JP2006013109A - Organic semiconductor element - Google Patents

Organic semiconductor element Download PDF

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JP2006013109A
JP2006013109A JP2004187565A JP2004187565A JP2006013109A JP 2006013109 A JP2006013109 A JP 2006013109A JP 2004187565 A JP2004187565 A JP 2004187565A JP 2004187565 A JP2004187565 A JP 2004187565A JP 2006013109 A JP2006013109 A JP 2006013109A
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organic semiconductor
light
substrate
polycarbonate
layer
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Yoshinobu Nakayama
義宣 中山
Zenichi Akiyama
善一 秋山
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Ricoh Co Ltd
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Ricoh Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an organic semiconductor element technology which can prevent deterioration of an organic semiconductor layer with irradiation of light for a longer period of time and can also prevent, for a short period of time, behavior of change in the light irradiated as an unstable factor of the operation of an organic semiconductor element or a kind of noise. <P>SOLUTION: After an insulating film 212b is provided on a polycarbonate substrate 201 to which a carbon black is mixed in the 12 weight%, a cathode electrode 202 is formed and an organic semiconductor material 204 is formed thereon with vacuum evaporation or the like. Thereafter, an anode electrode 203 is formed on this organic semiconductor material 204. A polycarbonate is used in common as an electric insulating layer to the substrate material, and a light shielding layer is manufactured by coating a material in which a carbon black is mixed in about 12 weight% as a filler to the raw material (211a) of polycarbonate, to the rear surface side. An insulating film 212b may be provided between the organic semiconductor material, electrode and the light shielding polycarbonate, and moreover it is also possible to use the insulation property of the polycarbonate material of the substrate material. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、有機半導体材料を用いた半導体素子、電界効果トランジスタ、あるいはスイッチ素子などにおける遮光性保護膜に関し、特に印刷技術を主体として作製できる有機半導体スイッチング素子、MOS−TFTなどの有機半導体素子に関する。本発明に係る有機半導体素子は、有機ELディスプレイ、液晶ディスプレイなどの駆動素子などに応用可能である。   The present invention relates to a light-shielding protective film in a semiconductor element, a field effect transistor, or a switch element using an organic semiconductor material, and more particularly to an organic semiconductor switching element, an organic semiconductor element such as a MOS-TFT, which can be manufactured mainly using printing technology. . The organic semiconductor element according to the present invention can be applied to driving elements such as an organic EL display and a liquid crystal display.

従来、保護膜の一般的な応用として、例えばガスや湿気などに対して食品の品質低下を防ぐものなど多数提案されている。   Conventionally, as a general application of a protective film, for example, many have been proposed that prevent deterioration of food quality against gas or moisture.

有機半導体素子自体についての文献は多数あるが、有機半導体素子の光に対する保護膜(遮光用保護膜)に関してはあまりなく、特開平8−116109号公報「有機薄膜スイッチング・メモリー複合素子の製造方法および有機薄膜スイッチング・メモリー複合素子」平成6年10月14日出願、出願人:松下技研株式会社(特許文献1)が見うけられる程度である。   There are many documents on the organic semiconductor element itself, but there is not much about a protective film against light (protective film for light shielding) of the organic semiconductor element, and Japanese Patent Application Laid-Open No. 8-116109 “Manufacturing method of organic thin film switching memory combined element and “Organic thin film switching / memory composite device” filed on October 14, 1994, applicant: Matsushita Giken Co., Ltd. (Patent Document 1).

特許文献1に記載された従来技術を図5および図6を用いて説明する。
図5は、特許文献1に記載された有機薄膜スイッチング・メモリー複合素子の構成図であり、石英ガラス基板311上に、金を蒸着して下部電極312を形成し、鉛フタロシアニン(PbPc)薄膜を蒸着して有機薄膜314を形成し、さらにその上に金を蒸着して上部電極313を形成したものである。
The prior art described in Patent Document 1 will be described with reference to FIGS.
FIG. 5 is a configuration diagram of an organic thin film switching memory composite element described in Patent Document 1. Gold is deposited on a quartz glass substrate 311 to form a lower electrode 312 and a lead phthalocyanine (PbPc) thin film is formed. The organic thin film 314 is formed by vapor deposition, and gold is vapor-deposited thereon to form the upper electrode 313.

