 μm, and a film L having an average thickness of 12 μm were obtained.

平均直径5μmで、平均厚さ0.25μmのNi/Auめっき皮膜を有するプラスチック粒子を50g、容積0.1リットルの容器の中からエアエジェクタを通して流動化させて、エアチューブから圧力の0.5MPaで、フィルムA、D、E、F上にそれぞれ平均8000個/mmの割合で散布し、フィルムB、G、H、Iを得た。なお、このフィルムA、D、E、Fは0.6m/分の速度で移動させ、エアチューブはフィルムA、D、E、Fから10cmの高さのところに固定し、水平方向に散布した。このフィルムBに、離型処理した二軸延伸PET樹脂フィルム製セパレータの離型処理面と導電性粒子散布面を向かい合わせて重ね、温度50℃、圧力0.3MPa、速度2m/分の条件で、二本のラミネートロール間を通して、散布した導電性粒子を絶縁性接着剤の表面層に押し込んで固定させ、異方導電性接着フィルムCを得た。 A plastic particle having a Ni / Au plating film having an average diameter of 5 μm and an average thickness of 0.25 μm is fluidized through an air ejector from a container having a volume of 0.1 liter and a pressure of 0.5 MPa from the air tube. Then, the film A, D, E, and F were respectively sprayed at an average rate of 8000 pieces / mm 2 to obtain films B, G, H, and I. The films A, D, E, and F were moved at a speed of 0.6 m / min, and the air tube was fixed at a height of 10 cm from the films A, D, E, and F, and was sprayed in the horizontal direction. . On this film B, the release treatment surface of the separator made of a biaxially stretched PET resin film subjected to the release treatment and the conductive particle dispersion surface are overlapped face to face, under conditions of a temperature of 50 ° C., a pressure of 0.3 MPa, and a speed of 2 m / min. The anisotropically conductive adhesive film C was obtained by pressing and fixing the dispersed conductive particles through the two laminating rolls into the surface layer of the insulating adhesive.

この時、導電性粒子の埋め込みは、絶縁性接着剤より導電性粒子の脱落がない状態にした。同じラミネート条件でフィルムGとフィルムJ、フィルムHとフィルムK、フィルムIとフィルムLを貼り合わせフィルムM、N、Oを得た。ITOガラス基板に、この異方導電性接着フィルムCを100℃、2kg/cmで5秒間、加熱加圧して貼り付け、セパレータを剥がした後、50μm×90μmの金バンプを有するベアチップを位置合わせして、200℃、30kg/cmで20秒間、加熱加圧して回路接続をした。異方導電性接着フィルムCを200倍の光学顕微鏡で観察して、単位面積当たりの導電性粒子数aと回路接続した後のベアチップバンプ上の導電性粒子数bを計測した。フィルムM、N、OにおいてもフィルムCと同様の接続実験と計測を行った。この実験結果をもとに散布する粒子密度を決定し、その粒子密度で同様のフィルムC、M、N、Oを作製した。作製したフィルムを同条件で接続実験を行い、二次凝集状態の測定、相対峙する電極間の接続抵抗と隣接する電極間の接続抵抗をそれぞれ測定した。 At this time, the conductive particles were embedded so that the conductive particles did not fall off from the insulating adhesive. Film G and film J, film H and film K, film I and film L were bonded together under the same lamination conditions to obtain films M, N and O. This anisotropic conductive adhesive film C was applied to an ITO glass substrate by applying heat and pressure at 100 ° C. and 2 kg / cm 2 for 5 seconds, and after peeling off the separator, a bare chip having 50 μm × 90 μm gold bumps was aligned. Then, the circuit was connected by heating and pressing at 200 ° C. and 30 kg / cm 2 for 20 seconds. The anisotropic conductive adhesive film C was observed with a 200 × optical microscope, and the number of conductive particles b on the bare chip bump after circuit connection with the number of conductive particles a per unit area was measured. For the films M, N, and O, connection experiments and measurements similar to those for the film C were performed. Based on the experimental results, the particle density to be dispersed was determined, and similar films C, M, N, and O were produced at the particle density. A connection experiment was performed on the produced film under the same conditions, and the measurement of the secondary aggregation state and the connection resistance between opposed electrodes and the connection resistance between adjacent electrodes were measured.

従来例
実施例と同様の接着剤ワニスにより、セパレータ上に15μm厚さの導電性粒子なし絶縁性接着剤層4を作製した。また、同接着剤ワニス中に、実施例に用いたものと同じ導電性粒子(添加量9.5体積%)を分散させて、8μm厚さの導電性粒子入りの絶縁性接着剤層2を作製した。絶縁性接着剤層4と絶縁性接着剤層2を貼り合わせ、図4に示す2層構造の異方導電性接着フィルムを得た。この2層構造異方導電性接着フィルムを用いて、実施例と同様な接続と計測を実施した。
実施例と従来例の計測結果を表1に示す。
Conventional Example An insulating adhesive layer 4 having no conductive particles having a thickness of 15 μm was produced on a separator using the same adhesive varnish as in the example. In addition, the same conductive particles (added amount 9.5% by volume) as used in the examples were dispersed in the adhesive varnish to form an insulating adhesive layer 2 containing conductive particles having a thickness of 8 μm. Produced. The insulating adhesive layer 4 and the insulating adhesive layer 2 were bonded together to obtain an anisotropic conductive adhesive film having a two-layer structure shown in FIG. Using the two-layer anisotropic conductive adhesive film, the same connection and measurement as in the example were performed.
Table 1 shows the measurement results of the example and the conventional example.

