JP2006017494A - Microscope observation method, microscope device, and image processing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a microscope observation method capable of providing an interference image without generating actual interference and also provide a microscope device, and an image processing device. <P>SOLUTION: The microscope observation method employs the microscope device that has an imaging optical system for imaging an inspected light flux ejected from an irradiated specimen and can measure a complex amplitude distribution of inspected light wave generated on an imaging surface of the imaging optical system. The microscope observation method comprises an inspected data acquisition procedure (S2) of acquiring data of the complex amplitude distribution of the inspected light wave, a reference data acquisition procedure (S1) of acquiring data of the complex amplitude distribution of reference light wave generated on the imaging surface when the specimen is removed from an optical path, and image creating procedures (S3, S4) of superimposing the data of the complex amplitude distribution of the inspected light wave on the data of the complex amplitude distribution of the reference light wave between the same coordinates, taking absolute value square of them, and creating image data of the interference figure of the specimen. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a microscope observation method for observing a test object such as an industrial part such as a semiconductor or a living body such as a biological cell with an optical microscope, a microscope apparatus applied thereto, and an image processing apparatus.

Among optical microscopes is an interference microscope. For example, a Milo interference microscope (see Non-Patent Document 1, etc.), which is one type of interference microscope, has a semi-transmission mirror placed between the objective lens and the test object, and between the objective lens and the semi-transmission mirror. The reflector is arranged in the.
In this Miro type interference microscope, an objective lens, a semi-transmission mirror, a test object, a semi-transmission mirror, a light beam (test light beam) that passes through the objective lens in turn, an objective lens, a semi-transmission mirror, a reflection mirror, a semi-transmission mirror, A light beam (reference light beam) sequentially passing through the objective lens interferes to form an interference image.

The light source of this interference microscope is a white light source, and the optical path length of the test light beam and the optical path length of the reference light beam are exactly matched in advance in the absence of the test object. Interference fringes occur only at points where the two match, and a specific color change appears near that point. Therefore, the distribution of elements in the test object is expressed by a color distribution.
Kei Komatsu, “Basics and Applications of Optical Microscope (4)”, Applied Physics, 1991, Vol. 60, No. 11, 1991, p1139-p1140

By the way, it is convenient if an observation image obtained by a normal microscope can be converted into an interference image by calculation without actually causing the above-described interference.
In this case, a configuration (optical element or special optical system) for causing interference is unnecessary, and the same timing state of the same specimen can be observed by both normal observation and interference observation. .

  Accordingly, an object of the present invention is to provide a microscope observation method, a microscope apparatus, and an image processing apparatus that can obtain an interference image without causing actual interference.

  The microscope observation method according to claim 1 includes an imaging optical system that forms an image of a test light beam emitted from an illuminated test object, and a test light wave that is generated on an imaging surface of the imaging optical system. A microscope observation method using a microscope apparatus capable of measuring the complex amplitude distribution of the test object, the test data acquisition procedure for acquiring the complex amplitude distribution data of the test light wave, and when the test object is removed from the optical path A reference data acquisition procedure for acquiring complex amplitude distribution data of a reference light wave generated on the imaging plane, and the complex amplitude distribution data of the test light wave and the complex amplitude distribution data of the reference light wave between the same coordinates. And an image creation procedure for creating an image of an interference image of the test object by superimposing and square the absolute value.

  The microscope observation method according to claim 2 is the microscope observation method according to claim 1, wherein the microscope apparatus includes an illuminating unit that illuminates the test object with pulsed light, and a test that is emitted from the test object. An imaging optical system that forms an image of a light beam, a detecting means that detects an electric field intensity distribution of a test light wave generated on an imaging surface of the imaging optical system, an emission timing of the pulsed light, and a timing of the detection Control means for detecting a time change of the intensity distribution within one light emission period and calculating a complex amplitude distribution of the test light wave based on the data of the time change.