図5に示したような有機薄膜スイッチング・メモリー複合素子としての特性は、図6に示すように、有機薄膜314が空気中に曝された状態で数日の空気中への放置によって、大きく特性の変化が発生する。特に、長期にわたって、紫外線を照射すると、有機半導体材料ポリマーが分解することに起因すると思われる著しく半導体としての特性が失われ、単に導電率の極めて低い有機抵抗体のような動作に変化し、ヒステリシスが失われる。   As shown in FIG. 6, the characteristics of the organic thin film switching / memory composite element as shown in FIG. 5 are greatly increased by leaving the organic thin film 314 exposed to the air for several days. Changes occur. In particular, when irradiated with ultraviolet rays over a long period of time, the characteristics as a semiconductor, which is thought to be due to the decomposition of the polymer of the organic semiconductor material, are remarkably lost. Is lost.

また、僅かではあるが、周囲からの迷光(の変化)によって有機薄膜スイッチング・メモリー複合素子のヒステリシスの動作に影響が出ることがありノイズとして問題になる。特許文献1では、有機薄膜スイッチング・メモリー複合素子をフッ素樹脂で覆うことにより上述したような変化を防止することが提案されている。   In addition, although it is slight, stray light from the surroundings (change) may affect the hysteresis operation of the organic thin film switching / memory composite element, which causes noise. In Patent Document 1, it is proposed to prevent the above-described change by covering the organic thin film switching / memory composite element with a fluororesin.

以下、従来技術における問題点を述べる。
上述した特許文献1における保護膜は、特に、フッ素樹脂を主体として提案されたものであるが、フッ素樹脂はその表面極性の極端な弱さから、極性分子である水や水蒸気を非常に通しにくいものの、樹脂であるために、一般のガスは比較的良く通し、また、金属などとの密着性も悪いという問題がある。
The problems in the prior art will be described below.
The above-described protective film in Patent Document 1 is proposed mainly with a fluororesin, but the fluororesin is extremely difficult to pass water and water vapor as polar molecules because of its extremely weak surface polarity. However, since it is a resin, there is a problem that a general gas passes relatively well and adhesion to a metal or the like is poor.

有機半導体材料の光からの保護(遮光性)は、単に有機半導体材料の劣化を防止するのみでなく、外部から入る光によるキャリア動作の不安定化を防ぐためにも重要である。例えば,液晶ディスプレイのドライバ素子(TFTなど)への応用では、すぐ隣に光源を有し、これが同材料の動作に影響を与えてしまうという問題がある。   The protection of the organic semiconductor material from light (light-shielding property) is important not only for preventing deterioration of the organic semiconductor material but also for preventing instability of carrier operation due to light entering from the outside. For example, in application to a driver element (TFT or the like) of a liquid crystal display, there is a problem that a light source is provided immediately adjacent to the liquid crystal display, which affects the operation of the material.

遮光性保護膜は、そのままでは一般に導電性があり(特にカーボンブラックの場合は著しい)使用できず、有機半導体材料の間の絶縁が必要であり、例えば絶縁層として有機半導体との間に顔料を入れていない樹脂層を設けることが考えられる。   The light-shielding protective film is generally electrically conductive as it is (especially remarkable in the case of carbon black) and cannot be used, and insulation between organic semiconductor materials is necessary. For example, a pigment is provided between the organic semiconductor and the insulating layer. It is conceivable to provide a resin layer that is not contained.

ポリパラキシリレン層はその絶縁膜として特性のよい材料である。しかし、ポリパラキシリレンは、蒸着によってつけるため、顔料を入れた材料として蒸着膜をつけることは困難である。   The polyparaxylylene layer is a material having good characteristics as the insulating film. However, since polyparaxylylene is deposited by vapor deposition, it is difficult to deposit a vapor deposition film as a material containing a pigment.

