JP2006011108A - Optical positioning device amd method, and laser beam machining apparatus, and laser beam machining method using same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problems in a method of creating correction data by spline interpolation of a machining position while high-accuracy correction data for correcting mispositioning of an optical path is required that a rough distortion characteristic can be mathematized but errors are large and formula are intricate and calculation processing is enormous in creating the correction data by linearly analyzing a detection position and a command position, requiring a long time in the creation of the correction data. <P>SOLUTION: A laser beam machine includes a correction data creation section for creating the correction data for the mispositioning of the geometrical or optical path of an optical scanning section and creates the correction data by computing the position information on the correction position of a polygon constituted in the detection position from the correction position, the detection position constituting the polygon including the correction position and the command position corresponding to the detection position and making the computed position information correspondent to the polygon constituted in the command position. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical positioning device and an optical positioning method incorporated in a laser processing device, an image inspection device, and the like, and a laser processing device and a laser processing method using the same.

  In laser processing apparatuses, image inspection apparatuses, and the like, processing of objects and inspection of objects are widely performed using light such as laser light and visible light. For example, in a laser processing apparatus for a printed circuit board, the printed circuit board is irradiated with laser light to perform IVH (inner via hole) drilling, which is an interlayer connection circuit of the multilayer printed circuit board.

  FIG. 25 shows an outline of a laser processing apparatus for a printed circuit board. The control device 101 controls the laser oscillator 102, the galvano device 104, the processing table 106, and the camera 107. The laser oscillator 102 outputs a laser beam 103 for processing. The galvano device 104 positions the laser beam 103 by a mirror attached to a biaxial motor. The fθ lens 105 condenses the laser light 103. The camera 107 detects the position of a positioning mark on the printed circuit board 108 and a processing hole for position correction. The processing table 106 is mounted with a printed circuit board 108 to be processed.

  Next, the operation of the laser processing apparatus for printed circuit boards will be described. The laser beam 103 output from the laser oscillator 102 is positioned by the galvano device 104, condensed by the condenser lens 105, irradiated to a predetermined position of the printed circuit board 108, and drilling is performed.

  In recent years, electronic devices have been required to be smaller and lighter. To achieve this, high-density mounting of electronic components using a multilayer printed circuit board has been progressing. This will increase the number of IVH holes formed on a single multilayer printed circuit board, reduce the diameter, and increase the density. In order to respond to this, the hole processing accuracy of the laser processing apparatus for printed circuit boards is increased. It is necessary, and the positional accuracy of the processed hole is required to be within ± 10 μm. In order to realize this, the positioning accuracy of the galvano device needs to be within ± 5 μm.

  The position error of the galvano device includes a position error caused by the drive system such as an in-position of the galvano device and temperature fluctuation, and a position error caused by the optical system. As a positional error of this optical system, when positioning a laser beam by combining an optical scanning device such as a galvano device and a condensing lens such as an fθ lens, distortion occurs on the processing plane and the command position is In contrast, the processing position is displaced.

  FIG. 26 shows the distortion of the optical system. This distortion is obtained by synthesizing the geometric distortion of the galvano apparatus as shown in FIG. 26A and the distortion due to the non-linear component of the fθ lens as shown in FIG. It becomes.

  Since there is a limit to reducing this distortion, it is necessary to create correction data for correcting this distortion, create a command position from the correction data, and position the galvano device in order to eliminate this displacement. In the printed circuit board laser processing apparatus, the accuracy of the correction data needs to be 1 μm or less.

  As a method for creating these correction data, there is a method (for example, Patent Document 1) in which correction data is generated from spline interpolation calculation of a machining position.

  There is also a method of creating correction data by linearly analyzing the machining position and the command position.

FIG. 27 is a linear analysis diagram of the machining position and the command position. FIG. 27A shows correction positions Pfh for which correction data is to be created and four processing positions Pf1, Pf2, Pf3, and Pf4 that form a quadrangle surrounding Pfh. This positional relationship is linearly analyzed, and the position of Pfh is represented by an internal ratio (a: 1-a, b: 1-b) of each side of the square. FIG. 27B shows four command positions Pc1, Pc2, Pc3, and Pf4 that form a quadrangle surrounding correction data Pch and Pch. The internal ratio obtained in FIG. 27A is applied to the square in FIG. 27B to obtain correction data Pch.
Japanese Patent Laid-Open No. 10-301052

  In spline interpolation that creates conventional correction data, rough distortion characteristics can be expressed in mathematical formulas. However, if high-precision correction data is required, such as a galvano device installed in a laser processing device for printed circuit boards, spline interpolation is an error. However, there was a problem that it was not applicable.

  Also, when creating correction data by linearly analyzing the machining position and the command position, if high accuracy is not required for the correction data, an approximate expression can be applied to the linear analysis process and processing can be performed with simple mathematical formulas. When the correction data is required, the mathematical formula becomes very complicated and the calculation processing becomes enormous, and there is a problem that it takes a long time to create the correction data.

  An object of the present invention is to solve the above-mentioned problems and to provide an optical positioning device and a control method thereof capable of creating highly accurate correction data and a command position, and a laser processing device and a laser processing method using the same. .

  In order to solve the above-described problems, the present invention includes an optical scanning unit that positions an optical path at least two-dimensionally, and a position detection unit that detects the position of the optical path positioned by the optical scanning unit. Correction data generating unit for generating correction data for positional deviation of the optical or optical path and a correction data storage unit for storing the correction data, and the polygon of the optical scanning unit constituting the polygon containing the correction position The position information of the correction position is calculated from the command position indicating the vertex of the polygon and the detected position of the vertex constituting the polygon corresponding to the command position, using the center of gravity position of the polygon formed by the command position as a reference. Correction data is created by associating the calculated position information with the polygons to be configured, and the correction data is stored.

  With this configuration, the optical scanning unit is positioned using the command position created by the command position creation unit, and correction data is created by the correction data creation unit from the detected position of the position detection unit and the command position at that time. Then, the command position is created by the command position creation unit from the correction data at that time and the target position.

  As described above, the positional relationship between the correction position for which correction data is to be created, the vertex of the polygon surrounding the correction position, and the processing position is expressed as a vector and vector coefficient based on the center of gravity of the polygon, and each corresponding point Since the correction coefficient is generated by applying the vector coefficient to the vector at the command position, highly accurate correction data can be generated by simple vector calculation without approximation or omission in the calculation process.

  Moreover, since only simple vector calculation is performed, high-speed correction data can be created with a short processing time.

The best mode for carrying out the present invention will be described below with reference to FIGS.
(Embodiment 1)
FIG. 1 is a diagram showing a configuration of a laser processing apparatus for a printed circuit board on which the optical positioning device of the present invention is mounted.

  In FIG. 1, the main configuration of the laser processing apparatus for a printed circuit board includes an input unit 1 for inputting a processing program, processing conditions, parameters, a control unit 2 for controlling the entire processing machine, and a laser for outputting laser light. Oscillating unit 3, workpiece table for mounting holes, processing table unit 4 for positioning, galvano scanner unit 5 for positioning the laser beam by positioning the mirror with a 2-axis motor, processing holes processed by laser beam There is a camera unit 6 that images a positioning mark on the workpiece.

  The control unit 2 includes a main control unit 7, a laser control unit 8, a processing table control unit 9, a galvano control unit 10, and a position detection unit 11. The main control unit 7 includes a sequence control unit 12 and an optical positioning unit 13.

  The sequence control unit 11 analyzes data such as a program and machining conditions input from the input unit 1, and outputs operation commands to the laser control unit 3, the machining table control unit 4, the galvano control unit 5, and the position detection unit 6, respectively. In addition, position data necessary for creating correction data is output to the optical positioning unit 13. Further, the target position of the galvano controller 10 is output, and the command position after optical position correction is input.

  The optical positioning unit 13 includes a correction data creation unit 14, a correction data storage unit 15, and a command position creation unit 16. The correction data creation unit 14 creates correction data from the position data input from the sequence unit 12. The correction data storage unit 15 stores the correction data created by the correction data creation unit 14. The command position creation unit 16 creates a command position from the target position of the galvano control unit 10 input from the sequence unit 12 and the correction data of the correction data storage unit 15 and outputs the command position to the sequence unit 12.

