JP2006030283A - Method of correcting color filter and device thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a correction method and a correction device which are capable of correcting a color filter to be used in a display device with a high shape precision. <P>SOLUTION: In the correction method and the correction device which correct a defect occurring in a color layer demarcated by a light shielding layer and formed in a prescribed area on a transparent substrate by ink jet, a defective part is removed in a polygonal shape having sides parallel with side edges of the adjacent light shielding layer, and a coloring material of a prescribed color is injected from an ink jet head to fill the part from which the defect is removed. When the coloring material is injected to the part from which the defect is removed by ink jet, injection and drying are repeated to perform correction with a high shape precision. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a correction method and a correction device for a color filter used in a display device.

In recent years, the demand for liquid crystal display devices tends to increase not only as a display for personal computers but also as a screen for TVs due to their thinness and large screen. A liquid crystal display device uses a color filter in which a large number of colored layers colored in R (red), G (green), and B (blue) are arranged in stripes or lattices. Such a color filter can be produced by a PDCR (Pigment Dispersed Color Resist) method using a pigment dispersed color resist, an FMT (Filmed Mass Transfer) method in which a pigment dispersed color resist is coated as a film, a printing method, a resist method, or the like. There are dressing methods. (For example, Non-Patent Document 1)
With the increase in display screen size, improving the yield of color filters is indispensable for manufacturing liquid crystal display devices at low cost. However, conventional color filter manufacturing methods produce defect-free color filters. It is difficult to do. Therefore, proposals have been made to change defective products to non-defective products by correcting minute defects, especially when manufacturing large screen color filters, it is important to improve yield by correcting minute defects. It has become.

As such a correction method, a color filter layer in a pixel grid having a defect is substantially all of color elements removed, and a new color element is embedded in a blank grid (for example, Patent Document 1). ), A method of filling only the color loss portion by re-depositing the photosensitive colorant with color loss on the color filter and exposing it from the transparent substrate side. (For example, Patent Document 2)
However, the method of Patent Literature 1 requires a manual embedding operation after removing all the pixels, and has a problem that the embedding accuracy is poor and the operation takes time. Further, although the method of Patent Document 2 has good accuracy of embedding, it is necessary to deposit a colorant over a large area in order to correct a minute defect, and there is a problem that a lot of material is wasted.

As a method for solving the above-mentioned problem, a coloring agent is ejected by ink jet to color loss or color unevenness of a filter element, or (for example, Patent Document 3) Or a correction method in which foreign matter is removed by a laser and a coloring material is ejected to the removed portion by an ink jet method. (For example, Patent Document 4)
However, even in these methods, filling a minute pinhole with a coloring material by ink-jetting overflows the coloring material in a region other than the pinhole, creating a convex shape and forming a step on the color filter. There is a problem that the transparent electrode facing the transparent electrode is short-circuited, or the interval between the two transparent electrodes becomes non-uniform so that the orientation of the liquid crystal molecules is disturbed and color unevenness occurs. In addition, even when the foreign matter is removed with a laser and the part is corrected by ink jet, the colored material discharged by the ink jet is not uniformly embedded or removed depending on the shape and size of the foreign matter removed. Due to the non-uniformity of the wettability with the coloring material in the periphery of the region, there is a problem that the removed part cannot be corrected with high accuracy.
Yasushi Yamada: The latest color filter manufacturing technology for liquid crystal, Japan Society for Precision Engineering, Vol. 69, No7, 2003 JP-A-3-274504 JP-A-5-303014 Japanese Unexamined Patent Publication No. 3034438 Japanese Patent Laid-Open No. 11-271752

  As described above, the conventional color filter correction methods have problems such as poor material yield and inaccurate correction.

  The present invention removes a defective portion of a colored layer in a shape having a side parallel to the edge of an adjacent light shielding layer, can correct the removed portion with high accuracy, and improves the yield of a color filter. It is an object of the present invention to provide a method and apparatus for correcting a color filter capable of performing the above.

  The present invention has the following configuration.

  In a method for correcting a color filter in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate, the defective portion of the colored layer has a side parallel to the edge of the light shielding layer adjacent to the colored layer. It is removed in the shape region, and the region is filled with a coloring material of a color corresponding to the colored layer by being ejected by an ink jet head.

  By the above matters, the color filter can be corrected with high shape accuracy, and the yield can be improved.

  The present invention provides a method for correcting a color filter in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate, wherein a part of the defective portion of the colored layer is parallel to an edge of the adjacent light shielding layer. The first region having a side shape is removed, and the first region is filled with a coloring material of a color corresponding to the colored layer by being ejected by an ink jet head, and one of the first regions after the filling is filled. In the second region having a side parallel to the side of the adjacent light shielding layer, the remaining part of the defective portion is removed, and a coloring material having a color corresponding to the colored layer in the second region The step of discharging the ink by an ink jet head and filling it is repeated until the defective portion is almost eliminated.