そこで、遮光材としては、塗布できるポリカーボネートなどのポリマー系樹脂にカーボンブラックを入れたものを使い、機能を分担させる必要がある。もちろん、塗布材料で良好な遮光性と良好な絶縁性を確保できる材料があれば、この限りではない。一層だけで両方の機能を達成できる。   Therefore, as the light shielding material, it is necessary to use a polymer resin such as polycarbonate that can be applied and carbon black and share the function. Of course, there is no limitation to this as long as there is a material that can ensure good light-shielding properties and good insulating properties with the coating material. Both functions can be achieved with just one layer.

本発明は、上記事情に鑑み、長期的には光照射による有機半導体層の劣化を防止し、短期的には照射される光の変化などが有機半導体素子の動作の不安定な要因や一種のノイズとして振舞うことを防止することが可能な有機半導体素子技術を提供することを目的としている。   In view of the above circumstances, the present invention prevents deterioration of the organic semiconductor layer due to light irradiation in the long term, and changes in the irradiated light in the short term are factors that cause unstable operation of the organic semiconductor element. It aims at providing the organic-semiconductor element technique which can prevent acting as noise.

本発明は、上記目的を達成するために、次のような構成を採用した。以下、請求項毎の構成を述べる。   The present invention employs the following configuration in order to achieve the above object. Hereinafter, the structure for each claim will be described.

(1)請求項1記載の発明は、有機半導体材料を用いた有機半導体素子において、基板上に設けられた有機半導体層と、該有機半導体層上に設けられた第1の遮光層と、前記有機半導体層を挟んで前記第1の遮光層と反対側に設けられた第2の遮光層を有することを特徴としている。 (1) The invention according to claim 1 is an organic semiconductor element using an organic semiconductor material, an organic semiconductor layer provided on a substrate, a first light shielding layer provided on the organic semiconductor layer, It has the 2nd light shielding layer provided in the opposite side to the 1st light shielding layer on both sides of an organic semiconductor layer.

(2)請求項2記載の発明は、前記第1の遮光層と前記有機半導体層との間、および前記第2の遮光層と前記有機半導体層との間に、電気的絶縁層が設けられたことを特徴としている。 (2) In the invention described in claim 2, an electrical insulating layer is provided between the first light-shielding layer and the organic semiconductor layer and between the second light-shielding layer and the organic semiconductor layer. It is characterized by that.

(3)請求項3記載の発明は、前記第2の遮光層の機能を、前記基板に具備させたことを特徴としている。 (3) The invention described in claim 3 is characterized in that the function of the second light shielding layer is provided in the substrate.

(4)請求項4記載の発明は、前記第2の遮光層と前記有機半導体素子との間に設けられる絶縁層の機能を、前記基板に具備させたことを特徴としている。 (4) The invention described in claim 4 is characterized in that the substrate has a function of an insulating layer provided between the second light-shielding layer and the organic semiconductor element.

本発明は、上記構成を採用したことにより次のような効果を有する。以下、請求項毎の効果を述べる。
(1)請求項1記載の発明によれば、長期的な光照射による有機半導体層の劣化が防げるようになり、短期的には照射される光の変化などが有機半導体の動作の不安定な要因や一種のノイズとして振舞うことがなくなった。
The present invention has the following effects by adopting the above configuration. The effects of each claim will be described below.
(1) According to the first aspect of the present invention, the deterioration of the organic semiconductor layer due to long-term light irradiation can be prevented, and the change of the irradiated light is unstable in the operation of the organic semiconductor in the short term. No longer behaves as a factor or a kind of noise.

(2)請求項2記載の発明によれば、遮光性材料によく用いられる顔料の一種であるカーボンブラックを混ぜることで発生する導電性が、有機半導体の特性に影響しないようにできるようになった。 (2) According to the invention described in claim 2, the conductivity generated by mixing carbon black, which is a kind of pigment often used in light-shielding materials, can be prevented from affecting the characteristics of the organic semiconductor. It was.