  When the laser control unit 8 receives a laser output command from the main control unit 7, it outputs a laser output command signal to the laser oscillation unit 3. Further, the operation information of the laser oscillation unit of the laser oscillation unit 3 is output to the main control unit 7.

  When a laser output command signal is input from the laser control unit 8, the laser oscillation unit 3 outputs laser light according to the laser output signal. Further, a laser output monitor signal or the like is output to the laser controller 8. When a control parameter such as a command speed or a machining table operation command is input from the main control unit 7, the machining table control unit 9 performs position control and outputs a motor drive command signal to the machining table unit 4. In addition, the motor position information and the like are output to the main control unit 7. When the machining table unit 4 receives a motor drive command signal from the machining table control unit 9, the machining table unit 4 drives the motor according to the motor drive command signal. In addition, a motor position detection signal is output to the machining table control unit 9.

  When a control parameter such as a command speed or a galvano operation command is input from the main control unit 7, the galvano control unit 10 performs position control and outputs a galvano drive command signal to the galvano scanner unit 5. Further, position information of the galvano scanner unit 5 and the like are output to the main control unit 7. When the galvano scanner unit 5 receives a drive command signal from the galvano control unit 10, it drives the motor in accordance with the drive command signal. The motor position detection signal is output to the galvano controller 10.

  When the position detection command is input from the main control unit 7, the position detection unit 11 outputs a detection signal to the camera unit 6. In addition, position detection is performed from the captured image of the camera unit 6, and the position detection result is output to the main control unit 7.

  When the camera unit 6 receives the detection signal from the position detection unit 11, the camera unit 6 captures the processed hole and outputs the captured image to the position detection unit 11.

  FIG. 2 is a diagram illustrating a configuration of the optical positioning unit 13.

  First, the configuration of the correction data creation unit 14 will be described.

  The position data storage unit 20 receives position data necessary for creating correction data from the sequence unit 12 and stores it. As the position data, correction position data 21 indicating the position where correction data is to be created, position command data 22 output to the galvano control unit 10, and lattice laser processing holes are formed in the galvano scanner unit 5, and the position detection unit 11 performs the processing. It consists of machining position data 23 representing the position of the machining hole whose position has been detected. Here, the corrected position data 21 is copied to the position command data 22.

  When the correction position data 21 and the processing position data 23 are input from the position data storage unit 20, the processing position area search unit 24 processes four processing positions surrounding the correction position for each correction position for generating correction data. Search from the position data 23.

  When the machining position centroid calculating unit 25 receives the four machining position data searched by the machining position area searching unit 24, the machining position centroid calculating unit 25 calculates a square centroid position surrounded by the four points.

  When the command position centroid calculating unit 26 inputs the four machining position data searched by the machining position area searching unit 24, the command position data corresponding to the machining position is input from the command position data 22 of the position data storage unit 20. Then, the center of gravity of the quadrangle surrounded by the command position data of the four points is calculated.

  When the corrected position data, the searched four-point processed position data, and the centroid position data calculated by the processed position centroid calculating unit 25 are input, the processed position vector coefficient calculating unit 27 reaches each processed position starting from the centroid position. The vector from the center of gravity position to the correction position is represented using two of the vectors, and two coefficients for multiplying each of the two vectors are calculated.

  The correction data calculation unit 28 receives the four-point command position data from the command position centroid calculation unit 26 and the two vector coefficients calculated from the machining position vector coefficient calculation unit 27 based on the calculated centroid position data. The correction data is calculated by multiplying the corresponding two of the four vectors up to each command position as the start point by the machining position vector coefficient.

  The correction data storage unit 15 stores the correction data created by the correction data creation unit 14 in association with each correction position data.

  The configuration of the command position creation unit 16 will be described. The target position storage unit 29 inputs target position data indicating a position where the galvano scanner unit 6 wants to position the laser beam from the sequence unit 12 and records it.

  When the target position data is input from the target position storage unit 29, the correction position area search unit 30 searches the correction data storage unit 15 for four correction positions surrounding the target position.

  When the four correction position data searched by the correction position area search unit 30 are input, the correction position barycenter calculation unit 31 calculates a quadrature barycentric position surrounded by the four correction positions.

  When the correction data center of gravity calculation unit 32 inputs the four processing position data searched by the correction position area search unit 30, the correction data corresponding to the searched four correction position data is input from the correction data storage unit 15. The center-of-gravity position of the quadrangle surrounded by the four correction data is calculated.

  When the correction position vector coefficient calculation unit 33 receives the target position, the four corrected position data searched for, and the centroid position data thereof from the correction position centroid calculation unit 31, the correction position vector coefficient calculation unit 33 obtains the correction position vector coefficient calculation unit 33. Two of the four vectors are used to represent a vector from the center of gravity position to the target position, and two coefficients for multiplying each of the two vectors are calculated.

  The command position creation unit 34 receives the four correction data and the centroid position data from the correction data centroid calculation unit 32 and the two correction position vector coefficients calculated from the correction position vector coefficient calculation unit 33, and the centroid position is set as the starting point. The command position is calculated by multiplying the corresponding two of the four vectors up to each correction data by the correction position vector coefficient.

  Next, the correction data creation process will be described in detail. FIG. 3 is a diagram showing a distribution of processed holes at the time of creating correction data for the first time.

  In the first correction data creation processing, since there is no correction data, the galvano scanner unit 5 is positioned at the command position where the optical position shift is not corrected, and hole processing is performed. For this reason, as shown in FIG. 3, a position shift occurs due to the distortion characteristics of the optical system, and the machining position is shifted from the command position. Here, in order to simplify the correction data processing, the drilling is performed with the correction position for creating the correction data and the command position at the same position. Further, in order to make the correction data creation process easy to understand, holes are drilled at lattice-shaped command positions that are equally spaced in the X and Y directions. The lattice interval and the size of the entire processing range are determined from the scanning range of the galvano scanner unit 5, the characteristics of the fθ lens, and the required processing accuracy.

  Next, when creating correction data, it is necessary to create correction data for the correction position from the positional deviation relationship between the command position and the machining position in FIG. The correction data corresponds to a command position necessary for drilling a hole at the correction position. Therefore, four machining positions surrounding one arbitrary correction position are searched, and the positional relationship between the four machining positions and the correction position is applied to a command position corresponding to the four machining positions to create correction data. . As a method for determining the positional relationship, a vector based on the center of gravity of a quadrilateral formed by four points is used.

  First, it is necessary to search for four processing positions surrounding an arbitrary correction position. The search method may be performed by comparing each coordinate data of the machining position data stored in the position data storage unit 20 and one arbitrary correction position data.

FIG. 4 shows a vector diagram for creating the first correction data. FIG. 4A is a diagram showing one arbitrary correction position for generating correction data and four processing positions surrounding the correction position. Pfh is a correction position, and Pf1, Pf2, Pf3, and Pf4 are corrections. Four machining positions surrounding the position Pfh. Pfg is a center of gravity position of a quadrangle having four processing positions as apexes. If the coordinates of Pf1 are (xf1, yf1), the coordinates of Pf2 are (xf2, yf2), the coordinates of Pf3 are (xf3, yf3), and the coordinates of Pf4 are (xf4, yf4), the coordinates (xfg, yfg) is calculated by equations (1) and (2).
xfg = (xf1 + xf2 + xf3 + xf4) / 4 (1)
yfg = (yf1 + yf2 + yf3 + yf4) / 4 (2)
Vf1, Vf2, Vf3, Vf4, and Vfh are vectors to Pf1, Pf2, Pf3, Pf4, and Pfh starting from the center of gravity. In FIG. 4A, since the correction position Pfh exists in a triangle having Pfg, Pf1 and Pf2 as vertices, Vfh can be expressed by Vf1 and Vf2. Vfh is a combined vector of Vfh1 and Vfh2, and Vfh1 and Vfh2 can be expressed by equations (3) and (4) using machining position vector coefficients Kf1 and Kf2.
Vfh1 = Kf1 × Vf1 (3)
Vfh2 = Kf2 × Vf2 (4)
Therefore, Vfh can be expressed by Equation (5).
Vfh = Vfh1 + Vfh2 = Kfl × Vf1 + Kf2 × Vf2 (5)
Thus, the correction position Pfh can be expressed by vectors Vf1 and Vf2 of two machining positions based on the center of gravity position Pfg and machining position vector coefficients Kf1 and Kf2 as shown in Expression (5).