  According to the present invention, since the removal and correction of the defective part are continuously repeated, even when the size of the defective part is large, it is possible to correct all the defective parts with high accuracy.

  The present invention provides a method for correcting a color filter in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate, wherein a part of the defective portion of the colored layer is parallel to an edge of the adjacent light shielding layer. The defect is removed in the first region having a shape having a side, spaced so as not to overlap the first region, and the defect in the second region having a side parallel to the edge of the adjacent light shielding layer. The step of removing the remaining part of the part is repeated until the defective part is eliminated, and the first region is filled with a coloring material of a color corresponding to the colored layer by an ink jet head, and the second region is The step of discharging and filling a coloring material of a color corresponding to the coloring layer by an ink jet head is repeated until the removed portion is almost eliminated.

  According to the present invention, since the removal of the defective portion is repeated and then the correction is repeated, even when the size of the defective portion is large, the correction can be made in a short time.

  In an embodiment of the present invention, the region is located substantially at the center of the adjacent light shielding layer edge.

  According to the embodiment, since the region for removing the defective part is located at the approximate center between the light shielding layers, the region for removing the defective part can be uniformly filled with the same color material, and the color unevenness can be reduced. It is possible to make no color filter modifications.

  According to an embodiment of the present invention, the region is substantially bilaterally symmetrical at the adjacent light shielding layer edge.

  According to the above-described embodiment, when the coloring material is ejected and embedded in the defect portion removing portion by ink jet, the defect removing portion spreads substantially symmetrically, so that the color filter can be corrected with good shape accuracy.

  In an embodiment of the present invention, when the coloring material is discharged and filled in the region by an ink jet head, it is repeatedly discharged in a plurality of times.

  According to the above-described embodiment, the color filter can be corrected with high shape accuracy because it is repeatedly ejected in a plurality of times.

  In an embodiment of the present invention, assuming that the volume of the removal portion is V, the coloring material discharged by the inkjet head first discharges an amount exceeding V, and then repeatedly discharges an amount not exceeding V.

  According to the above-described embodiment, the amount of the coloring material that exceeds the amount of V discharged at the beginning is sufficiently wet and spread inside the defect removal portion, and the amount of coloring material that does not exceed the amount of V that is discharged later is evenly spread. Is possible.

  In an embodiment of the present invention, the repeated discharge is repeated after a part of the coloring material previously discharged is dried.

According to the embodiment, the portion of the coloring material that first exceeds V is overflowed around the periphery of the defect-removed portion, and is dried earlier than the coloring material present in the defect-removing portion and subsequently discharged. Since the wettability with respect to the coloring material becomes small, the coloring material discharged afterwards does not overflow from the defect removing portion.

  In an embodiment of the invention, the drying is performed with an infrared lamp.

  According to the embodiment, the drying time can be easily shortened, and the time required for correction can be shortened.

  In an embodiment of the present invention, the drying is performed with warm air.

  According to the embodiment, the drying time can be easily shortened, and the time required for correction can be shortened.

  In an embodiment of the present invention, the drying is performed by irradiation with a semiconductor laser.

  According to the embodiment, the irradiation area can be reduced. That is, it becomes possible to dry only the necessary part by reducing the influence of heat on the uncorrected area, and it is possible to shorten the time required for correction.

  In an embodiment of the present invention, when the solid content% of the discharged coloring material is x, the total amount of the discharged coloring material is V / (x / 100) ± 50%.

  According to the embodiment, when the thickness of the color filter is t, the thickness of the colored layer in the corrected portion after correction is 0.5 × t to 1.5 × t, and does not short-circuit with the opposing transparent electrode. It is possible to correct the shape so that the alignment of the liquid crystal is not disturbed.

  In an embodiment of the present invention, the colored layer defect site is removed by excimer laser processing.

  According to the embodiment, the foreign matter and the colored layer in the defective part can be easily removed, and the transparent substrate existing under the colored layer is damaged by adjusting the laser power and irradiation area. Without giving, it is possible to remove the defect site to an arbitrary size.

  In an embodiment of the present invention, the colored layer defect site is removed by YAG laser processing.

  According to the embodiment, the foreign matter and the colored layer in the defective part can be easily removed, and the transparent substrate existing under the colored layer is damaged by adjusting the laser power and irradiation area. Without giving, it is possible to remove the defect site to an arbitrary size.