The microscope observation method according to claim 3 is the microscope observation method according to claim 2, wherein the pulsed light is terahertz pulsed light.
The microscope observation method according to claim 4 is the microscope observation method according to any one of claims 1 to 3, wherein in the test data acquisition procedure, a complex amplitude of each wavelength component of the test light wave is used. In the reference data acquisition procedure, data of a complex amplitude distribution of each wavelength component of the reference light wave is acquired, and in the image creation procedure, the superposition and the square of the absolute value are obtained for each wavelength component. And generating spectral image data of the interference image.

The microscope observation method according to claim 5 is the microscope observation method according to claim 4, wherein in the image creation procedure, the spectral image data is converted into data for expressing the interference image as a single color image. It is characterized by doing.
A microscope apparatus according to a sixth aspect includes an illuminating unit that illuminates a test object with pulsed light, an imaging optical system that forms an image of a test light beam emitted from the test object, and a connection between the imaging optical system. Detection means for detecting the electric field intensity distribution of the test light wave generated on the image plane, and control of the emission timing of the pulsed light and the detection timing to detect temporal changes in the intensity distribution within one emission period. Control means for calculating a complex amplitude distribution of the test light wave based on the time change data, and the control means removes the data of the complex amplitude distribution of the test light wave and the test object from the optical path. Data of the complex amplitude distribution of the reference light wave generated on the imaging plane is obtained, and the complex amplitude distribution data of the test light wave and the complex amplitude distribution data of the reference light wave are overlapped between the same coordinates. Together, square the absolute value, Characterized by creating the image data of the interference image of the test object.

The microscope apparatus according to claim 7 is the microscope apparatus according to claim 6, wherein the pulsed light is terahertz pulsed light.
The microscope apparatus according to claim 8 is the microscope apparatus according to claim 6 or claim 7, wherein the control means includes data of a complex amplitude distribution of each wavelength component of the reference light wave, and each of the test light waves. The complex amplitude distribution data of the wavelength component is acquired, the superposition and the square of the absolute value are performed for each wavelength component, and spectral image data of the interference image is created.

The microscope apparatus according to claim 9 is the microscope apparatus according to claim 8, wherein the control unit converts the spectral image data into data for expressing the interference image as a single color image. Features.
The image processing apparatus according to claim 10 has an imaging optical system that forms an image of a test light beam emitted from an illuminated test object, and a test light wave that is generated on an imaging surface of the imaging optical system. An image processing apparatus applied to a microscope apparatus capable of measuring the complex amplitude distribution of the test object, wherein test data acquisition means for acquiring data of the complex amplitude distribution of the test light wave and the test object are removed from the optical path Reference data acquisition means for acquiring data of a complex amplitude distribution of a reference light wave that sometimes occurs on the imaging plane, and data of the complex amplitude distribution of the test light wave and the data of the complex amplitude distribution of the reference light wave at the same coordinate And an image creating means for creating an image of an interference image of the test object by superimposing them and squaring an absolute value.

  The image processing apparatus according to claim 11 is the image processing apparatus according to claim 10, wherein the microscope apparatus includes an illuminating unit that illuminates the test object with pulsed light, and a test emitted from the test object. An imaging optical system that forms an image of a light beam, a detecting means that detects an electric field intensity distribution of a test light wave generated on an imaging surface of the imaging optical system, an emission timing of the pulsed light, and a timing of the detection Control means for detecting a time change of the intensity distribution within one light emission period and calculating a complex amplitude distribution of the test light wave based on the data of the time change.

An image processing apparatus according to a twelfth aspect is the image processing apparatus according to the eleventh aspect, wherein the pulsed light is terahertz pulsed light.
The image processing device according to claim 13 is the image processing device according to any one of claims 10 to 12, wherein the test data acquisition unit includes a complex amplitude of each wavelength component of the test light wave. The distribution data is acquired, the reference data acquisition unit acquires complex amplitude distribution data of each wavelength component of the reference light wave, and the image generation unit calculates the superposition and the square of the absolute value for each wavelength component. And generating spectral image data of the interference image.

  The image processing device according to claim 14 is the image processing device according to claim 13, wherein the image creating unit converts the spectral image data into data for expressing the interference image as a single color image. It is characterized by doing.