When the component of the vector Vfh is (Vfhx, Vfhy), the component of the vector Vf1 is (Vflx, Vfly), the component of the vector Vf2 is (Vf2x, Vf2y), and the machining position vector coefficients Kf1, Kf2 are obtained from the equation (5), Expressions (6) and (7) are obtained.
Kf1 = (Vfhx × Vf2y−Vf2x × Vfhy) / (Vf1x × Vf2y−Vf2x × Vfly) (6)
Kf2 = (Vflx * Vfhy-Vfhx * Vf2y) / (Vflx * Vf2y-Vf2x * Vfly) (7)
In this way, the machining position vector coefficients Kf1 and Kf2 can be calculated from the correction position and the coordinates of the four machining positions surrounding the correction position.

  Next, a correction data calculation method will be described. FIG. 4B is a diagram showing correction data corresponding to the correction positions and the four machining positions in FIG. 4A and four command positions, where Pch is the correction data, and Pc1, Pc2, Pc3 Pc4 is a command position corresponding to the four machining positions in FIG. Pcg is the center-of-gravity position of a quadrangle whose apexes are the four command positions.

If the coordinates of Pc1 are (xc1, yc1), the coordinates of Pc2 are (xc2, yc2), the coordinates of Pc3 are (xc3, yc3), and the coordinates of Pc4 are (xc4, yc4), the coordinates (xcg, ycg) is calculated by equations (8) and (9).
xcg = (xc1 + xc2 + xc3 + xc4) / 4 (8)
ycg = (yc1 + yc2 + yc3 + yc4) / 4 (9)
Vc1, Vc2, Vc3, Vc4, and Vch are vectors to Pc1, Pc2, Pc3, Pc4, and Pch starting from the center of gravity Pcg. In FIGS. 4A and 4B, although the square shape differs depending on the distortion of the optical system, the relative positional relationship between the points is the same. Therefore, the equation (5) obtained in FIG. ) Is formed by a corresponding vector in FIG.

Since Vch, Vc1, Vc2, Vch1, and Vch2 correspond to Vfh, Vf1, Vf2, Vfh1, and Vfh2, Equation (10) is obtained.
Vch = Vch1 + Vch2 = Kfl × Vc1 + Kf2 × Vc2 (10)
Therefore, from equation (10), the vector Vch can be expressed by vectors Vc1 and Vc2 of two command positions with respect to the center of gravity position Pcg, and machining position vector coefficients Kf1 and Kf2 obtained by the machining position vector coefficient calculation unit, By substituting Equations (6) and (7) into Kf1 and Kf2 in Equation (10), the Pch coordinates (xch, ych) can be calculated.

  The calculated correction data is stored in the correction data storage unit in a table data format in correspondence with the correction position as shown in FIG. Here, correction data corresponding to the correction position is stored, but difference data from the correction position may be stored corresponding to the correction position.

  FIG. 6 shows a flowchart of the correction data creation process.

  When the correction data generation process is started, in step 1, correction position data is read and stored.

  In step 2, the correction position data is copied to the command position data.

  In step 3, machining position data is read and stored.

  In step 4, one point of correction position data for generating correction data is taken out.

  In step 5, the machining position data stored in the four machining position data surrounding the correction position extracted in step 4 is searched.

  In step 6, the gravity center positions of the searched four processing positions are calculated.

  In step 7, the four command positions corresponding to the four machining positions searched in step 5 are read out from the command position data, and the four gravity center positions are calculated.

  In step 8, using the vector starting from the center of gravity calculated in step 5, the correction position vector is represented by the machining position vector, and the machining position vector coefficient is calculated.

  In step 9, correction data is calculated using the vector starting from the center of gravity calculated in step 7 and the machining position vector coefficient calculated in step 8.

  In step 10, the correction data calculated in step 9 is stored in association with the correction position.

  In step 11, the presence or absence of a correction position for creating correction data is checked. If there is a correction position, the process returns to step 4, and if there is no correction position, the process ends.

  Next, details of the position command generation process will be described. In the position command creation, the command position is created using the correction data created in the above-described correction data creation process so that the laser beam can be irradiated to the target position for drilling.

  Since the correction data has only correction positions arranged in a grid pattern, the positional relationship with the four correction positions surrounding the target position is applied to the correction data corresponding to the four correction positions, as in the correction data generation. To create a command position.

  As a method for determining the positional relationship, a vector based on the center of gravity of a quadrilateral formed by four points is used as in the correction data creation.

  First, it is necessary to search for four correction positions surrounding the target position. As a search method, the correction position stored in the correction data storage unit 15 may be compared with the coordinates of the target position.

  Next, a method for calculating the corrected position vector coefficient will be described. FIG. 7 shows a vector diagram for creating a command position using the first correction data.

FIG. 7A is a diagram showing one arbitrary target position where command position creation is performed and four correction positions surrounding the point, where Phm is the target position, and Ph1, Ph2, Ph3, and Ph4 are target positions. Four correction positions surrounding the position Phm. Phg is a center of gravity of a quadrangle having apexes at four correction positions. If the coordinates of Ph1 are (xh1, yh1), the coordinates of Ph2 are (xh2, yh2), the coordinates of Ph3 are (xh3, yh3), and the coordinates of Ph4 are (xh4, yh4), the coordinates (xhg, yhg) is calculated by equations (11) and (12).
xhg = (xh1 + xh2 + xh3 + xh4) / 4 (11)
yhg = (yh1 + yh2 + yh3 + yh4) / 4 (12)
Vh1, Vh2, Vh3, Vh4, and Vhm are vectors to Ph1, Ph2, Ph3, Ph4, and Phm starting from the center of gravity. In FIG. 7A, since the target position Phm exists in a triangle having Phg, Ph1, and Ph2 as vertices, the vector Vhm can be expressed by Vh1 and Vh2.

Vhm is a combined vector of Vhm1 and Vhm2. Assuming that the corrected position vector coefficients are Kh1 and Kh2, Vhm1 and Vhm2 can be expressed by equations (13) and (14).
Vhm1 = Kh1 × Vh1 (13)
Vhm2 = Kh2 × Vh2 (14)
Therefore, Vhm is expressed by equation (15).
Vhm = Vhm1 + Vhm2 = Khl × Vh1 + Kh2 × Vh2 (15)
Thus, the target position Phm can be expressed by vectors Vh1 and Vh2 of two correction positions based on the center of gravity position Phg and correction position vector coefficients Kh1 and Kh2, as shown in Expression (15).

When the component of the vector Vhm is (Vhmx, Vhmy), the component of the vector Vh1 is (Vhlx, Vh1y), the component of the vector Vh2 is (Vh2x, Vh2y), and the processing position vector coefficients Kh1, Kh2 are obtained from equation (15), Expressions (16) and (7) are obtained.
Kh1 = (Vhmx × Vh2y−Vh2x × Vhmy) / (Vhlx × Vh2y−Vh2x × Vhly) 1 (16)
Kh2 = (Vhlx × Vhmy−Vhmx × Vh2y) / (Vh1x × Vh2y−Vh2x × Vh1y) (17)
As described above, the correction position vector coefficients Kh1 and Kh2 can be calculated from the target position and the coordinates of the four correction positions surrounding the target position.

  Next, details of the calculation method of the position command data will be described. FIG. 7B is a diagram showing the command position corresponding to the target position and the four correction positions in FIG. 7A and the four correction data, where Pdm is the command position, Pd1, Pd2, Pd3 Pd4 is correction data corresponding to the four correction positions in FIG. Pdg is the position of the center of gravity of a quadrangle with the four points of correction data as vertices.

If the coordinates of Pd1 are (xd1, yd1), the coordinates of Pd2 are (xd2, yd2), the coordinates of Pd3 are (xd3, yd3), and the coordinates of Pd4 are (xd4, yd4), the coordinates (xdg, ydg) can be calculated by equations (18) and (19).
xdg = (xd1 + xd2 + xd3 + xd4) / 4 (18)
ydg = (yd1 + yd2 + yd3 + yd4) / 4 (19)
Vd1, Vd2, Vd3, Vd4, and Vdg are vectors to Pd1, Pd2, Pd3, Pd4, and Pdm starting from the center of gravity Pdg. In FIG. 7A and FIG. 7B, although the square shape differs depending on the distortion of the optical system, the relative positional relationship between the points is the same. Therefore, the equation (15) obtained in FIG. ) Holds in the corresponding vector in FIG. 7B.