  The present invention is a color filter correction device in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate, the inkjet head discharging at least one color of the coloring material of the colored layer, and the inkjet head A control device for controlling the amount of the coloring material discharged from the surface, a removing means for removing a defective portion of the colored layer in a region having a side parallel to an adjacent light shielding layer edge, and the color filter. A stage that is fixed and moves relative to the ink-jet head; and a means for drying the coloring material discharged from the ink-jet head, and the removal means removes defective portions of the colored layer in the region. The region is filled with a coloring material having a color corresponding to the colored layer by being ejected by the inkjet head.

  According to the present invention, the color filter can be corrected with high shape accuracy, and the yield can be improved.

The present invention is a correction device for a color filter in which a colored material is formed by being partitioned by a light-shielding material that does not transmit light on a transparent substrate, the inkjet head discharging at least one color of the colored material, A control device for controlling the amount of the coloring material discharged from the ink jet head; a removing means for removing a defective portion of the colored layer in a region having a side parallel to an adjacent light shielding layer edge; and the color A stage for fixing the filter and moving relative to the inkjet head;
Means for drying the coloring material discharged from the ink jet head, the coloring material of a color corresponding to the colored layer is discharged and filled in the first region by the ink jet head, and the removing means In the second region including a part of the first region after filling, the remaining part of the defective portion is removed, and a coloring material having a color corresponding to the colored layer is discharged into the second shape by the ink jet head. And the step of filling is repeated until the defective portion is eliminated.

  According to the present invention, since the removal and correction of the defective part are continuously repeated, even when the size of the defective part is large, it is possible to correct all the defective parts with high accuracy.

  The present invention is a correction device for a color filter in which a colored material is formed by being partitioned by a light-shielding material that does not transmit light on a transparent substrate, the inkjet head discharging at least one color of the colored material, A control device for controlling the amount of the coloring material discharged from the ink jet head; a removing means for removing a defective portion of the colored layer in a region having a side parallel to an adjacent light shielding layer edge; and the color A stage for fixing the filter and moving relative to the inkjet head; and a means for drying the colored material discharged from the inkjet head, and the removing means removes a part of the defective portion of the colored layer. , Removed in the first region, and the remainder of the defect site is removed in the second region spaced so as not to overlap the first region The process is repeated until the defect portion is eliminated, and the first region is filled with a coloring material of a color corresponding to the colored layer by an ink jet head, and the second region corresponds to the colored layer. The step of discharging and filling the colored material by the ink jet head is repeated until the defective portion is almost eliminated.

  According to the present invention, since the removal of the defective portion is repeated and then the correction is repeated, even when the size of the defective portion is large, the correction can be made in a short time.

  In an embodiment of the present invention, the region is located substantially at the center of the adjacent light shielding layer edge.

According to the embodiment, since the region for removing the defective portion is located at the center of contact between the light shielding layers, the region for removing the defective portion can be uniformly filled with the same color material, and color unevenness can be prevented. It is possible to make no color filter modifications.

In an embodiment of the present invention, the region is substantially bilaterally symmetrical at the adjacent light shielding layer edge.

According to the above-described embodiment, when the coloring material is ejected and embedded in the defect portion removing portion by ink jet, the defect removing portion spreads substantially symmetrically, so that the color filter can be corrected with good shape accuracy.

  In an embodiment of the present invention, the means for drying is an infrared lamp.

  According to the embodiment, the drying time can be easily shortened, and the time required for correction can be shortened.

  In an embodiment of the present invention, the means for drying is an air heater.

  According to the embodiment, the drying time can be easily shortened, and the time required for correction can be shortened.

  In an embodiment of the present invention, the means for drying is a semiconductor laser.

  According to the embodiment, the irradiation area can be reduced. In other words, it is possible to reduce only the necessary part by reducing the influence of heat on the uncorrected area, and it is possible to shorten the time required for correction.

  In an embodiment of the present invention, the defect site removing means is excimer laser processing.

  According to the embodiment, it is possible to easily remove the colored layer of the foreign substance at the defect site, and damage the transparent substrate existing under the colored layer by adjusting the laser power or irradiation area. Without giving, it is possible to remove the defect site to an arbitrary size.

  According to an embodiment of the present invention, the defect portion removing means is YAG laser processing.

  According to the embodiment, the foreign matter and the colored layer in the defective part can be easily removed, and the transparent substrate existing under the colored layer is damaged by adjusting the laser power and irradiation area. Without giving, it is possible to remove the defect site to an arbitrary size.

  According to the color filter correction method and the correction device according to the present invention, defects in the color filter can be corrected with good shape accuracy, and the manufacturing yield of the color filter can be improved.

  Embodiments according to the present invention will be described in detail with reference to FIGS.

(Embodiment 1)
FIG. 1 shows a cross-sectional view (a) and a plan view (b) of a color filter according to the present invention. Here, a description will be given using a color filter manufactured by a PDCR (Pigment Dispersed Color Resist) method described in Non-Patent Document 1.