  According to the present invention, a microscope observation method, a microscope apparatus, and an image processing apparatus that can obtain an interference image without causing actual interference are realized.

Embodiments of the present invention will be described below.
This embodiment is an embodiment of a microscope system and a microscope observation method using the system.
First, the configuration of this system will be described.
As shown in FIG. 1, the system includes a terahertz spectroscopic imaging apparatus (reference numerals 11 to 20), a computer 30, a display 40, and the like. The terahertz spectroscopic imaging apparatus corresponds to the microscope apparatus according to the claims, and the computer corresponds to the image processing apparatus according to the claims.

  The terahertz spectroscopic imaging apparatus includes a femtosecond pulse laser 11, a beam expander 12, a semiconductor substrate 13 serving as a terahertz light source, an imaging optical system 14 made of special plastic, an electro-optic crystal 15, a polarizing plate 16, a CCD camera 17, A delay device 18, a high voltage power source 19, a control circuit 20, and the like are provided. Reference numerals HM and M indicate half mirrors and mirrors, and reference numeral 1 indicates a test object. Details of the terahertz spectroscopic imaging apparatus are disclosed in, for example, Japanese Patent Laid-Open Nos. 2003-295104 and 2002-5828. Further, in FIG. 1, the delay device 18 is represented as if constituted by an optical system. However, another configuration of the delay device 18 having the same function may be used.

The computer 30 is preinstalled with a program necessary for realizing the present observation method (described later). Note that part or all of the processing of the control circuit 20 described below may be executed by the computer 30, and part or all of the processing of the computer 30 described below is executed by the control circuit 20. May be.
Next, the basic operation of this system will be described.

The femtosecond pulse laser 11 emits femtosecond pulse laser light at a timing instructed by the control circuit 20. This laser light becomes a light beam with a large diameter by the beam expander 12 and is branched into two by the half mirror HM.
One of the two branched laser beams passes through the mirror M and enters the semiconductor substrate 13 on which the electrodes are formed. A voltage is constantly applied to the electrodes by the power source 19, and discharge occurs between the electrodes at the moment when the laser beam is incident. This becomes a dipole and emits terahertz pulse light (terahertz pulse light). The terahertz pulse light illuminates the test object 1.

Light emitted from the test object 1 illuminated by the terahertz pulse light (which is terahertz pulse light) is imaged by the imaging optical system 14. An electro-optic crystal 15 is disposed on the image plane I. In the electro-optic crystal 15, the birefringence is modulated according to the electric field intensity distribution of the light wave generated on the imaging plane I.
On the other hand, the other bifurcated laser beam enters the electro-optic crystal 15 through the delay device 18, the mirror M, and the half mirror HM. The delay device 18 delays the timing at which the laser light enters the electro-optic crystal 15 by a time (delay time) instructed by the control circuit 20.

The polarization state of the laser light incident on the electro-optic crystal 15 is modulated by the birefringence distribution in the electro-optic crystal 15. The distribution of the polarization state of the laser light can be recognized as an image by the CCD camera 17 through the polarizing plate 16.
The CCD camera 17 takes an image at a timing instructed by the control circuit 20 and acquires image data. The image data indicates the electric field intensity distribution of the light wave of the terahertz light incident on the imaging plane I at the moment when the laser light is incident on the electro-optic crystal 15.

The control circuit 20 controls the emission timing of the femtosecond pulse laser 11, the delay time of the delay device 18, and the imaging timing of the CCD camera 17. The control circuit 20 performs light emission and imaging while shifting the delay time by a minute amount, and acquires image data (image data group) of the electric field intensity distribution of the light wave generated on the imaging plane I at each moment in the pulse emission period.
The image data group is taken into the computer 30 via the control circuit 20. The computer 30 performs a Fourier transform (temporal Fourier transform) on the time change of the electric field intensity distribution indicated by the image data group to obtain a complex amplitude distribution of each wavelength component of the light wave generated on the imaging plane I.