Since Vd1, Vd2, Vdm, Vdm1, and Vdm2 correspond to Vh1, Vh2, Vhm, Vhm1, and Vhm2, Equation (20) is obtained.
Vdm = Vdm1 + Vdm2 = Kh1 × Vd1 + Kh2 × Vd2 (20)
Therefore, from equation (20), the vector Vdm can be expressed by two vectors Vd1 and Vd2 of correction data with reference to the center of gravity position Pdg, and correction position vector coefficients Kh1 and Kh2, and Kh1 and Kh2 in equation (20) By substituting equations (16) and (17), the coordinates (xdm, ydm) of Pdm can be calculated.

  The calculated command position data is output to the sequence unit 12.

  FIG. 8 shows a flowchart of the command position creation process using the first correction data. When the command position data creation process is started, in step 1, target position data is read and stored.

  In step 2, one point of target position data for creating command position data is taken out.

  In step 3, four correction position data surrounding the target position extracted in step 2 are searched from the correction data storage unit.

  In step 4, the centroid positions of the four corrected positions searched are calculated.

  In step 5, four correction data corresponding to the four correction positions searched in step 3 are read, and the center of gravity positions of the four points are calculated.

  In step 6, using the vector starting from the barycentric position calculated in step 4, the vector of the target position is represented by the vector of the corrected position, and the corrected position vector coefficient is calculated.

  In step 7, command position data is calculated using the vector starting from the center of gravity calculated in step 5 and the corrected position vector coefficient calculated in step 6.

  In step 8, the command position calculated in step 7 is output.

  In step 9, the presence / absence of a target position for creating command position data is checked. If there is a target position, the process returns to step 2;

  Next, the operation of the processing machine when creating correction data will be described. A correction position is set in the main control unit 7 in advance.

  First, a workpiece to be used for drilling correction data is set on the machining table unit 4. Next, the processing table unit 4 is operated to move the workpiece within the scanning range of the galvano scanner unit 5.

  Since the correction data is generated for the first time, the correction position becomes the command position, which is output from the main control unit 7 to the galvano control unit 10 and the galvano scanner unit 5 operates. When the galvano scanner unit 5 is positioned, a laser beam is output from the laser oscillation unit 3 and a hole is machined in the workpiece.

  When all the holes have been machined, the machined part 6 images the machined hole and measures the machining position of the machined hole. When the measurement of the machining positions of all the machining holes is completed, the correction position data 21 and the machining position data 23 are transferred to the correction data creation unit 14 in the optical positioning unit 13 in the main control unit 7.

  The correction data creation unit 14 creates correction data from the transferred correction position data 21 and machining position data 23 according to the flowchart of FIG. 6 and stores the correction data in the correction data storage unit 15 after completion.

  Next, the command position creation operation after creation of correction data will be described. Processing program data and processing conditions for a printed circuit board to be processed are input from the input unit 1 to the main control unit 7 in advance.

  First, the processing program for the entire substrate is divided into target positions for each scanning range of the galvano scanner unit 5 using parameters such as the scanning range of the galvano scanner unit, and target position data is transferred to the command position creation unit 16.

  Next, using the target position and the correction data in the correction data storage unit 15, the command position creation unit 16 creates a command position and outputs it to the sequence unit 12.

When the printed circuit board is placed on the processing table, the processing table unit 4 is operated to move the printed circuit board to the scanning range of the galvano scanner unit 5.

  Then, the galvano scanner unit 5 is positioned at the created command position, and when the command position is reached, a laser beam is output from the laser oscillation unit 3 and a hole is drilled one by one at a predetermined position on the printed circuit board. The operations of the machining table unit 4, the galvano scanner unit 5, and the laser oscillation unit 3 are repeated until all holes in the machining program are finished.

  Here, in order to simplify the correction data processing, the correction position for creating the correction data and the command position are set to the same position, and the hole is drilled in a lattice shape. However, the correction position and the command position are set to different positions. Similarly, correction data can be created, and the command position can be created using the correction data.

  Even if the correction position and the command position are not arranged in a grid pattern, the correction data and the command position can be generated in the same manner regardless of the shape and size of the rectangle.

  Further, the vector calculation forms a quadrangle, but the same processing can be performed for other polygons. In particular, in the case of a triangle, it can be configured by a simple process as in the case of a square.

  Although described here as an optical positioning device mounted on a laser processing device, an image inspection device that combines an optical scanning device such as a galvano device and a condensing lens such as an fθ lens, and images the state of the workpiece with a camera or the like. The same applies to the above.

  As described above, the positional relationship between the correction position for which correction data is to be created and the four processing positions surrounding the correction position is expressed by a vector and a vector coefficient based on the center of gravity of a quadrangle consisting of the four processing positions, Since correction data is generated by applying the vector coefficient to the corresponding four command position vectors, high-precision correction data can be generated by simple vector calculation without approximation or omission in calculation processing.

  Moreover, since only simple vector calculation is performed, high-speed correction data can be created with a short processing time.

Similarly, the positional relationship between the target position for which the command position is to be created and the four correction positions surrounding the target position is represented by a vector based on the center of gravity of a quadrangle consisting of the four correction positions. Since the command position is generated by applying the vector coefficient to the correction data, a highly accurate command position can be generated by simple vector calculation without approximation or omission in the calculation process.
(Embodiment 2)
A second embodiment of the present invention will be described.

  FIG. 9 is a diagram showing the configuration of the optical positioning unit 13, and the command position data 22 in the position data storage unit 20 of the optical positioning unit 13 of FIG. 2 in the configuration of the correction data creation unit 14 is input from the sequence unit 12. Since the other configuration is the same as that of FIG. 2 and the configuration of the laser processing apparatus is the same as that of FIG. 1, the description thereof will be omitted.

  FIG. 10 is a diagram showing the distribution of the processed holes when the correction data is created for the second and subsequent times. After the first correction is performed by the optical positioning device of the first embodiment, a position command is created again using the correction position as the target position. Then, drilling is performed.

  In FIG. 3, the machining position is larger than the command position. However, in FIG. 10, since the optical position is corrected, the command position is machined at a command position that is shorter than the correction position, which is the target position. Is almost near the correction position. However, in order to perform machining with higher accuracy, it is necessary to further correct this misalignment.

  Accordingly, correction data creation processing will be described. FIG. 11 is a vector diagram of correction data generation for the second and subsequent times, and the reference numerals in FIG. 11 are the same as those in FIG. 4, but FIG. However, in FIG. 11A, since the galvano scanner unit 5 is positioned at the command position where the correction position is corrected by the correction data, the four processing positions are shown. Is a square with little distortion with respect to the correction position.

  In FIG. 4B, since the correction position and the command position are the same, the command position is a square without distortion. However, in FIG. 11B, the correction position is a command position corrected with correction data. Therefore, the command position is a quadrangle with large distortion.

In this way, during the first correction and subsequent corrections, even if the same correction position is processed,
Although the shapes of the machining position and the command position vary greatly, correction data is created using a vector based on the center of gravity of the quadrangle as in FIG. In the machining position vector coefficient calculation method, as in FIG. 4 (a), the center of gravity Pfg of the square of the machining position in FIG. 11 (a) is obtained by the equations (1) and (2).

  In FIG. 11A, since the correction position Pfh exists in a triangle having Pfg, Pf1, and Pf3 as vertices, Vfh can be expressed by Vf1 and Vf3.

  Here, Expressions (3) to (7) are applied to Vf1 and Vf3 to obtain vector coefficients Kf1 and Kf3 that can represent Vfh by Vf1 and Vf3.

  As in the case of FIG. 4B, the correction data calculation method obtains the center of gravity position Pcg of the square of the command position in FIG. 11B by equations (8) and (9), and uses the center of gravity position Pcg as a reference. Applying equation (10), Vch is represented by Vc1 and Vc3 and the calculated machining position vector coefficients Kf1 and Kf3, and the equations (6) and (7) to which Vf1 and Vf3 are applied are substituted and corrected. The coordinates of the data Pch are calculated.