(3)請求項3記載の発明によれば、基板が遮光層を兼ねるために、構成が簡単になり作製が容易になった。 (3) According to the invention described in claim 3, since the substrate also serves as a light shielding layer, the configuration is simplified and the manufacture is facilitated.

(4)請求項4記載の発明によれば、基板が電気的絶縁層を兼ねるため、構成が簡単になり作製が容易になった。 (4) According to the invention described in claim 4, since the substrate also serves as the electrical insulating layer, the configuration is simplified and the manufacture is facilitated.

以下、本発明に係る有機半導体素子の実施例を、図面を用いて詳細に説明する。ここでは有機半導体スイッチング素子を中心にした実施例を説明する。   Hereinafter, examples of the organic semiconductor element according to the present invention will be described in detail with reference to the drawings. Here, an embodiment centering on an organic semiconductor switching element will be described.

図1は、従来技術(特許文献1)に記載された図5に対応する本発明に係る有機半導体素子の実施例の断面図である。図6は、前述したように、図5のスイッチング素子の電圧電流特性を示したものである。   FIG. 1 is a cross-sectional view of an embodiment of an organic semiconductor element according to the present invention corresponding to FIG. 5 described in the prior art (Patent Document 1). FIG. 6 shows the voltage-current characteristics of the switching element of FIG. 5 as described above.

この例では有機半導体として用いたペンタセンのI−Vの特性の例であるが、特性にヒステリシスを有しており、このヒステリシスを利用して表示素子のスイッチング等に利用している。材料としては、一般に低分子系の有機半導体材料などで結晶化しやすい材料において、比較的このような特性を得られる場合が多い。   This example is an example of IV characteristics of pentacene used as an organic semiconductor, but has hysteresis in the characteristics, and this hysteresis is used for switching display elements. As a material, in general, a material that is easily crystallized, such as a low-molecular organic semiconductor material, can relatively obtain such characteristics in many cases.

本発明に係る有機半導体素子は、図1に示すように、カーボンブラックを12重量%混入したポリカーボネート基板201上に、絶縁膜212bを設けた後、カソード電極202を作製し、この上に、有機半導体材料204を蒸着などで作製している。その上に、アノード電極203を作製する。これら電極に用いる材料に金を用いた。本発明では基板材料にポリカーボネートを電気的絶縁層を兼ねて利用し、遮光層として裏面側にポリカーボネートの原料(211a)にフィラーとしてカーボンブラックを約12重量%混合したものを塗布することで作製した。   As shown in FIG. 1, an organic semiconductor element according to the present invention is provided with an insulating film 212b on a polycarbonate substrate 201 mixed with 12% by weight of carbon black, and then a cathode electrode 202 is formed thereon. The semiconductor material 204 is produced by vapor deposition or the like. On top of that, an anode electrode 203 is fabricated. Gold was used as the material used for these electrodes. In the present invention, polycarbonate is used as a substrate material also as an electrical insulating layer, and is prepared by applying a mixture of about 12% by weight of carbon black as a filler to a polycarbonate raw material (211a) on the back side as a light shielding layer. .

一般に、カーボンブラックのような顔料をバインダーに混ぜると導電性が出るため、有機半導体材料および電極と前記遮光性ポリカーボネートの間に絶縁性の膜212bを設けてもよいが、基板材のポリカーボネート材の絶縁性を利用してもよい。   In general, when a pigment such as carbon black is mixed with a binder, conductivity is obtained. Therefore, an insulating film 212b may be provided between the organic semiconductor material and the electrode and the light-shielding polycarbonate. Insulation may be used.