Figure 2006032335
Figure 2006032335

この実施例においては、導電性粒子の配置を絶縁性接着剤の表層に極めて近い層だけに集中させ、回路接続時の粒子流れを少なくし、粒子捕捉率である(b/a×100)を30%以上とすることで、粒子密度を少なくできるので、添加導電性粒子量を減らせることがわかる。導電性粒子を絶縁性接着剤の表面から8μmまでが従来例より効果的な範囲で、二次凝集粒子径においてもこの範囲であれば、従来例より凝集粒子径を小さくすることができる。   In this example, the arrangement of the conductive particles is concentrated only on the layer very close to the surface layer of the insulating adhesive, the particle flow at the time of circuit connection is reduced, and the particle capture rate (b / a × 100) is set. It can be seen that by setting the content to 30% or more, the particle density can be reduced, so that the amount of added conductive particles can be reduced. If the conductive particles are within the effective range from the surface of the insulating adhesive to 8 μm than the conventional example, and the secondary aggregated particle size is also within this range, the aggregated particle size can be made smaller than that of the conventional example.

絶縁性接着剤の表面層に導電性粒子を配置した本発明を用いた異方導電性接着フィルムを示す断面模式図。(a)絶縁性接着剤の表面に導電性粒子がのっている状態。(b)絶縁性接着剤の表面層に導電性粒子の一部を埋め込んだ状態。(c)絶縁性接着剤の表面層に導電性粒子が埋まり込んだ状態。The cross-sectional schematic diagram which shows the anisotropic conductive adhesive film using this invention which has arrange | positioned electroconductive particle to the surface layer of an insulating adhesive agent. (A) A state in which conductive particles are on the surface of the insulating adhesive. (B) A state in which a part of the conductive particles is embedded in the surface layer of the insulating adhesive. (C) State where conductive particles are embedded in the surface layer of the insulating adhesive. 絶縁性接着剤の表面層に配置した導電性粒子に、絶縁性接着剤を貼り合わせた本発明を用いた異方導電性接着フィルムを示す断面模式図。The cross-sectional schematic diagram which shows the anisotropic conductive adhesive film using this invention which bonded the insulating adhesive to the electroconductive particle arrange | positioned at the surface layer of the insulating adhesive. 本発明を用いた異方導電性接着フィルムによる回路の接続状況を示す断面模式図。The cross-sectional schematic diagram which shows the connection condition of the circuit by the anisotropically conductive adhesive film using this invention. 従来例で用いた2層構造の異方導電性接着フィルムを示す断面模式図。The cross-sectional schematic diagram which shows the anisotropic conductive adhesive film of the 2 layer structure used by the prior art example.

符号の説明Explanation of symbols

1 導電性粒子 2 絶縁性接着剤
3 セパレータ(剥離性フィルム) 4 絶縁性接着剤
5 回路 5’回路
DESCRIPTION OF SYMBOLS 1 Conductive particle 2 Insulating adhesive 3 Separator (peelable film) 4 Insulating adhesive 5 Circuit 5 'circuit

Claims (2)

異方導電フィルムの単位面積当たりの導電粒子数aと、回路接続した後の導電粒子数bとの計測の比(b/a×100)が30%以上である異方。 An anisotropy in which the measurement ratio (b / a × 100) between the number of conductive particles a per unit area of the anisotropic conductive film and the number of conductive particles b after circuit connection is 30% or more. 導電性粒子の計測が、200倍の光学顕微鏡を用いて行うものである請求項1に記載の異方導電性接着フィルム。




































The anisotropic conductive adhesive film according to claim 1, wherein the conductive particles are measured using a 200 × optical microscope.




































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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2007125830A1 (en) * 2006-04-24 2009-09-10 日立化成工業株式会社 Adhesive tape
JP2011034966A (en) * 2009-07-31 2011-02-17 Denshi Buhin Kenkyuin Anisotropy particle arrangement, and manufacturing method thereof
US8158887B2 (en) 2007-07-26 2012-04-17 Sony Corporation Adhesive film, connecting method, and joined structure
CN103493297A (en) * 2011-04-12 2014-01-01 迪睿合电子材料有限公司 Anisotropic conductive film, connection method, and connected structure
US8796557B2 (en) 2007-06-27 2014-08-05 Dexerials Corporation Adhesive film, connecting method, and joined structure
US9155207B2 (en) 2007-09-20 2015-10-06 Dexerials Corporation Method for producing an anisotropic conductive film
CN110945720A (en) * 2017-08-23 2020-03-31 迪睿合株式会社 Anisotropic conductive film

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2007125830A1 (en) * 2006-04-24 2009-09-10 日立化成工業株式会社 Adhesive tape
JP4715847B2 (en) * 2006-04-24 2011-07-06 日立化成工業株式会社 Adhesive tape
US8796557B2 (en) 2007-06-27 2014-08-05 Dexerials Corporation Adhesive film, connecting method, and joined structure
US8158887B2 (en) 2007-07-26 2012-04-17 Sony Corporation Adhesive film, connecting method, and joined structure
US9155207B2 (en) 2007-09-20 2015-10-06 Dexerials Corporation Method for producing an anisotropic conductive film
JP2011034966A (en) * 2009-07-31 2011-02-17 Denshi Buhin Kenkyuin Anisotropy particle arrangement, and manufacturing method thereof
CN103493297A (en) * 2011-04-12 2014-01-01 迪睿合电子材料有限公司 Anisotropic conductive film, connection method, and connected structure
CN103493297B (en) * 2011-04-12 2016-01-13 迪睿合电子材料有限公司 Anisotropic conductive film, method of attachment and connection structural bodies
CN110945720A (en) * 2017-08-23 2020-03-31 迪睿合株式会社 Anisotropic conductive film
CN110945720B (en) * 2017-08-23 2021-11-30 迪睿合株式会社 Anisotropic conductive film

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