  The calculated correction data is stored in the correction data storage unit in a table data format in correspondence with the correction position as shown in FIG.

  FIG. 12 shows a flowchart of the second and subsequent correction data creation processing. Step 2 in the flowchart of FIG. 6 is changed to read the command position. The other steps are the same as in FIG.

  Next, the position command creation process will be described. In the position command creation, the command position is created using the correction data created in the above-described correction data creation process so that the laser beam can be irradiated to the target position for drilling.

  FIG. 13 shows a vector diagram for creating command positions for the second and subsequent times. The reference numerals in FIG. 13 are the same as those in FIG. As in FIG. 7, correction data is created using a vector based on the center of gravity of the quadrangle.

  Here, in the correction position vector coefficient calculation method, as in FIG. 7A, the center-of-gravity position Phg of the quadrangle of the correction position in FIG. 13A is obtained by Expressions (11) and (12). In FIG. 13A, since the target position Phm exists in a triangle having Phg, Ph1, and Ph3 as vertices, Vhm can be expressed by Vh1 and Vh3.

  Therefore, the corrected position vector coefficients Kh1 and Kh3 that can express Vhm by Vh1 and Vh3 are obtained by applying the expressions (13) to (17) to Vh1 and Vh3.

  In the same way as in FIG. 7B, the command position calculation method obtains the square centroid position Pdg of the correction data in FIG. 13B by equations (18) and (19), and a vector based on the centroid position Pdg. By applying equation (20), Vdh is represented by Vd1 and Vd3 and the calculated corrected position vector coefficients Kh1 and Kh3, and the equations (16) and (17) to which Vh1 and Vh3 are applied are substituted and commanded. The coordinates of the position Pdm are calculated.

  The flowchart of the correction data creation process is the same as that in FIG. The difference is that the correction data to be used is one created in the second and subsequent correction data generation.

  The operation of the processing machine is the same as that of the first embodiment in both the correction data creation operation and the command position creation operation.

  As described above, the positional relationship between the correction position for which correction data is to be created and the four processing positions surrounding the correction position is expressed by a vector and a vector coefficient based on the center of gravity of a quadrangle consisting of the four processing positions, Since correction data is generated by applying the vector coefficient to the corresponding four command position vectors, high-precision correction data can be generated by simple vector calculation without approximation or omission in calculation processing. Moreover, since only simple vector calculation is performed, high-speed correction data can be created with a short processing time. Furthermore, because the vector calculation is based on the center of gravity of the quadrangle, there is no restriction on the shape of the quadrangle, and it can be applied to the creation of correction data for the second and subsequent times. By repeating the creation of correction data, more accurate correction data can be created. Yes.

Similarly, the positional relationship between the target position for which the command position is to be created and the four correction positions surrounding the target position is represented by a vector based on the center of gravity of a quadrangle consisting of the four correction positions. Since the command position is generated by applying the vector coefficient to the correction data, a highly accurate command position can be generated by simple vector calculation without approximation or omission in the calculation process. Moreover, since only a simple vector calculation is performed, a high-speed command position can be created with a short processing time. Furthermore, since the command position is created using the correction data that has been repeatedly created, the command position can be created with higher accuracy.
(Embodiment 3)
Embodiment 3 of the present invention will be described.

  FIG. 14 is a diagram showing the configuration of the optical positioning unit 13. Regarding the configuration of the correction data creating unit 14, the processing position adjacent area searching unit 35 and the command position creating unit are added to the correction data creating unit 14 of the optical positioning unit 13 in FIG. 16 is obtained by adding a correction position adjacent area search unit 36.

  When the machining position area search unit 24 cannot obtain the four machining positions surrounding the correction position, the machining position adjacent area search unit 35 searches for the four machining positions constituting the quadrangle closest to the machining position. The machining position gravity center calculation unit 25 and the command position gravity center calculation unit 26 are output. When the correction position area search unit 30 cannot obtain the four correction positions surrounding the target position, the correction position adjacent area search unit 36 searches for the four correction positions constituting the quadrangle closest to the target position. , Correction center of gravity calculation unit 3! And output to the correction data barycenter calculator 32. Other configurations are the same as those in FIG.

  FIG. 15 is a diagram showing the distribution of the processed holes when the correction data is created at the contracted processing position. FIG. 15 shows the processing at the time of the first correction as in FIG. 3, but the processing position is a position contracted from the correction position due to the characteristics of the galvano device and the fθ lens. In this case, as the outermost correction position, four machining positions surrounding the correction position cannot be obtained.

  A method for creating correction data in such a case will be described. FIG. 16 shows a vector diagram for creating correction data outside the machining position range. The reference numerals in FIG. 16 are the same as those in FIG. Pf1, Pf2, Pf3, and Pf4 in FIG. 16A are four machining positions that form a quadrangle that is closest to the outermost peripheral correction position Pfh.

  First, a method for calculating the machining position vector coefficient will be described. The correction position Pfh is not included in the quadrangle of the processing position, but when the triangle Pfg composed of Pfg, Pf1 and Pf2 is enlarged as a reference, Pfh is included in the enlarged triangle. Therefore, Vfh can be expressed by using Vf1 and Vf2, and the machining position vector coefficient calculation method is the same as that in FIG. 4A, using the expressions (1) and (2) in FIG. 16A. The center-of-gravity position of the square of the position is obtained, and using the vectors based on the center-of-gravity position, Vfh is expressed by Vf1 and Vf2 in Equations (3) to (7) to obtain machining position vector coefficients Kf1 and Kf2.

  Next, the correction data calculation process will be described. FIG. 16B is a diagram showing correction data corresponding to the correction positions and the four machining positions in FIG. 4A and four command positions.

  The center of gravity of the quadrangle of the command position in FIG. 16B is obtained by Expressions (8) and (9), and Vch is calculated as Vc1 and Vc2 by Expression (10) using a vector based on the position of the center of gravity. The coordinates of the correction data Pch are calculated by substituting equations (6) and (7).

  The calculated correction data is stored in the correction data storage unit in a table data format in correspondence with the correction position as shown in FIG.

  FIG. 17 shows a flowchart of correction data creation processing outside the machining position range. Steps 1 to 5 are the same as those in FIG.

  In step 6, it is checked whether or not four machining positions surrounding the correction position are obtained in the area search in step 5. If four machining positions are obtained (OK), the process proceeds to step 8. If not (NG), go to Step 7.

  In step 7, four machining positions that form a quadrangle adjacent to the correction position are searched.

  Step 8 to step 13 are the same as the processing contents from step 6 to step 11 in FIG.

  Next, details of the position command generation process will be described. FIG. 18 shows a vector diagram for creating a command position outside the correction data range. The reference numerals in FIG. 18 are the same as those in FIG.

  Even if correction data for a predetermined correction position is created, there is a case where processing is performed at a target position outside the correction position. In FIG. 18A, the target position is outside the correction position.

  First, a method for calculating the corrected position vector coefficient will be described. Although the target position Phm is not included in the quadrangle of the correction position, if the triangle is expanded with reference to a triangular point Phg composed of Phg, Ph1, and Ph2, Phm is included in the expanded triangle. Therefore, Vhm can be expressed by using Vh1 and Vh2, and the vector coefficient calculation method is the same as that in FIG. 7A with the equations (11) and (12) of the correction position of FIG. The center of gravity of the quadrangle is obtained, and the corrected position vector coefficients Kh1 and Kh2 are obtained by expressing Vhm as Vh1 and Vh2 using equations (13) to (17) using a vector based on the center of gravity.

  The correction data calculation process will be described. FIG. 18B shows correction data corresponding to the correction positions and the four machining positions in FIG. 18A and four command positions. The center of gravity of the quadrangle of the correction data in FIG. 18B is obtained by Expressions (18) and (19), and Vdm is calculated as Vd1 and Vd2 by Expression (20) using a vector based on the position of the center of gravity. Expressed by corrected position vector coefficients Kh1 and Kh2, the coordinates of the command position Pdm are calculated by substituting equations (16) and (17).

  FIG. 19 shows a flowchart of a command position creation process outside the correction data range. Steps 1 to 3 are the same as those in FIG.

  In step 4, it is checked whether or not four correction positions surrounding the target position are obtained in the area search in step 3. If four correction positions are obtained (（K), the process proceeds to step 6. If not (NG), go to Step 5.