Next, this observation method will be described.
As shown in FIG. 2, the present observation method includes steps S1 to S5.
Step S1 does not need to be executed every time the specimen 1 is observed, and is executed by the manufacturer before shipping the system, for example. Step S2 and subsequent steps are executed every time the object 1 is observed. Hereinafter, these steps will be described in order.
(Step S1)
In step S1, as shown in FIG. 3A, the test object 1 is removed from the optical path. In this state, the light wave generated on the imaging plane I of the imaging optical system 14 is referred to as a reference light wave L _R.

In this state, the control circuit 20 acquires the image data groups X ₁ , X ₂ ,... (FIG. 3B). The computer 30 performs Fourier transform (time Fourier transform) on the time variation of the electric field intensity distribution indicated by the image data X ₁ , X ₂ ,... And data A ₁ (i, j), A _{2 of the} complex amplitude distribution. (I, j),..., A _n (i, j) are obtained and stored (FIG. 3 (c)).
These data A ₁ (i, j), A ₂ (i, j),..., A _n (i, j) indicate the complex amplitude distribution of each wavelength component of the reference light wave L _R.
(Step S2)
In step S2, as shown in FIG. 4A, the test object 1 is placed in the optical path. In this state, the light wave generated on the imaging plane I of the imaging optical system 14 is referred to as a test light wave L ₀ .

In this state, the control circuit 20 acquires the image data groups Y ₁ , Y ₂ ,... (FIG. 4B). The computer 30 performs Fourier transform (time Fourier transform) on the time variation of the electric field intensity distribution indicated by the image data Y ₁ , Y ₂ ,... And data B ₁ (i, j), B _{2 of the} complex amplitude distribution. (I, j),... B _n (i, j) is obtained (FIG. 4C).
These data B ₁ (i, j), B ₂ (i, j),... B _n (i, j) indicate the complex amplitude distribution of each wavelength component of the test light beam L ₀ .
(Step S3)
The computer 30 takes the sum or difference of the values of the same pixels of the data A ₁ (i, j) and the data B ₁ (i, j) (FIG. 5 (a)), and obtains data consisting of the sum or difference. Let C ₁ (i, j).

Similarly, computer 30, data _{A 2 (i, j),} ···, A n (i, j) respectively and the data B ₂ of (i, j), ···, B n (i, j) of taking the sum or difference of values between the same pixel with each place data comprising a sum or difference, respectively _{C 2 (i, j),} ···, C n (i, j) and.
When the processing of these computers 30 is expressed as an equation, the following equation (1) is obtained.

このように、データＡ_k（ｉ，ｊ）とデータＢ_k（ｉ，ｊ）との同一ピクセル同士の値の差又は和をとることは、参照光束Ｌ_Rと被検光束Ｌ₀とを演算上で干渉させることを意味する。

Thus, taking the difference or sum of the values of the same pixels in the data A _k (i, j) and the data B _k (i, j) calculates the reference light beam L _R and the test light beam L _0. It means to interfere on.

Therefore, the data C _k (i, j) represents a complex amplitude distribution of a virtual interference light wave by the reference light beam L _R and the test light beam L ₀ . Each data C ₁ (i, j), C ₂ (i, j),..., C _n (i, j) represents each wavelength component of the virtual interference light wave.
(Step S4)
The computer 30 takes the absolute value square of the value of each pixel of the data C ₁ (i, j) (FIG. 5B), and sets the data consisting of the square of the absolute value as I ₁ (i, j).

Similarly, the computer 30 takes the absolute value square of the value of each pixel of the data C ₂ (i, j),..., C _n (i, j), and sets the data consisting of the square of the absolute value to I ₂ (i, j),..., I _n (i, j).
Thus, taking the square of the absolute value of each pixel value of the data C ₁ (i, j) means obtaining an image (interference image) of the test object 1 by a virtual interference light wave.