  FIG. 1A is a cross-sectional view taken along the line II ′ of FIG.

  In the color filter, a colored layer 2 of three colors R (red), G (green), and B (blue) is formed on a transparent substrate 1 in a predetermined region, and a black light shielding material is provided between the colors. A light shielding layer 3 that is a matrix (MB) is formed. The colored layer 2 is made of a resist in which a pigment is dispersed, and is patterned by a photolithography process. The thickness is about 1 to 2 μm, and the pixel width is about 50 to 200 μm. Then, the thickness is 1.5 μm and the width is 90 μm. For the light shielding layer 3, it is possible to use a resin in which carbon black, titanium black or the like is dispersed in addition to a metal film such as chromium or nickel. In the case of forming the light shielding layer 3 with a resin, a method of patterning a photosensitive resin by a photolithography process is used, and one having a thickness of about 1 to 2 μm and a width of about 50 to 70 μm is used.

  In the present embodiment, the light shielding layer 3 is formed of a resin in which carbon black is dispersed and has a thickness of 1 μm and a width of 30 μm.

  The transparent substrate 1 on which the colored layer 2 and the light shielding layer 3 are formed is provided with a protective film 4 as necessary, and a transparent conductive film 5 is formed on the protective film 4 to form the color filter 10. Become.

  As the protective film 4, a thermosetting or ultraviolet curable transparent resin, or an inorganic film formed by sputtering or vapor deposition may be used. The transparent electrode film 5 is made of ITO (Indium Tin Oxide) and is formed to a thickness of about 1500 mm by a sputtering method, a vapor deposition method or the like.

  FIG. 1B is a plan view of the color filter, showing a stripe arrangement. There are other color filter arrangements such as a mosaic arrangement, a delta arrangement, and a four-pixel arrangement, but since there is no difference in the application of the present invention, a stripe arrangement is used.

  FIG. 2 is a cross-sectional view (a) and a plan view (b) taken along line II ′ of a color filter having a color loss defect 11 in the R colored layer 2.

  Such color loss occurs due to poor adhesion between the color resist and the transparent substrate in the photolithography process for forming the colored layer 2, and light is transmitted through the color loss portion, so that the defective portion becomes a bright spot and displayed. Deteriorate quality. Defects that do not transmit light (black spots) have no problem in display quality if they are very small, but bright spots are serious defects even if they are very small. Correction of points is essential.

  Next, the process of removing a defective part by the correction apparatus 20 is demonstrated using FIG. 3, FIG.

  FIG. 3 shows a correction device for correcting a color filter according to the invention.

  FIG. 4 is a partially enlarged view of the color filter taken along the line II ′ of FIG. 4A and the plan view (b) from which the defective portion has been removed by the color filter correcting method.

  In FIG. 3, the color filter 13 that needs to be corrected is fixed to a substrate stage 21 that can move in the X and Y directions, and a portal-type mounting stage 25 provided so as to straddle the substrate stage 21 is provided. . The mounting stage 25 is provided with an inkjet head 22 capable of discharging three color materials, an infrared lamp 23, and a YAG laser irradiation means 24 for removing defective portions.

  The YAG laser irradiating means is coaxial and has a built-in optical system so that defects can be observed. However, a defect observation microscope may be provided separately. Further, the inkjet head 22, the infrared lamp 23, and the YAG laser irradiation means 24 can be independently moved in the Z direction, and can be attached to the attachment stage 25 so as to be movable in the X direction as necessary.

  The inkjet head 22, the infrared lamp 23, and the YAG laser irradiation means 24 are each controlled by a control device (not shown).

  First, as shown in FIG. 4, the defect portion 11 is removed by irradiating the YAG laser by the YAG irradiating means 24 so that all the color loss defect regions generated in the R colored layer 2 can be removed.

  In FIG. 4, the defective part 11 removed for the sake of explanation is indicated by a dotted line. Here, the irradiation position of the YAG laser is previously determined by the defect observation means of the correction apparatus (same as the YAG laser irradiation means in the present embodiment), and the specified defect position is determined as the substrate stage of the correction apparatus 20. It can be determined by sending it as position data to 21.

  As shown in FIG. 4, the irradiation region of the YAG laser is a quadrangular region 6 having a side parallel to the edge of the light shielding layer 3 adjacent to the defective colored layer 2 and between the adjacent light shielding layers 3. It is located substantially at the center and has a substantially symmetrical shape. The length of one side of the square-shaped region 6 may be determined as appropriate depending on the size of the defect, the volume of the coloring material discharged from the inkjet head 22, and the like. In order to successfully correct the color filter by the inkjet head 22. Requires 30 μm or more, more preferably 50 μm or more.