  In step 5, four correction positions constituting a quadrangle adjacent to the target position are searched.

  Step 6 to step 11 are the same as the processing contents from step to step 9 in FIG.

  The operation of the processing machine is the same as that of the first embodiment in both the correction data creation operation and the command position creation operation.

  As described above, the positional relationship between the correction position for which correction data is to be created and the four processing positions surrounding the correction position is expressed by a vector and a vector coefficient based on the center of gravity of a quadrangle consisting of the four processing positions, Since correction data is generated by applying the vector coefficient to the corresponding four command position vectors, high-precision correction data can be generated by simple vector calculation without approximation or omission in calculation processing. Moreover, since only simple vector calculation is performed, high-speed correction data can be created with a short processing time. Further, even when the four processing positions surrounding the correction position cannot be obtained, correction data can be created from the data of the four adjacent processing positions, so that even an optical system having a characteristic that the processing position contracts more than the command position Correction data can be created at the correction position, and stable correction data can be created without being affected by the characteristics of the optical system.

Similarly, the positional relationship between the target position for which the command position is to be created and the four correction positions surrounding the target position is represented by a vector based on the center of gravity of a quadrangle consisting of the four correction positions. Since the command position is generated by applying the vector coefficient to the correction data, a highly accurate command position can be generated by simple vector calculation without approximation or omission in the calculation process. Moreover, since only a simple vector calculation is performed, a high-speed command position can be created with a short processing time. Furthermore, even if an area in which no correction data is created is set as a target position, a command position can be created from the correction data of four adjacent points that have been created, and the scanning range of the galvano device can be expanded.
(Embodiment 4)
Embodiment 4 of the present invention will be described.

  FIG. 20 is a diagram showing a configuration of the optical positioning unit 13. A processing position 3-point gravity center calculation unit 37 and a command position 3-point gravity center calculation unit 38 are added to the correction data creation unit 14 of the optical positioning unit 13 in FIG. A correction position three-point centroid calculating unit 39 and a correction data three-point centroid calculating unit 40 are added to the unit 16.

  The machining position three-point centroid calculating unit 37 selects the remaining three points when one machining position cannot be obtained due to a detection error among the four machining positions surrounding the correction position by the machining position area searching unit 24. The machining position data is input, the center of gravity position is calculated and output.

  The command position 3-point gravity center calculator 38 receives the command positions corresponding to the three machining positions of the machining position 3-point gravity center calculator 37, calculates the gravity center position, and outputs it.

  When the correction position area search unit 30 cannot obtain one correction data point corresponding to the correction position among the four correction positions surrounding the target position by the correction position area search unit 30, the remaining three points are corrected. The correction position is input, the center of gravity position is calculated and output.

  The correction data three-point centroid calculating unit 40 inputs correction data corresponding to the three correction positions of the correction position three-point centroid calculating unit 39, calculates the centroid position, and outputs it.

  Other configurations are the same as those in FIG.

  The correction data creation process will be described. When the correction data is created, a quadrangle that is processed into a normal grid and configured with four processing positions is used as described in the above-described embodiment.

  However, because the hole processed with the laser beam is imaged with the camera and the position of the processed hole is detected, the shape and size of the processed hole varies due to the power fluctuation of the laser beam and the non-uniformity of the workpiece to be processed, etc. Furthermore, when the processing waste is in the vicinity of the processing hole, a detection error may occur, such as the position detection by the camera being impossible.

  For example, when a 50 mm square area is machined at a 2 mm pitch, the position of 676 machining holes must be detected.

  Therefore, a correction data creation method for creating correction data even when a detection error occurs in the position detection of the machining hole will be described.

  A method for calculating the machining position vector coefficient will be described. FIG. 21 shows a vector diagram for creating correction data with three machining position data. The reference numerals in FIG. 21 are the same as those in FIG. Pf2, Pf3, and Pf4 in FIG. 21A are the machining positions of the machining holes that have been correctly detected among the four machining positions surrounding the correction position Pfh. Pf1 is originally a machining hole with no machining position data because the machining position should be at the position in FIG. 21A but the position could not be detected correctly.

First, a vector coefficient calculation method will be described. Since there is no Pf1, the vector coefficient is calculated with a triangle composed of Pf2, Pf3, and Pf4. Assuming that the coordinates of Pf2 are (xf2, yf2), the coordinates of Pf3 are (xf3, yf3), and the coordinates of Pf4 are (xf4, yf4), the coordinates (xfg, yfg) of the center of gravity position Pfg are expressed by equations (21), ( 22).
xfg = (xf2 + xf3 + xf4) / 3 (21)
yfg = (yf2 + yf3 + yf4) / 3 (22)
Vf2, Vf3, Vf4, and Vfh are vectors to Pf2, Pf3, Pf4, and Pfh starting from the center of gravity. In FIG. 21A, the correction position Pfh exists in a triangle having Pfg, Pf2, and Pf4 as vertices, so Vfh can be expressed by Vf2 and Vf4. Vfh is a combined vector of Vfh2 and Vfh4. Assuming the machining position vector coefficients Kf2 and Kf4, Vfh2 and Vfh4 can be expressed by equations (23) and (24).
Vfh2 = Kf2 × Vf2 (23)
Vfh4 = Kf4 × Vf4 (24)
Therefore, Vfh is expressed by equation (25).
Vfh = Vfh2 + Vfh4 = Kf2 × Vf2 + Kf4 × Vf4 (25)
As described above, the correction position Pfh can be expressed by vectors Vf2 and Vf4 of two machining positions based on the center of gravity position Pfg and machining position vector coefficients Kf2 and Kf4 as in Expression (25).

When the component of the vector Vfh is (Vfhx, Vfhy), the component of the vector Vf2 is (Vf2x, Vf2y), the component of the vector Vf4 is (Vf4x, Vf4y), and the machining position vector coefficients Kf2, Kf4 are obtained from the equation (25), Expressions (26) and (27) are obtained.
Kf2 = (Vfhx × Vf4y−Vf4x × Vfhy) / (Vf2x × Vf4y−Vf4x × Vf2y) (26)
Kf4 = (Vf2x * Vfhy-Vfhx * Vf2y) / (Vf2x * Vf4y-Vf4x * Vf2y) (27)
As described above, the processing position vector coefficients Kf2 and Kf4 can be calculated from the correction position and the coordinates of the three processing positions surrounding the correction position.

Next, a correction data calculation method will be described. FIG. 21B is a diagram showing correction data corresponding to the correction positions and the four machining positions in FIG. 21A and four command positions. However, since there is no corresponding machining position data for Pc1, correction data is calculated using a triangle composed of Pf2, Pf3, and Pf4. Pch is correction data, and Pc2, Pc3, and Pc4 are command positions corresponding to the four machining positions in FIG.
Pcg is the position of the center of gravity of a triangle having apexes at three command positions. Assuming that the coordinates of Pc2 are (xc2, yc2), the coordinates of Pc3 are (xc3, yc3), and the coordinates of Pc4 are (xc4, yc4), the coordinates (xcg, ycg) of the center of gravity Pcg are expressed by equations (28), ( 29).
xcg = (xc2 + xc3 + xc4) / 3 (28)
ycg = (yc2 + yc3 + yc4) / 3 (29)
Vc2, Vc3, Vc4, and Vch are vectors to Pc2, Pc3, Pc4, and Pch starting from the center of gravity Pcg. In FIG. 21A and FIG. 21B, although the triangular shape differs depending on the distortion of the optical system, the relative positional relationship between the points is the same. Therefore, the equation (25) obtained in FIG. ) Holds in the corresponding vector in FIG. Since Vch, Vc2, Vc4, Vch2, and Vch4 correspond to Vfh, Vf2, Vf4, Vfh2, and Vfh4, Equation (30) is obtained.
Vch = Vch2 + Vch4 = Kf2 × Vc2 + Kf4 × Vc4 (30)
Therefore, the vector Vch can be represented by the vectors Vc2 and Vc4 at the two machining positions based on the center of gravity position Pcg and the machining position vector coefficients Kf2 and Kf4 from the equation (30). Substituting Equations (26) and (27), the Pch coordinates (xch, ych) can be calculated.

  The calculated correction data is stored in the correction data storage unit in a table data format in correspondence with the correction position as shown in FIG.