Therefore, the data I _k (i, j) indicates the intensity distribution of the interference image. Each data I ₁ (i, j), I ₂ (i, j),..., I _n (i, j) represents each wavelength component (each spectral image) of the interference image.
FIG. 6A shows the concept of the data I ₁ (i, j), I ₂ (i, j),..., I _n (i, j) of each spectral image.
(Step S5)
Computer 30, the data I ₁ of each spectral image _{(i, j), I 2} (i, j), ···, I n (i, j) value I ₁ of a certain pixel, I _2, · · .., I _n (FIG. 6B) are individually multiplied by appropriate weighting factors r ₁ , r ₂ ,..., R _n (FIG. 6C) to obtain a sum, and the sum is obtained as data. A value of the same pixel of R (i, j) is selected. This selection is performed in the same manner for each pixel to complete the data R (i, j).

Further, computer 30, data I ₁ of each spectral image _{(i, j), I 2} (i, j), ···, I n (i, j) value of a certain pixel of I _1, I _2, .., I _n (FIG. 6B) are individually multiplied by appropriate weighting factors g ₁ , g ₂ ,..., G _n (FIG. 6D) to obtain a sum, Is selected as the value of the same pixel in the data G (i, j). This selection is performed in the same manner for each pixel to complete the data G (i, j).

Further, computer 30, data I ₁ of each spectral image _{(i, j), I 2} (i, j), ···, I n (i, j) value of a certain pixel of I _1, I _2, .., I _n (FIG. 6B) are individually multiplied by appropriate weighting factors b ₁ , b ₂ ,..., B _n (FIG. 6E) to obtain a sum, Is selected as the value of the same pixel in the data B (i, j). This selection is performed in the same manner for each pixel to complete the data B (i, j).

  When the processing of these computers 30 is expressed as an equation, the following equation (2) is obtained.

完成したデータＲ（ｉ，ｊ），Ｇ（ｉ，ｊ），Ｂ（ｉ，ｊ）の概念を図にしたのが、図６（ａ’）である。これらのデータＲ（ｉ，ｊ），Ｇ（ｉ，ｊ），Ｂ（ｉ，ｊ）は、図６（ａ）に示した各分光画像のデータＩ₁（ｉ，ｊ），Ｉ₂（ｉ，ｊ），・・・，Ｉ_n（ｉ，ｊ）を、１枚のカラー画像で表現するためのデータである。

FIG. 6 (a ′) illustrates the concept of completed data R (i, j), G (i, j), and B (i, j). These data R (i, j), G (i, j), B (i, j) are the data I ₁ (i, j), I ₂ (i) of each spectral image shown in FIG. , J),..., I _n (i, j) is data for expressing with one color image.

The computer 30 sends the data R (i, j), G (i, j), and B (i, j) to the display 40. The display 40 displays an image based on the data R (i, j), G (i, j), and B (i, j). An interference image of the test object 1 is displayed on the display 40 (see FIG. 1).
Incidentally, the curves of the weight coefficients r _k , g _k , and b _k shown in FIGS. 6C, 6D, and 6E are curves of color matching functions of a general RGB color system as shown in FIG. Has the same shape.

Next, the effect of this observation method will be described.
In this observation method, data B ₁ (i, j), B ₂ (i, j),..., B _n (i, j) of the complex amplitude distribution of the test light wave L ₀ are obtained and referred to. Superimposed on the data A ₁ (i, j), A ₂ (i, j),..., A _n (i, j) of the complex amplitude distribution of the light wave L _R , takes the absolute value square.
By this calculation, data I ₁ (i, j), I ₂ (i, j),..., I _n (i, j) of each spectral image of the interference image by the test light wave L ₀ and the reference light wave L _R. ) Is obtained.

Therefore, in this system, it is possible to observe an interference image of the test object 1 even though no interference is actually generated.
In this observation method, the spectral image data I ₁ (i, j), I ₂ (i, j),..., I _n (i, j) are represented by a single color image. Since the data R (i, j), G (i, j), and B (i, j) are converted, the interference image on the display 40 is a color distribution in which the distribution of elements in the test object 1 can be seen with the eyes. It is expressed by

Incidentally, in this observation method, because a terahertz spectral imaging device is used, the data I ₁ of the spectral image _{(i, j), I 2} (i, j), ···, n (i, j) represents What is shown is an interference image in the terahertz region.
However, in this observation method, the data I ₁ (i, j), I ₂ (i, j),..., I _n (i, j) of these spectral images are converted into data R (i, j), G ( When converting to i, j), B (i, j), the weighting coefficients r _k , g _k , b _k that draw the same curve as the curve of the color matching function (see FIG. 7) are used. The interference image is colored with a tendency similar to an interference image obtained by a conventional interference microscope (that is, an interference image in the visible light region).