この絶縁性膜(212bや211b)にはもちろんカーボンブラックを入れていないポリカーボネートを用いても一定の性能が得られるが、さらに高性能の絶縁性および空気の遮断・水蒸気遮断性能力の高いポリパラキシリレンを用いてもよい。ポリパラキシリレンは蒸着による公知の方法が提案されており、蒸着するため遮光性顔料を混合した膜を作製することは困難である。   This insulating film (212b and 211b) can of course achieve a certain level of performance even if polycarbonate without carbon black is used, but it has a higher performance of insulation and air / water vapor blocking ability. Xylylene may be used. For polyparaxylylene, a known method by vapor deposition has been proposed, and it is difficult to produce a film in which a light-shielding pigment is mixed for vapor deposition.

図2および3は、光透過性基板材料として基板に、カーボンブラックを重量比12%入れたポリカーボネート材料を塗布した変形実施例である。   2 and 3 are modified embodiments in which a polycarbonate material containing 12% by weight of carbon black is applied to a substrate as a light-transmitting substrate material.

図2は、ガラス基板201の有機半導体を塗布する側に、また図3はポリカーボネート基板201の裏面側(すなわち図3の手前側)に、212を設ける。必要に応じてこれら基板材と遮光材の間に接着層を設ける(図示してない)。   2 is provided on the glass substrate 201 on the side where the organic semiconductor is applied, and FIG. 3 is provided on the back side of the polycarbonate substrate 201 (that is, the front side in FIG. 3). If necessary, an adhesive layer is provided between the substrate material and the light shielding material (not shown).

図2では、遮光性材料が電気的にあるいは空気や水蒸気の遮断特性が必ずしもよくないので、絶縁膜として(顔料を入れていない)ポリカーボネートや、ガスその他の遮断特性が特別高いポリパラキシリレンなどを有機半導体材料と前記遮光性材料との間に用いた(211bおよび212b)。   In FIG. 2, the light-shielding material does not necessarily have good electrical or air / water vapor barrier properties, so polycarbonate (without pigments) as an insulating film, gas or other polyparaxylylene with particularly high barrier properties, etc. Was used between the organic semiconductor material and the light-shielding material (211b and 212b).

図3は、ポリカーボネート基板201の有機半導体材料を塗布する側にポリパラキシリレン膜からなる絶縁層212bを蒸着によって作製し、ポリカーボネート基板201の反対側の面には、カーボンブラックを約12重量%混入した塗布材(遮光層)212aを塗布する。このようにして得られた基板201に、カソード電極202として金を蒸着した後、有機半導体材料204を塗布した。   In FIG. 3, an insulating layer 212b made of a polyparaxylylene film is formed by vapor deposition on the side of the polycarbonate substrate 201 on which the organic semiconductor material is applied, and about 12% by weight of carbon black is formed on the opposite side of the polycarbonate substrate 201. The mixed coating material (light shielding layer) 212a is applied. Gold was deposited as the cathode electrode 202 on the substrate 201 thus obtained, and then an organic semiconductor material 204 was applied.

さらにこの上に、アノード電極203として金を蒸着して、過熱乾燥したのちポリパラキシリレンからなる絶縁層211bを蒸着によって成膜した。   Further on this, gold was vapor-deposited as the anode electrode 203, and after heating and drying, an insulating layer 211b made of polyparaxylylene was formed by vapor deposition.

この上に、ポリカーボネート原料にカーボンブラックを約12重量%を混入した遮光膜211aを塗布した。   On top of this, a light-shielding film 211a in which about 12% by weight of carbon black was mixed with a polycarbonate raw material was applied.

図4は、図1において、基板201が兼ねる電気的絶縁機能(基板201が絶縁機能を有する(図4では「201(212b)」と記す))として利用しつつ、基板面の有機半導体層を作製する側の反対側にポリプロピレン樹脂原料にカーボンブラックを約12重量%混合させた遮光膜(212a)を塗布した実施例である。   FIG. 4 shows the organic semiconductor layer on the substrate surface while utilizing the electrical insulation function (the substrate 201 has an insulation function (referred to as “201 (212b)” in FIG. 4)) that the substrate 201 also functions in FIG. In this example, a light shielding film (212a) in which about 12% by weight of carbon black is mixed with a polypropylene resin raw material is applied to the side opposite to the side to be manufactured.