  For example, when the volume of the coloring material ejected by the inkjet 22 is 2 pl at the minimum, if the thickness of the colored layer is 1.5 μm, the volume of the part removed with a 36.5 μm square is 2 pl, and ejection is performed by the inkjet. 50 μm or more is suitable for containing the droplets to be removed in the square-shaped removed portion.

  In this embodiment, with respect to the pixel width of 90 μm, the removal site is removed with a square having a side of 80 μm at the center. In the present embodiment, since the thickness of the colored layer 2 is 1.5 μm, the volume of the removed part is 9.6 pl. In this embodiment, a YAG laser having a wavelength of 266 nm is used, and the irradiation power and irradiation time may be appropriately adjusted depending on the material and thickness of the colored layer to be removed.

  Next, a process of discharging a coloring material having the same color as that of the defective portion by the ink jet 22 will be described with reference to FIGS.

  FIG. 5 is a cross-sectional view of the color filter to be corrected by the ink jet 22 by the color filter correcting method.

  As shown in FIG. 5, a coloring material having the same color as that of the defective portion is discharged to the quadrangular region 6 by the inkjet head 22. The discharge position of the coloring material by the inkjet head 22 is determined by sending a defect position specified in advance as position data to the substrate stage 21 of the correction device 20.

  When the coloring material is discharged and filled in the region 6 by the inkjet head 22, it is repeatedly discharged in a plurality of times.

  At this time, if the volume of the square-shaped region 6 is V, the coloring material discharged by the inkjet head first discharges an amount exceeding V, and then repeatedly discharges an amount not exceeding V.

  In this embodiment, a piezoelectric ink jet head capable of ejecting a droplet having a size of 3.3 pl is used as the ink jet head 22, and the discharged coloring material has a solid content (volume% after dry curing). Is 15%. Three drops of the coloring material are continuously ejected to the rectangular region 6. Therefore, the volume of the discharged coloring material is 9.9 pl, which is larger than the internal volume of the rectangular shape, 9.6 pl.

  FIG. 6 is a plan view and II ′ cross-sectional view of the color filter after the ink has been ejected five times to the quadrangular region 6 by the inkjet head in the color filter correcting method.

  In the liquid state, the coloring material flows along a wall inside the quadrangular region 6 due to its surface tension, and overflows in a minute amount around the peripheral portion of the quadrangular region 6. The adjacent light-shielding layer 3 is made of a material different from that of the colored layer 2, so that the wettability of the liquid coloring material is different from that of the colored layer 2, but the quadrangular region 6 is the approximate center of the edge of the adjacent light-shielding layer 3. And is substantially bilaterally symmetrical at the edge of the adjacent light shielding layer 3, the distance until the colored material overflowing in the direction of the adjacent light shielding layer 3 reaches the light shielding layer 3 is equal, and in the direction of the light shielding layer 3. The overflow areas are equal.

  After a certain period of time until the appropriate three parts discharged at the beginning are dried, two drops are continuously discharged by the inkjet 22 again. This repeated discharge is performed after a part of the coloring material previously discharged is dried. The ejected ink is dried by an infrared lamp. In the present embodiment, the ejected ink is dried by using the infrared lamp 23, but may be dried by warm air by an air heater or a semiconductor laser.

  FIG. 7 is a cross-sectional view of the color filter after three drops of ink have been ejected by the inkjet head into the square-shaped region 6 by the color filter correcting method.

  The portion overflowing from the periphery of the quadrangular region 6 is dry, but is not completely dry inside the quadrangular region 6.

  FIG. 8 is a cross-sectional view of the color filter where three drops of ink have been ejected by ink jet heads into a square-shaped region 6 by the color filter correcting method, and then two drops have been ejected after partial drying.

  After three consecutive drops are ejected, the inside of the square-shaped area 6 is in a semi-dry gel shape, and the two drops subsequently ejected are accumulated inside the square-shaped area 6. Can do. That is, when repeating the ejection from the inkjet head 22, by repeating the ejection after a part of the previously ejected material is dried, the quadrilateral shape that has been removed is not greatly overflowed outside the quadrangular region 6. This region 6 can be filled with high shape accuracy.

  If the total amount of the coloring material to be discharged is V / (x / 100) ± 50% when the solid content% of the coloring material to be discharged is x, the optical characteristics of the corrected region after correction are obtained. There is no problem.

  In this embodiment, since the solid content of the coloring material is 15%, it suffices to discharge a total amount of 64 pl of coloring material. After first discharging three drops, drying and discharging two drops at a time are repeated five times. By repeating the drying and discharging one drop at a time six times, a total amount of 62.7 pl of colorant was discharged to fill the square-shaped region 6, but the total amount of the coloring material to be discharged was that of the rectangular-shaped region 6. The amount is ± 50% of the volume. Further, after forming the transparent conductive film, there is no short circuit with the opposing transparent electrode, and the alignment of the liquid crystal is not disturbed to cause color unevenness.