In this observation method, step S1 is executed before shipment of the system, but may be executed after shipment. For example, it may be executed each time the specimen 1 is observed or whenever the measurement conditions or environment of the present system changes.
Data A ₁ of the thus reference light wave _{L R (i, j),} A 2 (i, j), ···, A n (i, j) if frequently updated, reference light wave L _R data A ₁ (i, j), A ₂ (i, j),..., A _n (i, j) state of the system and data B ₁ (i, j) of the test light wave L ₀ ), B ₂ (i, j),..., B _n (i, j) are close to the state of the system, so that an interference image calculation error (spectral image data I ₁ (i, j ), I ₂ (i, j),..., I _n (i, j)) can be kept small. Therefore, the observation accuracy is increased.

Further, in the present observation method, data of the reference optical wave L _R was measured (see step S1), it may be calculated by simulation (based on optical design data of the system). However, the observation accuracy increases when the measurement is performed.
Further, in this observation method, only one type of interference image is acquired for the same specimen 1, but interference conditions (such as the intensity ratio between the reference light wave and the test light wave) are calculated for the same specimen 1. Two or more types of interference images may be acquired by changing the above. According to the calculation, it is possible to easily obtain two or more types of interference images with different interference conditions. It is also easy to obtain a large number of interference images.

Further, according to the calculation, only the interference condition can be changed, so that the state of the same test object 1 at the same timing can be observed under two or more types of interference conditions. This is impossible in principle with an interference microscope that actually causes interference.
In this observation method, a terahertz spectroscopic imaging apparatus using terahertz region light as illumination light is used as a microscope apparatus. Also good.

  Further, in this system, a non-scanning microscope apparatus that collects image data of the electric field intensity distribution on the imaging plane I is applied, but scanning that acquires image data of the electric field intensity distribution point by point. A type of microscope device can also be applied.

It is a block diagram of this system. It is a flowchart of this observation method. It is a figure explaining step S1. It is a figure explaining step S2. It is a figure explaining step S3, S4. It is a figure explaining step S5. It is a graph of a color matching function of the RGB color system.

Explanation of symbols

1 Test object,
11 femtosecond pulse laser,
12 beam expander,
13 Semiconductor substrate,
14 imaging optical system,
15 electro-optic crystal,
16 Polarizing plate,
17 CCD camera,
18 delay device,
19 High voltage power supply,
20 control circuit,
HM half mirror,
M mirror,
I Imaging surface

Claims (14)