一般的に、ポリパラキシリレンは、ポリカーボネートに比べ、電気的絶縁のみならず空気などのガスや水蒸気などの透過性が低く、有機半導体の保護には適している。このように、光によって短期的にはノイズなど動作の不安定な要因になり、また長期的には光によって劣化をきたす有機半導体は、遮光性の高い材料で周囲を固めて使用する必要がある。   In general, compared to polycarbonate, polyparaxylylene has low permeability for gases such as air and water vapor as well as electrical insulation, and is suitable for protecting organic semiconductors. In this way, organic semiconductors that cause unstable operation such as noise in the short term due to light and that deteriorate due to light in the long term must be used with a highly light-shielding material. .

以上、スイッチング素子を例に有機半導体素子の説明をしたが、有機半導体材料を用いた他の半導体素子(有機TFTや有機MOSトランジスタなど)への応用も可能である。   The organic semiconductor element has been described above by taking the switching element as an example, but application to other semiconductor elements (organic TFT, organic MOS transistor, etc.) using an organic semiconductor material is also possible.

以下、本願実施例の特徴事項および注意事項を列記する。
(1)比較的強度の高いポリカーボネート系は利用しやすい。特に塗布することができるため、バインダー材としてポリカーボネート原料にカーボンブラックをフィラーとして混合して有機半導体材料に対し影響の少ない絶縁膜を介して塗布すると都合がよい。もちろん顔料としてはカーボンブラックに限らない。適切な分光吸収特性のある顔料を用いればよい。樹脂の導電性や有機半導体に影響を与えないのであれば、絶縁膜(211b、212b)を省略することもできる。
The features and cautions of the embodiment of the present application are listed below.
(1) A polycarbonate having a relatively high strength is easy to use. In particular, since it can be applied, it is convenient to apply carbon black as a filler to a polycarbonate raw material as a binder material and apply it through an insulating film that has little influence on the organic semiconductor material. Of course, the pigment is not limited to carbon black. A pigment having appropriate spectral absorption characteristics may be used. The insulating films (211b and 212b) can be omitted as long as the conductivity of the resin and the organic semiconductor are not affected.

(2)絶縁膜には、例えば、ポリパラキシリレン、特にジパラキシリレンおよびその誘導体(パリレン(登録商標)を用いるのもよい)のような材料を用いるとよい。
(3)フィラーを用いているので、塗布できるバインダー樹脂で密着性さえよければその他多くの材料に適合できる。
(2) For the insulating film, for example, a material such as polyparaxylylene, particularly diparaxylylene and derivatives thereof (parylene (registered trademark) may be used) may be used.
(3) Since a filler is used, it can be applied to many other materials as long as the binder resin that can be applied is sufficient for adhesion.

(4)有機半導体材料を塗布する基板が、ガラス基板や透明な樹脂基板など遮光性でない場合は、基板の裏面または有機半導体直下または基板裏面側に、これら材料を塗布する。基板裏面側に遮光性材料を塗布するのは、有機半導体に直接接しないため基板の表面側に塗布する場合より作製は容易であり、有機半導体素子全体を最後に覆うのにも適するが、図3に示したような場合は、基板に沿って入る光などについては完全な遮光ができない可能性があるので注意を要する。 (4) When the substrate on which the organic semiconductor material is applied is not light-shielding such as a glass substrate or a transparent resin substrate, these materials are applied on the back surface of the substrate, directly below the organic semiconductor, or on the back surface side of the substrate. Applying a light-shielding material to the back side of the substrate is easier to fabricate than applying it to the front side of the substrate because it is not in direct contact with the organic semiconductor, and is suitable for covering the entire organic semiconductor element at the end. In the case shown in FIG. 3, it is necessary to pay attention because light that enters along the substrate may not be completely shielded.