  FIG. 22 shows a flowchart of correction data creation processing with three machining position data. Steps 1 to 5 are the same as those in FIG.

  In step 6, the number of machining position data obtained from the machining position area search in step 5 is checked.

  In the case of four points, step 7 proceeds to machining position centroid calculation, and step 8 proceeds to command position centroid calculation.

  In the case of three points, the process proceeds to step 7 for calculating the center of gravity of the machining position and step 8 for calculating the center of gravity of the three points of command position.

  Step 9 to step 12 are the same as the processing contents from step 8 to step 11 in FIG.

  Next, details of the position command generation process will be described. FIG. 23 shows a vector diagram for creating a command position with three points of correction data. The reference numerals in FIG. 23 are the same as those in FIG. Ph2, Ph3, and Ph4 in FIG. 23A are correction positions in which correct correction data is stored among the four machining positions surrounding the target position Phm.

  Ph1 is supposed to have a correction position at the position in the drawing, but it is a correction position without correction data because correct correction data could not be created.

First, a method for calculating the corrected position vector coefficient will be described. Since there is no Ph1, the vector coefficient is calculated with a triangle composed of Ph2, Ph3 and Ph4. Assuming that the coordinates of Ph2 are (xh2, yh2), the coordinates of Ph3 are (xh3, yh3), and the coordinates of Ph4 are (xh4, yh4), the coordinates (xhg, yhg) of the center of gravity position Phg are expressed by equations (31), ( 32).
xhg = (xh2 + xh3 + xh4) / 3 (31)
yhg = (yh2 + yh3 + yh4) / 3 (32)
Vh2, Vh3, Vh4, and Vhm are vectors to Ph2, Ph3, Ph4, and Phm starting from the center of gravity. In FIG. 23A, since the correction position Pcm exists in a triangle having Phg, Ph3, and Ph4 as vertices, Vhm can be expressed by Vh3 and Vh4. Vhm is a combined vector of Vhm3 and Vhm4. Assuming that the corrected position vector coefficients are Kh3 and Kh4, Vhm3 and Vhm4 can be expressed by equations (33) and (34).
Vhm3 = Kh3 × Vh3 (33)
Vhm4 = Kh4 × Vh4 (34)
Therefore, Vhm is expressed by Expression (35).
Vhm = Vhm3 + Vhm4 = Kh3 × Vh3 + Kh4 × Vh4 (35)
Thus, the target position Pfh can be expressed by vectors Vh3 and Vh3 of two machining positions based on the center of gravity position Phg and corrected position vector coefficients Kh3 and Kh4 as shown in Expression (35).

When the components of the vector Vhm are (Vhmx, Vhmy), the components of the vector Vh3 are (Vh3x, Vh3y), the components of the vector Vh4 are (Vh4x, Vh4y), and the corrected position vector coefficients Kh1, Kh2 are obtained from the equation (35), Expressions (36) and (37) are obtained.
Kh1 = (Vhmx × Vh4y−Vh4x × Vhmy) / (Vh3x × Vh4y−Vh4x × Vh3y) (36)
Kh2 = (Vh3x * Vhmy-Vhmx * Vh4y) / (Vh3x * Vh4y-Vh4x * Vh3y) (37)
As described above, the correction position vector coefficients Kh3 and Kh4 can be calculated from the target position and the coordinates of the three correction positions surrounding the target position.

Next, a method for calculating the command position will be described. FIG. 23B is a diagram showing a command position corresponding to the target position and the four correction positions in FIG. 23A and four points of correction data. However, since Pd1 has no correction data, the command position is calculated using a triangle composed of Pd2, Pd3, and Pd4. Pdm is command position data, and Pd2, Pd3, and Pd4 are command positions corresponding to the three machining positions in FIG. Pdg is the position of the center of gravity of the triangle with the three points of correction data as vertices. Assuming that the coordinates of Pd2 are (xd2, yd2), the coordinates of Pd3 are (xd3, yd3), and the coordinates of Pd4 are (xd4, yd4), the coordinates (xdg, ydg) of the center of gravity Pdg are expressed by equations (38), ( 39).
xdg = (xd2 + xd3 + xd4) / 3 (38)
ydg = (yd2 + yd3 + yd4) / 3 (39)
Vd2, Vd3, Vd4, and Vdm are vectors to Pd2, Pd3, Pd4, and Pdm starting from the center of gravity Pdg. In FIG. 23A and FIG. 23B, although the triangular shape differs depending on the distortion of the optical system, the relative positional relationship between the points is the same. Therefore, the equation (35) obtained in FIG. ) Also holds a corresponding vector in FIG. Since Vdm, Vd3, Vd4, Vdm3, and Vdm4 correspond to Vhm, Vh3, Vh4, Vhm3, and Vhm4, Equation (40) is obtained.
Vdm = Vdm3 + Vdm4 = Kd3 × Vd3 + Kd4 × Vd4 (40)
Therefore, the vector Vdm can be represented by the vectors Vd3 and Vd4 of the two correction data based on the center of gravity position Pdg and the correction position vector coefficients Kh3 and Kh4 from Equation (40). By substituting the equations (36) and (37), the coordinates (xdm, ydm) of Pdm can be calculated.

  FIG. 24 shows a flowchart of the command position creation process with the three machining position data. Steps 1 to 3 are the same as those in FIG. In step 4, the number of correction position data obtained in the area search in step 3 is checked.

  In the case of four points, step 5 proceeds to correction position centroid calculation, and step 6 proceeds to correction data centroid calculation.

  In the case of three points, the step 5 proceeds to the correction position three-point centroid calculation, and the step 6 proceeds to the correction data three-point centroid calculation.

Step 7 to step 10 are the same as the processing contents from step 6 to step 9 in FIG.

  The operation of the processing machine is the same as that of the first embodiment in both the correction data creation operation and the command position creation operation.

  As described above, the positional relationship between the correction position for which correction data is to be created and the four machining positions surrounding the correction position is expressed by a vector based on the center of gravity of a quadrangle consisting of the four machining positions. When creating correction data by applying the vector coefficient to the command position of a point, even if one of the four machining positions surrounding the correction position is missing due to a machining hole detection error, etc., only a simple vector calculation is performed Since correction data can be created with high accuracy and high speed, machining position data including detection errors can be used, and the number of correction data creations can be reduced.

  Similarly, the positional relationship between the target position for which the command position is to be created and the four correction positions surrounding the target position is represented by a vector based on the center of gravity of a quadrangle consisting of the four correction positions. When creating the command position by applying the vector coefficient to the correction data, the command position can be created with high precision and high speed by simple vector calculation even if there is no one of the four correction data surrounding the target position. Therefore, correction data creation including error data can be used, and the number of correction data creation times can be reduced.

  According to the present invention, high-accuracy correction data can be created, and a high-precision command position can be created using the correction data. An optical positioning device and an optical positioning incorporated in a laser processing apparatus, an image inspection apparatus, or the like. This method is useful for a method, a laser processing apparatus using the method, and a laser processing method.

The block diagram of the laser processing apparatus for printed circuit boards in the 1st Embodiment of this invention The block diagram of the optical positioning part of the 1st Embodiment of this invention Distribution diagram of drilled holes when creating the first correction data Vector diagram of first correction data creation Figure of correction data storage First correction data creation process flowchart Vector diagram of command position creation using first correction data Flow chart of command position creation process using first correction data The block diagram of the optical positioning part of the 2nd Embodiment of this invention Distribution diagram of drilled holes when creating correction data for the second and subsequent times Vector diagram for creating correction data for the second and subsequent times Flow chart of correction data creation processing for the second and subsequent times Vector diagram of command position creation using the second and subsequent correction data The block diagram of the optical positioning part of the 3rd Embodiment of this invention Distribution diagram of machining holes when creating correction data at shrinking machining positions Vector diagram for creating correction data for correction positions outside the machining position range Flow chart for creating correction data outside the machining position range Vector diagram of command position creation outside the correction data range Flowchart of command position creation processing outside correction data range The block diagram of the optical positioning part of the 4th Embodiment of this invention Vector diagram of correction data creation with 3 machining position data Flowchart of correction data creation process with 3 points of machining position data Vector diagram of command position creation with 3 points of correction data Flow chart of command position creation processing with 3 points of machining position data Overview of printed circuit board laser processing equipment Optical system distortion diagram Conventional correction data creation diagram