  In the present embodiment, a method for correcting color loss as a defect of a color filter has been described. However, even if the defect is a protrusion of a foreign substance or a light shielding layer or a mixed color of colors, it can be corrected by a similar method.

  In addition, the defect site is removed in a square shape, but it may be removed in accordance with the size of the defect. If the shape has a side parallel to the side edge of the adjacent light shielding layer, a hexagonal shape or A rectangular shape having an aspect ratio of 3 or less can also be suitably used.

  Further, in this embodiment, the defect is removed in a rectangular shape having a width of 80 μm with respect to the width of the pixel of 90 μm. However, the defect may be removed to 90 μm which is the full width of the pixel. It may be removed.

  In this embodiment, the YAG laser is used to remove the defective part, but an excimer laser can also be used suitably.

(Embodiment 2)
The correction process of the color filter according to the second embodiment of the present invention will be described with reference to FIGS.

  FIG. 9 is a plan view of a color filter having defects generated in the color filter.

  FIG. 10 is a plan view of the color filter from which the first region has been removed by the color filter correction method.

  FIG. 11 is a plan view of the color filter in which the first area is corrected in the middle of correction by the ink jet head by the correction method of the color filter.

  FIG. 12 is a plan view of the color filter in which the second area is removed after the first area is corrected in the middle of correction by the ink jet head by the correction method of the color filter.

  In the present embodiment, the size of the defect is large and the type of defect is different from that in the first embodiment. Moreover, it is the same as that of Embodiment 1 except repeating the removal of a defective part and the correction by an inkjet.

  In FIG. 9, the defect portion 12 is formed in the colored layer 2 so that the light shielding layer 3 protrudes from the original region. The defective portion 12 is formed when there is an exposure mistake in the photolithography process of the color resist when forming the colored layer 2 or the light shielding material when forming the light shielding layer 3.

  Normally, such a defect is a black spot through which light does not pass, and therefore has little effect on display quality. However, as shown in FIG. It becomes.

  If a large defect as shown in FIG. 9 is removed at one time, it is difficult to correct with high shape accuracy when correcting by inkjet. This is because it is difficult to uniformly spread the liquid ejected by the ink jet inside the hole having a long aspect ratio such as a rectangular shape. In particular, a shape with an aspect ratio exceeding 3 is difficult.

  In the present embodiment, a correction method for correcting a large defect having an aspect ratio exceeding 3 by repeating a small correction area will be described.

  The defective portion 12 shown in FIG. 9 is about 350 μm in the upward direction of the drawing and is a black spot having a size that adversely affects the display quality. In such a case, as shown in FIG. The same YAG laser means 24 is used to remove the first region 7 having a square shape with a side of 90 μm. The first region has a shape having a side parallel to the edge of the adjacent light shielding layer 3, and is set so as to be located substantially at the center between the adjacent light shielding layers 3 and to be substantially bilaterally symmetric. This is the same as in the first embodiment.

The removal area 7 as the first area is corrected by repeating discharge and drying of the coloring material by ink jet in the same procedure as the correction method shown in the first embodiment. (See Figure 11)
Subsequently, as shown in FIG. 12, the second region is a quadrangular region having the same size as the first region so as to partially overlap the region after the first region is filled with the coloring material. A region 8 is set, and removal is performed under the second region 8. Also in this case, as in the first embodiment, the quadrangular shape in the second region 8 is a shape having a side parallel to the edge of the adjacent light shielding layer 3, and the region 8 is also the shape of the adjacent light shielding layer 3. It is located at the approximate center between and is formed to be substantially symmetrical.

  In the present embodiment, the first region and the second region are overlapped by 5 μm.

  The modification of the second area is performed in the same procedure as the modification of the first area. By repeating such removal and correction until there is no defective part, all the defective parts are corrected.

  As described above, the color filter correction method shown in the present embodiment can correct a large defect that cannot be corrected with high accuracy by the conventional correction method.

  In the present embodiment, all the square shapes have the same size, but the size may be changed according to the shape of the defect. In addition, if the shape is a rectangular shape having an aspect ratio of 3 or less, the shape can be corrected with high accuracy by optimizing the discharge amount and the number of repetitions of the coloring material discharged from the inkjet head.

(Embodiment 3)
A color filter correction method according to a third embodiment of the present invention will be described with reference to FIG.

  FIG. 13 is a plan view of the color filter obtained by removing a part of the defective portion 12 of the colored layer 2 by the color filter correcting method.