本発明に係る有機半導体素子の実施例を示す図である。It is a figure which shows the Example of the organic-semiconductor element based on this invention. 光透過性基板に、カーボンブラックを重量比12%入れたポリカーボネート材料を塗布した変形実施例である(その1)。This is a modified example in which a polycarbonate material containing 12% by weight of carbon black is applied to a light transmissive substrate (part 1). 光透過性基板に、カーボンブラックを重量比12%入れたポリカーボネート材料を塗布した変形実施例である(その2)。This is a modified example in which a polycarbonate material containing 12% by weight of carbon black is applied to a light transmissive substrate (part 2). 図1において、基板が兼ねる電気的絶縁機能として利用しつつ、基板面の有機半導体層を作製する側の反対側にポリプロピレン樹脂原料にカーボンブラックを約12重量%混合させた遮光膜を塗布した実施例である。In FIG. 1, a light-shielding film in which about 12% by weight of carbon black is mixed with a polypropylene resin raw material is applied on the side opposite to the side on which the organic semiconductor layer is formed on the side of the substrate while being used as an electrical insulating function that also serves as the substrate It is an example. 特許文献1に記載された有機薄膜スイッチング・メモリー複合素子の構成図である。1 is a configuration diagram of an organic thin film switching / memory combined element described in Patent Document 1. FIG. 図5に示した有機薄膜スイッチング・メモリー複合素子の特性を示す図である。It is a figure which shows the characteristic of the organic thin film switching memory composite element shown in FIG.

符号の説明Explanation of symbols

201:基板
202:カソード電極
203:アノード電極
204:有機半導体材料
211a,212a:遮光層
211b、212b:絶縁層
311:基板
312:下部電極
313:上部電極
314:有機薄膜
201: Substrate 202: Cathode electrode 203: Anode electrode 204: Organic semiconductor material 211a, 212a: Light shielding layer 211b, 212b: Insulating layer 311: Substrate 312: Lower electrode 313: Upper electrode 314: Organic thin film

Claims (4)

有機半導体材料を用いた有機半導体素子において、基板上に設けられた有機半導体層と、該有機半導体層上に設けられた第1の遮光層と、前記有機半導体層を挟んで前記第1の遮光層と反対側に設けられた第2の遮光層を有することを特徴とする有機半導体素子。   In an organic semiconductor element using an organic semiconductor material, an organic semiconductor layer provided on a substrate, a first light shielding layer provided on the organic semiconductor layer, and the first light shielding layer sandwiching the organic semiconductor layer An organic semiconductor element comprising a second light-shielding layer provided on a side opposite to the layer. 前記第1の遮光層と前記有機半導体層との間、および前記第2の遮光層と前記有機半導体層との間に、電気的絶縁層が設けられたことを特徴とする請求項1記載の有機半導体素子。   The electrical insulating layer is provided between the first light-shielding layer and the organic semiconductor layer, and between the second light-shielding layer and the organic semiconductor layer. Organic semiconductor element. 前記第2の遮光層の機能を、前記基板に具備させたことを特徴とする請求項1または2記載の有機半導体素子。   The organic semiconductor element according to claim 1, wherein the substrate has a function of the second light shielding layer. 前記第2の遮光層と前記有機半導体素子との間に設けられる絶縁層の機能を、前記基板に具備させたことを特徴とする請求項2または3記載の有機半導体素子。   4. The organic semiconductor element according to claim 2, wherein the substrate has a function of an insulating layer provided between the second light shielding layer and the organic semiconductor element.
JP2004187565A 2004-06-25 2004-06-25 Organic semiconductor element Pending JP2006013109A (en)

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0980476A (en) * 1995-09-12 1997-03-28 Nec Corp Active matrix substrate and its manufacture
JP2002108250A (en) * 2000-09-29 2002-04-10 Sharp Corp Active matrix driven self-luminous display device and manufacturing method therefor

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0980476A (en) * 1995-09-12 1997-03-28 Nec Corp Active matrix substrate and its manufacture
JP2002108250A (en) * 2000-09-29 2002-04-10 Sharp Corp Active matrix driven self-luminous display device and manufacturing method therefor

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