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Input part 2 Control part 3 Laser oscillation part 4 Processing table part 5 Galvano scanner part 6 Camera part 7 Main control part 8 Laser control part 9 Processing table control part 10 Galvano control part 11 Position detection part 12 Sequence part 13 Optical positioning part 14 Correction data generation unit 15 Correction data storage unit 16 Command position generation unit 20 Position data storage unit 21 Correction position data 22 Command position data 23 Processing position data 24 Processing position area search unit 25 Processing position barycenter calculation unit 26 Command position barycenter calculation unit 27 Processing position vector coefficient calculation unit 28 Correction data calculation unit 29 Target position storage unit 30 Correction position area search unit 31 Correction position centroid calculation unit 32 Correction data centroid calculation unit 33 Correction position vector coefficient calculation unit 34 Command position calculation unit 35 Processing Position adjacent area search unit 36 Correction position adjacent area search unit 37 Three machining positions Center-of-gravity calculation unit 38 Command position 3-point center-of-gravity calculation unit 39 Correction position 3-point center-of-gravity calculation unit 40 Correction data 3-point center of gravity calculation unit 101 Control device 102 Laser oscillator 103 Laser light 104 Galvano device 105 fθ lens 106 Processing table 107 Camera 108 Printed circuit board

Claims (20)

An optical scanning unit that positions the optical path at least two-dimensionally, and a position detection unit that detects the position of the optical path positioned by the optical scanning unit, and correction for positional deviation of the optical scanning unit in terms of geometric or optical path A correction data generation unit for generating data; a correction data storage unit for storing correction data; a command position indicating the vertex of the polygon of the optical scanning unit constituting a polygon including the correction position; and the command position The position calculated from the detected position of the vertex constituting the polygon corresponding to the position of the correction position based on the center of gravity position of the polygon constituted by the command position, and calculated to the polygon constituted by the command position An optical positioning device that creates correction data corresponding to information and stores the correction data. An optical scanning unit that positions the optical path at least two-dimensionally; a correction data storage unit that stores correction data for a positional deviation of the optical scanning unit in terms of geometric or optical path; and optical scanning from the correction data and the target position A command position creation unit that creates a command position that corrects the displacement of the geometrical or optical path of the part is provided, and it corresponds to the target position, the correction position that forms a polygon that includes the target position, and the correction position From the correction data to be calculated, the position information of the target position is calculated based on the gravity center position of the polygon composed of the correction position, and the command position is created by associating the calculated position information with the polygon composed of the correction data. Optical positioning device. An optical scanning unit that two-dimensionally positions the optical path, and a position detection unit that detects a position of the optical path positioned by the optical scanning unit, and correction data for a positional deviation of the optical scanning unit in terms of geometric or optical path A correction data creation unit for creating a correction data, a correction data storage unit for storing correction data, and a command for creating a command position by correcting a positional deviation of a geometric or optical optical path of the optical scanning unit from the correction data and a target position A position creation unit is provided, from the correction position, the command position indicating the vertex of the polygon of the optical scanning unit constituting the polygon containing the correction position, and the detection position indicating the vertex of the polygon corresponding to the command position The position information of the correction position is calculated based on the position of the center of gravity of the polygon composed of the command position, and the correction data is created by associating the position information calculated for the polygon composed of the command position. The position information of the target position is stored with reference to the center of gravity of the polygon formed by the correction position from the target position, the correction position constituting the polygon containing the target position, and the correction data corresponding to the correction position. An optical positioning device that creates a command position by associating the calculated position information with a polygon constituted by correction data. The optical scanning unit is positioned using the command position created by the command position creation unit, and correction data is created and stored by the correction data creation unit from the detected position of the position detection unit and the command position at that time. 3. The optical positioning device according to 3. 4. The optical positioning device according to claim 3, wherein the command position is created by the command position creation unit from the correction data and the target position. When the polygon of the detection position that includes the correction position cannot be obtained, the correction data using the detection position indicating the vertex of the polygon that forms the neighboring polygon and the command position that forms the corresponding polygon The optical positioning device according to any one of claims 1, 3, and 4. When the polygon of the correction position that includes the target position cannot be obtained, the command position using the correction position that indicates the vertex of the polygon that forms the neighboring polygon and the correction position that forms the corresponding polygon The optical positioning device according to claim 2, which creates data. If the detection position of one vertex cannot be obtained in the polygon at the detection position, correction data is created with position information based on the centroid position of the polygon having fewer vertices than the polygon constituted by the remaining vertices. The optical positioning device according to any one of claims 1, 3, 4, and 6. When the correction position of one vertex cannot be obtained in the polygon at the correction position, the command position is calculated with position information based on the gravity center position of the polygon having fewer vertices than the polygon constituted by the remaining vertices. The optical positioning device according to any one of claims 2, 3, 5, and 7. A laser processing apparatus comprising: a laser device that outputs laser light; the optical positioning device according to claim 1 that performs positioning by receiving the laser light; and a holding unit that holds a workpiece. A command position indicating an apex of the polygon of the optical scanning unit that forms a polygon including a correction position by positioning the optical path at least two-dimensionally by the optical scanning unit, detecting the position of the optical path positioned by the position detection unit The position information of the correction position is calculated from the detected positions of the vertices constituting the polygon corresponding to the command position with reference to the gravity center position of the polygon formed by the command position, and An optical positioning method in which correction data is created by associating position information calculated into a square, and a command position is corrected based on the correction data. As a method for positioning the optical path in the optical scanning unit at least two-dimensionally and obtaining correction data for the positional deviation of the geometrical or optical optical path of the optical scanning unit, a target position and a polygon including the target position are configured. The position information of the target position is calculated from the correction position corresponding to the correction position and the correction data corresponding to the correction position with reference to the gravity center position of the polygon formed by the correction position, and calculated to the polygon formed by the correction data. An optical positioning method in which a command position is created and positioned in correspondence with the position information. The optical path is positioned two-dimensionally by the optical scanning unit, the position of the optical path positioned by the optical scanning unit is detected by the position detection unit, and correction data for the positional deviation of the geometric or optical optical path of the optical scanning unit is obtained. As a method of creating, from the correction position, the command position indicating the vertex of the polygon of the optical scanning unit constituting the polygon containing the correction position, and the detection position indicating the vertex of the polygon corresponding to the command position, The position information of the correction position is calculated on the basis of the gravity center position of the polygon constituted by the command position, the correction data is created by associating the position information calculated by the polygon constituted by the command position, and the correction data and A command position is created by correcting the positional deviation of the optical scanning unit's geometrical or optical optical path from the target position, and the target position, the correction position forming a polygon that includes the target position, and the correction position Correction data Then, the position information of the target position is calculated based on the center of gravity position of the polygon constituted by the correction position, and the command position is created and positioned by associating the calculated position information with the polygon constituted by the correction data. Optical positioning method. The optical scanning unit is positioned using the command position created by the command position creation unit, and correction data is created and stored by the correction data creation unit from the detected position of the position detection unit and the command position at that time. 14. The optical positioning method according to 13. The optical positioning method according to claim 14, wherein the command position is created by the command position creation unit from the correction data and the target position. When the polygon of the detection position that includes the correction position cannot be obtained, the correction data using the detection position indicating the vertex of the polygon that forms the neighboring polygon and the command position that forms the corresponding polygon The optical positioning method according to any one of claims 11, 13, and 14. When the polygon of the correction position that includes the target position cannot be obtained, the command position using the correction position that indicates the vertex of the polygon that forms the neighboring polygon and the correction position that forms the corresponding polygon The optical positioning method according to claim 12, wherein data is created. If the detection position of one vertex cannot be obtained in the polygon of the detection position, correction data is created with position information based on the centroid position of the polygon having fewer vertices than the polygon constituted by the remaining vertices. The optical positioning method according to claim 11, 13, 14, or 16. When the correction position of one vertex cannot be obtained in the polygon at the correction position, the command position is calculated with position information based on the gravity center position of the polygon having fewer vertices than the polygon constituted by the remaining vertices. The optical positioning method according to claim 12, 13, 15, or 17. A laser processing method for processing a workpiece by outputting a laser beam from a laser device, performing positioning by receiving the laser beam by the optical positioning method according to claim 11.