  In the present embodiment, first, a part of the defective portion 12 of the colored layer 2 is removed in a first region having a shape having a side parallel to the side edge of the adjacent light shielding layer 3. Removing the remaining part of the defective part 12 in the second region having a side parallel to the edge of the adjacent light-shielding layer 3 with an interval so as not to overlap the first region. Since the method is the same as that of the second embodiment except for the method of repeating until the ink disappears, and thereafter the correction by the ink jet 22 is repeated, the detailed description is omitted.

In the present embodiment, as shown in FIG. 13, the defective portion 12 of the colored layer 2 is left and removed. At this time, a defect remains with a width of 5 μm between the regions to be removed. Further, since the vertical length of the defect portion 12 is about 350 μm, the removal regions 9 may be formed at four locations.

  The removed regions are sequentially filled with the coloring material by repeating the discharge and drying of the coloring material by the inkjet 22 in the same procedure as the correction method shown in the first embodiment, and all the four removed regions 9 are filled. Correct it. In this way, since the defective portion removing step and the ink jet 22 correcting step are performed separately in separate steps, even a large defect can be corrected in a short time.

  In the present embodiment, all the quadrangular shapes are the same size, but as long as the shape has a side parallel to the edge of the light shielding layer, the size may be changed according to the shape of the defective portion. Good. In addition, the shape for removing the defective portion was a quadrangle shape, but if the shape is a rectangle shape with an aspect ratio of 3 or less, the discharge amount and the number of repetitions of the coloring material discharged from the inkjet head should be optimized. Thus, the correction with high shape accuracy is possible as in the second embodiment.

  In this embodiment, the discharge of the coloring material by ink jet to the removal region is sequentially performed one by one. However, if the interval of the removal region and the interval of the discharge nozzles of the ink jet head 22 are matched in advance, the coloring material by the ink jet may be discharged. Discharging can be carried out collectively, and the correction time can be further shortened.

  In the present embodiment, a part of the defective portion 12 remains, but there is no problem in display quality because it becomes a black spot in a minute region.

Partial enlarged view of a cross section and a plane of the color filter according to the present invention. Partial enlarged view of cross section and plane showing defects in color filter The figure which showed the correction device of the color filter Partial enlarged view of the cross section showing the defective part removed by the color filter correction method Partial enlarged view of the cross section showing the correction by inkjet in the color filter correction method Partial enlarged view of a sectional view and a plan view showing an intermediate stage of correction by an ink jet head in a correction method of a color filter Partial enlarged view of the cross section showing the middle stage of correction by the inkjet head with the correction method of the color filter Partial enlarged view of the cross section after correcting the defective part of the color filter Partial enlarged view of a plane showing defects in the color filter Partial enlarged view of the plane showing a part of the defect removed by the color filter correction method Partial enlarged view of the plane showing the intermediate stage of correction by the inkjet head in the correction method of the color filter Partial enlarged view of the plane showing a part of the defective part removed in the middle of the correction by the inkjet head by the correction method of the color filter Partial enlarged view showing a part of the defective part removed by the color filter correction method

Explanation of symbols

1-transparent substrate 2-colored layer 3-light-shielding layer 4-protective film 5-transparent conductive film 6-rectangular region 7-first square shape 8-second square shape 10-color filter 11-color loss defect Part 12-Defect part due to protrusion of light shielding layer 13-Color filter having defect 20-Color filter correction device 21-Substrate stage 22-Inkjet head 23-Infrared lamp 24-YAG laser irradiation means 25-Mounting stage

Claims (24)