A microscope apparatus having an imaging optical system that forms an image of a test light beam emitted from an illuminated test object and capable of measuring a complex amplitude distribution of a test light wave generated on an imaging surface of the imaging optical system. A microscope observation method used,
A test data acquisition procedure for acquiring data of a complex amplitude distribution of the test light wave;
A reference data acquisition procedure for acquiring data of a complex amplitude distribution of a reference light wave generated in the imaging plane when the test object is removed from the optical path;
Image creation procedure for creating image data of an interference image of the test object by superimposing the complex amplitude distribution data of the test light wave and the data of the complex amplitude distribution of the reference light wave between the same coordinates and squaring the absolute value A microscope observation method comprising: and. In the microscope observation method according to claim 1,
The microscope apparatus is
Illuminating means for illuminating the test object with pulsed light;
An imaging optical system that forms an image of a test light beam emitted from the test object;
Detecting means for detecting an electric field intensity distribution of a test light wave generated on an imaging surface of the imaging optical system;
By controlling the emission timing of the pulsed light and the detection timing to detect a temporal change in the intensity distribution within one emission period, the complex amplitude distribution of the test light wave is calculated based on the data of the temporal change. And a control means. The microscope observation method according to claim 2,
The pulsed light is
A microscope observation method characterized by being terahertz pulse light. In the microscope observation method according to any one of claims 1 to 3,
In the test data acquisition procedure,
Acquire data of complex amplitude distribution of each wavelength component of the test light wave,
In the reference data acquisition procedure,
Obtaining data of a complex amplitude distribution of each wavelength component of the reference light wave;
In the image creation procedure,
A method for observing a microscope, wherein the superposition and the square of the absolute value are performed for each wavelength component to generate spectral image data of the interference image. The microscope observation method according to claim 4,
In the image creation procedure,
A microscope observation method, comprising: converting the spectral image data into data for expressing the interference image as a single color image. Illuminating means for illuminating the test object with pulsed light;
An imaging optical system that forms an image of a test light beam emitted from the test object;
Detecting means for detecting an electric field intensity distribution of a test light wave generated on an imaging surface of the imaging optical system;
By controlling the emission timing of the pulsed light and the detection timing to detect a temporal change in the intensity distribution within one emission period, the complex amplitude distribution of the test light wave is calculated based on the data of the temporal change. Control means,
The control means includes
Data of the complex amplitude distribution of the test light wave, and data of the complex amplitude distribution of the reference light wave generated on the imaging plane when the test object is removed from the optical path,
The data of the complex amplitude distribution of the test light wave and the data of the complex amplitude distribution of the reference light wave are superimposed between the same coordinates and squared with an absolute value to create image data of an interference image of the test object. Microscope device. The microscope apparatus according to claim 6, wherein
The pulsed light is
A microscope apparatus characterized by being terahertz pulsed light. The microscope apparatus according to claim 6 or 7,
The control means includes
Data of complex amplitude distribution of each wavelength component of the reference light wave, and data of complex amplitude distribution of each wavelength component of the test light wave,
The superposition and the square of the absolute value are performed for each wavelength component, and spectral image data of the interference image is created. The microscope apparatus according to claim 8, wherein
The control means includes
The microscope apparatus, wherein the spectral image data is converted into data for expressing the interference image as a single color image. A microscope apparatus having an imaging optical system that forms an image of a test light beam emitted from an illuminated test object and capable of measuring the complex amplitude distribution of the test light wave generated on the imaging surface of the imaging optical system An image processing apparatus to be applied,
Test data acquisition means for acquiring data of a complex amplitude distribution of the test light wave;
Reference data acquisition means for acquiring data of a complex amplitude distribution of a reference light wave generated on the imaging plane when the test object is removed from the optical path;
Image creation means for creating the image data of the interference image of the test object by superimposing the complex amplitude distribution data of the test light wave and the data of the complex amplitude distribution of the reference light wave between the same coordinates and squaring the absolute value An image processing apparatus comprising: The image processing apparatus according to claim 10.
The microscope apparatus is
Illuminating means for illuminating the test object with pulsed light;
An imaging optical system that forms an image of a test light beam emitted from the test object;
Detecting means for detecting an electric field intensity distribution of a test light wave generated on an imaging surface of the imaging optical system;
By controlling the emission timing of the pulsed light and the detection timing to detect a temporal change in the intensity distribution within one emission period, the complex amplitude distribution of the test light wave is calculated based on the data of the temporal change. An image processing apparatus comprising: a control unit. The image processing apparatus according to claim 11.
The pulsed light is
An image processing apparatus characterized by being terahertz pulsed light. The image processing apparatus according to any one of claims 10 to 12,
The test data acquisition means includes
Acquire data of complex amplitude distribution of each wavelength component of the test light wave,
The reference data acquisition means includes
Obtaining data of a complex amplitude distribution of each wavelength component of the reference light wave;
The image creating means includes
The superposition and the square of the absolute value are performed for each wavelength component, and spectral image data of the interference image is created. The image processing apparatus according to claim 13.
The image creating means includes
An image processing apparatus that converts the spectral image data into data for expressing the interference image as a single color image.

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