In a method for correcting a color filter in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate,
Removing the defective portion of the colored layer in a region having a side parallel to the edge of the light shielding layer adjacent to the colored layer;
A method for correcting a color filter, wherein the region is filled with a coloring material of a color corresponding to the coloring layer by being ejected by an ink jet head. In a method for correcting a color filter in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate,
Removing a part of the defective portion of the colored layer in a first region having a side parallel to the side edge of the adjacent light shielding layer;
The first region is filled with a coloring material having a color corresponding to the colored layer by being discharged by an inkjet head,
Removing the remainder of the defect site in a second region that includes a part of the first region after the filling and has a side parallel to a side edge of the adjacent light shielding layer;
A method of correcting a color filter, comprising repeating the step of filling the second region with a coloring material of a color corresponding to the coloring layer by an ink jet head until the defective portion is substantially eliminated. In a method for correcting a color filter in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate,
Removing a part of the defective portion of the colored layer in a first region having a side parallel to the side edge of the adjacent light shielding layer;
A step of removing the remainder of the defective portion in the second region having a side parallel to the edge of the adjacent light-shielding layer, spaced so as not to overlap the first region, Repeat until no more
The first region is filled with a coloring material having a color corresponding to the colored layer by being discharged by an inkjet head,
A method of correcting a color filter, comprising repeating the step of filling the second region with a coloring material of a color corresponding to the coloring layer by an ink jet head until the defective portion is substantially eliminated.   The method for correcting a color filter according to any one of claims 1 to 3, wherein the region is located substantially at the center of an adjacent light shielding layer edge.   The method for correcting a color filter according to claim 1, wherein the region is substantially symmetric with respect to adjacent light shielding layer edges.   The method for correcting a color filter according to any one of claims 1 to 3, wherein when the coloring material is discharged and filled in the region by an ink jet head, the coloring material is repeatedly discharged in a plurality of times.   7. The color material discharged by the inkjet head, when the volume of the region is V, first discharges an amount exceeding V, and then repeatedly discharges an amount not exceeding V. How to correct the color filter.   The color filter correction method according to claim 6, wherein the repeated discharge is performed after a part of the coloring material previously discharged is dried.   The method for correcting a color filter according to claim 8, wherein the drying is performed with an infrared lamp.   The color filter correction method according to claim 8, wherein the drying is performed with warm air.   The method for correcting a color filter according to claim 8, wherein the drying is performed by irradiation with a semiconductor laser.   8. The color according to claim 7, wherein a total amount of the discharged coloring material is V / (x / 100) ± 50%, where x is a solid content% of the discharged coloring material. How to modify the filter.   The method for correcting a color filter according to claim 1, wherein the removal of the defective portion of the colored layer is performed by excimer laser processing.   The method for correcting a color filter according to any one of claims 1 to 3, wherein the defective portion of the colored layer is removed by YAG laser processing. A color filter correction device in which a plurality of colored layers are partitioned by a light shielding layer on a transparent substrate,
An inkjet head that ejects at least one color of the coloring material of the colored layer;
A control device for controlling the amount of the coloring material discharged from the inkjet head;
Removing means for removing the defective portion of the colored layer in a region having a side parallel to an edge of the adjacent light shielding layer;
A stage that fixes the color filter and moves relative to the inkjet head;
Means for drying the coloring material discharged from the inkjet head,
A defect portion of the colored layer is removed in the region by the removing means, and a coloring material of a color corresponding to the colored layer is discharged and filled in the region by the inkjet head. Correction device. A color filter correction device in which a colored material is formed by being partitioned by a light shielding material that does not transmit light on a transparent substrate,
An inkjet head that ejects at least one color of the coloring material;
A control device for controlling the amount of the coloring material discharged from the inkjet head;
Removing means for removing the defective portion of the colored layer in a region having a side parallel to an edge of the adjacent light shielding layer;
A stage that fixes the color filter and moves relative to the inkjet head;
Means for drying the coloring material discharged from the inkjet head,
The removal means removes a part of the defective portion of the colored layer in the first region,
The first region is filled with a coloring material having a color corresponding to the colored layer by being discharged by an inkjet head,
The removal means removes the remaining part of the defective part in the second region including a part of the first region after the filling, and the coloring material of the color corresponding to the colored layer in the second shape The step of discharging by an inkjet head and filling,
An apparatus for correcting a color filter, which is repeated until the defective portion is eliminated. A color filter correction device in which a colored material is formed by being partitioned by a light shielding material that does not transmit light on a transparent substrate,
An inkjet head that ejects at least one color of the coloring material;
A control device for controlling the amount of the coloring material discharged from the inkjet head;
Removing means for removing the defective portion of the colored layer in a region having a side parallel to an edge of the adjacent light shielding layer;
A stage that fixes the color filter and moves relative to the inkjet head;
Means for drying the coloring material discharged from the inkjet head,
The removal means removes a part of the defective portion of the colored layer in the first region,
Repeating the step of removing the remainder of the defect site in the second region spaced so as not to overlap the first region until the defect site is removed,
The first region is filled with a coloring material having a color corresponding to the colored layer by being discharged by an inkjet head,
A color filter device characterized by repeating the step of filling the second region with a coloring material of a color corresponding to the coloring layer by an ink jet head until the defective portion is substantially eliminated.   The color filter correcting device according to any one of claims 15 to 17, wherein the region is located substantially at the center of an adjacent light shielding layer edge.   The color filter correcting device according to claim 15, wherein the region is substantially bilaterally symmetric at adjacent light shielding layer edges.   The color filter correcting apparatus according to claim 15, wherein the drying means is an infrared lamp.   The color filter correcting device according to claim 15, wherein the drying means is an air heater.   18. The color filter correcting device according to claim 15, wherein the drying means is a semiconductor laser.   The color filter correcting device according to claim 15, wherein the removal of the defective portion is performed by excimer laser processing.   The color filter correcting device according to claim 15, wherein the defect portion is removed by YAG laser processing.

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